A multi-modal probe and a probe thermal transport measurement method

Abstract

This invention relates to the field of probe technology, and more particularly to a multimodal probe and a method for measuring probe thermal transport. The probe includes a probe body; a probe tip connected to the probe body; an enhancement component disposed on the surface of the probe tip for enhancing the near-field scattering spectral signal between the probe and the sample; a thermal sensing unit disposed on the probe tip for collecting heat exchange between the probe and the sample; an external excitation light source focused on the probe tip for exciting thermal radiation on the probe and sample surfaces; and a signal synchronization processing unit connected to the probe body for simultaneously collecting the near-field scattering spectral signal and the thermal signal. This allows for the simultaneous and accurate measurement of the local density of thermal radiation and the heat flux density, providing complete data support for the analysis of multi-energy particle thermal transport mechanisms. It achieves high spatial resolution and high precision measurement at the ultimate scale, reconstructing the energy transport process at the ultimate scale.

Description

Technical Field

[0001] This invention relates to the field of probe technology, and in particular to a multimodal probe and a method for measuring probe heat transfer. Background Technology

[0002] With the rapid development of microelectronics and nanotechnology, heat transfer and energy management at the nanoscale have become a key issue in modern materials science and microelectronics. As device dimensions continue to shrink, especially in microstructures such as integrated circuits, nanomaterials, and quantum dots, traditional thermal management methods and measurement techniques are increasingly unable to meet the demand for precise analysis of heat transport phenomena at the extreme scale. In existing technologies, the study of heat transfer usually relies on the measurement of a single physical quantity, such as heat flux density or local density of states. However, these single measurement methods cannot simultaneously acquire comprehensive information on multiple physical quantities, resulting in an inability to fully reveal the energy transfer mechanism at the extreme scale. Traditional probe techniques, such as scanning tunneling microscopy (STM), thermal scanning microscopy (SThM), and scanning near-field optical microscopy (s-SNOM), can measure certain specific physical quantities, but they generally have the following shortcomings: first, the measurement function is limited, and it is impossible to obtain multi-dimensional information simultaneously; second, the spatial resolution and measurement accuracy are limited, making it difficult to meet the measurement requirements at the extreme scale. Summary of the Invention

[0003] In view of the above-mentioned problems, namely, the measurement function is limited and cannot obtain multi-dimensional information at the same time; and the spatial resolution and measurement accuracy are limited and cannot meet the measurement requirements at extreme scales, this invention is proposed.

[0004] Therefore, the purpose of this invention is to provide a multimodal probe.

[0005] To solve the above-mentioned technical problems, the present invention provides the following technical solution: a multimodal probe, comprising, Probe body; The probe tip is connected to the probe body; An enhancement component, disposed on the surface of the probe tip, is used to enhance the near-field scattering spectral signal between the probe and the sample; A thermal sensing unit is disposed at the tip of the probe and is used to collect the heat exchange between the probe and the sample; An external excitation light source, focused at the tip of the probe, is used to excite thermal radiation between the probe and the sample surface; and A signal synchronization processing unit, connected to the probe body, is used to synchronously collect near-field scattering spectral signals and thermal signals.

[0006] As a preferred embodiment of the multimodal probe of the present invention, the probe tip has a nanoscale sharp structure to achieve spatial resolution measurement at the sub-nanometer to nanoscale.

[0007] As a preferred embodiment of the multimodal probe of the present invention, the probe tip has a multi-layer structure, including a protective inner layer, a metal layer and a ceramic layer.

[0008] As a preferred embodiment of the multimodal probe of the present invention, the enhancement component is provided with a plurality of periodically arranged gratings, the plurality of gratings having the same width and being equally spaced on the probe tip surface, and the diameter of the plurality of gratings changing with the curvature of the probe tip.

[0009] As a preferred embodiment of the multimodal probe of the present invention, the temperature control unit electrically connected to the probe body achieves temperature control of the probe tip through closed-loop temperature control or constant power control.

[0010] In a preferred embodiment of the multimodal probe of the present invention, the temperature control unit includes a bridge feedback control circuit, which is electrically connected to the probe body.

[0011] As a preferred embodiment of the multimodal probe of the present invention, the external excitation light source is focused onto the probe tip to excite thermal radiation on the probe and the sample surface.

[0012] To solve the above-mentioned technical problems, the present invention also provides the following technical solution: a probe thermal transfer measurement method, comprising a multimodal probe, and the following steps: The external excitation light source is provided to excite the sample region with a mid-infrared broadband or tunable spectrum. The probe tip is controlled to approach the sample and a scanning or dwell measurement is established within a preset probe-sample spacing range; The near-field scattering spectral signal and thermal signal at the tip of the probe are acquired simultaneously. Modulation and demodulation processing of near-field scattering spectral signals are performed to obtain the local density of states of thermal radiation; The thermal signal is processed and converted to obtain the heat flux density; The local density of states of thermal radiation and the heat flux density are jointly inverted or decoupled to output the analysis results of the energy transfer mechanism.

[0013] As a preferred embodiment of the probe heat transfer measurement method of the present invention, the joint inversion or decoupling includes the following steps: Spectral analysis was performed on the near-field scattering spectral signal to extract the spectral features of different frequency components, and the characteristic spectral peaks of photon contributions were identified by combining theoretical models. When performing multi-physics joint inversion, the total heat flux density measured by the thermal response signal is compared with the radiation heat flux density inverted by the near-field scattering spectrum. The difference between the two is the non-radiative contribution of heat flux. When performing joint frequency-spatial domain analysis, the relationship between heat flux density and spectral signal as a function of spacing is measured by changing the probe-sample spacing, and the contribution of different energy-carrying particles is distinguished by the spacing dependence. When performing model fitting, a theoretical model of thermal transport of multi-energy particles is established based on fluctuation electrodynamics and phonon transport theory. The experimental data is then fitted using least squares to quantitatively separate the contribution ratios of photons, phonons, and electrons.

[0014] As a preferred embodiment of the probe thermal transfer measurement method of the present invention, the method includes the following steps: controlling the probe tip to approach the sample and performing scanning or dwell measurement within a preset probe-sample spacing range. The relative displacement between the probe and the sample is measured in real time using a laser interferometric ranging device. The relative position between the probe and the sample is adjusted by a piezoelectric ceramic actuator so that the probe-sample distance is within a preset range; The stability of the measurement spacing is ensured by using a position detector to assist in displacement detection and vibration suppression. Scanning or dwelling measurements are performed within a preset probe-sample spacing range to obtain near-field scattering spectral and thermal signals at different spacings.

[0015] The advantages of this invention are: it can simultaneously and accurately measure the local density of states of thermal radiation and the heat flux density, providing complete data support for the analysis of the thermal transport mechanism of multi-energy-carrying particles; it achieves high spatial resolution and high-precision measurement at the extreme scale by employing a nanoscale sharp probe and high-precision temperature control in synergy; the signal decoupling technology can separate the contributions of different energy-carrying particles such as photons, phonons, and electrons, and reconstruct the energy transfer process at the extreme scale; this probe is applicable to various micro- and nano-materials and integrated circuit heat dissipation applications, and has broad application prospects; the technical solution provided by this invention can not only promote the progress of nanoscale heat transfer research, but also provide strong technical support for innovative research in the fields of microelectronics, thermal management, and nanomaterials. Attached Figure Description

[0016] To more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the following description of the embodiments will be briefly introduced. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1This is a schematic diagram of the overall structure of the probe body of a multimodal probe.

[0018] Figure 2 This is a schematic diagram of the internal cross-sectional structure of the probe tip of a multimodal probe.

[0019] Figure 3 This is a schematic diagram of the overall structure of a multimodal probe.

[0020] Figure 4 This is a flowchart of a probe heat transfer measurement method.

[0021] Figure 5 This is a schematic diagram showing the test signal and heat flux density as a function of spacing in a probe heat transfer measurement method.

[0022] Reference numerals: 1. Probe body; 11. Probe tip; 111. Protective inner layer; 112. Metal layer; 113. Ceramic layer; 12. Reinforcement component; 121. Grating; 2. Thermal sensing unit; 3. Temperature control unit; 31. Bridge feedback control circuit; 4. Signal synchronization processing unit; 5. External excitation light source. Detailed Implementation

[0023] To make the above-mentioned objects, features and advantages of the present invention more apparent and understandable, the specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

[0024] Many specific details are set forth in the following description in order to provide a full understanding of the invention. However, the invention may also be practiced in other ways different from those described herein, and those skilled in the art can make similar extensions without departing from the spirit of the invention. Therefore, the invention is not limited to the specific embodiments disclosed below.

[0025] Secondly, the term "an embodiment" or "embodiment" as used herein refers to a specific feature, structure, or characteristic that may be included in at least one implementation of the present invention. The phrase "in one embodiment" appearing in different places throughout this specification does not necessarily refer to the same embodiment, nor is it a single embodiment or an embodiment selectively excluded from other embodiments.

[0026] Secondly, the present invention is described in detail with reference to the schematic diagrams. When detailing the embodiments of the present invention, for ease of explanation, the cross-sectional views illustrating the device structure may be partially enlarged, not according to the usual scale. Furthermore, the schematic diagrams are merely examples and should not limit the scope of protection of the present invention. In addition, actual fabrication should include the three-dimensional spatial dimensions of length, width, and depth.

[0027] Example Reference Figure 1 - Figure 3As a first embodiment of the present invention, a multimodal probe is provided. This device includes a probe body 1 and a probe tip 11. The probe tip 11 is located on one side of the probe body 1 and is conical. An enhancement component 12 is disposed on the surface of the probe tip 11 to enhance the near-field scattering spectral signal between the probe and the sample. A thermal sensing unit 2 is disposed on one side of the probe tip 11 to collect heat exchange between the probe and the sample. The external excitation light source 5 is focused onto the probe tip 11, and the signal synchronization processing unit 4, which is electrically connected to the probe body 1 under the enhancement component 12 and the thermal sensing unit 2, performs synchronous collection and processing of near-field scattering spectral signals and thermal signals.

[0028] Among them, the probe tip 11 is a nanoscale sharp structure with a radius of curvature of 20~30nm, so as to realize spatial resolution measurement at the sub-nanometer to nanoscale, and can ensure high-precision signal acquisition at the extreme scale.

[0029] Specifically, the probe tip 11 has a multi-layer structure, including a protective inner layer 111, a metal layer 112 and a ceramic layer 113, which can be arranged from the inside to the outside as a protective inner layer 111, a metal layer 112, a ceramic layer 113 and a metal layer 112. The inner protective layer 111 is made of silicon dioxide and has insulating properties. As the core support structure of the probe tip 11, the inner protective layer 111 prevents the probe tip 11 from deforming or breaking during measurement. The metal layer 112 is made of a highly conductive metal material, such as gold, palladium, platinum, silver, tungsten, nickel, copper, and chromium. The surface metal layer 112 is key to exciting thermal radiation signals and can connect the thermal sensing unit 2 with other circuits. It can respond quickly to temperature changes and improve the response speed and sensitivity of the thermal sensing unit 2. The ceramic layer 113 can be made of silicon nitride. It can not only serve as a thermal isolation layer to control the heat flow transfer path, but also as an electrical isolation layer to prevent electrical short circuits between different metal layers 112.

[0030] Furthermore, the enhancement component 12 is provided with a plurality of periodically arranged gratings 121, the plurality of gratings 121 having the same width and being equally spaced on the surface of the probe tip 11, and the diameter of the plurality of gratings 121 changing with the curvature of the probe tip 11. Among them, the enhancement component 12 is mainly used to enhance the near-field scattering signal between the probe and the sample. The physical mechanism by which the enhancement component 12 on the surface of the probe tip 11 can enhance the near-field scattering signal is mainly due to the excitation and coupling of surface electromagnetic modes. The grating 121 can provide additional wave vector compensation, so that the incident light and the evanescent wave mode (such as surface plasmons and surface phonon polaritons) on the sample surface can achieve momentum matching, thereby efficiently exciting these surface electromagnetic modes. That is, the grating 121 excites surface electromagnetic resonance, efficiently couples the incident light energy to the near-field region, and efficiently scatters the near-field evanescent wave to the far field, thereby enhancing the near-field spectral signal. Among them, such as Figure 2 As shown, the probe tip 11 integrates a thermal sensing unit 2 for monitoring the heat flux density between the probe and the sample. The thermal sensing unit 2 measures the thermal response of the probe through a resistance temperature detector (RTD) or thermocouple sensor. The electrical change of the thermal sensing unit 2 characterizes the temperature change, thereby acquiring heat flux density data. The thermal sensing unit 2 can detect the heat exchange process between the probe tip 11 and the sample in real time and accurately capture heat flux information. The heat flux density data is acquired by the thermal sensing unit 2 integrated in the probe tip 11. The thermal sensing unit 2 uses a thermocouple or RTD sensor to monitor the heat exchange process when the probe is in contact with or near-field coupled to the sample. When there is a temperature difference between the probe tip 11 and the sample, the heat flux will flow from the high temperature region to the low temperature region, causing a temperature change in the probe tip 11. This temperature change is converted into an electrical signal such as resistance value or thermoelectric potential by the thermal sensing unit 2. After amplification and analog-to-digital conversion by the bridge feedback control circuit 31, combined with the calibrated sensing coefficients (such as the temperature coefficient of resistance and Seebeck coefficient), the corresponding heat flux density value can be calculated.

[0031] Furthermore, the temperature control unit 3, which is electrically connected to the probe body 1, controls the temperature of the probe tip 11 through closed-loop temperature control or constant power control.

[0032] The temperature control unit 3 includes a bridge feedback control circuit 31, which is electrically connected to the probe body 1. Through closed-loop control or constant power control, it achieves precise adjustment of the temperature of the probe tip 11. The temperature control unit 3 can suppress measurement errors caused by temperature fluctuations, thereby suppressing environmental drift and improving the stability and repeatability of heat flux density measurements and long-term measurements.

[0033] Furthermore, the external excitation light source 5 is focused onto the probe tip 11 to excite thermal radiation from the probe and the sample surface. The external excitation light source 5 is used to provide a light source covering the mid-infrared band from 1.3 μm to 4.5 μm to excite the sample surface to generate thermal radiation signals.

[0034] Furthermore, the signal synchronization processing unit 4 is used to simultaneously process near-field scattering spectral signals and thermal signals. The information collected by the cadmium telluride MCT detector and the thermal information collected by the probe bridge are then processed by the system at the back end. The near-field scattering spectral signals are collected by the cadmium telluride (MCT) detector (liquid nitrogen-cooled mid-infrared detector) to obtain highly sensitive spectral data; the thermal signals are collected by the thermocouple or thermistor integrated on the probe tip 11 and amplified and converted to digital by the bridge feedback control circuit 31. The synchronously collected data mainly includes two types: one is near-field scattering spectral data (i.e., the intensity spectrum of scattered light at different wavenumbers or wavelengths, the amplitude and phase information extracted after modulation and demodulation), which is used to invert the local density of states of thermal radiation; the other is thermal signals (i.e., the changes in electrical quantities of the thermal sensing unit, which are converted into temperature changes or heat flux density values ​​after calibration).

[0035] During operation, the external excitation light source 5 is activated to provide a light source covering the mid-infrared band from 1.3 μm to 4.5 μm. The external excitation light source 5 is focused onto the probe tip 11 to excite thermal radiation on the probe and sample surface, so that the distance between the probe and sample reaches the preset range of 0.1 nm to 2 nm. The stability of the measurement distance is ensured by displacement detection and vibration suppression assisted by a position detector. During this process, the enhancement component 12 on the surface of the probe tip 11 efficiently couples the incident light energy to the near-field region by exciting surface electromagnetic resonance and efficiently scatters the near-field evanescent wave to the far field, thereby enhancing the near-field spectral signal. At the same time, thermal... Sensing unit 2 monitors the heat flux density between the probe and the sample in real time. When there is a temperature difference between the probe tip 11 and the sample, heat will flow from the high-temperature region to the low-temperature region, causing a temperature change in the probe tip 11. This temperature change is converted into an electrical signal such as resistance or thermoelectric potential by thermal sensing unit 2. After amplification and analog-to-digital conversion by bridge feedback control circuit 31, combined with the calibrated sensing coefficient, the corresponding heat flux density value can be calculated. Temperature control unit 3 controls the temperature of the probe tip 11 through closed-loop temperature control or constant power control, achieving precise temperature adjustment of the probe tip 11. The section aims to suppress measurement errors caused by temperature fluctuations, thereby mitigating environmental drift and improving the stability and repeatability of heat flux density measurements and long-term measurements. The signal synchronization processing unit 4 simultaneously processes near-field scattering spectral signals and thermal signals. Information collected by the cadmium telluride MCT detector and thermal information collected by the probe bridge are then processed at the back end of the system. The near-field scattering spectral signal is collected by the cadmium telluride MCT detector to obtain highly sensitive spectral data. The thermal signal is acquired by a thermocouple or resistance temperature sensor integrated into the probe tip 11 and amplified and converted from analog to digital by the bridge feedback control circuit 31. The data collected in this step mainly includes two categories: first, near-field scattering spectral data, i.e., the amplitude and phase information extracted after modulation and demodulation of the intensity spectrum of scattered light at different wavenumbers or wavelengths, which is used to invert the local density of states of thermal radiation; second, thermal signals, i.e., the changes in electrical quantities of the thermal sensing unit are converted into temperature changes or heat flux density values ​​after calibration. Finally, the near-field scattering spectral signals and thermal signals are collected and processed synchronously through the signal synchronization processing unit 4 to achieve synchronous and accurate measurement of the local density of states of thermal radiation and heat flux density at the ultimate scale, providing key experimental means for in-depth analysis of the energy transport mechanism of multi-energy-carrying particles such as photons, phonons, and electrons.

[0036] Reference Figure 1 - Figure 5 This embodiment also provides a probe heat transfer measurement method, including a multimodal probe, and the following steps: S100: Provides an external excitation light source 5 to excite the sample area with a mid-infrared broadband or tunable spectrum. S200: Controls the probe tip 11 to approach the sample and establishes a preset probe-sample spacing interval for scanning or dwell measurement; S300: Synchronously acquires near-field scattering spectral and thermal signals from probe tip 11; S400: Modulates and demodulates near-field scattering spectral signals to obtain thermal radiation local state density; S500: Performs closed-loop temperature control or constant power processing on thermal signals and converts them into heat flux density. S600: Performs joint inversion or decoupling of local density of states of thermal radiation and heat flux density, and outputs the analysis results of energy transfer mechanism.

[0037] Specifically, in the S500, under closed-loop temperature control mode, the temperature control unit 3 monitors the temperature of the probe tip 11 in real time through the bridge feedback control circuit 31, and adjusts the heating power through a PID control algorithm to keep the temperature of the probe tip 11 constant. At this time, the heat flux density is calculated by the heating power required to maintain the constant temperature of the probe tip 11.

[0038] In this embodiment of the application, step S600, which decouples the contributions of different energy-carrying particles such as photons, phonons, and electrons, is performed using the following algorithm flow, including the following steps: A1: When performing spectral analysis, Fourier transform is performed on the near-field scattering spectral signal to extract the spectral features of different frequency components, and the characteristic spectral peaks of photon contribution are identified in combination with theoretical models; A2: When performing multi-physics joint inversion, the total heat flux density measured by the thermal response signal is compared with the radiation heat flux density inverted by the near-field scattering spectrum. The difference between the two is the non-radiative contribution of heat flux. A3: When performing joint frequency domain and spatial domain analysis, the relationship between heat flux density and spectral signal as a function of distance is measured by changing the probe-sample distance, and the contribution of different energy-carrying particles is distinguished by distance dependence. A4: When performing model fitting, a theoretical model of thermal transport of multi-energy particles is established based on fluctuation electrodynamics and phonon transport theory. The experimental data is then fitted using least squares to quantitatively separate the contribution ratios of photons, phonons, and electrons.

[0039] The decoupling criteria are mainly based on multi-dimensional constraints such as characteristic frequency dependence, spacing dependence, temperature dependence, and polarization dependence to ensure the reliability of the decoupling results. Finally, this processing unit can extract the local density of states of thermal radiation and heat flux density information at the ultimate scale.

[0040] In this embodiment of the application, step S200, which involves controlling the probe tip 11 to approach the sample and establishing a preset probe-sample spacing range for scanning or dwelling measurements, includes the following steps: B1: Real-time measurement of the relative displacement between the probe and the sample using a laser interferometric ranging component; B2: Adjust the relative position between the probe and the sample using a piezoelectric ceramic actuator to bring the probe-sample distance within a preset range; B3: The stability of the measurement spacing is ensured by using a position detector to assist in displacement detection and vibration suppression; B4: Perform scanning or dwell measurements within the preset probe-sample spacing range to obtain near-field scattering spectral and thermal signals at different spacings.

[0041] First, precise displacement control is achieved by using a high-precision piezoelectric ceramic combined with a position detector (PSD) to adjust the relative position between the probe and the sample, ensuring the stability of the measurement spacing.

[0042] Secondly, it is used for real-time monitoring and adjustment of probe temperature, enabling high-precision temperature control of the probe from room temperature to 700K, so as to avoid interference from ambient temperature fluctuations on the measurement results.

[0043] like Figure 5 The results demonstrate the verification of the probe of this invention in measuring thermal radiation characteristics at the extreme scale, including two sub-figures: the relationship between heat flux density and spacing and the spectral distribution of local density of states at different spacings. Together, they confirm the effectiveness and reliability of the probe in nanoscale energy transfer measurements.

[0044] The relationship between heat flux density and spacing is shown in the subplot: the horizontal axis represents the probe-sample spacing L (unit: nm), and the vertical axis represents the heat flux density Q (unit: kW / m²). 2 The solid line in the figure represents the measurement results of the probe of this invention on a silicon carbide (SiC) planar sample, and the dashed line is the blackbody far-field thermal radiation heat flux reference line. It can be clearly observed from the figure that as the probe-sample distance gradually decreases from 20 nm to about 10 nm, the heat flux density increases from approximately 400 kW / m². 2 Rise sharply to approximately 1200 kW / m 2 The near-field radiation enhancement effect exhibits a strong distance dependence. This trend accurately captures the core characteristic of the near-field radiation enhancement effect: when the distance shrinks to less than the characteristic wavelength of thermal radiation, the photon tunneling effect causes the heat flux density to far exceed the blackbody radiation limit. In stark contrast, the far-field blackbody radiation reference line remains horizontal and does not change with the distance. This result fully demonstrates that the probe of this invention can detect changes in heat flux density at the limiting scale with high sensitivity, providing a reliable experimental means for studying near-field radiative heat transport.

[0045] The local density of states spectral distribution under different spacings is shown in the figure. The horizontal axis of this subplot represents the angular frequency (in rad / s), covering the surface phonon resonance range of SiC material (approximately 1.7 × 10¹⁴ rad / s to 1.86 × 10¹⁴ rad / s); the vertical axis represents the local density of states level, using a logarithmic scale. The curves with different markings in the figure represent the measurement results when the probe-sample spacing is 50 nm, 10 nm, 5 nm, 2 nm, and 1 nm, respectively. Two key features can be observed from the spectral distribution: First, all curves at all spacings show a sharp peak at approximately 1.79 × 10¹⁴ rad / s, which perfectly matches the surface phonon resonance frequency of SiC material and can accurately reflect the intrinsic properties of the material; second, as the probe-sample spacing gradually decreases from 50 nm to 1 nm, the intensity of this peak increases significantly from approximately 10⁻¹⁵ to over 10⁻¹¹, an increase of nearly four orders of magnitude. This phenomenon indicates that the smaller the distance between the probe and the sample, the stronger its ability to detect the local electromagnetic state density on the sample surface.

[0046] Figure 5 Together, these findings validate the core advantages of the probe of this invention: It not only demonstrates that the probe can theoretically and accurately measure heat flux density that varies drastically with spacing at the extreme scale, reflecting high sensitivity to near-field energy transfer; it also proves that the probe can simultaneously acquire local density of states spectra with material characteristic frequencies, and that the signal intensity significantly increases as the spacing decreases, demonstrating high spatial resolution and physical realism. The combined figures fully illustrate that the probe of this invention can achieve simultaneous and accurate measurement of local density of states of thermal radiation and heat flux density at the extreme scale of 0.1 nm to 2 nm, providing a key experimental means for in-depth analysis of the energy transport mechanisms of multi-energy-carrying particles such as photons, phonons, and electrons, thus verifying the advanced nature and practicality of this invention.

[0047] It should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and are not intended to limit it. Although the present invention has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solutions of the present invention without departing from the spirit and scope of the technical solutions of the present invention, and all such modifications or substitutions should be covered within the scope of the claims of the present invention.

Claims

1. A multimodal probe, characterized in that: include, Probe body (1); The probe tip (11) is connected to the probe body (1). An enhancement component (12) is disposed on the surface of the probe tip (11) for enhancing the near-field scattering spectral signal between the probe and the sample; A thermal sensing unit (2) is disposed at the tip of the probe (11) for collecting the heat exchange between the probe and the sample; An external excitation light source (5) is focused on the probe tip (11) to excite thermal radiation between the probe and the sample surface; as well as The signal synchronization processing unit (4) is connected to the probe body (1) and is used to synchronously collect and process near-field scattering spectral signals and thermal signals.

2. The multimodal probe according to claim 1, characterized in that: The probe tip (11) has a nanoscale sharp structure to achieve spatial resolution measurements at the sub-nanometer to nanoscale.

3. The multimodal probe according to claim 2, characterized in that: The probe tip (11) has a multi-layer structure, including a protective inner layer (111), a metal layer (112) and a ceramic layer (113).

4. The multimodal probe according to claim 3, characterized in that: The enhancement component (12) is provided with a plurality of periodically arranged gratings (121), the plurality of gratings (121) having the same width and being equally spaced on the surface of the probe tip (11), and the diameter of the plurality of gratings (121) changing with the curvature of the probe tip (11).

5. The multimodal probe according to claim 4, characterized in that: The temperature control unit (3), which is electrically connected to the probe body (1), controls the temperature of the probe tip (11) through closed-loop temperature control or constant power control.

6. The multimodal probe according to claim 5, characterized in that: The temperature control unit (3) includes a bridge feedback control circuit (31), which is electrically connected to the probe body (1).

7. The multimodal probe according to claim 6, characterized in that: The external excitation light source (5) is focused onto the probe tip (11) to excite thermal radiation on the probe and sample surface.

8. A probe-based method for measuring thermal transfer, characterized in that: Including the multimodal probe as described in any one of claims 1 to 7, and the following steps: The external excitation light source (5) is provided to excite the sample region with a mid-infrared broadband or tunable spectrum; Control the probe tip (11) to approach the sample and establish a preset probe-sample spacing interval for scanning or dwell measurement; The near-field scattering spectral signal and thermal signal of the probe tip (11) are acquired simultaneously; Modulation and demodulation processing of near-field scattering spectral signals are performed to obtain the local density of states of thermal radiation; The thermal signal is processed and converted to obtain the heat flux density; The local density of states of thermal radiation and the heat flux density are jointly inverted or decoupled to output the analysis results of the energy transfer mechanism.

9. The probe heat transfer measurement method according to claim 8, characterized in that: The joint inversion or decoupling process includes the following steps: Spectral analysis was performed on the near-field scattering spectral signal to extract the spectral features of different frequency components, and the characteristic spectral peaks of photon contributions were identified by combining theoretical models. When performing multi-physics joint inversion, the total heat flux density measured by the thermal response signal is compared with the radiation heat flux density inverted by the near-field scattering spectrum. The difference between the two is the non-radiative contribution of heat flux. When performing joint frequency-spatial domain analysis, the relationship between heat flux density and spectral signal as a function of spacing is measured by changing the probe-sample spacing, and the contribution of different energy-carrying particles is distinguished by the spacing dependence. When performing model fitting, a theoretical model of thermal transport of multi-energy particles is established based on fluctuation electrodynamics and phonon transport theory. The experimental data is then fitted using least squares to quantitatively separate the contribution ratios of photons, phonons, and electrons.

10. The probe heat transfer measurement method according to claim 9, characterized in that: Controlling the probe tip (11) to approach the sample and establish a preset probe-sample spacing range for scanning or dwelling measurements includes the following steps: The relative displacement between the probe and the sample is measured in real time using a laser interferometric ranging device. The relative position between the probe and the sample is adjusted by a piezoelectric ceramic actuator so that the probe-sample distance is within a preset range; The stability of the measurement spacing is ensured by using a position detector to assist in displacement detection and vibration suppression. Scanning or dwelling measurements are performed within a preset probe-sample spacing range to obtain near-field scattering spectral and thermal signals at different spacings.

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