Visualization methods and visualization devices

Abstract

This invention relates to a visualization method and a visualization device. The visualization method is applied to a visualization device, which includes: a grating ruler, a grating reading device, and an imaging module. The imaging module is fixedly connected to the grating reading device and moves synchronously along the extension direction of the grating ruler. At each moving position, the imaging module acquires a single-depth-of-field image corresponding to the object under test, and the grating reading device reads the relative position with respect to the grating ruler as the corresponding grating reading. The visualization method includes: generating a multi-depth-of-field image based on the single-depth-of-field images corresponding to multiple moving positions; the height value of a pixel in the multi-depth-of-field image is the grating reading corresponding to the single-depth-of-field image acquired when the pixel is in the focal plane; and generating a height profile of the object under test based on multiple adjacent pixels and their corresponding height values ​​in the multi-depth-of-field image. This invention achieves visualization of the height distribution of the object under test, improving the intuitiveness of height measurement.

Description

Technical Field

[0001] This invention relates to the field of image processing, and more specifically to a visualization method and visualization device. Background Technology

[0002] Currently, depth-of-field synthesis technology is commonly used in fields such as microscopic imaging, industrial inspection, and semiconductor measurement. Depth-of-field synthesis technology acquires multiple single-depth-field images of the same object on different focal planes and combines these images into a single multi-depth-field image where all areas are sharp.

[0003] In related technologies, systems for implementing depth-of-field synthesis typically include: an optical system for acquiring optical information of single-depth-of-field images at different focal planes; an imaging system for converting the optical information of single-depth-of-field images into digital information; and a central processing unit for synthesizing the digital information of multiple single-depth-of-field images to generate multi-depth-of-field images.

[0004] However, the relevant technology can only output a single multi-depth image where all areas are clear, but it cannot obtain the three-dimensional height information of the object under test in the multi-depth image. Summary of the Invention

[0005] To overcome the problems existing in related technologies, the present invention provides a visualization method and visualization device.

[0006] According to a first aspect of the present invention, a visualization method is provided, applied to a visualization device, the visualization device comprising: a grating ruler, a grating reading device, and an imaging module; the imaging module is fixedly connected to the grating reading device and moves synchronously along the extension direction of the grating ruler; at each moving position, the imaging module acquires a single depth-of-field image corresponding to the object under test, and the grating reading device reads the relative position with respect to the grating ruler as the corresponding grating reading; the visualization method includes:

[0007] A multi-depth image is generated based on the single-depth images corresponding to the multiple moving positions, wherein the height value of a pixel in the multi-depth image is the grating reading corresponding to the single-depth image acquired when the pixel is in the focus plane.

[0008] A height profile of the object under test is generated based on the adjacent pixels and their corresponding height values ​​in the multi-depth image.

[0009] In some exemplary embodiments, generating a height profile of the object under test based on a plurality of adjacent pixels in the multi-depth-field image and their corresponding height values ​​includes:

[0010] At least two of the pixels in the multi-depth image are used as sampling pixels, and the connection between the at least two sampling pixels is determined;

[0011] Based on each pixel point traversed by the connecting line and its corresponding height value, a height profile of the object under test is generated.

[0012] In some exemplary embodiments, generating the height profile of the object under test based on each pixel point traversed by the connecting line and the corresponding height value includes:

[0013] Determine the physical distance between each pixel passed through by the connecting line and at least one of the sampled pixels;

[0014] Using the physical distance corresponding to each pixel point through which the line passes as the abscissa and the height value corresponding to each pixel point through which the line passes as the ordinate, a height profile of the object under test is generated.

[0015] In some exemplary embodiments, determining the physical distance between each of the pixels traversed by the connection and at least one of the sampled pixels includes:

[0016] Based on the position of each pixel point passed through by the connecting line in the multi-depth image, the physical coordinates of the corresponding pixel point on the horizontal plane are determined.

[0017] The physical distance corresponding to the corresponding pixel is determined based on the physical coordinates of each pixel through which the connection passes and the physical coordinates of at least one sampled pixel.

[0018] In some exemplary embodiments, determining the physical coordinates of the corresponding pixel in the horizontal plane based on the positions of each pixel traversed by the connecting line in the multi-depth-of-field image includes:

[0019] Based on the magnification of the imaging module, the actual physical length represented by the pixel in the multi-depth image is determined;

[0020] Based on the actual physical length represented by the pixels in the multi-depth image, determine the physical coordinates on the horizontal plane corresponding to each pixel in the multi-depth image;

[0021] Based on the positions of each pixel in the multi-depth image through which the connecting line passes, the physical coordinates of the corresponding pixel in the horizontal plane are determined.

[0022] In some exemplary embodiments, the visualization device further includes a display for displaying the single-depth-of-field image, the multi-depth-of-field image, and the height profile; the visualization method further includes:

[0023] The single-depth-of-field image, the multi-depth-of-field image, and the height profile are displayed on the monitor.

[0024] In some exemplary embodiments, the display is further configured to receive a selection instruction for a plurality of adjacent pixels in the multi-depth-of-field image; the visualization method further includes:

[0025] The display receives a selection instruction for a plurality of adjacent pixels in the multi-depth image.

[0026] In some exemplary embodiments, after generating a height profile of the object to be measured in the multi-depth-field image based on a plurality of adjacent pixels and their corresponding height values ​​in the multi-depth-field image, the visualization method further includes:

[0027] Of the plurality of pixels used to generate the height profile, at least two pixels are selected as measurement pixels.

[0028] Based on the height values ​​of at least two of the measured pixels, the height difference between the at least two measured pixels is calculated as the height difference between the corresponding positions of the measured pixels in the object under test.

[0029] According to a second aspect of the present invention, a visualization device is provided, the visualization device comprising:

[0030] grating ruler;

[0031] Raster readout device;

[0032] An imaging module is fixedly connected to the grating reading device and moves synchronously along the extension direction of the grating ruler. At each moving position, the imaging module acquires a single depth-of-field image corresponding to the object under test, and the grating reading device reads the relative position with the grating ruler as the corresponding grating reading.

[0033] A programmable gate array chip, electrically connected to the grating readout device and the imaging module, is used to generate a multi-depth image based on the single-depth images corresponding to multiple moving positions. The height value of a pixel in the multi-depth image is the grating reading corresponding to the single-depth image acquired when the pixel is in the focus plane. Based on multiple adjacent pixels in the multi-depth image and their corresponding height values, a height profile of the object under test is generated.

[0034] In some exemplary embodiments, the visualization device further includes:

[0035] A display for showing the single-depth-of-field image, the multi-depth-of-field image, and the height profile.

[0036] The technical solutions provided by the embodiments of the present invention may include the following beneficial effects:

[0037] By fixing the imaging module to the grating reading device and moving them synchronously, the grating readings corresponding to the single-depth-of-field images acquired at each moving position are automatically associated, eliminating the need for manual marking or post-alignment. By using the grating reading when a pixel is on the focal plane as its height value, the multi-depth-of-field images include both color and 3D height information, thus enabling the acquisition of the 3D height information of the object under test within the multi-depth-of-field images. By generating a height profile map based on multiple adjacent pixels and their height values, discrete pixel height data can be transformed into a continuous object surface contour, visualizing the height distribution of the object under test and improving the intuitiveness of height measurement.

[0038] It should be understood that the above general description and the following detailed description are exemplary and explanatory only, and are not intended to limit the invention. Attached Figure Description

[0039] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments consistent with the invention and, together with the description, serve to explain the principles of the invention.

[0040] Figure 1 This is a schematic diagram of the circuit structure of a visualization device shown according to a first exemplary embodiment.

[0041] Figure 2-1 This is a schematic diagram of the split structure of a visualization device along the x-axis direction, according to an exemplary embodiment.

[0042] Figure 2-2 This is a schematic diagram of the overall structure of a visualization device according to an exemplary embodiment.

[0043] Figure 3 This is a schematic diagram of the circuit structure of a visualization device according to a second exemplary embodiment.

[0044] Figure 4 This is a flowchart illustrating a visualization method according to a third exemplary embodiment.

[0045] Figure 5 This is a flowchart illustrating a visualization method according to a fourth exemplary embodiment.

[0046] Figure 6This is a schematic diagram of a multi-depth image of a visualization device and the connection between two sampled pixels on the multi-depth image, according to an exemplary embodiment.

[0047] Figure 7 This is a flowchart illustrating a visualization method according to a fifth exemplary embodiment.

[0048] Figure 8 This is a schematic diagram of a height cross-section of an object under test, according to an exemplary embodiment.

[0049] Figure 9 This is a flowchart illustrating a visualization method according to a sixth exemplary embodiment.

[0050] Figure 10 This is a flowchart illustrating a visualization method according to the seventh exemplary embodiment.

[0051] Figure 11 This is a flowchart illustrating a visualization method according to the eighth exemplary embodiment.

[0052] Figure 12 This is a flowchart illustrating a visualization method according to the ninth exemplary embodiment.

[0053] In the picture:

[0054] 1-Raster ruler; 2-Raster reading device; 3-Imaging module; 4-Programmable gate array chip; 5-Display; 6-Displacement mechanism; 61-Moving part; 62-Power source; 71-First fixing plate; 72-Second fixing plate; 73-Third fixing plate; 74-Fourth fixing plate. Detailed Implementation

[0055] Exemplary embodiments will now be described in detail, examples of which are illustrated in the accompanying drawings. When the following description relates to the drawings, unless otherwise indicated, the same numbers in different drawings denote the same or similar elements. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with the present invention. Rather, they are merely examples of methods consistent with some aspects of the invention as detailed in the appended claims. It should also be understood that the term "and / or" as used in this invention refers to any or all possible combinations comprising one or more of the associated listed items.

[0056] Currently, depth-of-field synthesis technology is commonly used in fields such as microscopic imaging, industrial inspection, and semiconductor measurement. Depth-of-field synthesis technology acquires multiple single-depth-field images of the same object on different focal planes and combines these images into a single multi-depth-field image where all areas are sharp.

[0057] In related technologies, systems for implementing depth-of-field synthesis typically include: an optical system for acquiring optical information of single-depth-of-field images at different focal planes; an imaging system for converting the optical information of single-depth-of-field images into digital information; and a central processing unit for synthesizing the digital information of multiple single-depth-of-field images to generate multi-depth-of-field images.

[0058] However, the relevant technology can only output a single multi-depth image where all areas are clear, but it cannot obtain the three-dimensional height information of the object under test in the multi-depth image.

[0059] Based on this, the present invention provides a visualization method and device. By fixing the imaging module and the grating reading device together and moving them synchronously, the grating readings of the single-depth-of-field images acquired at each moving position are automatically associated with the corresponding depth-of-field images, eliminating the need for manual marking or post-alignment. By using the grating reading when a pixel is on the focal plane as the height value of that pixel, the multi-depth-of-field image includes both color information and three-dimensional height information, thus enabling the acquisition of the three-dimensional height information of the object under test in the multi-depth-of-field image. By generating a height profile based on multiple adjacent pixels and their height values, discrete pixel height data can be transformed into a continuous object surface contour, realizing the visualization of the height distribution of the object under test and improving the intuitiveness of height measurement.

[0060] In one exemplary embodiment, such as Figure 1 , Figure 2-1 and Figure 2-2 As shown, the present invention provides a visualization device, which includes: a grating ruler 1, a grating reading device 2, an imaging module 3, and a programmable gate array chip 4.

[0061] The grating ruler 1 refers to a scale with precise graduations, which serves as a reference component for measuring the amount of displacement.

[0062] The type of grating reading device 2 can be a grating reading head or a grating reader, which can convert the amount of displacement into a trigger signal and a grating reading.

[0063] Imaging module 3 is fixedly connected to grating reading device 2 and moves synchronously along the extension direction of grating ruler 1. At each moving position, imaging module 3 acquires a single depth-of-field image corresponding to the object under test, and grating reading device 2 reads the relative position with grating ruler 1 as the corresponding grating reading. Imaging module 3 refers to a structure used for acquiring images, such as an industrial camera, video camera, or photosensitive element.

[0064] The programmable gate array chip 4, electrically connected to the grating readout device 2 and the imaging module 3, is used to generate a multi-depth-of-field image based on a single-depth-of-field image corresponding to the moving position. The height value of a pixel in the multi-depth-of-field image is the grating reading corresponding to the single-depth-of-field image acquired when that pixel is in the focal plane. Based on multiple adjacent pixels and their corresponding height values ​​in the multi-depth-of-field image, a height profile of the object under test is generated. A single-depth-of-field image refers to a frame image acquired by the imaging module at a single focal plane. In a single-depth-of-field image, only the object area in the current focal plane is clearly imaged, while other areas are out of focus and blurred.

[0065] The visualization device provided in the embodiments of the present invention may have the following beneficial effects:

[0066] By fixing the imaging module 3 to the grating reading device 2 and moving them synchronously, the grating readings corresponding to the single-depth-of-field images acquired at each moving position are automatically associated, eliminating the need for manual marking or post-alignment. By using the grating reading when a pixel is on the focal plane as its height value, the multi-depth-of-field image includes both color and 3D height information, thus enabling the acquisition of the 3D height information of the object under test within the multi-depth-of-field image. By generating a height profile based on multiple adjacent pixels and their height values, discrete pixel height data can be transformed into a continuous object surface contour, visualizing the height distribution of the object under test and improving the intuitiveness of height measurement.

[0067] In one embodiment, such as Figure 3 As shown, the visualization device also includes:

[0068] Display 5 is used to display single-depth-of-field images, multi-depth-of-field images, and height profiles.

[0069] In this embodiment, by setting up a display electrically connected to the programmable gate array chip, the device can independently complete the entire process from image acquisition, depth-of-field synthesis, height profile generation to result display, which facilitates more intuitive visualization in applications such as microscopic imaging, industrial inspection, and semiconductor measurement.

[0070] For example, the visualization device further includes a displacement mechanism 6, comprising a moving component 61. The grating reading device 2 and the imaging module 3 are fixed to the moving component 61. The moving component 61 is used to drive the grating reading device 2 and the imaging module 3 to move synchronously along the extension direction of the grating ruler 1. The moving component 61 includes a liftable support structure. The extension direction of the grating ruler 1 is the same as the lifting direction of the moving component 61, both being the z-axis direction.

[0071] In this embodiment, the displacement mechanism 6 can drive the grating reading device 2 and the imaging module 3 to move synchronously, thereby realizing the synchronous acquisition of single depth-of-field images and corresponding grating readings, which is convenient for measuring the height of the object to be measured.

[0072] For example, the displacement mechanism 6 also includes a power source 62.

[0073] Power source 62 is electrically connected to programmable gate array chip 4;

[0074] The programmable gate array chip 4 is also used to send a displacement signal to the power source 62 so that the power source 62 drives the moving part 61 to move along the extension direction of the grating ruler 1.

[0075] For example, the power source 62 includes at least one of a stepper motor, a servo motor, or a linear motor.

[0076] In this embodiment, the programmable gate array chip 4 controls the power source 62 through a displacement signal, so that the power source 62 drives the movement of the moving part 61, which is beneficial to realize the acquisition of multiple single depth-of-field images and the reading of the grating readings corresponding to each single depth-of-field image.

[0077] For example, the trigger signal and the grating reading are generated synchronously based on the same displacement event of the moving part 61.

[0078] In this embodiment, the trigger signal and the grating reading are generated synchronously based on the same displacement event of the moving part 61, which can ensure that each single depth-of-field image and its corresponding grating reading are aligned in time, avoiding the time misalignment problem caused by software scheduling in related technologies, and providing an accurate data basis for the height calculation of each pixel, thereby improving the accuracy of height measurement.

[0079] For example, when the displacement of the moving part 61 is a preset displacement, the grating reading device 2 outputs a trigger signal.

[0080] For example, the preset displacement can be set by the programmable gate array chip 4. When the displacement of the moving part 61 is the preset displacement, the programmable gate array chip 4 controls the grating reading device 2 to output a trigger signal.

[0081] For example, when the number of single depth-of-field images is 10, the preset displacement value range can be [1μm, 10μm], and the preset displacement value can be 3μm, 5μm, 7μm or 9μm.

[0082] In this embodiment, when the displacement of the moving part 61 is a preset displacement, the grating reading device 2 outputs a trigger signal, which can realize the acquisition of images at equal intervals with the preset displacement as the interval, so that the focal planes of the acquired multiple single depth-of-field images are equally distributed, which is convenient for subsequent depth-of-field synthesis and height interpolation calculation. On the basis of eliminating delayed triggering, the uniformity and consistency of height measurement are further improved.

[0083] For example, when the moving part 61 moves to a preset position, the grating reading device 2 outputs a trigger signal.

[0084] For example, the preset position can be set by the programmable gate array chip 4. When the moving part 61 moves to the preset position, the programmable gate array chip 4 controls the grating reading device 2 to output a trigger signal.

[0085] For example, there are multiple preset positions, and the multiple preset positions can be equally spaced or unequally spaced, which can be flexibly set according to the actual height of the object to be measured.

[0086] In this embodiment, when the moving part 61 moves to the preset position, the grating reading device 2 outputs a trigger signal, which can realize fixed-point image acquisition based on the preset position as the acquisition position. This allows the acquisition position to be flexibly set according to the actual height of the object to be measured, reducing unnecessary acquisition times and improving the efficiency of height measurement.

[0087] For example, the display 5 is also configured to receive selection instructions for multiple adjacent pixels in a multi-depth image and send the selection instructions to the programmable gate array chip, and visualize the connection between the multiple adjacent pixels.

[0088] In this embodiment, the display 5 can realize data visualization function and also realize the function of collecting user input data. Users can complete the line drawing operation and view the results on the device without the need for an external computer, realizing independent measurement and interaction completely independent of the central processing unit.

[0089] For example, such as Figure 2-1 and Figure 2-2 As shown, the visualization device also includes a housing.

[0090] The housing includes a first fixing plate 71, a second fixing plate 72, a third fixing plate 73, and a fourth fixing plate 74. The first fixing plate 71 includes a first groove and a second groove. The first groove engages with the second fixing plate 72 to fix its position. The second groove connects to the displacement mechanism 6 and the grating reading device 2 to support them and allow the moving part 61 to move within it. The grating ruler 1, the power source 62, and the grating reading device 2 are fixed within the second groove. The second fixing plate 72 includes a third groove for engaging the power source 62. The third fixing plate 73 is threadedly connected to the second fixing plate 72 and includes a fourth groove for engaging the programmable gate array chip 4. The fourth fixing plate 74 is threadedly connected to the third fixing plate 73 and surrounds the programmable gate array chip 4.

[0091] In this embodiment, the various structures are integrated into one unit through the shell, which improves the installation accuracy and stability of each component, thereby improving the accuracy and stability of height measurement.

[0092] Based on the above-described visualization device, in one exemplary embodiment, as follows: Figure 4 As shown, the present invention provides a visualization method applied to the above-mentioned visualization device. The visualization method includes:

[0093] S410. Generate a multi-depth-of-field image based on single-depth-of-field images corresponding to multiple moving positions. The height value of a pixel in the multi-depth-of-field image is the grating reading corresponding to the single-depth-of-field image acquired when the pixel is in the focus plane.

[0094] In step S410 above, a single depth-of-field image refers to a frame image acquired by the imaging module at a single focal plane. In a single depth-of-field image, only the object region located at the current focal plane is clearly imaged, while other regions are out of focus and blurred. A multi-depth-of-field image is an image obtained by combining single depth-of-field images corresponding to multiple moving positions. In a multi-depth-of-field image, all regions are clearly imaged.

[0095] S420. Generate a height profile of the object under test based on multiple adjacent pixels and their corresponding height values ​​in the multi-depth image.

[0096] The adjacent pixels in step S420 above can be understood as any pixel and at least one pixel in its 8-neighborhood.

[0097] The visualization method provided by the embodiments of the present invention may include the following beneficial effects:

[0098] By fixing the imaging module to the grating reading device and moving them synchronously, the grating readings corresponding to the single-depth-of-field images acquired at each moving position are automatically associated, eliminating the need for manual marking or post-alignment. By using the grating reading when a pixel is on the focal plane as its height value, the multi-depth-of-field images include both color and 3D height information, thus enabling the acquisition of the 3D height information of the object under test within the multi-depth-of-field images. By generating a height profile map based on multiple adjacent pixels and their height values, discrete pixel height data can be transformed into a continuous object surface contour, visualizing the height distribution of the object under test and improving the intuitiveness of height measurement.

[0099] For example, in step S410 above, generating a multi-depth-of-field image based on single-depth-of-field images corresponding to multiple movement positions, wherein the height value of a pixel in the multi-depth-of-field image is the grating reading corresponding to the single-depth-of-field image acquired when the pixel is in the focus plane, includes:

[0100] Calculate the sharpness of each single depth-of-field image.

[0101] Compare the sharpness of the same pixel position in different single-depth-of-field images, and select the pixel position of the same pixel in the multi-depth-of-field image corresponding to the pixel with the highest sharpness.

[0102] Multiple pixels are merged to generate a multi-depth image.

[0103] In this multi-depth-of-field image, each pixel corresponds to a height value, and the height value of each pixel is the grating reading corresponding to the single-depth-of-field image acquired when the pixel is in the focus plane.

[0104] In this embodiment, a one-to-one correspondence between each pixel and its height value is established in a multi-depth-of-field image through depth-of-field synthesis. Then, the height value corresponding to the corresponding pixel is extracted based on multiple adjacent pixels selected by the user to automatically generate a profile height curve. This enables quantitative height analysis and visualization of any profile of the object under test.

[0105] In one embodiment, such as Figure 5 As shown, step S420 above, which generates a height profile of the object under test based on multiple adjacent pixels and their corresponding height values ​​in the multi-depth image, includes:

[0106] S510. Select at least two pixels in the multi-depth image as sampling pixels and determine the connection between the at least two sampling pixels.

[0107] S520. Generate a height profile of the object to be measured based on each pixel point through which the line passes and the corresponding height value.

[0108] In this embodiment, by using at least two pixels as sampling pixels and determining the line connecting them, the user can generate a corresponding height profile map for any region of interest on the object under test. The height profile map generated based on the pixels along the line and their height values ​​can accurately reflect the height changes at each position along the line, avoiding errors caused by relying solely on the difference between a few sampling points and improving the accuracy of the height profile map.

[0109] For example, such as Figure 6 As shown, the sampling pixels in step S510 above are points A and B, the line connecting the two sampling pixels is line segment AB, and each pixel that the line passes through is a pixel that line segment AB passes through or is adjacent to.

[0110] For example, the pixels through which the connecting line passes in step S520 above include pixels obtained by sampling at equal intervals along the connecting line parallel to the coordinate axis.

[0111] For example, the pixels traversed by the connecting line in step S520 above include pixels found by nearest neighbor interpolation or bilinear interpolation using connecting lines that are not parallel to the coordinate axes.

[0112] In one embodiment, such as Figure 7 As shown, step S520 above, which generates a height profile of the object under test based on each pixel point traversed by the connecting line and its corresponding height value, includes:

[0113] S710. Determine the physical distance between each pixel point through which the connection passes and at least one sampled pixel point.

[0114] S720. Using the physical distance corresponding to each pixel point through which the line passes as the abscissa and the height value corresponding to each pixel point through which the line passes as the ordinate, generate a height profile of the object to be measured.

[0115] For example, when two sampled pixels are as follows Figure 6 The line connecting points A and B, the two sampled pixels shown, is as follows: Figure 6 The line segment AB shown in the figure passes through the following pixels: Figure 6 When the line segment AB shown passes through or is adjacent to a pixel, the height profile in step S720 above is as follows: Figure 8 As shown, the height profile can measure the height value and physical distance between any two pixels through which the line passes. Figure 8 The image shows that the height between two pixels is 1.9921mm, and the physical distance is 0.6861mm.

[0116] In this embodiment, by determining the physical distance between each pixel along the connecting line and the sampled pixel, the pixel positions in the image are converted into actual physical distances. This ensures that the generated height profile has a true physical scale, rather than just a relative scale based on pixel coordinates, allowing users to directly read the actual physical distance corresponding to height changes. Using this physical distance as the x-axis and the height value as the y-axis, the generated height profile converts a two-dimensional image into a curve in a two-dimensional coordinate system, enabling users to intuitively observe the trend of height changes with physical distance.

[0117] In one embodiment, such as Figure 9 As shown, determining the physical distance between each pixel point traversed by the connection and at least one sampled pixel point in step S710 above includes:

[0118] S910. Based on the positions of each pixel point passed through by the connecting line in the multi-depth image, determine the physical coordinates of the corresponding pixel point on the horizontal plane.

[0119] S920. Determine the physical distance to the corresponding pixel based on the physical coordinates of each pixel through which the line passes and the physical coordinates of at least one sampled pixel.

[0120] In this embodiment, the physical coordinates of a pixel on the horizontal plane are determined based on its position in the multi-depth-of-field image, realizing the transformation from pixel position to physical coordinate system and eliminating the influence of different magnifications and image resolutions on the measurement of physical distance. The physical distance is determined based on the physical coordinates of each pixel and the physical coordinates of the sampled pixels, ensuring that each pixel on the connecting line obtains an accurate physical distance and guaranteeing the accuracy of the horizontal coordinate of the height profile.

[0121] In one embodiment, such as Figure 10 As shown, step S910 above, which determines the physical coordinates of the corresponding pixel on the horizontal plane based on the positions of each pixel along the connecting line in the multi-depth image, includes:

[0122] S1010. Determine the actual physical length represented by the pixels in the multi-depth image based on the magnification of the imaging module.

[0123] S1020. Based on the actual physical length represented by the pixels in the multi-depth image, determine the physical coordinates of each pixel in the multi-depth image on the horizontal plane.

[0124] S1030. Determine the physical coordinates of the corresponding pixel on the horizontal plane according to the position of each pixel point passed through by the connecting line in the multi-depth image.

[0125] For example, the step S1010 above, determining the actual physical length represented by a pixel in a multi-depth-of-field image based on the magnification of the imaging module, includes:

[0126] Dividing the pixel size of the image sensor in the imaging module by the magnification of the imaging module yields the actual physical length represented by the pixel in the multi-depth image.

[0127] The pixel size is, for example, 3.45 μm, and the actual physical length is, for example, 0.5 μm / pixel.

[0128] For example, the step S1020 above, which determines the physical coordinates of each pixel in the multi-depth-of-field image on the horizontal plane based on the actual physical length represented by the pixels in the multi-depth-of-field image, includes:

[0129] Use the row index of each pixel as the x-coordinate of the corresponding pixel's position coordinates, and use the column index of each pixel as the y-coordinate of the pixel's position coordinates.

[0130] Multiply the x-coordinate of each pixel's position coordinates by the actual physical length to obtain the x-coordinate of the corresponding pixel's physical coordinates on the horizontal plane, and multiply the y-coordinate of each pixel's position coordinates by the actual physical length to obtain the y-coordinate of the corresponding pixel's physical coordinates on the horizontal plane.

[0131] For example, in step S1030 above, determining the physical coordinates of the corresponding pixel in the horizontal plane according to the position of each pixel in the multi-depth image through which the connecting line passes includes:

[0132] Determine the position coordinates of each pixel along the connection in the multi-depth image, and find the corresponding physical coordinates according to the position coordinates.

[0133] In this embodiment, by determining the actual physical length represented by a pixel based on the magnification of the imaging module, a quantitative conversion relationship between pixels and physical dimensions is established, enabling multi-depth images acquired at different magnifications to be measured at the same physical scale. By determining the horizontal physical coordinates corresponding to each pixel, accurate horizontal position information can be obtained for any pixel in the multi-depth image, providing a coordinate basis for subsequent physical distance calculations and height profile generation.

[0134] For example, the step S920 above, which determines the physical distance to the corresponding pixel based on the physical coordinates of each pixel through which the connection passes and the physical coordinates of at least one sampled pixel, includes:

[0135] Taking each pixel point traversed by line segment AB as shown in Figure 6 as an example, the first... The physical coordinates of each pixel are The physical coordinates of the sampling pixel at point A are Then the first The physical distance corresponding to each pixel as follows:

[0136]

[0137] For example, in step S720 above, generating a height profile of the object under test, using the physical distance corresponding to each pixel point through which the line passes as the abscissa and the height value corresponding to each pixel point through which the line passes as the ordinate, includes:

[0138] No. The physical distance corresponding to each pixel Using x as the x-axis, and y as the x-axis, with the y-axis as the x-axis. The height value corresponding to each pixel is used as the ordinate to generate a height profile of the object under test.

[0139] In one embodiment, the visualization method further includes:

[0140] The monitor displays single-depth-of-field images, multi-depth-of-field images, and height profiles.

[0141] In this embodiment, a single depth-of-field image, a multi-depth-of-field image, and a height profile are displayed on a screen, enabling the device to independently complete the entire process from image acquisition, depth-of-field synthesis, height profile generation to result display. This facilitates more intuitive visualization in applications such as microscopic imaging, industrial inspection, and semiconductor measurement.

[0142] In one embodiment, the visualization method further includes:

[0143] The display receives selection instructions for multiple adjacent pixels in a multi-depth-of-field image.

[0144] In this embodiment, the user input data can also be collected through the display. Users can complete the line drawing operation and view the results on the device without the need for an external computer, realizing independent measurement and interaction completely independent of the central processing unit.

[0145] In one embodiment, such as Figure 11 As shown, after generating a height profile of the object to be measured in the multi-depth image based on multiple adjacent pixels and their corresponding height values ​​in step S420, the visualization method further includes:

[0146] S1110. Among the multiple pixels used to generate the height profile, select at least two pixels as measurement pixels.

[0147] S1120. Calculate the height difference between the object to be measured and the corresponding position of the measured pixel based on the height values ​​of at least two measured pixels.

[0148] In this embodiment, by selecting at least two pixels from the generated height profile as measurement pixels, and calculating the height difference based on their height values, the user can directly measure the vertical distance between any two points on the object under test on the height profile. This height difference is calculated based on the grating reading corresponding to the pixel at the actual shooting time, achieving fast and accurate measurement of the height difference without the need for external ranging equipment.

[0149] For example, after selecting at least two pixels from the plurality of pixels used to generate the height profile in step S1110 above as measurement pixels, the visualization method further includes:

[0150] Based on the physical distance between at least two measured pixels, calculate the difference between the physical distances to at least two measured pixels, and use this difference as the width difference between the corresponding positions of the measured pixels and the measured pixels in the object under test.

[0151] In this embodiment, by calculating the physical distance difference based on the physical distance between at least two measured pixels and the height difference based on the height values ​​of at least two measured pixels, the ability to measure the object under test in two dimensions in the horizontal and vertical directions is realized, providing a data basis for the full-size evaluation of the object.

[0152] In one exemplary embodiment, such as Figure 12 As shown, the present invention provides a visualization method applied to the above-mentioned visualization device. The visualization method includes:

[0153] S1210. Generate a multi-depth image based on the single-depth images corresponding to multiple moving positions. The height value of a pixel in the multi-depth image is the grating reading corresponding to the single-depth image acquired when the pixel is in the focus plane.

[0154] S1220. Select at least two pixels in the multi-depth image as sampling pixels and determine the connection between the at least two sampling pixels.

[0155] S1230. Determine the actual physical length represented by the pixels in the multi-depth-of-field image based on the magnification of the imaging module.

[0156] S1240. Based on the actual physical length represented by the pixels in the multi-depth image, determine the physical coordinates of each pixel in the multi-depth image on the horizontal plane.

[0157] S1250. Determine the physical coordinates of the corresponding pixel on the horizontal plane according to the position of each pixel in the multi-depth image through which the connection passes.

[0158] S1260. Determine the physical distance to the corresponding pixel based on the physical coordinates of each pixel through which the connection passes and the physical coordinates of at least one sampled pixel.

[0159] S1270. Using the physical distance corresponding to each pixel point through which the line passes as the abscissa and the height value corresponding to each pixel point through which the line passes as the ordinate, generate a height profile of the object to be measured.

[0160] S1280. Among the multiple pixels used to generate the height profile, select at least two pixels as measurement pixels.

[0161] S1290. Calculate the height difference between the measured pixel and the height value of at least two measured pixel points, and use it as the height difference between the corresponding positions of the measured pixel points in the object to be measured.

[0162] The visualization method provided by the embodiments of the present invention may include the following beneficial effects:

[0163] By fixing the imaging module to the grating reading device and moving them synchronously, the grating readings corresponding to the single-depth-of-field images acquired at each moving position are automatically associated, eliminating the need for manual marking or post-alignment. By using the grating reading when a pixel is on the focal plane as its height value, the multi-depth-of-field images include both color and 3D height information, thus enabling the acquisition of the 3D height information of the object under test within the multi-depth-of-field images. By generating a height profile map based on multiple adjacent pixels and their height values, discrete pixel height data can be transformed into a continuous object surface contour, visualizing the height distribution of the object under test and improving the intuitiveness of height measurement.

[0164] Other embodiments of the invention will readily occur to those skilled in the art upon consideration of the specification and practice of the invention disclosed herein. This invention is intended to cover any variations, uses, or adaptations of the invention that follow the general principles of the invention and include common knowledge or customary techniques in the art not disclosed herein. The specification and examples are to be considered illustrative only, and the true scope and spirit of the invention are indicated by the claims.

[0165] It should be understood that the present invention is not limited to the precise structure described above and shown in the accompanying drawings, and various modifications and changes can be made without departing from its scope. The scope of the invention is limited only by the appended claims.

Claims

1. A method of visualizing, characterized by, An application is made in a visualization device, the visualization device comprising: a grating ruler, a grating reading device, and an imaging module; the imaging module is fixedly connected to the grating reading device and moves synchronously along the extension direction of the grating ruler; at each moving position, the imaging module acquires a single depth-of-field image corresponding to the object under test, and the grating reading device reads the relative position with respect to the grating ruler as the corresponding grating reading; the visualization method includes: A multi-depth image is generated based on the single-depth images corresponding to the multiple moving positions, wherein the height value of a pixel in the multi-depth image is the grating reading corresponding to the single-depth image acquired when the pixel is in the focus plane. A height profile of the object under test is generated based on the adjacent pixels and their corresponding height values ​​in the multi-depth image.

2. The visualization method of claim 1, wherein, Based on multiple adjacent pixels and their corresponding height values ​​in the multi-depth image, a height profile of the object under test is generated, including: At least two of the pixels in the multi-depth image are used as sampling pixels, and the connection between the at least two sampling pixels is determined; Based on each pixel point traversed by the connecting line and its corresponding height value, a height profile of the object under test is generated.

3. The visualization method of claim 2, wherein, The step of generating the height profile of the object under test based on each pixel point traversed by the connecting line and the corresponding height value includes: Determine the physical distance between each pixel passed through by the connecting line and at least one of the sampled pixels; Using the physical distance corresponding to each pixel point through which the line passes as the abscissa and the height value corresponding to each pixel point through which the line passes as the ordinate, a height profile of the object under test is generated.

4. The visualization method of claim 3, wherein, Determining the physical distance between each pixel traversed by the connection and at least one of the sampled pixels includes: Based on the position of each pixel point passed through by the connecting line in the multi-depth image, the physical coordinates of the corresponding pixel point on the horizontal plane are determined. The physical distance corresponding to the corresponding pixel is determined based on the physical coordinates of each pixel through which the connection passes and the physical coordinates of at least one sampled pixel.

5. The visualization method of claim 4, wherein, Determining the physical coordinates of the corresponding pixel in the horizontal plane based on the positions of each pixel traversed by the connecting line in the multi-depth image includes: Based on the magnification of the imaging module, the actual physical length represented by the pixel in the multi-depth image is determined; Based on the actual physical length represented by the pixels in the multi-depth image, determine the physical coordinates on the horizontal plane corresponding to each pixel in the multi-depth image; Based on the positions of each pixel in the multi-depth image through which the connecting line passes, the physical coordinates of the corresponding pixel in the horizontal plane are determined.

6. The visualization method according to any one of claims 1-5, characterized in that, The visualization device further includes a display for displaying the single depth-of-field image, the multi-depth-of-field image, and the height profile; The visualization method also includes: The single-depth-of-field image, the multi-depth-of-field image, and the height profile are displayed on the monitor.

7. The visualization method according to claim 6, characterized in that, The display is also configured to receive selection instructions for a plurality of adjacent pixels in the multi-depth-of-field image; the visualization method further includes: The display receives a selection instruction for a plurality of adjacent pixels in the multi-depth image.

8. The visualization method according to any one of claims 1-5, characterized in that, After generating a height profile of the object to be measured in the multi-depth image based on a plurality of adjacent pixels and their corresponding height values, the visualization method further includes: Of the plurality of pixels used to generate the height profile, at least two pixels are selected as measurement pixels. Based on the height values ​​of at least two of the measured pixels, the height difference between the at least two measured pixels is calculated as the height difference between the corresponding positions of the measured pixels in the object under test.

9. A visualization device, characterized in that, The visualization device includes: grating ruler; Raster readout device; An imaging module is fixedly connected to the grating reading device and moves synchronously along the extension direction of the grating ruler. At each moving position, the imaging module acquires a single depth-of-field image corresponding to the object under test, and the grating reading device reads the relative position with the grating ruler as the corresponding grating reading. A programmable gate array chip, electrically connected to the grating readout device and the imaging module, is used to generate a multi-depth image based on the single-depth images corresponding to multiple moving positions. The height value of a pixel in the multi-depth image is the grating reading corresponding to the single-depth image acquired when the pixel is in the focus plane. Based on multiple adjacent pixels in the multi-depth image and their corresponding height values, a height profile of the object under test is generated.

10. The visualization device according to claim 9, characterized in that, The visualization device also includes: A display for showing the single-depth-of-field image, the multi-depth-of-field image, and the height profile.

Images