Alkaline-resistant aluminum alloy and method of making, gas distribution plate, vapor deposition apparatus

Abstract

This invention relates to an alkali-resistant aluminum alloy and its preparation method, a gas distribution disk, and a vapor deposition apparatus, specifically relating to the field of aluminum alloys. The alkali-resistant aluminum alloy comprises, by mass percentage: Mn 1-1.5%, Cu 0.05-0.1%, Ni 0.1-0.2%, Fe≤0.6%, Si≤0.6%, Zn≤0.1%, Mg≤0.1%, Cr≤0.05%, Ti≤0.05%, with the balance being Al and unavoidable impurities. The corrosion-resistant aluminum alloy provided by this invention, through optimization of the aluminum alloy composition and the synergistic effect between elements, effectively improves the alkali corrosion resistance of the aluminum alloy while retaining the original formability and processing compatibility of 3003, significantly enhancing the performance of the aluminum alloy.

Description

Technical Field

[0001] This invention relates to the field of aluminum alloys, specifically to an alkali-resistant aluminum alloy and its preparation method, a gas distribution plate, and a vapor deposition apparatus. Background Technology

[0002] Chemical vapor deposition (CVD) is one of the core processes in integrated circuit manufacturing. Due to its significant advantages in film uniformity, density, and coverage, CVD is used to complete almost all dielectric, conductive, and semiconducting film layers, as well as a wide range of insulating film layers, in the production of advanced large-scale integrated circuits. With technological innovation, CVD will become more competitive in terms of reaction rate controllability and film thickness uniformity in order to achieve atomic-level film thickness control.

[0003] The basic principle of chemical vapor deposition (CVD) is as follows: two or more gaseous raw materials are introduced into a gas mixing disk and mixed evenly. Then, they are introduced into the reaction chamber at a uniform speed through a gas distribution disk. Under the action of heating or electric field and pressure, they undergo a chemical reaction to form a new thin film material, which is deposited on the wafer surface.

[0004] Among them, the gas distribution plate is a consumable. After a certain period of use, a layer of deposits will accumulate on its surface, making it unsuitable for continued use. It needs to undergo chemical cleaning, sandblasting, drying and other treatment processes to remove the deposits before it can be reused.

[0005] For example, CN120649023 discloses a surface cleaning process for a gas distribution disk of a semiconductor component, including: S1, pre-cleaning the gas distribution disk of the semiconductor component; S2, grinding and polishing the pre-cleaned gas distribution disk; S3, chemical polishing the ground and polished gas distribution disk; the chemical polishing includes: S31, degreasing cleaning; S32, alkaline etching cleaning; S33, cleaning with a mixed solution of nitric acid and ferric sulfate as a cleaning agent; S34, cleaning with a mixed solution of phosphoric acid and sulfuric acid as a cleaning agent; S35, cleaning with nitric acid; S36, cleaning with a mixed acid of nitric acid and hydrofluoric acid; S37, cleaning with nitric acid.

[0006] However, the base material of the gas distribution plate is basically A3003 aluminum alloy. Due to its poor resistance to alkali corrosion, after 2-3 chemical cleanings (i.e., alkaline cleaning), key parameters such as flatness, roundness, and aperture will not meet the requirements for use and can only be scrapped. Summary of the Invention

[0007] In view of the problems existing in the prior art, the purpose of the present invention is to provide an alkali-resistant aluminum alloy and its preparation method, a gas distribution plate, and a vapor deposition equipment, so as to solve the defect of poor alkali corrosion resistance of the current gas distribution plate and improve the service life of aluminum alloy under alkaline conditions.

[0008] To achieve this objective, the present invention adopts the following technical solution:

[0009] In a first aspect, the present invention provides an alkali-resistant aluminum alloy, wherein the alkali-resistant aluminum alloy comprises, by weight percentage:

[0010] Mn 1-1.5%, Cu 0.05-0.1%, Ni 0.1-0.2%, Fe≤0.6%, Si≤0.6%, Zn≤0.1%, Mg≤0.1%, Cr≤0.05%, Ti≤0.05%, balance Al and unavoidable impurities.

[0011] The corrosion-resistant aluminum alloy provided by this invention effectively improves the alkaline corrosion resistance of the aluminum alloy by optimizing the composition of the aluminum alloy and utilizing the synergistic effect between the elements, while retaining the original formability and processing compatibility of 3003, thus significantly improving the performance of the aluminum alloy.

[0012] As a preferred embodiment of the present invention, the alkali-resistant aluminum alloy comprises, by weight percentage:

[0013] Mn 1-1.5%, Cu 0.05-0.1%, Ni 0.1-0.2%, Fe 0.1-0.6%, Si 0.1-0.6%, Mg 0.02-0.1%, Cr 0.02-0.05%, Ti 0.02-0.05%, with the balance being Al and unavoidable impurities.

[0014] In a second aspect, the present invention provides a method for preparing an alkali-resistant aluminum alloy as described in the first aspect, the method comprising:

[0015] An aluminum alloy ingot with a mass percentage formula is subjected to hot rolling, first cold rolling, annealing, and second cold rolling in sequence to obtain an alkali-resistant aluminum alloy.

[0016] As a preferred embodiment of the present invention, the initial rolling temperature of the hot rolling is 480-510℃.

[0017] Preferably, the hot rolling process involves 10-15 rolling passes.

[0018] Preferably, the single-pass reduction rate of the hot rolling is 20-30%.

[0019] Preferably, the final rolling temperature of the hot rolling is 300-350℃.

[0020] As a preferred technical solution of the present invention, the single-pass pressure rate in the first cold rolling is controlled to be 10-15%.

[0021] Preferably, the total deformation controlled by the first cold rolling is 60-70%.

[0022] As a preferred technical solution of the present invention, the annealing includes: sequential heat preservation and air cooling.

[0023] As a preferred embodiment of the present invention, the insulation temperature is 350-380℃.

[0024] Preferably, the heat preservation time is 50-70 minutes.

[0025] As a preferred embodiment of the present invention, the single-pass reduction rate in the second cold rolling is controlled to be 5-30%.

[0026] Preferably, the second cold rolling process involves 3-6 rolling passes.

[0027] Preferably, the endpoint of the second cold rolling is rolling to the finished product specification.

[0028] Thirdly, the present invention provides a gas distribution disk, which is processed using an alkali-resistant aluminum alloy as described in the first aspect or an alkali-resistant aluminum alloy obtained by the preparation method described in the second aspect.

[0029] Fourthly, the present invention provides a vapor deposition apparatus, the vapor deposition apparatus comprising a gas distribution disk as described in the third aspect.

[0030] Compared with existing technical solutions, the present invention has the following beneficial effects:

[0031] (1) The aluminum alloy provided by the present invention effectively improves the alkaline corrosion resistance of the aluminum alloy by strictly controlling the element content.

[0032] (2) The preparation method provided by the present invention can further refine the intergranular structure by designing the hot rolling process and the cold rolling process, so that the corrosion is uniformly dispersed and there is no risk of local rapid perforation.

[0033] The present invention will now be described in further detail. However, the examples described below are merely simplified examples of the present invention and do not represent or limit the scope of protection of the present invention. The scope of protection of the present invention is determined by the claims. Detailed Implementation

[0034] To better illustrate the present invention and facilitate understanding of its technical solutions, typical but non-limiting embodiments of the present invention are as follows:

[0035] Gas distribution discs used in chemical vapor deposition are consumables. After a certain period of use, a layer of deposits will accumulate on their surface, rendering them unsuitable for continued use. They require chemical cleaning, sandblasting, and drying processes to remove the deposits before reuse. However, the substrate material of gas distribution discs is primarily A3003 aluminum alloy. During refurbishment processes such as chemical cleaning, sandblasting, and drying, the poor resistance to alkaline corrosion means that after 2-3 chemical cleanings (alkaline washing), key parameters such as flatness, roundness, and aperture fail to meet requirements, rendering them unusable. Therefore, this invention improves the alkaline corrosion resistance of the aluminum alloy by optimizing its components, thereby enhancing the product's performance. Specifically:

[0036] I. This embodiment provides an alkali-resistant aluminum alloy, wherein the alkali-resistant aluminum alloy comprises, by weight percentage:

[0037] Mn 1-1.5%, Cu 0.05-0.1%, Ni 0.1-0.2%, Fe≤0.6%, Si≤0.6%, Zn≤0.1%, Mg≤0.1%, Cr≤0.05%, Ti≤0.05%, balance Al and unavoidable impurities.

[0038] In this invention, the Mn element in the alkali-resistant aluminum alloy is 1-1.5% by mass, for example, it can be 1%, 1.05%, 1.1%, 1.15%, 1.2%, 1.25%, 1.3%, 1.35%, 1.4%, 1.45%, or 1.5%, etc., but is not limited to the listed values; other unlisted values ​​within this range are also acceptable. In this invention, the Cu element in the alkali-resistant aluminum alloy is 0.05-0.1% by mass, for example, it can be 0.05%, 0.055%, 0.06%, 0.065%, 0.07%, 0.075%, 0.08%, 0.085%, 0.09%, 0.095%, or 0.1%, etc., but is not limited to the listed values; other unlisted values ​​within this range are also acceptable.

[0039] In this invention, the Ni element in the alkali-resistant aluminum alloy is 0.1-0.2% by mass, for example, it can be 0.1%, 0.11%, 0.12%, 0.13%, 0.14%, 0.15%, 0.16%, 0.17%, 0.18%, 0.19% or 0.2%, etc., but is not limited to the listed values. Other unlisted values ​​within this range are also acceptable.

[0040] In this invention, the Fe element in the alkali-resistant aluminum alloy is ≤0.6% by mass percentage. For example, it can be 0.6%, 0.541%, 0.482%, 0.423%, 0.364%, 0.305%, 0.246%, 0.187%, 0.128%, 0.069%, or 0.01%, etc., but is not limited to the listed values. Other unlisted values ​​within this range also meet the requirements.

[0041] In this invention, the Si element in the alkali-resistant aluminum alloy is ≤0.6% by mass percentage. For example, it can be 0.6%, 0.541%, 0.482%, 0.423%, 0.364%, 0.305%, 0.246%, 0.187%, 0.128%, 0.069%, or 0.01%, etc., but is not limited to the listed values. Other unlisted values ​​within this range also meet the requirements.

[0042] In this invention, the Zn element in the alkali-resistant aluminum alloy is ≤0.1% by mass percentage. For example, it can be 0.1%, 0.091%, 0.082%, 0.073%, 0.064%, 0.055%, 0.046%, 0.037%, 0.028%, 0.019%, or 0.01%, etc., but is not limited to the listed values. Other unlisted values ​​within this range also meet the requirements.

[0043] In this invention, the Mg element in the alkali-resistant aluminum alloy is ≤0.1% by mass percentage. For example, it can be 0.1%, 0.091%, 0.082%, 0.073%, 0.064%, 0.055%, 0.046%, 0.037%, 0.028%, 0.019%, or 0.01%, etc., but is not limited to the listed values. Other unlisted values ​​within this range also meet the requirements.

[0044] In this invention, the Cr element in the alkali-resistant aluminum alloy is ≤0.05% by mass percentage. For example, it can be 0.05%, 0.046%, 0.042%, 0.038%, 0.034%, 0.03%, 0.026%, 0.022%, 0.018%, 0.014%, or 0.01%, etc., but is not limited to the listed values. Other unlisted values ​​within this range also meet the requirements.

[0045] In this invention, the Ti element in the alkali-resistant aluminum alloy is ≤0.05% by mass percentage. For example, it can be 0.05%, 0.046%, 0.042%, 0.038%, 0.034%, 0.03%, 0.026%, 0.022%, 0.018%, 0.014%, or 0.01%, etc., but is not limited to the listed values. Other unlisted values ​​within this range also meet the requirements.

[0046] The alkali-resistant aluminum alloy preferably comprises, by weight percentage:

[0047] Mn 1-1.5%, Cu 0.05-0.1%, Ni 0.1-0.2%, Fe 0.1-0.6%, Si 0.1-0.6%, Zn 0.02-0.1%, Mg 0.02-0.1%, Cr 0.02-0.05%, Ti 0.02-0.05%, with the balance being Al and unavoidable impurities.

[0048] II. This embodiment provides a method for preparing an alkali-resistant aluminum alloy, the method comprising:

[0049] An aluminum alloy ingot with a mass percentage formula is subjected to hot rolling, first cold rolling, annealing, and second cold rolling in sequence to obtain an alkali-resistant aluminum alloy.

[0050] In this invention, the ingots corresponding to the mass percentage content formula can be obtained by referring to the smelting-casting process of 3003 aluminum alloy, ensuring that they have the composition of this invention.

[0051] The initial rolling temperature of the hot rolling is 480-510℃, for example, it can be 480℃, 483℃, 486℃, 489℃, 492℃, 495℃, 498℃, 501℃, 504℃, 507℃ or 510℃, etc., but is not limited to the listed values. Other unlisted values ​​within this range also meet the requirements.

[0052] The hot rolling passes are 10-15 times, for example, 10, 11, 12, 13, 14 or 15 times, but not limited to the listed values. Other unlisted values ​​within this range are also acceptable.

[0053] The single-pass reduction rate of the hot rolling is 20-30%, for example, it can be 20%, 21%, 22%, 23%, 24%, 25%, 26%, 27%, 28%, 29% or 30%, etc., but is not limited to the listed values. Other unlisted values ​​within this range also meet the requirements.

[0054] The final rolling temperature of the hot rolling is 300-350℃, for example, it can be 300℃, 305℃, 310℃, 315℃, 320℃, 325℃, 330℃, 335℃, 340℃, 345℃ or 350℃, but is not limited to the listed values. Other unlisted values ​​within this range also meet the requirements.

[0055] In the first cold rolling process, the single-pass pressure rate is controlled at 10-15%, for example, it can be 10%, 10.5%, 11%, 11.5%, 12%, 12.5%, 13%, 13.5%, 14%, 14.5% or 15%, etc., but is not limited to the listed values. Other unlisted values ​​within this range also meet the requirements.

[0056] The total deformation controlled by the first cold rolling is 60-70%, for example, it can be 60%, 61%, 62%, 63%, 64%, 65%, 66%, 67%, 68%, 69% or 70%, etc., but is not limited to the listed values. Other unlisted values ​​within this range also meet the requirements.

[0057] The annealing process includes sequential heat preservation and air cooling.

[0058] The insulation temperature is 350-380℃, for example, it can be 350℃, 353℃, 356℃, 359℃, 362℃, 365℃, 368℃, 371℃, 374℃, 377℃ or 380℃, but is not limited to the listed values. Other unlisted values ​​within this range also meet the requirements.

[0059] The heat preservation time is 50-70 minutes, for example, it can be 50 minutes, 52 minutes, 54 minutes, 56 minutes, 58 minutes, 60 minutes, 62 minutes, 64 minutes, 66 minutes, 68 minutes or 70 minutes, but is not limited to the listed values. Other unlisted values ​​within this range are also acceptable.

[0060] In the second cold rolling process, the single-pass reduction rate is controlled to be 5-30%, for example, it can be 5%, 7.5%, 10%, 12.5%, 15%, 17.5%, 20%, 22.5%, 25%, 27.5% or 30%, etc., but is not limited to the listed values. Other unlisted values ​​within this range also meet the requirements.

[0061] The second cold rolling process involves 3-6 rolling passes, such as 3, 4, 5 or 6 passes, but is not limited to the listed values. Other unlisted values ​​within this range also meet the requirements.

[0062] The endpoint of the second cold rolling is rolling to the finished product specification.

[0063] III. The present invention provides a gas distribution plate, which is obtained by processing the alkali-resistant aluminum alloy or the alkali-resistant aluminum alloy obtained by the preparation method described above.

[0064] In this invention, the gas distribution disk refers to the gas distribution disk used in the field of vapor deposition to achieve a uniform distribution of process gases and carrier gases during the process, thereby ensuring efficient vapor deposition.

[0065] IV. The present invention provides a vapor deposition apparatus, the vapor deposition apparatus including the gas distribution disk.

[0066] In this invention, a vapor deposition apparatus refers to an apparatus in which one or more gases are introduced into a chamber and reacted under heating or plasma to form a solid thin film on a substrate. The apparatus specifically includes a heating system, a gas supply system, a vacuum system, a chamber, etc., and a gas distribution plate of this invention is provided in the chamber for distributing the gas.

[0067] V. To illustrate the corrosion resistance of the alkali-resistant aluminum alloy provided by this invention, the following example is used for explanation:

[0068] Example 1

[0069] This embodiment provides an alkali-resistant aluminum alloy and its preparation process, as detailed below:

[0070] Alkali-resistant aluminum alloys, by mass percentage, include:

[0071] Mn 1.2%, Cu 0.08%, Ni 0.15%, Fe 0.3%, Si 0.2%, Zn 0.1%, Mg 0.1%, Cr 0.05%, Ti 0.05%, with the balance being Al and unavoidable impurities.

[0072] The preparation process is as follows:

[0073] An aluminum alloy ingot with a mass percentage formula is subjected to hot rolling, first cold rolling, annealing, and second cold rolling in sequence to obtain an alkali-resistant aluminum alloy.

[0074] The initial rolling temperature of the hot rolling is 500℃; the number of rolling passes of the hot rolling is 12; the single-pass reduction rate of the hot rolling is 25%; and the final rolling temperature of the hot rolling is 320℃.

[0075] In the first cold rolling process, the single-pass pressure rate is controlled at 12%; the total deformation in the first cold rolling process is controlled at 65%.

[0076] The annealing process includes: sequential heat treatment and air cooling; the heat treatment temperature is 365°C; the heat treatment time is 60 minutes.

[0077] The single-pass reduction rate in the second cold rolling is controlled at 20%; the number of rolling passes in the second cold rolling is 4; the endpoint of the second cold rolling is rolling to the finished product specification.

[0078] Example 2

[0079] This embodiment provides an alkali-resistant aluminum alloy and its preparation process, as detailed below:

[0080] Alkali-resistant aluminum alloys, by mass percentage, include:

[0081] Mn 1%, Cu 0.05%, Ni 0.2%, Fe 0.6%, Si 0.6%, Zn 0.05%, Mg 0.01%, Cr 0.01%, Ti 0.03%, with the balance being Al and unavoidable impurities.

[0082] The preparation process is as follows:

[0083] An aluminum alloy ingot with a mass percentage formula is subjected to hot rolling, first cold rolling, annealing, and second cold rolling in sequence to obtain an alkali-resistant aluminum alloy.

[0084] The initial rolling temperature of the hot rolling is 480℃; the number of rolling passes of the hot rolling is 10; the single-pass reduction rate of the hot rolling is 30%; and the final rolling temperature of the hot rolling is 300℃.

[0085] In the first cold rolling process, the single-pass pressure rate is controlled at 15%; the total deformation in the first cold rolling process is controlled at 60%.

[0086] The annealing process includes: sequential heat treatment and air cooling; the heat treatment temperature is 350°C; the heat treatment time is 50 minutes.

[0087] The single-pass reduction rate in the second cold rolling is controlled at 5%; the number of rolling passes in the second cold rolling is 6; the endpoint of the second cold rolling is rolling to the finished product specification.

[0088] Example 3

[0089] This embodiment provides an alkali-resistant aluminum alloy and its preparation process, as detailed below:

[0090] Alkali-resistant aluminum alloys, by mass percentage, include:

[0091] Mn 1.5%, Cu 0.1%, Ni 0.1%, Fe 0.4%, Si 0.3%, Zn 0.06%, Mg 0.07%, Cr 0.03%, Ti 0.04%, with the balance being Al and unavoidable impurities.

[0092] The preparation process is as follows:

[0093] An aluminum alloy ingot with a mass percentage formula is subjected to hot rolling, first cold rolling, annealing, and second cold rolling in sequence to obtain an alkali-resistant aluminum alloy.

[0094] The initial rolling temperature of the hot rolling is 510℃; the number of rolling passes of the hot rolling is 15; the single-pass reduction rate of the hot rolling is 30%; and the final rolling temperature of the hot rolling is 350℃.

[0095] In the first cold rolling process, the single-pass pressure rate is controlled at 10%; the total deformation in the first cold rolling process is controlled at 70%.

[0096] The annealing process includes: sequential heat treatment and air cooling; the heat treatment temperature is 380°C; the heat treatment time is 70 minutes.

[0097] In the second cold rolling process, the single-pass reduction rate is controlled at 30%; the second cold rolling process has 3 rolling passes; the endpoint of the second cold rolling process is rolling to the finished product specification.

[0098] Example 4

[0099] The only difference from Example 1 is that the alkali-resistant aluminum alloy comprises, by weight percentage:

[0100] Mn 1.2%, Cu 0.08%, Ni 0.15%, Fe 0.1%, Si 0.2%, Mg 0.02%, Cr 0.02%, Ti 0.02%, with the balance being Al and unavoidable impurities.

[0101] Example 5

[0102] The only difference from Example 1 is that the alkali-resistant aluminum alloy does not contain Zn.

[0103] Example 6

[0104] The only difference from Example 1 is that the alkali-resistant aluminum alloy does not contain Mg.

[0105] Example 7

[0106] The only difference from Example 1 is that the alkali-resistant aluminum alloy does not contain Cr.

[0107] Example 8

[0108] The only difference from Example 1 is that the alkali-resistant aluminum alloy does not contain Ti.

[0109] Example 9

[0110] The only difference from Example 1 is that the hot rolling passes are 5.

[0111] Example 10

[0112] The only difference from Example 1 is that the single-pass reduction rate of hot rolling is 15%.

[0113] Example 11

[0114] The only difference from Example 1 is that the single-pass pressure rate is controlled at 5% in the first cold rolling.

[0115] Example 12

[0116] The only difference from Example 1 is that the single-pass pressure rate is controlled at 20% in the first cold rolling.

[0117] Comparative Example 1

[0118] The only difference from Example 1 is that the mass percentage of Ni in the alkali-resistant aluminum alloy is 0.3%.

[0119] Comparative Example 2

[0120] The only difference from Example 1 is that the mass percentage of Ni in the alkali-resistant aluminum alloy is 0.01%.

[0121] Comparative Example 3

[0122] The only difference from Example 1 is that the Cu content in the alkali-resistant aluminum alloy is 0.5% by mass.

[0123] Comparative Example 4

[0124] The only difference from Example 1 is that the Cu content in the alkali-resistant aluminum alloy is 0.01% by mass.

[0125] Comparative Example 5

[0126] The only difference from Example 1 is that the mass percentage of Mg in the alkali-resistant aluminum alloy is 0.3%.

[0127] Comparative Example 6

[0128] The only difference from Example 1 is that the mass percentage of Cr in the alkali-resistant aluminum alloy is 0.1%.

[0129] Comparative Example 7

[0130] The only difference from Example 1 is that the mass percentage of Si in the alkali-resistant aluminum alloy is 1%.

[0131] Comparative Example 8

[0132] The only difference from Example 1 is that the mass percentage of Zn in the alkali-resistant aluminum alloy is 0.5%.

[0133] Comparative Example 9

[0134] The only difference from Example 1 is that the mass percentage of Ti in the alkali-resistant aluminum alloy is 0.1%.

[0135] Comparative Example 10

[0136] The only difference from Example 1 is that the Fe content in the alkali-resistant aluminum alloy is 1% by mass.

[0137] The alkali-resistant aluminum alloys obtained in the above embodiments were subjected to alkali corrosion tests, and the results are shown in Table 1 below.

[0138] Table 1

[0139]

[0140] The alkaline etching test process is as follows: The obtained aluminum alloy is immersed in an 8% sodium hydroxide solution for 30 minutes, the mass of the aluminum alloy before and after alkaline etching is tested, and the mass loss is calculated.

[0141] As shown in Table 1, the corrosion-resistant aluminum alloy provided by this invention, through optimization of the aluminum alloy composition and the synergistic effect between various elements, effectively improves the alkaline corrosion resistance of the aluminum alloy, while retaining the original formability and processing compatibility of 3003, significantly improving the performance of the aluminum alloy. Under commonly used alkaline washing conditions in the field, the weight loss of the obtained aluminum alloy is ≤87.6mg, and ≤53.3mg under the preferred scheme. Specifically, when the element content in the aluminum alloy changes, it will lead to unreasonable distribution and changes in the internal structure of the aluminum alloy, resulting in a decrease in the alkali resistance of the corrosion-resistant aluminum alloy and an increase in weight loss. At the same time, unreasonable adjustment of hot rolling and cold rolling processes will lead to uneven distribution of intergranular structure, which will aggravate local corrosion and pose a risk of local rapid perforation.

[0142] The preferred embodiments of the present invention have been described in detail above. However, the present invention is not limited to the specific details in the above embodiments. Within the scope of the technical concept of the present invention, various simple modifications can be made to the technical solution of the present invention, and these simple modifications all fall within the protection scope of the present invention.

[0143] It should also be noted that the various specific technical features described in the above specific embodiments can be combined in any suitable manner without contradiction. In order to avoid unnecessary repetition, the present invention will not describe the various possible combinations separately.

[0144] Furthermore, various different embodiments of the present invention can be combined in any way, as long as they do not violate the spirit of the present invention, they should also be regarded as the content disclosed by the present invention.

Claims

1. An alkali-resistant etched aluminum alloy, characterized by, The alkali-resistant aluminum alloy comprises, by weight percentage: Mn 1-1.5%, Cu 0.05-0.1%, Ni 0.1-0.2%, Fe≤0.6%, Si≤0.6%, Zn≤0.1%, Mg≤0.1%, Cr≤0.05%, Ti≤0.05%, balance Al and unavoidable impurities.

2. The corrosion resistant aluminum alloy of claim 1, wherein, The alkali-resistant aluminum alloy comprises, by weight percentage: Mn 1-1.5%, Cu 0.05-0.1%, Ni 0.1-0.2%, Fe 0.1-0.6%, Si 0.1-0.6%, Zn 0.02-0.1%, Mg 0.02-0.1%, Cr 0.02-0.05%, Ti 0.02-0.05%, with the balance being Al and unavoidable impurities.

3. A method of producing an alkali-resistant etched aluminum alloy as claimed in claim 1 or 2, characterized in that, The preparation method includes: An aluminum alloy ingot with a mass percentage formula is subjected to hot rolling, first cold rolling, annealing, and second cold rolling in sequence to obtain an alkali-resistant aluminum alloy.

4. The preparation method according to claim 3, characterized in that, The initial rolling temperature of the hot rolling is 480-510℃; Preferably, the hot rolling process involves 10-15 rolling passes; Preferably, the single-pass reduction rate of the hot rolling is 20-30%; Preferably, the final rolling temperature of the hot rolling is 300-350℃.

5. The preparation method according to claim 3, characterized in that, In the first cold rolling process, the single-pass pressure rate is controlled at 10-15%; Preferably, the total deformation controlled by the first cold rolling is 60-70%.

6. The preparation method according to claim 3, characterized in that, The annealing process includes sequential heat treatment and air cooling.

7. The preparation method according to claim 6, characterized in that, The insulation temperature is 350-380℃; Preferably, the heat preservation time is 50-70 minutes.

8. The preparation method according to claim 3, characterized in that, In the second cold rolling process, the single-pass reduction rate is controlled at 5-30%; Preferably, the second cold rolling process involves 3-6 rolling passes; Preferably, the endpoint of the second cold rolling is rolling to the finished product specification.

9. A gas distribution disk, characterized in that, The gas distribution disk is processed using the alkali-resistant aluminum alloy as described in claim 1 or 2, or the alkali-resistant aluminum alloy obtained by the preparation method described in any one of claims 3-8.

10. A vapor deposition apparatus, characterized in that, The vapor deposition apparatus includes the gas distribution disk as described in claim 9.

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