Wafer heating disc spiral heating wire press-fitting system

Abstract

The application provides a wafer heating disc spiral heating wire press-fitting system, which comprises a bottom disc, a heating wire mounting groove on the heating disc, a temporary storage groove formed by mirror mapping of the heating wire mounting groove on the bottom disc, and a first through hole formed through the bottom disc; a top plate arranged above the bottom disc in a spaced manner, comprising a second through hole formed through the top plate, a storage cavity containing top beads, and a discharge assembly arranged at the outlet end of the second through hole; and a bearing and pushing mechanism rotating in a planetary manner formed by the bottom disc and the top plate; the top beads roll into the second through hole with a sliding fit clearance between the inner diameter and the outer diameter of the top beads, and are pressed into the first through hole by the discharge assembly and the bearing and pushing mechanism to roll into a restricted channel formed by the temporary storage groove and the mounting groove, and the pressure is transmitted from the top bead group to the heating wire, so that the complex spiral synchronous pressing problem is simplified into a linear advancing problem, and the force finally acting on the heating wire is smooth and uniform.

Description

Technical Field

[0001] This invention relates to the technical field of wafer heating plate fabrication, and in particular to a wafer heating plate spiral heating wire pressing system. Background Technology

[0002] In wafer manufacturing processes, steps such as chemical vapor deposition often require heating pads to provide a uniform and stable temperature field for the wafer. To achieve uniform heating, heating wires arranged in a spiral (also known as a "mosquito coil") are typically embedded inside the heating pad. Correspondingly, mounting slots are machined into the heating pad body to accommodate these heating wires. To ensure efficient heat transfer between the heating wires and the pad body, an interference fit is usually used. The heating wires typically consist of a steel outer tube, internal magnesium powder, and filamentous resistance wires; therefore, it is understandable that the heating wires are highly rigid and difficult to deform.

[0003] However, in actual installation, this structure faces significant challenges: the spiral heating wire inevitably deforms during processing and heat treatment, resulting in discrepancies between its actual shape and design parameters, meaning the heating wire and the mounting groove do not perfectly fit. When pressing the heating wire into the mounting groove, applying pressure only to a localized area can easily cause the heating wire to "get stuck" in the groove due to excessive tightness and the wire's own deformation error. This means that when one end is pressed down, the other end warps due to stress concentration, or part of the heating wire is embedded while the other part is stretched and deformed, further deviating from the intended mounting groove area, making subsequent embedding even more difficult.

[0004] Existing technologies involve manually using tools to forcibly bend and deform the heating wire to fit the shape of the mounting groove before pressing it into the groove. This requires overcoming considerable resistance. In other processes, multiple operators work synchronously around the heating plate, applying force at multiple points simultaneously in an attempt to press the entire heating wire into the bottom of the groove almost synchronously.

[0005] The above-mentioned installation methods for heating wires require highly skilled personnel, have low installation efficiency, and pose a risk of damaging the heating wires or the walls of the installation tank, resulting in a complicated installation process and poor reliability. Summary of the Invention

[0006] In view of the shortcomings of the prior art described above, the purpose of this invention is to provide a wafer heating plate spiral heating wire pressing system to improve the convenience and safety of heating wire installation.

[0007] To achieve the above and other related objectives, the present invention provides the following technical solution: A wafer heating plate spiral heating wire pressing system is provided, which is pressed onto the base of the heating plate. The mounting grooves of the heating wire on the heating plate are mirror-imagely opened on the base to form a temporary storage groove. A first through hole is opened through the base, with its projection located at the starting center of the temporary storage groove. A top plate is provided above the base, including a second through hole opened through the top plate, a storage cavity connected to the second through hole and containing a top bead, and a discharge component provided at the outlet end of the second through hole to separate the top bead one by one. A bearing and pushing mechanism rotates planetarily within the receiving cavity formed by the base and the top plate. The top bead rolls from the storage cavity into the second through hole, whose inner diameter is in sliding fit with the outer diameter of the top bead, and is separated one by one by the discharge component so that the top bead enters the bearing and pushing mechanism. The bearing and pushing mechanism presses the top bead into the first through hole so that it rolls into the constraint channel formed by the mating of the temporary storage groove and the mounting groove.

[0008] To achieve the above technical solution, the temporary storage slot in the chassis aligns with the heating wire mounting slot when the chassis is pressed against the heating plate, forming a closed constraint channel. This constrains the vertical floating and lateral deformation of the heating wire, providing continuous guidance and correction for heating wires with deformation errors, forcing them to move along a predetermined helical path. Simultaneously, pressure is transmitted to the heating wire via a group of top beads. This directly avoids damage caused by direct application to the heating wire and simplifies the complex problem of synchronous helical pressing into a linear propulsion problem, resulting in a smooth and uniform force acting on the heating wire.

[0009] Furthermore, the carrying and pushing mechanism includes a driving device, a driven rod connected to the output end of the driving device, and a carrier connected to the driven rod that rotates planetarily within the receiving cavity with the axis of the output end of the driving device as the center; the carrier is a hollow, flat, elliptical carrier, and the trajectory projection of the carrier covers the first through hole and the second through hole.

[0010] To achieve the above technical solution, a hollow, flat, elliptical carrier is used, which utilizes the alternation of its major and minor axes to achieve intermittent pulse propulsion, matching the propulsion rhythm of the heating wire entering the spiral mounting groove; at the same time, the flat structure of the carrier widens the lateral dimension within a limited thickness, and when the top ball is pushed towards the first through hole, the flat cavity wall provides anti-overturning guiding constraint for the top ball, forcing the top ball to advance along the spiral tangent, eliminating the risk of the top ball getting stuck on the heating wire due to deflection at the exit.

[0011] Furthermore, the interior of the carrier is provided with a converging channel, a connecting channel, and an involute channel, which are connected sequentially along the positive discharge direction of the top bead and have an input end connected to the second through hole, and an output end connected to the first through hole. The diameter of the converging channel decreases from the input end to the output end, the diameter of the involute channel increases from the input end to the output end, and the diameter of the connecting channel is adapted to the diameter of the top bead.

[0012] To achieve the above technical solution, the converging channel, connecting channel, and involute channel form a three-section channel design of "converging-equal diameter-involute". When the top ball rolls in from the second through hole, a slight deflection is unavoidable. The large diameter of the converging channel provides good fault tolerance and guidance, allowing the top ball to smoothly enter the converging channel. The diameter of the connecting channel matches the diameter of the top ball, ensuring that the top ball remains on a stable orbital plane when following the planetary rotation of the carrier, preventing vertical jumping or self-spinning. When the top ball, pushed by the carrier, forces the heating wire into the mounting groove, if the heating wire "rebounds" due to its own stress, causing the top ball to retract in the opposite direction, the small-inlet, large-outlet design of the involute channel causes the top ball to rapidly compress the air enclosed in the large-diameter end of the involute channel as it retracts towards the large-diameter end, forming an "air spring anti-retraction mechanism".

[0013] Furthermore, the second through hole is vertically opened along the thickness direction of the top plate, and the discharge assembly is used to receive the top ball falling from the second through hole; the discharge assembly includes a pair of clamping flaps that intersect at the outlet end of the second through hole and converge along the axial direction of the second through hole, a torsion spring that applies a preload to the clamping flaps to bring them closer together, and a lever connected to the clamping flaps and extending toward the carrier; the clamping flaps swing around the hinge point as the rotation center to realize the reverse linkage opening and closing of the upper and lower ends, and the inner distance between the two levers at the contact mating section with the carrier is less than the maximum diameter of the top of the carrier.

[0014] To achieve the above technical solution, a lever system is formed by the rotatable clamping part. Only a small lateral thrust needs to be applied to the end of the lever to generate opening and closing forces at the convergence point and the locking point of the clamping part. With extremely high reliability and synchronization, it is ensured that the top ball, as the pressure medium, can be fed into the subsequent bearing and pushing mechanism in a completely uniform rhythm.

[0015] Furthermore, the bottom of the carrier extends toward the chassis and is provided with an extrusion channel. Along the rotation direction of the carrier, the extrusion channel includes a positioning cavity whose contour fits the outer spherical surface of a single top ball to lock its rolling freedom at the moment the top ball falls, and an extrusion cavity that gradually narrows and extends from the positioning cavity toward the chassis to convert the gravitational potential energy of the top ball into a pre-tightening thrust toward the first through hole.

[0016] To achieve the above technical solution, the positioning cavity forces the top ball that falls from the carrier into the chassis to be "aligned", eliminating the problems of jamming and jumping caused by the disorderly rolling of the top ball; the extrusion cavity converts the gravitational potential energy of the top ball into horizontal kinetic energy, thereby significantly reducing the impact load and effectively protecting the fragile heating wire.

[0017] Furthermore, the first through hole is opened at the outermost radial end of the temporary storage groove and extends obliquely along the thickness direction of the chassis, with the oblique direction being consistent with the rotation direction of the carrier.

[0018] To achieve the above technical solution, by setting the first through hole to be inclined in the same direction as the rotation direction of the carrier, the inclined hole wall can conform to the tangential movement trajectory of the top ball, transforming the original vertical collision into a smooth sliding guide; at the same time, the inclined channel applies an additional tangential force to the top ball, greatly improving the smoothness of the top ball entering the temporary storage slot.

[0019] Furthermore, the input end edge of the first through hole extends outward to form a positioning wing. Along the rotation direction of the carrier, the width and thickness of the positioning wing increase to provide guidance during the transfer of the top ball.

[0020] To achieve the above technical solution, by setting positioning wings whose unfolding direction is directly opposite to the rotational tangent of the carrier, the top ball can be intercepted and laterally corrected. Following the increasing width and thickness of the positioning wings and the narrowing of the top opening, the top ball is smoothly guided directly above the first through hole. Simultaneously, the thickness of the wings is designed to increase along the rotational direction, resulting in a streamlined slope that conforms to the airflow and movement trajectory, effectively preventing motion interference with rotating components.

[0021] Furthermore, the outer periphery of the chassis is provided with a locking mechanism for locking the chassis and the heating plate in the vertical direction. The locking mechanism includes a toggle-type pneumatic clamp hinged to the outer periphery of the chassis, and a limiting part provided on the top plate that is adapted to the outer periphery contour of the heating plate to limit the docking angle between the chassis and the heating plate.

[0022] To achieve the above technical solution, the limiting part completes the angle calibration and circumferential constraint of the chassis and heating plate when they are aligned, and at the same time, it works in conjunction with the toggle-type pneumatic clamp to provide linear locking and fixation.

[0023] Furthermore, the drive device is a servo motor, and a mechanical torque limiter is connected in series between the drive device and the driven rod to generate slippage relief force when the system thrust exceeds a preset threshold.

[0024] To achieve the above solution, the mechanical torque limiter is configured to transmit the full torque during normal operation. However, when encountering jamming or overload, or when the thrust exceeds the preset safety threshold, it instantly generates axial or radial slippage force to cut off the power transmission, effectively preventing the impact of overload current on the servo drive and significantly reducing equipment maintenance costs and downtime.

[0025] As described above, the wafer heating plate spiral heating wire pressing system of the present invention has the following beneficial effects: 1. In this application, by designing a temporary storage groove on the chassis that is mirror-symmetrical to the heating plate, a closed constraint cavity is formed between the two. This not only restricts the vertical floating of the heating wire, but also constrains it from the side, ensuring that the heating wire always moves along the predetermined spiral path. This plays a continuous guiding and correcting role for the heating wire with deformation error, forcing it to enter the predetermined position according to the trajectory of the cavity, and avoiding lateral jamming in the groove.

[0026] 2. In this application, the complex problem of synchronous downward pressure of the spiral is simplified into a linear propulsion problem by using a group of top beads. The power does not act directly on the heating wire, but first acts on the top beads, and then the pressure is transmitted by the group of top beads. This "medium pressure transmission" method buffers the impact that may be caused by uneven driving, making the final downward pressure acting on the heating wire smoother and more uniform, and greatly reducing the risk of damaging the heating wire or the tank wall. Attached Figure Description

[0027] Figure 1 This is a schematic diagram of a specific embodiment of the present invention and the structure of the heating plate during assembly.

[0028] Figure 2 This is a bottom view of the chassis in a specific embodiment of the present invention.

[0029] Figure 3 This is a cross-sectional view of the internal structure of a specific embodiment of the present invention.

[0030] Figure 4 A cross-sectional view of a discharge assembly according to a specific embodiment of the present invention.

[0031] Figure 5 This is a schematic diagram of the internal structure of a specific embodiment of the present invention.

[0032] Figure 6 A cross-sectional view of a carrier according to a specific embodiment of the present invention.

[0033] Figure 7 for Figure 5 A magnified view of part B in the diagram.

[0034] Figure 8 This is a schematic diagram of the top bead just being captured by the positioning track in a specific embodiment of the present invention.

[0035] Figure 9 for Figure 8 A magnified view of part A in the diagram.

[0036] Figure 10 This is a schematic diagram showing the top bead being simultaneously constrained by the positioning track and the positioning wing in a specific embodiment of the present invention.

[0037] The labels in the attached diagram are: 1. Chassis; 11. Temporary storage slot; 12. First through hole; 13. Positioning side wing; 14. Positioning track; 2. Top plate; 21. Second through hole; 211. Conical guide flare; 22. Storage cavity; 24. Discharge assembly; 241. Clamping flap; 242. Fixed shaft; 243. Lever; 244. Torsion spring; 25. Limiting part; 26. Receiving cavity; 3. Bearing and pushing mechanism; 31. Drive device; 32. Driven rod; 33. Bearing body; 331. Closing channel; 332. Connecting channel; 333. Involute channel; 334. Positioning cavity; 335. Extrusion cavity; 34. Top punch; 4. Constraint channel; 5. Heating wire; 6. Heating plate; 61. Mounting slot; 100. Top ball. Detailed Implementation

[0038] The following specific embodiments illustrate the implementation of the present invention. Those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification.

[0039] Please see Figures 1 to 10 It should be understood that the structures, proportions, sizes, etc., illustrated in the accompanying drawings are merely for illustrative purposes to aid those skilled in the art and to facilitate understanding and reading. They are not intended to limit the scope of the invention and therefore have no substantial technical significance. Any modifications to the structure, changes in proportions, or adjustments to size, without affecting the effectiveness and purpose of the invention, should still fall within the scope of the technical content disclosed in this invention. Furthermore, the terms such as "upper," "lower," "left," "right," "middle," and "one" used in this specification are merely for clarity and not intended to limit the scope of the invention. Changes or adjustments to their relative relationships, without substantially altering the technical content, should also be considered within the scope of the invention's implementation.

[0040] To ensure the heat transfer efficiency of the heating plate 6, an interference fit is required between the heating wire 5 and the mounting groove 61. However, the slender spiral heating wire 5 inevitably undergoes slight deformation during processing and heat treatment, resulting in errors between its actual shape and design parameters. The mounting groove 61 is a continuous, closed cavity with a complex spatial orientation. When pressing the heating wire 5 into the groove, if only local pressure is applied, the heating wire 5 is easily "stuck" in the groove due to the tight fit and the deformation error of the heating wire 5 itself. That is, when one end is pressed down, the other end will lift up due to stress concentration.

[0041] See Figures 1 to 10Against this technical background, the present invention provides a wafer heating plate spiral heating wire pressing system, including a base plate 1 pressed onto the heating plate 6, a top plate 2 spaced above the base plate 1, and a bearing and pushing mechanism 3 that rotates around the center of the base plate 1 within a receiving cavity 26 formed by the base plate 1 and the top plate 2.

[0042] The chassis 1 has a temporary storage slot 11, which is mirror-image of the mounting slot 61. The diameter of the temporary storage slot 11 is larger than that of the mounting slot 61, meaning the heating wire 5 and the temporary storage slot 11 are non-interference-fitted and can be assembled without obstruction. When the chassis 1 and the heating plate 6 are aligned, the temporary storage slot 11 and the mounting slot 61 close to form a constraint channel 4. A first through hole 12 is provided through the chassis 1, with its projection located at the starting center of the temporary storage slot 11. In a specific embodiment, the temporary storage slot 11 is shaped like a mosquito coil.

[0043] To achieve the above technical solution, the temporary storage groove 11 opened on the chassis 1 engages with the heating wire mounting groove 61 when the chassis 1 is pressed against the heating plate 6 to form a closed constraint channel 4, thereby constraining the heating wire 5 in vertical floating and lateral deformation. This provides continuous guidance and correction for the heating wire 5 with deformation error, forcing the heating wire 5 to move along a predetermined spiral path.

[0044] Reference Figure 1 and Figure 4 The top plate 2 includes a second through hole 21 extending through the top plate 2, a storage cavity 22 connected to the second through hole 21 and housing the top beads 100, a flared conical guide flare 211 located at the inlet end of the second through hole 21, and a discharge assembly 24 located at the outlet end of the second through hole 21 for individually separating the top beads 100. The top beads 100 are pre-stored in the storage cavity 22 of the top plate 2 and, after passing through the conical guide flare 211, fall sequentially along the vertical second through hole 21 by their own weight. Preferably, the second through hole 21 is vertically opened along the thickness direction of the top plate 2, and the inner diameter of the second through hole 21 is in clearance fit with the outer diameter of the top beads 100, so that the top beads 100 can slide down along the direction in which the second through hole 21 is opened.

[0045] Specifically, the discharge assembly 24 can only accommodate one top bead 100. It includes a pair of opposing clamping petals 241 for supporting the top bead 100, a fixed shaft 242 installed perpendicular to the falling direction of the top bead 100 at the outlet end of the second through hole 21, and a lever 243 connected to the clamping petals 241 on the side facing the chassis 1. The clamping petals 241 have an arc-shaped structure that is narrow at the bottom and wide at the top, and are concave inward. They are rotatably installed at the outlet end of the second through hole 21 via the fixed shaft 242. The extension line of the clamping petals towards the outlet end of the second through hole 21 converges to form a convergence port that allows only a single top bead 100 to pass through. The end of the clamping petals that is away from the second through hole 21 also converges inward to form a latch. The clamping petals swing around the fixed shaft 242 as the rotation center to realize the reverse linkage opening and closing of the lower convergence port and the upper latch. When the converging opening is closed, the latch is open, and the top bead 100 can fall along the second through hole 21 until it is supported by the clamping petal 241; when the converging opening is open, the latch engages, preventing the next top bead 100 from entering the discharge assembly 24.

[0046] Continue to refer to Figure 4 A torsion spring 244 is fitted on the fixed shaft 242. The torsion spring 244 applies a preload force to the clamping discs 241, causing them to clamp together, so that the convergence port is in a closed state under normal conditions. When the lever 243 receives an outward thrust, it can drive the clamping discs 241 to overcome the preload force applied by the torsion spring 244 and move away from each other, so that the convergence port opens. This allows the top bead 100, which was originally supported by the clamping discs 241, to detach from the discharge assembly 24 under its own weight. At the same time, the upper latch closes, so that the top bead 100 is completely locked in the second through hole 21 and cannot enter the discharge assembly 24. Until the thrust applied to the lever 243 disappears, the clamping discs 241 move closer to each other under the preload force of the torsion spring 244, closing the convergence port. The latch opens again, allowing the top bead 100, which was just locked in the second through hole 21, to fall into the discharge assembly 24 and wait for the next trigger cycle.

[0047] In one specific embodiment, the clamping flap 241 is made of SUS301 stainless steel elastic strip by stamping, and its inner side is coated with a polymer damping layer formed by Teflon (PTFE) coating to buffer the rebound impact force caused by the gravity of the top ball 100 when it falls. Of course, there are no limitations on the materials and mating relationship between the clamping flap 241 and the polymer damping layer, and the polymer damping layer can also be bonded to the inner side of the clamping flap 241.

[0048] In this application, a lever system is formed by the rotatably mounted clamping petals 241, the lever 243, and the fixed shaft 242. Only a small lateral thrust needs to be applied to the end of the lever 243 to generate opening and closing forces at the converging opening and the locking opening of the clamping petals 241, respectively. With extremely high reliability and synchronization, it is ensured that the top ball 100, as the pressure medium, can be fed into the subsequent bearing and pushing mechanism 3 in a completely uniform rhythm.

[0049] Reference Figure 3 and Figure 5 The carrying and pushing mechanism 3 includes a driving device 31, a driven rod 32 connected to the output end of the driving device 31, and a carrier body 33 connected to the driven rod 32 and rotating planetarily within the receiving cavity 26 with the axis of the output end of the driving device 31 as the center. The carrier body 33 is a hollow, flat, elliptical shape, and its trajectory projection covers the first through hole 12 and the second through hole 21. The design of the carrier body 33, within a limited thickness, widens the lateral dimension. When the top bead 100 is pressed against the first through hole 12, the flat cavity wall provides anti-overturning guiding constraint for the top bead 100, forcing it to advance along a spiral tangent, thus eliminating the risk of the top bead 100 getting stuck on the heating wire 5 due to deflection at the outlet.

[0050] In one specific embodiment, the drive device 31 is a servo motor, which is mounted above the top plate 2 and its output end extends through the top plate 2 into the receiving cavity 26. A mechanical torque limiter is connected in series between the servo motor and the driven rod 32 to generate slippage relief force when the system thrust exceeds a preset threshold. The mechanical torque limiter is configured to transmit full torque during normal operation, and when encountering jamming or overload, or when the thrust exceeds the preset safety threshold, it instantaneously generates axial or radial slippage relief force to cut off power transmission, effectively preventing the impact of overload current on the servo drive, and significantly reducing equipment maintenance costs and downtime.

[0051] It should be noted that this application does not limit the number of carriers 33. Multiple carriers 33 can operate in parallel as long as they maintain rotational balance and do not interfere with each other. For example... Figure 3 In the middle, the number of carriers 33 is two that are centrally symmetrical.

[0052] Reference Figure 6 The interior of the carrier 33 is provided with a converging channel 331 that connects to the second through hole 21 at the input end, a connecting channel 332 that connects to the output end of the top bead 100 in the forward discharge direction, and an involute channel 333 that connects to the first through hole 12 at the output end. The diameter of the converging channel 331 decreases from the input end to the output end, the diameter of the involute channel 333 increases from the input end to the output end, and the diameter of the connecting channel 332 is adapted to the diameter of the top bead 100, forming an internal space that is roughly "funnel-shaped".

[0053] To achieve the above technical solution, the converging channel 331, connecting channel 332, and involute channel 333 form a three-section channel design of "convergence-equal diameter-involute". When the top bead 100 rolls in from the second through hole 21, a slight deviation is unavoidable. The large diameter of the converging channel 331 plays a good role in fault tolerance and guidance, allowing the top bead 100 to smoothly enter the converging channel 331. The diameter of the connecting channel 332 is matched with the diameter of the top bead 100, so that the top bead 100 remains on a stable orbital plane when following the planetary rotation of the carrier 33, without jumping up and down or spinning. When the top bead 100 pushes the heating wire 5 into the mounting groove 61 under the push of the carrier 33, if the heating wire 5 "rebounds" due to its own stress and causes the top bead 100 to retreat in the opposite direction, the design of the small inlet and large outlet of the involute channel 333 makes the top bead 100 rapidly compress the air in the closed air at the large diameter end of the involute channel 333 at the moment it retreats towards the large end, forming an "air spring anti-retreat mechanism".

[0054] In one specific embodiment, the carrier 33 rotates in the direction of rotation, and a punch 34 is provided on the top of its facing side. The punch 34 is used to push the lever 243 apart on both sides of its own radial direction, so that the lever 243 can drive the clamping petals 241 to rotate around the fixed axis 242 as the center, and open the converging opening and close the latch, so that the top ball 100 originally carried in the discharge assembly 24 can fall into the carrier 33 and enter the converging channel 331 of the carrier 33. When the punch 34 passes under the discharge assembly 24 as the carrier 33 rotates, its thrust on the lever 243 disappears, and the clamping petals 241 rotate unidirectionally under the action of the torsion spring 244, close again, and support the second top ball 100 falling from the latch. In a preferred embodiment, the punch 34 is designed as a wedge or has a protruding structure with a bevel or curved surface, while the lever 243 is inclined to both sides radially along the punch 34, which is intended to reduce the direct impact generated when the punch 34 contacts the lever 243, thereby improving the service life of the equipment without affecting its function.

[0055] Reference Figure 6 and Figure 9 The bottom of the support body 33 extends towards the chassis 1 and has an extrusion channel. Along the rotation direction of the support body 33, the extrusion channel includes a positioning cavity 334 whose contour fits the outer spherical surface of the single top ball 100 to lock its rolling freedom at the moment of falling, and an extrusion cavity 335 that gradually narrows and extends from the positioning cavity 334 towards the chassis 1 to convert the rolling potential energy of the top ball 100 into a pre-tightening thrust towards the first through hole 12. The extrusion channel extending towards the chassis 1 and the fixed upper surface of the chassis 1 together form a gradually narrowing extrusion gap, thereby converting the constraint on the top ball 100 into a directional extrusion force towards the first through hole 12.

[0056] To achieve the above technical solution, the positioning cavity 334 forces the top ball 100, which falls from the carrier 33 into the chassis 1, to be "aligned," preventing jamming and ball jumping problems caused by the disorderly rolling of the top ball 100. The compression cavity 335 converts the gravitational potential energy of the top ball 100 into horizontal kinetic energy, thereby significantly reducing the impact load and effectively protecting the heating wire 5. At the same time, by transmitting pressure to the heating wire 5 through the group of top balls 100, damage caused by direct action on the heating wire 5 is directly avoided. On the other hand, the complex problem of synchronous spiral pressing is simplified into a linear propulsion problem, making the force acting on the heating wire 5 smooth and uniform.

[0057] Reference Figures 7 to 10 In a preferred embodiment, a positioning track 14 connected to the first through hole 12 is provided on the upper surface of the chassis 1. Its projection on the chassis 1 coincides with the movement trajectory of the carrier 33, and its structure is roughly a curved "slide". The positioning track 14 is used to support the lower surface of the top bead 100 and at the same time provide it with limiting and guiding functions. The positioning track 14 gradually tilts downward along the rolling direction of the top bead 100 so that the top bead 100 can be captured by the positioning track 14 before entering the first through hole 12. Together with the positioning cavity 334, the top bead 100 is positioned and accurately guided to the first through hole 12. Finally, it is pressed into the first through hole 12 by the end of the extrusion cavity 335.

[0058] When the top bead 100 falls from the second through hole 21 into the closing channel 331 of the carrier 33, it continues to fall along the inner wall of the closing channel 331 and is continuously guided through the connecting channel 332. Since the carrier 33 is in a rotating state, when the top bead 100 passes through the connecting channel 332, it will be confined in the extrusion gap. It will first be abutted and guided by the positioning cavity 334 and the upper surface of the chassis 1 to achieve initial positioning and guidance. As the carrier 33 rotates, when it rolls to the initial section of the positioning track 14, the height of the top bead 100 begins to gradually decrease with the guidance of the positioning track 14. Then, the upper surface separates from the positioning cavity 334 and enters the extrusion cavity 335. As the space at the top of the extrusion cavity 335 shrinks, the lower surface of the top bead 100 is more supported by the positioning track 14 and is finally completely extruded into the first through hole 12 by the end of the extrusion cavity 335. Each rotation of the extrusion device feeds in a fixed amount of top bead 100. Multiple top beads 100 are connected end to end in the temporary storage groove 11 to form a rigid bead chain in one direction. Subsequent top beads 100 continue to push forward, causing the bead chain to gradually extend from the outside to the center of the temporary storage groove 11. Through the force chain, a continuous and uniform downward extrusion force is applied to the heating wire 5, which constrains the channel 4 and limits the heating wire 5 throughout, preventing it from tilting up and enabling it to be gradually and smoothly pressed into the installation groove 61.

[0059] Reference Figure 7 and Figure 8 The first through hole 12 is opened at the outermost radial end of the temporary storage groove 11 and extends obliquely along the thickness direction of the chassis 1, with the oblique direction being consistent with the rotation direction of the support body 33.

[0060] By setting the first through hole 12 to be inclined in the same direction as the rotation direction of the carrier 33, the inclined hole wall can follow the tangential movement trajectory of the top ball 100, transforming the original vertical collision into a smooth sliding guide; at the same time, the inclined channel applies an additional tangential force to the top ball 100, greatly improving the smoothness of the top ball 100 entering the temporary storage slot 11.

[0061] Reference Figure 7 and Figure 9 The input edge of the first through hole 12 extends outward to form a positioning wing 13. Along the rotation direction of the carrier 33, the width and thickness of the positioning wing 13 increase to provide guidance during the rolling of the top ball 100. The projection of the positioning wing 13 on the chassis 1 at least partially overlaps with the positioning track 14, that is, the initial section of the positioning wing 13 extends above the positioning track 14 so that the top ball 100 can smoothly transition between the two during its movement toward the first through hole 12, and can be captured and positioned and guided by the positioning track 14 and the positioning wing 13 in turn.

[0062] After the top ball 100 is guided to the positioning track 14, its upper surface will be gradually captured and abutted by the initial section of the positioning side wing 13 that extends partially above the positioning track 14. The top ball 100 gradually begins to break free from the constraint of the extrusion cavity 335 and is positioned and guided on its upper and lower sides by the positioning track 14 and the positioning side wing 13 respectively. As the rolling continues, the lower surface of the top ball 100 will eventually break free from the positioning track 14. Although its top is still higher than the upper surface of the chassis 1, the positioning side wing 13 is already able to complete the constraint on its orientation toward the first through hole 12. As the carrier 33 moves away from the positioning side wing 13, the end of its extrusion cavity 335 completes the final extrusion on the upper surface of the top ball 100, causing the top ball 100 to break free from the constraint of the positioning side wing 13 and enter the first through hole 12, and extruding the previous top ball 100 along the direction of the temporary storage groove 11.

[0063] To achieve the above technical solution, by setting a positioning wing 13 whose unfolding direction is directly opposite to the rotational tangent direction of the carrier 33, the top ball 100 can be intercepted and laterally corrected. Following the increasing width and thickness of the positioning wing 13 and the narrowing of the top opening, the top ball 100 is smoothly guided directly above the first through hole 12. Simultaneously, the thickness of the wing is designed to increase along the rotational direction, resulting in a streamlined slope on the positioning wing 13 that conforms to the airflow and movement trajectory, effectively preventing motion interference with rotating components.

[0064] In some specific embodiments, the outer periphery of the chassis 1 is provided with a locking mechanism (not shown in the figure) for locking the chassis 1 and the heating plate 6 in the vertical direction. Specifically, the locking mechanism includes a toggle-type pneumatic clamp hinged to the outer periphery of the chassis 1, and a limiting part 25 provided on the top plate 2 and adapted to the outer periphery contour of the heating plate 6 to limit the docking angle between the chassis 1 and the heating plate 6.

[0065] To achieve the above technical solution, the limiting part 25 completes the angle calibration and circumferential constraint of the chassis 1 and the heating plate 6 when they are engaged, and at the same time, it works in conjunction with the toggle-type pneumatic clamp to provide linear locking and fixation.

[0066] The present invention provides a wafer heating plate spiral heating wire pressing system for the process of loading heating wire 5 into the mounting groove 61 of heating plate 6: the heating plate 6 to be installed with heating wire 5 is placed horizontally on the worktable with mounting groove 61 facing upward, and then the base plate 1 is aligned and pressed onto the heating plate 6. At this time, the temporary storage groove 11 opened on the base plate 1 and the mounting groove 61 on the heating plate 6 form a closed constraint channel 4. Then, the base plate 1 and the heating plate 6 are locked and fixed in the vertical direction by the toggle-type pneumatic clamp. When the drive device 31 is started, the output shaft of the drive device 31 drives the driven rod 32 and the carrier 33 fixed at its end to perform planetary rotation in the receiving cavity 26. At the same time, several top balls 100 are put into the storage cavity 22. When the carrier 33 rotates to the position directly below the discharge component 24, the top balls 100 that pass through the second through hole 21 and the discharge component 24 are received by the carrier 33 and enter the closing channel 331. Under the centrifugal force generated by the rotation of the carrier 33 and the guidance of the gradually narrowing shape of the channel, the top balls 100 move towards the center and enter the gradually widening channel 333 through the connecting channel 332 with a suitable diameter.

[0067] The top bead 100, falling from the involute channel 333, is "aligned" by the positioning cavity 334 and then enters the extrusion cavity 335. The gap between the extrusion channel and the fixed upper surface of the chassis 1 gradually narrows along the rotation direction, forming a wedge-shaped space, which converts the gravitational potential energy of the top bead 100 into a pre-tightening thrust toward the first through hole 12. When the carrier 33 rotates until the extrusion cavity 335 is aligned with the entrance of the first through hole 12, the top bead 100 is subjected to an increasingly large radial constraint force, which is converted into a strong axial extrusion force toward the first through hole 12, causing the top bead 100 to rush toward the first through hole 12 at high speed as if "launched".

[0068] At the entrance of the first through hole 12, the positioning wing 13 dynamically captures and centers the top bead 100, guiding it to enter smoothly. The first top bead 100 ejected from the first through hole 12 enters the constraint channel 4. Subsequent top beads 100 repeat the motion trajectory to enter the constraint channel 4, and the next top bead 100 pushes the previous top bead 100 to form a continuous and uniformly forward-moving pressure wave in the constraint channel 4.

[0069] When the heating wire 5 is fully pressed into the bottom of the groove and the top bead 100 abuts against the end of the constraint channel 4, the drive device 31 is turned off, the carrier 33 stops rotating, and then the toggle-type pneumatic clamp is released, so that the chassis 1 is separated from the heating plate 6, and the top bead 100 can be recycled.

[0070] It should be noted that, in order to promptly determine whether the heating wire 5 has been completely pressed into the bottom of the tank, a pressure sensor can be installed at the end of the temporary storage tank 11 (in the direction of the top bead 100 discharge) to transmit a completion signal. Alternatively, the required number of top beads 100 can be pre-calculated according to the specifications of the heating plate 6, and the corresponding number of top beads 100 can be placed in the storage chamber 22, or a counting sensor can be installed at the outlet end of the storage chamber 22.

[0071] The above embodiments are merely illustrative of the principles and effects of the present invention and are not intended to limit the invention. Any person skilled in the art can modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in the present invention should still be covered by the claims of the present invention.

Claims

1. A wafer heating plate spiral heating wire press-fitting system, characterized in that, include: The base (1) is pressed against the heating plate (6). The mounting groove (61) of the heating wire (5) on the heating plate (6) is mirror-mapped on the base (1) to form a temporary storage groove (11). A first through hole (12) is opened through the base (1) with its projection located at the starting center of the temporary storage groove (11). A top plate (2) disposed above the chassis (1) includes a second through hole (21) penetrating the top plate (2), a storage cavity (22) communicating with the second through hole (21) and accommodating a top bead (100), and, The discharge assembly (24) is provided at the outlet end of the second through hole (21) to separate the top ball (100) individually; and the bearing and pushing mechanism (3) rotates planetarily within the receiving cavity (26) formed by the chassis (1) and the top plate (2); the top ball (100) rolls from the storage cavity (22) into the second through hole (21) whose inner diameter is in sliding clearance fit with the outer diameter of the top ball (100) and is separated individually by the discharge assembly (24) so ​​that the single top ball (100) enters the bearing and pushing mechanism (3), and is pressed into the first through hole (12) by the bearing and pushing mechanism (3) to roll into the constraint channel (4) formed by the mating of the temporary storage groove (11) and the mounting groove (61).

2. The spiral heating wire press-fit system of a wafer heating disc according to claim 1, wherein, The carrying and pushing mechanism (3) includes a driving device (31), a driven rod (32) connected to the output end of the driving device (31), and a carrier (33) connected to the driven rod (32) and rotating planetarily within the receiving cavity (26) with the axis of the output end of the driving device (31) as the center; the carrier (33) is a hollow, flat, elliptical carrier (33), and the trajectory projection of the carrier (33) covers the first through hole (12) and the second through hole (21).

3. The spiral heating wire press-fit system of a wafer heating disc according to claim 2, characterized in that, The interior of the carrier (33) is provided with a converging channel (331) that connects to the second through hole (21) at the input end, a connecting channel (332) that connects to the first through hole (12) at the output end, and an involute channel (333) that connects to the first through hole (12) at the output end. The diameter of the converging channel (331) decreases from the input end to the output end, the diameter of the involute channel (333) increases from the input end to the output end, and the diameter of the connecting channel (332) is adapted to the diameter of the top bead (100).

4. The spiral heating wire press-fit system of a wafer heating disc according to claim 3, wherein, The second through hole (21) is vertically opened along the thickness direction of the top plate (2), and the discharge assembly (24) is used to receive the top ball (100) falling from the second through hole (21); the discharge assembly (24) includes a pair of clamping petals (241) that intersect at the outlet end of the second through hole (21) and converge along the axial direction of the second through hole (21), a torsion spring (244) that applies a preload force to the clamping petals (241) to bring them closer together, and a lever (243) that is connected to the clamping petals (241) and extends toward the carrier (33); the clamping petals (241) swing around the hinge point as the rotation center to realize the reverse linkage opening and closing of the upper and lower ends, and the inner distance between the two levers (243) at the contact mating section with the carrier (33) is less than the maximum diameter of the top of the carrier (33).

5. The spiral heating wire press-fit system of claim 3, wherein, The bottom of the support body (33) extends toward the chassis (1) and is provided with an extrusion channel. Along the rotation direction of the support body (33), the extrusion channel includes a positioning cavity (334) whose contour fits the outer spherical surface of a single top ball (100) to lock the rolling degree of freedom of the top ball (100) at the moment of its fall, and an extrusion cavity (335) that gradually narrows and extends from the positioning cavity (334) toward the chassis (1) to convert the gravitational potential energy of the top ball (100) into a pre-tightening thrust toward the first through hole (12).

6. A wafer heating plate spiral heating wire pressing system according to claim 2, characterized in that, The first through hole (12) is opened at the outermost radial end of the temporary storage groove (11) and extends obliquely along the thickness direction of the chassis (1), with the oblique direction being consistent with the rotation direction of the support (33).

7. A wafer heating plate spiral heating wire pressing system according to claim 6, characterized in that, The input edge of the first through hole (12) extends outward to form a positioning wing (13). The width and thickness of the positioning wing (13) increase along the rotation direction of the carrier (33) to provide guidance during the transfer of the top bead (100).

8. The press-in system of the spiral heating wire of the wafer heating disc according to any one of claims 1-7, characterized in that, The outer periphery of the chassis (1) is provided with a locking mechanism for locking the chassis (1) and the heating plate (6) in the vertical direction. The locking mechanism includes a toggle-type pneumatic clamp hinged to the outer periphery of the chassis (1) and a limiting part (25) provided on the top plate (2) and adapted to the outer periphery contour of the heating plate (6) to limit the docking angle between the chassis (1) and the heating plate (6).

9. The spiral heating wire press-fit system of a wafer heating disc according to claim 2, wherein, The drive device (31) is a servo motor, and a mechanical torque limiter that generates slippage and unloading force when the system thrust exceeds a preset threshold is connected in series between the drive device (31) and the driven rod (32).

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