A device for deep defluorination treatment of semiconductor fluoride-containing wastewater

Abstract

This invention relates to the field of fluoride-containing wastewater treatment technology, and more particularly to a deep defluorination treatment device for semiconductor fluoride-containing wastewater. The technical solution includes a treatment tank, a drive structure, a regulator, a water distributor, and a regeneration structure. The treatment tank includes an outer tank, a treatment cylinder, and a mesh frame, with the treatment cylinder suspended at the center of the outer tank. The drive structure includes a motor and a cone block. The regulator includes a water inlet, a top valve, a water outlet, a bottom valve, a guide rod, and a guide rod. The regeneration structure includes a motor and a support pipe, with backwashing holes on the outer wall of the support pipe. This invention employs a double-mesh frame for layered deep adsorption defluorination, utilizing rare-earth lanthanide adsorbents to chemically bond and lock stubborn fluoride ions. The dual-set rotation avoids treatment fluctuations caused by adsorption saturation. After saturation, the device can be sealed and isolated, then uniformly backwashed for regeneration. The regenerated waste liquid is returned to the front end for repeated treatment, ensuring stable effluent quality, preventing secondary pollution, and is suitable for continuous deep treatment of semiconductor fluoride-containing wastewater.

Description

Technical Field

[0001] This invention relates to water pollution control and treatment, and more particularly to a device for deep defluorination treatment of semiconductor fluoride-containing wastewater. Background Technology

[0002] Semiconductor wafer etching, oxide layer cleaning, and cavity cleaning processes use large amounts of fluoride-containing agents such as hydrofluoric acid and ammonium fluoride, which produce fluoride-containing wastewater containing free fluoride, complexed fluoride, and impurities such as organic matter and heavy metals. Traditional methods often employ chemical precipitation and flocculation filtration, which can only remove most of the free fluoride and are ineffective at removing stubborn complexed fluoride. Furthermore, the adsorbent is prone to saturation and uneven regeneration, easily leading to excessive fluoride levels in the effluent and insufficient treatment stability. A typical process flow is: fluoride-containing wastewater → equalization tank → primary calcium salt precipitation → secondary aluminum salt coagulation → sand filtration → activated carbon → activated alumina adsorption → effluent.

[0003] In the semiconductor chip manufacturing process, processes such as wet etching of wafers, removal of surface oxide layers, and cleaning of equipment cavities require the use of large amounts of fluorine-containing chemical reagents such as hydrofluoric acid and buffer etching solutions. After the reagents react with silicon-based materials, a large amount of fluorine-containing wastewater is generated. The wastewater not only contains free fluoride ions, but also contains silicon-fluorine complexed fluoride that is difficult to degrade, along with organic matter, trace heavy metals, and suspended impurities. If discharged directly, it will seriously pollute the aquatic environment.

[0004] Existing methods for treating fluoride-containing wastewater mostly employ chemical precipitation combined with a single adsorption filtration process. These methods can only achieve preliminary removal of high concentrations of free fluoride and are insufficient for deep purification of stubborn complexed fluoride. Conventional adsorption structures are often single-unit adsorption packing materials, which are prone to problems such as the inability to regenerate the adsorbent in a timely manner after saturation, leading to fluctuations in wastewater quality and failing to meet the high-standard deep defluorination and continuous treatment requirements for semiconductor wastewater. Therefore, those skilled in the art have provided a device for deep defluorination treatment of semiconductor fluoride-containing wastewater to solve the problems mentioned in the background art. Summary of the Invention

[0005] The purpose of this invention is to address the problems existing in the background art by proposing a deep defluorination treatment device for semiconductor fluoride-containing wastewater.

[0006] To achieve the above objectives, the present invention provides the following technical solution: a deep defluorination treatment device for semiconductor fluoride-containing wastewater, comprising a treatment tank, a drive structure, a regulator, a water distributor, and a regeneration structure. The treatment tank includes an outer tank, a treatment cylinder, and a mesh frame. The treatment cylinder is suspended in the center of the outer tank, and the mesh frame is fixed to the inner wall of the treatment cylinder and is arranged in two sets longitudinally. The drive structure includes a motor and a cone block, and the output end of the motor is provided with a screw with relatively distributed outer wall threads; The regulator includes a water inlet, a top valve, a water outlet, a bottom valve, a guide rod one, and a guide rod two. The water inlet and the water outlet have the same structure and are distributed opposite each other on the upper and lower sides of the treatment cylinder. The guide rod one consists of two sets arranged at the center of the water inlet and the water outlet. The top valve is connected to the guide rod one and suspended inside the water inlet. The bottom valve is connected to the guide rod one and suspended inside the bottom valve. The water distributor is located above the water inlet device; The regeneration structure includes a motor and a support tube. The support tube provides rotational support to the center of the treatment cylinder. The outer wall of the support tube has multiple sets of backwash holes arranged in a ring array. The outer wall of the support tube is fitted with symmetrically distributed bearing seats that are embedded inside the treatment cylinder. The bearing seats are sealed.

[0007] Preferably, the lower end of the outer tank is connected to a water tank, one end of the water tank is connected to a water outlet pipe, and a water distribution plate is provided inside the treatment cylinder between the mesh frames. The water distribution plate distributes the defluorination wastewater dripping from above evenly to the mesh frame below. The mesh frame is filled with rare earth lanthanide modified defluorination adsorbent. By utilizing the selective adsorption of fluoride ions by rare earth materials, residual low concentrations of fluoride and trace amounts of silicon-fluorine complexes are accurately captured.

[0008] Preferably, the cone blocks are distributed relatively to each other on the outside of the screw, and each cone block has a threaded hole inside for threaded connection and installation on the outer wall of the screw. The outer wall of the outer tank is provided with a guide rail, and the outer wall of the cone block has a sliding groove for sliding installation on the outer wall of the guide rail.

[0009] Preferably, a bearing bracket is provided at one end of the outer can, the lower end of the screw is rotatably installed inside the bearing bracket, symmetrically distributed sliding sleeves are embedded in the inner wall of one side of the outer can, the second guide rod is laterally slidably inserted into the sliding sleeve, a second support ring is sleeved on the outer wall of the outer end of the second guide rod located on the outer side of the outer can, and a second spring is provided between the second support ring and the outer wall of the outer can, which is sleeved on the outer side of the second guide rod.

[0010] Preferably, a ball bearing is rotatably mounted on one end of the guide rod, the ball bearing is located on the travel path of the cone, the outer wall radius of the cone gradually increases, and when the cone moves relative to the ball bearing, it gradually applies increasing pressure to the ball bearing, causing the guide rod to move towards the center of the outer tank.

[0011] Preferably, the guide rod inside the water outlet has a drainage groove at its center. The drainage groove is connected to the inner wall of the lower end of the bottom valve by a through groove. The drainage groove is connected to a sewage pipe that penetrates the outer tank. The inner wall of the bottom valve is provided with an inner bucket surface whose radius gradually decreases from the outside to the center, and the outer wall is provided with an outer conical surface that gradually decreases from one opposite end to the center. The outer wall of the outer conical surface is fitted with an annular sealing sleeve. When the sealing sleeve is in contact with the water inlet and the water outlet, it fills the gap between them.

[0012] Preferably, the end of the drain pipe located inside the outer tank is in the shape of a flexible hose, and a three-way valve is provided at the connection between the drain pipe and the through groove. The three-way valve is used to adjust the flow during the treatment of fluoride-containing wastewater and backwashing.

[0013] Preferably, both the water inlet and outlet are equipped with sliding guide plates. The first guide rod is longitudinally slidably installed inside the sliding guide plate. A support ring is sleeved on the outer wall of the first guide rod. A spring is sleeved on the outside of the first guide rod between the support ring and the sliding guide plate. A ball bearing is rotatably installed inside the opposite end of the first guide rod. The second guide rod is located inside the outer tank and has a secondary cone column with a radius gradually decreasing towards the center of the outer tank. The ball bearing rolls against the outer wall of the secondary cone column. When the secondary cone column moves towards the center of the outer tank, it applies an increasing compressive force to the ball bearing.

[0014] Preferably, a fixed seat is fitted onto the outer wall of the support tube, a motor is located inside the upper end of the fixed seat, a gear is provided at the output end of the motor, a side sleeve is provided at one end of the processing cylinder and fitted onto the outside of the support tube, a gear ring that meshes with the gear is fitted onto the outer wall of the side sleeve, one end of the support tube is open and the other end is closed, both ends of the support tube penetrate the outer tank, a filter is provided at the opening of the backwash hole, the filter is used to intercept granular rare earth lanthanide modified defluorination adsorbent that accidentally falls through the pores inside the mesh frame and enters the inside of the support tube through the backwash hole.

[0015] Preferably, the water distributor includes an annular pipe and an inlet pipe. The annular pipe is connected to the inlet pipe. One end of the inlet pipe passes through the outer tank. The annular pipe is suspended at the center of the outer tank and located directly above the mesh frame. An regulating valve is provided inside the inlet pipe. Water distribution holes distributed in a ring array are opened inside the lower end of the annular pipe.

[0016] Compared with the prior art, the beneficial effects of the present invention are as follows: In this invention, fluoride-containing wastewater from semiconductor production undergoes preliminary chemical precipitation, flocculation sedimentation, mud-water separation, quartz sand filtration, and activated carbon filtration before entering a treatment tank for deep defluorination. The rare earth lanthanide-modified defluorination adsorbent packed inside the mesh frame adsorbs stubborn fluoride-containing wastewater. Rare earth metal ions and fluoride ions form stable chemical bonds, firmly binding the fluoride. Furthermore, deep defluorination is performed on both sides, avoiding the situation where the adsorbent inside one set of mesh frames becomes saturated and cannot be regenerated in time, thus preventing the wastewater from undergoing phased treatment deviations. After the adsorbent is saturated, a dilute sodium hydroxide solution is added through the support pipe and flows backward through the adsorbent packing through the backwash hole to wash off the adsorbed fluoride. During the backwashing process, the bottom valve and the top valve close the upper and lower ends of the treatment cylinder. The bottom valve receives the treated wastewater, while the sewage pipe is opened, and the sewage is discharged through a separate pipeline. At the same time, the top valve and the bottom valve move away from the treatment cylinder in stages. Through the meshing of the gear and the gear ring, the gear cylinder is rotated, thereby uniformly washing and regenerating the adsorbent inside both sets of mesh frames. The regenerated high-fluoride wastewater is returned to the regulating tank at the front end of the semiconductor wastewater treatment equipment for another sedimentation treatment. The double mesh frames adsorb sequentially to prevent saturation lag, uniformly regenerate the packing, stably control fluoride, and prevent secondary pollution. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the main cross-sectional three-dimensional structure of the present invention; Figure 2 This is a front-view three-dimensional structural schematic diagram of the present invention; Figure 3 This is a front-view three-dimensional structural diagram of the regulator of the present invention; Figure 4 This is a schematic diagram of the main cross-sectional three-dimensional structure of the regulator of the present invention; Figure 5 This is a front-view stereoscopic structural diagram of the driving result of the present invention; Figure 6 This is a schematic diagram of the three-dimensional structure of the processing cylinder of the present invention in a main cross-section. Figure 7 This is a front-view three-dimensional structural diagram of the regenerative structure of the present invention; Figure 8 This is a bottom-view perspective view of the water distributor of the present invention. Figure 9 This is a schematic diagram of the main cross-sectional three-dimensional structure of the water outlet device of the present invention; Figure 10 This is a schematic diagram of the main cross-sectional three-dimensional structure of the water distributor of the present invention; Figure 11 These are schematic diagrams of the three-dimensional structure of the first guide rod and the second guide rod of the present invention, respectively.

[0018] Figure label: 100. Treatment tank; 101. Outer tank; 102. Water tank; 103. Outlet pipe; 104. Treatment cylinder; 105. Mesh frame; 106. Water distribution plate; 200. Drive structure; 201. Motor 1; 202. Screw; 203. Cone block; 204. Screw hole; 205. Guide rail; 206. Slide groove; 207. Bearing bracket; 300. Regulator; 301. Water inlet device; 302. Top valve; 303. Water outlet device; 304. Bottom valve; 305. Sewage pipe; 306. Outer conical surface; 307. Inner hopper surface; 308. Sealing sleeve; 309. Guide rod one; 310. Spring one; 311. Three-way valve; 312. Sliding guide plate; 313. Drainage trough; 314. Support ring one; 315. Ball bearing one; 316. Guide rod two; 317. Secondary cone column; 318. Through groove; 319. Sliding sleeve; 320. Spring two; 321. Support ring two; 322. Ball bearing two; 400. Water distributor; 401. Ring pipe; 402. Water distribution hole; 403. Water inlet pipe; 404. Regulating valve; 500. Regeneration structure; 501. Motor II; 502. Support tube; 503. Fixing seat; 504. Gear ring; 505. Bearing seat; 506. Backflushing hole; 507. Side sleeve. Detailed Implementation

[0019] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0020] Please see Figures 1 to 11 The present invention provides three embodiments: Example 1: A deep defluorination treatment device for semiconductor fluoride-containing wastewater includes a treatment tank 100, a drive structure 200, a regulator 300, a water distributor 400, and a regeneration structure 500. The treatment tank 100 includes an outer tank 101, a treatment cylinder 104, and a mesh frame 105. The treatment cylinder 104 is suspended in the center of the outer tank 101. The mesh frame 105 is fixed to the inner wall of the treatment cylinder 104 and is arranged in two sets longitudinally. The lower end of the outer tank is connected to a water tank 102, and one end of the water tank 102 is connected to a water outlet pipe 103. The treatment cylinder 104 is equipped with a water distribution plate 106 located inside the mesh frame 105. The water distribution plate 106 distributes the defluorination wastewater dripping from above evenly into the mesh frame 105 below. The mesh frame 105 is filled with rare earth lanthanide modified defluorination adsorbent. By utilizing the selective adsorption of fluoride ions by rare earth materials, residual low concentrations of fluoride and trace amounts of silicon-fluorine complexes are accurately captured.

[0021] The water distributor 400 is located above the water inlet device 301; The water distributor 400 includes an annular pipe 401 and an inlet pipe 403. The annular pipe 401 is connected to the inlet pipe 403. One end of the inlet pipe 403 passes through the outer tank 101. The annular pipe 401 is suspended at the center of the outer tank 101 and located directly above the mesh frame 105. A regulating valve 404 is provided inside the inlet pipe 403. Water distribution holes 402 arranged in a ring array are opened inside the lower end of the annular pipe 401.

[0022] The drive structure 200 includes a motor 201 and a cone block 203. The output end of the motor 201 is provided with a screw 202 whose outer wall threads are relatively distributed. The regulator 300 includes a water inlet 301, a top valve 302, a water outlet 303, a bottom valve 304, a first guide rod 309, and a second guide rod 316. The water inlet 301 and the water outlet 303 have the same structure and are distributed opposite each other on the upper and lower sides of the treatment cylinder 104. The first guide rod 309 is arranged in two sets at the center of the water inlet 301 and the water outlet 303. The top valve 302 is connected to the first guide rod 309 and suspended inside the water inlet 301. The bottom valve 304 is connected to the first guide rod 309 and suspended inside the bottom valve 304. In this embodiment, the semiconductor fluoride-containing wastewater, after undergoing preliminary chemical precipitation, flocculation sedimentation, mud-water separation, quartz sand filtration, and activated carbon filtration, undergoes final deep defluorination treatment. Through the coordinated operation of structures such as treatment tank 100, water distributor 400, treatment cylinder 104, mesh frame 105, and water tank 102, the wastewater is evenly distributed, subjected to two-stage adsorption, and clean water collection and stable output. This provides end-point assurance for the entire wastewater treatment process, ensuring that the treated wastewater meets the corresponding usage or discharge requirements.

[0023] The treatment tank 100 is a combination of an outer tank 101 and a treatment cylinder 104. The treatment cylinder 104 is suspended in the middle of the outer tank 101, providing a stable internal space for wastewater treatment and adsorption operations. Two sets of mesh frames 105 are fixed to the inner wall of the treatment cylinder 104, arranged vertically, and are used to fill the rare earth lanthanide-modified defluorination adsorbent, providing a carrier for the adsorption and removal of fluoride ions. The lower end of the outer tank is connected to a water tank 102, which is connected to a water outlet pipe 103 to collect the treated clean water and discharge it outward, ensuring stable water flow inside the device and preventing water accumulation or overflow. Inside the treatment cylinder 104, a water distribution plate 106 is installed between the two sets of mesh frames 105. The water distribution plate 106 can evenly disperse the wastewater dripping from the upper mesh frame 105, allowing the water to flow smoothly into the lower mesh frame 105, avoiding concentrated water flow impacting the adsorbent and ensuring a stable adsorption process.

[0024] The water distributor 400 consists of an annular pipe 401 and an inlet pipe 403. The inlet pipe 403 passes through the outer tank 101 and connects to the annular pipe 401. The annular pipe 401 is located directly above the mesh frame 105. Multiple sets of evenly distributed water distribution holes 402 are opened at the lower end of the annular pipe 401. Wastewater enters the annular pipe 401 through the inlet pipe 403 and then falls evenly through the water distribution holes 402, so that the wastewater can evenly contact the adsorbent in the upper mesh frame 105. Inside the treatment cylinder 104, the upper and lower sets of mesh frames 105, together with the rare earth lanthanide modified defluorination adsorbent filled inside, achieve two-stage deep adsorption. The upper mesh frame 105 adsorbs and removes the larger amount of residual fluoride ions in the wastewater, while the lower mesh frame 105 further captures the trace amounts of fluoride ions and silicon-fluorine complexes that were not completely adsorbed in the upper layer, improving the integrity of defluorination. The water distribution plate 106 is located between the two sets of mesh frames 105, and performs secondary water distribution on the wastewater after the upper adsorption, so that the water flow is evenly distributed on the surface of the adsorbent in the lower mesh frame 105, thereby improving the utilization efficiency of the lower adsorbent. The water tank 102 and the outlet pipe 103 work together to collect the clean water after the two-stage adsorption treatment and discharge it stably through the outlet pipe 103, maintaining stable hydraulic conditions inside the device and ensuring continuous adsorption treatment.

[0025] Rare earth lanthanide-modified defluorination adsorbents exhibit selective adsorption, forming stable bonds with fluoride ions to further purify fluorides that are difficult to remove in previous treatment processes, thus improving the overall treatment effect. Two sets of mesh frames 105 form a two-stage adsorption structure, distributing the adsorption load and preventing excessive load on any single adsorbent set, which could lead to rapid saturation, extending the effective working time and reducing water quality fluctuations caused by adsorbent saturation. The dual water distribution structure of the water distributor 400 and the water distribution plate 106 ensures comprehensive contact between wastewater and adsorbent, eliminating short-circuiting and dead zones, thereby improving adsorbent utilization and overall defluorination efficiency. The tight coordination between all structures ensures stable operation, enabling continuous deep defluorination and providing a good foundation for subsequent adsorbent regeneration. It also ensures stable effluent quality, meeting the actual needs of deep defluorination of semiconductor-containing wastewater. This achieves sufficient adsorption, stable effluent, and reliable operation, effectively removing stubborn fluoride ions and trace amounts of silicon-fluoride complexes from semiconductor-containing wastewater, thus enhancing the practicality and stability of the entire treatment device.

[0026] Example 2: The cone blocks 203 are distributed relatively outside the screw 202. Each cone block 203 has a threaded hole 204 that is threaded and installed on the outer wall of the screw 202. The outer wall of the outer can 101 is provided with a guide rail 205. The outer wall of the cone block 203 has a sliding groove 206 that is slidably installed on the outer wall of the guide rail 205.

[0027] One end of the outer tank 101 is provided with a bearing bracket 207, and the lower end of the screw 202 is rotatably installed inside the bearing bracket 207. A symmetrically distributed sliding sleeve 319 is embedded in the inner wall of one side of the outer can 101. The second guide rod 316 is laterally slidably inserted into the sliding sleeve 319. A second support ring 321 is sleeved on the outer wall of the second guide rod 316 on the outer side of the outer can. A second spring 320 is provided between the second support ring 321 and the outer wall of the outer can 101 and is sleeved on the outer side of the second guide rod 316.

[0028] One end of the guide rod 316 is rotatably mounted with a ball bearing 322. The ball bearing 322 is located on the travel path of the cone block 203. The outer radius of the cone block 203 gradually increases. When the cone block 203 moves relative to the ball bearing 322, it gradually applies increasing pressure, causing the guide rod 316 to move towards the center of the outer tank 101.

[0029] The guide rod 309 inside the water outlet 303 has a drainage groove 313 at its center. The drainage groove 313 is connected to the inner wall of the lower end of the bottom valve 304 by a through groove 318. The drainage groove 313 is connected to a sewage pipe 305 that penetrates the outer tank 101. The inner wall of the bottom valve 304 is provided with an inner bucket surface 307 whose radius gradually decreases from the outside to the center, and the outer wall is provided with an outer conical surface 306 whose radius gradually decreases from one opposite end to the center. The outer wall of the outer conical surface 306 is fitted with an annular sealing sleeve 308. When the sealing sleeve 308 is in contact with the water inlet 301 and the water outlet 303, it fills the gap between them.

[0030] The drain pipe 305 is located inside the outer tank 101 at one end in the shape of a flexible tube. A three-way valve 311 is provided at the connection between the drain pipe 305 and the through groove 318. The three-way valve 311 is used to adjust the flow during the treatment of fluoride-containing wastewater and backwashing.

[0031] Both the water inlet 301 and the water outlet 303 are equipped with sliding guide plates 312. The first guide rod 309 is longitudinally slidably installed inside the sliding guide plate 312. The outer wall of the first guide rod 309 is sleeved with a support ring 314. A spring 310 is sleeved on the outside of the first guide rod 309 between the support ring 314 and the sliding guide plate 312. A ball bearing 315 is rotatably installed inside the opposite end of the first guide rod 309. The second guide rod 316 is located inside the outer tank 101 and has a secondary cone 317 with a radius gradually decreasing towards the center of the outer tank 101. The ball bearing 315 rolls and fits against the outer wall of the secondary cone 317. When the secondary cone 317 moves towards the center of the outer tank 101, it applies an increasing compressive force to the ball bearing 322.

[0032] In this embodiment, the drive structure 200 and the regulator 300 cooperate to achieve the linkage opening and closing control of the top valve 302 and the bottom valve 304, providing mechanical drive guarantee for the normal processing and regeneration switching of the device. Motor 201 serves as the power source, driving the screw 202, whose outer wall threads are relatively distributed, to rotate. The cone block 203 is sleeved on the outer wall of the screw 202 through the internal threaded hole 204. Under the guiding and limiting action of the guide rail 205 and the slide groove 206 of the outer tank 101, the cone block 203 moves relative to the screw 202 in a linear direction as the screw 202 rotates. The outer wall radius of the cone block 203 is gradually increased, gradually applying increasing pressure to the ball bearing 322 at one end of the guide rod 316 during the movement, pushing the guide rod 316 along the slide sleeve 319 towards the center of the device, providing lateral driving force for the opening and closing of the valves. The outer wall of the guide rod 216 is provided with a support ring 221 and a spring 220. The spring 220 provides a reset force for the guide rod 216. After the cone block 203 resets, it drives the guide rod 216 to automatically return to its original position, ensuring that the drive structure 200 can operate stably in a cycle.

[0033] This embodiment realizes the functions of valve linkage opening and closing, sealing connection, and passage switching. When the second guide rod 316 moves towards the center, the end secondary cone column 317 applies a squeezing force to the end ball bearing 315 of the first guide rod 309, pushing the first guide rod 309 to drive the top valve 302 and the bottom valve 304 to move longitudinally, realizing the opening and closing of the water inlet 301 and the water outlet 303. The outer walls of the top valve 302 and the bottom valve 304 are provided with outer cone surfaces 306 and fitted with sealing sleeves 308. In the closed state, the sealing sleeves 308 are tightly fitted with the inner walls of the water inlet 301 and the water outlet 303, filling the connection gap, ensuring the sealing effect inside the treatment cylinder 104, and preventing wastewater or regenerated liquid leakage. The water outlet 303 has a drainage groove 313 and a through groove 318 on the internal guide rod 309. The drainage groove 313 is connected to the sewage pipe 305 that runs through the outer tank 101. The sewage pipe 305 adopts a flexible hose structure and is equipped with a three-way valve 311, which can switch the passage between the treatment state and the backwashing state. During normal treatment, the sewage passage is closed, and during backwashing, the sewage passage is opened to achieve separate discharge of waste liquid.

[0034] To achieve stable opening and closing, reliable sealing, and smooth switching, the inclined surface transmission cooperation between the cone block 203 and the guide rod 316 ensures smooth valve opening and closing without jamming or impact, extending the service life of the valve and sealing structure. The sealing sleeve 308, in conjunction with the cone surface, forms a multi-layer seal, ensuring no leakage in the treatment cylinder 104 during adsorption operations and no cross-contamination during backwashing regeneration, guaranteeing that the treatment and regeneration processes do not interfere with each other. The spring reset structure allows the drive components to automatically return to their original position after completing their action, enabling cyclical drive without additional power, reducing energy consumption and failure rate. The clear pathway switching structure ensures stable operation and allows for rapid switching between normal treatment and regeneration modes, improving the overall operating efficiency of the device and providing reliable structural support for subsequent adsorbent regeneration and continuous wastewater treatment.

[0035] Example 3: The regeneration structure 500 includes a motor 501 and a support tube 502. The support tube 502 provides rotational support for the center of the processing cylinder 104. The outer wall of the support tube 502 has multiple sets of backwash holes 506 arranged in a ring array. The outer wall of the support tube 502 is fitted with symmetrically distributed bearing seats 505 that are embedded inside the processing cylinder 104. The bearing seats 505 are sealed.

[0036] A fixed base 503 is sleeved on the outer wall of the support tube 502. The motor 201 is located inside the upper end of the fixed base 503. A gear is provided at the output end of the motor 201. A side sleeve 507 is provided at one end of the processing cylinder 104 and sleeved on the outside of the support tube 502. A gear ring 504 that meshes with the gear is sleeved on the outer wall of the side sleeve 507. One end of the support tube 502 is open and the other end is closed. Both ends of the support tube 502 penetrate the outer tank 101. A filter is provided at the opening of the backwash hole. The filter is used to intercept granular rare earth lanthanide modified defluorination adsorbent that accidentally falls through the pores inside the mesh frame 105 and enters the interior of the support tube 502 through the backwash hole 506. A support mesh plate is provided at the upper opening of the mesh frame 105 to prevent the internal packing from falling when the processing cylinder 104 is rotated.

[0037] In this embodiment, the main function of the regeneration structure 500 is to uniformly backwash and regenerate the saturated rare earth lanthanide-modified defluorination adsorbent, restoring its performance and enabling its recycling, thus avoiding processing interruptions due to packing replacement. The support tube 502 provides central rotational support for the treatment cylinder 104, and its two ends are connected to the treatment cylinder 104 via sealed bearing seats 505 to ensure no leakage during rotation. Multiple sets of backwash holes 506 arranged in a ring array are formed on the outer wall of the support tube 502. Filter plates are installed at the openings of the backwash holes 506 to intercept rare earth adsorbent particles and prevent packing from entering the support tube 502 and causing blockage. One end of the support tube 502 is open to receive dilute sodium hydroxide regeneration solution, while the other end is closed, ensuring that the regeneration solution can only be uniformly sprayed out through the backwash holes 506 to wash the adsorbent inside the mesh frame 105.

[0038] Motor 201 drives the side sleeve 507 and the treatment cylinder 104 to rotate around the support pipe 502 via gear and gear ring 504. This ensures that both sets of mesh frames 105 can fully contact the regeneration liquid during the rotation process, guaranteeing uniform and dead-angle-free adsorbent regeneration. A support mesh plate is installed at the upper end of the mesh frame 105 to prevent internal packing material from falling off during cylinder rotation, thus avoiding adsorbent loss and pipe blockage. The regeneration liquid enters through the support pipe 502 and is evenly sprayed onto the adsorbent layer through the backwash hole 506, washing off the adsorbed fluoride ions and completing the regeneration. After the top valve 302 and bottom valve 304 are closed, a closed regeneration space is formed. The high-fluoride waste liquid generated during washing is discharged through the through channel 318, drainage channel 313, and sewage pipe 305, achieving separate collection of regeneration waste liquid for easy return to the front-end equalization tank for reprocessing, preventing secondary pollution, and achieving uniform regeneration, cylinder rotation, packing material protection, and waste liquid collection.

[0039] The rotating cylinder, combined with uniform liquid distribution, ensures that every part of the adsorbent makes full contact with the regeneration solution, resulting in more thorough regeneration, more complete restoration of adsorption capacity, and an extended overall service life of the adsorbent. Dual protection by the support mesh and filter plates prevents packing material loss and equipment clogging, reducing maintenance frequency and operating costs. The regeneration waste liquid is uniformly recycled back to the front-end treatment system, achieving closed-loop treatment throughout the entire process. No pollutants are discharged externally, meeting environmental protection requirements. This achieves thorough regeneration, recycling, continuous operation, and no secondary pollution, significantly improving the efficiency and practicality of deep defluorination treatment for semiconductor fluoride-containing wastewater.

[0040] The above specific embodiments are merely several preferred embodiments of the present invention. Based on the technical solutions of the present invention and the relevant teachings of the above embodiments, those skilled in the art can make various alternative improvements and combinations to the above specific embodiments.

[0041] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the invention can be implemented in other specific forms without departing from its spirit or essential characteristics. Therefore, the embodiments should be considered in all respects as exemplary and non-limiting, and the scope of the invention is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of equivalents of the claims are intended to be included within the present invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

Claims

1. A device for deep defluorination treatment of semiconductor fluoride-containing wastewater, comprising a treatment tank (100), a drive structure (200), a regulator (300), a water distributor (400), and a regeneration structure (500), characterized in that: The processing tank (100) includes an outer tank (101), a processing cylinder (104), and a wire mesh frame (105). The processing cylinder (104) is suspended in the center of the outer tank (101), and the wire mesh frame (105) is fixed to the inner wall of the processing cylinder (104) and is arranged in two sets longitudinally. The drive structure (200) includes a motor (201) and a cone block (203). The output end of the motor (201) is provided with a screw (202) with relatively distributed outer wall threads. The regulator (300) includes a water inlet (301), a top valve (302), a water outlet (303), a bottom valve (304), a guide rod one (309), and a guide rod two (316). The water inlet (301) and the water outlet (303) have the same structure and are distributed on the upper and lower sides of the treatment cylinder (104). The guide rod one (309) consists of two sets arranged at the center of the water inlet (301) and the water outlet (303). The top valve (302) is connected to the guide rod one (309) and suspended inside the water inlet (301). The bottom valve (304) is connected to the guide rod one (309) and suspended inside the bottom valve (304). The water distributor (400) is located above the water inlet (301); The regeneration structure (500) includes a second motor (501) and a support tube (502). The support tube (502) provides rotational support for the center of the treatment cylinder (104). The outer wall of the support tube (502) has multiple sets of backwash holes (506) arranged in a ring array. The outer wall of the support tube (502) is fitted with symmetrically distributed bearing seats (505) that are embedded inside the treatment cylinder (104). The bearing seats (505) are sealed.

2. The device for deep defluorination treatment of semiconductor fluoride-containing wastewater according to claim 1, characterized in that: The lower end of the outer tank (101) is connected to a water tank (102), and one end of the water tank (102) is connected to a water outlet pipe (103). The treatment cylinder (104) is equipped with a water distribution plate (106) located between the mesh frames (105). The water distribution plate (106) distributes the defluorination wastewater dripping from above to the mesh frame (105) below in a secondary uniform manner. The mesh frame (105) is filled with rare earth lanthanide modified defluorination adsorbent. By utilizing the selective adsorption effect of rare earth materials on fluoride ions, residual low concentration fluoride and trace amounts of silicon-fluoride complexes are accurately captured.

3. The device for deep defluorination treatment of semiconductor fluoride-containing wastewater according to claim 1, characterized in that: The cone blocks (203) are distributed relative to each other on the outside of the screw (202). Each cone block (203) has a threaded hole (204) inside that is threaded and installed on the outer wall of the screw (202). The outer wall of the outer can (101) is provided with a guide rail (205). The outer wall of the cone block (203) has a sliding groove (206) that is slidably installed on the outer wall of the guide rail (205).

4. The device for deep defluorination treatment of semiconductor fluoride-containing wastewater according to claim 1, characterized in that: One end of the outer can (101) is provided with a bearing bracket (207), and the lower end of the screw (202) is rotatably installed inside the bearing bracket (207). A symmetrically distributed sliding sleeve (319) is embedded in the inner wall of one side of the outer can (101). The second guide rod (316) is laterally slidably inserted into the sliding sleeve (319). The outer wall of the second guide rod (316) located on the outer side of the outer can (101) is fitted with a second support ring (321). A second spring (320) is provided between the second support ring (321) and the outer wall of the outer can (101) and fitted on the outer side of the second guide rod (316).

5. The device for deep defluorination treatment of semiconductor fluoride-containing wastewater according to claim 4, characterized in that: One end of the guide rod (316) is rotatably mounted with a ball bearing (322). The ball bearing (322) is located on the travel path of the cone (203). The outer radius of the cone (203) gradually increases. When the cone (203) moves relative to the ball bearing, it gradually applies increasing pressure to the ball bearing (322), causing the guide rod (316) to move towards the center of the outer tank (101).

6. The device for deep defluorination treatment of semiconductor fluoride-containing wastewater according to claim 1, characterized in that: The guide rod (309) inside the water outlet (303) has a drainage groove (313) at its center. The drainage groove (313) is connected to the inner wall of the lower end of the bottom valve (304) by a through groove (318). The drainage groove (313) is connected to a sewage pipe (305) that penetrates the outer tank (101). The inner wall of the bottom valve (304) is provided with an inner bucket surface (307) whose radius gradually decreases from the outside to the center, and the outer wall is provided with an outer cone surface (306) that gradually decreases from one opposite end to the center. The outer wall of the outer cone surface (306) is fitted with a ring-shaped sealing sleeve (308). When the sealing sleeve (308) is in contact with the water inlet (301) and the water outlet (303), it fills the gap between them.

7. The device for deep defluorination treatment of semiconductor fluoride-containing wastewater according to claim 6, characterized in that: The drain pipe (305) is located inside the outer tank (101) and is in the shape of a flexible tube. A three-way valve (311) is provided at the connection between the drain pipe (305) and the through groove (318). The three-way valve (311) is used to adjust the opening and closing of the fluoride-containing wastewater during treatment and backwashing.

8. The device for deep defluorination treatment of semiconductor fluoride-containing wastewater according to claim 1, characterized in that: Both the water inlet (301) and the water outlet (303) are equipped with sliding guide plates (312). A guide rod (309) is longitudinally slidably installed inside the sliding guide plate (312). A support ring (314) is sleeved on the outer wall of the guide rod (309). A spring (310) is sleeved between the support ring (314) and the sliding guide plate (312) and is connected to the outside of the guide rod (309). A ball bearing (315) is rotatably mounted inside one end of the outer tank (101). The guide rod (316) is located inside the outer tank (101) and has a secondary cone (317) with its radius gradually decreasing towards the center of the outer tank (101). The ball bearing (315) rolls and fits against the outer wall of the secondary cone (317). When the secondary cone (317) moves toward the center of the outer tank (101), it applies an increasing compressive force to the ball bearing (322).

9. The device for deep defluorination treatment of semiconductor fluoride-containing wastewater according to claim 1, characterized in that: A fixing seat (503) is sleeved on the outer wall of the support tube (502). The motor (201) is located inside the upper end of the fixing seat (503). A gear is provided at the output end of the motor (201). A side sleeve (507) is provided at one end of the processing cylinder (104) and sleeved on the outside of the support tube (502). A gear ring (504) that meshes with the gear is sleeved on the outer wall of the side sleeve (507). One end of the support tube (502) is open. The support tube (502) is closed, and both ends of the support tube (502) penetrate the outer tank (101). A filter is provided at the opening of the backwash hole (506). The filter is used to intercept the granular rare earth lanthanide modified defluorinating adsorbent that accidentally falls through the pores inside the mesh frame (105) and enters the support tube (502) through the backwash hole (506). A support mesh plate is provided at the upper opening of the mesh frame (105) to prevent the internal packing from falling when the treatment cylinder (104) is turned over.

10. The device for deep defluorination treatment of semiconductor fluoride-containing wastewater according to claim 1, characterized in that: The water distributor (400) includes an annular pipe (401) and an inlet pipe (403). The annular pipe (401) is connected to the inlet pipe (403). One end of the inlet pipe (403) passes through the outer tank (101). The annular pipe (401) is suspended at the center of the outer tank (101) and located directly above the mesh frame (105). A regulating valve (404) is provided inside the inlet pipe (403). Water distribution holes (402) arranged in a ring array are opened inside the lower end of the annular pipe (401).

Images