Precise stepping motor and UVW nanometer alignment platform

Abstract

The application discloses a precision stepping motor and a UVW nanometer alignment platform, and relates to the technical field of precision machinery. The precision stepping motor comprises a casing, a composite stator and a spiral rotor. The inner wall of the casing is provided with the composite stator. The composite stator is formed by connecting a plurality of unit stators in a head-to-tail mode. A plurality of excitation coils are uniformly arranged in the unit stators. In specific operation, a processor selects a high-torque mode to operate the motor first. When the remaining motor stroke is insufficient to rotate a main shaft for one circle, the high-precision mode is selected to operate the motor. Finally, the motor stops operating when the Hall element detects the complete stroke, so as to ensure the operation precision of the motor. The UVW nanometer alignment platform is provided with the precision stepping motor. The UVW nanometer alignment platform comprises a rack, a placing table, a pitching and lifting module and a plane rotating module. The pitching and lifting module is in abutment with the bottom of the placing table from three vertex positions of an equilateral triangle. Therefore, the height and the pitching angle of the three vertex positions of the placing table are adjusted through the precision stepping motor.

Description

Technical Field

[0001] This invention relates to the field of precision machinery technology, specifically to a precision stepper motor and a UVW nano-alignment platform. Background Technology

[0002] The diameter of the central and middle parts of an optical fiber that transmits light generally does not exceed 100 micrometers. Therefore, in order to ensure that all the light energy incident on the end face of the optical fiber is transmitted by the optical fiber, it is necessary to ensure that the light transmitted to the end face of the optical fiber can only move within a certain angular range. For this purpose, a high-precision six-axis adjustment alignment platform at the nanometer level is often required to change the optical path of the reflected signal light. If the optical fiber is misaligned, it will lead to problems such as obstructed light transmission or localized heating of the end face.

[0003] Currently, such equipment mainly improves accuracy through high-precision transmission mechanisms to ensure accurate fiber optic connection, but existing motors have significant shortcomings in terms of accuracy and operation.

[0004] For example, stepper motors using open-loop control are prone to step loss or stalling when the starting frequency is too high or the load is too heavy. When stopping, they may overshoot due to excessive speed, making it difficult to control accuracy. Furthermore, the dense windings of stepper motors can lead to poor heat dissipation. While closed-loop servo motors offer more reliable control accuracy, their purchase price is much higher than that of stepper motors. In addition, servo drivers have hundreds of parameter settings, making operation very cumbersome, unlike stepper motor drivers which only require setting the current and microstepping.

[0005] To this end, the applicant combined the characteristics of both and developed a motor model that is relatively simple to operate and has higher precision through open-loop control and closed-loop detection. Based on the structure of this motor, the applicant further proposed a nanoscale fiber optic alignment platform for changing the optical path. Summary of the Invention

[0006] To address this issue, the present invention provides a precision stepper motor and a UVW nano-alignment platform to solve the problem in the prior art where the relatively low precision of the motor reduces the precision of the fiber optic alignment platform.

[0007] To achieve the above objectives, the present invention provides the following technical solution:

[0008] This invention discloses a precision stepper motor, comprising:

[0009] The machine housing has a cover at the rear end, which contains a Hall element for detecting the rotation angle and number of revolutions of the spindle. The front end of the machine housing has an end cap, and both the cover and the end cap have vents that pass through the machine housing and are connected to it.

[0010] A composite stator is formed by connecting several unit stators end to end. Each unit stator has several excitation coils evenly arranged circumferentially inside, and two adjacent unit stators rotate a certain angle along the axial direction.

[0011] The spiral rotor is internally fixedly sleeved on the main shaft, and several permanent magnets are arranged externally along the spiral direction of the main shaft. Each of the permanent magnets corresponds to a certain number of excitation coils in the composite stator. When the spiral rotor rotates, the pressure inside the composite stator decreases due to the spiral arrangement of the permanent magnets, which causes external air to rush into the composite stator through the vent, forming a continuous airflow to cool the composite stator.

[0012] The spiral rotor operates in two modes:

[0013] In high torque mode, all unit stators in the composite stator work synchronously, that is, a set of current pulses are synchronously applied to the adjacent excitation coils in several unit stators to drive the helical rotor to rotate.

[0014] In high-precision mode, all unit stators within the composite stator are sequentially supplied with current pulses, meaning that adjacent excitation coils are supplied with only one set of current pulses in succession. A single unit stator drives the helical rotor to rotate. Once the motor has completed its set stroke, it first operates in high-torque mode. When the remaining motor stroke is less than one revolution, it switches to high-precision mode. Finally, the motor stops operating once the Hall element detects that the entire stroke has been completed.

[0015] Furthermore, the unit stator includes:

[0016] The stator core is made of several silicon steel sheets aligned and stacked.

[0017] The silicon steel sheet includes a winding portion and a base portion. The base portion has indexing grooves uniformly arranged on its exterior and is integrally formed with several winding portions uniformly along its circumference inside. The excitation coil is bound to the winding portion of the stator core. When assembling the unit stator, the indexing grooves can be misaligned and locked inside the housing, thereby aligning several permanent magnets with several excitation coils inside the composite stator.

[0018] Furthermore, the cover and the end cover are each provided with a bearing to assist the rotation of the main shaft, and the cover is provided with a junction box, which contains contacts connected to each excitation coil.

[0019] This invention application also discloses a UVW nano-alignment platform, including the precision stepper motor as described above, comprising:

[0020] The frame has a platform on top, a tilt sensor at the center of the platform, and a single-axis linear motion module at the bottom, which is mounted on a base.

[0021] The pitch and lift module consists of three precision lifting devices, which are arranged in an equilateral triangle and support the bottom of the platform at the top of the frame.

[0022] A planar rotation module is disposed within the frame and passes through the frame, hinged to the center of the bottom of the platform via a tenon joint, and is adapted to drive the platform to rotate;

[0023] The precision lifting device is adapted to abut the bottom of the platform from the three vertices of the equilateral triangle and adjust the height and pitch angle of the three vertices of the platform by means of a precision stepper motor.

[0024] In one possible implementation, the precision lifting device includes:

[0025] The lifting worm gear is coaxially connected to a precision stepper motor at one end and meshes with a lifting worm wheel on the side.

[0026] A guide hole is located at the center of the lifting worm gear and is adapted to insert the lifting rod to drive the lifting rod to rotate.

[0027] In one possible implementation, the lifting support rod includes a rod body, a guide bar, a stud, and a ball bearing. The guide bar is provided on the side of the rod body, the stud is provided at the tail end, and the ball bearing is slidably provided at the head end. The ball bearing abuts against the bottom of the platform, and the guide bar is slidably provided in the guide hole and transmits torque.

[0028] In one possible implementation, the planar rotation module includes:

[0029] The drive shaft has a hinge seat at the top, which is hinged to the table via a ten-joint joint;

[0030] A rotary worm gear is slidably sleeved on the bottom of the drive shaft and adapted to drive the drive shaft to rotate. The rotary worm gear is meshed with a rotary worm for transmission, and the rotary worm is coaxially connected to a precision stepper motor for transmission.

[0031] In one possible implementation, the rack includes:

[0032] The double-layered clamping plate has a central hole at its center for the drive shaft to move.

[0033] Three support tubes are vertically arranged in the interlayer of the double-layer clamping plate and are adapted to insert the lifting support rod, and the support tubes are provided with internal threads that are compatible with the studs.

[0034] In one possible implementation, the single-axis linear motion module includes a connecting base, with a linear motor disposed at the top and bottom of the connecting base, and the two linear motors being perpendicular to each other.

[0035] In one possible implementation, the base is made of cast iron or marble.

[0036] The advantages of the precision stepper motor and UVW nano-alignment platform provided by this invention are as follows:

[0037] By improving the motor structure, the motor procurement cost is reduced. Compared with existing stepper motors, this not only shortens the running time but also ensures the motor's motion accuracy. Applying this precision stepper motor to the UVW nano-alignment platform can effectively improve the platform's sensitivity. Furthermore, the motion accuracy of the motor can be amplified by a precision lifting device and a planar rotation module, thereby enabling the equipment to achieve nanometer-level accuracy and meet the requirements of fiber optic alignment. Attached Figure Description

[0038] To more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are merely exemplary, and those skilled in the art can derive other embodiments based on the provided drawings without creative effort.

[0039] The structures, proportions, sizes, etc. illustrated in this specification are only for the purpose of assisting those skilled in the art in understanding and reading the content disclosed herein, and are not intended to limit the conditions under which the present invention can be implemented. Therefore, they have no substantial technical significance. Any modifications to the structure, changes in the proportions, or adjustments to the size, without affecting the effects and objectives that the present invention can produce, should still fall within the scope of the technical content disclosed in the present invention.

[0040] Figure 1 A perspective view of a precision stepper motor provided for this invention;

[0041] Figure 2 A three-dimensional view of the composite stator provided by the present invention;

[0042] Figure 3 A three-dimensional view of the excitation coil provided for this invention;

[0043] Figure 4 A perspective view of the unit stator provided by the present invention;

[0044] Figure 5 A perspective view of the main shaft provided by the present invention;

[0045] Figure 6 A three-dimensional view of the UVW nano-alignment platform provided by this invention;

[0046] Figure 7 A perspective view of the single-axis linear motion module provided by the present invention;

[0047] Figure 8 A perspective view of the housing provided for this invention;

[0048] Figure 9 A perspective view of the planar rotation module provided by the present invention;

[0049] Figure 10 A perspective view of the lifting support rod provided by the present invention;

[0050] Figure 11 A perspective view of the precision lifting device provided by the present invention;

[0051] In the diagram: a1 housing; a2 end cover; a3 unit stator; a31 stator core; a32 winding section; a33 indexing slot; a34 base section; a4 vent; a5 helical rotor; a6 excitation coil; a7 cover; a8 main shaft; a9 permanent magnet; a10 bearing;

[0052] b1 Frame; b11 Double-layer clamping plate; b12 Three support tubes; b13 Internal thread; b14 Center hole; b2 Storage platform; b3 Pitch lifting module; b4 Single-axis linear motion module; b41 Connecting seat; b42 Linear motor; b5 Planar rotation module; b51 Drive shaft; b52 Hinge seat; b53 Rotating worm; b54 Rotating worm wheel; b6 Base; b7 Precision lifting device; b71 Worm; b72 Worm wheel; b73 Guide hole; b74 Lifting support rod; b741 Rod body; b742 Guide bar; b743 Stud; b744 Ball bearing. Detailed Implementation

[0053] The following specific embodiments illustrate the implementation of the present invention. Those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0054] like Figure 1-5 This invention discloses a precision stepper motor, which is mainly mounted on a positioning platform with nanometer-level precision. The pitch, yaw, and rotation angles of the positioning platform are adjusted, as detailed below:

[0055] like Figure 1The main structure of this equipment includes a housing a1, a composite stator, and a helical rotor a5. The rear end of the housing a1 is equipped with a cover a7, inside which a Hall element is installed to record and detect the rotation angle and number of revolutions of the main shaft a8. The front end of the housing a1 is equipped with an end cap a2. A pair of bearings a10 are coaxially mounted on the cover a7 and the end cap a2 to assist the rotation of the main shaft a8. Furthermore, both the cover a7 and the end cap a2 have vents a4 that pass through and connect to the housing a1 for ventilation and heat dissipation, preventing the coils from overheating and damaging the motor.

[0056] Based on this, such as Figure 2 and Figure 3 The inner wall of the casing a1 is fitted with a composite stator, which is composed of several unit stators a3 connected end to end. Each unit stator a3 contains several excitation coils a6 evenly arranged circumferentially. During assembly, adjacent unit stators a3 must be rotated axially by a certain angle to ensure that adjacent excitation coils a6 are staggered and aligned with the helical rotor a5. The helical rotor a5 is internally fixedly fitted onto the main shaft a8 and can drive coaxially with it. Several permanent magnets a9 are arranged on the outside of the helical rotor a5 along the helical direction of the main shaft a8. This ensures that each permanent magnet a9 corresponds one-to-one with each excitation coil a6 within the composite stator, allowing the electromagnetic force generated by the energized excitation coil a6 to fully act on the permanent magnets a9.

[0057] In the operation of precision stepper motors, the current pulses can be subdivided using embedded processors or programmable logic controllers, specifically in the following two operating modes:

[0058] In high torque mode, all unit stators a3 in the composite stator work synchronously, that is, a set of current pulses are synchronously applied to the adjacent excitation coils a6 in several unit stators a3 to drive several adjacent permanent magnets a9 on the helical rotor a5 to rotate together. At this time, the magnetic field strength of the composite stator is the largest, which can make the main shaft a8 rotate at high speed, thereby saving the motor adjustment time and improving the motor efficiency.

[0059] In high-precision mode, all unit stators a3 within the composite stator are sequentially supplied with current pulses along the length of the composite stator. This causes adjacent and individual unit stators a3 to generate magnetic fields sequentially, thereby individually driving the permanent magnet a9 to rotate. In other words, adjacent excitation coils a6 are supplied with only one set of current pulses, using a single unit stator a3 to drive the helical rotor a5 to rotate. It should be noted that during actual operation, after the motor's required stroke is set, the processor will initially operate the motor in high-torque mode. When the remaining motor stroke is insufficient for one rotation of the spindle, the high-precision mode is switched to operation. Finally, the motor stops operating once the Hall element detects that the entire stroke has been completed, thus ensuring the motor's operational accuracy.

[0060] In this embodiment, as Figure 4 The unit stator a3 includes a stator core a31 and indexing slots a33. The indexing slots a33 are located on the outside of the stator core a31. Multiple pairs of excitation coils a6 are wound inside the stator core a31. Specifically, the stator core a31 is composed of several stacked silicon steel sheets, each including a winding portion a32 and a base portion a34. The base portion a34 is integrally formed with several winding portions a32 uniformly along its circumference, and the excitation coils a6 are bound to the winding portions a32 at the same position on the stator core a31. The base portion a34 has uniformly arranged indexing slots a33 on its outside. These indexing slots a33 are adapted to the internal toothed grooves inside the housing a1. During assembly, the staggered arrangement of the composite stator can be achieved by simply offsetting one indexing slot a33 on the unit stator a3.

[0061] In this embodiment, as Figure 1 and Figure 5 The housing a7 and end cover a2 are each equipped with a bearing a10 to assist the rotation of the main shaft a8. A junction box is also provided on the housing a7, containing contacts connected to each excitation coil a6. Simultaneously, the embedded processor or programmable logic controller can transmit signals to the host computer through the junction box. Furthermore, since the housing a7 and end cover a2 are equipped with vents a4, and the permanent magnet a9 of the helical rotor a5 is itself helical, a negative pressure is generated within the composite stator when the helical rotor a5 rotates. This creates airflow through the composite stator and vents a4, enhancing the motor's ventilation and heat dissipation.

[0062] Based on the same inventive concept, such as Figures 6-11 The present invention also discloses a UVW nano-alignment platform, which is used to install and apply the precision stepper motor mentioned above. The technical solution is described below:

[0063] like Figure 6The specific structure of this equipment includes a frame b1, a pitch and lift module b3, and a planar rotation module b5. A platform b2 is mounted on top of the frame b1. The top of the platform b2 is a smooth, flat surface, and a tilt sensor is located at its center to detect the pitch angle of the platform b2. The bottom of the frame b1 is mounted on a single-axis linear motion module b4, which is mounted on a base b6 to drive the frame b1 to move linearly in the horizontal plane. Furthermore, a planar rotation module b5 is also located within the frame b1. The planar rotation module b5 passes through the frame b1 and is hinged to the center of the bottom of the platform b2 via a cross joint, thereby causing the platform b2 to rotate. In this embodiment, the pitch movement of the platform b2 is achieved by the pitch lifting module b3, which consists of three precision lifting devices b7. The three precision lifting devices b7 are arranged in an equilateral triangle and support the bottom of the platform b2 at the top of the frame b1. To further explain, the precision lifting devices b7 can abut against the bottom of the platform b2 from the three vertices of the equilateral triangle, thereby adjusting the height and pitch angle of the three vertices of the platform b2 through a precision stepper motor.

[0064] In some embodiments, such as Figure 8 and Figure 9 The precision lifting device b7 includes a lifting worm gear b71 and a guide hole b73. The end of the lifting worm gear b71 is coaxially connected to a precision stepper motor, while the side is meshed with a lifting worm wheel b72. The lifting worm gear b71 drives the lifting worm wheel b72 to rotate. A guide hole b73 is provided at the center of the lifting worm wheel b72. The guide hole b73 is suitable for inserting a lifting support rod b74 and driving the lifting support rod b74 to rotate.

[0065] Based on this structure, such as Figure 11 The lifting support rod b74 includes a rod body b741, a guide bar b742, a stud b743, and a ball bearing b744. The guide bar b742 is provided on the side of the rod body b741, the stud b743 is provided at the tail end, and the ball bearing b744 is slidably provided at the head end. The ball bearing b744 abuts against the bottom of the platform b2 to reduce wear. The guide bar b742 is slidably provided in the guide hole b73 and transmits torque. When the lifting worm gear b72 rotates, the rod body b741 rotates and drives the stud b743 to rotate, thereby supporting the platform b2 upward. Since the three rod bodies b741 are independently driven by three precision stepper motors, the lifting height of the three rod bodies b741 arranged in an equilateral triangle can be adjusted separately, thereby adjusting the relative height and pitch angle of the platform b2.

[0066] In this embodiment, as Figure 8The frame b1 includes a double-layer clamping plate b11 and three support tubes b12. The center of the double-layer clamping plate b11 is provided with a central hole b14 for the drive shaft b51 to move. The three support tubes b12 are arranged vertically in an equilateral triangle within the clamping layer of the double-layer clamping plate b11 and are suitable for inserting the lifting support rod b74. The support tubes b12 are provided with an internal thread b13 that is compatible with the stud b743, so that the stud b743 and the internal thread b13 form a helical pair, thereby realizing the up and down movement of the lifting support rod b74 when it rotates.

[0067] In some embodiments, such as Figure 9 The planar rotation module b5 includes a drive shaft b51, a hinge seat b52, and a rotary worm gear b54. The top of the drive shaft b51 is equipped with the hinge seat b52, which is hinged to the platform b2 via a universal joint, thus forming a universal joint and realizing variable angle torque transmission. Based on this, similar to the structural principle of the precision lifting device b7, the bottom of the drive shaft b51 is inserted into the center of the rotary worm gear b54. Without hindering the extension and retraction of the drive shaft b51, the rotary worm gear b54 drives the drive shaft b51 to rotate. The rotary worm gear b54 is meshed with the rotary worm b53 for transmission, and the rotary worm b53 is coaxially connected to the precision stepper motor.

[0068] In some embodiments, such as Figure 7 The single-axis linear motion module b4 includes a connecting seat b41. A linear motor b42 is respectively installed at the top and bottom of the connecting seat b41. The two linear motors b42 are perpendicular to each other. One linear motor b42 drives the connecting seat b41 to move, and the other linear motor b42 drives the frame b1 to move. In this embodiment, the base b6 is made of cast iron or marble, which can give the base b6 good hardness and reduce the impact of temperature changes on the accuracy of the equipment.

[0069] Although the present invention has been described in detail above with general descriptions and specific embodiments, modifications or improvements can be made to it, which will be obvious to those skilled in the art. Therefore, all such modifications or improvements made without departing from the spirit of the present invention fall within the scope of protection claimed by the present invention.

Claims

1. A precision stepper motor, characterized in that, include: The machine housing (a1) has a cover (a7) at the rear end. The cover (a7) contains a Hall element for detecting the rotation angle and number of revolutions of the spindle. The machine housing (a1) has an end cap (a2) at the front end. Both the cover (a7) and the end cap (a2) have vents (a4) that pass through the machine housing (a1) and are connected to it. The composite stator is formed by connecting several unit stators (a3) ​​end to end. Several excitation coils (a6) are uniformly arranged circumferentially inside any one of the unit stators (a3), and two adjacent unit stators (a3) ​​rotate a certain angle along the axial direction. The spiral rotor (a5) is internally fixedly sleeved on the main shaft (a8), and a plurality of permanent magnets (a9) are arranged externally along the spiral direction of the main shaft (a8), and the plurality of permanent magnets (a9) correspond one-to-one with a plurality of excitation coils (a6) in the composite stator; Among them, when the helical rotor (a5) rotates, it has the following two working modes: In high torque mode, all unit stators (a3) ​​in the composite stator work synchronously, that is, a set of current pulses are synchronously applied to the adjacent excitation coils (a6) in several unit stators (a3) ​​to drive the helical rotor (a5) to rotate. In high-precision mode, all unit stators (a3) ​​in the composite stator are sequentially supplied with current pulses, that is, adjacent excitation coils (a6) are supplied with only one set of current pulses in succession, and the single unit stator (a3) ​​drives the spiral rotor (a5) to rotate. Once the motor has completed the required stroke, it first operates in high torque mode. When the remaining motor stroke is insufficient for the spindle to rotate one revolution, it operates in high precision mode. Finally, the motor stops operating after the Hall element detects that the entire stroke has been completed.

2. The precision stepper motor as described in claim 1, characterized in that, The unit stator (a3) ​​includes: The stator core (a31) is made of several silicon steel sheets stacked together; The silicon steel sheet includes a winding portion (a32) and a base portion (a34). The base portion (a34) has indexing grooves (a33) uniformly arranged on its exterior and is integrally formed with several winding portions (a32) uniformly along its circumference inside. The excitation coil (a6) is bound to the winding portion (a32) of the stator core (a31).

3. The precision stepper motor as described in claim 2, characterized in that, The cover (a7) and the end cover (a2) are each provided with a bearing (a10) to assist the rotation of the main shaft (a8), and the cover (a7) is provided with a junction box, which contains contacts connected to each excitation coil (a6).

4. A UVW nano-alignment platform, employing the precision stepper motor as described in claim 3, characterized in that, include: The frame (b1) has a platform (b2) on top, an angle sensor at the center of the platform (b2), and a single-axis linear motion module (b4) on the bottom. The single-axis linear motion module (b4) is mounted on the base (b6). The pitch and lift module (b3) consists of three precision lifting devices (b7), which are arranged in an equilateral triangle and support the bottom of the platform (b2) at the top of the frame (b1). A planar rotation module (b5) is disposed within the frame (b1) and passes through the frame (b1) and is hinged to the bottom center of the shelf (b2) via a tenon joint, and is adapted to drive the shelf (b2) to rotate; The precision lifting device (b7) is adapted to abut against the bottom of the platform (b2) from the three vertices of the equilateral triangle and adjust the height and pitch angle of the three vertices of the platform (b2) by means of a precision stepper motor.

5. The UVW nano-alignment platform as described in claim 4, characterized in that, The precision lifting device (b7) includes: The lifting worm gear (b71) is coaxially connected to a precision stepper motor at its end and meshes with a lifting worm wheel (b72) on its side. The guide hole (b73) is located at the center of the lifting worm gear (b72) and is adapted to insert the lifting rod (b74) and drive the lifting rod (b74) to rotate.

6. The UVW nano-alignment platform as described in claim 5, characterized in that, The lifting support rod (b74) includes a rod body (b741), a guide bar (b742), a stud (b743), and a ball bearing (b744). The guide bar (b742) is provided on the side of the rod body (b741), the stud (b743) is provided at the tail end, and the ball bearing (b744) is slidably provided at the head end. The ball bearing (b744) abuts against the bottom of the platform (b2). The guide bar (b742) is slidably provided in the guide hole (b73) and transmits torque.

7. The UVW nano-alignment platform as described in claim 6, characterized in that, The planar rotation module (b5) includes: The drive shaft (b51) has a hinge seat (b52) on its top, and the hinge seat (b52) is hinged to the table (b2) by a ten-joint. A rotary worm gear (b54) is slidably sleeved on the bottom of the transmission shaft (b51) and adapted to drive the transmission shaft (b51) to rotate. The rotary worm gear (b54) is meshed with a rotary worm (b53) for transmission. The rotary worm (b53) is coaxially connected to a precision stepper motor for transmission.

8. The UVW nano-alignment platform as described in claim 7, characterized in that, The rack (b1) includes: The double-layered clamping plate (b11) has a central hole (b14) at its center for the drive shaft (b51) to move. Three support tubes (b12) are vertically arranged in the interlayer of the double-layer clamping plate (b11) and are adapted to be inserted into the lifting support rod (b74). The support tubes (b12) are provided with internal threads (b13) that are compatible with the stud (b743).

9. The UVW nano-alignment platform as described in claim 8, characterized in that, The single-axis linear motion module (b4) includes a connecting seat (b41), and a linear motor (b42) is respectively provided at the top and bottom of the connecting seat (b41), and the two linear motors are perpendicular to each other.

10. The UVW nano-alignment platform as described in claim 9, characterized in that, The base (b6) is made of cast iron or marble.

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