An epitaxial growth apparatus

Abstract

This application discloses an epitaxial growth apparatus, including a film formation module. The module includes a housing with a spraying component mounted on its top side and a base plate mounted on its bottom side. A support portion is disposed within the housing, and a carrier portion of the support portion has multiple receiving portions. Each receiving portion has an air guide groove for holding trays and substrates. The support portion has a first air passage that matches and communicates with the receiving portions. A drive portion is located on the bottom side of the housing, having a hollow rotating shaft that passes through a perforation and connects to the support portion. The rotating shaft has a second air passage extending axially to its end and communicating with a corresponding first air passage. The drive portion has an air inlet end that communicates with a corresponding second air passage. This air inlet end is used to introduce gas that causes the trays and substrates to rotate. Each air inlet end forms a self-driven air passage for the corresponding tray and substrate to rotate. By independently adjusting the rotation speed of the tray and substrate on the corresponding receiving portion through the self-driven air passage, the film formation quality is improved.

Description

Technical Field

[0001] This application relates to the field of epitaxial growth technology, and more specifically to an epitaxial growth apparatus. Background Technology

[0002] Epitaxial growth typically utilizes CVD deposition equipment, which includes a reaction chamber containing a base. The base has at least one receiving section for holding a tray and a substrate. A drive unit is connected to the side of the base away from the receiving section. The drive unit has a drive shaft connected to the center of the base, and at least one gas channel is provided within the drive shaft. This gas channel communicates with the corresponding receiving section and is connected to an external gas source. During vapor deposition, the substrate is placed on a tray, which is then placed sequentially on the receiving section of the base. The drive unit rotates the base, causing the tray and the substrate on it to rotate. Simultaneously, the tray and the substrate are suspended and rotate by the gas introduced through the gas channel within the drive shaft. The speed at which the substrate rotates relative to the base with the tray affects the substrate's thickness uniformity and doping uniformity. Currently, equipment using a drive shaft with built-in gas channels suffers from complex internal structures, which may not even meet the requirements when multiple receiving sections are used.

[0003] Therefore, it is necessary to improve existing epitaxial growth equipment. Summary of the Invention

[0004] To overcome the above-mentioned shortcomings, the purpose of this application is to provide an epitaxial growth device that improves production efficiency.

[0005] To achieve the above objectives, this application adopts the following technical solution:

[0006] An epitaxial growth apparatus includes: a film-forming module, the film-forming module including a housing, a spraying component mounted on the top side of the housing, a base plate mounted on the bottom side of the housing, and a perforation provided in the middle of the base plate;

[0007] The housing is provided with a support part, and a bearing part is installed on the side of the support part away from the bottom plate. The bearing part is provided with a plurality of storage parts. The storage parts have air guide grooves, and the support part has a first air passage that matches and corresponds to the storage parts and is connected to the corresponding storage parts. The storage parts are used to place trays and substrates.

[0008] A drive unit is installed on the bottom side of the housing. The drive unit has a hollow rotating shaft. The rotating shaft passes through the perforation of the bottom plate and connects to the support unit. A second ventilation channel is provided on one side of the rotating shaft, extending axially to the end. The second ventilation channel is connected to the corresponding first ventilation channel. An air inlet end is provided on the drive unit that matches the storage part. The air inlet end is connected to the corresponding second ventilation channel. The air inlet end is used to introduce gas that causes the tray and substrate to rotate.

[0009] Preferably, the support includes a base and a hollow support cylinder, one side of which abuts against the edge of the bearing portion. The support cylinder has a second sub-ventilation channel extending axially therein. The base has a through hole in the middle and a stepped portion surrounding the through hole. The stepped portion is used to connect with the rotating shaft. The base has a first sub-ventilation channel extending radially upward along the through hole, and the first sub-ventilation channel is not connected to the through hole.

[0010] Preferably, the number of the first sub-ventilation channels is the same as the number of the second sub-ventilation channels and the number of the receiving parts.

[0011] Preferably, the diameter of the through hole is the same as or approximately the same as the inner diameter of the hollow rotating shaft.

[0012] Preferably, the first sub-ventilation channel has a first air inlet section extending along the thickness direction of the base on the side near the through hole, and a first air outlet section extending along the thickness direction of the base on the side away from the through hole. The first air inlet section is used to communicate with the corresponding second ventilation channel of the rotating shaft, and the first air outlet section is used to communicate with the corresponding second sub-ventilation channel.

[0013] Preferably, the drive unit includes a body with at least one air inlet, a rotating shaft is disposed inside the housing, and there is a gap between the housing and the rotating shaft. The gap has spaced-apart magnetohydrodynamic sealing components, and the combination of two adjacent magnetohydrodynamic sealing components constitutes an air passage surrounding the rotating shaft. The air passage connects the corresponding air inlet and the second ventilation air passage.

[0014] Preferably, a drive motor is provided in the body, the drive motor includes a stator assembly and a rotor assembly, the rotor assembly is sleeved on the rotating shaft, and the stator assembly is sleeved on the rotor assembly.

[0015] Preferably, a connecting part is sleeved on the rotating shaft, and the connecting part is connected to the output end of the drive motor via a transmission belt.

[0016] Preferably, the drive unit is provided with a cooling channel, which is connected to a cooling source via a pipe.

[0017] Preferably, a heater is installed within the support portion, the heater being connected to a heater electrode, the heater electrode extending axially along the support portion and at least partially located within the rotating shaft.

[0018] Beneficial effects

[0019] The epitaxial device provided in this application optimizes the self-driven air ducts connected to the receiving section on the support unit. These self-driven air ducts include corresponding air ducts in the support unit, corresponding air ducts in the hollow rotating shaft, and air ducts surrounding the hollow rotating shaft. This reduces the piping layout while independently adjusting the rotation speed of the corresponding tray and substrate through the self-driven air ducts, thereby improving the quality of epitaxial film deposition. The receiving unit has a spiral-shaped air guide groove, which connects to the corresponding air inlet end via the corresponding air ducts in the support unit, the corresponding air ducts in the hollow rotating shaft, and the air ducts surrounding the hollow rotating shaft. Each air inlet end forms a self-driven air duct for the rotation of the corresponding tray and substrate on the receiving unit, and the individual air ducts are reliably isolated. Using multiple air inlets, the power required for the rotation of multiple substrates can be provided separately. The air ducts surrounding the hollow rotating shaft are optimized using a magnetohydrodynamic sealing assembly to improve rotational sealing stability. Attached Figure Description

[0020] The accompanying drawings are provided to illustrate the technical solutions of this disclosure and form part of the specification. They are used together with the embodiments of this disclosure to explain the technical solutions of this disclosure and do not constitute a limitation on the technical solutions of this disclosure. The shapes and sizes of the components in the drawings do not reflect actual proportions and are only intended to illustrate the content of this application.

[0021] Figure 1 This is a cross-sectional schematic diagram of the film-forming module of the epitaxial device in an embodiment of this application;

[0022] Figure 2 for Figure 1 A cross-sectional schematic diagram of the housing, spray components, and heater is shown, but is omitted.

[0023] Figure 3 This is a schematic diagram of the carrier portion of this application, with a substrate and tray hidden.

[0024] Figure 4 This is a top view of the drive unit according to an embodiment of this application;

[0025] Figures 5-7 They are respectively Figure 4 A cross-sectional diagram of the three air intake ends;

[0026] Figure 8 This is a cross-sectional schematic diagram of the drive unit according to another embodiment of this application. Detailed Implementation

[0027] The above-described solution will be further illustrated below with reference to specific embodiments. It should be understood that these embodiments are for illustrative purposes only and are not intended to limit the scope of this application. The implementation conditions used in the embodiments may be further adjusted according to the conditions of specific manufacturers, and the implementation conditions not specified are generally those in routine experiments.

[0028] Unless otherwise defined, the technical or scientific terms used in the embodiments of this disclosure shall have the ordinary meaning understood by one of ordinary skill in the art to which this application pertains. The terms "first," "second," and similar terms used in the embodiments of this disclosure do not indicate any order, quantity, or importance, but are merely used to distinguish different components. Terms such as "comprising" or "including" mean that the element or object preceding the word encompasses the element or object listed following the word and its equivalents, without excluding other elements or objects. Terms such as "connected" or "linked" are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. In this document, "electrical connection" includes the situation where constituent elements are connected together by an element having some electrical function. There is no particular limitation on the "electrically functioning element," as long as it enables the transmission and reception of electrical signals between the connected constituent elements. An "electrically functioning element" can be, for example, an electrode or wiring, a switching element such as a transistor, or other functional elements such as a resistor, inductor, or capacitor. "Up," "down," "left," and "right" are only used to indicate relative positional relationships. When the absolute position of the object being described changes, the relative positional relationship may also change accordingly.

[0029] In this application, the terms "upper," "lower," "inner," "middle," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. These terms are primarily for the purpose of better describing this application and its embodiments, and are not intended to limit the indicated device, element, or component to having a specific orientation, or to be constructed and operated in a specific orientation.

[0030] As revealed in the background art, in order to improve the operating efficiency of epitaxial equipment, the base (also known as the carrier) of the current epitaxial equipment has multiple storage sections (such as five storage sections evenly distributed in the circumference of the base). These storage sections are connected to the air channels in the drive shaft of the drive unit through matching air channels. A support shaft is set in the center of the side of the base away from the storage sections. The support shaft is connected to the drive shaft. An inductor coil is set on the lower side of the base. The inductor coil is located outside the support shaft. During vapor deposition, the base rotates, causing the tray and the substrate on it to rotate. While rotating, the tray and the substrate on it are suspended and rotate by the gas introduced into the air channel in the drive shaft. The speed at which the substrate rotates relative to the base with the tray will affect the thickness uniformity and doping uniformity of the substrate. Due to the space limitation in the drive shaft, when epitaxially growing multiple substrates, it is necessary to optimize the air channels so that they can provide a stable and controllable self-driving gas source for the tray rotation and cooling the drive unit.

[0031] Based on the above analysis, the applicant proposes an epitaxial growth apparatus that can be used for gallium nitride epitaxial growth, comprising: a film formation module, the film formation module including a housing, a spraying component mounted on the top side of the housing, the spraying component being connected to a gas supply unit via a pipe. A base plate is installed on the bottom side of the housing, and a perforation is provided in the middle of the base plate. A cylindrical support is provided inside the housing, and a bearing part is installed on the side of the support away from the base plate. The bearing part is provided with multiple storage parts, each storage part having an air guide groove. The support part has a first ventilation channel that matches the number of storage parts and connects to the corresponding storage parts. The storage parts are used to place trays and substrates. A drive part is installed on the bottom side of the housing. The drive part has a hollow rotating shaft that passes through the perforation of the base plate and connects to the support part. A second ventilation channel is provided on one side of the rotating shaft, extending axially to the end. The second ventilation channel connects to the corresponding first ventilation channel. The drive part is provided with an air inlet end that matches the storage part and connects to the corresponding second ventilation channel. The air inlet end is used to introduce gas that causes the trays and substrates to rotate. By optimizing the self-driven air duct connected to the receiving section on the support unit, this self-driven air duct includes a corresponding air duct in the support unit (first ventilation air duct), a corresponding air duct in the hollow rotating shaft (second ventilation air duct), and an air duct surrounding the hollow rotating shaft. This reduces the need for piping / air ducts within the hollow rotating shaft (the saved space can be used for heater electrodes). Simultaneously, the self-driven air duct independently adjusts the rotation speed of the corresponding tray and substrate, improving the quality of epitaxial film deposition. The receiving unit has a spiral-shaped air guide groove, which connects to the corresponding air inlet end via the corresponding air duct in the support unit, the corresponding air duct in the hollow rotating shaft, and the air duct surrounding the hollow rotating shaft. Each air inlet end forms a self-driven air duct for the rotation of the corresponding tray and substrate, with reliable isolation between the respective air ducts. Multiple air inlets can provide the power required for the rotation of multiple substrates. Furthermore, the air duct surrounding the hollow rotating shaft is optimized by employing a magnetohydrodynamic sealing assembly, improving rotational sealing stability and reducing the operating cost of the epitaxial equipment. The outer diameter of the support is approximately the same as or slightly smaller than the outer diameter of the load-bearing part, such that one end of the support abuts against the edge of the load-bearing part. A heater is installed inside the support, and the heater is fitted with a heater electrode that extends axially along the support and is at least partially located within the shaft.

[0032] Next, combine Figures 1-8 This application describes the epitaxial growth apparatus proposed in this application, which can be used for the epitaxial growth of gallium nitride, etc.

[0033] The epitaxial growth equipment includes a film-forming module 100, which includes a housing 110. The housing 110 may be cylindrical, with a spraying component 120 installed on its top side and a base plate 112 installed on its bottom side. A perforation 112a is provided in the middle of the base plate 112, and an air extraction hole 112b is also provided on the base plate 112. The air extraction hole 112b is connected to a vacuum device (not shown) via a pipe.

[0034] The housing 110 contains a support portion 150, and a carrier portion 160 is mounted on the side of the support portion 150 away from the base plate 112. The carrier portion 160 has multiple storage compartments for holding a tray and a substrate 200. The substrate 200 can be 6 inches, 8 inches, 12 inches, or larger. The substrate 200 can be a silicon substrate, silicon carbide substrate, gallium nitride substrate, sapphire substrate, or diamond substrate, etc. In one embodiment, at least one auxiliary heater (not shown) is axially disposed within the housing 110, with the lowermost auxiliary heater located above the substrate. In this embodiment, the edge side of the carrier portion abuts against the support portion. This arrangement, compared to the central area of ​​the carrier portion abutting against the support portion, is more conducive to leveling the support portion and results in a more uniform temperature and flow field during epitaxial growth.

[0035] A heater 170, which can be a resistance heater such as a graphite heater, is installed within the support portion 150. The heater 170 is connected to a heater electrode 170a, which extends into the hollow rotating shaft 140 described below. The heater can cover the effective area of ​​the support portion 160, resulting in more uniform heating, smaller temperature differences, and improved service life of the support portion (also called the large disc). The support portion is disc-shaped.

[0036] The spray component 120 is connected to a gas supply unit (not shown) via a pipe, through which process gas, carrier gas, or protective gas is supplied. The spray component 120 is disposed opposite to the support unit 150, and the gas mixed by the spray component 120 is blown toward the surface of the substrate in a direction perpendicular or substantially perpendicular to the surface of the substrate.

[0037] A drive unit 130 is mounted on the bottom side of the housing 110. The drive unit 130 has a hollow rotating shaft 140, one end of which passes through a perforation 112a in the base plate 112 and connects to the support unit 150. The drive unit 130 is provided with an air inlet end that matches the receiving part. The air inlet end is connected to an external gas source via a pipe, which provides hydrogen, helium, or an inert gas. During epitaxial growth, the drive unit 130 drives the support unit 150 to rotate. The rotation of the support unit 150 drives the carrier part 160 on it, as well as the tray and substrate on it to rotate. While rotating, the tray and the substrate on it are suspended and rotate by the gas introduced through the air inlet end of the drive unit 130 (each air inlet end matches a corresponding receiving part). The substrate rotates with the tray relative to the base.

[0038] The housing 110 includes a sidewall 111 with an opening 111a through which a tray and its corresponding substrate are placed and removed. In practice, a gate valve is provided on the side of the opening 111a, connecting to a transfer chamber. A robotic arm is installed within the transfer chamber, and the robotic arm places and removes the carrier portion 160, which has a tray and a corresponding substrate. In this embodiment, the implementation of the robotic arm for placing and removing the carrier portion is not limited.

[0039] like Figure 2 As shown Figure 1 A schematic diagram of the housing 110, spray component 120, and heater is shown in the middle.

[0040] The support portion 150 includes a base 151 and a hollow support cylinder 152. The support cylinder 152 has a second sub-ventilation channel 1521, the number of which is the same as the number of storage portions 161. One end of the hollow support cylinder 152 abuts against the edge of the bearing portion 160.

[0041] The base 151 is disc-shaped with a through hole 1512 in its center. A stepped portion 15121 surrounds the through hole 1512, which is used to connect to one end of the hollow rotating shaft 140. The base 151 has a first sub-ventilation channel 1511 extending radially upward along the through hole 1512, and this first sub-ventilation channel 1511 is not connected to the through hole 1512. The number of first sub-ventilation channels 1511 is the same as the number of storage portions 161. The side of the first sub-ventilation channel 1511 closest to the through hole 1512 has a first air inlet section 15111 extending along the thickness direction of the base 151, and the side of the first sub-ventilation channel 1511 furthest from the through hole 1512 has a first air outlet section 15112 extending along the thickness direction of the base 151. The first air inlet section 15111 is connected to the corresponding second ventilation channel 141 of the hollow rotating shaft 140, and the first air outlet section 15112 is connected to the corresponding second sub-ventilation channel 1521. The second sub-ventilation channel 1521 is connected to the corresponding receiving portion 161 on the support portion 160. The second ventilation channel 141 is connected to the corresponding air channel 1351 surrounding the hollow rotating shaft and the corresponding air inlet end 135. In this embodiment, the air channel surrounding the hollow rotating shaft adopts a magnetohydrodynamic sealing assembly, which has high rotational sealing stability, improves the sealing effect, simplifies the air path, and reliably isolates the driving air paths (self-driven air paths) formed by multiple air inlets, and can provide a stable and controllable rotation speed for the tray / substrate to rotate. In this embodiment, the diameter of the through hole 1512 is the same as or approximately the same as the inner diameter of the hollow rotating shaft 140. The combination of the first sub-ventilation channel and the second sub-ventilation channel constitutes the first ventilation channel.

[0042] The drive unit 130 includes a body 131 with at least one air inlet end 135. A hollow rotating shaft 140 is disposed within the body 131, and a gap exists between the body 131 and the rotating shaft 140. The gap has spaced-apart magnetohydrodynamic sealing assemblies 136, and adjacent magnetohydrodynamic sealing assemblies 136 combine to form an air passage surrounding the hollow rotating shaft. A second ventilation air passage 141 extending axially to the end of one side of the hollow rotating shaft 140 is disposed, and the second ventilation air passage 141 communicates with the corresponding air passage surrounding the hollow rotating shaft. A drive motor is disposed within the body 131, and the drive motor includes a stator assembly 132 and a rotor assembly 133, the rotor assembly 133 being sleeved on the hollow rotating shaft 140. Preferably, a bearing 137 is sleeved on the hollow rotating shaft 140. In this embodiment, the drive unit 130 is provided with a cooling channel 134, which cools the magnetohydrodynamic sealing assembly, preventing the magnetohydrodynamic fluid in the assembly from overheating and failing, thereby improving the sealing performance. In one embodiment, the cooling channel can also cool the drive motor, improving the operational stability of the drive motor.

[0043] As Figure 2 For variations of the implementation method, see Figure 8 The drive motor can be located on the outside of the hollow rotating shaft 140. A connecting part 143 is sleeved on the rotating shaft 140. The connecting part 143 is connected to the output end 138a of the drive motor 138 through a transmission belt (such as a synchronous belt).

[0044] Next, combine Figures 3-7 The example described uses three storage compartments on the support section. In other embodiments, the number of storage compartments can be more, such as five, six, seven, eight, nine, etc. Figure 5 for Figure 4 A schematic diagram of the cross-section along AA at the middle air intake end 135a. Figure 6 for Figure 4 A schematic diagram of the cross-section of the middle intake end 135b along BB. Figure 7 for Figure 4 A schematic diagram of the cross-section of the middle intake end 135c along CC.

[0045] The support portion 160 has three storage portions 161 evenly distributed circumferentially on one side. Each storage portion 161 holds a tray 210 and a substrate 200. Each storage portion 161 has a spiral-shaped air guide groove 162. The air guide groove 162 connects to a corresponding first ventilation channel (e.g., the air guide groove 162 connects to a corresponding second sub-ventilation channel 1521 of the support cylinder 152 via a third ventilation channel 1611, and the second sub-ventilation channel 1521 connects to the corresponding first sub-ventilation channel 1511). Preferably, the storage portion 161 has a through hole in its center for inserting a pin 211. The pin 211 connects to the tray 210. Driven by the gas guided by the spiral-shaped air guide groove 162, the tray / substrate moves axially along the pin and rotates along it (i.e., air agitation and rotation).

[0046] The drive unit 130 has a body 131, on which air inlets 135a / 135b / 135c (collectively referred to as air inlets 135) are provided. A hollow rotating shaft 140 is provided inside the body 131, and there is a gap between the body 131 and the rotating shaft 140. The gap has spaced magnetic fluid sealing components 136. Two adjacent magnetic fluid sealing components 136 are combined to form an air passage surrounding the hollow rotating shaft. A second ventilation air passage 141 is provided on one side of the hollow rotating shaft 140, extending axially to its end. The end of this side has a mounting hole 142, through which a fastener (such as a bolt) can be inserted to fix the rotating shaft 140 to the base 151. The air intakes 135a / 135b / 135c are respectively connected to the corresponding air passages surrounding the hollow rotating shaft. Specifically, the air intake 135a is connected to the corresponding air passage 135a1 surrounding the hollow rotating shaft and the ventilation passage 141a; the air intake 135b is connected to the corresponding air passage 135b1 surrounding the hollow rotating shaft and the ventilation passage 141b; and the air intake 135c is connected to the corresponding air passage 135c1 surrounding the hollow rotating shaft (the air passages 135a1, 135b1, and 135c1 surrounding the hollow rotating shaft are collectively referred to as air passage 1351) and the ventilation passage 141c (the ventilation passages 141a, 141b, and 141c are collectively referred to as the second ventilation passage 141).

[0047] The drive unit 130 is provided with a cooling channel 134, which cools the drive motor and prevents the magnetic fluid from overheating and failing, thus improving its operational stability. Preferably, the cooling channel 134 is located close to the magnetic fluid sealing assembly 136.

[0048] In this embodiment, the air inlets 135a / 135b / 135c each form a driving air path (self-driven air path), and the driving air paths are isolated from each other, thus allowing individual control of the rotational speed of each substrate. By setting a third air passage on the hollow rotating shaft, the number of pipelines is reduced, maximizing the utilization of the internal space of the hollow rotating shaft. For example, heater electrodes can be arranged in the internal space of the hollow rotating shaft. This simplifies the layout of the heater electrodes and allows the cooling channels surrounding the hollow rotating shaft to cool the heater electrodes (eliminating the need for additional cooling channels for the heater electrodes). The air guide groove 162 connects to the corresponding air inlet end via the corresponding air passage in the support part 150, the corresponding air passage in the hollow rotating shaft, and the air passage surrounding the hollow rotating shaft. During operation, the driving gas enters the corresponding air passage surrounding the hollow rotating shaft through the air inlet end, enters the corresponding air passage in the carrier part through the air outlet of the corresponding third air passage, and is transported to the back of the tray corresponding to the substrate, forming a gas buoyancy force. Under the guidance of the spiral air guide groove, the tray moves and rotates (self-rotation) along the pin axis. Preferably, a speed measuring device (not shown) is provided on the carrier part 160, which is used to detect the rotation speed of the tray.

[0049] In one embodiment, the epitaxial growth apparatus further includes a buffer chamber connected to a transfer chamber via a gate valve. The buffer chamber is used to store the substrate and tray to be grown, or the substrate and tray to be cooled for epitaxial growth. The buffer chamber and the transfer chamber can be connected to a vacuum device via pipes. It is understood that the epitaxial growth apparatus includes a control module that controls the operation of the film deposition module, the buffer chamber, and the transfer chamber.

[0050] The above embodiments are only for illustrating the technical concept and features of this application, and are intended to enable those skilled in the art to understand the content of this application and implement it accordingly. They should not be used to limit the scope of protection of this application. All equivalent changes or modifications made in accordance with the spirit and essence of this application should be included within the scope of protection of this application.

Claims

1. An epitaxial growth apparatus, comprising: The film-forming module is characterized in that, The film-forming module includes a housing, a spraying component is installed on the top side of the housing, a base plate is installed on the bottom side of the housing, and a perforation is provided in the middle of the base plate; The housing is provided with a support part, and a bearing part is installed on the side of the support part away from the bottom plate. The bearing part is provided with a plurality of storage parts. The storage parts have air guide grooves, and the support part has a first air passage that matches and corresponds to the storage parts and is connected to the corresponding storage parts. The storage parts are used to place trays and substrates. A drive unit is installed on the bottom side of the housing. The drive unit has a hollow rotating shaft. The rotating shaft passes through the perforation of the bottom plate and connects to the support unit. A second ventilation channel is provided on one side of the rotating shaft, extending axially to the end. The second ventilation channel is connected to the corresponding first ventilation channel. An air inlet end is provided on the drive unit that matches the storage part. The air inlet end is connected to the corresponding second ventilation channel. The air inlet end is used to introduce gas that causes the tray and substrate to rotate.

2. The epitaxial growth apparatus as described in claim 1, characterized in that, The support includes a base and a hollow support cylinder. One side of the support cylinder abuts against the edge of the bearing portion. The support cylinder has a second sub-ventilation channel extending axially therein. The base has a through hole in the middle and a stepped portion surrounding the through hole. The stepped portion is used to connect with the rotating shaft. The base has a first sub-ventilation channel extending radially upward along the through hole, and the first sub-ventilation channel is not connected to the through hole.

3. The epitaxial growth apparatus as described in claim 2, characterized in that, The number of the first sub-ventilation channels is the same as the number of the second sub-ventilation channels and the number of the receiving parts.

4. The epitaxial growth apparatus as described in claim 2, characterized in that, The diameter of the through hole is the same as the inner diameter of the hollow rotating shaft.

5. The epitaxial growth apparatus as described in claim 2, characterized in that, The first sub-ventilation channel has a first air inlet section extending along the thickness direction of the base on the side near the through hole, and a first air outlet section extending along the thickness direction of the base on the side away from the through hole. The first air inlet section is used to communicate with the corresponding second ventilation channel of the rotating shaft, and the first air outlet section is used to communicate with the corresponding second sub-ventilation channel.

6. The epitaxial growth apparatus as described in claim 1, characterized in that, The drive unit includes a body with at least one air inlet. The housing contains the rotating shaft, and there is a gap between the housing and the rotating shaft. The gap has spaced-apart magnetohydrodynamic sealing components. The combination of two adjacent magnetohydrodynamic sealing components forms an air passage surrounding the rotating shaft. The air passage connects the corresponding air inlet and the second ventilation air passage.

7. The epitaxial growth apparatus as described in claim 6, characterized in that, The main body is provided with a drive motor, which includes a stator assembly and a rotor assembly. The rotor assembly is sleeved on the rotating shaft, and the stator assembly is sleeved on the rotor assembly.

8. The epitaxial growth apparatus as described in claim 6, characterized in that, A connecting part is sleeved on the rotating shaft, and the connecting part is connected to the output end of the drive motor via a transmission belt.

9. The epitaxial growth apparatus as described in claim 6, characterized in that, The drive unit is provided with a cooling channel, which is connected to a cooling source via a pipe.

10. The epitaxial growth apparatus as described in claim 1, characterized in that, A heater is installed inside the support portion, the heater is connected to a heater electrode, the heater electrode extends axially along the support portion and is at least partially located within the rotating shaft.

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