An integrated metering valve block apparatus for semiconductor production

Abstract

This invention provides an integrated metering valve assembly for semiconductor production, comprising a stainless steel tube, a support device, an external threaded connector, a quick-connect fitting, a metering valve, and a ball valve. The valve stem of the metering valve is connected to the valve head via a dual-structure transmission assembly consisting of a U-groove, balls, an I-shaped fixing component, and a bearing. The bearing is fixed to the inner wall of the U-groove, and the balls and bearing work together to ensure stable retraction of the valve stem. The metering valve has a dual flow indication structure consisting of a small dial and a large dial, and a locking screw for locking the valve stem after flow setting. The ball valve seat is made of soluble polytetrafluoroethylene in one piece, with a retaining ring and a sealing ring installed on the inner wall of the side hole. This invention achieves factory prefabrication and rapid on-site installation through integrated modular design, shortening the construction period, reducing labor costs, reducing pipeline connection points, and significantly reducing the risk of leakage.

Description

Technical Field

[0001] This invention relates to the field of gas supply systems for semiconductor production, specifically an integrated metering valve assembly device for semiconductor production. Background Technology

[0002] The semiconductor industry is developing rapidly, and the upgrading and replacement of precision semiconductor manufacturing equipment is happening at an increasingly faster pace, leading to a surge in the installation and modification of such equipment. For semiconductor factories, especially chip manufacturing plants, the construction cycle is a critical factor, often determining whether a product will succeed in the market.

[0003] In the process of chip production, the gas supply system plays a crucial role. Currently, all valve groups of the gas supply system in semiconductor factories are installed on-site, which makes it difficult to control the schedule, has a long installation and deployment cycle, and on-site construction occupies a large proportion of the overall project time. In addition, there are many pipeline connection points, which pose a great risk of leakage.

[0004] In addition, the metering valves used in existing semiconductor gas supply systems mostly adopt a simple "ball + groove" structure for their valve stem transmission mechanism. During long-term use, problems such as unstable valve stem retraction, insufficient repeatability, and easy wear of the sealing surface occur, which affect the accuracy of gas flow control and the service life of the valve.

[0005] Furthermore, existing ball valves in gas supply valve assemblies also have shortcomings. Traditional ball valves rely on system pressure for seat sealing, and their split-type seat structure results in assembly gaps and insufficient sealing reliability. The valve stem uses a packing seal, which is prone to friction and wear during reciprocating rotation, causing gas leakage and contaminating high-purity gas with particulate matter. Simultaneously, the high torque required for opening and closing ball valves can cause valve core displacement, leading to packing seal deformation and increased leakage risk. These issues make it difficult to meet the stringent requirements of ultra-cleanliness and high sealing performance in semiconductor processes. Summary of the Invention

[0006] The purpose of this invention is to provide an integrated metering valve assembly device for semiconductor production, in order to solve the problems existing in the aforementioned background art.

[0007] The technical solution of this invention is implemented as follows: An integrated metering valve assembly for semiconductor production includes a stainless steel tube and a metering valve. A support device is fitted on the outside of the stainless steel tube. One end of the stainless steel tube is connected to an external threaded connector, which is connected to a quick-connect fitting. The other end of the stainless steel tube is connected to the metering valve, which is also connected to a ball valve.

[0008] The metering valve includes an adjusting handle, a valve body A, a valve stem, and a housing. A small dial is mounted on the bottom of the adjusting handle, with horizontal graduation lines engraved on the outer bottom of the dial. The valve body A has a slot at its top and an internal cavity. A vertical cavity is connected to the bottom of the internal cavity, with an oblique hole connected to the left side of the vertical cavity and a straight hole connected to one side of the bottom of the internal cavity. External threaded ports A are mounted on both sides of the valve body A, and internal threaded connectors A are connected to external threaded ports A. A communicating pipe A is located inside both external threaded ports A and internal threaded connectors A. The oblique hole and the straight hole are connected to pipe A.

[0009] The valve stem is installed inside the housing. The top of the housing can extend into the adjusting handle. The bottom of the housing is movably connected to a base plate. The top and bottom outer sides of the housing are respectively provided with internal threads and external threads B. The valve stem includes an insert A. The insert A is inserted into the adjusting handle and locked in place by a fixing screw A. The bottom of the insert A is connected to an external thread post. The external thread post is connected to the internal thread on the top of the housing. A large scale is fixedly installed on the top outer side of the housing by a fixing screw B. The large scale has vertical graduation lines engraved on it.

[0010] The bottom of the externally threaded column is equipped with a U-shaped groove containing ball bearings. The bottom of each ball bearing is connected to an I-shaped fastener, which is fitted with a bearing. The bearing is fixed to the inner wall of the U-shaped groove. A support column is installed at the bottom of the I-shaped fastener, and a cover plate A is vertically connected to the bottom of the support column. A metal bellows is installed between the bottom of cover plate A and the base plate. A piston is vertically installed in the center of the bottom of the base plate, and a valve head is vertically bolted to the bottom of the piston. The base plate can move up and down within the groove. The piston is installed in a cavity, and the valve head is installed in a vertical cavity. Sealing gaskets are fitted at the bottom of the groove, below the base plate, and on the outside of the piston. The valve body A is fixed to the outer shell via a valve body nut.

[0011] A locking screw is installed below the external threaded post and inside the housing, which is used to lock the valve stem after the flow rate is set.

[0012] The ball valve includes a handle, a top bolt, a spherical valve stem, and a valve body B. The top bolt is embedded in the handle and fixed by a fixing screw C. The spherical valve stem includes a main rod and an insert B, with the insert B passing through the top bolt and inserted into the handle. A ball is mounted at the bottom of the main rod, and identical trunnions are installed between the bottom and top of the ball and the main rod. A base is mounted at the bottom of the trunnions below the ball. A valve seat is installed inside the valve body B, with side holes on both sides and a bottom hole at the bottom. The ball and trunnions are installed inside the valve seat, and the base passes through the bottom hole and connects to the valve body B. A horizontal through hole is formed inside the ball. A cover plate B is mounted on the top of the valve seat, and a leaf spring is installed between the cover plate B and the top bolt. A retaining ring is installed on the inner wall of the side hole of the valve seat, and a sealing ring is installed on the inner wall of the retaining ring; external threaded ports B are installed on both sides of the valve body B, and internal threaded connectors B are installed on the external threaded ports B; a pipe B is provided between the external threaded ports B and the valve body B; the through hole, side hole, and pipe B are on the same horizontal line, and the side hole and pipe B can penetrate the through hole.

[0013] Furthermore, the support device includes an upper support body and a lower support body, with a stainless steel pipe sandwiched between the upper and lower support bodies. The top of the upper support body is also provided with a cover plate, and the support device is fixed by bolts.

[0014] Furthermore, both the upper support and the lower support are polypropylene supports.

[0015] Furthermore, the cover plate is a stainless steel cover plate.

[0016] Furthermore, the ball valve is a straight-through ball valve.

[0017] Furthermore, a locking nut A is fitted on the outer side of the external thread B at the bottom of the housing, which can be used to lock and fix it to the connecting panel.

[0018] Furthermore, a locking nut B is fitted on the outside of the top bolt, which can be used to lock and fix it to the connecting panel.

[0019] The beneficial effects of this invention are as follows: This invention utilizes an integrated modular design to transfer on-site construction to the factory-manufacturing of integrated valve assemblies. During installation, these assemblies connect to the main pipeline and process equipment via connectors, enabling rapid and convenient installation and shortening the construction period. The factory assembly line operation reduces labor costs. Furthermore, by retaining only two interfaces, it minimizes on-site pipeline installation points, providing better error prevention and significantly reducing the rate of human installation mistakes, thereby greatly reducing the risk of pipeline leaks. The support device of this invention is made of polypropylene, offering good applicability and excellent resistance to impact and vibration.

[0020] The transmission mechanism of the metering valve of this invention adopts a dual-structure design of "ball bearing + bearing". The ball bearing is responsible for converting rotational motion into linear motion, while the bearing constrains the radial displacement of the I-shaped fixing component, ensuring it moves only axially. The synergistic effect of the ball bearing and bearing significantly improves the axial alignment and repeatability of the valve stem during retraction, guaranteeing stable retraction of the spherical valve stem. Simultaneously, the dual structure ensures the vertical alignment of the valve head and the vertical cavity sealing surface, avoiding the uneven wear of the sealing surface caused by radial offset in a single ball bearing structure, effectively extending the sealing life. The valve head is bolted to the piston and can be replaced at any time, offering good versatility.

[0021] This invention features a dual flow indication structure consisting of a small dial with horizontal graduations and a large dial with vertical graduations. The horizontal graduations on the small dial indicate the rotation angle of the adjustment handle, while the vertical graduations on the large dial indicate the axial displacement of the valve stem. Together, they allow the operator to simultaneously read both the rotation and displacement, achieving precise dual control of the flow rate. The locking screw locks the valve stem after the flow rate is set, preventing the set value from drifting and ensuring long-term stability of the flow control.

[0022] The valve seat of the ball valve of this invention is made of soluble polytetrafluoroethylene in one piece, which does not require system pressure for sealing and reduces potential leakage points; the ball body is provided with symmetrical trunnions at the top and bottom, which reduces the possibility of packing extrusion, reduces the packing volume, and minimizes the thermal effect; the cooperation between the retaining ring and the sealing ring further improves the sealing reliability of the valve seat. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of the structure of the present invention.

[0024] Figure 2 This is a schematic diagram of the ball valve of the present invention.

[0025] Figure 3 This is a schematic diagram of the structure of the ball valve seat of the present invention.

[0026] Figure 4 This is a schematic diagram of the metering valve of the present invention.

[0027] In the diagram: 1-Stainless steel pipe, 2-Support device, 201-Upper support body, 202-Lower support body, 203-Cover plate, 204-Bolt, 3-External threaded connector, 4-Quick coupling for compression fitting, 5-Metering valve, 501-Adjusting handle, 5011-Small dial, 5012-Horizontal scale line, 502-Valve body A, 5021-Slotted, 5022-Cavity, 5023-Vertical cavity, 5024-Angled hole, 5025-Straight hole 5026 - External thread port A, 5027 - Pipe A, 5028 - External thread A, 503 - Valve stem, 5031 - Insert A, 5032 - External thread post, 5033 - U-groove, 504 - Housing, 5041 - Internal thread, 5042 - External thread B, 505 - Large dial, 5051 - Vertical scale line, 506 - Ball bearing, 507 - I-beam fastener, 508 - Bearing, 509 - Support post, 510 - Cover plate A, 511- Metal bellows, 512- Base plate, 513- Piston, 514- Valve head, 515- Sealing gasket, 516- Internal threaded connector A, 517- Locking nut A, 518- Valve body nut, 519- Fixing screw A, 520- Fixing screw B, 521- Locking screw, 6- Ball valve, 601- Handle, 602- Top bolt, 603- Ball valve stem, 6031- Main stem, 6032- Insert B, 6033-Spherical body, 6034-Truncate, 6035-Base, 6036-Through hole, 604-Valve body B, 6041-Valve seat, 60411-Side hole, 60412-Bottom hole, 6042-External threaded port B, 6043-Pipe B, 605-Cover plate B, 606-Leaf spring, 607-Snap ring, 608-Sealing ring, 609-Locking nut B, 610-Internal threaded connector B, 611-Fixing screw C. Detailed Implementation

[0028] The technical solution of the present invention will be clearly and completely described below with reference to the embodiments. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present invention.

[0029] like Figure 1-4 As shown, an integrated metering valve assembly for semiconductor production includes a stainless steel tube 1 and a metering valve 5. A support device 2 is fitted on the outside of the stainless steel tube 1. One end of the stainless steel tube 1 is connected to an external threaded connector 3, which is connected to a quick-connect fitting 4. The other end of the stainless steel tube 1 is connected to the metering valve 5, which is also connected to a ball valve 6.

[0030] The support device 2 includes an upper support body 201 and a lower support body 202. A stainless steel pipe 1 is sandwiched between the upper support body 201 and the lower support body 202. The top of the upper support body 201 is also provided with a cover plate 203. The support device 2 is fixed by bolts 204. The upper support body 201 and the lower support body 202 are both polypropylene supports, and the cover plate 203 is a stainless steel cover plate.

[0031] The metering valve 5 includes an adjusting handle 501, a valve body A502, a valve stem 503, and a housing 504. A small scale 5011 is installed at the bottom of the adjusting handle 501, and a horizontal scale line 5012 is engraved on the outer side of the bottom of the small scale 5011. A slot 5021 is opened at the top of the valve body A502, and a cavity 5022 is provided inside the valve body A502. A vertical cavity 5023 is connected to the bottom of the cavity 5022. An oblique hole 5024 is connected to the left side of the vertical cavity 5023, and a straight hole 5025 is connected to one side of the bottom of the cavity 5022. External threaded ports A5026 are installed on both sides of the valve body A502, and internal threaded connectors A516 are connected to the external threaded ports A5026 and the internal threaded connectors A516. A communicating pipe A5027 is provided inside the external threaded ports A5026 and the internal threaded connectors A516. The oblique hole 5024 and the straight hole 5025 are respectively connected to the pipe A5027.

[0032] The valve stem 503 is installed inside the housing 504. The top of the housing 504 can extend into the adjusting handle 501. The bottom of the housing 504 is movably connected to a base plate 512. The top and bottom outer sides of the housing 504 are respectively provided with internal threads 5041 and external threads B5042. The valve stem 503 includes an insert A5031, which is inserted into the adjusting handle 501 and locked in place by a fixing screw A519. The bottom of the insert A5031 is connected to an external thread post 5032, which is connected to the internal thread 5041 at the top of the housing 504. A large scale 505 is fixedly installed on the top outer side of the housing 504 by a fixing screw B520. The large scale 505 has vertical scale lines 5051 engraved on it.

[0033] The bottom of the externally threaded post 5032 is equipped with a U-shaped groove 5033, and a ball bearing 506 is installed inside the U-shaped groove 5033. The bottom of the ball bearing 506 is contact-connected to an I-shaped fastener 507, and a bearing 508 is installed on the I-shaped fastener 507. The bearing 508 is connected and fixed to the inner wall of the U-shaped groove 5033. A support post 509 is installed at the bottom of the I-shaped fastener 507, and a cover plate A510 is vertically connected to the bottom of the support post 509. A metal corrugated plate is installed between the bottom of the cover plate A510 and the base plate 512. The base plate 512 has a piston 513 vertically mounted in the middle of its bottom, and a valve head 514 is vertically bolted to the bottom of the piston 513. The base plate 512 can move up and down within the slot 5021. The piston 513 is installed in the cavity 5022, and the valve head 514 is installed in the vertical cavity 5023. A sealing gasket 515 is fitted at the bottom of the slot 5021, below the base plate 512, and outside the piston 513. The valve body A502 is connected and fixed to the outer shell 504 by a valve body nut 518.

[0034] A locking screw 521 is installed below the external threaded post 5032 and inside the housing 504, which is used to lock the valve stem 503 after the flow rate is set.

[0035] A locking nut A517 is fitted on the outer side of the external thread B5042 at the bottom of the housing 504, which can be used to lock and fix it to the connecting panel.

[0036] The ball valve 6 includes a handle 601, a top bolt 602, a ball valve stem 603, and a valve body B604. The top bolt 602 is embedded in the handle 601 and fixed by a fixing screw C611. A locking nut B609 is fitted on the outside of the top bolt 602 for locking and fixing to the connecting panel. The ball valve stem 603 includes a main rod 6031 and an insert B6032. The insert B6032 passes through the top bolt 602 and is inserted into the handle 601. A ball 6033 is mounted at the bottom of valve body 6031. A trunnion 6034 is installed between the bottom and top of the ball 6033 and the main rod 6031. A base 6035 is mounted at the bottom of the trunnion 6034 below the ball 6033. A valve seat 6041 is installed inside the valve body B604. Side holes 60411 are formed on both sides of the valve seat 6041, and a bottom hole 60412 is formed at the bottom of the valve seat 6041. The ball 6033 and the trunnion 6034 are installed... Inside the valve seat 6041, the base 6035 passes through the bottom hole 60412 and connects to the valve body B604; a through hole 6036 is horizontally opened inside the ball 6033; a cover plate B605 is installed on the top of the valve seat 6041, and a leaf spring 606 is installed between the cover plate B605 and the top bolt 602; a retaining ring 607 is installed on the inner wall of the side hole 60411 of the valve seat 6041, and a sealing ring 608 is installed on the inner wall of the retaining ring 607; and the valve body B604 is equipped with... The valve has an external threaded port B6042, on which an internal threaded connector B610 is installed. A pipe B6043 is provided between the external threaded port B6042 and the valve body B604. The through hole 6036, the side hole 60411, and the pipe B6043 are on the same horizontal line. The side hole 60411 and the pipe B6043 can pass through the through hole 6036. The ball valve 6 is a straight-through ball valve. The valve seat 6041 is made of soluble polytetrafluoroethylene in one piece.

[0037] The working principle of this invention is as follows: Rotating the adjusting handle 501 causes the valve stem 503 to rotate. The U-shaped groove 5033 at the bottom of the valve stem 503 transmits the rotational motion to the I-shaped fixing member 507 via the ball bearing 506. At the same time, the bearing 508 constrains the radial displacement of the I-shaped fixing member 507, ensuring that it moves only along the axial direction. The ball bearing 506 and the bearing 508 work together to make the I-shaped fixing member 507 and the connected support column 509, cover plate A510, base plate 512, piston 513 and valve head 514 move along the axial direction. The valve stem moves towards a stable position, thereby changing the opening between the valve head 514 and the vertical cavity 5023, and precisely adjusting the flow rate of the medium flowing through the inclined hole 5024 and the straight hole 5025. The horizontal scale line 5012 of the small scale 5011 indicates the rotation angle of the adjusting handle 501, and the vertical scale line 5051 of the large scale 505 indicates the axial displacement of the valve stem 503. The two work together to achieve dual precise flow indication. After the flow rate is set, the valve stem 503 is locked by the locking screw 521 to prevent the set value from drifting.

[0038] The ball valve 6 rotates the ball valve stem 603 and the ball 6033 by rotating the handle 601, so that the through hole 6036 is aligned or staggered with the valve seat 6041 and the pipe B6043, thereby realizing the rapid on / off control of the flow channel; the valve seat 6041 is made of soluble polytetrafluoroethylene in one piece, and works with the retaining ring 607 and the sealing ring 608 to achieve reliable sealing.

[0039] The metal bellows 511 and the sealing gasket 515 provide a dynamic elastic seal during the movement of the base plate 512, ensuring that the medium does not leak.

[0040] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. An integrated metering valve group apparatus for semiconductor production, comprising a stainless steel pipe and a metering valve, characterized by, The stainless steel pipe is fitted with a support device on the outside. One end of the stainless steel pipe is connected to an external threaded joint, which is connected to a quick-connect fitting. The other end of the stainless steel pipe is connected to a metering valve, which is also connected to a ball valve. The metering valve includes an adjusting handle, a valve body A, a valve stem, and a housing. A small scale is installed at the bottom of the adjusting handle, and horizontal scale lines are engraved on the outer side of the bottom of the small scale. A large scale is fixedly installed on the outer side of the top of the housing, and vertical scale lines are engraved on the large scale. The valve stem includes an insert A, which is inserted into and fixed inside the adjusting handle. The bottom of the insert A is connected to an external threaded post, and a U-shaped groove is installed at the bottom of the external threaded post. A ball is installed in the U-shaped groove, and an I-shaped fixing component is contacted at the bottom of the ball. A bearing is installed on the I-shaped fixing component, and the bearing is connected and fixed to the inner wall of the U-shaped groove. A support column is installed at the bottom of the I-shaped fixing component, and a cover plate A is vertically connected to the bottom of the support column. A metal bellows is installed between the bottom of the cover plate A and the bottom plate. A piston is vertically installed in the middle of the bottom of the bottom plate, and a valve head is vertically bolted to the bottom of the piston. The valve body A has a slot at the top, the bottom plate can move up and down in the slot, and a sealing gasket is fitted at the bottom of the slot and under the bottom plate. A locking screw is installed below the external threaded post and inside the housing. The locking screw is configured to lock the valve stem after the flow rate is set. The ball valve includes a handle, a spherical valve stem, and a valve body B. A ball is installed at the bottom of the spherical valve stem, and a through hole is horizontally opened in the ball. A valve seat is installed inside the valve body B. The valve seat is made of soluble polytetrafluoroethylene in one piece. A retaining ring is installed on the inner wall of the side hole of the valve seat, and a sealing ring is installed on the inner wall of the retaining ring.

2. An integrated metering valve block apparatus for semiconductor production according to claim 1, wherein, The support device includes an upper support body and a lower support body, with a stainless steel pipe sandwiched between the upper and lower support bodies. The top of the upper support body is also provided with a cover plate, and the support device is fixed by bolts.

3. An integrated metering valve block apparatus for semiconductor production as defined in claim 2, wherein Both the upper and lower supports are polypropylene supports.

4. An integrated metering valve block apparatus for semiconductor production as defined in claim 2, wherein The cover plate is made of stainless steel.

5. The integrated metering valve block apparatus for semiconductor production according to Claim 1, wherein The ball valve is a straight-through type ball valve.

6. An integrated metering valve block apparatus for semiconductor production as defined in claim 1, wherein A locking nut A is fitted on the outer side of the external thread B at the bottom of the housing for locking and fixing it to the connecting panel.

7. An integrated metering valve block apparatus for semiconductor production as defined in claim 1, wherein A locking nut B is fitted on the outside of the top bolt for locking and fixing it to the connecting panel.

8. The integrated metering valve block apparatus for semiconductor production according to Claim 1, wherein, An internal threaded connector B is installed on the external threaded port B.

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