A conveyorized metal surface plasma surface activation treatment machine

Abstract

The application discloses a conveyor belt type metal surface plasma surface activation treatment machine and relates to the technical field of activation treatment equipment, aiming to solve the problems of low efficiency and poor uniformity of metal surface activation treatment in the prior art, and comprising a main frame, a plasma generation system, a conveying system, a gas distribution system and a control system; the main frame is a cuboid structure formed by splicing aluminum profiles, and adjustable rubber foot rings for horizontal adjustment and shock absorption are further installed at the bottom; the plasma generation system comprises an intermediate frequency power supply module, an inductive coupling electrode module and a multi-nozzle array jet mechanism, the output power of the intermediate frequency power supply module is continuously adjustable at 800W-3000W, the inductive coupling electrode module adopts a brass electrode plated with silver, and the inductive coupling electrode module and the multi-nozzle array jet mechanism are designed in an integrated manner. The application has the advantages of improving the plasma surface activation effect and efficiency of the metal surface.

Description

Technical Field

[0001] This invention relates to the field of activation treatment equipment technology, and more specifically, to a conveyor belt type metal surface plasma surface activation treatment machine. Background Technology

[0002] Metal surface activation treatment is a key process to improve the adhesion of subsequent processes such as coating, spraying, welding and bonding. At present, the industry mainly adopts two technical routes: vacuum plasma treatment and atmospheric pressure plasma treatment.

[0003] While vacuum plasma treatment equipment offers good processing results, it requires batch processing within a sealed vacuum chamber, making it unsuitable for continuous production lines. This results in low production efficiency, high equipment costs, and complex maintenance. Existing atmospheric pressure plasma treatment equipment often uses conveyor belts made of ordinary rubber or PVC, which suffer from poor high-temperature resistance, susceptibility to corrosion from corrosive gases generated by the plasma reaction, and easy adhesion of metal workpieces and reaction residues to the surface. These issues not only scratch the workpiece surface but also lead to short conveyor belt lifespan and frequent equipment downtime for maintenance. Therefore, we propose a conveyor belt-type metal surface plasma surface activation treatment machine. Summary of the Invention

[0004] The purpose of this invention is to provide a conveyor belt type metal surface plasma surface activation treatment machine, which aims to solve the problems of low efficiency and poor uniformity in the existing metal surface activation treatment.

[0005] To solve the above-mentioned technical problems, the present invention provides the following technical solution: a conveyor belt type metal surface plasma surface activation treatment machine, comprising a main frame, a plasma generation system, a conveying system, a gas distribution system and a control system;

[0006] The main frame is a cuboid structure made of aluminum profiles, and the bottom is also equipped with adjustable rubber feet for leveling and shock absorption.

[0007] The plasma generation system includes a medium-frequency power supply module, an inductively coupled electrode module, and a multi-nozzle array jet mechanism. The output power of the medium-frequency power supply module is continuously adjustable from 800W to 3000W. The inductively coupled electrode module uses silver-plated brass electrodes, and the inductively coupled electrode module and the multi-nozzle array jet mechanism are integrated into one design. The multi-nozzle array jet mechanism uses a quartz multi-nozzle array structure, which can be adjusted vertically with an adjustment range of 5-30mm.

[0008] The conveying system includes a Teflon-coated annular conveyor belt, which is equipped with a drive mechanism, a tensioning mechanism, and a guiding mechanism. The drive mechanism uses a variable frequency speed reducer motor with adjustable speed to drive the annular conveyor belt to rotate at a constant speed. The tensioning mechanism uses a screw adjustment to adjust the tension of the annular conveyor belt in real time. The guiding mechanism uses stainless steel guide wheels installed on both sides of the annular conveyor belt to limit its deviation.

[0009] The gas distribution system is connected to the multi-nozzle array jet mechanism and is used to deliver a mixed working gas of argon and oxygen.

[0010] The control system is also electrically connected to the plasma generation system, the delivery system, and the gas distribution system.

[0011] Preferably, the width of the annular conveyor belt is 300-800mm, the thickness is 0.8-1.2mm, and its joints are stitched with Kevlar thread and the edges are chamfered. The installation height of the annular conveyor belt is 700mm, and the total length is 1500-2000mm. The length of the activation zone is 500-800mm, and the dwell time of the workpiece in the activation zone is 1-30s.

[0012] Preferably, the nozzle orifice diameter of the multi-nozzle array jet mechanism is 1.5 mm, the spacing is 12 mm, the processing width is 100-1000 mm, and the plasma generation system generates a plasma density of 10. 10 -10 12 cm -3 .

[0013] Preferably, the gas distribution system regulates the gas flow rate through a mass flow controller, with a flow rate range of 50-500 sccm. In the mixed working gas, the mixing ratio of argon to oxygen is 9:1-7:3, and the gas pressure is 0.5-0.6 MPa.

[0014] Preferably, the intermediate frequency power supply module consists of an intermediate frequency generator, a power amplifier and an impedance matching device, and adopts a forced air cooling method. When the output power is ≥2000W, water cooling is added.

[0015] Preferably, it also includes a left-right translation actuator, which uses a synchronous slide to realize the left-right movement and translation of the plasma generation system.

[0016] Preferably, the control system includes a frequency converter and integrates a touch screen human-machine interaction unit, a multi-dimensional parameter acquisition module, a graded fault alarm module, a full life cycle data recording module, and an interlocking safety protection module;

[0017] The frequency converter is electrically connected to the plasma generation system, the conveying system, the gas distribution system, and the left and right translation actuators, realizing stepless speed regulation and start-stop linkage control of each system and mechanism, and has six protection functions: overcurrent, overload, overvoltage, undervoltage, phase loss, and stall.

[0018] The multi-dimensional parameter acquisition module is used to collect equipment operating parameters in real time and transmit them to the touch screen human-machine interaction unit for intuitive display.

[0019] The graded fault alarm module has a built-in fault code library, supports two levels of alarm information output: early warning level and shutdown level, and provides audible and visual warnings when an alarm is triggered.

[0020] The full lifecycle data recording module is used to store equipment operating parameters, workpiece processing quantity, and alarm information in real time.

[0021] The interlocked safety protection module is electrically interlocked with the plasma generation system, the delivery system, the gas distribution system, and the left and right translation actuators to achieve multi-condition triggered graded shutdown protection.

[0022] Preferably, the operating parameters of the equipment include the output power, intermediate frequency, impedance matching value, left and right translation position and speed of the plasma generation system, the individual flow rate and mixing ratio of argon and oxygen, the temperature of the activation zone, the temperature of the intermediate frequency power module, and the running speed and tension of the annular conveyor belt.

[0023] Preferably, the rule for the graded shutdown protection is as follows:

[0024] High-voltage interlock: The plasma generation system must not be started if the protective cover and maintenance door of the work area are not completely closed, and the plasma generation system must be stopped immediately if it is already started.

[0025] Gas interlock: When the pressure and flow rate of the mixed working gas are lower than the set value, the plasma generation system is prohibited from starting. If the plasma generation system is already running, the gas distribution system should be shut down immediately before the plasma generation system is shut down.

[0026] Temperature interlock: When the temperature of the inductively coupled electrode module exceeds 85°C, the power is reduced to 50% of the rated value and the machine is shut down immediately when the temperature exceeds 95°C. When the temperature of the medium frequency power supply module exceeds 75°C, forced air cooling or water cooling is activated and the machine is shut down immediately when the temperature exceeds 85°C.

[0027] Conveying Interlock: If the deviation of the circular conveyor belt exceeds the set value or a jam occurs, the conveying system and plasma generation system shall be stopped immediately.

[0028] Compared with the prior art, the beneficial effects of the present invention are:

[0029] 1. The present invention uses a Teflon-coated annular conveyor belt, which fully utilizes its properties of high temperature resistance, corrosion resistance, non-sticking, wear resistance and insulation, and solves the problem of easy scratching and sticking of metal workpieces during the conveying process. The joint of the annular conveyor belt adopts Kevlar stitching process, which avoids the problem of edge separation of steel buckle joints, extends the service life of the conveyor belt and reduces equipment maintenance costs.

[0030] 2. In this invention, a medium-frequency power supply is used in combination with an inductively coupled electrode module made of silver-plated brass. The plasma generation is stable and has high energy density, which can efficiently remove the oxide layer and oil stains on the metal surface. The multi-nozzle array jet mechanism, together with the left and right translation actuator, realizes uniform processing of wide workpieces, eliminates activation dead zones, and improves the consistency of batch processing.

[0031] 3. The control system in this invention is based on a frequency converter, integrates multiple intelligent functions, has high parameter control accuracy, and has complete fault diagnosis and data traceability capabilities. At the same time, it is equipped with multiple safety interlocking mechanisms, which improves the stability and safety of equipment operation.

[0032] 4. This invention adopts a continuous conveyor belt conveying mode, with precise adjustment of conveying speed and processing time, realizing fully automated operation, improving production efficiency, and adapting to the needs of large-scale production. Attached Figure Description

[0033] Figure 1 This is a schematic diagram of the structure of the present invention;

[0034] Figure 2 This is a schematic diagram of the control system of the present invention;

[0035] Figure 3 This is a schematic diagram of the internal structure of the box in this invention;

[0036] Figure 4 This is a schematic diagram of the internal architecture of the plasma generation system in this invention.

[0037] Explanation of the labels in the diagram:

[0038] 1. Main frame; 111. Adjustable rubber foot rings; 2. Plasma generation system; 211. Intermediate frequency power supply module; 2111. Intermediate frequency generator; 2112. Power amplifier; 2113. Impedance matching device; 212. Inductively coupled electrode module; 213. Multi-nozzle array jet mechanism; 3. Conveying system; 311. Circular conveyor belt; 312. Drive mechanism; 313. Tensioning mechanism; 314. Guide mechanism; 4. Gas distribution system; 5. Control system; 511. Frequency converter; 512. Touch screen human-machine interaction unit; 513. Multi-dimensional parameter acquisition module; 514. Hierarchical fault alarm module; 515. Full life cycle data recording module; 516. Interlocking safety protection module; 6. Left and right translation actuator. Detailed Implementation

[0039] To address the surface activation requirements of various metal workpieces such as carbon steel, stainless steel, aluminum alloy, and copper alloy, and in conjunction with large-scale continuous production scenarios, the following implementation examples are proposed.

[0040] Example 1: This example provides a conveyor belt type metal surface plasma surface activation treatment machine, including a main frame 1, a plasma generation system 2, a conveying system 3, a gas distribution system 4, and a left and right translation actuator 6.

[0041] In this embodiment, the main frame 1 is a cuboid structure made of aluminum profile splicing, and an adjustable rubber foot ring 111 for horizontal adjustment and shock absorption is also installed at the bottom.

[0042] The plasma generation system 2 includes a medium-frequency power supply module 211, an inductively coupled electrode module 212, and a multi-nozzle array jet mechanism 213. The output power of the medium-frequency power supply module 211 is continuously adjustable from 800W to 3000W. The inductively coupled electrode module 212 uses silver-plated brass electrodes, and the inductively coupled electrode module 212 and the multi-nozzle array jet mechanism 213 are integrated into one design. The multi-nozzle array jet mechanism 213 uses a quartz multi-nozzle array structure, which can be adjusted up and down with an adjustment range of 5-30mm.

[0043] The conveying system 3 includes a Teflon-coated annular conveyor belt 311. The annular conveyor belt 311 is equipped with a drive mechanism 312, a tensioning mechanism 313, and a guide mechanism 314. The drive mechanism 312 uses a variable frequency geared motor with adjustable speed to drive the annular conveyor belt 311 to rotate at a uniform speed. The tensioning mechanism 313 uses a screw adjustment to adjust the tension of the annular conveyor belt 311 in real time. The guide mechanism 314 uses stainless steel guide wheels, which are installed on both sides of the annular conveyor belt 311 to limit the deviation of the annular conveyor belt 311.

[0044] The gas distribution system 4 is connected to the multi-nozzle array jet mechanism 213 and is used to deliver a mixed working gas of argon and oxygen.

[0045] The left and right translation actuator 6 uses a synchronous slide table to realize the left and right movement and translation of the plasma generation system 2.

[0046] In this embodiment, the width of the annular conveyor belt 311 is 300-800mm, the thickness is 0.8-1.2mm, and its joints are stitched with Kevlar thread and the edges are chamfered. The installation height of the annular conveyor belt 311 is 700mm, and the total length is 1500-2000mm. The length of the activation area is 500-800mm, and the dwell time of the workpiece in the activation area is 1-30s.

[0047] The multi-nozzle array jet mechanism 213 has a nozzle orifice diameter of 1.5 mm, a spacing of 12 mm, and a processing width of 100-1000 mm. The plasma generation system 2 generates a plasma density of 10. 10 -10 12 cm -3 .

[0048] The gas distribution system 4 regulates the gas flow rate through a mass flow controller, with a flow rate range of 50-500 sccm. In the mixed working gas, the mixing ratio of argon to oxygen is 9:1-7:3, and the gas pressure is 0.5-0.6 MPa.

[0049] The intermediate frequency power supply module 211 consists of an intermediate frequency generator 2111, a power amplifier 2112 and an impedance matching device 2113, and adopts a forced air cooling method. When the output power is ≥2000W, water cooling is added.

[0050] In this embodiment, the equipment is first leveled and vibration damping is achieved using the adjustable rubber foot rings 111 at the bottom of the main frame 1. Then, based on the size of the metal workpiece to be processed and the surface activation process requirements, the vertical height of the multi-nozzle array jet mechanism 213 is adjusted to a suitable value within the range of 5-30mm. The tensioning mechanism 313 of the screw-adjusted conveyor system 3 is used to ensure the appropriate tension of the Teflon annular conveyor belt 311. Simultaneously, stainless steel guide wheels are used to limit the deviation of the annular conveyor belt 311. Next, the mass flow controller of the gas distribution system 4 sets the argon-oxygen mixing ratio between 9:1 and 7:3, adjusts the gas flow rate to 50-500 sccm, and ensures the gas pressure is stable at 0.5-0.6 MPa. The output power of the intermediate frequency power module 211 is adjusted to the required value within the range of 800W-3000W. If the output power is ≥2000W, water cooling is activated; otherwise, forced air cooling is used. After the preparation work is completed, the drive mechanism 312 is started. A variable frequency geared motor drives the ring conveyor belt 311 to rotate at a set speed. Various metal workpieces to be processed, such as carbon steel, stainless steel, aluminum alloy, and copper alloy, are placed on the ring conveyor belt 311 and transported to the activation area. At the same time, the plasma generation system 2 is started. The medium frequency power module 211 supplies power to the inductively coupled electrode module 212 made of silver-plated brass, generating plasma with a density of 10¹⁰–10¹² cm⁻³. The plasma is formed into a jet by the quartz multi-nozzle array jet mechanism 213 and acts on the surface of the workpiece. The left and right translation actuator 6 drives the plasma generation system 2 to move left and right through the synchronous slide table. With the help of the conveyor belt, the surface of the workpiece is fully activated. The dwell time of the workpiece in the activation area is controlled within the range of 1-30 seconds. After the surface activation treatment of the workpiece is completed, it is transported out of the activation area by the ring conveyor belt 311. The operator removes the processed workpiece, and continuous feeding can realize large-scale continuous production.

[0051] Example 2: Based on Example 1, this example adds a control system 5. The control system 5 is electrically connected to the plasma generation system 2, the delivery system 3, and the gas distribution system 4.

[0052] Specifically, the control system 5 includes a frequency converter 511 and integrates a touch screen human-machine interaction unit 512, a multi-dimensional parameter acquisition module 513, a graded fault alarm module 514, a full life cycle data recording module 515, and an interlocking safety protection module 516.

[0053] The frequency converter 511 is electrically connected to the plasma generation system 2, the conveying system 3, the gas distribution system 4, and the left and right translation actuator 6, realizing stepless speed regulation and start-stop linkage control of each system and mechanism, and has six protection functions: overcurrent, overload, overvoltage, undervoltage, phase loss, and stall.

[0054] The multi-dimensional parameter acquisition module 513 is used to acquire equipment operating parameters in real time and transmit them to the touch screen human-machine interaction unit 512 for intuitive display. Among them, the equipment operating parameters include the output power, intermediate frequency, impedance matching value, left and right translation position and speed of the plasma generation system 2, the individual flow rate and mixing ratio of argon and oxygen, the temperature of the activation zone, the temperature of the intermediate frequency power module 211, and the running speed and tension of the annular conveyor belt 311.

[0055] The graded fault alarm module 514 has a built-in fault code library, supports two levels of alarm information output: early warning level and shutdown level, and provides audible and visual warnings when an alarm is triggered.

[0056] The full lifecycle data recording module 515 is used to store equipment operating parameters, workpiece processing quantity, and alarm information in real time.

[0057] The interlocked safety protection module 516 is electrically interlocked with the plasma generation system 2, the conveying system 3, the gas distribution system 4, and the left and right translation actuator 6 to achieve graded shutdown protection triggered by multiple conditions.

[0058] In this embodiment, the rule for tiered shutdown protection is as follows:

[0059] High-voltage interlock: Plasma generation system 2 is prohibited from starting if the protective cover and maintenance door of the work area are not completely closed, and if plasma generation system 2 is already started, plasma generation system 2 shall be stopped immediately.

[0060] Gas interlock: When the pressure and flow rate of the mixed working gas are lower than the set value, the plasma generation system 2 is prohibited from starting. If the plasma generation system 2 is already started, the gas distribution system 4 will be shut down immediately before the plasma generation system 2 is shut down.

[0061] Temperature interlock: When the temperature of the inductively coupled electrode module 212 exceeds 85°C, the power is reduced to 50% of the rated value and the machine is shut down immediately when the temperature exceeds 95°C. When the temperature of the intermediate frequency power supply module 211 exceeds 75°C, forced air cooling or water cooling is activated and the machine is shut down immediately when the temperature exceeds 85°C.

[0062] Conveying Interlock: When the deviation of the circular conveyor belt 311 exceeds the set value or a jam occurs, the conveying system 3 and the plasma generation system 2 shall be stopped immediately.

[0063] In this embodiment, the device initialization and process parameter preset are first completed through the touch screen human-machine interaction unit 512 of the control system 5. According to the characteristics of the metal workpiece to be processed, the output power of the plasma generation system 2, the intermediate frequency, the moving speed and position of the left and right translation actuator 6, the running speed of the ring conveyor belt 311, the individual flow rate and mixing ratio of argon and oxygen, and the set value of each interlock protection are input. The frequency converter 511 of the control system 5 synchronously sends the parameters to the plasma generation system 2, the conveying system 3, the gas distribution system 4 and the left and right translation actuator 6.

[0064] First, the gas distribution system 4 delivers mixed working gas to the multi-nozzle array jet mechanism 213 according to the set ratio and flow rate. The variable frequency reduction motor of the conveying system 3 drives the annular conveyor belt 311 to rotate at a constant speed. The plasma generation system 2 starts after all interlocking conditions, such as the protective cover and maintenance door of the working area being completely closed and the pressure and flow rate of the mixed working gas meeting the standards, are met. It generates a plasma jet to perform surface activation treatment on the workpieces on the annular conveyor belt 311. During the treatment, the multi-dimensional parameter acquisition module 513 collects the output power, intermediate frequency, impedance matching value, left and right translation position and speed of the plasma generation system 2 in real time, the individual flow rate and mixing ratio of argon and oxygen, the temperature of the activation area, the temperature of the intermediate frequency power module 211, the running speed and tension of the annular conveyor belt 311, and other equipment operation data, and transmits them to the touch screen for intuitive display. The full life cycle data is displayed. According to the recording module 515, the equipment operating parameters, workpiece processing quantity and various alarm information are stored synchronously in real time. If a warning-level fault occurs during operation, the graded fault alarm module 514 issues an audible and visual warning and prompts the corresponding fault code. If a shutdown-level fault occurs, the interlocking safety protection module 516 executes the corresponding graded shutdown protection according to the fault type. For example, when the high-voltage interlock is triggered, the plasma generation system 2 is immediately shut down. When the temperature interlock is triggered, the power is reduced according to the rules before shutdown or shutdown is performed directly. When the gas interlock is triggered, the gas distribution system 4 is shut down first and then the plasma generation system 2 is shut down. When the conveying interlock is triggered, the conveying system 3 and the plasma generation system 2 are shut down simultaneously. After the workpiece has completed the activation treatment and is conveyed out of the activation area by the conveyor belt, the operator removes the finished product. The control system 5 continuously monitors the equipment operating status to ensure the safe and stable operation of large-scale continuous production.

[0065] The embodiments disclosed in this invention are preferred embodiments, but are not limited thereto. Those skilled in the art can easily understand the spirit of this invention based on the above embodiments and make different extensions and variations, but as long as they do not depart from the spirit of this invention, they are all within the protection scope of this invention.

Claims

1. A conveyor belt type metal surface plasma surface activation treatment machine, characterized in that, It includes a main frame (1), a plasma generation system (2), a delivery system (3), a gas distribution system (4), and a control system (5); The main frame (1) is a cuboid structure made of aluminum profile splicing, and the bottom is also equipped with adjustable rubber foot rings (111) for horizontal adjustment and shock absorption. The plasma generation system (2) includes a medium-frequency power supply module (211), an inductively coupled electrode module (212), and a multi-nozzle array jet mechanism (213). The output power of the medium-frequency power supply module (211) is continuously adjustable from 800W to 3000W. The inductively coupled electrode module (212) uses silver-plated brass electrodes. The inductively coupled electrode module (212) and the multi-nozzle array jet mechanism (213) are designed as an integrated unit. The multi-nozzle array jet mechanism (213) uses a quartz multi-nozzle array structure and can be adjusted up and down with an adjustment range of 5-30mm. The conveying system (3) includes a Teflon-coated annular conveyor belt (311). The annular conveyor belt (311) is equipped with a drive mechanism (312), a tensioning mechanism (313), and a guide mechanism (314). The drive mechanism (312) is a variable frequency speed reducer motor with adjustable speed, used to drive the annular conveyor belt (311) to rotate at a constant speed. The tensioning mechanism (313) is a screw adjustment mechanism, used to adjust the tension of the annular conveyor belt (311) in real time. The guide mechanism (314) is a stainless steel guide wheel, installed on both sides of the annular conveyor belt (311), to limit the deviation of the annular conveyor belt (311). The gas distribution system (4) is connected to the multi-nozzle array jet mechanism (213) and is used to transport a mixed working gas of argon and oxygen; The control system (5) is electrically connected to the plasma generation system (2), the delivery system (3), and the gas distribution system (4).

2. The conveyor belt type metal surface plasma surface activation treatment machine according to claim 1, characterized in that, The width of the annular conveyor belt (311) is 300-800mm, the thickness is 0.8-1.2mm, and the joints are stitched with Kevlar thread and the edges are chamfered. The installation height of the annular conveyor belt (311) is 700mm, the total length is 1500-2000mm, the length of the activation area is 500-800mm, and the dwell time of the workpiece in the activation area is 1-30s.

3. The conveyor belt type metal surface plasma surface activation treatment machine according to claim 1, characterized in that, The multi-nozzle array jet mechanism (213) has a nozzle orifice diameter of 1.5 mm, a spacing of 12 mm, and a processing width of 100-1000 mm. The plasma generation system (2) generates a plasma density of 10. 10 -10 12 cm -3 .

4. A conveyor belt type metal surface plasma surface activation treatment machine according to claim 1, characterized in that, The gas distribution system (4) adjusts the gas flow rate through a mass flow controller. The flow rate range is 50-500 sccm. In the mixed working gas, the mixing ratio of argon and oxygen is 9:1-7:3, and the gas pressure is 0.5-0.6 MPa.

5. A conveyor belt type metal surface plasma surface activation treatment machine according to claim 1, characterized in that, The intermediate frequency power supply module (211) consists of an intermediate frequency generator (2111), a power amplifier (2112) and an impedance matching device (2113), and adopts a forced air cooling method. When the output power is ≥2000W, water cooling is added.

6. A conveyor belt type metal surface plasma surface activation treatment machine according to claim 1, characterized in that, It also includes a left-right translation actuator (6), which uses a synchronous slide to realize the left-right movement and translation of the plasma generation system (2).

7. A conveyor belt type metal surface plasma surface activation treatment machine according to claim 6, characterized in that, The control system (5) includes a frequency converter (511) and integrates a touch screen human-machine interaction unit (512), a multi-dimensional parameter acquisition module (513), a graded fault alarm module (514), a full life cycle data recording module (515), and an interlocking safety protection module (516). The frequency converter (511) is electrically connected to the plasma generation system (2), the conveying system (3), the gas distribution system (4), and the left and right translation actuator (6) to realize stepless speed regulation and start-stop linkage control of each system and mechanism, and has six protection functions: overcurrent, overload, overvoltage, undervoltage, phase loss, and stall. The multi-dimensional parameter acquisition module (513) is used to collect equipment operating parameters in real time and transmit them to the touch screen human-machine interaction unit (512) for intuitive display; The graded fault alarm module (514) has a built-in fault code library, supports two levels of alarm information output: early warning level and shutdown level, and provides audible and visual warnings when an alarm is triggered. The full lifecycle data recording module (515) is used to store equipment operating parameters, workpiece processing quantity and alarm information in real time; The interlocked safety protection module (516) is electrically interlocked with the plasma generation system (2), the conveying system (3), the gas distribution system (4), and the left and right translation actuator (6) to realize multi-condition triggered hierarchical shutdown protection.

8. A conveyor belt type metal surface plasma surface activation treatment machine according to claim 7, characterized in that, The operating parameters of the equipment include the output power, intermediate frequency, impedance matching value, left and right translation position and speed of the plasma generation system (2), the individual flow rate and mixing ratio of argon and oxygen, the temperature of the activation zone, the temperature of the intermediate frequency power module (211), and the running speed and tension of the annular conveyor belt (311).

9. A conveyor belt type metal surface plasma surface activation treatment machine according to claim 7, characterized in that, The rules for the graded shutdown protection are as follows: High-voltage interlock: When the protective cover and maintenance door of the work area are not completely closed, the plasma generation system (2) shall not be started. If the plasma generation system (2) is already started, the plasma generation system (2) shall be stopped immediately. Gas interlock: When the pressure and flow rate of the mixed working gas are lower than the set value, the plasma generation system (2) is prohibited from starting. If the plasma generation system (2) is already started, the gas distribution system (4) will be shut down immediately before the plasma generation system (2) is shut down. Temperature interlock: When the temperature of the inductively coupled electrode module (212) exceeds 85°C, the power is reduced to 50% of the rated value and the machine is shut down immediately when the temperature exceeds 95°C. When the temperature of the medium frequency power supply module (211) exceeds 75°C, forced air cooling or water cooling is activated and the machine is shut down immediately when the temperature exceeds 85°C. Conveying Interlock: When the deviation of the ring conveyor belt (311) exceeds the set value or a jam occurs, the conveying system (3) and plasma generation system (2) shall be stopped immediately.

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