Light source stack detection apparatus and light source device

Abstract

A light source stacking detection device and a light source device are disclosed. The light source device is used for detecting a mirror surface and a solder ball of a test object. The light source device comprises a plurality of annular light source modules and an outer coaxial light source arranged along a height direction. Each of the annular light source modules comprises a reflecting cover and a light emitting unit arranged adjacent to a bottom of the reflecting cover, and the light emitting unit is capable of emitting light towards the reflecting cover to be reflected towards the test object. One of the annular light source modules adjacent to the outer coaxial light source emits high-angle diffuse light, and another of the annular light source modules away from the outer coaxial light source emits low-angle diffuse light. The outer coaxial light source is capable of emitting a coaxial light through the reflecting covers of the plurality of annular light source modules towards the test object. Thus, the light source device can make the detection image present better uniformity and facilitate mirror surface detection and solder ball detection.

Description

Technical Field

[0001] This invention relates to a testing device, and more particularly to a light source stacking testing device and light source apparatus. Background Technology

[0002] The existing testing equipment mainly uses light sources that uniformly illuminate the object under test, but does not design the light source configuration for objects with mirror-like or three-dimensional surfaces. As a result, when testing objects with mirror-like surfaces, the existing testing equipment produces many afterimages outside the object under test, making it difficult to perform accurate testing.

[0003] Therefore, the inventor believed that the above-mentioned defects could be improved. So he devoted himself to research and applied scientific principles, and finally proposed an invention that is reasonably designed and effectively improves the above-mentioned defects. Summary of the Invention

[0004] The present invention provides a light source stacking detection device and light source apparatus, which can effectively improve the defects that may be generated by existing detection devices.

[0005] This invention discloses a light source stacking inspection device for mirror inspection and solder ball inspection of an object under test. The light source stacking inspection device includes: a first annular light source module, positioned at a predetermined distance above the object under test along a height direction; wherein the first annular light source module includes: a first reflector facing the object under test; wherein the first reflector is hollow truncated cone-shaped, and its cross-section in the vertical height direction is polygonal, and a first top opening is formed at the top of the first reflector; a first light-emitting unit, disposed adjacent to the bottom of the first reflector, and the first light-emitting unit can emit a first light towards the first reflector to reflect a low-angle diffused light towards the object under test through the first reflector; at least one second annular light source module, positioned above the first annular light source module along a height direction; wherein the at least one second annular light source module includes: A second reflector, facing a first top opening; wherein the second reflector is a hollow truncated cone, and its cross-section in the vertical direction is polygonal, and a second top opening is formed at the top of the second reflector; and a second light-emitting unit, disposed near the bottom of the second reflector, and the second light-emitting unit can emit a second light towards the second reflector to reflect a high-angle diffused light towards the object under test through the second reflector; an external coaxial light source, disposed near the second top opening, and the external coaxial light source can emit a coaxial light that passes through the second reflector and the first reflector towards the object under test; and a camera module, disposed above the external coaxial light source in the height direction; wherein the camera module can be used to acquire the light reflected from the object under test during mirror inspection or solder ball inspection to form an inspection image; wherein the grayscale difference between any two points in the inspection image is no more than 20 grayscale values.

[0006] Optionally, the first reflector has multiple first reflective surfaces and multiple first arc edges, and any two adjacent first reflective surfaces are connected by a first arc edge; wherein, the second reflector has multiple second reflective surfaces and multiple second arc edges, and any two adjacent second reflective surfaces are connected by a second arc edge, and the multiple first arc edges overlap with the multiple second arc edges along the height direction.

[0007] Optionally, each first reflecting surface intersects a horizontal plane in the vertical height direction at a first included angle, and each second reflecting surface intersects a horizontal plane at a second included angle; wherein the first included angle is less than 80 degrees and the second included angle is less than 80 degrees.

[0008] Optionally, the angle of the first included angle is greater than or equal to the angle of the second included angle.

[0009] Optionally, the angle of the first included angle is less than or equal to the angle of the second included angle.

[0010] Optionally, the plurality of first reflective surfaces include a plurality of first primary reflective surfaces and a plurality of first secondary reflective surfaces, and each of the opposite sides of the first primary reflective surface is connected to a first secondary reflective surface by a first arc ridge.

[0011] Optionally, the detection image is formed by the camera module receiving high-angle diffused light and coaxial light reflected from the object under test.

[0012] Optionally, the detection image is formed by the camera module receiving low-angle diffuse light, high-angle diffuse light, and coaxial light reflected from the object under test.

[0013] Optionally, the detection image includes: a central detection area formed by the camera module receiving coaxial light reflected from the object under test; an inner ring detection area surrounding the central detection area and formed by the camera module receiving high-angle diffused light reflected from the object under test; and an outer ring detection area surrounding the inner ring detection area and formed by the camera module receiving low-angle diffused light reflected from the object under test; wherein no gap is formed between any two adjacent areas of the central detection area, the inner ring detection area, and the outer ring detection area.

[0014] This invention also discloses a light source device for mirror inspection and solder ball inspection of an object under test. The light source device includes: a first annular light source module, positioned at a predetermined distance above the object under test along a height direction; wherein the first annular light source module includes: a first reflector facing the object under test; wherein the first reflector is hollow truncated cone-shaped, and a first top opening is formed at the top of the first reflector; a first light-emitting unit disposed adjacent to the bottom of the first reflector, and the first light-emitting unit can emit a first light towards the first reflector to reflect a low-angle diffused light towards the object under test through the first reflector; at least one second... A ring light source module is disposed above a first ring light source module along the height direction; wherein at least one second ring light source module includes: a second reflector facing a first top opening; wherein the second reflector is hollow and truncated cone-shaped, and a second top opening is formed at the top of the second reflector; and a second light-emitting unit disposed adjacent to the bottom of the second reflector, and the second light-emitting unit can emit a second light towards the second reflector to reflect a high-angle diffused light towards the object under test through the second reflector; and an external coaxial light source disposed adjacent to the second top opening, and the external coaxial light source can emit a coaxial light that passes through the second reflector and the first reflector towards the object under test.

[0015] In summary, the light source stacking detection device and light source apparatus disclosed in the embodiments of the present invention, through the respective structural configurations of the first ring light source module and the second ring light source module, and further combined with the external coaxial light source, enable the first ring light source module, the second ring light source module, and the external coaxial light source to be arbitrarily combined and used according to actual needs, thereby effectively making the detection image present better uniformity and facilitating the mirror detection operation and the solder ball detection operation.

[0016] To further understand the features and technical content of this invention, please refer to the following detailed description and accompanying drawings. However, these descriptions and drawings are only for illustrating the invention and are not intended to limit the scope of protection of the invention in any way. Attached Figure Description

[0017] Figure 1 This is a three-dimensional schematic diagram of a light source stacking detection device according to an embodiment of the present invention.

[0018] Figure 2 for Figure 1 A three-dimensional schematic diagram of another embodiment.

[0019] Figure 3 for Figure 1 A bottom-view schematic diagram of the first ring light source module in the diagram.

[0020] Figure 4 for Figure 1 A bottom-view diagram of the second ring light source module.

[0021] Figure 5 for Figure 1 A cross-sectional view along section line VV.

[0022] Figure 6 for Figure 1 A schematic diagram of a planar image showing how a stacked light source detection device forms low-angle diffused light.

[0023] Figure 7 for Figure 1 A planar schematic diagram showing the high-angle diffused light and coaxial light formed by the stacked light source detection equipment.

[0024] Figure 8 This is a cross-sectional schematic diagram of another embodiment of the light source stacking detection device of the present invention.

[0025] Figure 9 for Figure 1 A schematic diagram of the image detected by the camera module. Detailed Implementation

[0026] The following specific embodiments illustrate the implementation of the "light source stacking detection device and light source apparatus" disclosed in this invention. Those skilled in the art can understand the advantages and effects of this invention from the content disclosed in this specification. This invention can be implemented or applied through other different specific embodiments, and various details in this specification can also be modified and changed based on different viewpoints and applications without departing from the concept of this invention. Furthermore, the accompanying drawings of this invention are for simple illustrative purposes only and are not depictions of actual dimensions; this is stated in advance. The following embodiments will further describe the relevant technical content of this invention in detail, but the disclosed content is not intended to limit the scope of protection of this invention.

[0027] It should be understood that while terms such as "first," "second," and "third" may be used in this document to describe various components or features, these components or features should not be limited by these terms. These terms are primarily used to distinguish one component from another, or one feature from another. Furthermore, the term "or" as used in this document should, as appropriate, include any combination of one or more related listed items.

[0028] Please see Figures 1 to 9 As shown, this is one embodiment of the present invention. Figure 1 As shown, this embodiment discloses a light source stacking inspection device 100 for mirror surface inspection and solder ball inspection of a test object 200. That is, the light source stacking inspection device 100 in this embodiment can be applied to the test object 200 having at least one of two different test embodiments: mirror surface and solder ball. Therefore, any inspection device that cannot perform mirror surface inspection or solder ball inspection should be different from the light source stacking inspection device 100 referred to in this embodiment.

[0029] Specifically, in this embodiment, the light source stacked detection device 100 includes a first ring light source module 1, at least one second ring light source module 2 disposed above the first ring light source module 1, an external coaxial light source 3 disposed above the at least one second ring light source module 2, and a camera module 4 disposed above the external coaxial light source 3, but the present invention is not limited thereto.

[0030] Furthermore, the combination of the first annular light source module 1, at least one second annular light source module 2, and the external coaxial light source 3 in this embodiment can also be collectively referred to as a light source device, and used for the mirror inspection and solder ball inspection operations of the test object 200. Moreover, the number of at least one second annular light source module 2 is described as one in this embodiment, but is not limited thereto. For example, in other embodiments of the present invention not shown, the light source device can also be used alone (e.g., for sale) or in combination with other components according to actual needs; or, as... Figure 2 As shown, the number of at least one second ring light source module 2 can be configured to be multiple, and the multiple second ring light source modules 2 can adopt the same structure or have slightly different structures from each other.

[0031] like Figure 3 , Figure 5 and Figure 6 As shown, the first ring light source module 1 is used to be positioned at a predetermined distance D above the object under test 200 along a height direction H. In this embodiment, the predetermined distance D is between 30 mm and 100 mm, but the predetermined distance D can be adjusted and varied according to actual needs. This invention does not limit it.

[0032] Furthermore, the first ring light source module 1 includes a first reflector 11 for facing the object under test 200, and a first light-emitting unit 12 disposed adjacent to the bottom of the first reflector 11. In this embodiment, the first reflector 11 is hollow truncated cone-shaped, and a first top opening 13 is formed at the top of the first reflector 11, while a first bottom opening 14 is formed at the bottom of the first reflector 11.

[0033] Furthermore, in this embodiment, the first light-emitting unit 12 includes a plurality of first light emitters 121 (e.g., a plurality of light-emitting diodes), and the plurality of first light emitters 121 are arranged in a generally circular shape along the bottom of the first reflector 11, with the light emission direction of the plurality of first light emitters 121 facing the first reflector 11. Thus, the first light-emitting unit 12 can emit a first light ray L1 toward the first reflector 11, which is reflected by the first reflector 11 toward the object under test 200 to form a low-angle diffused light ray L1a (passing through the first bottom opening 14).

[0034] It should be noted that as long as the structure of the first reflector 11 is such that the first light L1 is reflected to form the low-angle diffused light L1a, the structure of the first reflector 11 can be adjusted and changed according to design requirements. However, for the sake of understanding this embodiment, the following description uses one of the preferred embodiments of the first reflector 11, but the present invention is not limited thereto.

[0035] Furthermore, the first reflector 11 has a polygonal cross-section in the direction perpendicular to the height H, and the first reflector 11 has a plurality of first reflective surfaces 111 and a plurality of first arc edges 112, and any two adjacent first reflective surfaces 111 are connected by a first arc edge 112, thereby effectively eliminating the concern that the reflected light may be concentrated when two first reflective surfaces 111 are directly connected.

[0036] In this embodiment, each of the first reflective surfaces 111 is planar and intersects a horizontal plane perpendicular to the height direction H at a first included angle σ1 of less than 80 degrees, but the present invention is not limited thereto. For example, in other embodiments of the present invention not shown, the first reflective surface 111 may also be a concave surface or a convex surface depending on actual needs.

[0037] Furthermore, in this embodiment, the plurality of first reflective surfaces 111 include a plurality of first primary reflective surfaces 111a and a plurality of first auxiliary reflective surfaces 111b, and each of the opposite sides of each first primary reflective surface 111a is connected to a first auxiliary reflective surface 111b by a first arcuate ridge 112. Each first reflective surface 111 is generally trapezoidal, and the number of the plurality of first primary reflective surfaces 111a and the plurality of first auxiliary reflective surfaces 111b are each four. The area of ​​each first primary reflective surface 111a can be more than five times the area of ​​any one of the first auxiliary reflective surfaces 111b. Therefore, by configuring one first auxiliary reflective surface 111b and two first arcuate ridges 112 between two first primary reflective surfaces 111a, the concern about the concentration of reflected light that might occur when two first primary reflective surfaces 111a are directly connected can be effectively eliminated.

[0038] like Figure 4 , Figure 5 and Figure 7As shown, the second annular light source module 2 is disposed above the first annular light source module 1 along the height direction H. In this embodiment, the bottom of the second annular light source module 2 may be stacked and sleeved on the top of the first reflector 11 of the first annular light source module 1, so that the first top opening 13 of the first annular light source module 1 falls within the space surrounded by the second annular light source module 2, but the present invention is not limited thereto. For example, in other embodiments of the present invention not shown, the second annular light source module 2 may also be configured at a distance from the first annular light source module 1 along the height direction H.

[0039] The second ring light source module 2 includes a second reflector 21 facing the first top opening 13 and a second light-emitting unit 22 disposed adjacent to the bottom of the second reflector 21. In this embodiment, the second reflector 21 is hollow truncated cone-shaped, and a second top opening 23 is formed at the top of the second reflector 21, while a second bottom opening 24 is formed at the bottom of the second reflector 21.

[0040] Furthermore, in this embodiment, the second light-emitting unit 22 includes a plurality of second light emitters 221 (e.g., a plurality of light-emitting diodes), and the plurality of second light emitters 221 are arranged in a generally circular shape along the bottom of the second reflector 21, with the light emission direction of the plurality of second light emitters 221 facing the second reflector 21. Thus, the second light-emitting unit 22 can emit a second light ray L2 toward the second reflector 21, so as to form a high-angle diffused light ray L2a (passing through the second bottom opening 24 and the first ring light source module 1) by reflection of the second reflector 21 toward the object under test 200.

[0041] It should be noted that as long as the structure of the second reflector 21 is such that the second light L2 is reflected to form the high-angle diffused light L2a, the structure of the second reflector 21 can be adjusted and changed according to design requirements. However, for the sake of understanding this embodiment, the following description uses one of the preferred embodiments of the second reflector 21, but the present invention is not limited thereto.

[0042] Furthermore, the second reflector 21 has a polygonal cross-section in a direction perpendicular to the height H, and the second reflector 21 has a plurality of second reflective surfaces 211 and a plurality of second arc edges 212, wherein any two adjacent second reflective surfaces 211 are connected by a second arc edge 212, thereby effectively eliminating the concern that the reflected light may be concentrated when two second reflective surfaces 211 are directly connected.

[0043] In this embodiment, each of the second reflective surfaces 211 is planar and intersects the horizontal plane perpendicular to the height direction H at a second included angle σ2 of less than 80 degrees, but the invention is not limited thereto. For example, in other embodiments of the invention not shown, the second reflective surface 211 may also be a concave surface or a convex surface, depending on actual needs.

[0044] Furthermore, in this embodiment, the plurality of second reflective surfaces 211 include a plurality of second primary reflective surfaces 211a and a plurality of second auxiliary reflective surfaces 211b, and each of the opposite sides of each second primary reflective surface 211a is connected to a second auxiliary reflective surface 211b by a second arcuate ridge 212. Each second reflective surface 211 is generally trapezoidal, and the number of the plurality of second primary reflective surfaces 211a and the plurality of second auxiliary reflective surfaces 211b are each four. The area of ​​each second primary reflective surface 211a can be more than five times the area of ​​any one of the second auxiliary reflective surfaces 211b. Therefore, by configuring a second auxiliary reflective surface 211b and two second arcuate ridges 212 between two second primary reflective surfaces 211a, the concern about the concentration of reflected light that might occur when two second primary reflective surfaces 211a are directly connected can be effectively eliminated.

[0045] Furthermore, in this embodiment, the first reflector 11 and the second reflector 21 preferably adopt a generally similar configuration to facilitate uniform light distribution. For example, multiple first arcuate edges 112 of the first reflector 11 overlap with multiple second arcuate edges 212 of the second reflector 21 along the height direction H. That is, multiple first reflective surfaces 111 generally correspond to multiple second reflective surfaces 211 along the height direction H.

[0046] Furthermore, such as Figure 5 As shown, when the light intensity of the first light ray L1 used by the first ring light source module 1 is equal to the light intensity of the second light ray L2 used by the second ring light source module 2, the angle of the first included angle σ1 can be greater than the angle of the second included angle σ2, so that the light intensity of the low-angle diffuse light ray L1a and the light intensity of the high-angle diffuse light ray L2a can be more consistent, but the present invention is not limited thereto.

[0047] For example, such as Figure 8As shown, when the first included angle σ1 and the second included angle σ2 are the same angle according to actual needs (e.g., the first ring light source module 1 and the second ring light source module 2 adopt the same structure to reduce production costs), the light intensity of the first ray L1 used by the first ring light source module 1 must be adjusted to be less than the light intensity of the second ray L2 used by the second ring light source module 2. That is to say, the second included angle σ2 can be adjusted approximately between 0% and 100% of the first included angle σ1 according to design requirements.

[0048] It should be further noted that, in this embodiment, the cross-sections of the first reflector 11 and the second reflector 21 are both described as truncated cones, but the present invention is not limited thereto. For example, in other embodiments not shown in the present invention, at least one of the cross-sections of the first reflector 11 and the second reflector 21 may be truncated cones according to actual needs.

[0049] like Figures 5 to 7 ,and Figure 9 As shown, the external coaxial light source 3 is disposed adjacent to the second top opening 23, and the external coaxial light source 3 can emit a coaxial light ray L3 that passes through the second reflector 21 and the first reflector 11 toward the object under test 200. In this embodiment, the external coaxial light source 3 can be used in conjunction with the second ring light source module 2 to reinforce the coaxial light ray L3 with the high-angle diffused light ray L2a, thereby enabling the external coaxial light source 3 to adopt a smaller size.

[0050] Furthermore, since the external coaxial light source 3 in this embodiment can be a smaller model, it can be arranged and configured with the first ring light source module 1 and the second ring light source module 2 along the height direction H, thereby allowing the light source device to significantly reduce the overall space occupied.

[0051] The camera module 4 includes, for example, a camera 41 and a corresponding lens 42, and is positioned above the external coaxial light source 3 along the height direction H. In this embodiment, the camera module 4, the first ring light source module 1, the second ring light source module 2, and the external coaxial light source 3 can be fixed together by a bracket 5, but the present invention is not limited thereto.

[0052] Furthermore, the camera module 4 can be used to acquire the light reflected from the object under test 200 during the mirror inspection operation or the solder ball inspection operation to form an inspection image P, and the grayscale difference between any two points in the inspection image P is no greater than 20 grayscale values. More specifically, the grayscale difference between any two points in the inspection image P is preferably no greater than 10 grayscale values, but is not limited thereto.

[0053] As described above, in this embodiment, the stacked light source detection device 100 and the light source device are configured with the first ring light source module 1 and the second ring light source module 2, and further combined with the external coaxial light source 3, so that the first ring light source module 1, the second ring light source module 2 and the external coaxial light source 3 can be arbitrarily combined and used according to actual needs, thereby effectively making the detection image P present better uniformity and facilitating the mirror detection operation and the solder ball detection operation.

[0054] In other words, the architecture of the stacked light source detection device 100 not only reduces the space occupied, but also allows the first ring light source module 1, the second ring light source module 2, and the external coaxial light source 3 to be used in any combination according to actual needs, so as to be suitable for various testing requirements.

[0055] For example, the detection image P can be formed by the camera module 4 receiving the high-angle diffused light L2a and the coaxial light L3 reflected from the object under test 200. Alternatively, the detection image P can also be formed by the camera module 4 receiving the low-angle diffused light L1a, the high-angle diffused light L2a, and the coaxial light L3 reflected from the object under test 200. In this embodiment, the detection image P does not produce an image corresponding to the first light-emitting unit 12 or the second light-emitting unit 22, so as to facilitate the relevant detection of the object under test 200 through the detection image P.

[0056] Furthermore, the detection image P includes a central detection area P1, an inner ring detection area P2 surrounding the central detection area P1, and an outer ring detection area P3 surrounding the inner ring detection area P2. The central detection area P1 is formed by the camera module 4 receiving the coaxial light L3 reflected by the object under test 200; the inner ring detection area P2 is formed by the camera module 4 receiving the high-angle diffused light L2a reflected by the object under test 200; and the outer ring detection area P3 is formed by the camera module 4 receiving the low-angle diffused light L1a reflected by the object under test 200.

[0057] Furthermore, no gaps are formed between any two adjacent areas of the central detection area P1, the inner ring detection area P2, and the outer ring detection area P3; that is, there may be partial overlap between any two adjacent areas of the central detection area P1, the inner ring detection area P2, and the outer ring detection area P3.

[0058] [Technical Effects of the Embodiments of the Invention]

[0059] In summary, the light source stacking detection device and light source apparatus disclosed in the embodiments of the present invention, through the respective structural configurations of the first ring light source module and the second ring light source module, and further combined with the external coaxial light source, enable the first ring light source module, the second ring light source module, and the external coaxial light source to be arbitrarily combined and used according to actual needs, thereby effectively making the detection image present better uniformity and facilitating the mirror detection operation and the solder ball detection operation.

[0060] The content disclosed above is only a preferred and feasible embodiment of the present invention, and is not intended to limit the patent scope of the present invention. Therefore, all equivalent technical changes made based on the content of the present invention specification and drawings are included within the patent scope of the present invention.

Claims

1. A light source stacking detection device, characterized in that, The light source stacking inspection device is used for mirror inspection and solder ball inspection of an object under test. The light source stacking inspection device includes: A first annular light source module is configured to be positioned at a predetermined distance above the object under test along a height direction; wherein the first annular light source module comprises: A first reflector is provided for facing the object to be measured; wherein the first reflector is hollow and truncated cone-shaped, and its cross-section perpendicular to the height direction is polygonal, and a first top opening is formed at the top of the first reflector; and A first light-emitting unit is disposed near the bottom of the first reflector, and the first light-emitting unit can emit a first light towards the first reflector so as to reflect a low-angle diffused light towards the object under test through the first reflector. At least one second annular light source module is disposed above the first annular light source module along the height direction; wherein, at least one second annular light source module comprises: A second reflector faces the first top opening; wherein the second reflector is a hollow truncated cone, and its cross-section perpendicular to the height direction is polygonal, and a second top opening is formed at the top of the second reflector; and A second light-emitting unit is disposed near the bottom of the second reflector, and the second light-emitting unit can emit a second light towards the second reflector so as to reflect a high-angle diffused light towards the object under test through the second reflector; An external coaxial light source is disposed adjacent to the second top opening, and the external coaxial light source is capable of emitting coaxial light rays that pass through the second reflector and the first reflector toward the object under test; and A camera module is disposed above the external coaxial light source along the height direction; wherein the camera module is used to acquire light reflected from the object under test during the mirror inspection operation or the solder ball inspection operation to form an inspection image; wherein the grayscale difference between any two points in the inspection image is no greater than 20 grayscale values.

2. The light source stacking detection device according to claim 1, characterized in that, The first reflector has multiple first reflective surfaces and multiple first arc edges, and any two adjacent first reflective surfaces are connected by a first arc edge; wherein, the second reflector has multiple second reflective surfaces and multiple second arc edges, and any two adjacent second reflective surfaces are connected by a second arc edge, and the multiple first arc edges overlap with the multiple second arc edges along the height direction.

3. The light source stacking detection device according to claim 2, characterized in that, Each of the first reflective surfaces intersects a horizontal plane perpendicular to the height direction at a first angle, and each of the second reflective surfaces intersects the horizontal plane at a second angle; wherein the first angle is less than 80 degrees and the second angle is less than 80 degrees.

4. The light source stacking detection device according to claim 3, characterized in that, The angle of the first included angle is greater than or equal to the angle of the second included angle.

5. The light source stacking detection device according to claim 3, characterized in that, The angle of the first included angle is less than or equal to the angle of the second included angle.

6. The light source stacking detection device according to claim 2, characterized in that, The plurality of first reflective surfaces include a plurality of first primary reflective surfaces and a plurality of first secondary reflective surfaces, and each of the opposite sides of each first primary reflective surface is connected to a first secondary reflective surface by a first arc ridge.

7. The light source stacking detection device according to claim 1, characterized in that, The detection image is formed by the camera module receiving the high-angle diffused light reflected from the object under test and the coaxial light.

8. The light source stacking detection device according to claim 1, characterized in that, The detection image is formed by the camera module receiving the low-angle diffuse light, the high-angle diffuse light, and the coaxial light reflected from the object under test.

9. The light source stacking detection device according to claim 8, characterized in that, The detected image contains: A central detection area is formed by the camera module receiving the coaxial light reflected by the object under test; An inner ring detection area surrounds the outer side of the central detection area and is formed by the camera module receiving the high-angle diffused light reflected by the object under test; and An outer ring detection area surrounds the outer side of the inner ring detection area and is formed by the camera module receiving the low-angle diffused light reflected by the object under test; There are no gaps between any two adjacent areas of the central detection area, the inner ring detection area, and the outer ring detection area.

10. A light source device, characterized in that, The light source device is used for mirror inspection and solder ball inspection of an object under test. The light source device includes: A first annular light source module is configured to be positioned at a predetermined distance above the object under test along a height direction; wherein the first annular light source module comprises: A first reflector for facing the object to be tested; wherein the first reflector is in the shape of a hollow truncated cone, and a first top opening is formed at the top of the first reflector; and A first light-emitting unit is disposed near the bottom of the first reflector, and the first light-emitting unit can emit a first light towards the first reflector to form a low-angle diffused light by reflection of the first reflector towards the object under test; At least one second annular light source module is disposed above the first annular light source module along the height direction; wherein, at least one second annular light source module comprises: A second reflector facing the first top opening; wherein the second reflector is a hollow truncated cone, and a second top opening is formed at the top of the second reflector; and A second light-emitting unit is disposed adjacent to the bottom of the second reflector, and the second light-emitting unit can emit a second light beam toward the second reflector so as to reflect the light beam toward the object under test through the second reflector to form a high-angle diffused light beam; and An external coaxial light source is disposed adjacent to the second top opening, and the external coaxial light source can emit coaxial light rays that pass through the second reflector and the first reflector toward the object under test.

Images