Height measuring device and method

Abstract

The application provides a height measuring device and method, and relates to the technical field of pressure monitoring. The height measuring device comprises: a second gauge block provided with a placing groove for placing a to-be-measured diaphragm; a pressing block fixedly arranged on the bottom surface of the first gauge block in contact with the second gauge block, the size of the placing groove matches the outer diameter size of the pressing block, and the pressing block is used for placing in the placing groove to press the outer edge of the to-be-measured diaphragm; a moving part is arranged inside the first gauge block and moves along a first direction perpendicular to the plane of the placing groove; the first end of the moving part is connected with a height measuring device, the second end of the moving part is connected with the to-be-measured diaphragm based on movement to generate a contactable connection; an electrical measuring device is connected with the first gauge block and the second gauge block, the circuit is conducted in the case that the second end of the moving part is connected with the to-be-measured diaphragm, the electrical measuring device controls the moving part to stop moving, and the height measuring device determines the measurement value of the to-be-measured diaphragm based on the height of the moving part in the first direction in the case that the moving part stops moving.

Description

Technical Field

[0001] This application relates to the field of pressure monitoring technology, and more specifically, to a height measuring device and method. Background Technology

[0002] Instruments used for monitoring the pressure of media in fluid pipelines in the semiconductor industry often employ diaphragms in their structural design to isolate the media. This reduces the risk of contamination from high-purity media contact with other components and allows the diaphragm to sense pressure fluctuations within the pipeline, monitoring and providing feedback on pressure changes. The thickness and free height of the diaphragm (the height difference between the highest and lowest points of the corrugated diaphragm in its arc-shaped free state) directly determine the accuracy of the monitoring instrument. Generally, the thinner the diaphragm, the higher the accuracy achievable by the monitoring instrument. However, thinner corrugated diaphragms are more prone to warping deformation after stamping and are easily deformed by even minor stress. Existing measurement methods and tools struggle to measure this free height. For example, existing height gauges used to measure height differences between parts rely on elastic probes; when the probe contacts a thin diaphragm, the diaphragm has already deformed, resulting in low accuracy of the measured free height. The free height of the diaphragm directly affects the accuracy and performance of the instrument. If diaphragm quality issues are discovered after welding, it leads to material scrap and increased costs. Therefore, the current methods for testing the free height of membranes have low accuracy and cannot meet actual testing needs. Summary of the Invention

[0003] In view of this, the purpose of this application is to provide a height measuring device and method to improve the problem of low pressure monitoring accuracy caused by the low accuracy of diaphragm free height testing in the prior art.

[0004] To address the aforementioned issues, in a first aspect, embodiments of this application provide a height measuring device, the device comprising: a first gauge block, a second gauge block, a moving component, a height measuring device, and an electrical measuring device; A placement groove is provided on the top surface of the second gauge block that contacts the first gauge block, and the placement groove is used to place the membrane to be tested; A pressure block is fixedly provided on the bottom surface of the first gauge block and the second gauge block in contact. The size of the placement groove matches the outer diameter of the pressure block. The pressure block is used to place in the placement groove to press down the outer edge of the diaphragm to be tested. The moving part is disposed inside the first gauge block, and the moving part moves along a first direction perpendicular to the plane of the placement groove; The first end of the moving part is connected to the height measuring device, and the second end of the moving part makes contactable connection with the diaphragm to be measured based on the movement. The electrical measuring device is connected to the first gauge block and the second gauge block. When the second end of the moving part is connected to the diaphragm under test, the circuit between the first gauge block, the moving part, the diaphragm under test, and the second gauge block is connected. When the circuit is connected, the electrical measuring device controls the moving part to stop moving, and the height measuring device determines the measured value of the diaphragm under test based on the height of the moving part in the first direction when it stops moving.

[0005] In the above implementation process, a first gauge block and a second gauge block are respectively set at different ends of the pressure block. The diaphragm to be tested is fixed in the placement groove by the pressure block and the placement groove of the second gauge block. The moving part moves in a first direction perpendicular to the plane of the placement groove to form a contactable connection with the diaphragm to be tested. Since the moving part, the first gauge block and the second gauge block are all connected to the electrical measuring device, and the moving part is connected to the first gauge block and the diaphragm to be tested is connected to the second gauge block, when the second end of the moving part is connected to the diaphragm to be tested, the first gauge block, the moving part, the diaphragm to be tested and the second gauge block are connected by the connection circuit. When the circuit is connected, the electrical measuring device can immediately control the moving part to stop moving. When the circuit is connected, the height measuring device can determine the measured value of the diaphragm to be tested based on the height of the moving part in the first direction when it stops moving, so as to determine the free height of the diaphragm to be tested based on the measured value. It can control the stopping of moving parts through a simple circuit structure, reduce the measurement error caused by the external force applied to the diaphragm under test by the moving parts during measurement, effectively improve the measurement accuracy of the diaphragm's free height, and thus improve the measurement accuracy of the monitoring instrument set based on the diaphragm under test.

[0006] Optionally, the moving part includes: an adjusting element and a probe; The first end of the adjusting component is connected to the height measuring device; The second end of the adjusting component is provided with a circular groove; The first end of the probe is provided with a circular protrusion structure, which matches the circular groove, and the second end of the adjusting member is connected to the first end of the probe; The second end of the probe makes contactable contact with the diaphragm under test based on motion.

[0007] In the above implementation process, the moving part can be equipped with an adjustment component and a probe. The first end of the adjustment component is connected to the height measuring device to drive the height measuring device to move, thereby measuring the height value. The second end of the adjustment component is provided with a circular groove, and the first end of the probe is provided with a circular protrusion structure. The circular protrusion structure matches the circular groove to realize the connection between the second end of the adjustment component and the first end of the probe. This allows the adjustment component to drive the probe to move in the first direction without affecting the position of the probe in other directions. It allows the probe to move stably only in the first direction, so that the second end of the probe can make point contact with the diaphragm under test based on the movement in the first direction. Through the straight up-down movement path of the probe in the first direction, the damage to the diaphragm under test caused by probe rotation is reduced.

[0008] Optionally, the side of the first gauge block away from the pressure block is provided with a hollow structure, and the inner wall of the hollow structure is provided with a first thread; The outer wall of the middle section of the adjusting member is provided with a second thread, and the first thread and the second thread are matched. The adjusting component is fixed inside the first gauge block by the first thread and the second thread; The adjusting component drives the probe to move in the first direction by rotating through a thread.

[0009] In the above implementation process, in order to accommodate and fix the adjusting component, the side of the first gauge block away from the pressure block is provided with a hollow structure, the inner wall of the hollow structure is provided with a first thread, and the outer wall of the middle section of the adjusting component is provided with a second thread that matches the first thread. The adjusting component can be fixed in the first gauge block by the thread engagement between the first thread and the second thread. Furthermore, by rotating the thread, the position of the adjusting component in the first direction can be adjusted, thereby enabling the adjusting component to drive the probe to move in the first direction.

[0010] Optionally, the hollow structure is provided with waist-shaped holes and stepped holes; The waist-shaped hole is located at one end of the stepped hole near the adjusting member; The stepped hole is used to accommodate the probe passing through; The waist-shaped hole is used to restrict the rotation of the probe in a second direction parallel to the plane of the placement slot; An elastic element is provided inside the stepped hole; The probe abuts against the stepped hole via the elastic element, and the elastic element is used to drive the probe to abut against the second end of the adjusting element in the first direction.

[0011] In the above implementation process, the hollow structure is provided with an oblong hole and a stepped hole. The oblong hole is located at the end of the stepped hole near the adjusting member. The stepped hole can accommodate the probe to pass through, and the oblong hole, through its oblong structure, restricts the rotation of the probe in a second direction parallel to the plane of the placement groove, thereby limiting the radial movement of the probe and reducing the adverse effects of probe rotation, thus reducing frictional damage to the diaphragm under test. Furthermore, an elastic element can be provided inside the stepped hole. The probe abuts against the stepped hole through the elastic element, and the elastic element can drive the probe to abut against the second end of the adjusting member in the first direction. This ensures that when the adjusting member moves away from the diaphragm under test, the probe can move synchronously with the adjusting member, reducing the adverse effects of probe stagnation during movement.

[0012] Optionally, the pressure block is configured as a hollow ring structure; The inner diameter of the pressure block is determined based on the outer edge parameters of the diaphragm to be tested.

[0013] In the above implementation process, in order not to affect the normal use of the diaphragm under test and to enable the moving parts to properly contact the diaphragm under test for measurement, the pressure block is configured as a hollow ring structure to press the outer edge of the diaphragm under test through the ring structure. The outer diameter of the ring structure is determined based on the size of the placement groove, and the inner diameter of the ring structure is only based on the outer edge parameters of the diaphragm under test. The size of the pressure block can be customized and adjusted based on diaphragms of different sizes, and the height of diaphragms of different sizes can be measured, which effectively improves the versatility of the height measurement device.

[0014] Optionally, fasteners are provided on the first gauge block; The outer wall of the pressure block is fixed to the bottom surface of the first gauge block by the fastener.

[0015] In the above implementation process, in order to fix the pressure block and reduce the error caused by the movement of the pressure block during the measurement process, fasteners are provided on the first gauge block. The outer wall of the pressure block is fixed to the bottom surface of the first gauge block by the fasteners so that the pressure block can be fixed on the first gauge block.

[0016] Optionally, the first gauge block is provided with a first connector, and the electrical measuring device is connected to the first gauge block through the first connector; The second gauge block is provided with a second connector, and the electrical measuring device is connected to the second gauge block through the second connector.

[0017] In the above implementation process, the first gauge block is connected to the electrical measuring device through the first connecting member, and the second gauge block is connected to the electrical measuring device through the second connecting member. When the moving part makes point contact with the diaphragm under test, the circuit between the first gauge block, the moving part, the diaphragm under test, and the second gauge block is made conductive. This allows the electrical measuring device to immediately control the moving part to stop moving when the circuit is conductive, effectively reducing the measurement error caused by the pressure applied by the moving part to the diaphragm under test during measurement.

[0018] Optionally, if the diaphragm to be tested is not placed on the placement groove, the second end of the moving member contacts the placement groove; The height measuring device is also used to determine the initial value when the diaphragm to be measured is not placed; The free height of the diaphragm under test is determined based on the initial value and the measured value.

[0019] In the above implementation process, in order to determine the free height of the diaphragm to be tested, when the diaphragm to be tested is not placed on the placement slot, the second end of the moving part is in direct contact with the placement slot. Correspondingly, the height measuring device connected to the first end of the moving part can measure the initial value of the height when the diaphragm to be tested is not placed, and thus calculate and determine the free height of the diaphragm to be tested based on the initial value and the measured value.

[0020] Secondly, embodiments of this application also provide a height measurement method, the method being applied to a height measuring device, the device comprising: a first gauge block, a second gauge block, a moving component, a height measuring device, and an electrical measuring device; A placement groove is provided on the top surface of the second gauge block that contacts the first gauge block, and the placement groove is used to place the membrane to be tested; A pressure block is fixedly provided on the bottom surface of the first gauge block and the second gauge block in contact. The size of the placement groove matches the outer diameter of the pressure block. The pressure block is used to place in the placement groove to press down the outer edge of the diaphragm to be tested. The moving part is disposed inside the first gauge block; The method includes: Control the moving part to move along a first direction perpendicular to the plane of the placement slot; The first end of the moving component is connected to the height measuring device, and the second end of the moving component makes contactable contact with the diaphragm under test based on the movement; the electrical measuring device is connected to the first gauge block and the second gauge block. When the second end of the moving part is connected to the diaphragm under test, the circuit between the first gauge block, the moving part, the diaphragm under test, and the second gauge block is connected. When the circuit is connected, the moving part is controlled to stop moving by the electrical measuring device. The height measuring device determines the measured value of the diaphragm under test based on the height of the moving part in the first direction when it stops moving.

[0021] In the above implementation process, the moving part moves in a first direction perpendicular to the plane of the placement slot to establish a contactable connection with the diaphragm under test. Since the moving part, the first gauge block, and the second gauge block are all connected to the electrical measuring device, and the moving part is connected to the first gauge block and the diaphragm under test is connected to the second gauge block, when the second end of the moving part is connected to the diaphragm under test, the first gauge block, the moving part, the diaphragm under test, and the second gauge block are connected by the connection circuit. When the circuit is connected, the electrical measuring device can immediately control the moving part to stop moving. When the circuit is connected, the height measuring device can determine the measured value of the diaphragm under test based on the height of the moving part in the first direction when it stops moving, thereby determining the free height of the diaphragm under test based on the measured value.

[0022] Optionally, when the circuit is turned on, the electrical measuring device generates electrical parameters, and the electrical measuring device controls the moving part to stop moving based on the electrical parameters; The electrical parameters include: resistance value.

[0023] In the above implementation process, when the circuit is on, the electrical measuring device can measure and generate corresponding electrical parameters such as resistance values ​​based on the on-circuit circuit. Then, based on whether the electrical parameters are generated, it is determined whether to control the moving part to stop moving. That is, when the electrical parameters are generated, the moving part is immediately controlled to stop moving, which effectively reduces the measurement error caused by the pressure applied by the moving part to the diaphragm under test during measurement.

[0024] In summary, the embodiments of this application provide a height measuring device and method that can control the stopping of moving parts through a simple circuit structure, reduce measurement errors caused by the external force applied to the diaphragm under test by the moving parts during measurement, effectively improve the measurement accuracy of the diaphragm's free height, and thus improve the measurement accuracy of the monitoring instrument set based on the diaphragm under test. Attached Figure Description

[0025] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments of this application will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0026] Figure 1 This is a schematic diagram of the structure of a height measuring device provided in an embodiment of this application; Figure 2 This is a schematic diagram of the specific structure of a height measuring device provided in an embodiment of this application; Figure 3 This is a flowchart illustrating a height measurement method provided in an embodiment of this application.

[0027] Icons: 110-First gauge block; 120-Second gauge block; 130-Moving component; 140-Height measuring device; 150-Electrical measuring device; 121-Placement slot; 161-Pressure block; A-Diaphragm to be tested; F1-First direction; 131-Adjusting component; 132-Probe; 1311-Circular groove; 1321-Circular protrusion structure; 111-Hollow structure; 1111-Oval hole; 1112-Stepped hole; 1113-Elastic component; 112-Fastener; 113-First connector; 122-Second connector. Detailed Implementation

[0028] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. All other embodiments obtained by those skilled in the art based on the embodiments of this application without creative effort are within the scope of protection of the embodiments of this application.

[0029] The thickness and free height (i.e., the height difference between the highest and lowest points of the corrugated diaphragm in its curved free state) of the diaphragm directly determine the accuracy of the monitoring instrument. Generally, the thinner the diaphragm, the higher the accuracy of the monitoring instrument. However, thinner corrugated diaphragms are more prone to warping deformation after stamping, and they deform even under slight stress. Current measurement methods and instruments struggle to measure their free height. For example, existing height gauges used to measure height differences between parts rely on elastic probes. When the probe contacts a thin diaphragm, the diaphragm has already deformed, resulting in low accuracy of the measured free height. The free height of the diaphragm directly affects the accuracy and performance of the instrument. If diaphragm quality problems are discovered after welding, it leads to material scrap and increased costs. Therefore, current methods for testing the free height of diaphragms have low accuracy and cannot meet practical testing needs.

[0030] To address the aforementioned issues, this application provides a height measuring device and method that can control the stopping of a moving component through a simple circuit structure. This reduces measurement errors caused by the external force applied to the diaphragm during measurement, effectively improving the measurement accuracy of the diaphragm's free height and consequently enhancing the measurement accuracy of monitoring instruments based on the diaphragm.

[0031] Please see Figure 1 , Figure 1This is a schematic diagram of the structure of a height measuring device provided in an embodiment of this application. The height measuring device may include: a first gauge block 110, a second gauge block 120, a moving part 130, a height measuring device 140, and an electrical measuring device 150.

[0032] The second gauge block 120 has a placement groove 121 on its top surface where it contacts the first gauge block 110. The placement groove 121 is used to place the membrane A to be tested. A pressure block 161 is fixedly disposed on the bottom surface where the first gauge block 110 contacts the second gauge block 120. The size of the placement groove 121 matches the outer diameter of the pressure block 161. The pressure block 161 is placed in the placement groove 121 to press down the outer edge of the membrane A to be tested. The first gauge block 110 and the second gauge block 120 are respectively disposed at different ends of the pressure block 161. The membrane A to be tested is fixed in the placement groove 121 by the pressure of the pressure block 161 and the placement groove 121 of the second gauge block 120.

[0033] Optionally, the first gauge block 110 and the second gauge block 120 can both be configured as corresponding tooling blocks. During testing, the first gauge block 110 and the second gauge block 120 are assembled to form a complete device.

[0034] For example, both the first gauge block 110 and the second gauge block 120 can be configured as devices with conductive properties, such as metal gauge blocks, to achieve electrical conduction function.

[0035] Optionally, the placement groove 121 can be configured as a shallow groove of a corresponding shape, such as a circular shallow groove or a square shallow groove, based on actual conditions and requirements. Correspondingly, in order to enable the pressure block 161 to be matched and assembled with the placement groove 121 and to reduce the adverse situation of the pressure block 161 moving within the placement groove 121, the outer wall of the pressure block 161 can also be configured as a corresponding circle or shape, and the outer diameter dimension matches the dimension of the placement groove 121.

[0036] Optionally, the diaphragm A to be tested can be a corrugated diaphragm of various sizes used in the testing equipment.

[0037] The moving component 130 is disposed inside the first gauge block 110. The moving component 130 moves along a first direction F1 perpendicular to the plane of the placement groove 121. The first end of the moving component 130 is connected to the height measuring device 140, and the second end of the moving component 130 makes contactable contact with the diaphragm A to be measured based on the movement. The moving component 130 moves in the first direction F1 perpendicular to the plane of the placement groove 121 to make contactable contact with the diaphragm A to be measured.

[0038] Optionally, the height measuring device 140 may include various devices such as a height ruler capable of high-precision height measurement. The first end of the moving part 130 may be connected to the probe of the height ruler to achieve numerical measurement.

[0039] It should be noted that the electrical measuring device 150 is connected to the first gauge block 110 and the second gauge block 120. When the second end of the moving part 130 is connected to the diaphragm A to be tested, the circuit between the first gauge block 110, the moving part 130, the diaphragm A to be tested, and the second gauge block 120 is connected. When the circuit is connected, the electrical measuring device 150 controls the moving part 130 to stop moving, and the height measuring device 140 determines the measured value of the diaphragm A to be tested based on the height of the moving part 130 in the first direction F1 when it stops moving. Since the moving part 130, the first gauge block 110 and the second gauge block 120 are all connected to the electrical measuring device 150, and the moving part 130 is connected to the first gauge block 110, and the diaphragm A to be tested is connected to the second gauge block 120, when the second end of the moving part 130 is connected to the diaphragm A to be tested, the first gauge block 110, the moving part 130, the diaphragm A to be tested and the second gauge block 120 are connected by the connection circuit. When the circuit is connected, the electrical measuring device 150 can immediately control the moving part 130 to stop moving. When the circuit is connected, the height measuring device 140 can determine the measured value of the diaphragm A to be tested based on the height of the moving part 130 in the first direction F1 when it stops moving, so as to determine the free height of the diaphragm A to be tested based on the measured value.

[0040] For example, the electrical measuring device 150 can be a device that detects whether a circuit is conducting, such as a multimeter. The start and stop of the movement can be controlled by manually stopping the moving part 130, or by controlling the drive mechanism of the moving part 130.

[0041] Optionally, the electrical measuring device 150 can generate corresponding electrical parameters when the circuit is turned on, and can control whether the moving part 130 stops moving based on the presence or absence of electrical parameters. That is, when electrical parameters are generated, the moving part 130 is immediately controlled to stop moving.

[0042] It should be noted that the second end of the moving part 130 makes point contact with the diaphragm A to be tested. The moving part 130 is controlled to stop moving as soon as it contacts the diaphragm A to be tested. Therefore, the pressure exerted by the moving part 130 on the diaphragm A to be tested is very small and will not squeeze the diaphragm A to be tested, thus affecting the magnitude of the measurement value.

[0043] exist Figure 1 In the illustrated embodiment, the stopping of the moving part 130 can be controlled by a simple circuit structure, reducing the measurement error caused by the external force applied to the diaphragm A by the moving part 130 during measurement, effectively improving the measurement accuracy of the diaphragm's free height, and thus improving the measurement accuracy of the monitoring instrument set based on the diaphragm A.

[0044] Optionally, please refer to Figure 2 , Figure 2This is a schematic diagram of the specific structure of a height measuring device provided in an embodiment of this application. The moving part 130 may include: an adjusting part 131 and a probe 132.

[0045] The first end of the adjusting member 131 is connected to the height measuring device 140, the second end of the adjusting member 131 is provided with a circular groove 1311, the first end of the probe 132 is provided with a circular protrusion structure 1321, the circular protrusion structure 1321 matches the circular groove 1311, the second end of the adjusting member 131 is connected to the first end of the probe 132, and the second end of the probe 132 makes contactable connection with the diaphragm A to be measured based on the movement. The first end of the adjusting member 131 is connected to the height measuring device 140 to drive the height measuring device 140 to move, thereby measuring the height value. The second end of the adjusting member 131 is provided with a circular groove 1311, and the first end of the probe 132 is provided with a circular protrusion structure 1321. The circular protrusion structure 1321 matches the circular groove 1311 to realize the connection between the second end of the adjusting member 131 and the first end of the probe 132. This allows the adjusting member 131 to drive the probe 132 to move in the first direction F1 without affecting the position of the probe 132 in other directions. This allows the probe 132 to move stably only in the first direction F1, so that the second end of the probe 132 can make point contact with the diaphragm A under test based on the movement in the first direction F1. Through the straight up and down movement path of the probe 132 in the first direction F1, the damage to the diaphragm A under test caused by the rotation of the probe 132 is reduced.

[0046] Optionally, the adjusting member 131 can be set as an adjusting block of a corresponding shape, and the probe 132 can be set as a structure such as a motion shaft.

[0047] For example, the adjusting element 131 and the probe 132 can be made of appropriate materials based on actual conditions. For instance, the adjusting element 131 can be a metal adjusting block, and the probe 132 can be made of a conductive material such as a metal to achieve electrical conductivity. The size, depth, height, and other parameters of the circular groove 1311 and the circular protrusion structure 1321 can be set based on actual conditions. There is a small gap between the inner wall of the circular groove 1311 and the outer wall of the circular protrusion structure 1321 so that the rotation of the adjusting element 131 will not affect the probe 132 and effectively restricts the movement direction of the probe 132.

[0048] Please continue reading. Figure 2To accommodate and fix the adjusting member 131, a hollow structure 111 is provided on the side of the first gauge block 110 away from the pressure block 161. The inner wall of the hollow structure 111 is provided with a first thread, and the outer wall of the middle section of the adjusting member 131 is provided with a second thread. The first thread and the second thread are matched, and the adjusting member 131 is fixed in the first gauge block 110 by the first thread and the second thread. The adjusting member 131 drives the probe 132 to move in the first direction F1 by rotating the thread. The adjusting member 131 can be fixed in the first gauge block 110 by the thread engagement between the first thread and the second thread, and the position of the adjusting member 131 in the first direction F1 can also be adjusted by rotating the thread, so that the adjusting member 131 can drive the probe 132 to move in the first direction F1.

[0049] Optionally, the adjusting member 131 moves in the first direction F1 by rotating through a thread. When the adjusting member 131 rotates, since the adjusting member 131 and the probe 132 are connected by a circular groove 1311 and a circular protrusion structure 1321, the rotation of the adjusting member 131 will not cause the probe 132 to rotate, but will only cause the probe 132 to move in the first direction F1, so as to reduce the radial movement of the probe 132.

[0050] For example, the second thread provided on the outer wall of the middle section of the adjusting member 131 can have 32-48 teeth. Taking 32 teeth as an example, the pitch between two teeth in the first direction F1 is 0.79375mm. Therefore, when the adjusting member 131 rotates one revolution, the probe 132 moves 0.79375mm in the first direction F1. For every degree the adjusting member 131 rotates, the probe 132 moves about 2 micrometers in the first direction F1. This can achieve high-precision motion adjustment and minimize the compression of the diaphragm A by the probe 132.

[0051] Please continue reading. Figure 2 The hollow structure 111 of the first gauge block 110 may be provided with an oblong hole 1111 and a stepped hole 1112. The oblong hole 1111 is located at one end of the stepped hole 1112 near the adjusting member 131. The stepped hole 1112 is used to accommodate the probe 132 passing through, and the oblong hole 1111 is used to restrict the rotation of the probe 132 in a second direction parallel to the plane of the placement groove 121. The oblong hole 1111 can restrict the rotation of the probe 132 in the second direction parallel to the plane of the placement groove 121 through its oblong structure, thereby restricting the radial movement of the probe 132 and reducing the adverse situation of the probe 132 rotating, so as to reduce the frictional damage caused by the probe 132 to the diaphragm A under test.

[0052] Optionally, the structural parameters of the waist-shaped structure in the waist-shaped hole 1111 and the structural parameters of the stepped structure in the stepped hole 1112 can be designed and adjusted based on the structure of the probe 132.

[0053] It should be noted that the stepped structure of the stepped hole 1112 fits the shape of the outer wall of the middle section of the probe 132 so that the probe 132 can move normally within the stepped hole 1112.

[0054] Furthermore, an elastic element 1113 can be provided inside the stepped hole 1112. The probe 132 abuts against the stepped hole 1112 through the elastic element 1113. The elastic element 1113 is used to drive the probe 132 to abut against the second end of the adjusting member 131 in the first direction F1. The elastic element 1113 can drive the probe 132 to abut against the second end of the adjusting member 131 in the first direction F1, so that when the adjusting member 131 moves away from the diaphragm A to be tested, the probe 132 can move synchronously with the adjusting member 131, reducing the adverse situation of the probe 132 stopping during the movement.

[0055] Optionally, the elastic element 1113 can be configured as a spring, disc spring, wave spring or other device with elastic properties. The first end of the elastic element 1113 abuts against the end of the stepped hole 1112 near the diaphragm A to be tested, and the second end of the elastic element 1113 abuts against the probe 132, so that the elastic element 1113 can apply pressure to the probe 132 pointing to the adjustment element 131, so that the probe 132 can automatically rebound and move synchronously with the adjustment element 131.

[0056] Please continue reading. Figure 2 To ensure the normal use of the diaphragm A under test and to allow the moving part 130 to properly contact the diaphragm A for measurement, the pressure block 161 can be configured as a hollow annular structure. The inner diameter of the pressure block 161 is determined based on the outer edge parameters of the diaphragm A under test. By pressing the outer edge of the diaphragm A under test with the annular structure, the outer diameter of which is determined based on the size of the placement groove 121, and the inner diameter of which is only based on the outer edge parameters of the diaphragm A under test, the size of the pressure block 161 can be customized and adjusted for diaphragms of different sizes, enabling height measurement of diaphragms of different sizes and effectively improving the versatility of the height measurement device.

[0057] Optionally, the pressure block 161 can be configured as a ring block or other shaped ring block made of non-conductive materials such as ceramic or metal coating, to provide stable and flat pressure for the diaphragm A under test.

[0058] It should be noted that when the diaphragm A to be tested is a circular diaphragm, the inner side of the annular structure of the pressure block 161 can also be set to a circular shape, and the inner diameter is smaller than the diameter of the circular diaphragm, so that the pressure block 161 can properly press the outer edge of the diaphragm A to be tested.

[0059] Please continue reading. Figure 2To secure the pressure block 161 and reduce errors caused by its movement during measurement, a fastener 112 is provided on the first gauge block 110. The outer wall of the pressure block 161 is fixed to the bottom surface of the first gauge block 110 by the fastener 112. This allows the pressure block 161 to be fixed to the first gauge block 110, and due to the matching characteristics of the pressure block 161 and the placement groove 121, the assembly and use of the device can be achieved directly through the assembly of the two gauge blocks.

[0060] Optionally, the fastener 112 can be configured as a set screw or other device. A corresponding annular groove can be provided on the bottom surface of the first gauge block 110 to fix and accommodate the pressure block 161, and a corresponding threaded hole is provided on the outer wall of the annular groove to fix the set screw.

[0061] Please continue reading. Figure 2 A first gauge block 110 is provided with a first connector 113, and an electrical measuring device 150 is connected to the first gauge block 110 through the first connector 113. A second gauge block 120 is provided with a second connector 122, and the electrical measuring device 150 is connected to the second gauge block 120 through the second connector 122. The first gauge block 110 is connected to the electrical measuring device 150 through the first connector 113, and the second gauge block 120 is connected to the electrical measuring device 150 through the second connector 122. When the moving part 130 makes point contact with the diaphragm A under test, the circuit between the first gauge block 110, the moving part 130, the diaphragm A under test, and the second gauge block 120 is made conductive. This allows the electrical measuring device 150 to immediately control the moving part 130 to stop moving when the circuit is conductive, effectively reducing the measurement error caused by the pressure applied by the moving part 130 to the diaphragm A under test during measurement.

[0062] Optionally, the first connector 113 and the second connector 122 can be configured as conductive devices such as metal screws to achieve electrical conductivity. Correspondingly, the outer walls of the first gauge block 110 and the second gauge block 120 can be provided with threaded holes to accommodate and fix the first connector 113 and the second connector 122.

[0063] It should be noted that when the diaphragm A to be tested is not placed in the placement slot 121, the second end of the moving member 130 is in contact with the placement slot 121, and the height measuring device 140 is also used to determine the initial value when the diaphragm A to be tested is not placed. The free height of the diaphragm A to be tested is determined based on the initial value and the measured value. To determine the free height of the diaphragm A to be tested, when the diaphragm A to be tested is not placed in the placement slot 121, the second end of the moving member 130 is in direct contact with the placement slot 121. Correspondingly, the height measuring device 140 connected to the first end of the moving member 130 can measure the initial value of the height when the diaphragm A to be tested is not placed, thereby calculating and determining the free height of the diaphragm A to be tested based on the initial value and the measured value.

[0064] Optionally, the free height of the diaphragm A to be tested can be the measured value minus the initial value.

[0065] For example, during the measurement, the probe of the height gauge contacts the upper surface of the adjusting element. Then, an electrical measuring device, such as a multimeter, is set to the ohm range, and the two clamps of the multimeter are attached to the connectors of the two gauge blocks. The adjusting element is rotated, at which point the probe moves vertically towards the diaphragm under test (without rotation). When the multimeter displays a resistance value (circuit completed), the rotation of the adjusting element is stopped, the height gauge is returned to zero, and the corresponding initial value is determined, thus completing the preparation. Next, two gauge blocks are taken, and the adjusting element is rotated, causing the probe to retract a certain distance under the force of the elastic element. The diaphragm under test is then placed in the placement slot of the second gauge block, and the first gauge block is placed in the second gauge block, with the pressure block matching the placement slot. At this point, the pressure block presses down on the outer edge of the diaphragm, and the diaphragm is in its natural state. The multimeter resistance is now infinite. The adjusting element is rotated until the multimeter displays a value, then rotation is stopped, and the digital display value on the height gauge is read, which is the test value. The free height of the diaphragm under test is determined by combining the test value with the initial value.

[0066] Please see Figure 3 , Figure 3 This is a flowchart illustrating a height measurement method provided in an embodiment of this application. The method is applied to the height measuring device in any of the above embodiments. The device includes: a first gauge block, a second gauge block, a moving component, a height measuring device, and an electrical measuring device. A placement groove is provided on the top surface of the second gauge block where it contacts the first gauge block. The placement groove is used to place the diaphragm to be measured. A pressure block is fixedly provided on the bottom surface of the first gauge block where it contacts the second gauge block. The size of the placement groove matches the outer diameter of the pressure block. The pressure block is placed in the placement groove to press down the outer edge of the diaphragm to be measured. The moving component is disposed inside the first gauge block. The method may include steps S210-S230.

[0067] Step S210: Control the moving part to move along a first direction perpendicular to the plane of the placement slot.

[0068] The first end of the moving part is connected to the height measuring device, and the second end of the moving part makes contactable connection with the diaphragm under test based on the movement; the electrical measuring device is connected to the first gauge block and the second gauge block.

[0069] In step S220, when the second end of the moving part is connected to the diaphragm to be tested, the circuit between the first gauge block, the moving part, the diaphragm to be tested, and the second gauge block is connected. When the circuit is connected, the moving part is controlled to stop moving by the electrical measuring device.

[0070] Step S230: The height of the diaphragm under test is determined by the height measuring device based on the height of the moving part in the first direction when it stops moving.

[0071] exist Figure 3 In the illustrated embodiment, a moving component moves in a first direction perpendicular to the placement slot plane to establish a contactable connection with the diaphragm under test. Since the moving component, the first gauge block, and the second gauge block are all connected to the electrical measuring device, and the moving component is connected to the first gauge block and the diaphragm under test is connected to the second gauge block, when the second end of the moving component is connected to the diaphragm under test, the first gauge block, the moving component, the diaphragm under test, and the second gauge block are connected by the connection circuit. When the circuit is connected, the electrical measuring device can immediately control the moving component to stop moving. When the circuit is connected, the height measuring device can determine the measured value of the diaphragm under test based on the height of the moving component in the first direction when it stops moving, thereby determining the free height of the diaphragm under test based on the measured value.

[0072] It should be noted that when the circuit is conducting, the electrical measuring device generates electrical parameters, and based on these parameters, it controls the moving part to stop moving. With the circuit conducting, the electrical measuring device can measure and generate corresponding electrical parameters based on the conducting circuit. Furthermore, based on the generation or absence of these electrical parameters, it determines whether to control the moving part to stop moving. That is, it immediately controls the moving part to stop moving when electrical parameters are generated, effectively reducing measurement errors caused by the pressure applied to the diaphragm by the moving part during measurement.

[0073] Optionally, electrical parameters may include parameters such as resistance values ​​obtained from tests conducted under circuit conduction conditions.

[0074] Since the principle of the height measurement method in this application embodiment is similar to that of the aforementioned height measurement device embodiment, the implementation of the height measurement method in this embodiment can refer to the description in the aforementioned height measurement device embodiment, and repeated details will not be repeated.

[0075] In addition, the components in the various embodiments of this application can be integrated together to form an independent part, or each component can exist independently, or two or more components can be integrated to form an independent part.

[0076] The above description is merely an embodiment of this application and is not intended to limit the scope of protection of this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the scope of protection of this application. It should be noted that similar reference numerals and letters in the following figures indicate similar items; therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0077] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any changes or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in this application should be included within the scope of protection of this application.

[0078] It should be noted that, in this document, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, article, or apparatus. Without further limitations, an element defined by the phrase "comprising..." does not exclude the presence of other identical elements in the process, article, or apparatus that includes said element.

Claims

1. A height measuring device, characterized in that, The device includes: a first gauge block, a second gauge block, a moving part, a height measuring device, and an electrical measuring device; A placement groove is provided on the top surface of the second gauge block that contacts the first gauge block, and the placement groove is used to place the membrane to be tested; A pressure block is fixedly provided on the bottom surface of the first gauge block and the second gauge block in contact. The size of the placement groove matches the outer diameter of the pressure block. The pressure block is used to place in the placement groove to press down the outer edge of the diaphragm to be tested. The moving part is disposed inside the first gauge block, and the moving part moves along a first direction perpendicular to the plane of the placement groove; The first end of the moving part is connected to the height measuring device, and the second end of the moving part makes contactable connection with the diaphragm to be measured based on the movement. The electrical measuring device is connected to the first gauge block and the second gauge block. When the second end of the moving part is connected to the diaphragm under test, the circuit between the first gauge block, the moving part, the diaphragm under test, and the second gauge block is connected. When the circuit is connected, the electrical measuring device controls the moving part to stop moving, and the height measuring device determines the measured value of the diaphragm under test based on the height of the moving part in the first direction when it stops moving.

2. The apparatus of claim 1, wherein, The moving parts include: an adjusting component and a probe; The first end of the adjusting component is connected to the height measuring device; The second end of the adjusting component is provided with a circular groove; The first end of the probe is provided with a circular protrusion structure, which matches the circular groove, and the second end of the adjusting member is connected to the first end of the probe; The second end of the probe makes contactable contact with the diaphragm under test based on motion.

3. The apparatus of claim 2, wherein, The first gauge block has a hollow structure on the side away from the pressure block, and the inner wall of the hollow structure has a first thread. The outer wall of the middle section of the adjusting member is provided with a second thread, and the first thread and the second thread are matched. The adjusting component is fixed inside the first gauge block by the first thread and the second thread; The adjusting component drives the probe to move in the first direction by rotating through a thread.

4. The apparatus of claim 3, wherein, in, The hollow structure is provided with waist-shaped holes and stepped holes; The waist-shaped hole is located at one end of the stepped hole near the adjusting member; The stepped hole is used to accommodate the probe passing through; The waist-shaped hole is used to restrict the rotation of the probe in a second direction parallel to the plane of the placement slot; An elastic element is provided inside the stepped hole; The probe abuts against the stepped hole via the elastic element, and the elastic element is used to drive the probe to abut against the second end of the adjusting element in the first direction.

5. The apparatus of any one of claims 1-4, wherein, The pressure block is configured as a hollow ring structure; The inner diameter of the pressure block is determined based on the outer edge parameters of the diaphragm to be tested.

6. The apparatus of claim 5, wherein, in, Fasteners are provided on the first gauge block; The outer wall of the pressure block is fixed to the bottom surface of the first gauge block by the fastener.

7. The apparatus of any one of claims 1-4, wherein, The first gauge block is provided with a first connector, and the electrical measuring device is connected to the first gauge block through the first connector; The second gauge block is provided with a second connector, and the electrical measuring device is connected to the second gauge block through the second connector.

8. The apparatus of any one of claims 1-4, wherein, When the diaphragm to be tested is not placed in the placement groove, the second end of the moving part contacts the placement groove; The height measuring device is also used to determine the initial value when the diaphragm to be measured is not placed; The free height of the diaphragm under test is determined based on the initial value and the measured value.

9. A height measuring method characterized by, The method is applied to a height measuring device, the device comprising: a first gauge block, a second gauge block, a moving part, a height measuring device, and an electrical measuring device; A placement groove is provided on the top surface of the second gauge block that contacts the first gauge block, and the placement groove is used to place the membrane to be tested; A pressure block is fixedly provided on the bottom surface of the first gauge block and the second gauge block in contact. The size of the placement groove matches the outer diameter of the pressure block. The pressure block is used to place in the placement groove to press down the outer edge of the diaphragm to be tested. The moving part is disposed inside the first gauge block; The method includes: Control the moving part to move along a first direction perpendicular to the plane of the placement slot; The first end of the moving component is connected to the height measuring device, and the second end of the moving component makes contactable contact with the diaphragm under test based on the movement; the electrical measuring device is connected to the first gauge block and the second gauge block. When the second end of the moving part is connected to the diaphragm under test, the circuit between the first gauge block, the moving part, the diaphragm under test, and the second gauge block is connected. When the circuit is connected, the moving part is controlled to stop moving by the electrical measuring device. The height measuring device determines the measured value of the diaphragm under test based on the height of the moving part in the first direction when it stops moving.

10. The method of claim 9, wherein, When the circuit is turned on, the electrical measuring device generates electrical parameters, and the electrical measuring device controls the moving part to stop moving based on the electrical parameters; The electrical parameters include: resistance value.

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