A precision assembly alignment tool dedicated to a micromotion stage of a mirror of a photoetching machine

Abstract

The application discloses a precision assembly alignment tool special for a mirror micro-motion table of a photoetching machine, which comprises a hoisting and overturning device, a fixing frame, a locking device and a fixing guide structure; the fixing frame for adjusting hoisting and overturning angles is rotatably arranged at the lower end of the hoisting and overturning device; the locking device for locking the mirror block is assembled on the fixing frame; the fixing guide structure installed on the base of the mirror micro-motion table is butted below the fixing frame; and the fixing guide structure is guided and matched with the hoisting and overturning device. Through the above mode, the hoisting and assembly alignment process is automatic, horizontal, non-inclined and non-rollover, the optical mirror surface is protected, and the hoisting, dismounting and re-mounting are safe and controllable.

Description

Technical Field

[0001] This invention relates to the field of assembly tooling technology for optical components of lithography machines, and in particular to a precision assembly and alignment tool specifically designed for the micro-motion stage of a lithography machine mirror. Background Technology

[0002] The lithography machine is the core equipment for chip manufacturing. Its imaging resolution, overlay accuracy, and overall stability are highly dependent on the installation accuracy of the mirror assembly in the projection optical path. Especially in advanced process DUV lithography systems, the mirror substrate is usually made of brittle precision optical materials such as ultra-low expansion microcrystalline glass, silicon carbide, and fused silica. The surface accuracy of the mirror must reach the sub-nanometer level, and the surface roughness must be better than 0.1nm. After assembly, the mirror must maintain extremely high positional accuracy, attitude accuracy, and structural stability. The mirror is usually mounted on a six-degree-of-freedom micro-motion stage. The micro-motion stage is generally composed of a flexible hinge mechanism, a piezoelectric drive unit, a displacement sensor module, a rigid base, a mirror clamping seat, and a pre-tightening support structure. It is a typical ultra-precision, weakly rigid sensitive mechanism. Its assembly quality directly determines the imaging accuracy and long-term operational reliability of the lithography machine.

[0003] The micro-stage of the lithography machine's reflector is a core precision optical component. It integrates a high-precision optical reflector, an air bearing surface, a gravity compensator, a displacement sensor, and flat cables. The micro-stage is essential for the tight assembly of products such as wafers. The reflector itself is made of glass, with a hollowed-out back for mounting various sensors and circuit boards. During installation, module replacement, and equipment maintenance, the reflector needs to be hoisted and rotated 180° for operation. Due to the reflector module's large weight and high center of gravity, it is prone to wobbling during hoisting and rotation. The reflector surface is a high-precision optical surface, unlike ordinary... Assembly equipment is prone to damaging or crushing the mirror surface. In addition, severe vibrations can easily cause displacement of the built-in sensors. The equipment itself moves at the nanometer level, and once the position changes, the data changes and becomes inaccurate. Currently, the industry generally uses general assembly equipment with simple lifting tools for operation. These equipment do not have a flipping function and require manual flipping. The flipping angle and posture are uncontrollable. General assembly equipment cannot accurately center the mirror. It is easy to tilt or tip over during the lifting process. There is no horizontal holding mechanism during the assembly alignment process. The air bearing surface is easily damaged by impact when falling. This results in many defects and safety risks in actual maintenance, and it can no longer meet the high precision and high reliability maintenance requirements of mirror blocks.

[0004] Four threaded through holes are reserved on the mirror block for mounting on the micro-motion stage below. The fewer holes machined on the mirror block, the better. The four threaded through holes are used to grip and fix the mirror block for subsequent hoisting. Ordinary hoisting requires removing the locking screws between the mirror block and the micro-motion stage, then locking the mirror block onto the hoisting device, and then locking the mirror block back onto the micro-motion stage after the hoisting operation. This process of disassembly and reinstallation makes the installation accuracy uncontrollable and poses a safety risk. In addition, while the three fixed positions are controllable, the fourth installation position is prone to displacement due to machining and installation errors. The common alignment method is to open a waist-shaped hole, which can only be adjusted in one direction and cannot be finely adjusted forward, backward, left, or right.

[0005] Based on the above defects and shortcomings, it is necessary to improve the existing technology and design a precision assembly and alignment tool specifically for the micro-stage of the lithography machine mirror. Summary of the Invention

[0006] The main technical problem solved by this invention is to provide a precision assembly and alignment tool for a micro-motion stage of a lithography machine mirror. The hoisting, assembly and alignment process is automatically horizontal, without tilting or tipping, protecting the optical mirror surface. There is no contact, no scratches, and no pressure damage. The entire process of hoisting, disassembly and reassembly is safe and controllable.

[0007] To solve the above-mentioned technical problems, one technical solution adopted by the present invention is: to provide a precision assembly and alignment tool specifically for a micro-motion stage of a lithography machine mirror, including a hoisting and flipping device, a fixing frame, a locking device, and a fixed guide structure; the lower end of the hoisting and flipping device is rotatably mounted with a fixing frame for adjusting the hoisting angle and the flipping angle, the fixing frame is equipped with a locking device for locking the mirror block, and the fixed guide structure installed on the base of the mirror micro-motion stage is connected to the lower part of the fixing frame, and the fixed guide structure is guided and cooperated with the hoisting and flipping device; The locking device includes a fixed support structure, an adjusting block, a flexible support structure, and a counterweight. The fixed support structure is installed at three right angles of the fixed frame, and an adjusting block for horizontal fine-tuning hole position is installed at the remaining right angle of the fixed frame. The flexible support structure is assembled on the adjusting block, and the counterweight is assembled on the fixed support structure arranged diagonally opposite to the flexible support structure.

[0008] Preferably, the adjusting block is formed in one step by a single piece of metal sheet through wire cutting, including a main body, a primary adjusting block, a secondary adjusting block, elastic connection points, and a limiting structure. The main body has two symmetrical primary adjusting blocks and a secondary adjusting block located between the two primary adjusting blocks. The primary adjusting blocks are connected to the main body through the first elastic connection points formed by wire cutting and can undergo slight elastic deformation along the X direction. The two ends of the secondary adjusting blocks are connected to the ends of the primary adjusting blocks on both sides through the second elastic connection points formed by wire cutting and can undergo slight elastic deformation along the Y direction. The secondary adjusting blocks have positioning holes for installing flexible support structures. There are mutually cooperating limiting protrusions and limiting grooves between the secondary adjusting blocks and the main body. The limiting protrusions and limiting grooves constitute a limiting structure for limiting the adjustment range.

[0009] Preferably, the flexible support structure includes a bushing, a bushing core, guide pins, a spring, a retaining pin, a hollow screw, and a bushing cover. The bushing has a stepped hole inside, and at least three guide pins are installed on the end face of the stepped hole. A spring is fitted on the guide pin, and a bushing core is fitted at the stepped hole. The two ends of the spring abut against the end face of the stepped hole and the flange of the bushing core, respectively. The bushing core and the bushing hole are clearance-fitted. At least three elastic retaining pins are evenly distributed circumferentially for self-adaptive leveling and centering. A hollow screw for radial and slight angular clearance and shock absorption is installed inside the bushing core. The bushing cover is sealed at the upper end of the bushing, and the spring force drives the lower end of the hollow screw to be housed inside the bushing.

[0010] Preferably, the hollow screw includes a threaded connection end, an elastic hinge section, a flange positioning section, and a cylindrical body section, which are coaxially integrally formed from bottom to top. The threaded connection end is provided with an external thread that mates with the screw hole on the mirror block. The elastic hinge section (with multiple sets of symmetrically distributed side holes radially equidistantly opened on the outer peripheral arm, with a weak connection point reserved between the two side holes in the same set, and adjacent sets of side holes are alternately distributed at 90°) is provided. The flange positioning section is hung on the bushing core, and the cylindrical body section passes through the bushing cover. The hollow screw is axially provided with a clearance through hole for disassembly and assembly tools to penetrate deeply.

[0011] Preferably, the fixed support structure includes a fixed bushing, a baffle, fixed guide pins, a fixed spring, a fixed screw, and a fixed cover. The fixed bushing has a stepped hole, and a baffle is installed on the upper part of the stepped hole. At least three fixed guide pins are installed on the end face of the stepped hole, and a fixed spring is sleeved on the fixed guide pin. The two ends of the fixed spring abut against the end face of the stepped hole and the baffle, respectively. A fixed screw is inserted into the stepped hole. The structure of the fixed screw is the same as that of the hollow screw. A fixed cover is also installed on the upper end of the fixed bushing. The flange positioning section of the fixed screw is located between the fixed cover and the baffle. Under the action of the spring force, the lower end of the fixed screw is received in the fixed bushing.

[0012] Preferably, the outer surfaces of the bushings of the flexible support structure and the fixed bushings of the fixed support structures diagonally distributed thereto undergo hardening treatment.

[0013] Preferably, elastic pads are installed on the bottom surface of the fixed frame below the fixed support structure and the bottom surface of the adjusting block below the flexible support structure.

[0014] Preferably, the hoisting and tilting device includes a portal frame, a mounting base installed on the crossbeam of the portal frame, a U-shaped lifting lug rotatably installed on the mounting base, and a tilting mechanism installed at the bottom of the two side legs of the portal frame; the tilting mechanism includes a fixed seat installed on the portal frame, a rotating shaft rotatably installed on the fixed seat via a bearing seat, an adjusting plate installed on the side of the fixed frame, and a spring pin installed on the fixed seat. The rotating shaft passes through the adjusting plate and is fixed to the fixed frame. The adjusting plate is provided with multiple limiting holes that are centered on the rotating shaft and locked in conjunction with the spring pin.

[0015] Preferably, the fixed guide structure includes a guide frame, a Z-shaped connector, and a vertical guide seat. The guide frame is formed by four irregularly shaped connecting rods, two of which have guide clearance grooves that cooperate with the protrusions on the micro-motion stage base of the reflector. Adjacent irregularly shaped connecting rods are fixedly connected by Z-shaped connectors. Two vertical guide seats are symmetrically installed on the outside of the guide frame, and guide holes are opened on the vertical guide seats. A guide rod that cooperates with the vertical guide seat is installed on the hoisting and flipping device. Two guide posts are locked on the mirror block, and corresponding holes are opened on the fixing frame to form a secondary guide limit.

[0016] Preferably, a precision assembly alignment tool specifically for a micro-motion stage of a lithography machine mirror further includes a vacuum adsorption device mounted on a fixed frame. The vacuum adsorption device includes a contour block mounted on the bottom surface of the fixed frame and a vacuum pressure valve mounted on the top surface of the fixed frame and providing a gas source for the contour block. The contour block is provided with adsorption holes that are connected to the gas source for negative pressure adsorption of the mirror block and various sensors installed inside the mirror block.

[0017] Preferably, the fixing frame is also provided with a visualization window on the front and rear sides.

[0018] Compared with the prior art, the beneficial effects of the present invention are: It integrates hoisting and transportation, posture flipping, threaded locking and negative pressure adsorption. Combined with a lockable flipping mechanism, it can flexibly switch between various postures such as horizontal, upward and downward of the mirror block, taking into account different working conditions such as product assembly, transportation, equipment inspection and maintenance. The multi-level fixed guide structure limits the assembly direction, and the workpiece can only be assembled in one direction. This structure avoids problems such as front-to-back reversal, left-to-right reversal, and angular misalignment, eliminates misalignment deviations, and ensures accurate alignment. The flexible adjustment block formed by wire cutting achieves micro-compensation in the X / Y direction, compensating for hole position errors. The elastic connection point of the adjustment block cooperates with the limiting structure, which not only retains the adjustment tolerance, but also limits the deformation amplitude, prevents structural fatigue damage, and extends the service life of the tooling. The flexible support structure uses multiple elastic pins to fit against the inner wall of the bushing for self-alignment and can self-level with slight deformation. The hollow screws are equipped with elastic hinge sections, which can achieve radial flexible relief and shock absorption, effectively isolating lifting torque and assembly stress and preventing stress from being transmitted to the mirror block body. The stepped threaded holes are paired with hollow screws with clearance through holes, which can be installed and removed in the tooling positioning state, realizing the principle of installation before removal, effectively preventing workpiece displacement and improving assembly accuracy. The flexible support structure, combined with the adjusting block, adaptively levels and distributes force evenly, ensuring that the mirror block remains horizontal throughout the hoisting process, effectively suppressing the risks of swaying, tilting and tipping, and greatly improving the safety of high-altitude hoisting operations; A Teflon gasket is added to the bottom of the mounting bracket, and in conjunction with the pre-installation retractable screw structure, the metal parts and the mirror block do not make hard contact, thus completely avoiding the problem of scratches and pressure damage to the mirror surface. The vacuum adsorption device can fix the internal sensor with negative pressure after the mirror block is flipped, which can counteract the positional displacement caused by gravity and ensure the working accuracy of the sensor and the whole machine. Attached Figure Description

[0019] Figure 1 This is a top view of the present invention.

[0020] Figure 2 This is a cross-sectional view of the flipping mechanism of the present invention.

[0021] Figure 3 This is a schematic diagram of the adjustment plate structure of the present invention.

[0022] Figure 4 This is a schematic diagram of the adjusting block structure of the present invention.

[0023] Figure 5 This is a schematic diagram of the unfolded flexible support structure of the present invention.

[0024] Figure 6 This is a cross-sectional view of the flexible support structure of the present invention.

[0025] Figure 7 This is a schematic diagram of the hollow screw structure in this invention.

[0026] Figure 8 This is a schematic diagram of the fixed support structure of the present invention.

[0027] Figure 9 This is a schematic diagram of the fixed guide structure of the present invention.

[0028] Among them, 1. hoisting and tilting device, 11. gantry frame, 12. mounting base, 13. U-shaped lifting lug, 14. tilting mechanism, 140. limiting hole, 141. fixed seat, 142. rotating shaft, 143. adjusting plate, 144. spring pin, 15. guide rod; 2. Fixture; 3. Locking device; 31. Fixed support leg structure; 311. Fixed bushing; 312. Baffle; 313. Fixed guide pin; 314. Fixed spring; 315. Fixed screw; 316. Fixed cover; 32. Adjusting block; 320. Positioning hole; 321. Main body; 322. First-level adjusting block; 323. Second-level adjusting block; 324. Limiting structure; 301. First elastic connection point; 302. Second elastic connection point; 33. Flexible support leg structure; 331. Bushing; 332. Bushing core; 333. Guide pin; 334. Spring; 335. Locking pin; 336. Hollow screw; 3360. Clearance through hole; 3361. Threaded connection end; 3362. Elastic hinge section; 3363. Flange positioning section; 3364. Cylindrical main body section; 337. Bushing cover; 34. Counterweight; 35. Pad. 4. Fixed guide structure; 41. Guide frame; 42. Z-type connector; 43. Vertical guide seat; 430. Guide hole. Detailed Implementation

[0029] The preferred embodiments of the present invention will now be described in detail with reference to the accompanying drawings, so that the advantages and features of the invention can be more easily understood by those skilled in the art, thereby providing a clearer and more explicit definition of the scope of protection of the present invention.

[0030] Please see Figures 1 to 9 The embodiments of the present invention include: A precision assembly and alignment tool specifically designed for a micro-motion stage of a lithography machine mirror includes a hoisting and flipping device 1, a fixing frame 2, a locking device 3, a fixing guide structure 4, and a vacuum adsorption device.

[0031] The lower end of the hoisting and tilting device 1 is rotatably mounted with a fixed frame 2 that can adjust the horizontal hoisting angle and the tilting angle. The fixed frame 2 is equipped with a locking device 3 for locking the fixed mirror block. The locking device 3 includes a fixed support structure 31, an adjusting block 32, a flexible support structure 33, and a counterweight 34. Fixed support structures 31 are installed at three right angles of the fixed frame 2. An adjusting block 32 for horizontal fine-tuning hole position is installed at another right angle of the fixed frame 2. The adjusting block 32 is equipped with an adaptive fine-tuning flexible support structure 33. The fixed support structures 31 diagonally distributed with the flexible support structure 33 are equipped with counterweights 34. A fixed guide structure 4 that can be installed on the micro-motion stage base of the reflector is connected to the lower part of the fixed frame 2. The fixed guide structure 4 is guided and cooperates with the hoisting and tilting device 1. A vacuum adsorption device for adsorbing the gravity after simulating the tilting is also installed on the fixed frame 2.

[0032] The hoisting and tilting device 1 is lifted by an external hoisting machine and includes a portal frame 11, a mounting base 12, U-shaped lifting lugs 13, and a tilting mechanism 14. The portal frame 11 is a frame-type load-bearing component. The mounting base 12 is installed on the crossbeam of the portal frame 11, and the U-shaped lifting lugs 13 are rotatably installed on the mounting base 12. The U-shaped lifting lugs 13 are hinged to the external lifting device through pins to realize adaptive adjustment of the horizontal angle during the hoisting process. The tilting mechanism 14 is installed at the bottom of the legs on both sides of the portal frame 11.

[0033] The flipping mechanism 14 includes a fixed base 141, a rotating shaft 142, an adjusting plate 143, and a spring pin 144. The fixed base 141 is installed on the gantry frame 11. The rotating shaft 142 is rotatably installed on the fixed base 141 through a bearing seat. The adjusting plate 143 is fixed to the side of the fixed frame 2. The rotating shaft 142 passes through the adjusting plate 143 and is fixed to the fixed frame 2. The adjusting plate 143 is provided with multiple limiting holes 140 with the rotating shaft 142 as the rotation center. The fixed base 141 is equipped with a spring pin 144 that cooperates with the limiting holes 140 for locking. During operation, rotating the fixed frame 2 drives the adjusting plate 143 and the mirror block to flip around the rotating shaft 143. When the target posture is reached, the spring pin 144 can be engaged with the corresponding limiting hole 140 to lock. Without continuous manual support, the mirror block can be safely and smoothly switched between horizontal, upward, and downward postures, adapting to the posture requirements of different processes such as disassembly, transportation, and installation.

[0034] The adjusting block 32 is formed in one step from a single metal sheet using wire cutting technology. It includes a main body 321, a primary adjusting block 322, a secondary adjusting block 323, elastic connection points, and a limiting structure 324. The main body 321 is a plate-shaped base. Two symmetrically arranged primary adjusting blocks 322 and one secondary adjusting block 323 are machined onto the main body 321 using wire cutting. The primary adjusting blocks 322 are connected to the main body 321 via first elastic connection points 301 formed by wire cutting. Under external force, they can generate a small elastic deformation along the X direction, achieving adaptive adjustment in the X direction. The two ends of the secondary adjusting blocks 323 are connected to the ends of the primary adjusting blocks 322 on both sides via second elastic connection points 302 formed by wire cutting. The secondary adjusting blocks 323 can generate a small elastic deformation relative to the primary adjusting blocks 322 along the Y direction, achieving Y-direction adjustment. The secondary adjustment block 323 is equipped with positioning holes 320 for installing the flexible support structure 33. The stainless steel material gives the elastic connection point good elastic deformation capability, which can withstand repeated adjustments without breaking. The secondary adjustment block 323 and the main body 321 are provided with mutually cooperating limiting protrusions and limiting grooves. The limiting protrusions and limiting grooves form a limiting structure, which limits the adjustment range through the concave-convex cooperation, avoiding fatigue damage to the connection point due to excessive range of motion. The adjustment block 32 can realize fine adjustment of the positioning hole 320 in the X and Y directions, accurately correcting the hole position deviation. After adjustment, it can ensure that the mirror block is upright in posture throughout the hoisting process, effectively preventing the workpiece from tilting or deflecting, avoiding unilateral force, and reducing shaking and collision between workpieces and between workpieces and equipment. It has good installation error tolerance. For the alignment error caused by on-site assembly, when there is an alignment deviation in on-site assembly, the center positioning hole 320 can be adjusted to provide position compensation margin, reducing the difficulty of hoisting operation.

[0035] The flexible support structure 33 includes a bushing 331, a bushing core 332, guide pins 333, a spring 334, a retaining pin 335, a hollow screw 336, and a bushing cover 337. The outer surface of the bushing 331 is hardened to reduce debris generated by wear during installation with the adjusting block 32. The bushing 331 has a stepped hole, and the bushing core 332 is fitted into the stepped hole. At least three guide pins 333 are installed on the end face of the stepped hole, passing through the flange of the bushing core 332. A spring 334 is fitted on the guide pin 333, with both ends of the spring 334 abutting against the end face of the stepped hole and the flange of the bushing core 332, respectively. The bushing core 332 has a clearance fit with the internal hole of the bushing 331 to reduce hard contact between the bushing core 332 and the bushing 331 during lifting. Hard contact between metals can generate debris, which, if it falls onto the mirror block, will affect performance. At least three retaining pins 335 are installed on the bushing core 332. The pins 335 are evenly distributed circumferentially. The upper part of the pins 335 protrudes horizontally outward and fits against the inner wall of the bushing 331. The pins 335 are made of elastic material and are used for the bushing core 332 to self-align. They can self-align with slight deformation. A hollow screw 336 is inserted into the axial through hole of the bushing core 332. A bushing cover 337 is also installed on the upper end of the bushing 331. The upper part of the hollow screw 336 passes through the bushing cover 337. Under the elastic force of the spring 334, the bushing core 332 is pushed upward, and the lower end of the hollow screw 336 is received in the bushing 331 to prevent it from protruding and hitting the mirror block.

[0036] The hollow screw 336 includes a coaxially integrally formed threaded connection end 3361, an elastic hinge section 3362, a flange positioning section 3363, and a cylindrical body section 3364. The threaded connection end 3361 has an external thread that mates with the screw hole on the mirror block. The elastic hinge section 3362 has multiple sets of symmetrically distributed side holes radially equidistantly arranged on its outer periphery. Weak connection points are reserved between the two side holes in the same set. Adjacent sets of side holes are alternately distributed at 90°. This structure allows the elastic hinge section to have axial tensile strength while being able to produce flexible deformation in the radial direction, realizing slight swing in the left and right directions and angular retraction. During hoisting, the torque is borne radially by the elastic hinge section 3362 and will not be transmitted to the mirror block, effectively isolating the load and protecting the mirror block from the stress of the tooling. The diameter of the flange positioning section 3363 is larger than the axial through hole of the bushing core 332. The hollow screw 336 can be hung on the bushing core 332 by the limiting part 3362. 64 passes through the bushing cover 337; the hollow screw 336 has an axially oriented clearance through hole 3360 for disassembly and assembly tools to penetrate deeply; the threaded hole on the mirror block is a stepped threaded hole, with its hole wall forming a step along the axial direction; the inner diameter of the lower threaded hole section is smaller than the inner diameter of the upper threaded hole section; when hoisting the mirror block, hold the cylindrical body section 3364 and rotate the hollow screw 336 to screw the threaded connection end 3361 into the screw hole on the mirror block; the internal hexagon tool enters through the clearance through hole. 3360 is inserted into the interior of the mirror block, and the screws used to lock the mirror block and the micro-motion stage base below it are loosened. After hoisting, when installing the mirror block onto the micro-motion stage base, a hexagonal tool is first used to insert into the interior of the mirror block through the clearance through hole 3360 to install the screws used to lock the mirror block and the micro-motion stage base below it. Then the hollow screw 336 is loosened. Compared with the prior art of disassembling and then assembling, the present invention assembles and then disassembles, which can ensure relative installation accuracy and avoid the influence of uncontrollable factors after disassembly.

[0037] The fixed support structure 31 includes a fixed bushing 311, a baffle 312, fixed guide pins 313, a fixed spring 314, a fixed screw 315, and a fixed cover 316. The outer surface of the fixed bushing 311 is hardened. The fixed bushing 311 has a built-in stepped hole. A baffle 312 is installed on the upper part of the stepped hole. At least three fixed guide pins 313 are installed on the end face of the stepped hole. The fixed guide pins 313 pass through the baffle 312, and a fixed spring 314 is sleeved on the fixed guide pins 313. The two ends of the fixing spring 314 abut against the end face of the stepped hole and the baffle 312 respectively. A fixing screw 315 is inserted into the stepped hole. The structure of the fixing screw 315 is the same as that of the hollow screw 336. A fixing cover 316 is also installed on the upper end of the fixing bushing 311. The flange positioning section of the fixing screw 315 is located between the fixing cover 316 and the baffle 312. Under the elastic force of the fixing spring 314, the baffle 312 is pushed upward, and the lower end of the fixing screw 315 is received in the fixing bushing 311.

[0038] A pad 35 is installed on the bottom surface of the fixing bracket 2 and the bottom surface of the adjusting block 32 below the fixed support structure 31. The pad 35 is made of Teflon material and can contact the mirror block, avoiding contact between the metal adjusting block 32 and the fixing bracket 2 and the mirror block during the downward movement.

[0039] The fixed guide structure 4 includes a guide frame 41, a Z-shaped connector 42, and a vertical guide seat 43. The guide frame 41 adopts a split structure, which is formed by four irregular connecting rods. Two of the connecting rods are provided with guide clearance grooves 410 that cooperate with the protrusions on the micro-motion stage base of the reflector. Adjacent irregular connecting rods are fixedly connected by Z-shaped connectors 42, so that the four irregular connecting rods form a stable quadrilateral guide frame, which avoids the frame nodes from angular slight movement during hoisting and ensures the stability of the guide accuracy. Two vertical guide seats 43 are symmetrically installed on the outside of the guide frame 41. Guide holes 430 are opened on the vertical guide seats 43. A guide rod 15 that cooperates with it is installed on the hoisting and flipping device 1. During the hoisting and lifting of the mirror block and the lowering and installation of the mirror block, the mirror block can only be lifted or placed in one correct posture, which structurally prevents the front and back from being reversed, the left and right from being reversed, and the angle from being misaligned.

[0040] The mirror block is secured with two guide posts, and corresponding holes are provided on the mounting bracket 2 for secondary guidance and limiting, ensuring a unique installation position. The mounting bracket 2 is also equipped with a vacuum adsorption device, which includes a contour block installed on the bottom surface of the mounting bracket 2 and a vacuum pressure valve (not shown in the figure) installed on the top surface of the mounting bracket 2 and providing an air source to the contour block. The contour block has adsorption holes connected to the air source. The contour block uses negative pressure to adsorb the mirror block and various sensors installed inside the mirror block. The adsorption pressure can be precisely adjusted. After the mirror block is rotated 180°, the direction of gravity changes. By adsorbing the various sensors installed inside the mirror block, gravity under natural conditions is simulated, minimizing the positional displacement of the internal sensors, which would otherwise affect the accuracy of subsequent work. The vacuum adsorption fixing method replaces the traditional mechanical clamping, and with the help of flexible support, it ensures the reliability of the fixing while avoiding deformation caused by hard contact and excessive pressure, thus protecting the mirror surface of the mirror block.

[0041] The mounting bracket 2 is also equipped with a visualization window on the front and back sides. The visualization window is made of transparent acrylic sheet, which allows the installation to be observed through the visualization window.

[0042] This invention discloses a precision assembly and alignment tool specifically designed for the micro-motion stage of a lithography machine mirror. It integrates hoisting, flipping, locking, and negative pressure adsorption into one unit, allowing for multiple posture switching. The multi-level guiding structure ensures precise assembly direction and position without deviation. Flexible adjustment blocks compensate for hole position errors, while flexible support legs and elastic screws adaptively level and isolate assembly stress. Combined with stepped threaded holes and clearance through holes, it enables assembly before disassembly, preventing workpiece displacement. During hoisting, assembly, and alignment, it does not tilt or tip over, significantly improving safety and protecting the optical mirror surface. It is contactless, scratch-free, and pressure-free. At the same time, vacuum adsorption can fix internal sensors, ensuring the accuracy of equipment operation.

[0043] The above description is merely an embodiment of the present invention and does not limit the patent scope of the present invention. Any equivalent structural or procedural transformations made based on the content of the present invention's specification and drawings, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of the present invention.

Claims

1. A precision assembly and alignment tool specifically designed for a micro-stage of a lithography machine mirror, characterized in that: It includes a hoisting and tilting device (1), a fixed frame (2), a locking device (3), and a fixed guide structure (4); the lower end of the hoisting and tilting device (1) is rotatably mounted with a fixed frame (2) for adjusting the hoisting angle and the tilting angle, and the fixed frame (2) is equipped with a locking device (3) for locking the mirror block. The fixed frame (2) is connected to a fixed guide structure (4) installed on the micro-motion stage base of the reflector below the fixed frame (2), and the fixed guide structure (4) is guided and cooperated with the hoisting and tilting device (1). The locking device (3) includes a fixed support structure (31), an adjusting block (32), a flexible support structure (33), and a counterweight (34). The fixed support structure (31) is installed at three right angles of the fixed frame (2), and an adjusting block (32) for horizontal fine adjustment hole position is installed at the remaining right angle of the fixed frame (2). The flexible support structure (33) is mounted on the adjusting block (32), and the counterweight (34) is mounted on the fixed support structure (32) which is diagonally arranged with the flexible support structure (33).

2. A precision assembly alignment tool for a micromotion stage of a mirror of a photolithography machine according to claim 1, wherein: The adjusting block (32) is formed in one step by a single piece of metal sheet through wire cutting. It includes a main body (321), a primary adjusting block (322), a secondary adjusting block (323), elastic connection points, and a limiting structure (324). The main body (321) has two symmetrical primary adjusting blocks (322) and a secondary adjusting block (323) located between the two primary adjusting blocks (322). The primary adjusting block (322) is connected to the main body (321) through the first elastic connection point (301) formed by wire cutting and can undergo slight elastic deformation along the X direction. The two ends of the secondary adjusting block (323) are connected to the ends of the primary adjusting blocks (322) on both sides through the second elastic connection points (302) formed by wire cutting and can undergo slight elastic deformation along the Y direction. For slight elastic deformation, a positioning hole (320) for installing a flexible support structure (33) is opened on the secondary adjustment block (323). A limiting protrusion and a limiting groove are provided between the secondary adjustment block (323) and the main body (321). The limiting protrusion and the limiting groove constitute a limiting structure for limiting the adjustment range.

3. A precision assembly alignment tool for a micromotion stage of a mirror of a photolithography machine according to claim 1, wherein: The flexible support structure (33) includes a bushing (331), a bushing core (332), guide pins (333), a spring (334), a retaining pin (335), a hollow screw (336), and a bushing cover (337). The bushing (331) has a stepped hole inside, and at least three guide pins (333) are installed on the end face of the stepped hole. A spring (334) is fitted on the upper part, and a bushing core (332) is fitted at the stepped hole. The two ends of the spring (334) abut against the end face of the stepped hole and the flange of the bushing core (332) respectively. The bushing core (332) and the bushing (331) are fitted with a clearance fit. At least three elastic pins (335) are evenly distributed around the bushing (332) for adaptive leveling and centering. A hollow screw (336) for radial and angular relief and shock absorption is installed inside the bushing core (332). The upper end of the bushing (331) is sealed with a bushing cover (337). The spring (334) drives the lower end of the hollow screw (336) to be housed inside the bushing (331).

4. A precision assembly alignment tool for a micromotion stage of a mirror of a lithography machine according to claim 3, wherein: The hollow screw (336) includes a threaded connection end (3361), an elastic hinge section (3362), a flange positioning section (3363), and a cylindrical body section (3364) that are coaxially integrally formed from bottom to top. The threaded connection end (3361) is provided with an external thread that mates with the screw hole on the mirror block. The elastic hinge section (3362) has multiple sets of symmetrically distributed side holes radially equidistantly opened on its outer circumferential arm. Weak connection points are reserved between the two side holes in the same set. The two adjacent sets of side holes are alternately distributed at 90°. The flange positioning section (3363) is hung on the bushing core (332). The cylindrical body section (3364) passes through the bushing cover (337). The hollow screw (336) is provided with an axial clearance through hole (3360) for disassembly and assembly tools to penetrate deeply.

5. A precision assembly alignment tool for a micromotion stage of a mirror of a lithography machine according to claim 4, wherein: The fixed support structure (31) includes a fixed bushing (311), a baffle (312), a fixed guide pin (313), a fixed spring (314), a fixed screw (315), and a fixed cover (316). The fixed bushing (311) has a stepped hole inside, and a baffle (312) is installed on the upper part of the stepped hole. At least three fixed guide pins (313) are installed on the end face of the stepped hole. A fixed spring (314) is sleeved on the fixed guide pin (313), and the two ends of the fixed spring (314) are respectively The stepped hole end face and the baffle (312) are abutted together. A fixing screw (315) is inserted in the stepped hole. The structure of the fixing screw (315) is the same as that of the hollow screw (336). A fixing cover (316) is also installed on the upper end of the fixing bushing (311). The flange positioning section of the fixing screw (315) is located between the fixing cover (316) and the baffle (312). Under the elastic force of the fixing spring (314), the lower end of the fixing screw (315) is received in the fixing bushing (311).

6. A precision assembly alignment tool for a micromotion stage of a mirror of a photolithography machine according to claim 1, wherein: The outer surfaces of the bushing (331) of the flexible support structure (33) and the fixed bushing (311) of the fixed support structure (31) diagonally distributed thereto are hardened.

7. A precision assembly alignment tool for a micromotion stage of a mirror of a photolithography machine according to claim 1, wherein: Elastic pads (35) are installed on the bottom surface of the fixed frame (2) below the fixed support structure (31) and the bottom surface of the adjusting block (32) below the flexible support structure (33).

8. A precision assembly alignment tool for a micromotion stage of a mirror of a photolithography machine according to claim 1, wherein: The hoisting and tilting device (1) includes a gantry frame (11), a mounting base (12) mounted on the crossbeam of the gantry frame (11), a U-shaped lifting lug (13) rotatably mounted on the mounting base (12), and a tilting mechanism (14) mounted on the bottom of the two side legs of the gantry frame (11). The tilting mechanism (14) includes a fixed seat (141) mounted on the gantry frame (11), a rotating shaft (142) rotatably mounted on the fixed seat (141) via a bearing seat, an adjusting plate (143) mounted on the side of the fixed frame (2), and a spring pin (144) mounted on the fixed seat (141). The rotating shaft (142) passes through the adjusting plate (143) and is fixed to the fixed frame (2). The adjusting plate (143) is provided with multiple limiting holes (140) that are locked with the rotating shaft (142) as the rotation center and cooperate with the spring pin (144).

9. A precision assembly and alignment tool specifically for a micro-stage of a lithography machine mirror according to claim 1, characterized in that: The fixed guide structure (4) includes a guide frame (41), a Z-shaped connector (42), and a vertical guide seat (43). The guide frame (41) is formed by four irregular connecting rods. Two of the connecting rods are provided with guide clearance grooves (410) that cooperate with the protrusions on the micro-motion stage base of the reflector. Two adjacent irregular connecting rods are fixedly connected by the Z-shaped connector (42). Two vertical guide seats (43) are symmetrically installed on the outside of the guide frame (41). Guide holes (430) are opened on the vertical guide seats (43). A guide rod (15) that cooperates with it is installed on the hoisting and flipping device (1). Two guide columns are locked on the mirror block. The corresponding holes are opened on the fixing frame (2) to form a secondary guide limit.

10. A precision assembly and alignment tool specifically for a micro-stage of a lithography machine mirror according to claim 1, characterized in that: It also includes a vacuum adsorption device installed on the fixed frame (2). The vacuum adsorption device includes a contour block installed on the bottom surface of the fixed frame (2) and a vacuum pressure valve installed on the top surface of the fixed frame (2) and providing a gas source for the contour block. The contour block is provided with adsorption holes for negative pressure adsorption of the mirror block and various sensors installed inside the mirror block, which are connected to the gas source.

11. A precision assembly and alignment tool specifically for a micro-stage of a lithography machine mirror according to claim 1, characterized in that: The fixing frame (2) is also provided with visualization windows on the front and back sides.

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