Method and device for detecting flow rate of a ceramic nozzle

Abstract

This invention discloses a method and apparatus for detecting the flow rate of a ceramic nozzle. The method includes providing at least two standard ceramic nozzles, each having a known standard flow rate value; testing the standard ceramic nozzles under preset test conditions to obtain a first detected flow rate value corresponding to each standard ceramic nozzle; establishing a correlation between the standard flow rate value and the first detected flow rate value; testing a ceramic nozzle to be tested under the preset test conditions to obtain a second detected flow rate value corresponding to the nozzle to be tested; and converting the second detected flow rate value into the actual flow rate value of the nozzle to be tested based on the correlation. This invention can eliminate systematic errors inherent in the testing apparatus itself and effectively improve measurement accuracy.

Description

Technical Field

[0001] This invention belongs to the technical field of nozzle flow rate testing, specifically relating to a method and apparatus for detecting the flow rate of a ceramic nozzle. Background Technology

[0002] With the increasing development and competition in the semiconductor chip industry both domestically and internationally, the demand for ceramic nozzles used in semiconductor equipment cavities is growing. Ceramic nozzles are mainly used in semiconductor equipment cavities to precisely guide and distribute reaction gases into the reaction chamber, ensuring gas purity, stable flow rate, and uniform distribution, thereby guaranteeing the quality and yield of thin film deposition or etching processes.

[0003] In related technologies, to achieve flow detection of ceramic nozzles, the ceramic nozzle under test is usually installed in the test gas path, and the reading of the flow meter is used as the measurement result. However, since the measurement gas path itself has a certain error, it will affect the accuracy of the final measurement result.

[0004] At the same time, there is currently no device or method for directly testing ceramic nozzles in the relevant technologies. Summary of the Invention

[0005] The purpose of this invention is to provide a flow detection method and device for ceramic nozzles to solve the problems in the prior art.

[0006] Therefore, the present invention provides a flow detection method for a ceramic nozzle, comprising: Provide at least two standard ceramic nozzles, wherein the standard ceramic nozzles have known standard flow rates; The standard ceramic nozzle is tested under preset test conditions to obtain the first detection flow value corresponding to the standard ceramic nozzle; Establish a correlation between the standard flow rate value and the first detected flow rate value; Under the preset test conditions, the ceramic nozzle to be tested is tested to obtain the second detection flow value corresponding to the ceramic nozzle to be tested. Based on the aforementioned correlation, the second detected flow rate value is converted into the actual flow rate value of the ceramic nozzle under test.

[0007] As a further description of the above technical solution, the preset test conditions include: Adjust the gas pressure in the test path to the preset value and stabilize it, and keep the test environment in a constant temperature and pressure state.

[0008] As a further description of the above technical solution, establishing the correlation between the standard flow rate value and the first detected flow rate value includes: The standard flow rate value and the corresponding first detected flow rate value are entered into a simulation calculation table; A proportional function is generated based on the standard flow rate value and the corresponding first detected flow rate value.

[0009] As a further description of the above technical solution, based on the correlation, converting the second detected flow rate value into the actual flow rate value of the ceramic nozzle under test includes: The second detected flow rate value is entered into the simulation calculation table, which then automatically calculates and outputs the actual flow rate value of the ceramic nozzle under test based on the correlation.

[0010] As a further description of the above technical solution, obtaining the first detection flow rate value corresponding to the standard ceramic nozzle and obtaining the second detection flow rate value corresponding to the ceramic nozzle under test includes: After a preset period of stable operation, the gas flow rate is recorded at predetermined time intervals for a total of multiple times. The average value of the multiple readings is taken as the corresponding detected flow rate value.

[0011] On the other hand, a ceramic nozzle flow detection device is also provided, comprising: Air source interface, connected to the air intake source; The pressure regulation unit, connected to the gas source interface, is used to regulate and stabilize the output gas pressure at a preset value; Nozzle clamping unit for detachable and sealed mounting of ceramic nozzles; A gas flow detection unit is connected between the pressure control unit and the nozzle clamping device to detect the gas flow rate through the installed nozzle and output the detected flow rate value. The data processing unit is connected to the gas flow detection unit and the pressure control unit, respectively. The data processing unit stores known standard flow values ​​of at least two standard ceramic nozzles. When a standard ceramic nozzle is installed, it receives a first detected flow value output by the gas flow detection unit and establishes an association between the known standard flow value and the first detected flow value. When a ceramic nozzle to be tested is installed, it receives a second detected flow value output by the gas flow detection unit and converts the second detected flow value into an actual flow value based on the association.

[0012] As a further description of the above technical solution, the pressure control unit includes a precision pressure regulating valve and a pressure sensor.

[0013] As a further description of the above technical solution, the gas flow detection unit is a mass flow meter or a laminar differential pressure flow meter.

[0014] As a further description of the above technical solution, a display unit is also included, connected to the data processing unit, for displaying the actual traffic value.

[0015] As a further description of the above technical solution, the nozzle clamping unit includes a clamping body, one end of which is provided with an outwardly extending mounting hole for fixing a ceramic nozzle, and a bolt is threaded onto the outside of the mounting hole for clamping the ceramic nozzle.

[0016] Beneficial effects: This invention uses a standard ceramic nozzle with known actual flow rate for testing, establishes a correlation between the standard flow rate value and the device's detection value, and then substitutes the detection value of the nozzle under test into this correlation to calculate the actual flow rate value. This can eliminate the systematic error inherent in the testing device itself and effectively improve the accuracy of the measurement.

[0017] The detection device in this invention is low in cost, simple in structure, and can be flexibly assembled. It can instantly test data, simulate and calculate flow data, and provide processing guidance based on the test results, achieving high efficiency in a short time. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 A flowchart of the flow detection method for ceramic nozzles provided by the present invention.

[0020] Figure 2 This is a schematic diagram of the flow detection method device for ceramic nozzles provided by the present invention.

[0021] Figure 3 This is a data diagram of a repeatability verification embodiment of the present invention.

[0022] Figure 4 Data diagrams for verifying the accuracy of the present invention.

[0023] In the diagram: 1. Air intake source; 2. Pressure control unit; 3. Nozzle clamping unit; 4. Gas flow detection unit; 5. Connecting air pipe; 6. Ceramic nozzle. Detailed Implementation

[0024] The invention will be more readily understood by referring to the following detailed description of preferred embodiments and included examples. Unless otherwise specified, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. In case of conflict, the definitions in this specification shall prevail.

[0025] like Figures 1-3 As shown, a flow detection method for a ceramic nozzle includes: Provide at least two standard ceramic nozzles, wherein the standard ceramic nozzles have known standard flow rates, wherein the standard flow rates are actual flow rates provided by the customer or the upstream calibration process.

[0026] The standard ceramic nozzle is tested under preset test conditions to obtain the first detected flow rate value corresponding to the standard ceramic nozzle. The first detected flow rate value is the value read by the airflow detection unit of the device of the present invention. Due to the influence of pipeline resistance, clamp sealing and flow meter error in the device, the first detected flow rate value and the standard flow rate value will differ.

[0027] A correlation is established between the standard flow rate value and the first detected flow rate value. In one embodiment, if only one standard ceramic nozzle is used, a proportional function relationship can be established. In another embodiment, if two standard ceramic nozzles are used, a linear function relationship can be established.

[0028] The ceramic nozzle to be tested is tested under the preset test conditions to obtain the second detection flow value corresponding to the ceramic nozzle to be tested. It should be noted that when testing the ceramic nozzle to be tested, its preset test conditions are the same as those for testing the standard ceramic nozzle, thereby reducing the error caused by the difference in test conditions.

[0029] Based on the aforementioned correlation, the second detected flow rate value is converted into the actual flow rate value of the ceramic nozzle under test. This measurement method, compared to directly mounting the ceramic nozzle under test onto the testing device, eliminates systematic errors introduced by the testing device itself, thereby improving the accuracy of the test.

[0030] In one embodiment, the preset test conditions include adjusting the test gas pressure to a preset value and stabilizing it, and maintaining the test environment in a constant temperature and pressure state. Specifically, the compressed nitrogen gas source is first turned on, and the inlet pressure is adjusted to the target range, such as 0.2 MPa, using a pressure control unit. The test begins only after the pressure stabilizes. Simultaneously, the test environment is conducted in a constant temperature and pressure laboratory, with the temperature controlled at 23℃ ± 1 degree Celsius and the atmospheric pressure kept stable. This reduces the influence of environmental factors on gas flow, ensuring that the test conditions for the standard nozzle and the nozzle under test are completely consistent, thereby improving the reliability of the calculated results.

[0031] In one embodiment, establishing a correlation between a standard flow value and a first detected flow value includes: The standard flow rate value and its corresponding first detected flow rate value are entered into a simulation calculation table. This table can be a spreadsheet software on a computer, such as Excel, or a calculation program embedded in a data processing unit. Based on the entered standard flow rate value and first detected flow rate value, the table automatically generates a corresponding linear function. For example, if two standard nozzles are used, one with a high flow rate value and one with a low flow rate value, the table will calculate the slope and intercept, resulting in a straight line equation. Substituting the subsequent detected flow rate values ​​of the nozzle under test into this straight line equation allows the calculation of the actual flow rate.

[0032] In one embodiment, converting the second detected flow rate value into the actual flow rate value of the nozzle to be measured based on the correlation includes: The second flow rate value obtained from the test of the nozzle under test is entered into the same simulation calculation table. The simulation calculation table automatically calculates the actual flow rate value of the ceramic nozzle under test based on the established linear function and outputs and displays it. Operators can directly read the result without manual calculation, reducing human error.

[0033] In one embodiment, obtaining the first detection traffic value and obtaining the second detection traffic value include: After the nozzle is installed and the system has been running stably for a preset time, such as 30 seconds, the gas flow detection unit reading is recorded at predetermined time intervals, such as every 10 seconds, for a total of three times. The average of these three readings is taken as the detection flow value corresponding to the nozzle. This reduces random errors caused by instantaneous fluctuations and makes the measurement data more stable.

[0034] like Figure 2 As shown, the present invention also provides a flow detection device for a ceramic nozzle, comprising: The air source interface is used to connect to the air source 1, which provides compressed nitrogen.

[0035] Pressure regulation unit 2 is connected to the gas source interface and is used to regulate and stabilize the output gas pressure at a preset value.

[0036] Nozzle clamping unit 3 is used for detachable and sealed installation of ceramic nozzle 6.

[0037] The gas flow detection unit 4 is connected between the pressure control unit 2 and the nozzle clamping unit 3. It is used to detect the gas flow through the installed nozzle and output the detected flow value.

[0038] The data processing unit is connected to both the gas flow detection unit 4 and the pressure control unit 2. This data processing unit internally stores known standard flow rates for at least two standard ceramic nozzles. When a standard ceramic nozzle is installed, the data processing unit receives the first detected flow rate value output by the gas flow detection unit and establishes a correlation between the known standard flow rate value and the first detected flow rate value. When the ceramic nozzle to be tested is installed, the data processing unit receives the second detected flow rate value output by the gas flow detection unit and converts the second detected flow rate value into an actual flow rate value based on this correlation. This device automates the process from data acquisition to result calculation. Simultaneously, from... Figure 2 It can also be seen that the structure of this application is simple, the cost of the whole set of equipment is not high, it can be flexibly assembled, test data in real time, simulate and calculate flow data, and provide processing guidance based on test results, so as to achieve short time and high efficiency.

[0039] In one embodiment, the pressure control unit includes a precision pressure regulating valve and a pressure sensor. The precision pressure regulating valve can manually or automatically adjust the output pressure, and the pressure sensor monitors the gas path pressure in real time and feeds the signal back to the data processing unit. When the pressure deviates from the preset value, the precision pressure regulating valve can be automatically adjusted to compensate, ensuring that the pressure remains stable near the target value during the test. This ensures that the standard nozzle and the nozzle under test are tested under the same pressure conditions, avoiding errors introduced by pressure fluctuations.

[0040] In one embodiment, the gas flow detection unit is a mass flow meter or a laminar differential pressure flow meter. A mass flow meter directly measures the mass flow rate of the gas and is unaffected by changes in temperature and pressure. A laminar differential pressure flow meter calculates the flow rate by measuring the differential pressure across a laminar flow element and is suitable for small flow rate measurements. Selecting the appropriate flow meter type based on the flow range of the ceramic nozzle can yield more accurate readings.

[0041] In one embodiment, the device further includes a display unit connected to the data processing unit for displaying the actual flow rate value. The display unit can be an LCD screen or a touch screen, allowing operators to view the final flow rate result of each nozzle in real time during the test, as well as historical data records.

[0042] In one embodiment, the nozzle clamping unit includes a clamping body. One end of the clamping body has an outwardly extending mounting hole for securing a ceramic nozzle. A bolt is threaded onto the external part of the mounting hole; when the ceramic nozzle is inserted into the mounting hole, tightening the bolt clamps the nozzle and prevents air leakage. This nozzle clamping unit is simple and reliable, suitable for ceramic nozzles of different outer diameters, and only requires changing the mounting hole fittings to different orifice diameters.

[0043] In one embodiment, to verify the repeatability of the device and method, three standard samples with known different flow rates were selected. Following the test steps described above, measurements were performed 10 times at different times of the day, and three sets of data were recorded and averaged. The results showed that the numerical differences between individual standard samples were very small, indicating excellent repeatability of the device. Specific data are as follows... Figure 3 As shown, the fluctuations in the 10 measurements of the three samples were all within the allowable range.

[0044] In one embodiment, to verify the accuracy of the apparatus and method, 12 standard samples with known flow rates were selected. Two of these were used as standard samples, and a correlation was established between them according to the testing method. Then, the remaining 10 samples were tested, and the measured readings were input into a simulation calculation table to calculate the test flow rate value for each sample. The test values ​​of these 10 samples were compared with their known calibrated flow rates to calculate the error. The verification results showed that the measurement error was within 0.3%, indicating good accuracy. Specific data are as follows... Figure 4 As shown, the test values ​​are in high agreement with the calibration values.

[0045] In one embodiment, the connection relationship of this device is as follows: The air inlet 1 is connected to the inlet of the pressure control unit 2 via the connecting air pipe 5. The outlet of the pressure control unit 2 is connected to the inlet of the gas flow detection unit 4 via the connecting air pipe 5. The outlet of the gas flow detection unit 4 is connected to the air inlet of the nozzle clamping unit 3 via the connecting air pipe 5. The ceramic nozzle 6 is installed at the clamping end of the nozzle clamping unit 3. The entire air circuit is connected using stainless steel pipes or polytetrafluoroethylene pipes to ensure airtightness.

[0046] In one embodiment, the pre-test inspection steps include: confirming that the test environment is in a constant temperature and pressure laboratory, turning on the device power, checking whether each unit is operating normally, whether the flow meter display of the flow detection unit is normal, and whether the clamp of the fixed clamping unit operates flexibly. After confirming everything is correct, subsequent standard sample testing and product testing are carried out.

[0047] Finally, it should be noted that the above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A flow detection method for a ceramic nozzle, characterized by, include: Provide at least two standard ceramic nozzles, wherein the standard ceramic nozzles have known standard flow rates; The standard ceramic nozzle is tested under preset test conditions to obtain the first detection flow value corresponding to the standard ceramic nozzle; Establish a correlation between the standard flow rate value and the first detected flow rate value; Under the preset test conditions, the ceramic nozzle to be tested is tested to obtain the second detection flow value corresponding to the ceramic nozzle to be tested. Based on the aforementioned correlation, the second detected flow rate value is converted into the actual flow rate value of the ceramic nozzle under test.

2. The method of flow detection of a ceramic nozzle according to claim 1, characterized in that, The preset test conditions include: Adjust the gas pressure in the test path to the preset value and stabilize it, and keep the test environment in a constant temperature and pressure state.

3. The method of claim 1, wherein The step of establishing a correlation between the standard flow rate value and the first detected flow rate value includes: The standard flow rate value and the corresponding first detected flow rate value are entered into a simulation calculation table; A proportional function is generated based on the standard flow rate value and the corresponding first detected flow rate value.

4. The method of claim 3, wherein Based on the aforementioned correlation, converting the second detected flow rate value into the actual flow rate value of the ceramic nozzle under test includes: The second detected flow rate value is entered into the simulation calculation table, which then automatically calculates and outputs the actual flow rate value of the ceramic nozzle under test based on the correlation.

5. The method of claim 1, wherein The steps of obtaining the first detection flow rate value corresponding to the standard ceramic nozzle and obtaining the second detection flow rate value corresponding to the ceramic nozzle under test include: After a preset period of stable operation, the gas flow rate is recorded at predetermined time intervals for a total of multiple times. The average value of the multiple readings is taken as the corresponding detected flow rate value.

6. A ceramic nozzle flow detection device characterized by, include: Air source interface, connected to the air intake source; The pressure regulation unit, connected to the gas source interface, is used to regulate and stabilize the output gas pressure at a preset value; Nozzle clamping unit for detachable and sealed mounting of ceramic nozzles; A gas flow detection unit is connected between the pressure control unit and the nozzle clamping device to detect the gas flow rate through the installed nozzle and output the detected flow rate value. The data processing unit is connected to the gas flow detection unit and the pressure control unit respectively, and the data processing unit stores the known standard flow values ​​of at least two standard ceramic nozzles; When a standard ceramic nozzle is installed, the system receives a first detected flow rate value output by the gas flow rate detection unit and establishes an association between the known standard flow rate value and the first detected flow rate value. When a ceramic nozzle to be tested is installed, the system receives a second detected flow rate value output by the gas flow rate detection unit and converts the second detected flow rate value into an actual flow rate value based on the association.

7. The ceramic nozzle flow detection device according to claim 6, characterized in that, The pressure control unit includes a precision pressure regulating valve and a pressure sensor.

8. The ceramic nozzle flow detection device according to claim 6, characterized in that, The gas flow detection unit is a mass flow meter or a laminar differential pressure flow meter.

9. The ceramic nozzle flow detection apparatus of claim 6, wherein, It also includes a display unit connected to the data processing unit for displaying the actual flow rate value.

10. The ceramic nozzle flow detection apparatus of claim 1, wherein, The nozzle clamping unit includes a clamping body, one end of which is provided with an outwardly extending mounting hole for fixing a ceramic nozzle. A bolt is threaded onto the outside of the mounting hole for clamping the ceramic nozzle.

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