Novel vapor chamber and manufacturing method thereof, vapor chamber structure

Abstract

This invention discloses a novel heat spreader, its manufacturing method, and its structure. The manufacturing method includes: providing a cover plate and a base plate; the cover plate is assembled on the base plate to form a cavity along its length, the inner wall of which is made of copper; providing a capillary wick structure made of copper and extending the capillary wick structure along its length into the cavity to obtain the heat spreader structure; wherein, the cover plate assembled on the base plate also forms a first exhaust assembly and a second exhaust assembly arranged opposite each other along the length and respectively connected to the cavity; the heat spreader structure is sequentially subjected to brazing, oxidation, reduction, liquid injection, and degassing treatments to obtain the novel heat spreader. This heat spreader structure constructs a bidirectional exhaust channel through the dual exhaust port structure design of the first and second exhaust wicks, shortening the maximum gas transmission distance by half, which benefits the brazing, oxidation, reduction, and degassing processes during the manufacturing of the copper heat spreader, ensuring the final performance of the novel heat spreader.

Description

Technical Field

[0001] This invention relates to the field of heat dissipation technology, and in particular to a novel heat exchanger plate, its manufacturing method, and its structure. Background Technology

[0002] A vapor chamber (VC), also known as a heat-conducting plate or vacuum chamber heat exchanger, is a highly efficient phase-change heat transfer element that combines heat conduction and heat diffusion. The VC's enclosed cavity contains a capillary structure. The capillary force of this structure drives the reflux of the liquid working fluid within the cavity, achieving rapid evaporation and condensation cycles, thus achieving rapid temperature uniformity. VCs are typically made of copper (e.g., copper capillary structure, copper inner cavity wall, etc.), offering advantages such as low thermal resistance, good temperature uniformity, and light weight. They are widely used in the heat dissipation systems of electronic devices such as smartphones, laptops, and servers. Their core performance depends on the capillary force of the internal capillary structure and the vacuum level within the cavity.

[0003] For heat exchange plates with large areas or long lengths, traditional manufacturing methods face the following technical bottlenecks:

[0004] 1. Contamination exists in the brazing process: Usually, only a single vent (also serving as a water inlet) is set at one end of the length of the heat spreader. During the brazing sealing process, the organic gases volatilized from the welding material have too long a path and are difficult to be effectively discharged from the far end area away from the vent. This results in the volatiles remaining on the surface of the capillary core structure, forming an oil film or impurities, which significantly reduces capillary wettability and capillary force.

[0005] 2. Uneven oxidation at high temperature: In order to improve the roughness of the capillary wick structure and the inner wall of the cavity to enhance capillary force, a high-temperature and intense oxidation process is often used. In a single exhaust port structure, the internal air circulation is poor. If the temperature is set too low, the oxidation degree in the far-end area away from the exhaust port will be insufficient. If the temperature is set too high, although it can ensure sufficient oxidation in the far-end area, the capillary wick structure or cavity in the near-end area close to the exhaust port will be damaged due to excessive oxidation or high temperature.

[0006] 3. Dead zones in the reduction process: The oxidized capillary structure and the inner wall of the cavity need to be reduced in a nitrogen-hydrogen mixed atmosphere. The traditional single exhaust port structure causes the flow rate of the reducing gas to decrease during long-distance transmission. The gas flow in the far-end area far from the exhaust port stagnates, resulting in incomplete reduction of the capillary structure and the inner wall of the cavity in the far-end area, which affects the final performance of VC.

[0007] 4. Physical bottlenecks in vacuum improvement: Traditional single-exhaust-port structures are limited by the conductance of the degassing pipe and the length of the evacuation path. During the degassing stage of the heat spreader, the mean free path of gas molecules moving from the far end of the cavity away from the exhaust port to the exhaust port is long, resulting in high flow resistance. Especially when processing heat spreaders with large areas, a single evacuation process is difficult to completely remove trace amounts of NCG (Non-Condensable Gas), such as hydrogen and nitrogen, hidden deep in the micropores of the capillary structure and dead corners of the cavity in a short time. Due to the conductance limitation, there is a physical upper limit to the amount of NCG removed in a single degassing, which often requires multiple heating-cooling cycles or extended evacuation time. This not only reduces production efficiency but also increases the risk of welding failure.

[0008] The present invention solves at least one of the above problems. Summary of the Invention

[0009] The purpose of this invention is to solve at least one of the above-mentioned problems by providing a novel vapor chamber and its manufacturing method. Compared with traditional vapor chambers with a single exhaust port structure, the novel vapor chamber manufactured by this method can effectively expel the organic gases volatilized from the solder during the brazing stage, maintaining capillary wettability and capillary force throughout the entire length of the capillary wick structure; it can ensure the degree of oxidation of the surface of the capillary wick structure and the inner wall of the cavity throughout the entire length of the oxidation process at a set temperature, and achieve uniform coarsening, thereby enhancing capillary force; it can ensure a more thorough reduction of the oxide layer on the surface of the capillary wick structure and the inner wall of the cavity throughout the entire length of the reduction stage, ensuring VC performance; and it can overcome the bottleneck of NCG removal throughout the entire length of the capillary wick structure and the inner wall of the cavity, resulting in better vacuum.

[0010] The objective of this invention is achieved through the following technical solution:

[0011] A first aspect of the present invention provides a method for manufacturing a novel heat spreader, comprising:

[0012] A cover plate and a base plate are provided; the cover plate is assembled on the base plate to form a cavity along its length; wherein the inner wall of the cavity is made of copper.

[0013] A capillary wick structure made of copper is provided, and the capillary wick structure is extended into the cavity along the length direction to obtain a heat spreader structure; wherein, the cover plate is assembled on the base plate to form a first exhaust assembly and a second exhaust assembly that are arranged opposite to each other along the length direction and are respectively connected to the cavity;

[0014] The heat spreader structure is subjected to brazing, oxidation, reduction, liquid injection, and degassing treatments in sequence to obtain the novel heat spreader. The oxidation treatment is used to oxidize the surface of the capillary wick structure and the inner wall of the cavity to improve their roughness. The reduction treatment is used to remove the oxide layer formed after oxidation of the capillary wick structure surface and the inner wall of the cavity. The liquid injection treatment is used to inject liquid working fluid into the cavity. The degassing treatment is used to remove gas from the cavity to ensure a vacuum level within the cavity.

[0015] Compared to traditional vapor chambers with a single exhaust port structure, the advantages of this invention are:

[0016] During the brazing stage, by setting the first and second exhaust components at opposite ends along the length, the exhaust path of volatile organic compounds in the solder is shortened (from the full length to half the length), forming a bidirectional convection channel. This avoids condensation residue on the surface of the capillary wick structure, thereby effectively maintaining the cleanliness of the capillary wick structure and preventing a decrease in capillary force.

[0017] During the oxidation stage, the dual exhaust port design of the first and second exhaust components promotes natural convection or forced circulation of air inside the cavity during the high-temperature oxidation phase. Fresh oxygen can enter and exit from both ends of the capillary structure and the inner wall of the cavity along the length direction, i.e., the first and / or second exhaust components, eliminating oxidation dead zones. This allows for uniform and intense oxidation of the capillary structure surface and the entire length of the cavity inner wall at relatively low process temperatures. Compared to the traditional single exhaust port structure, this design ensures the roughness of the capillary structure surface and the inner wall of the cavity in the distal region while avoiding structural damage in the proximal region due to excessively high temperatures, thus solving the problem of "insufficient oxidation at low temperatures and burn-out of the proximal region at high temperatures."

[0018] During the reduction stage, the dual exhaust port structure of the first and second exhaust components increases the flow rate and exchange rate of the protective gas (nitrogen) and reducing gas (hydrogen) inside the cavity, ensuring that the oxide layer on the surface of the capillary structure at both ends of the length direction and the inner wall of the cavity can be fully reduced, eliminating the reduction blind zone.

[0019] During the degassing stage, the dual exhaust port structure design of the first and second exhaust components creates a bidirectional parallel degassing channel, enabling simultaneous gas extraction from both ends. This reduces the maximum gas transmission distance by half. This "opposite suction" effect effectively breaks down the gas diffusion barriers in the long-distance capillary structure and the inner wall of the cavity, significantly reducing the residual partial pressure of NCG in the micropores of the capillary structure and the inner wall of the cavity.

[0020] In some feasible implementations, the first exhaust assembly and the second exhaust assembly are configured to serve as gas inlet and outlet channels at each stage of the brazing process, the oxidation process, the reduction process, and the degassing process; and to be sealed after the degassing process.

[0021] In some feasible embodiments, the cover plate has a first vent portion and a second vent portion disposed opposite to each other along the length direction; the bottom plate has a third vent portion and a fourth vent portion disposed opposite to each other along the length direction;

[0022] When the cover plate is assembled on the base plate to form a cavity along the length direction, the first exhaust hole and the third exhaust hole correspond one-to-one and are adapted to form the first exhaust assembly, and the second exhaust hole and the fourth exhaust hole correspond one-to-one and are adapted to form the second exhaust assembly.

[0023] In some feasible embodiments, the capillary core structure is selected from copper wire mesh, copper powder sintered body, copper foam, copper powder printed capillary or copper foil punched capillary; and / or, the cover plate and the base plate are made of copper, copper alloy, copper-aluminum composite, copper-titanium composite or copper-steel composite.

[0024] In some feasible implementations, the number of the first exhaust components is two or more; and / or, the number of the second exhaust components is two or more; and / or, the first exhaust components and the second exhaust components are symmetrical or asymmetrical with respect to the width direction.

[0025] In some feasible implementations, the length of the heat spreader structure is greater than or equal to 60 mm, or the area corresponding to the planar dimensions (length × width) of the heat spreader structure is greater than or equal to 3500 mm².

[0026] Some feasible implementations include at least one of the following:

[0027] The brazing process includes: filling the gaps between the edges of the cover plate and the base plate in a nitrogen-hydrogen mixed atmosphere at a temperature of 650°C to 850°C, so as to seal the cover plate and the base plate together.

[0028] The oxidation process includes: under a temperature of 200℃~400℃, introducing air into the cavity through the capillary structure along the first exhaust assembly and / or the second exhaust assembly, and exiting from the second exhaust assembly and / or the first exhaust assembly, so as to oxidize the surface of the capillary structure and the inner wall of the cavity.

[0029] The reduction process includes: under a temperature of 300℃~650℃, a nitrogen-hydrogen mixture is introduced into the cavity through the capillary structure along the first exhaust assembly and / or the second exhaust assembly, and flows out from the second exhaust assembly and / or the first exhaust assembly, so as to eliminate the oxide layer formed after oxidation on the surface of the capillary structure and the inner wall of the cavity.

[0030] The degassing process includes: simultaneously connecting the first exhaust assembly and the second exhaust assembly to a vacuum pump to form a bidirectional parallel exhaust channel to remove gas from the cavity.

[0031] In a second aspect, the present invention provides a novel heat spreader, which is manufactured by the above-described manufacturing method.

[0032] A third aspect of the present invention provides a heat spreader structure, comprising:

[0033] Base plate,

[0034] A cover plate is assembled on the base plate to form a cavity along its length; wherein the inner wall of the cavity is made of copper, and the cavity can be filled with a liquid working fluid;

[0035] A capillary wick structure made of copper extends into the cavity along the length direction; wherein, the cover plate is assembled on the base plate to form a first exhaust assembly and a second exhaust assembly that are arranged opposite to each other along the length direction and are respectively connected to the cavity.

[0036] The vapor chamber structure creates a bidirectional exhaust channel through the dual exhaust port design of the first and second exhaust components, which reduces the maximum gas transmission distance by half. This benefits the brazing, oxidation, reduction, and degassing processes in the manufacturing of copper vapor chambers, ensuring the final performance of the vapor chamber product.

[0037] In some feasible embodiments, the cover plate has a first vent portion and a second vent portion disposed opposite to each other along the length direction; the bottom plate has a third vent portion and a fourth vent portion disposed opposite to each other along the length direction;

[0038] When the cover plate is assembled on the base plate to form a cavity along the length direction, the first exhaust hole and the third exhaust hole correspond one-to-one and are adapted to form the first exhaust assembly, and the second exhaust hole and the fourth exhaust hole correspond one-to-one and are adapted to form the second exhaust assembly. Attached Figure Description

[0039] Figure 1 This is a flowchart of the manufacturing method of the novel heat spreader according to an embodiment of the present invention;

[0040] Figure 2This is a three-dimensional structural schematic diagram of one embodiment of the heat exchanger structure of the present invention;

[0041] Figure 3 yes Figure 2 Explosion-proof diagram of a heat spreader structure Figure 1 ;

[0042] Figure 4 yes Figure 2 Explosion-proof diagram of a heat spreader structure Figure 2 ;

[0043] Figure 5 This is a three-dimensional structural schematic diagram of another embodiment of the heat exchanger structure of the present invention;

[0044] Figure 6 yes Figure 5 Explosion-proof diagram of a heat spreader structure Figure 1 ;

[0045] Figure 7 yes Figure 5 Explosion-proof diagram of a heat spreader structure Figure 2 .

[0046] Figure descriptions: 1. Cover plate; 10. First groove; 100. Protrusion; 11. First vent; 12. Second vent; 2. Base plate; 20. Second groove; 21. Third vent; 22. Fourth vent; 121. First vent assembly; 122. Second vent assembly; 3. Capillary wick structure. Detailed Implementation

[0047] Exemplary embodiments will now be described more fully with reference to the accompanying drawings. However, these exemplary embodiments can be implemented in many forms and should not be construed as limited to the embodiments set forth herein; rather, they are provided to make the invention more comprehensive and complete, and to fully convey the concept of the exemplary embodiments to those skilled in the art.

[0048] It should be understood that, when used in this application specification and the appended claims, the term "comprising" indicates the presence of the described features, integrals, steps, operations, elements and / or components, but does not exclude the presence or addition of one or more other features, integrals, steps, operations, elements, components and / or a collection thereof.

[0049] It should also be understood that the term “and / or” as used in this application specification and the appended claims means any combination of one or more of the associated listed items and all possible combinations, and includes such combinations.

[0050] Furthermore, in the description of this application and the appended claims, the terms "first," "second," "third," "fourth," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0051] A first aspect of the present invention provides a heat spreader structure, combined with an attached... Figure 2-7 As shown, the heat spreader structure includes a base plate 2, a cover plate 1, and a capillary core structure made of copper.

[0052] The cover plate 1 is assembled on the base plate 2 to form a cavity (not shown in the figure) along the length direction F1. The cavity can be filled with a liquid working fluid. This length direction includes the length direction of the cavity, the length direction of the heat spreader structure, the length direction of the capillary core structure 3, the length direction of the cover plate 1, and the length direction of the base plate 2.

[0053] Liquid working fluids can utilize their own "liquid-gas" phase change cycle to rapidly transport heat from heat sources (such as CPUs / GPUs) to the entire heat dissipation surface, achieving two-dimensional heat diffusion. For example, it can be water, but this invention does not limit it.

[0054] Optionally, the cover plate 1 and the base plate 2 can be made of copper, copper alloy, copper-aluminum composite, copper-titanium composite, or copper-steel composite, etc. All of the above materials have good thermal conductivity to meet the heat dissipation requirements of the vapor chamber. It should be noted that the inner wall of the cavity is made of copper.

[0055] For example, the cover plate 1 has a first groove 10 with a plurality of protrusions 100, and the base plate 2 has a second groove 20 adapted to the first groove 10. When the cover plate 1 is assembled on the base plate 2, the openings of the first groove 10 and the openings of the second groove 20 are opposite to each other, forming a cavity along the length direction. The protrusions 100 face the second groove 20 and are located within the cavity. This example is not intended to limit the structure of the cover plate and the base plate, but is merely illustrative. The structures of the cover plate 1 and the base plate 2 can be formed by etching or stamping.

[0056] The capillary wick structure 3, made of copper, extends along the length of the cavity. It should be noted that the capillary wick structure 3 is located within the second groove 20 and is abutted against by multiple protrusions 100 within the second groove 20. The protrusions 100 act as support pillars to ensure the structural stability of the heat spreader structure.

[0057] Optionally, the capillary wick structure 3 may be made of copper wire mesh, copper powder sintered body, copper foam, copper powder printed capillary, or copper foil punched capillary. The aforementioned structures are existing technologies for the capillary wick structure 3 and are not considered as limitations on the capillary wick structure 3, and will not be elaborated here.

[0058] It should be noted that the cover plate 1 is assembled on the base plate 2 to form a first exhaust assembly 121 and a second exhaust assembly 122 that are arranged opposite to each other along the length direction and are respectively connected to the cavity.

[0059] Optionally, the number of first exhaust assemblies 121 is two or more; the number of second exhaust assemblies 122 is two or more, and the number of first exhaust assemblies 121 and second exhaust assemblies 122 can be set according to actual needs.

[0060] Optionally, the first exhaust assembly 121 and the second exhaust assembly 122 may be symmetrical or asymmetrical with respect to the width direction F2. That is, the positions of the first exhaust assembly 121 and the second exhaust assembly 122 in the width direction can be adjusted according to actual needs. This width direction includes the width direction of the cavity, the width direction of the heat spreader structure, the width direction of the capillary core structure 3, the width direction of the cover plate 1, and the width direction of the base plate 2.

[0061] As a specific embodiment of the first exhaust assembly 121 and the second exhaust assembly 122, the cover plate 1 has a first exhaust hole portion 11 and a second exhaust hole portion 12 arranged opposite to each other along the length direction; the bottom plate 2 has a third exhaust hole portion 21 and a fourth exhaust hole portion 22 arranged opposite to each other along the length direction.

[0062] When the cover plate 1 is assembled on the base plate 2 to form a cavity along the length direction, the first exhaust hole 11 and the third exhaust hole 21 correspond one-to-one and are adapted to form the first exhaust assembly 121, and the second exhaust hole 12 and the fourth exhaust hole 22 correspond one-to-one and are adapted to form the second exhaust assembly 122.

[0063] A second aspect of the present invention provides a method for manufacturing a novel heat spreader, in conjunction with the attached... Figure 1-7 As shown, it includes the following steps S1-S3.

[0064] Step S1: Provide a cover plate and a base plate; the cover plate is assembled on the base plate to form a cavity along the length direction.

[0065] Optionally, the cover and base plates can be made of copper, copper alloy, copper-aluminum composite, copper-titanium composite, or copper-steel composite, etc. All of these materials have good thermal conductivity, meeting the heat dissipation requirements of the vapor chamber. It should be noted that the inner wall of the cavity is made of copper.

[0066] For example, the cover plate has a first groove with multiple protrusions, and the base plate has a second groove that matches the first groove. When the cover plate is assembled on the base plate, the openings of the first groove and the second groove face each other and form a cavity along the length direction. The protrusions face the second groove and are located within the cavity. This example is not intended to limit the structure of the cover plate and base plate, but is merely illustrative; the structure of the cover plate and base plate can be formed by etching or stamping.

[0067] It should be noted that the cover plate, when assembled onto the base plate, also forms a first exhaust assembly and a second exhaust assembly that are arranged opposite to each other along the length direction and are respectively connected to the cavity.

[0068] Optionally, the cover plate has a first vent portion and a second vent portion disposed opposite to each other along the length direction; the bottom plate has a third vent portion and a fourth vent portion disposed opposite to each other along the length direction.

[0069] When the cover plate is assembled on the base plate to form a cavity along the length direction, the first exhaust port and the third exhaust port correspond one-to-one and are adapted to form the first exhaust assembly, and the second exhaust port and the fourth exhaust port correspond one-to-one and are adapted to form the second exhaust assembly.

[0070] Step S2: Provide a capillary wick structure made of copper and extend the capillary wick structure along its length into the cavity to obtain a heat spreader structure. Optionally, the capillary wick structure can be made of copper wire mesh, sintered copper powder, copper foam, copper powder printed capillary, or copper foil punched capillary. The aforementioned structures are existing technologies for capillary wick structures and are not considered as limitations on capillary wick structures, and will not be elaborated here.

[0071] It should be noted that the capillary core structure is located in the second groove and is supported by multiple protrusions in the second groove. The protrusions act as support columns to ensure the structural stability of the heat spreader structure.

[0072] That is, the heat exchanger structure is the heat exchanger structure provided in the first aspect above.

[0073] For example, the length of the heat spreader structure is greater than or equal to 60mm, such as 60mm, 100mm, 200mm, 300mm or 400mm; or the area corresponding to the planar dimensions (length × width) of the heat spreader structure is greater than or equal to 3500mm², such as 3500mm², 10000mm², 15000mm² or 25000mm².

[0074] Step S3: The heat exchanger structure is subjected to brazing, oxidation, reduction, liquid injection, and degassing treatment in sequence to obtain a new type of heat exchanger.

[0075] It should be noted that the first and second exhaust assemblies serve as gas inlet and outlet channels during the brazing, oxidation, reduction, and degassing processes.

[0076] As one embodiment of the brazing process, the brazing process includes: filling the gaps between the edges of the cover plate and the base plate in a nitrogen-hydrogen mixture atmosphere (92% nitrogen and 8% hydrogen by volume) at a temperature of 650°C to 850°C, so as to seal the cover plate and the base plate together.

[0077] For example, the temperature of the brazing process can be 650°C, 700°C, 750°C, 800°C or 850°C.

[0078] When the heat spreader structure enters the brazing furnace, the volatile organic compounds in the brazing material can be quickly discharged from the first exhaust assembly and the second exhaust assembly during the brazing process, effectively avoiding the deposition of organic matter in the central area of ​​the cavity. Since the first exhaust assembly and the second exhaust assembly are set at opposite ends in the length direction, the discharge path of volatile organic compounds is shortened (from the full length to half the length), forming a bidirectional convection channel, avoiding condensation residue on the surface of the capillary wick structure, thereby effectively maintaining the cleanliness of the capillary wick structure and preventing the capillary force from decreasing.

[0079] Oxidation treatment is used to oxidize the surface of the capillary wick structure and the inner wall of the cavity to improve the roughness of the surface of the capillary wick structure and the inner wall of the cavity. As one embodiment of the oxidation treatment, the oxidation treatment includes: introducing air into the cavity through the capillary wick structure along a first exhaust assembly and / or a second exhaust assembly at a temperature of 200°C to 400°C, and then exiting from the second exhaust assembly and / or the first exhaust assembly to oxidize the surface of the capillary wick structure and the inner wall of the cavity.

[0080] For example, the oxidation treatment temperature can be 200°C, 250°C, 300°C, 350°C or 400°C.

[0081] After being brazed, the isothermal plate structure enters the high-temperature oxidation furnace, where hot air is introduced to oxidize the surface of the capillary core structure and the inner wall of the cavity. The airflow enters from the first exhaust assembly and / or the second exhaust assembly, passes through the capillary core structure, and flows out from the second exhaust assembly and / or the first exhaust assembly, creating a through-draft effect.

[0082] The dual-exhaust port design of the first and second exhaust assemblies promotes natural convection or forced circulation of air inside the cavity during the high-temperature oxidation stage. Fresh oxygen can enter and exit from both ends of the capillary structure along its length, namely the first and second exhaust assemblies, eliminating oxidation dead zones. This allows for uniform and intense oxidation of the entire length of the capillary structure surface and the inner wall of the cavity at relatively low process temperatures. Compared to the traditional single-exhaust port structure, this design ensures the surface roughness of the capillary structure in the distal region while avoiding structural damage in the proximal region due to excessively high temperatures, thus solving the problem of "insufficient oxidation at low temperatures and burn-out of the proximal end at high temperatures."

[0083] Experiments have shown that, under the same manufacturing process conditions, for the same specifications of heat spreader, compared with the traditional single exhaust port structure, the oxide layer thickness deviation of the capillary core structure surface and the entire length of the inner wall of the cavity of the novel heat spreader of this invention is reduced from the traditional ±40% to ±5%, and there is no need to increase the overall furnace temperature, thus protecting the near-end structure.

[0084] The reduction treatment is used to eliminate the oxide layer formed after oxidation on the surface of the capillary structure and the inner wall of the cavity. As one embodiment of the reduction treatment, the reduction treatment includes: under the condition of a temperature of 300℃~650℃, a nitrogen-hydrogen mixture (nitrogen volume of 92% and hydrogen volume of 8%) is introduced into the cavity through the capillary structure along the first exhaust assembly and / or the second exhaust assembly, and flows out from the second exhaust assembly and / or the first exhaust assembly, so as to eliminate the oxide layer formed after oxidation on the surface of the capillary structure and the inner wall of the cavity, so that the oxidized surface of the capillary structure and the inner wall of the cavity are fully reduced, ensuring the final performance of VC.

[0085] For example, the reduction treatment temperature can be 300°C, 350°C, 400°C, 450°C, 500°C, 550°C, 600°C, or 650°C.

[0086] The vapor chamber structure, after oxidation treatment, enters the reduction furnace. The dual-exhaust port structure of the first and second exhaust components increases the flow rate and exchange rate of the protective gas (nitrogen) and reducing gas (hydrogen) inside the chamber, ensuring that the capillary wick structure surface at both ends of the length direction and the inner wall of the chamber are fully reduced, eliminating the reduction blind zone. Experiments show that, under the same manufacturing process conditions and for vapor chambers of the same specifications, compared to the traditional single-exhaust port structure, the working fluid reflux capillary rate of the novel vapor chamber structure of this invention is increased by approximately 20%.

[0087] Liquid injection is used to inject liquid working fluid into the cavity. For example, it can be injected into the cavity along the length of the heat spreader structure through the first venting assembly and / or the second venting assembly, or it can be injected into the cavity along the thickness of the heat spreader structure through the first venting assembly and / or the second venting assembly. The liquid working fluid injected into the cavity will be locked by the capillary core structure. Since liquid injection is an existing or conventional technology, it will not be described in detail here.

[0088] The degassing process is used to remove gas from the cavity. As one implementation of the degassing process, the degassing process includes connecting the first exhaust assembly and the second exhaust assembly to a vacuum pumping device at the same time to form a bidirectional parallel pumping channel to remove gas from the cavity. The time is reduced from the original 120s to 60s. Under the premise of unchanged vacuum degree, the efficiency is increased by 50%. Long-term reliability test shows that the thermal performance change is ≤3%.

[0089] The dual-exhaust port structure of the first and second exhaust components creates a bidirectional parallel degassing channel, enabling simultaneous gas extraction from both ends. This halves the maximum gas transmission distance. This "counter-current suction" effect effectively breaks down the gas diffusion barrier in long-distance capillary structures, significantly reducing the residual partial pressure of NCG in the micropores of the capillary structure. Experiments show that, under the same manufacturing process conditions and for the same size heat spreader, the total amount of NCG removed in a single cycle by the dual-exhaust structure of this invention is significantly higher than that of the traditional single-exhaust structure, where the maximum diffusion path length of NCG does not exceed 50% of the total length of the heat spreader structure. This allows for a more thorough removal of trace amounts of gas adsorbed on the surface of the capillary structure.

[0090] It should be noted that after the degassing process, both the first and second exhaust components are sealed to obtain a new type of heat spreader.

[0091] A third aspect of the present invention provides a novel heat spreader, which is manufactured by the above-described manufacturing method.

[0092] Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of the invention without departing from the principles and spirit of the invention, and all such changes should fall within the protection scope of the claims of the present invention.

Claims

1. A manufacturing method of a novel vapor chamber, characterized by, include: A cover plate and a base plate are provided; the cover plate is assembled on the base plate to form a cavity along its length; wherein the inner wall of the cavity is made of copper. A capillary wick structure made of copper is provided, and the capillary wick structure is extended into the cavity along the length direction to obtain a heat spreader structure; wherein, the cover plate is assembled on the base plate to form a first exhaust assembly and a second exhaust assembly that are arranged opposite to each other along the length direction and are respectively connected to the cavity; The heat exchanger structure is subjected to brazing, oxidation, reduction, liquid injection, and degassing treatments in sequence to obtain the novel heat exchanger.

2. The production method according to claim 1, characterized by The first exhaust assembly and the second exhaust assembly are configured to serve as gas inlet and outlet channels during the brazing process, the oxidation process, the reduction process, and the degassing process; and to be sealed after the degassing process.

3. The production method according to claim 1, characterized by, The cover plate has a first vent portion and a second vent portion arranged opposite to each other along the length direction; the bottom plate has a third vent portion and a fourth vent portion arranged opposite to each other along the length direction. When the cover plate is assembled on the base plate to form a cavity along the length direction, the first exhaust hole and the third exhaust hole correspond one-to-one and are adapted to form the first exhaust assembly, and the second exhaust hole and the fourth exhaust hole correspond one-to-one and are adapted to form the second exhaust assembly.

4. The production method according to claim 1, characterized by The capillary core structure is made of copper wire mesh, sintered copper powder, copper foam, copper powder printed capillary, or copper foil punched capillary; and / or, the cover plate and base plate are made of copper, copper alloy, copper-aluminum composite, copper-titanium composite, or copper-steel composite.

5. The production method according to claim 1, characterized by The number of the first exhaust components is two or more; and / or the number of the second exhaust components is two or more; and / or the first exhaust components and the second exhaust components are symmetrical or asymmetrical with respect to the width direction.

6. The production method according to claim 1, characterized by The length of the heat spreader structure is greater than or equal to 60 mm, or the area corresponding to the planar dimensions (length × width) of the heat spreader structure is greater than or equal to 3500 mm².

7. The production method according to claim 1, wherein Includes at least one of the following: The brazing process includes: filling the gaps between the edges of the cover plate and the base plate in a nitrogen-hydrogen mixed atmosphere at a temperature of 650°C to 850°C, so as to seal the cover plate and the base plate together. The oxidation process includes: under a temperature of 200℃~400℃, introducing air into the cavity through the capillary structure along the first exhaust assembly and / or the second exhaust assembly, and exiting from the second exhaust assembly and / or the first exhaust assembly, so as to oxidize the surface of the capillary structure and the inner wall of the cavity. The reduction process includes: under a temperature of 300℃~650℃, a nitrogen-hydrogen mixture is introduced into the cavity through the capillary structure along the first exhaust assembly and / or the second exhaust assembly, and flows out from the second exhaust assembly and / or the first exhaust assembly, so as to eliminate the oxide layer formed on the surface of the capillary structure and the inner wall of the cavity after oxidation; The degassing process includes connecting the first exhaust assembly and the second exhaust assembly to a vacuum pumping device simultaneously to form a bidirectional parallel exhaust channel to remove gas from the cavity.

8. A novel vapor chamber, characterized by, The novel heat spreader is manufactured by any one of the manufacturing methods described in claims 1-7.

9. A vapor chamber structure, characterized by, include: Base plate, A cover plate is assembled on the base plate to form a cavity along its length; wherein the inner wall of the cavity is made of copper, and the cavity can be filled with a liquid working fluid; A capillary wick structure made of copper extends into the cavity along the length direction; wherein, the cover plate is assembled on the base plate to form a first exhaust assembly and a second exhaust assembly that are arranged opposite to each other along the length direction and are respectively connected to the cavity.

10. The vapor chamber structure of claim 9, wherein, The cover plate has a first vent portion and a second vent portion arranged opposite to each other along the length direction; the bottom plate has a third vent portion and a fourth vent portion arranged opposite to each other along the length direction. When the cover plate is assembled on the base plate to form a cavity along the length direction, the first exhaust hole and the third exhaust hole correspond one-to-one and are adapted to form the first exhaust assembly, and the second exhaust hole and the fourth exhaust hole correspond one-to-one and are adapted to form the second exhaust assembly.

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