A filling device for phosphorus pentafluoride and a filling method thereof

Abstract

This invention discloses a phosphorus pentafluoride filling device and method. The filling device includes: a filling cabinet, with a leak-proof isolation cover with a socket at the bottom that is liftable and movable inside the filling cabinet, a filling port on one side of the leak-proof isolation cover, and a filling pipe inside the filling cabinet; a multi-functional cylinder sealing assembly, including a first expandable annular seal located at the socket of the leak-proof isolation cover, wherein after expansion, the inner ring of the first expandable annular seal seals against the upper part of the corresponding cylinder; and a filling pipe sealing assembly, including a second expandable annular seal located at the filling port of the leak-proof isolation cover, wherein after the connector of the filling pipe is tightened to the inlet of the cylinder, the second expandable annular seal is pressurized and expands, and its inner ring seals against the filling pipe. This invention can effectively improve the accuracy of leak detection and reduce the probability of leakage at the connection between the filling pipe and the cylinder.

Description

Technical Field

[0001] This invention relates to an auxiliary device for the production and preparation of phosphorus pentafluoride, specifically a phosphorus pentafluoride filling device and its filling method, which can effectively, quickly and safely fill phosphorus pentafluoride. Background Technology

[0002] Phosphorus pentafluoride, as an important electronic-grade specialty gas, has wide applications in fields such as integrated circuit manufacturing and the photovoltaic industry. It is typically stored under high pressure in specialized steel cylinders, and the cylinder filling process is a crucial step in ensuring its safe supply.

[0003] In existing phosphorus pentafluoride filling processes, the filling volume is generally controlled by adjusting the filling pressure. Therefore, the filling pressure is typically dynamically adjusted. As the filling pressure changes, the connection between the material filling connector and the cylinder's inlet end experiences alternating stress. This alternating stress can easily cause vibration in the connector components, increasing the risk of leakage at the connection point. Because phosphorus pentafluoride is highly corrosive and toxic, a leak could potentially lead to a serious safety accident.

[0004] To improve the safety of phosphorus pentafluoride filling, the existing phosphorus pentafluoride filling process is generally carried out in a dedicated filling cabinet to prevent hazards caused by leakage and diffusion during the filling process. Because the filling cabinet has a relatively large isolation space, existing detection methods, such as pressure testing or phosphorus pentafluoride detectors, struggle to quickly and accurately detect even small leaks, especially minor ones, thus failing to identify early leakage risks in a timely manner. Furthermore, the large filling space of the cabinet also results in a relatively large replacement of the inert gas in the isolation space before filling, increasing filling costs and reducing production efficiency.

[0005] Therefore, without affecting the filling operation, the research objective of this invention is to design a phosphorus pentafluoride filling device and filling method that can effectively form a small space isolation at the connection between the filling pipe and the cylinder, and effectively reduce vibration at the connection between the filling pipe and the cylinder while forming the isolation space, thereby effectively improving the accuracy of leak detection and reducing the amount of inert gas replacement in the isolation space, and effectively reducing the probability of leakage at the connection between the filling pipe and the cylinder. Summary of the Invention

[0006] In view of the technical problems existing in the prior art, the present invention provides a phosphorus pentafluoride filling device and filling method, which can effectively, quickly and safely fill phosphorus pentafluoride.

[0007] The technical solution of this invention is: A phosphorus pentafluoride filling device, comprising: A filling cabinet is provided with a cylinder placement area. A leak-proof isolation cover with a bottom fitting is provided on the upper part of the cylinder placement area. A corresponding filling port is provided on one side of the leak-proof isolation cover. A filling pipe is provided in the filling cabinet and connected to an external material source through a corresponding filling valve. The pipe is adapted to the valve of the corresponding cylinder through the fitting so that the leak-proof isolation cover can be lowered and fitted onto the upper part of the cylinder. The multi-functional cylinder sealing assembly includes a first expandable annular seal disposed at the sleeve interface of the leak-proof isolation cover. After the first expandable annular seal is pressurized and expanded, its inner ring closes and abuts against the upper part of the corresponding cylinder, and adjusts the verticality of the cylinder. The filling tube sealing assembly includes a second expandable annular seal disposed at the filling port of the leak-proof isolation cover. After the connector of the filling tube is screwed to the inlet of the cylinder, the second expandable annular seal expands under pressure and its inner ring seals against the filling tube.

[0008] The filling device also includes a set of vibration damping components. The set of vibration damping components are respectively disposed at the sleeve interface of the leak-proof isolation cover and the filling port. After the first expandable annular seal and the second expandable annular seal are pressurized for a second time, the first expandable annular seal and the second expandable annular seal drive the vibration damping components to abut against the cylinder and the filling pipe respectively.

[0009] The leak-proof isolation cover is equipped with a corresponding inert gas inlet pipe and a gas outlet pipe. Inert gas from the outside is injected into the leak-proof isolation cover through the inert gas inlet pipe to replace the gas inside the leak-proof isolation cover, and the replaced gas is discharged through the gas outlet pipe.

[0010] The first expandable annular seal and the second expandable annular seal are hollow annular parts made of perfluoroether rubber. The sleeve and filling port of the leak-proof isolation cover are respectively provided with corresponding insertion grooves. The first expandable annular seal and the second expandable annular seal are respectively sealed and embedded in the insertion grooves.

[0011] The hollow portions of the first expandable annular seal and the second expandable annular seal are respectively connected in parallel to an external pneumatic control system via corresponding first and second solenoid valves.

[0012] The vibration damping assembly includes an annular vibration damping container fixed to a leak-proof isolation cover around the socket and filling port. The annular vibration damping container is filled with corresponding vibration damping materials. Corresponding vibration transmission rods are oscillatingly installed on the inner side of the vibration damping container. The vibration transmission rods are respectively connected to the lower side of the first expandable annular seal and the second expandable annular seal through corresponding driven abutment rods.

[0013] After the first and second expandable annular seals are pressurized and expanded once, their inner ring portions are in line contact with the cylinder and the filling tube, respectively. After the first and second expandable annular seals are pressurized a second time, their inner ring portions are in surface contact with the cylinder and the filling tube, respectively. The first and second expandable annular seals also push the driven abutment rod outward, so that the vibration transmission rod is fixedly abutted against the cylinder and the filling tube, respectively.

[0014] The leak-proof isolation cover is equipped with a pressure gauge for detecting the pressure inside the leak-proof isolation cover.

[0015] The leak-proof isolation cover is raised and lowered by a drive cylinder installed on the upper part of the filling cabinet.

[0016] A method for filling phosphorus pentafluoride, based on the phosphorus pentafluoride filling device described above, includes the following specific steps: S1, move the gas cylinder to the gas cylinder placement area of ​​the filling cabinet; S2, the leak-proof isolation cover is activated and moves downwards to be fitted onto the upper end of the cylinder; S3, the first expandable annular seal of the multifunctional cylinder sealing assembly is pressurized and expanded, so that its inner ring is sealed and abuts against the upper part of the corresponding cylinder, and the verticality of the cylinder is adjusted. S4, manually pass the connector of the filling tube through the second expandable annular seal and tighten it to the inlet of the cylinder. Then, the second expandable annular seal of the filling tube sealing assembly is pressurized and expanded, so that its inner ring is sealed and abuts against the filling tube. S5, external inert gas is injected into the leak-proof isolation cover to replace the gas inside the leak-proof isolation cover; S6, after the inert gas replacement is completed, the air pressure inside the leak-proof isolation cover is kept greater than the atmospheric pressure, and the air pressure value inside the leak-proof isolation cover is detected by a pressure gauge. After it is detected that the air pressure value inside the leak-proof isolation cover does not decrease, the first expandable annular seal and the second expandable annular seal are respectively pressurized and expanded for a second time. S7, the valve of the steel cylinder is opened, and then the filling valve is opened, and the material enters the steel cylinder through the filling pipe for filling operation; S8, when the filling amount reaches the set value, the valve of the cylinder is closed, and after the material in the filling pipe is returned and emptied, the filling valve is closed; S9, the second expandable annular seal is depressurized, the connector of the filling tube is manually disassembled, then the first expandable annular seal is depressurized, the leak-proof isolation cover is reset, and the steel cylinder filled with phosphorus pentafluoride is unloaded, and the filling is completed.

[0017] Compared with the prior art, the advantages and positive effects of the present invention are as follows: 1) Based on the filling cabinet, this invention further includes a leak-proof isolation cover inside the filling cabinet. The leak-proof isolation cover is adapted to the valve of the corresponding cylinder through the sleeve interface on the cover, so that the leak-proof isolation cover is fitted onto the upper part of the cylinder. Then, the first expandable annular seal of the multi-functional cylinder sealing assembly is pressurized and expanded, so that its inner ring seals against the upper part of the corresponding cylinder and adjusts the verticality of the cylinder to overcome the possibility that the cylinder may not be able to be vertical due to uneven bottom, thereby improving the placement stability of the cylinder and facilitating the connection operation between the filling pipe and the cylinder inlet. After the connector of the filling pipe passes through the second expandable annular seal and is tightened to the cylinder inlet, the second expandable annular seal of the filling pipe sealing assembly is pressurized and expanded, so that its inner ring seals against the filling pipe. Subsequently, simply opening the cylinder valve and filling valve allows for the filling of phosphorus pentafluoride cylinders. This effectively creates a small space at the connection between the filling pipe and the cylinder without affecting the filling operation. In the event of a leak, the pressure change within the narrow isolation space will be more noticeable, thereby effectively improving the accuracy of leak detection. Furthermore, the reduced isolation space also reduces the amount of inert gas replaced within it.

[0018] 2) Based on reducing the isolation space, the present invention further provides vibration damping components at the sleeve interface of the leak-proof isolation cover and at the filling port. After the first expandable annular seal and the second expandable annular seal are pressurized for a second time, the first expandable annular seal and the second expandable annular seal drive the corresponding vibration damping components to abut against the cylinder and the filling pipe respectively, so as to form vibration damping between the cylinder and the filling pipe, thereby effectively damping the connection between the filling pipe and the cylinder, so as to reduce the probability of leakage at the connection between the filling pipe and the cylinder.

[0019] 3) The vibration damping assembly of the present invention includes an annular vibration damping container fixed to a leak-proof isolation cover around the sleeve interface and the filling port. The annular vibration damping container is filled with corresponding vibration damping materials. Corresponding vibration transmission rods are oscillatingly mounted on the inner side of the vibration damping container. These vibration transmission rods abut against the lower side of the first expandable annular seal and the second expandable annular seal via corresponding driven abutment rods. After secondary pressurization of the first and second expandable annular seals, the inner ring portions of the first and second expandable annular seals respectively abut against the cylinder and the filling pipe in surface contact. The first and second expandable annular seals respectively push the driven abutment rods outward, thus fixing the vibration transmission rods against the cylinder and the filling pipe. This design achieves a complete seal at the connection between the cylinder and the filling pipe, while simultaneously providing a rigid connection between the driven abutment member and the cylinder and the filling pipe. This effectively and quickly transmits the vibration generated at the connection between the cylinder and the filling pipe to the vibration damping container, thereby effectively reducing the vibration at the connection between the filling pipe and the cylinder and significantly lowering the probability of leakage at the connection.

[0020] 4) Before secondary pressurization, the first and second expandable annular seals of this invention undergo a first pressurization to pre-contact the cylinder and filling pipe via line contact, thus initially achieving a sealed isolation space. This facilitates the replacement of external inert gas and ensures that the pressure inside the leak-proof isolation cover remains above atmospheric pressure after the inert gas replacement is complete. The pressure inside the leak-proof isolation cover is monitored using a pressure gauge. Once the pressure inside the leak-proof isolation cover is confirmed to be stable, meaning there are no leaks around the entire circumference of the first and second expandable annular seals, the first and second expandable annular seals undergo secondary pressurization and expansion. This ensures that the closed surfaces of the first and second expandable annular seals with the cylinder and filling pipe are uniformly fitted after the secondary pressurization, effectively enhancing the sealing effect of the isolation space.

[0021] 5) The filling process of the present invention can effectively form a small space isolation at the connection between the filling pipe and the cylinder without affecting the filling operation. At the same time as the isolation space is formed, it can effectively reduce vibration at the connection between the filling pipe and the cylinder. This can effectively improve the accuracy of leak detection and reduce the amount of inert gas replaced in the isolation space, and effectively reduce the probability of leakage at the connection between the filling pipe and the cylinder. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the structure of the present invention.

[0023] Figure 2 This is a diagram showing the usage status of the filling cabinet when the cabinet door is open.

[0024] Figure 3 A schematic diagram of the structure when the leakage prevention isolation cover is fitted onto the upper part of the steel cylinder.

[0025] Figure 4 A cross-sectional view of the gas cylinder with the leak-proof isolation cover fitted over it.

[0026] Figure 5 This is a schematic diagram of the assembly of the second expandable annular seal after one pressurization.

[0027] Figure 6 This is a schematic diagram of the assembly of the second expandable annular seal after secondary pressurization.

[0028] In the attached diagram: 1. Filling cabinet; 101. Cylinder placement area; 2. Leak-proof isolation cover; 201. Socket; 202. Filling port; 3. Filling pipe; 301. Filling valve; 4. Multifunctional cylinder sealing assembly; 401. First expandable annular seal; 402. First solenoid valve; 5. Cylinder; 6. Filling pipe sealing assembly; 601. Second expandable annular seal; 602. Second solenoid valve; 7. Vibration damping assembly; 701. Annular vibration damping container; 702. Vibration transmission rod; 703. Driven abutment rod; 704. Inert gas inlet pipe; 8. Gas outlet pipe; 9. Insertion groove; 10. Pressure gauge; 11. Drive cylinder; 12. Detailed Implementation

[0029] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the invention.

[0030] Example 1 refer to Figure 1-6 A phosphorus pentafluoride filling device, comprising: A filling cabinet 1 is provided, which has a cylinder placement area 101. The upper part of the cylinder placement area 101 is equipped with a leak-proof isolation cover 2 with a bottom sleeve interface 201. A corresponding filling port 202 is provided on one side of the leak-proof isolation cover 2. The filling cabinet 1 is provided with a filling pipe 3 connected to an external material source through a corresponding filling valve 301. The sleeve interface 201 is adapted to the valve of the corresponding cylinder 5 so that the leak-proof isolation cover 2 can be lowered and sleeved on the upper part of the cylinder 5. The multi-functional cylinder sealing assembly 4 includes a first expandable annular seal 401 disposed at the sleeve interface 201 of the leak-proof isolation cover 2. After the first expandable annular seal 401 is pressurized and expanded, its inner ring is sealed and abuts against the upper part of the corresponding cylinder 5 and adjusts the verticality of the cylinder 5. The filling tube sealing assembly 6 includes a second expandable annular seal 601 disposed at the filling port 202 of the leak-proof isolation cover 2. After the connector of the filling tube 3 is screwed to the inlet of the cylinder 5, the second expandable annular seal 601 is pressurized and expanded, and its inner ring is sealed against the filling tube 3.

[0031] Based on the filling cabinet 1, this invention further includes a leak-proof isolation cover 2 inside the filling cabinet 1. The sleeve interface 201 on the leak-proof isolation cover 2 is adapted to the valve of the corresponding steel cylinder 5 so that the leak-proof isolation cover 2 is fitted down onto the upper part of the steel cylinder 5. Then, the first expandable annular seal 401 of the multi-functional steel cylinder sealing assembly 4 is pressurized and expanded, so that its inner ring is sealed against the upper part of the corresponding steel cylinder 5 and the verticality of the steel cylinder 5 is adjusted to overcome the possibility that the steel cylinder 5 may not be able to be in a vertical position due to uneven bottom, thereby improving the placement stability of the steel cylinder 5 and facilitating the connection operation between the filling pipe 3 and the inlet of the steel cylinder 5. After the joint of the filling pipe 3 passes through the second expandable annular seal 601 and is tightened to the inlet of the steel cylinder 5, the second expandable annular seal 601 of the filling pipe sealing assembly 6 is pressurized and expanded, so that its inner ring is sealed against the filling pipe 3. Subsequently, simply opening the valve of cylinder 5 and the filling valve 301 allows for the filling of phosphorus pentafluoride cylinders. This effectively creates a small space at the connection between the filling pipe 3 and cylinder 5 without affecting the filling operation. In the event of a leak, the pressure change within the narrow isolation space will be more noticeable, thereby improving the accuracy of leak detection. Furthermore, the reduced isolation space also reduces the amount of inert gas replaced within it.

[0032] The filling device also includes a set of vibration damping components 7, which are respectively disposed at the sleeve interface 201 and the filling port 202 of the leak-proof isolation cover 2. After the first expandable annular seal 401 and the second expandable annular seal 601 are pressurized for a second time, the first expandable annular seal 401 and the second expandable annular seal 601 drive the vibration damping components 7 to abut against the steel cylinder 5 and the filling pipe 3 respectively.

[0033] Based on reducing the isolation space, the present invention further provides vibration damping components 7 at the sleeve interface 201 and filling port 202 of the leak-proof isolation cover 2. After the first expandable annular seal 401 and the second expandable annular seal 601 are pressurized for a second time, the first expandable annular seal 401 and the second expandable annular seal 601 drive the corresponding vibration damping components 7 to abut against the cylinder 5 and the filling pipe 3 respectively, so as to form vibration damping between the cylinder 5 and the filling pipe 3, thereby effectively damping the connection between the filling pipe 3 and the cylinder 5, so as to reduce the leakage probability at the connection between the filling pipe 3 and the cylinder 5.

[0034] The leak-proof isolation cover 2 is provided with a corresponding inert gas inlet pipe 8 and a gas outlet pipe 9. External inert gas is injected into the leak-proof isolation cover 2 through the inert gas inlet pipe 8 to replace the gas inside the leak-proof isolation cover 2, and the replaced gas is discharged through the gas outlet pipe 9.

[0035] The first expandable annular seal 401 and the second expandable annular seal 601 are hollow annular parts made of perfluoroether rubber. Perfluoroether rubber not only has sufficient elasticity but also can resist the corrosion of phosphorus pentafluoride, thereby effectively ensuring the practical effect of the present invention. The sleeve interface 201 and the filling port 202 of the leak-proof isolation cover 2 are respectively provided with corresponding insertion grooves 10. The first expandable annular seal 401 and the second expandable annular seal 601 are respectively sealed and embedded in the insertion grooves 10. The insertion of the insertion grooves 10 is used to embed the first expandable annular seal 401 and the second expandable annular seal 601, so as to effectively ensure the installation stability of the first expandable annular seal 401 and the second expandable annular seal 601.

[0036] The hollow portions of the first expandable annular seal 401 and the second expandable annular seal 601 are respectively connected in parallel to the external pneumatic control system via the corresponding first solenoid valve 402 and the second solenoid valve 602.

[0037] The vibration damping assembly 7 includes an annular vibration damping container 701 fixed to the leak-proof isolation cover 2 around the sleeve interface 201 and the filling port 202. The annular vibration damping container 701 is filled with corresponding vibration damping materials 702. Corresponding vibration transmission rods 703 are oscillatingly installed on the inner side of the vibration damping container 701. In this embodiment, the vibration transmission rods 703 are fixed to the leak-proof isolation cover 2 by corresponding connecting springs. The vibration transmission rods 703 are abutted against the lower side of the first expandable annular seal 401 and the second expandable annular seal 601 by corresponding driven abutment rods 704.

[0038] After the first expandable annular seal 401 and the second expandable annular seal 601 are pressurized and expanded once, the inner ring portions of the first expandable annular seal 401 and the second expandable annular seal 601 respectively make line contact with the steel cylinder 5 and the filling tube 3. After the first expandable annular seal 401 and the second expandable annular seal 601 are pressurized a second time, the inner ring portions of the first expandable annular seal 401 and the second expandable annular seal 601 respectively make surface contact with the steel cylinder 5 and the filling tube 3, and the first expandable annular seal 401 and the second expandable annular seal 601 respectively push the driven abutment rod 704 outward, so that the vibration transmission rod 703 is fixedly abutted against the steel cylinder 5 and the filling tube 3 respectively.

[0039] After the first expandable annular seal 401 and the second expandable annular seal 601 are pressurized for a second time, they can completely seal the connection between the cylinder 5 and the filling pipe 3, while effectively and rigidly connecting the driven abutment rod 704 to the cylinder 5 and the filling pipe 3. This effectively and quickly transmits the vibration generated at the connection between the cylinder 5 and the filling pipe 3 to the vibration damping container 701, thereby effectively damping the connection between the filling pipe 3 and the cylinder 5 and significantly reducing the probability of leakage at the connection between the filling pipe 3 and the cylinder 5.

[0040] The leak-proof isolation cover 2 is equipped with a pressure gauge 11 for detecting the pressure inside the leak-proof isolation cover 2. The leak-proof isolation cover 2 is driven to rise and fall by a drive cylinder 12 installed on the upper part of the filling cabinet 1.

[0041] Before secondary pressurization, the first expandable annular seal 401 and the second expandable annular seal 601 of the present invention are first pressurized to pre-contact the cylinder 5 and the filling pipe 3 via line contact, thus initially achieving the sealing of the isolation space. This facilitates the replacement of external inert gas and ensures that the air pressure inside the leak-proof isolation cover 2 is greater than atmospheric pressure after the inert gas replacement is completed. The air pressure value inside the leak-proof isolation cover 2 is detected by pressure gauge 11. Once it is detected that the air pressure value inside the leak-proof isolation cover 2 does not decrease, that is, when there is no leakage point in the entire sealing area of ​​the first expandable annular seal 401 and the second expandable annular seal 601, the first expandable annular seal 401 and the second expandable annular seal 601 are respectively controlled to undergo secondary pressurization and expansion. This ensures that the closed surfaces of the first expandable annular seal 401 and the second expandable annular seal 601 with the cylinder 5 and the filling pipe 3 are in a uniform fit after the subsequent secondary pressurization, thereby effectively improving the sealing effect of the isolation space of the present invention.

[0042] Example 2 A method for filling phosphorus pentafluoride, based on the phosphorus pentafluoride filling device described in Embodiment 1 above, includes the following specific steps: S1, move the cylinder 5 to the cylinder placement area 101 of the filling cabinet 1; S2, the leak-proof isolation cover 2 is activated and moves downward to the upper end of the cylinder 5; S3, the first expandable annular seal 401 of the multifunctional cylinder sealing assembly 4 is pressurized and expanded, so that its inner ring is sealed and abuts against the upper part of the corresponding cylinder 5, and the verticality of the cylinder 5 is adjusted. S4, manually pass the connector of the filling tube 3 through the second expandable annular seal 601 and tighten it to the inlet of the cylinder 5. Then, the second expandable annular seal 601 of the filling tube sealing assembly 6 is pressurized and expanded, so that its inner ring is sealed and abuts against the filling tube 3. S5, external inert gas is injected into the leak-proof isolation cover 2 to replace the gas inside the leak-proof isolation cover 2; S6, after the inert gas replacement is completed, the air pressure inside the leak-proof isolation cover 2 is kept greater than the atmospheric pressure, and the air pressure value inside the leak-proof isolation cover 2 is detected by pressure gauge 11. After it is detected that the air pressure value inside the leak-proof isolation cover 2 does not decrease, the first expandable annular seal 401 and the second expandable annular seal 601 are respectively subjected to secondary pressurization and expansion. S7, the valve of the steel cylinder 5 is opened, and then the filling valve 301 is opened, and the material enters the steel cylinder 5 through the filling pipe 3 for filling operation; S8, when the filling amount reaches the set value, the valve of the steel cylinder 5 is closed, and after the material in the filling pipe 3 is returned and emptied, the filling valve 301 is closed; S9, the second expandable annular seal 601 is depressurized, the connector of the filling pipe 3 is manually disassembled, then the first expandable annular seal 401 is depressurized, the leak-proof isolation cover 2 is reset, and the steel cylinder filled with phosphorus pentafluoride is unloaded, and the filling is completed.

[0043] The filling process of this invention can effectively create a small space isolation at the connection between the filling pipe 3 and the cylinder 5 without affecting the filling operation. At the same time as the isolation space is formed, it can effectively reduce vibration at the connection between the filling pipe 3 and the cylinder 5. This can effectively improve the accuracy of leak detection and reduce the amount of inert gas replaced in the isolation space, and effectively reduce the probability of leakage at the connection between the filling pipe 3 and the cylinder 5.

[0044] The above are merely preferred embodiments of the present invention and are not intended to limit the present invention in any other way. Any person skilled in the art may make changes or modifications to the above-disclosed technical content to create equivalent embodiments that can be applied to other fields. However, any simple modifications, equivalent changes, and modifications made to the above embodiments based on the technical essence of the present invention without departing from the scope of the present invention shall still fall within the protection scope of the present invention.

Claims

1. A phosphorus pentafluoride filling device, characterized in that, include: A filling cabinet (1) is provided with a cylinder placement area (101) inside the filling cabinet (1). The upper part of the cylinder placement area (101) is provided with a leak-proof isolation cover (2) with a sleeve interface (201) at the bottom. A corresponding filling port (202) is provided on one side of the leak-proof isolation cover (2). A filling pipe (3) is provided inside the filling cabinet (1) and connected to an external material source through a corresponding filling valve (301). The sleeve interface (201) is adapted to the valve of the corresponding cylinder (5) so that the leak-proof isolation cover (2) can be lowered and sleeved on the upper part of the cylinder (5). The multi-functional cylinder sealing assembly (4) includes a first expandable annular seal (401) disposed at the sleeve interface (201) of the leak-proof isolation cover (2). After the first expandable annular seal (401) is pressurized and expanded, its inner ring is sealed against the upper part of the corresponding cylinder (5) and the verticality of the cylinder (5) is adjusted. The filling tube sealing assembly (6) includes a second expandable annular seal (601) disposed at the filling port (202) of the leak-proof isolation cover (2). After the connector of the filling tube (3) is screwed to the inlet of the cylinder (5), the second expandable annular seal (601) is pressurized and expanded, and its inner ring is sealed against the filling tube (3).

2. The phosphorus pentafluoride filling device according to claim 1, characterized in that, The filling device also includes a set of vibration damping components (7). The set of vibration damping components (7) are respectively disposed at the sleeve interface (201) and the filling port (202) of the leak-proof isolation cover (2). After the first expandable annular seal (401) and the second expandable annular seal (601) are pressurized for a second time, the first expandable annular seal (401) and the second expandable annular seal (601) drive the vibration damping components (7) to abut against the steel cylinder (5) and the filling pipe (3) respectively.

3. A phosphorus pentafluoride filling device according to claim 1 or 2, characterized in that, The leak-proof isolation cover (2) is provided with a corresponding inert gas inlet pipe (8) and a gas outlet pipe (9). The inert gas inlet pipe (8) is used to inject external inert gas into the leak-proof isolation cover (2) to replace the gas inside the leak-proof isolation cover (2) and the replaced gas is discharged through the gas outlet pipe (9).

4. The phosphorus pentafluoride filling device according to claim 1, characterized in that, The first expandable annular seal (401) and the second expandable annular seal (601) are hollow annular parts made of perfluoroether rubber. The sleeve interface (201) and filling port (202) of the leak-proof isolation cover (2) are respectively provided with corresponding insertion grooves (10). The first expandable annular seal (401) and the second expandable annular seal (601) are respectively sealed and embedded in the insertion grooves (10).

5. A phosphorus pentafluoride filling device according to claim 4, characterized in that, The hollow parts of the first expandable annular seal (401) and the second expandable annular seal (601) are respectively connected in parallel to the external pneumatic control system through the corresponding first solenoid valve (402) and the second solenoid valve (602).

6. A phosphorus pentafluoride filling device according to claim 2, characterized in that, The vibration damping assembly (7) includes an annular vibration damping container (701) fixed to the leak-proof isolation cover (2) around the sleeve (201) and filling port (202). The annular vibration damping container (701) is filled with corresponding vibration damping material (702). The inner side of the vibration damping container (701) is swayably installed with corresponding vibration transmission rods (703). The vibration transmission rods (703) are respectively connected to the lower side of the first expandable annular seal (401) and the second expandable annular seal (601) through corresponding driven abutment rods (704).

7. A phosphorus pentafluoride filling device according to claim 6, characterized in that, After the first expandable annular seal (401) and the second expandable annular seal (601) are pressurized and expanded once, the inner ring parts of the first expandable annular seal (401) and the second expandable annular seal (601) respectively make line contact with the steel cylinder (5) and the filling tube (3); after the first expandable annular seal (401) and the second expandable annular seal (601) are pressurized a second time, the inner ring parts of the first expandable annular seal (401) and the second expandable annular seal (601) respectively make surface contact with the steel cylinder (5) and the filling tube (3), and the first expandable annular seal (401) and the second expandable annular seal (601) respectively push the driven abutment rod (704) outward, so that the vibration transmission rod (703) is fixedly abutted against the steel cylinder (5) and the filling tube (3).

8. A phosphorus pentafluoride filling device according to claim 1, characterized in that, The leak-proof isolation cover (2) is equipped with a pressure gauge (11) for detecting the pressure inside the leak-proof isolation cover (2).

9. A phosphorus pentafluoride filling device according to claim 1, characterized in that, The leak-proof isolation cover (2) is driven to rise and fall by a drive cylinder (12) installed on the upper part of the filling cabinet (1).

10. A method for filling phosphorus pentafluoride, based on the phosphorus pentafluoride filling apparatus according to any one of claims 1-9, characterized in that, It includes the following specific steps: S1, the cylinder (5) is moved to the cylinder placement area (101) of the filling cabinet (1). S2, the leak-proof isolation cover (2) is activated and moves downward to the upper end of the cylinder (5); S3, the first expandable annular seal (401) of the multifunctional cylinder sealing assembly (4) is pressurized and expanded, so that its inner ring is sealed and abuts against the upper part of the corresponding cylinder (5), and the verticality of the cylinder (5) is adjusted. S4, manually pass the connector of the filling tube (3) through the second expandable annular seal (601) and tighten it to the inlet of the cylinder (5). Then the second expandable annular seal (601) of the filling tube sealing assembly (6) is pressurized and expanded to seal its inner ring against the filling tube (3). S5, external inert gas is injected into the leak-proof isolation cover (2) to replace the gas inside the leak-proof isolation cover (2); S6, after the inert gas replacement is completed, the air pressure inside the leak-proof isolation cover (2) is kept greater than the normal pressure, and the air pressure value inside the leak-proof isolation cover (2) is detected by pressure gauge (11). After the air pressure value inside the leak-proof isolation cover (2) is detected to be no decrease, the first expandable annular seal (401) and the second expandable annular seal (601) are respectively subjected to secondary pressurization and expansion. S7, the valve of the steel cylinder (5) is opened, and then the filling valve (301) is opened, and the material enters the steel cylinder (5) through the filling pipe (3) for filling operation; S8, when the filling amount reaches the set value, the valve of the steel cylinder (5) is closed, and after the material in the filling pipe (3) is returned and emptied, the filling valve (301) is closed; S9, the second expandable annular seal (601) is depressurized, the connector of the filling tube (3) is manually disassembled, then the first expandable annular seal (401) is depressurized, the leak-proof isolation cover (2) is reset, and the steel cylinder filled with phosphorus pentafluoride is unloaded, and the filling is completed.

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