Terahertz spatial light modulator

Abstract

This invention discloses a terahertz spatial light modulator, comprising a substrate, a metasurface structure, and an organic electro-optic thin film. The metasurface structure, disposed on the substrate and serving as an electrode, comprises multiple metal metasurface units. The organic electro-optic thin film covers the metasurface structure. By disposing a metasurface structure comprising multiple metal metasurface units on the substrate and covering it with an organic electro-optic thin film, and by changing the refractive index of the thin film using an applied electric field, rapid modulation of the terahertz transmittance is achieved. The metasurface enhances the coupling between the local optical field and the electro-optic material, enabling low-power, high-contrast, and ultrafast-response electro-optic modulation and switching functions, while simultaneously improving modulation efficiency and reducing the drive threshold.

Description

Technical Field

[0001] This invention relates to the field of spatial light modulator technology, and more particularly to a terahertz spatial light modulator. Background Technology

[0002] Spatial light modulators are devices capable of controllably modulating parameters such as amplitude, phase, and polarization of a light field in both time and space. They can load information into one-dimensional or two-dimensional light fields, leveraging the ultra-wideband and parallel processing capabilities of light to achieve efficient optical information processing, optical interconnection, and optical computing. Currently, commercial spatial light modulators mainly operate in the visible and near-infrared bands, typically implemented as micromirror devices based on microelectromechanical systems (MEMS) and liquid crystal (LC) devices. Extending these devices directly to the terahertz band requires matching the microstructure size and liquid crystal layer thickness to the terahertz wavelength. This significantly increases the challenges in fabrication processes, driving voltage, and modulation speed, and also exacerbates material absorption losses and heat generation, making it difficult to meet the combined requirements of high resolution, high modulation efficiency, and low power consumption for terahertz imaging and communication.

[0003] Existing terahertz active modulation media generally suffer from problems such as slow modulation speed, high loss, small modulation amplitude, complex preparation and high cost. Summary of the Invention

[0004] The purpose of this invention is to at least solve one of the technical problems existing in the prior art, and to provide a terahertz spatial light modulator that can enhance the local field and electro-optic coupling through a metasurface structure, thereby achieving low power consumption, high contrast, and ultra-fast response electro-optic modulation and switching functions, while improving modulation efficiency and reducing the driving threshold.

[0005] This invention provides a terahertz spatial light modulator, comprising a substrate, a metasurface structure, and an organic electro-optic thin film, wherein:

[0006] The metasurface structure is disposed on the substrate and serves as an electrode, and includes multiple metal metasurface units;

[0007] The organic electro-optic thin film covers the metasurface structure.

[0008] According to some embodiments of the present invention, a terahertz spatial light modulator is provided in which a small asymmetric break is introduced into the metasurface structure to enable the metasurface structure to obtain a Fano-type resonance with a high quality factor.

[0009] According to some embodiments of the present invention, in a terahertz spatial light modulator, the organic electro-optic thin film covers the electrode so that the electro-optic material overlaps with the mode light field and the applied electric field.

[0010] According to some embodiments of the present invention, in a terahertz spatial light modulator, the spacing between two adjacent metal metasurface units in a direction parallel to the plane containing the metasurface structure is less than the operating wavelength of the terahertz spatial light modulator.

[0011] According to some embodiments of the present invention, the terahertz spatial light modulator is an organic electro-optic thin film formed by uniformly dispersing or dissolving the electro-optic active molecule JRD1 in polymethyl methacrylate.

[0012] According to some embodiments of the terahertz spatial light modulator provided by the present invention, the organic electro-optic thin film is prepared by the following steps:

[0013] The electro-optic active molecule JRD1 and the polymethyl methacrylate are dissolved in a common solvent in a predetermined ratio;

[0014] A uniform thin film is formed on the metasurface structure by spin coating.

[0015] The uniform thin film is subjected to electric field polarization treatment;

[0016] The organic electro-optic film is obtained by high-temperature drying and curing to form a stable dark green composite film.

[0017] According to some embodiments of the present invention, the terahertz spatial light modulator provided has an electro-optically active molecule JRD1 comprising 30% to 70%.

[0018] According to some embodiments of the present invention, the terahertz spatial light modulator has a quartz substrate.

[0019] The terahertz spatial light modulator provided in the embodiments of the present invention has at least the following beneficial effects: by setting a metasurface structure including multiple metal metasurface units on the substrate and covering the metasurface structure with an organic electro-optic thin film, the refractive index of the thin film can be changed by an external electric field, thereby realizing the rapid modulation of terahertz transmittance. The metasurface structure can enhance the coupling between the local optical field and the electro-optic material, realize low power consumption, high contrast, and ultra-fast response electro-optic modulation and switching functions, while improving modulation efficiency and reducing the driving threshold.

[0020] Other features and advantages of the invention will be set forth in the description which follows, and will be apparent in part from the description, or may be learned by practicing the invention. The objects and other advantages of the invention may be realized and obtained by means of the structures particularly pointed out in the description, claims, and drawings. Attached Figure Description

[0021] The accompanying drawings are provided to further understand the technical solutions of the present invention and constitute a part of the specification. They are used together with the embodiments of the present invention to explain the technical solutions of the present invention, and do not constitute a limitation on the technical solutions of the present invention.

[0022] The present invention will be further described below with reference to the accompanying drawings and embodiments;

[0023] Figure 1 This is a schematic diagram illustrating the lateral periodicity variation of the surface structure of a terahertz spatial light modulator provided in an embodiment of the present invention;

[0024] Figure 2 This is a schematic diagram of the BIC mode variation of a terahertz spatial light modulator provided in an embodiment of the present invention;

[0025] Figure 3 This is a schematic diagram of the resonant quality factor of a terahertz spatial light modulator provided in an embodiment of the present invention;

[0026] Figure 4 This is a schematic diagram of the unit structure of a terahertz spatial light modulator provided in an embodiment of the present invention;

[0027] Figure 5 This is a schematic diagram showing the correspondence between structural asymmetric perturbation and quality factor of a terahertz spatial light modulator provided in an embodiment of the present invention;

[0028] Figure 6 This is a schematic diagram of the optical field of a terahertz spatial light modulator provided in an embodiment of the present invention;

[0029] Figure 7 This is a schematic diagram illustrating the relationship between transmittance and refractive index of a terahertz spatial light modulator provided in an embodiment of the present invention;

[0030] Figure 8 This is a schematic diagram showing the correspondence between ΔT / T and frequency of a terahertz spatial light modulator provided in an embodiment of the present invention;

[0031] Figure 9 This is a schematic diagram of a 2×2 pixel organic electro-optic material composite metasurface spatial light modulator provided in an embodiment of the present invention;

[0032] Figure 10 This is a schematic diagram illustrating the experimental transmission amplitude variation ΔT / T and electric field relationship of a terahertz spatial light modulator provided in an embodiment of the present invention;

[0033] Figure 11 This is a schematic diagram illustrating the experimental phase change Δφ and electric field relationship of a terahertz spatial light modulator provided in an embodiment of the present invention;

[0034] Figure 12This is a schematic diagram showing the correspondence between the electric field change and the operating frequency ΔT / T of a terahertz spatial light modulator provided in an embodiment of the present invention.

[0035] Figure 13 This is a schematic diagram showing the correspondence between ΔT / T at the operating frequency and different states of a terahertz spatial light modulator provided in an embodiment of the present invention;

[0036] Figure 14 This is a schematic diagram showing the correspondence between ΔT / T and frequency in different states of a terahertz spatial light modulator provided in an embodiment of the present invention;

[0037] Figure 15 This is a schematic diagram showing the correspondence between peak electro-optic modulation and modulation frequency of a terahertz spatial light modulator provided in an embodiment of the present invention. Detailed Implementation

[0038] This section will describe in detail specific embodiments of the present invention. Preferred embodiments of the present invention are shown in the accompanying drawings. The purpose of the drawings is to supplement the textual description with graphics, so that people can intuitively and vividly understand each technical feature and overall technical solution of the present invention, but they should not be construed as limiting the scope of protection of the present invention.

[0039] In the description of the embodiments of the present invention, "several" means one or more, "multiple" means two or more, "greater than," "less than," "exceeding," etc. are understood to exclude the number itself, while "above," "below," "within," etc. are understood to include the number itself. "At least one" refers to one or more, and "at least one of the following" and similar expressions refer to any combination of these items, including any combination of single or multiple items. If "first," "second," etc., are used in the description, they are only for the purpose of distinguishing technical features and should not be construed as indicating or implying relative importance or implicitly indicating the number of indicated technical features or the order of the indicated technical features.

[0040] It should be noted that the terms "setting," "installing," and "connecting" in the embodiments of this invention should be interpreted broadly. Those skilled in the art can reasonably determine the specific meaning of the above terms in the embodiments of this invention in conjunction with the specific content of the technical solution. For example, the term "connection" can be a mechanical connection, an electrical connection, or a connection that allows for mutual communication; it can be a direct connection or an indirect connection through an intermediate medium.

[0041] It should be noted that the technical features involved in the various embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0042] Terahertz waves, with their unique spectral characteristics and enormous information carrying capacity, have shown broad application prospects in fields such as military security, biomedical diagnostics, non-destructive testing, and next-generation wireless communication. Current terahertz applications can be broadly categorized into three main areas: communication, imaging, and sensing. Terahertz imaging technology has been listed as one of the top 10 engineering research frontiers in the field of information and electronic engineering in 2022 by the Chinese Academy of Engineering's "Global Engineering Frontiers." However, the performance of related terahertz optoelectronic devices still falls far short of practical needs. In particular, spatial light modulators, which are key components for realizing terahertz communication, imaging, and sensing, directly determine crucial indicators such as system communication rate and capacity, imaging frame rate and spatial resolution, as well as sensing sensitivity and spectral resolution. Their performance has become a significant bottleneck restricting the further development of terahertz technology.

[0043] Spatial light modulators are devices capable of controllably modulating parameters such as amplitude, phase, and polarization of a light field in both time and space. They can load information into one-dimensional or two-dimensional light fields, leveraging the ultra-wideband and parallel processing capabilities of light to achieve efficient optical information processing, optical interconnection, and optical computing. Currently, commercial spatial light modulators mainly operate in the visible and near-infrared bands, typically implemented as micromirror devices based on microelectromechanical systems (MEMS) and liquid crystal (LC) devices. Extending these devices directly to the terahertz band requires matching the microstructure size and liquid crystal layer thickness to the terahertz wavelength. This significantly increases the challenges in fabrication, driving voltage, and modulation speed, and exacerbates material absorption losses and heat generation, making it difficult to meet the combined requirements of high resolution, high modulation efficiency, and low power consumption for terahertz imaging and communication. Furthermore, due to the weak response of natural materials and the limited intensity of light-matter interaction, the development of terahertz spatial light modulators based on single natural materials has been slow, necessitating the exploration of new materials, mechanisms, and structures to overcome existing technological bottlenecks.

[0044] To meet the application demands of terahertz technology, the development of high-performance spatial light modulators to overcome key bottlenecks in terahertz imaging and next-generation wireless communication is urgently needed. Metamaterials possess excellent subwavelength local field enhancement and electromagnetic manipulation capabilities, significantly enhancing the interaction intensity between light and matter, providing a new approach to overcome the efficiency and functional limitations of traditional natural material modulators. Precise design and manipulation of the spatial light wavefront based on metasurface principles can further expand the functional dimensions and diversity of metamaterials in electromagnetic wave modulation: on the one hand, by rationally designing the unit structure and its spatial arrangement, key parameters such as polarization, amplitude, phase, frequency, and wavefront morphology of electromagnetic waves can be flexibly controlled; on the other hand, the strong local field achieved by metasurfaces can effectively reduce the driving voltage while significantly reducing device thickness, meeting the demands for device miniaturization, integration, and low power consumption. Benefiting from these advantages, metasurface spatial light modulators show great application potential in the spatiotemporal control of optical fields. In recent years, they have made a series of important advances in high-speed modulation, holographic imaging, and beamforming, and are gradually becoming one of the core technical routes for overcoming the technical challenges of terahertz imaging and communication.

[0045] Organic electro-optic materials are typically composed of push-pull D–π–A chromophores: strong electron donors and acceptors achieve intramolecular charge transfer through conjugated π bridges, resulting in a large first-order hyperpolarizability. Chromophores are introduced into the polymer matrix through guest-host doping or chemical grafting, forming a macroscopic non-centrosymmetric structure with polarization orientation near the glass transition temperature (Tg), exhibiting significant second-order nonlinearity (χ²) and a high electro-optic coefficient. Compared to traditional inorganic crystals (such as LiNbO3), organic electro-optic systems possess higher electro-optic coefficients, lower dielectric constants, solution-compatible / low-temperature processing capabilities, and good on-chip integration compatibility, showing potential in on-chip optical modulators, ultrafast optics, and microwave photonics. Furthermore, the lack of lattice order in polymer systems effectively suppresses phonon-correlated absorption, thereby reducing transmission loss in the terahertz band. In recent years, free-space optical modulation based on organic electro-optic materials has achieved efficient modulation in the infrared band, with modulation speeds reaching GHz.

[0046] Metasurface spatial light modulators have the potential to break through the performance limits of natural materials and are of great significance for improving the overall performance of terahertz communication and imaging systems.

[0047] Existing terahertz active modulation media generally suffer from problems such as slow modulation speed, high loss, small modulation amplitude, complex preparation and high cost.

[0048] Based on this, the present invention focuses on the novel physical control mechanism of metasurfaces, introduces novel organic electro-optic materials as modulation media, and develops low-power, ultra-high-speed, and low-cost terahertz spatial light modulator devices.

[0049] Specifically, this invention provides a terahertz spatial light modulator that achieves low-power, high-contrast, and ultra-fast response electro-optic modulation and switching functions by enhancing the local field and electro-optic coupling through metasurface, while improving modulation efficiency and reducing the driving threshold.

[0050] The embodiments of the present invention will be further described below with reference to the accompanying drawings.

[0051] This invention provides a terahertz spatial light modulator, comprising a substrate, a metasurface structure, and an organic electro-optic thin film, wherein:

[0052] For example, the substrate is a quartz substrate.

[0053] The metasurface structure is disposed on a substrate and serves as an electrode, comprising multiple metallic metasurface units; specifically, such as Figure 1 As shown, doubling the lateral period of the metasurface structure from px / 2 to px will correspondingly shrink the Brillouin zone in the reciprocal space, causing the pattern originally located at the boundary (such as near X′) to be "folded" to the vicinity of the center point Γ, as... Figure 2 As shown. When the structure is perfectly symmetrical, this mode is almost uncoupled from the radiation channel, forming a BIC (Body Injection Channel), which minimizes energy leakage and results in an extremely high quality factor, such as... Figure 3 As shown;

[0054] Organic electro-optic thin films are coated on top of metasurface structures.

[0055] The terahertz spatial light modulator provided in this embodiment of the invention achieves rapid modulation of terahertz transmittance by setting a metasurface structure including multiple metal metasurface units on a substrate and covering the metasurface structure with an organic electro-optic thin film. This enables the material refractive index to be changed by an electric field. The metasurface can enhance the local field and electro-optic coupling, realizing low power consumption, high contrast, and ultra-fast response electro-optic modulation and switching functions, while improving modulation efficiency and reducing the driving threshold.

[0056] In some embodiments of the present invention, a tiny asymmetric break is introduced into the metasurface structure to enable the metasurface structure to form a high quality factor qBIC resonance, which is spectrally linear.

[0057] Understandably, introducing minute asymmetries or fabrication errors into actual devices can transform them into qBIC resonances that can be externally excited but still maintain a high Q, thus achieving better engineering usability.

[0058] In some embodiments of the present invention, the terahertz spatial light modulator is provided, in which an organic electro-optic thin film covers the electrode so that the electro-optic material overlaps with the mode light field and the applied electric field.

[0059] Specifically, metallic metasurface units are fabricated on a quartz substrate, and the metallic structure is simultaneously used as an electrode, such as... Figure 4 As shown, an organic electro-optic thin film (JRD1:PMMA) is coated on the surface to concentrate the light field (local field of qBIC mode) as much as possible near the electrode gap. Figure 6 As shown, this allows the applied electric field to be more concentrated on the organic material, improving the overlap efficiency of the "light field-electric field-material" interaction and reducing the difficulty of driving it. Since an ideal BIC cannot be directly excited, a controllable asymmetric structural perturbation is introduced to transform it into a qBIC mode. The asymmetry is represented by the parameter α, as shown... Figure 5 As shown. Simulation results show that this structure exhibits a typical Fano-type resonant transmission spectrum near approximately 0.70 THz, such as... Figure 7 As shown; changing the refractive index of the organic layer (Δn≈±0.01) can theoretically result in a GHz-level resonant frequency shift and a larger transmission modulation depth, for example, as shown in the reference. Figure 8 As shown, ΔT / T can reach about 25%, demonstrating the advantages of this organic electro-optic material composite metasurface design in electro-optic modulation.

[0060] In some embodiments of the present invention, the spacing between two adjacent metal metasurface units in a direction parallel to the plane containing the metasurface structure is less than the operating wavelength of the terahertz spatial light modulator.

[0061] In some embodiments of the present invention, the terahertz spatial light modulator is an organic electro-optic thin film formed by uniformly dispersing or dissolving the electro-optic active molecule JRD1 in polymethyl methacrylate.

[0062] In some embodiments of the terahertz spatial light modulator provided by the present invention, the organic electro-optic thin film is prepared by the following steps:

[0063] The highly electro-optically active molecule JRD1 and polymethyl methacrylate are dissolved in a common solvent in a predetermined ratio; specifically, the proportion of the electro-optically active molecule JRD1 is 30% to 70%.

[0064] A uniform thin film was formed on a metasurface structure by spin coating.

[0065] Electric field polarization treatment is applied to uniform thin films;

[0066] High-temperature drying and curing process is carried out to form a stable dark green composite film, thus obtaining an organic electro-optic film.

[0067] Specifically, such as Figure 9 As shown, Figure 9The main focus was on fabricating a 2×2 pixel organic electro-optic material composite metasurface spatial light modulator. The device integrates the metasurface structure with the electrodes, with an electrode gap of approximately 2.5 μm. The surface is covered with organic electro-optic material, and the fabrication process only requires relatively simplified steps such as spin coating and polarization, reducing fabrication difficulty and cost. Terahertz transmission performance was characterized using a terahertz time-domain spectroscopy (THz-TDS) system. A DC bias voltage (approximately -250 V to +250 V, corresponding to a maximum electric field of approximately 100 V / μm) was applied. The qBIC resonance was observed around 0.70 THz, with a quality factor of approximately 32.26. With increasing electric field, both the transmission amplitude change ΔT / T and phase change Δφ significantly increased. Figure 10 and Figure 11 As shown, the overall trend is approximately linear with increasing electric field: a positive electric field causes a redshift of the resonance, and a negative electric field causes a blueshift. The total tunable range is approximately 2 GHz, and based on this, the electro-optic coefficient r33 at 0.7 THz is estimated to be approximately 40 pm / V. Figure 12 As shown. Simultaneously, the device leakage current is very small (e.g., approximately 2.9 μA at 266 V), indicating its ability to achieve low-power electro-optic modulation. Under different DC bias voltages, the transmission modulation depth varies with the electric field, and the stronger the electric field, the deeper the modulation. At the operating point OP1, where the modulation depth is maximum, with a ±250 V DC bias, the maximum relative transmission modulation depth can reach 14.6%, while the phase modulation amount Δφ = φ+−φ− can reach a maximum of -3.34° at OP2.

[0068] The experiment used a collimated terahertz beam with a diameter of approximately 5 mm for normal incidence, allowing the beam to simultaneously and uniformly cover four pixels. Each of the four pixels was driven by a separate voltage signal, enabling both individual pixel control and combined control of multiple pixels. The results showed that the more pixels N were driven, the greater the overall transmission modulation depth ΔT / T, exhibiting a monotonically increasing trend. Figure 13 As shown, this demonstrates that all pixels respond consistently under the same driving conditions. Further examination of the frequency response of the modulation depth can be found by referring to... Figure 14 As shown, when driven by different pixel combinations, the peak position still coincides with the operating point of a single pixel structure, and the frequency corresponding to the maximum modulation hardly drifts. This phenomenon indirectly proves that: on the one hand, the resonant frequency of the composite metasurface is relatively robust to array size and pixel switching; on the other hand, the device fabrication consistency is good (consistent pixel geometry, uniform JRD1:PMMA film thickness and coverage), meeting the consistency and repeatability requirements of spatial light modulators.

[0069] in addition, Figure 15The dynamic electro-optic modulation bandwidth of the device was evaluated: a square wave voltage signal with an amplitude of 0–200V and a duty cycle of 50% was applied to the device, and the transmission modulation depth as a function of the modulation frequency ƒmod was measured at the device's operating point OP1. After normalization based on the modulation depth of 10Hz and expressed in dB, it was found that within the measurable range of 10 Hz–1 MHz, the response was always above the -3 dB baseline with almost no significant attenuation, indicating that the device's electro-optic modulation bandwidth reaches at least 1 MHz and has not yet reached its upper limit. At the same time, since the square wave duty cycle is 50%, the peak modulation depth under AC drive is slightly lower than that under pure DC bias, but overall it proves that the device can still maintain stable spatial modulation capability over a wide frequency band.

[0070] In summary, the terahertz spatial light modulator provided in this application, based on band folding and controllable symmetry breaking, achieves high-quality factor qBIC resonances that can be directly excited in free space. By combining organic electro-optic materials (JRD1:PMMA) with metasurfaces, low-power electro-optic modulation capabilities are obtained, and amplitude-phase coordinated modulation is achieved: a frequency tunable range of approximately 2 GHz is achieved near 0.70 THz, with a maximum transmission modulation depth of 14.6% at OP1 and a phase modulation peak of approximately −3.34°. The fabrication, integration, and independent addressing of a 2×2 pixel spatial light modulator are completed, verifying pixel response consistency and array-based modulation stability. A stable dynamic modulation response is maintained within the 10 Hz–1 MHz frequency band, indicating that the device modulation bandwidth reaches at least 1 MHz, laying the foundation for larger-scale pixel arrays and higher-speed applications.

[0071] It will be understood by those skilled in the art that all or some of the steps and systems in the methods disclosed above can be implemented as software, firmware, hardware, and suitable combinations thereof. Some or all of the physical components can be implemented as software executed by a processor, such as a central processing unit, digital signal processor, or microprocessor, or as hardware, or as an integrated circuit, such as an application-specific integrated circuit. Such software can be distributed on a computer-readable medium, which may include computer storage media or non-transitory media and communication media or transient media. As is known to those skilled in the art, the term computer storage media includes volatile and non-volatile, removable and non-removable media implemented in any method or technology for storing information such as computer-readable instructions, data structures, program modules, or other data. Computer storage media includes, but is not limited to, RAM, ROM, EEPROM, flash memory or other memory technologies, CD-ROM, digital versatile disc DVD or other optical disc storage, magnetic cartridges, magnetic tape, disk storage or other magnetic storage devices, or any other medium that can be used to store desired information and is accessible to a computer. Furthermore, as is known to those skilled in the art, communication media typically contain computer-readable instructions, data structures, program modules, or other data in modulated data signals such as carrier waves or other transmission mechanisms, and may include any information delivery medium.

[0072] The embodiments of the present invention have been described in detail above with reference to the accompanying drawings. However, the present invention is not limited to the above embodiments. Within the scope of knowledge possessed by those skilled in the art, various changes can be made without departing from the spirit of the present invention.

Claims

1. A terahertz spatial light modulator, characterized in that, include: Base; A metasurface structure, wherein the metasurface structure is disposed on the substrate and serves as an electrode, comprising multiple metal metasurface units; An organic electro-optic thin film, wherein the organic electro-optic thin film covers the metasurface structure.

2. The terahertz spatial light modulator according to claim 1, characterized in that, The metasurface structure is incorporating minute asymmetric breaks to enable it to achieve high-quality Fano-type resonances.

3. The terahertz spatial light modulator according to claim 2, characterized in that, The organic electro-optic thin film covers the electrode so that the electro-optic material overlaps with the mode light field and the applied electric field.

4. The terahertz spatial light modulator according to claim 1, characterized in that, The spacing between two adjacent metal metasurface units in a direction parallel to the plane containing the metasurface structure is less than the operating wavelength of the terahertz spatial light modulator.

5. The terahertz spatial light modulator according to claim 1, characterized in that, The organic electro-optic film is a dark green composite film formed by uniformly dispersing or dissolving the electro-optic active molecule JRD1 in polymethyl methacrylate.

6. The terahertz spatial light modulator according to claim 5, characterized in that, The organic electro-optic thin film is prepared by the following steps: The electro-optic active molecule JRD1 and the polymethyl methacrylate are dissolved in a common solvent in a predetermined ratio; A uniform thin film is formed on the metasurface structure by spin coating. The uniform thin film is subjected to electric field polarization treatment; The organic electro-optic film is obtained by high-temperature drying and curing to form a stable dark green composite film.

7. The terahertz spatial light modulator according to claim 6, characterized in that, The electro-optically active molecule JRD1 accounts for 30% to 70%.

8. The terahertz spatial light modulator according to claim 1, characterized in that, The substrate is a quartz substrate.

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