Thin dual profile encoder stack mounting structure and joint module applying same

Abstract

The present application relates to a thinning type double special-shaped encoder stack mounting structure and a joint module using the same, and belongs to the technical field of semiconductors. The mounting structure comprises two special-shaped encoders, each of which comprises a special-shaped encoder circuit board and a special-shaped encoder magnetic grid arranged correspondingly. The special-shaped encoder circuit board is in an arc ring structure. The two special-shaped encoders are arranged in an axial direction. The two special-shaped encoder circuit boards are directly stacked in the axial direction and are arranged at a relative rotation angle, so that the solid parts of the two special-shaped encoder circuit boards are circumferentially staggered and do not overlap each other in the axial projection direction, so that the overall axial thickness of the two special-shaped encoder circuit boards is equivalent to the thickness of a single special-shaped encoder circuit board. The present application sets two encoder circuit boards as half rings and axially stacks them in a relative rotation of 180 degrees, so that the overall thickness is equivalent to the thickness of one circuit board, thereby realizing the extreme compression of the axial space.

Description

Technical Field

[0001] This invention belongs to the field of semiconductor technology, and particularly relates to a thinned dual irregular encoder stacking mounting structure and a joint module using the same. Background Technology

[0002] Semiconductor wafer handling robots typically employ servo motor drives, with the motors positioned at the base of the arm or within the lifting column, transmitting torque to the robot's end effector via a synchronous belt. This approach suffers from accuracy errors and vibration interference due to the toothed meshing of the synchronous belt, hindering high-precision wafer handling operations. To improve accuracy and optimize vibration characteristics, iterative designs for direct-drive joints are necessary to reduce transmission chain links. When the robot's end effector requires two independent finger structures, two DD motors and two encoders are needed, placing extremely stringent demands on the internal space of the joints. Achieving ultra-thin stacking of two encoders within a limited space, enabling a dual-DD motor configuration, has become a pressing technical challenge.

[0003] Currently, there are several technical solutions involving dual encoders. For example, stacking the two encoders sequentially along the axial direction with a safety gap, nesting the inner and outer encoders on the same plane and sharing a single circuit board, or integrating two code disks inside a single encoder. These solutions either still occupy a large axial space, or the two encoders are not completely independent, sharing a circuit board or a housing, which cannot meet the stringent requirements of both encoder independence and axial thickness for the dual DD motor direct drive configuration. Summary of the Invention

[0004] To address the shortcomings of existing technologies, this invention provides a thin-film dual-irregular encoder stacking structure and a joint module using it. By setting two encoder circuit boards as semi-circular and stacking them axially with a relative rotation of 180°, the overall thickness is only equivalent to the thickness of one circuit board, thereby achieving extreme compression of axial space.

[0005] A thinner, dual-shaped encoder stacking structure includes:

[0006] Two irregular encoders, each of which includes an irregular encoder circuit board and a corresponding irregular encoder magnetic grid, wherein the irregular encoder circuit board is an arc-shaped ring structure;

[0007] Two irregular encoders are arranged along the axial direction. The two irregular encoder circuit boards are directly stacked in the axial direction and set at a relative rotation angle, so that the solid parts of the two irregular encoder circuit boards are offset in the circumferential direction and do not overlap in the axial projection direction. Thus, the overall axial thickness of the two irregular encoder circuit boards is equal to the thickness of a single irregular encoder circuit board.

[0008] The arc-shaped ring-shaped encoder circuit board occupies an arc segment of less than or equal to 180° in the circumferential direction; the two irregular encoder circuit boards are set at an angle of 180° relative rotation.

[0009] The two irregularly shaped encoder circuit boards are the same size.

[0010] The two irregularly shaped encoder circuit boards are mounted axially or with a gap of no more than 0.5mm.

[0011] Two irregular encoder magnetic gratings are respectively set on the radial inner side of the corresponding irregular encoder circuit board. The two irregular encoder magnetic gratings are also semi-circular, and their arc segment positions are consistent with the arc segment positions of the corresponding irregular encoder circuit board in the circumferential direction.

[0012] A joint module includes a first DD motor, a second DD motor, and the aforementioned thinned dual irregular encoder stacked mounting structure, wherein the thinned dual irregular encoder stacked mounting structure is sandwiched between the first DD motor and the second DD motor.

[0013] The first DD motor is configured to correspond with one of the irregular encoders. The first DD motor includes a first motor rotor and a first motor stator. The irregular encoder magnetic grating of the irregular encoder is fixedly connected to the first motor rotor, and the irregular encoder circuit board of the irregular encoder is fixedly connected to the first motor stator. The second DD motor is configured to correspond with another irregular encoder. The second DD motor includes a second motor rotor and a second motor stator. The irregular encoder magnetic grating of the irregular encoder is fixedly connected to the second motor rotor, and the irregular encoder circuit board of the irregular encoder is fixedly connected to the second motor stator.

[0014] It also includes a first motor rotor fixing component and a first motor stator fixing component. The irregular encoder magnetic grid corresponding to the first DD motor is fixedly connected to the first motor rotor through the first motor rotor fixing component, and the irregular encoder circuit board is fixedly connected to the first motor stator through the first motor stator fixing component. It also includes a second motor rotor fixing component and a second motor stator fixing component. The irregular encoder magnetic grid corresponding to the second DD motor is fixedly connected to the second motor rotor through the second motor rotor fixing component, and the irregular encoder circuit board is fixedly connected to the second motor stator through the second motor stator fixing component.

[0015] The first DD motor and the second DD motor are arranged along the same axis. Two irregular encoders are located between the first DD motor and the second DD motor. The first DD motor and the second DD motor clamp and fix the two irregular encoders from both sides of the axial direction.

[0016] The joint module is used in the end joint of a semiconductor wafer handling robot to achieve a dual DD motor direct drive configuration.

[0017] By employing the above technical solution, the present invention has at least the following beneficial effects:

[0018] This invention eliminates the safety gap between the two circuit boards and the thickness of one circuit board required in traditional structures by stacking them in a semi-circular configuration with 180° relative rotation. This also ensures safe distances between electrical components, avoiding signal interference and breakdown risks. This structure provides feasible installation space for a direct-drive configuration of dual DD motors at the end joint of a robotic arm, meeting the stringent requirements for joint thickness in wafer handling robots. Attached Figure Description

[0019] Figure 1 A schematic diagram of the stacked mounting structure of the thinned dual irregular encoder provided by the present invention;

[0020] Figure 2 This is a schematic diagram of a circular encoder used in conventional stacking methods;

[0021] Figure 3 This is a schematic diagram of a stack of conventional circular encoders;

[0022] Figure 4 This is a schematic diagram of the irregular encoder used in the thinned dual irregular encoder stacking installation structure provided by the present invention;

[0023] Figure 5 A schematic diagram of the joint module with a stacked mounting structure for thinned dual irregular encoders provided by the present invention;

[0024] In the picture:

[0025] 1-3, Second motor rotor fixing component; 1-4, Second motor stator fixing component; 1-5, Second motor rotor; 1-6, Second motor stator; 1-7, Second motor output shaft; 1-8, First motor output shaft; 1-9, First motor stator; 1-10, First motor rotor; 1-11, First motor stator fixing component; 1-12, First motor rotor fixing component; 2-1, Circular encoder; 2-2, Irregular encoder; 3-1, First circular encoder magnetic grating; 3-2, First circular encoder circuit board; 3-3, Second circular encoder circuit board; 3-4, Second circular encoder magnetic grating; 3-5, First irregular encoder magnetic grating; 3-6, First irregular encoder circuit board; 3-7, Second irregular encoder circuit board; 3-8, Second irregular encoder magnetic grating. Detailed Implementation

[0026] To better explain and facilitate understanding of the present invention, the technical solution and effects of the present invention will be described in detail below with reference to the accompanying drawings and specific embodiments.

[0027] Example 1

[0028] Combination Figure 1 As shown, a thin-film dual irregular encoder stacked mounting structure is provided, which uses an irregular encoder. The circuit board part of the irregular encoder is an arc-shaped ring structure, rather than a complete circle.

[0029] like Figures 2-3 As shown, in the conventional method, two circular encoders 2-1 are used. The first circular encoder includes a first circular encoder magnetic grating 3-1 and a first circular encoder circuit board 3-2, and the second circular encoder includes a second circular encoder circuit board 3-3 and a second circular encoder magnetic grating 3-4. The first circular encoder circuit board 3-2 and the second circular encoder circuit board 3-3 are arranged sequentially along the axial direction, and a safety gap must be left between them. This is to prevent physical interference between the electronic components on the circuit boards, avoid mutual interference of electromagnetic signals, and also to prevent breakdown due to insufficient electrical clearance. The existence of this safety gap results in the two encoders occupying a relatively large total height in the axial direction.

[0030] Based on this, the thinned dual irregular encoder stacked mounting structure of this application includes two irregular encoders 2-2: a first irregular encoder and a second irregular encoder, wherein, as shown... Figure 4 As shown, both irregularly shaped encoders employ a semi-circular circuit board structure. The first irregularly shaped encoder includes a first irregularly shaped encoder magnetic grating 3-5 and a corresponding first irregularly shaped encoder circuit board 3-6. The second irregularly shaped encoder includes a second irregularly shaped encoder magnetic grating 3-8 and a corresponding second irregularly shaped encoder circuit board 3-7. The first irregularly shaped encoder circuit board 3-6 and the second irregularly shaped encoder circuit board 3-7 are of the same size and are semi-circular in shape, meaning they occupy a 180° arc segment in the circumferential direction. During assembly, the first irregularly shaped encoder circuit board 3-6 and the second irregularly shaped encoder circuit board 3-7 are arranged with a relative rotation angle of 180°. Specifically, the solid parts of the first irregularly shaped encoder circuit board 3-6 and the second irregularly shaped encoder circuit board 3-7 are offset in the circumferential direction and do not overlap in the axial projection direction. Subsequently, the two circuit boards are directly stacked in the axial direction. The first irregular encoder circuit board 3-6 and the second irregular encoder circuit board 3-7 can be fitted together in the axial direction or have a small gap of no more than 0.5mm. Because they are offset by 180° in the circumferential direction, the electrical components are spatially far apart and no additional insulation layer is required.

[0031] With the above structure, the circuit boards of the two encoders no longer require an axial safety clearance, and the overall thickness is only equivalent to the thickness of one circuit board. This saves two axial spaces compared to the traditional structure: one is the safety clearance that must be reserved between the two circuit boards in the traditional structure, and the other is the thickness of one circuit board. Simultaneously, the magnetic grating portions corresponding to the two semi-annular circuit boards—namely, the first irregular encoder magnetic grating 3-5 and the second irregular encoder magnetic grating 3-8—are arranged at corresponding angles and cooperate with their respective circuit boards. Specifically, the second irregular encoder magnetic grating 3-8 is also semi-annular, and its arc segment position is consistent with the arc segment position of the second irregular encoder circuit board 3-7 in the circumferential direction to ensure accurate correspondence of the detection signal. Since the two circuit boards are offset by 180° in the circumferential direction, the distance between the electrical components meets safety requirements, and component interference or signal interference will not occur.

[0032] In another specific embodiment, a joint module applying the above-described thinned dual irregular encoder stacking mounting structure is provided, such as... Figure 5 As shown, the structure includes a first DD motor, a second DD motor, and the aforementioned thinned dual irregular encoder stacked mounting structure; wherein the first DD motor is located on top, and the second DD motor is located on the bottom. The two DD motors are arranged along the same axis, and the two irregular encoders are sandwiched between the two DD motors.

[0033] The first DD motor includes a first motor output shaft 1-8, a first motor rotor 1-10, a first motor stator 1-9, a first motor rotor fixing member 1-12, and a first motor stator fixing member 1-11. The first motor rotor 1-10 is disposed inside the first motor stator 1-9 and can rotate relative to the first motor stator 1-9. The first motor output shaft 1-8 is fixedly connected to the first motor rotor 1-10 and is used to output the driving force of the first DD motor. One end of the first motor rotor fixing member 1-12 is fixed to the first motor rotor 1-10, and the other end is fixedly connected to the first irregular encoder magnetic grating 3-5, so that the magnetic grating can rotate synchronously with the first motor rotor 1-10. One end of the first motor stator fixing member 1-11 is fixed to the first motor stator 1-9, and the other end is fixedly connected to the first irregular encoder circuit board 3-6, so that the first irregular encoder circuit board 3-6 remains stationary.

[0034] Furthermore, the second DD motor includes a second motor output shaft 1-7, a second motor rotor 1-5, a second motor stator 1-6, a second motor rotor fixing member 1-3, and a second motor stator fixing member 1-4. The second motor rotor 1-5 is disposed inside the second motor stator 1-6. The second motor output shaft 1-7 is fixedly connected to the second motor rotor 1-5. One end of the second motor rotor fixing member 1-3 is fixed to the second motor rotor 1-5, and the other end is fixedly connected to the second irregular encoder magnetic grating 3-8, so that the magnetic grating rotates synchronously with the second motor rotor 1-5. One end of the second motor stator fixing member 1-4 is fixed to the second motor stator 1-6, and the other end is fixedly connected to the second irregular encoder circuit board 3-7, so that the second irregular encoder circuit board 3-7 remains stationary.

[0035] With the above structure, the first irregular encoder is responsible for detecting the rotational position and angle of the first DD motor, and the second irregular encoder is responsible for detecting the rotational position and angle of the second DD motor. The circuit boards of the two encoders are stacked at an angle of 180° relative rotation, occupying only the thickness of one circuit board in the axial direction, which greatly reduces the thickness of the entire joint module.

[0036] Example 2

[0037] The difference between this embodiment and Embodiment 1 is that the first irregular encoder circuit board 3-6 and the second irregular encoder circuit board 3-7 in this embodiment occupy an arc range of less than 180° in the circumferential direction, specifically 150°. The rest of the structural settings are the same as in Embodiment 1.

Claims

1. A thin-film dual-irregular-shaped encoder stacking and mounting structure, characterized in that, include: Two irregular encoders, each of which includes an irregular encoder circuit board and a corresponding irregular encoder magnetic grid, wherein the irregular encoder circuit board is an arc-shaped ring structure; Two irregular encoders are arranged along the axial direction and directly stacked in the axial direction. The circuit boards of the two irregular encoders are set at a relative rotation angle so that the solid parts of the two irregular encoder circuit boards are offset in the circumferential direction and do not overlap in the axial projection direction. Thus, the overall axial thickness of the two irregular encoder circuit boards is equal to the thickness of a single irregular encoder circuit board. The arc-shaped ring-shaped encoder circuit board occupies an arc segment of less than or equal to 180° in the circumferential direction; the two irregular encoder circuit boards are set at an angle of 180° relative rotation.

2. The thinned dual irregular encoder stacking and mounting structure according to claim 1, characterized in that: The two irregularly shaped encoder circuit boards are the same size.

3. The thinned dual irregular encoder stacking installation structure according to claim 1, characterized in that: Two irregular encoder magnetic gratings are stacked axially with their corresponding irregular encoders, and when viewed axially, the outer contour projection of the irregular encoder magnetic grating is set on the radial inner side of the outer contour projection of the corresponding irregular encoder circuit board.

4. A joint module, characterized in that: It includes a first DD motor, a second DD motor, and a thinned dual irregular encoder stacking mounting structure as described in any one of claims 1 to 3, wherein the thinned dual irregular encoder stacking mounting structure is sandwiched between the first DD motor and the second DD motor.

5. A joint module according to claim 4, characterized in that: The first DD motor is configured to correspond with one of the irregular encoders. The first DD motor includes a first motor rotor and a first motor stator. The irregular encoder magnetic grating of the irregular encoder is fixedly connected to the first motor rotor, and the irregular encoder circuit board of the irregular encoder is fixedly connected to the first motor stator. The second DD motor is configured to correspond with another irregular encoder. The second DD motor includes a second motor rotor and a second motor stator. The irregular encoder magnetic grating of the irregular encoder is fixedly connected to the second motor rotor, and the irregular encoder circuit board of the irregular encoder is fixedly connected to the second motor stator.

6. A joint module according to claim 5, characterized in that: It also includes a first motor rotor fixing component and a first motor stator fixing component. The irregular encoder magnetic grid corresponding to the first DD motor is fixedly connected to the first motor rotor through the first motor rotor fixing component, and the irregular encoder circuit board is fixedly connected to the first motor stator through the first motor stator fixing component. It also includes a second motor rotor fixing component and a second motor stator fixing component. The irregular encoder magnetic grid corresponding to the second DD motor is fixedly connected to the second motor rotor through the second motor rotor fixing component, and the irregular encoder circuit board is fixedly connected to the second motor stator through the second motor stator fixing component.

7. A joint module according to claim 4, characterized in that: The first DD motor and the second DD motor are arranged along the same axis. Two irregular encoders are located between the first DD motor and the second DD motor. The first DD motor and the second DD motor clamp and fix the two irregular encoders from both sides of the axial direction.

8. A joint module according to claim 4, characterized in that: The joint module is used in the end joint of a semiconductor wafer handling robot to achieve a dual DD motor direct drive configuration.

Images