Slide rack, slide loading method and substrate coating and transfer line thereof

Abstract

The application discloses a slide rack, a slide loading method and a substrate coating and transferring line, wherein the slide rack comprises a base, a base seat rotatably arranged on the base and driven by external force to rotate relative to the base, and two slide units for placing a plurality of substrates; the two slide units are arranged on the base seat in an up-down mode, and one of the two slide units is vertically slidably arranged on the base seat; the base seat is provided with a lifting mechanism for driving the slide unit to move relative to the base seat; the other slide unit comprises a plurality of slide plates arranged in an arc line mode; the slide plates are slidably arranged on the base seat; the base seat is provided with a translation mechanism for driving the slide plates to move horizontally relative to the base seat and a driving mechanism for driving the slide plates to move obliquely in a vertical direction relative to the base seat. The application can reduce the workload and working intensity of workers, improve the safety and fluency of operation, and reduce the space requirement of the equipment in normal operation.

Description

Technical Field

[0001] This invention relates to the field of conveying, and more specifically to a substrate carrier, a substrate loading method, and a substrate coating transfer line. Background Technology

[0002] Before coating, the substrate needs to be hung on a substrate carrier and then fed into the coating equipment. Typically, substrate loading and unloading on the carrier is done manually. Because the carrier can hold a large number of substrates, and to improve coating efficiency, the entire coating production line is usually designed to operate in a cyclical manner (i.e., the carrier performs loading, coating, and unloading processes sequentially). This results in high workload, especially when multiple layers of substrates need to be mounted vertically on the carrier. This not only significantly increases the number of substrates to be loaded and unloaded but also necessitates working at heights to ensure stable and accurate placement. This increases the space requirements for workers and restricts the placement of the entire coating equipment. Furthermore, since coating workshops are usually cleanrooms, workers must wear protective clothing, which further impacts the work at heights and increases safety risks. Summary of the Invention

[0003] The purpose of this invention is to provide a wafer carrier, a wafer loading method, and a substrate coating transfer line. This wafer carrier, wafer loading method, and substrate coating transfer line can reduce the workload and intensity of workers, improve the safety and smoothness of operation, and also reduce the workshop space requirements for normal operation of the equipment.

[0004] The technical solution adopted by the present invention to solve the above problems is:

[0005] A slide holder, comprising:

[0006] Base;

[0007] The base is rotatably mounted on the base and is driven by an external force to rotate relative to the base;

[0008] Two substrate carrier units are used to place several substrates;

[0009] The two slide units are arranged vertically on the base, with one of the slide units slidably mounted on the base. The base is equipped with a lifting mechanism for driving the slide unit to move relative to it. The other slide unit includes several slide plates arranged in an arc shape. The slide plates are slidably mounted on the base. The base is equipped with a translation mechanism for driving the slide plates to move horizontally relative to it and a driving mechanism for driving them to move obliquely relative to it in the vertical direction. The two slide plates separated by one slide plate have the same movement trajectory. The horizontal movement distance of two adjacent slide plates is different, but the vertical oblique movement distance of the two slide plates is the same.

[0010] As a further limitation of the present invention, the translation mechanism includes a plurality of actuating units corresponding one-to-one with the carrier plate. Each actuating unit includes two parallel actuating arms. The carrier plate has two extensions corresponding one-to-one with the actuating arms. The outer end of each extension is fixed to the inner side of the carrier plate, and its inner end is slidably connected to the base and cannot rotate. The two extensions are arranged vertically, with the length of the upper extension being less than the length of the lower extension. One end of each actuating arm is rotatably mounted on the base, and the other end has a slot for the inner end of the extension to pass through and slide. An upper lifting seat and a lower lifting seat are vertically slidably mounted on the base. The upper and lower lifting seats are driven by an external force to achieve sequential movement. The base slides, and a compression spring is provided between the top of the upper lifting seat and the base. The two ends of the compression spring abut against the upper lifting seat and the base respectively. A tension spring is provided between the bottom of the lower lifting seat and the base. The two ends of the tension spring are hooked onto the lower lifting seat and the base respectively. The two actuating arms in the same actuating unit are connected by a synchronous belt drive mechanism. Either actuating arm is connected to the upper lifting seat or the lower lifting seat in sequence through a synchronous belt drive mechanism and a gear and rack drive mechanism. The two actuating arms in adjacent actuating units are connected to the upper lifting seat and the lower lifting seat respectively. The horizontal movement distance of the plate corresponding to the upper lifting seat is greater than the horizontal movement distance of the plate corresponding to the lower lifting seat.

[0011] As a further limitation of the present invention, the driving mechanism includes an outer driving ring, an inner driving ring, and several pulling units corresponding to the actuating units. The outer driving ring and the inner driving ring are rotatably mounted on the base and driven by external force to rotate relative to the base. The pulling unit includes two winding drums corresponding to the actuating arms. The winding drums are rotatably mounted on the base, and the extension is rotatably connected to the roller. The extension passes through the roller and onto the actuating arm. The corresponding roller and winding drum are connected by a pulling line. A guide wheel is rotatably connected to the actuating arm. Several reversing wheels are provided between the roller and the winding drum. The reversing wheels are rotatably connected to the base. The pulling line is wound around the guide wheel and the reversing wheel in sequence. The two winding drums in the same pulling unit are connected by a synchronous belt transmission mechanism. Either winding drum is connected to the outer driving ring or the inner driving ring in sequence through a bevel gear transmission mechanism and a gear transmission mechanism. The two winding drums in adjacent pulling units are connected to the outer driving ring and the inner driving ring, respectively.

[0012] As a further limitation of the present invention, the lifting mechanism includes a drive shaft, a sliding seat, and a lifting ring. The drive shaft is rotatably mounted on the base and is driven by an external force to rotate relative to the base. The sliding seat is threadedly fitted onto the drive shaft and slidably connected to the base. The lifting ring is vertically slidably mounted on the base and fixed on the sliding seat. The carrier unit is fixed on the outer surface of the lifting ring.

[0013] As a further limitation of the present invention, the two said substrate units have the same structure, and a plurality of limiting strips are fixed on the substrate plate, and a limiting space for inserting and placing the substrate is formed between adjacent limiting strips.

[0014] The present invention also provides a method for mounting wafers using the wafer carrier described above, comprising the following steps:

[0015] Step 1: Mount several substrates onto the substrate carrier unit located below, and during this process, the substrate rotates intermittently relative to the base.

[0016] Step 2: After the substrate is installed on the lower substrate unit, the translation mechanism is used to drive several substrate plates in the upper substrate unit that are spaced one substrate plate apart to move horizontally inward along the radial direction of the base to the bottom. Then the remaining substrate plates move horizontally inward along the radial direction of the base to the bottom.

[0017] Step 3: By driving the lifting mechanism, the lower slide unit moves vertically upward relative to the base until it is on the same horizontal plane as the upper slide unit.

[0018] Step 4: By driving the drive mechanism, the slide plate moves obliquely downward relative to the base. During this process, the slide plate located on the outer side moves to the bottom before the slide plate located on the inner side.

[0019] As a further limitation of the present invention, in step 2, the horizontal movement distance of the first moving plate is greater than the horizontal movement distance of the second moving plate.

[0020] The present invention also provides a substrate coating transfer line, comprising:

[0021] The slide holder has the same structure as the slide holder described in the above technical solution;

[0022] The frame is equipped with a conveying device for horizontally and linearly transporting the substrate holder from the loading station to the coating station.

[0023] The frame has an upper drive unit at its top for driving relative rotation between the base and the base, a lifting mechanism, and a drive mechanism, and a lower drive unit at its bottom for driving a translation mechanism.

[0024] As a further limitation of the present invention, the upper drive unit includes a lifting seat and a first drive motor for driving the drive shaft to rotate relative to the base. The lifting seat and the first drive motor are both vertically slidably mounted on the frame. The frame is equipped with a first linear drive device for driving the lifting seat to move relative to it and a second linear drive device for driving the first drive motor to slide relative to it. The lifting seat is equipped with a second drive motor for driving the base to rotate intermittently relative to the base, a third drive motor for driving the outer drive ring to rotate relative to the base, and a fourth drive motor for driving the inner drive ring to rotate relative to the base. The third drive motor and the outer drive ring, as well as the fourth drive motor and the inner drive ring, can be connected by a gear transmission mechanism.

[0025] As a further limitation of the present invention, the lower drive unit includes a limiting seat, which is vertically slidably disposed on the frame. A third linear drive device for driving the limiting seat to move relative to it is installed on the frame. At least one protrusion is provided on the base, which is perpendicular to the conveying direction of the conveying device. A limiting groove for accommodating the protrusion is provided on the limiting seat. A lifting column is vertically slidably disposed on the limiting seat and a fourth linear drive device for driving the lifting column to slide relative to it is installed. Both the upper lifting seat and the lower lifting seat are provided with through holes. The diameter of the through hole on the upper lifting seat is smaller than the diameter of the through hole on the lower lifting seat. The diameter of the end face of the top of the lifting column is larger than the diameter of the through hole on the lower lifting seat. A protrusion is provided on the end face of the top of the lifting column. The diameter of the protrusion is not greater than the diameter of the through hole on the lower lifting seat but greater than the diameter of the through hole on the upper lifting seat.

[0026] Compared with the prior art, the present invention has the following advantages and effects:

[0027] This invention, through the structural design of the substrate carrier, enables the vertical interchange of two substrate carrier units. This allows workers to install substrates on both units sequentially while remaining standing, eliminating the need for climbing. This simplifies the workflow, reduces workload and intensity, and improves operational safety and smoothness. Furthermore, since workers can install substrates on the carrier in place, it enhances the stability of substrate placement and reduces the need for workers to operate within the carrier, thus minimizing the space requirements for normal equipment operation within the workshop. Attached Figure Description

[0028] Figure 1 This is a schematic diagram of the structure of a substrate coating transfer line according to the present invention.

[0029] Figure 2 yes Figure 1 The diagram shows a schematic of the slide holder from one perspective.

[0030] Figure 3 yes Figure 2 The diagram shows a partial structural schematic of the slide holder shown.

[0031] Figure 4 yes Figure 3 The diagram shows the structure of the toggle unit.

[0032] Figure 5 yes Figure 3 The diagram shows the internal structure of the base from one perspective.

[0033] Figure 6 yes Figure 3 The diagram shows the internal structure of the base from viewpoint two.

[0034] Figure 7 yes Figure 2 The diagram shows a partial structural schematic of the slide holder shown.

[0035] Figure 8 yes Figure 2 The diagram shows a partial structural schematic of the slide holder shown.

[0036] Figure 9 yes Figure 1 The diagram shows the structure of the slide holder from viewpoint two.

[0037] Figure 10 yes Figure 1 The diagram shows a structural schematic of the frame from one perspective.

[0038] Figure 11 yes Figure 1 The diagram shows the structure of the frame from view two.

[0039] Figure 12 This is a partial structural diagram of a substrate coating transfer line according to the present invention.

[0040] Figure 13 yes Figure 12 The diagram shows a partial structural schematic of the slide holder shown.

[0041] Figure 14 yes Figure 9 The diagram shows a partial structural schematic of the lifted state of the carrier unit.

[0042] Figure 15 This is a partial structural diagram of a substrate coating transfer line according to the present invention.

[0043] Figure 16 yes Figure 15 The diagram shows a partial structural schematic of the drive mechanism.

[0044] Figure 17 yes Figure 16 The diagram shows a partial structural schematic of the tensioning unit shown.

[0045] Figure 18 yes Figure 16 The diagram shows a partial structural schematic of the tensioning unit shown.

[0046] Figure 19 yes Figure 1 The diagram shows a schematic of the substrate holder in state one.

[0047] Figure 20 yes Figure 1 The diagram shows the structure of the slide carrier in state two.

[0048] Figure 21 yes Figure 1 The diagram shows the structure of the tray holder in state three.

[0049] Figure 22 yes Figure 1 The diagram shows the structure of the tray holder in state four.

[0050] The components include: frame 1, conveying device 11, sheet holder 2, base 21, base 22, sheet carrier unit 23, sheet carrier plate 24, limiting strip 25, limiting space 26, lifting mechanism 3, drive shaft 31, sliding seat 32, lifting ring 33, first drive motor 34, second linear drive device 35, inclined structure 36, translation mechanism 4, actuating unit 41, actuating arm 42, extension piece 43, slot 44, upper lifting seat 45, lower lifting seat 46, compression spring 47, tension spring 48, drive mechanism 5, outer drive ring 51, inner drive ring 52, traction unit 53, and winding drum 54. 55. Roller 55, pull line 56, guide wheel 57, reversing wheel 58, upper drive unit 6, lifting seat 61, first linear drive device 62, second drive motor 63, third drive motor 64, fourth drive motor 65, connector 66, snap-fit ​​groove 67, lower drive unit 7, limit seat 71, third linear drive device 72, protrusion 73, limit groove 74, lifting column 75, fourth linear drive device 76, through hole 77, protrusion 78, positioning column 79, synchronous belt drive mechanism 81, gear and rack drive mechanism 82, bevel gear drive mechanism 83, gear drive mechanism 84. Detailed Implementation

[0051] The present invention will be further described in detail below with reference to the accompanying drawings and embodiments. The following embodiments are explanations of the present invention, but the present invention is not limited to the following embodiments.

[0052] See Figures 1-22This embodiment discloses a substrate coating transfer line, including a frame 1 and a substrate carrier 2. The frame 1 is equipped with a conveying device 11 for horizontally and linearly transporting the substrate carrier 2 from the substrate loading station to the coating station. The substrate carrier 2 includes a base 21, a base 22, and two substrate carrier units 23 for placing a plurality of substrates. The base 22 is rotatably mounted on the base 21. The two substrate carrier units 23 are arranged vertically on the base 22, and one of the substrate carrier units 23 is vertically slidably mounted on the base 22. The base 22 is equipped with a lifting mechanism 3 for driving the substrate carrier unit 23 to move relative to it. The other substrate carrier unit 23 includes a plurality of arc-shaped components. The slide plates 24 are arranged in a rectangular pattern and are slidably mounted on the base 22. The base 22 is provided with a translation mechanism 4 for driving the slide plates 24 to move horizontally relative to it and a drive mechanism 5 for driving them to move obliquely in the vertical direction relative to it. The two slide plates 24 that are separated by one slide plate 24 from each other have the same movement trajectory. The horizontal movement distance of two adjacent slide plates 24 is different, but the vertical distance of their oblique movement is the same. The top of the frame 1 is provided with an upper drive unit 6 for driving the relative rotation and lifting mechanism 3 between the base 22 and the base 21 and the drive mechanism 5, and the bottom of the frame 1 is provided with a lower drive unit 7 for driving the translation mechanism 4.

[0053] When the substrate carrier 2 on the conveying device 11 is in the substrate loading station, several substrates are installed on the substrate carrier unit 23 located below. During this process, the upper drive unit 6 drives the base 22 to rotate intermittently relative to the base 21. After the substrates are installed on the substrate carrier unit 23 located below, the lower drive unit 7 drives the translation mechanism 4, so that several substrate carrier plates 24 arranged at intervals of one substrate carrier plate 24 in the upper substrate carrier unit 23 move horizontally inward along the radial direction of the base 22. After moving to the bottom, the remaining substrate carrier plates 24 move horizontally inward along the radial direction of the base 22 to the bottom. During this process, the horizontal movement distance of the substrate carrier plate 24 that moves first is greater than the horizontal movement distance of the substrate carrier plate 24 that moves later. Subsequently, the upper drive unit 6 drives the lifting mechanism 3 and the drive mechanism 5 in sequence. After the lifting mechanism 3 moves the loaded substrate unit 23 vertically upward relative to the base 22 to be on the same horizontal plane as the upper substrate unit 23, the drive mechanism 5 drives the substrate plate 24 to move obliquely downward relative to the base 22, so that the unloaded substrate unit 23 moves to the bottom, completing the vertical position swap of the two substrate units 23 to install the substrates on the substrate frame 2 in the upper and lower layers. During this process, the outer substrate plate 24 of each substrate plate 24 moves to the bottom first before the inner substrate plate 24.

[0054] After the substrates are installed on both carrier units 23, the carrier frame 2 is transported from the loading station to the coating station for coating via the conveying device 11. After coating is completed, a corresponding conveying device 11 can be set up to transport the cutting frame to the unloading station. At the unloading station, the substrates on each carrier plate 24 located below can be removed first. Then, the carrier plate 24 is moved obliquely upward relative to the base 22 via the upper drive unit 6 and the drive mechanism 5, so that the carrier plate 24 is reset to the inner area of ​​the carrier unit 23 located above. Subsequently, the upper drive unit 6 and the drive mechanism 5 are used to move the carrier plate 24 obliquely upward relative to the base 22. The lifting mechanism 3 moves the upper substrate unit 23 vertically downward relative to the base 22. Then, the lower drive unit 7 and the translation mechanism 4 move the substrate plate 24 horizontally relative to the base 22 and reset it to be directly above the lower substrate unit 23. Finally, the substrate on the lower substrate unit 23 is unloaded. At this time, the substrate rack 2 returns to the unloaded state at the substrate loading station. A conveying device 11 can be set between the unloading station and the loading station so that the unloaded substrate rack 2 can be directly transported back to the loading station for substrate loading and coating work.

[0055] In this embodiment, the conveying device 11 can be a roller conveyor belt 55.

[0056] See Figures 2-3 The two substrate carrier units 23 have the same structure, which reduces the manufacturing difficulty. Several limiting strips 25 are fixed on the substrate carrier plate 24. A limiting space 26 for inserting and placing the substrate is formed between adjacent limiting strips 25, which facilitates the installation of the substrate on the substrate carrier unit 23.

[0057] In this embodiment, the carrier plate 24 is divided into left and right parts, which reduces the difficulty of bending the carrier plate 24, making production easier and reducing manufacturing losses.

[0058] See Figures 3-11The translation mechanism 4 includes several actuating units 41 corresponding to the carrier plate 24. Each actuating unit 41 includes two parallel actuating arms 42. The carrier plate 24 has two extensions 43 corresponding to the actuating arms 42. The outer end of the extension 43 is fixed to the inner side of the carrier plate 24, and its inner end is slidably connected to the base 22 and cannot rotate. The two extensions 43 are arranged vertically, and the length of the upper extension 43 is shorter than the length of the lower extension 43. One end of the actuating arm 42 is rotatably mounted on the base 22, and the other end has a slot 44 for the inner end of the extension 43 to pass through and slide. The base 22 has an upper lifting seat 45 and a lower lifting seat 46 vertically slidably mounted. The upper lifting seat 45 and the lower lifting seat 46 are driven by the lower driving unit 7 to move relative to the base 22 in sequence. A compression spring 47 is provided between the top of the upper lifting seat 45 and the base 22, with both ends of the compression spring 47 abutting against the upper lifting seat 45 and the base 22 respectively. A tension spring 48 is provided between the bottom of the lower lifting seat 46 and the base 22, with both ends of the tension spring 48 hooked onto the lower lifting seat 46 and the base 22 respectively. The two actuating arms 42 in the same actuating unit 41 are connected by a synchronous belt drive mechanism, and either actuating arm 42 is connected to the upper lifting seat 45 or the lower lifting seat 46 in sequence by a synchronous belt drive mechanism and a gear and rack drive mechanism. The two actuating arms 42 in adjacent actuating units 41 are connected to the upper lifting seat 45 and the lower lifting seat 46 respectively. The horizontal movement distance of the plate 24 corresponding to the upper lifting seat 45 is greater than the horizontal movement distance of the plate 24 corresponding to the lower lifting seat 46.

[0059] The lower drive unit 7 includes a limiting seat 71, which is vertically slidably mounted on the frame 1. A third linear drive device 72 for driving the limiting seat 71 to move relative to it is mounted on the frame 1. At least one protrusion 73 is provided on the base 21, which is perpendicular to the conveying direction of the conveying device 11. A limiting groove 74 for accommodating the protrusion 73 is provided on the limiting seat 71. A lifting column 75 is vertically slidably mounted on the limiting seat 71 and a device for driving the lifting column 75 is installed. The fourth linear drive device 76, which slides relative to it, has through holes 77 on both the upper lifting seat 45 and the lower lifting seat 46. The diameter of the through hole 77 on the upper lifting seat 45 is smaller than the diameter of the through hole 77 on the lower lifting seat 46. The diameter of the top end face of the lifting column 75 is larger than the diameter of the through hole 77 on the lower lifting seat 46. A protrusion 78 is provided on the top end face of the lifting column 75. The diameter of the protrusion 78 is not larger than the diameter of the through hole 77 on the lower lifting seat 46 but larger than the diameter of the through hole 77 on the upper lifting seat 45.

[0060] When the wafer carrier 2 on the conveying device 11 is located at the wafer loading station, the limiting seat 71 is driven to move vertically upward relative to the frame 1 by the third linear drive device 72, so that the protrusion 73 enters the limiting groove 74, which restricts the base 21 from rotating relative to the frame 1, and ensures that the base 22 rotates intermittently relative to the base 21 under the drive of the upper drive unit 6 during the subsequent wafer loading process.

[0061] When the carrier plate 24 needs to be moved inward relative to the base 22, the fourth linear drive device 76 drives the lifting column 75 to move vertically upward relative to the limiting seat 71, so that the lifting column 75 extends into the base 22. During this process, the protrusion 78 abuts against the upper lifting seat 45, which moves vertically upward relative to the base 22, causing the compression spring 47 to compress and the lower lifting seat 46 and the base 22 to remain relatively stationary. At the same time, through the transmission of the gear and rack transmission mechanism and the synchronous belt transmission mechanism, the two actuating arms 42 rotate relative to the base 22, thereby actuating the inner end of the extension 43 to move radially inward along the base 22, and the carrier plate 24 corresponding to the upper lifting seat 45 moves horizontally inward relative to the base 22 (e.g., Figure 19 As shown in the image).

[0062] After the lifting column 75 moves a certain distance, the lifting column 75, which is against the lower lifting seat 46, moves vertically upward relative to the base 22. During this process, the tension spring 48 extends and the transmission between the upper lifting seat 45 and the actuating arm 42 is disengaged (i.e., the gear and rack in the gear and rack transmission mechanism are in a non-meshing state). The carrier plate 24 corresponding to the lower lifting seat 46 moves horizontally inward relative to the base 22 (e.g., ...). Figure 20 As shown in the figure, this achieves the effect of the substrate 24 moving horizontally inward relative to the base 22 in batches, providing space for the subsequent substrate unit 23 to move vertically relative to the base 22 after the substrate is loaded.

[0063] During the above process, when the substrate 24 moves horizontally to the bottom relative to the base 22, the opening direction of the slot 44 on the toggle arm 42 is the same as the direction in which the subsequent substrate 24 moves obliquely relative to the base 22, so that the subsequent substrate 24 can disengage from the slot 44 and move into the slot 44 when it moves obliquely relative to the base 22 under the action of the upper drive unit 6.

[0064] In this embodiment, a positioning post 79 is provided on the end face of the top of the protrusion 78. The diameter of the positioning post 79 is the same as the diameter of the through hole 77 on the upper lifting seat 45. The third linear drive device 72 can be a cylinder.

[0065] See Figures 12-14The lifting mechanism 3 includes a drive shaft 31, a sliding seat 32, and a lifting ring 33. The drive shaft 31 is rotatably mounted on the base 22. A first drive motor 34 for driving the drive shaft 31 to rotate relative to the base 22 is vertically slidably mounted on the frame 1, and a second linear drive device 35 for driving the first drive motor 34 to slide relative to it is mounted on the frame 1. The sliding seat 32 is threadedly fitted onto the drive shaft 31 and slidably connected to the base 22. The lifting ring 33 is vertically slidably mounted on the base 22 and fixed to the sliding seat 32. The carrier unit 23 is fixed to the outer surface of the lifting ring 33.

[0066] After the substrate carrier 24 in the upper substrate carrier unit 23 has retracted inward and the substrate has been loaded onto the lower substrate carrier unit 23, the second linear drive device 35 drives the first drive motor 34 to move vertically downward relative to the frame 1, so that the first drive motor 34 and the drive shaft 31 are connected. Thus, the drive shaft 31 can rotate relative to the base 22 under the action of the first drive motor 34, driving the sliding seat 32 to move the lifting ring 33 vertically upward relative to the base 22, achieving the effect of moving the loaded substrate carrier unit 23 from below the base 22 to above it (e.g., ...). Figure 21 As shown in the figure, this achieves the purpose of positioning the substrate unit 23 on the base 22 after the wafers have been loaded, and provides the position space for the wafer plate 24 in the subsequent wafer unit 23 after oblique movement.

[0067] To reduce motion interference caused by the oblique movement of the substrate carrier unit 23 after the substrate is loaded, the inner end of the bottom of the substrate carrier unit 23, which is vertically slidable relative to the base 22, is provided with an inclined surface structure 36.

[0068] See Figures 15-18The driving mechanism 5 includes an outer driving ring 51, an inner driving ring 52, and several pulling units 53 corresponding to the actuating units 41. The outer driving ring 51 and the inner driving ring 52 are rotatably mounted on the base 22 and can rotate relative to the base 22 through the upper driving unit 6. The pulling unit 53 includes two winding drums 54 corresponding to the actuating arms 42. The winding drums 54 are rotatably mounted on the base 22, and the extension members 43 are rotatably connected to the rollers 55. The extension members 43 pass through the rollers 55 and onto the actuating arms 42. The corresponding rollers 55 and winding drums 54 are connected by a pulling line 56. A guide wheel 57 is rotatably connected to the actuating arm 42. Several reversing wheels 58 are provided between the roller 55 and the winding drum 54. The reversing wheels 58 are rotatably connected to the base 22. The pull line 56 is wound around the guide wheel 57 and the reversing wheels 58 in sequence. The two winding drums 54 in the same pulling unit 53 are connected by a synchronous belt transmission mechanism. Either winding drum 54 is connected to the outer drive ring 51 or the inner drive ring 52 in sequence through a bevel gear transmission mechanism and a gear transmission mechanism. The two winding drums 54 in adjacent pulling units 53 are connected to the outer drive ring 51 and the inner drive ring 52 in sequence.

[0069] The upper drive unit 6 includes a lifting seat 61, which is vertically slidably mounted on the frame 1. A first linear drive device 62 is installed on the frame 1 to drive the lifting seat 61 to move relative to it. The lifting seat 61 is equipped with a second drive motor 63 for driving the base 22 to rotate intermittently relative to the base 21, a third drive motor 64 for driving the outer drive ring 51 to rotate relative to the base 22, and a fourth drive motor 65 for driving the inner drive ring 52 to rotate relative to the base 22. The third drive motor 64 and the outer drive ring 51, as well as the fourth drive motor 65 and the inner drive ring 52, can be connected by a gear transmission mechanism.

[0070] When the substrate carrier 2 on the conveyor 11 is located at the substrate loading station, the first linear drive device 62 drives the lifting seat 61 to move vertically downward relative to the frame 1, so that the second drive motor 63 approaches the base 22 and docks under the drive of the lifting seat 61. During the loading of the substrate unit 23 located below, the base 22 can rotate relative to the base 21 under the drive of the second drive motor 63, which facilitates the installation of substrates on the substrate carrier 2 in place by the workers. This reduces the workload of the workers to move to install substrates at different positions on the substrate carrier 2, and also reduces the space requirements for the device (i.e., the need to reserve space for workers to move to load substrates). At the same time, due to the restriction of the vertical upward movement of the base 22 by the second drive motor 63, the driving effect of the lifting column 75 on the vertical movement of the upper lifting seat 45 and the lower lifting seat 46 relative to the base 22 is ensured.

[0071] During the above process, when the second drive motor 63 completes docking with the base 22, the third drive motor 64 and the outer drive ring 51, as well as the fourth drive motor 65 and the inner drive ring 52, are connected by gear transmission mechanisms. When the second drive motor 63 drives the base 22 to rotate relative to the base 21, the third drive motor 64 and the fourth drive motor 65 run synchronously in the opposite direction to the second drive motor 63, so that the outer drive ring 51, the inner drive ring 52, and the base 22 maintain a relatively stationary state.

[0072] During the horizontal movement of the carrier plate 24 relative to the base 22, the length of the pull line 56 between the roller 55 and the winding drum 54 decreases as the roller 55 moves from one end of the actuating arm 42 to the other. During this process, the outer drive ring 51 and the inner drive ring 52 rotate relative to the base 22 under the drive of the third drive motor 64 and the fourth drive motor 65, respectively. They drive the winding drum 54 to take in the wire through the gear transmission mechanism and the bevel gear transmission mechanism, so that the pull line 56 between the roller 55 and the winding drum 54 remains taut. This restricts the carrier plate 24 from moving obliquely downward relative to the base 22 under the action of gravity, so that the carrier plate 24 can maintain its original horizontal height position after horizontal movement. This ensures that the carrier unit 23, which is subsequently loaded, moves vertically relative to the base 22 to provide the carrier plate 24 with the position space after moving obliquely downward relative to the base 22.

[0073] After the wafer carrier unit 23, which has completed the wafer loading, has finished adjusting its vertical position (e.g., ...), Figure 21 As shown in the diagram, the outer drive ring 51 and the inner drive ring 52 rotate relative to the base 22 under the drive of the third drive motor 64 and the fourth drive motor 65, respectively. Through the transmission of the gear transmission mechanism and the bevel gear transmission mechanism, they drive the winding drum 54 to unwind the wire, allowing the carrier plate 24 to move obliquely downward relative to the base 22 under gravity. The outer carrier plate 24 moves to the position directly below the loaded carrier unit 23 before the inner carrier plate 24 (as shown in the diagram). Figure 22 (As shown in the diagram). The vertical positions of the two substrate carrier units 23 are swapped, allowing the worker to directly mount the substrate onto the substrate carrier unit 23 that has been swapped to the lower position. Before mounting, the first drive motor 34 is disconnected from the drive shaft 31 under the drive of the second linear drive device 35, so that the base 22 can rotate intermittently relative to the base 21 under the drive of the second drive motor 63 during the subsequent mounting process.

[0074] In this embodiment, the output shafts of the first drive motor 34 and the second drive motor 63 are both equipped with connectors 66, and the base 22 and the drive shaft 31 are both provided with snap-fit ​​grooves 67 that are adapted to the connectors 66. The first linear drive device 62 and the second linear drive device 35 can both be electric push rods.

[0075] The above description is merely illustrative of the invention. Those skilled in the art can make various modifications or additions to the described specific embodiments or use similar methods to replace them, as long as they do not depart from the content of this specification or exceed the scope defined by the claims, all of which should fall within the protection scope of this invention.

Claims

1. A slide holder, characterized in that, include: Base; The base is rotatably mounted on the base and is driven by an external force to rotate relative to the base; Two substrate carrier units are used to place several substrates; The two slide units are arranged vertically on the base, with one of the slide units slidably mounted on the base. The base is equipped with a lifting mechanism for driving the slide unit to move relative to it. The other slide unit includes several slide plates arranged in an arc shape. The slide plates are slidably mounted on the base. The base is equipped with a translation mechanism for driving the slide plates to move horizontally relative to it and a driving mechanism for driving them to move obliquely relative to it in the vertical direction. The two slide plates separated by one slide plate have the same movement trajectory. The horizontal movement distance of two adjacent slide plates is different, but the vertical oblique movement distance of the two slide plates is the same.

2. The slide holder according to claim 1, characterized in that: The translation mechanism includes several actuating units corresponding to the slide plate. Each actuating unit includes two parallel actuating arms. The slide plate has two extensions corresponding to the actuating arms. The outer ends of the extensions are fixed to the inner side of the slide plate, and their inner ends are slidably connected to the base and cannot rotate. The two extensions are arranged vertically, with the upper extension being shorter than the lower extension. One end of each actuating arm is rotatably mounted on the base, and the other end has a slot for the inner end of the extension to pass through and slide. An upper lifting seat and a lower lifting seat are vertically slidably mounted on the base. The upper and lower lifting seats are driven by external force to slide relative to the base in sequence. The upper lifting seat has a compression spring between its top end and the base, with its two ends abutting against the upper lifting seat and the base respectively. The lower lifting seat has a tension spring between its bottom end and the base, with its two ends hooked onto the lower lifting seat and the base respectively. The two actuating arms in the same actuating unit are connected by a synchronous belt drive mechanism, and either actuating arm is connected to the upper or lower lifting seat in sequence by a synchronous belt drive mechanism and a gear and rack drive mechanism. The two actuating arms in adjacent actuating units are connected to the upper and lower lifting seats respectively. The horizontal movement distance of the plate corresponding to the upper lifting seat is greater than the horizontal movement distance of the plate corresponding to the lower lifting seat.

3. The slide holder according to claim 2, characterized in that: The driving mechanism includes an outer driving ring, an inner driving ring, and several pulling units corresponding to the actuation units. The outer and inner driving rings are rotatably mounted on the base and driven by external force to rotate relative to the base. Each pulling unit includes two winding drums corresponding to the actuation arms. The winding drums are rotatably mounted on the base, and an extension is rotatably connected to a roller. The extension passes through the roller and onto the actuation arm. Corresponding rollers and winding drums are connected by a pulling line. A guide wheel is rotatably connected to the actuation arm. Several reversing wheels are provided between the roller and the winding drum. The reversing wheels are rotatably connected to the base. The pulling line is wound around the guide wheel and the reversing wheel in sequence. Two winding drums in the same pulling unit are connected by a synchronous belt transmission mechanism, and either winding drum is connected to the outer or inner driving ring in sequence through a bevel gear transmission mechanism and a gear transmission mechanism. Two winding drums in adjacent pulling units are connected to the outer driving ring and the inner driving ring, respectively.

4. The slide holder according to claim 1, characterized in that: The lifting mechanism includes a drive shaft, a sliding seat, and a lifting ring. The drive shaft is rotatably mounted on the base and is driven by an external force to rotate relative to the base. The sliding seat is threaded onto the drive shaft and slidably connected to the base. The lifting ring is vertically slidably mounted on the base and fixed to the sliding seat. The carrier unit is fixed to the outer surface of the lifting ring.

5. The slide holder according to claim 1, characterized in that: The two substrate units have the same structure. Several limiting strips are fixed on the substrate plate, and a limiting space is formed between adjacent limiting strips for inserting and placing the substrate.

6. A method for mounting wafers based on the wafer carrier according to any one of claims 1-5, characterized in that, Includes the following steps: Step 1: Mount several substrates onto the substrate carrier unit located below, and during this process, the substrate rotates intermittently relative to the base. Step 2: After the substrate is installed on the lower substrate unit, the translation mechanism is used to drive several substrate plates in the upper substrate unit that are spaced one substrate plate apart to move horizontally inward along the radial direction of the base to the bottom. Then the remaining substrate plates move horizontally inward along the radial direction of the base to the bottom. Step 3: By driving the lifting mechanism, the lower slide unit moves vertically upward relative to the base until it is on the same horizontal plane as the upper slide unit. Step 4: By driving the drive mechanism, the slide plate moves obliquely downward relative to the base. During this process, the slide plate located on the outer side moves to the bottom before the slide plate located on the inner side.

7. The mounting method according to claim 6, characterized in that: In step 2, the horizontal movement distance of the first moving plate is greater than the horizontal movement distance of the second moving plate.

8. A substrate coating transfer line, characterized in that, include: A slide holder having the same structure as the slide holder described in any one of claims 1-5; The frame is equipped with a conveying device for horizontally and linearly transporting the substrate holder from the loading station to the coating station. The frame has an upper drive unit at its top for driving relative rotation between the base and the base, a lifting mechanism, and a drive mechanism, and a lower drive unit at its bottom for driving a translation mechanism.

9. The substrate coating transfer line according to claim 8, characterized in that: The upper drive unit includes a lifting seat and a first drive motor for driving the drive shaft to rotate relative to the base. Both the lifting seat and the first drive motor are vertically slidably mounted on the frame. The frame is equipped with a first linear drive device for driving the lifting seat to move relative to it and a second linear drive device for driving the first drive motor to slide relative to it. The lifting seat is equipped with a second drive motor for driving the base to rotate intermittently relative to the base, a third drive motor for driving the outer drive ring to rotate relative to the base, and a fourth drive motor for driving the inner drive ring to rotate relative to the base. The third drive motor and the outer drive ring, as well as the fourth drive motor and the inner drive ring, can be connected by a gear transmission mechanism.

10. The substrate coating transfer line according to claim 8, characterized in that: The lower drive unit includes a limiting seat, which is vertically slidably mounted on the frame. A third linear drive device for driving the limiting seat to move relative to it is mounted on the frame. The base is provided with at least one protrusion, which is perpendicular to the conveying direction of the conveying device. The limiting seat is provided with a limiting groove for accommodating the protrusion. A lifting column is vertically slidably mounted on the limiting seat and a fourth linear drive device for driving the lifting column to slide relative to it is mounted on it. Both the upper and lower lifting seats are provided with through holes. The diameter of the through hole on the upper lifting seat is smaller than the diameter of the through hole on the lower lifting seat. The diameter of the end face of the top of the lifting column is larger than the diameter of the through hole on the lower lifting seat. A protrusion is provided on the end face of the top of the lifting column. The diameter of the protrusion is not greater than the diameter of the through hole on the lower lifting seat but greater than the diameter of the through hole on the upper lifting seat.

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