Sample carrier and scanning electron microscope

Abstract

This application relates to the field of vacuum instrumentation technology, and in particular to a sample carrier and a scanning electron microscope. The sample carrier includes: a first slide stage; a first driving mechanism, wherein the first slide stage is movably disposed on the first driving mechanism; the first driving mechanism is capable of driving the first slide stage to reciprocate along a first direction; a second driving mechanism, wherein the first driving mechanism is disposed on the second driving mechanism, and the second driving mechanism is capable of driving the first driving mechanism to reciprocate along a second direction different from the first direction; a chamber door and a rotation driving mechanism disposed on the chamber door, the rotation driving mechanism being connected to the second driving mechanism. The sample carrier provided by this application can realize multi-dimensional motion of the sample, such as rotation and sliding, and the various driving mechanisms are rationally arranged to make full use of the space inside the sample chamber, effectively increasing the motion stroke of the sample in all dimensions, and the use of deceleration adjustment significantly improves the adjustment accuracy of the sample posture.

Description

Technical Field

[0001] This application relates to the field of vacuum instrumentation technology, and in particular to a sample carrier and a scanning electron microscope. Background Technology

[0002] Currently, scanning electron microscopes (SEMs) mostly use manual control knobs (usually mechanical joysticks or knobs) to move the sample stage. While intuitive and low-cost, this method suffers from drawbacks such as low positioning accuracy and repeatability, low operational efficiency, unsuitability for batch or automated testing, and susceptibility to human error and fatigue, making it difficult to meet the demands of modern high-precision and high-efficiency testing. Some SEMs employ electric cylinders or motors for drive, but due to the limited space within the sample chamber, these drive components occupy a significant amount of space, thus restricting the available space for sample stage movement and consequently limiting the accuracy and range of sample movement. Summary of the Invention

[0003] The purpose of this application is to provide a sample carrier device and a scanning electron microscope, so as to solve to some extent the technical problems of low adjustment accuracy and short movement stroke of the sample carrier device in the prior art.

[0004] This application provides a sample carrier device, the sample carrier device comprising: A first slide stage, the first slide stage being used to support the sample; A first drive mechanism is provided, wherein the first slide is movably disposed on the first drive mechanism; the first drive mechanism is capable of driving the first slide to reciprocate along a first direction. The second drive mechanism is movably disposed on the first drive mechanism, and the second drive mechanism is capable of driving the first drive mechanism to reciprocate along a second direction different from the first direction; A storage door and a rotary drive mechanism, wherein the rotary drive mechanism is disposed on the storage door and is connected to the second drive mechanism.

[0005] In the above technical solution, the rotary drive mechanism further includes: A first driving component is disposed at the compartment door; A speed reducer assembly is provided, wherein the door is provided with an installation port, and the speed reducer assembly is rotatably connected to the installation port; A first transmission assembly is connected to the first drive member and the reducer assembly. In any of the above technical solutions, the first driving mechanism further includes: A second transmission assembly is connected to the first slide table; The second driving component is connected to the second transmission assembly. The second driving component can drive the second transmission assembly to operate, thereby causing the first slide to reciprocate along the first direction.

[0006] In any of the above technical solutions, the second driving mechanism further includes: The second slide is provided on which the first slide is movably disposed; A base, wherein the second slide is movably disposed on the base, and the base is connected to the reducer assembly; A third transmission assembly is connected to the second slide table; The third driving component is connected to the third transmission assembly and can drive the third transmission assembly to operate, thereby causing the second slide to reciprocate linearly relative to the base along the second direction.

[0007] In any of the above technical solutions, a notch is provided at the bottom of the door, and the first driving member is disposed in the notch; the axis of the first driving member extends along the second direction. The first transmission assembly is connected to the reducer assembly on the outside of the compartment door.

[0008] In any of the above technical solutions, the second transmission assembly further includes a first lead screw, and the second driving member is disposed on the side of the first lead screw, with the axis of the second driving member being parallel to the axis of the first lead screw. The third transmission assembly includes a second lead screw, and the third driving member is disposed on the side of the second lead screw, with the axis of the third driving member being parallel to the axis of the second lead screw.

[0009] In any of the above technical solutions, the sample carrying device further includes: A first limiting member is disposed on the second slide table, and the first limiting member is used to limit the movement stroke of the first slide table along the first direction; The second limiting member is disposed on the base and is used to limit the movement stroke of the second slide table along the second direction.

[0010] In any of the above technical solutions, the sample carrying device further includes: A sealing element, wherein the sealing element is disposed on the inner wall surface of the compartment door; A dynamic sealing sleeve, the dynamic sealing sleeve including a main body and a flange disposed on the main body, the main body being disposed on the reducer assembly; A face sealing ring is disposed between the flange and the compartment door; A shaft seal ring is disposed between the main body and the reducer assembly.

[0011] In any of the above technical solutions, the sample carrying device further includes: A reset detection element is disposed on the compartment door or the dynamic sealing sleeve; The rotary drive mechanism also includes a connecting flange, which is connected to the reducer assembly, and the sensing element is disposed on the connecting flange.

[0012] In any of the above technical solutions, the sample carrying device further includes: A communication switching component is disposed at the compartment door; A guide component is disposed on the compartment door.

[0013] This application also provides a scanning electron microscope, which includes the sample support device described in any of the above technical solutions, and thus has all the beneficial technical effects of the sample support device, which will not be repeated here. Compared with the prior art, the beneficial effects of this application are as follows: The sample carrying device provided in this application includes: a first slide table for carrying a sample; a first driving mechanism, wherein the first slide table is movably disposed on the first driving mechanism; the first driving mechanism is capable of driving the first slide table to reciprocate along a first direction; a second driving mechanism, wherein the first driving mechanism is movably disposed on the second driving mechanism; the second driving mechanism is capable of driving the first driving mechanism to reciprocate along a second direction different from the first direction; a door and a rotary driving mechanism, wherein the rotary driving mechanism is disposed on the door and connected to the second driving mechanism. The sample carrying device provided in this application can realize multi-dimensional motion of the sample, such as rotation and sliding. It also has a reasonable layout of each driving mechanism to make full use of the space in the sample chamber and effectively improve the motion stroke of the sample in all dimensions. Compared with the traditional adjustment method, this sample carrying device adopts a deceleration adjustment method, which significantly improves the adjustment accuracy of the sample posture.

[0014] The scanning electron microscope provided in this application includes the sample support device described above. Therefore, the sample support device can meet the basic sample support requirements and can also provide high-precision position and attitude adjustment, thereby improving the shooting angle and shooting accuracy of the sample. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the specific embodiments of this application or the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this application. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0016] Figure 1 This is a schematic diagram of the sample carrier device provided in the embodiments of this application; Figure 2 Another schematic diagram of the sample carrying device provided in the embodiments of this application; Figure 3 A top view of the sample carrying device provided in the embodiments of this application; Figure 4 This is a schematic diagram of the sample carrying device provided in an embodiment of this application from another perspective; Figure 5 A side view of the sample carrier provided in an embodiment of this application; Figure 6 A cross-sectional view of the sample carrier provided in an embodiment of this application.

[0017] Figure label: 101-Door; 102-Communication adapter assembly; 103-Guide assembly; 104-Belt adjusting block; 105-Seal; 2-Rotary drive mechanism; 201-Reducer assembly; 202-Output component; 203-Input component; 204-Dynamic sealing sleeve; 205-Connecting flange; 206-Reset detection component; 207-Sensor; 208-Shaft seal ring; 209-Face seal ring; 210-First driven wheel; 211-First driving wheel; 212-First drive component; 213-First synchronous belt; 3-Second drive mechanism; 301-Base; 30 2-Second slide table; 303-Second lead screw; 304-Second slide rail; 305-Third driving member; 306-Third driven wheel; 307-Third driving wheel; 308-Third synchronous belt; 309-Second limiting member; 310-Second encoder; 4-First driving mechanism; 401-First slide table; 402-First lead screw; 403-First slide rail; 404-Second driving member; 405-Second driven wheel; 406-Second driving wheel; 407-Second synchronous belt; 408-First limiting member; 409-First encoder; a-First direction; b-Second direction. Detailed Implementation

[0018] The technical solutions of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are some embodiments of this application, but not all embodiments.

[0019] The components of the embodiments of this application described and shown in the accompanying drawings can be arranged and designed in a variety of different configurations. Therefore, the following detailed description of the embodiments of this application provided in the drawings is not intended to limit the scope of the claimed application, but merely to illustrate selected embodiments of the application.

[0020] Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0021] In the description of this application, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0022] In the description of this application, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0023] The following reference Figures 1 to 6 The sample carrier device and scanning electron microscope described in the embodiments of this application are explained.

[0024] See Figures 1 to 6As shown, an embodiment of this application provides a sample carrying device, which includes: a chamber door 101, a first slide 401, a first driving mechanism 4, a second driving mechanism 3, and a rotary driving mechanism 2. The rotary driving mechanism 2 is disposed on the chamber door 101, and the second driving mechanism 3 is connected to the rotary driving mechanism 2. When the rotary driving mechanism 2 is activated, the second driving mechanism 3 can rotate synchronously with the rotary driving mechanism 2. The first driving mechanism 4 is movably disposed on the second driving mechanism 3, and the second driving mechanism 3 can drive the first driving mechanism 4 to perform linear reciprocating motion along a second direction b. The first slide 401 is used to carry the sample and is movably disposed on the first driving mechanism 4. The first driving mechanism 4 can drive the first slide 401 to perform linear reciprocating motion along a first direction a. The first direction a and the second direction b are two directions extending in different directions on a horizontal plane. The second direction b is the direction in which the chamber door 101 moves relative to the sample chamber of the scanning electron microscope to open or close. The first direction a and the second direction b are perpendicular to each other. It can be seen that, under the coordinated action of the first drive mechanism 4, the second drive mechanism 3 and the rotary drive mechanism 2, the first slide 401 can perform multi-dimensional motion.

[0025] Specifically, the first slide 401 is flat and has an upper and lower surface distributed vertically. The upper surface of the first slide 401 can be used to directly place samples or to mount containers for placing samples. The first slide 401 does not require specific design, has good compatibility, and a wide range of applications, and can be used with other in-situ sample stages. The lower surface of the first slide 401 is provided with two first sliders for sliding connection with the first drive mechanism 4, spaced apart.

[0026] The rotary drive mechanism 2 includes a first drive member 212, a first transmission assembly, and a reducer assembly 201. The first drive member 212 is specifically a motor. The first drive member 212 is disposed on the door 101. Preferably, the bottom edge of the door 101 has a notch. The first drive member 212 is disposed on the notch and fixed to the door 101. The door 101 has an installation port that penetrates the inner and outer side walls of the door 101. The reducer assembly 201 is rotatably connected to the installation port and is coaxially arranged with the installation port. Optionally, the reducer assembly 201 is a common harmonic reducer in the prior art, including an input component 203 and an output component 202 connected to each other. The specific structure and working principle of the harmonic reducer are fully understood by those skilled in the art and will not be elaborated further here. The output shaft of the first drive member 212 is connected to the reducer assembly 201 via the first transmission assembly. The first transmission assembly includes a first driving wheel 211, a first driven wheel 210, and a first synchronous belt 213. The first driving wheel 211 is embedded in the door 101 and is connected to the output shaft of the first drive member 212. The first driven wheel 210 is coaxially arranged with and connected to the input member 203 of the reducer assembly 201. The first driving wheel 211 and the first driven wheel 210 are connected by the first synchronous belt 213. Preferably, the first synchronous belt 213 is located on one side of the outer surface of the door 101. When the first drive member 212 is started, the power of the first drive member 212 is transmitted to the input member 203 of the reducer assembly 201 through the first driving wheel 211, the first synchronous belt 213, and the first driven wheel 210, thereby transmitting the power of the first drive member 212 to the input member 203, enabling the input member 203 to rotate about its own axis.

[0027] The axis of the first driving member 212 extends along the second direction b and is parallel to the axis of the output member 202. The output shaft of the first driving member 212 is connected to the output member 202 through the first transmission assembly. This not only realizes power transmission and ensures the normal operation of the rotary drive mechanism 2, but also adjusts the direction of power so that the first driving member 212 indirectly drives the first slide 401 to rotate below the first drive mechanism 4 and the second drive mechanism 3, effectively controlling the space occupied by the rotary drive mechanism 2 in the sample chamber.

[0028] Preferably, the sample carrying device further includes a belt adjusting block 104. The outer surface of the compartment door 101 is provided with a recess, and the belt adjusting block 104 is disposed in the recess. The connection between the belt adjusting block 104 and the recess can be, but is not limited to, a threaded connection. By rotating the belt adjusting block 104, the belt adjusting block 104 can extend relative to the recess and abut against the first synchronous belt 213, thereby changing the local extension direction of the first synchronous belt 213 and adjusting the tension of the first synchronous belt 213.

[0029] The rotary drive mechanism 2 also includes a connecting flange 205, which is connected to the output component 202 of the reducer assembly 201 on one side of the inner wall of the door 101. When the output component 202 rotates with the input component 203, it can drive the connecting flange 205 to rotate synchronously. Optionally, the connecting flange 205 and the output component 202 can be connected by multiple screw threads, or by riveting, keying, or other connection methods.

[0030] Preferably, the sample carrying device further includes a dynamic sealing sleeve 204, which is sleeved on the output component 202. The dynamic sealing sleeve 204 includes a main body with an integral structure and a flange. The main body is cylindrical and sleeved on the output component 202. The flange is coaxially arranged with the main body and distributed circumferentially along the main body. The main body is located between the connecting flange 205, the door 101, and the output component 202. The flange faces the door 101, so that the dynamic sealing sleeve 204 can seal the connecting flange 205 and the reducer assembly 201 at the installation port.

[0031] Preferably, a face sealing ring 209 is provided between the flange of the dynamic sealing sleeve 204 and the door 101, and a shaft sealing ring 208 is also provided between the main body of the dynamic sealing sleeve 204 and the output component 202. The number of shaft sealing rings 208 is at least two, and all shaft sealing rings 208 are sleeved on the output component 202 along the axial direction of the output component 202.

[0032] Optionally, the sample carrying device further includes a sealing element 105, which is disposed on the inner wall surface of the chamber door 101 and surrounds the reducer assembly 201. When the chamber door 101 is closed relative to the sample chamber, the sealing element 105 can seal the gap between the chamber door 101 and the sample chamber, ensuring the vacuum level of the sample carrying device during operation and reducing the probability of vacuum leakage.

[0033] Furthermore, the sample carrying device also includes a reset detection element 206 and a sensing element 207. The reset detection element 206 can be a reset switch commonly used in the prior art. The reset detection element 206 is set at a fixed position such as the door 101 or the dynamic sealing sleeve 204. The sensing element 207 is block-shaped and is used to cooperate with the reset detection element 206. The sensing element 207 is set at the connecting flange 205. In the initial position, the sensing element 207 and the reset detection element 206 are set at zero point, so that the rotary drive mechanism 2 can be reset to zero point according to the identification signal between the reset detection element 206 and the sensing element 207.

[0034] Further, the second drive mechanism 3 includes: a base 301, a second slide 302, a third drive member 305, and a third transmission assembly. The second slide 302 is movably disposed on the base 301. The base 301 is plate-shaped, and its length extends along the second direction b. The large surfaces on both sides of the base 301 are distributed in the vertical direction. One end of the base 301 is connected to the connecting flange 205, so that the base 301 can rotate synchronously with the connecting flange 205. The base 301 is provided with two second slide rails 304, which are arranged in parallel and spaced apart. The length of each second slide rail 304 extends along the second direction b. The lower surface of the second slide 302 is provided with second sliders. The number of second sliders is the same as the number of second slide rails 304, and they are adapted to slide and connect one by one. The third drive member 305 can be a motor. The third drive member 305 is disposed on the base 301 and is connected to the third transmission assembly.

[0035] The third transmission assembly includes: a third driving wheel 307, a third driven wheel 306, a third synchronous belt 308, a second lead screw 303, and a second nut seat. The third driving wheel 307 is connected to the output shaft of the third driving member 305, and the third driving wheel 307 and the third driven wheel 306 are connected by the third synchronous belt 308. The second lead screw 303 is rotatably mounted on the second slide table 302. The length of the second lead screw 303 extends along the second direction b. The third driven wheel 306 is connected to one end of the second lead screw 303, so that the third driving member 305 can drive the second lead screw 303 to rotate around its own axis after starting.

[0036] The second nut seat is sleeved on the second lead screw 303, and the two are threaded together, thereby converting the rotational motion of the second lead screw 303 into the linear reciprocating motion of the second nut seat along the second direction b. The second nut seat is connected to the second slide 302, thereby enabling the second slide 302 to perform linear reciprocating motion relative to the base 301 along the second direction b.

[0037] Optionally, a second encoder 310 is provided at the end of the second lead screw 303 away from the third driven wheel 306. The second encoder 310 is rotated while the second lead screw 303 rotates to record the angle.

[0038] The axis of the third drive member 305 extends along the second direction b and is parallel to the axis of the second lead screw 303. The output shaft of the third drive member 305 is connected to the second slide table 302 through the third transmission assembly. This not only realizes power transmission but also adjusts the direction of power, making full use of space and effectively controlling the installation space occupied by the second drive mechanism 3 in the second direction b. This effectively increases the travel of the second slide table 302 along the second direction b.

[0039] Furthermore, the sample carrying device also includes a second limiting member 309, which can be a limit switch. Preferably, there are at least two second limiting members 309, and all the second limiting members 309 are spaced apart along the second direction b on the base 301. The second limiting members 309 are used to detect the proximity signal of the second slide 302, thereby limiting the maximum travel of the second slide 302 along the second direction b.

[0040] The upper surface of the second slide table 302 is provided with a first slide rail 403. There are two first slide rails 403, which are arranged in parallel and spaced apart. The length of each first slide rail 403 extends along the first direction a.

[0041] Furthermore, the first driving mechanism 4 includes: a second driving member 404 and a second transmission assembly, wherein the second driving member 404 is specifically a motor and can be disposed on the second slide table 302; the first slide table 401 is plate-shaped, and the large surfaces on both sides of the first slide table 401 are distributed in the vertical direction, and the number of first sliders on the lower surface of the first slide table 401 is the same as the number of first slide rails 403 and they are adapted to slide and connected one by one.

[0042] The second transmission assembly includes: a second driving wheel 406, a second driven wheel 405, a second synchronous belt 407, a first lead screw 402, and a first nut seat. The second driving wheel 406 is connected to the output shaft of the second driving member 404, and the second driving wheel 406 and the second driven wheel 405 are connected by the second synchronous belt 407. The first lead screw 402 is rotatably mounted on the first slide table 401. The length of the first lead screw 402 extends along the first direction a. The second driven wheel 405 is connected to one end of the first lead screw 402, so that the second driving member 404 can drive the first lead screw 402 to rotate around its own axis after starting.

[0043] The first nut seat is sleeved on the first lead screw 402, and the two are threaded together. The first nut seat is also fixedly connected to the lower surface of the first slide 401, so that the rotational motion of the first lead screw 402 can be converted into the linear motion of the first nut seat and the first slide 401, thereby enabling the first slide 401 to drive the sample to perform linear reciprocating motion along the first direction a.

[0044] Optionally, a first encoder 409 is provided at the end of the first lead screw 402 away from the second driven wheel 405. The first encoder 409 is rotated while the first lead screw 402 rotates to record the angle.

[0045] The axis of the second drive member 404 extends along the first direction a and is parallel to the axis of the first lead screw 402. The output shaft of the second drive member 404 is connected to the first lead screw 402 through the second transmission assembly. This not only realizes power transmission but also adjusts the direction of power, making full use of space and effectively controlling the installation space occupied by the first drive mechanism 4 along the first direction a, thereby effectively increasing the travel of the first slide table 401 along the first direction a.

[0046] Furthermore, the sample carrying device also includes a first limiting member 408, which can be a limit switch. Preferably, there are at least two first limiting members 408. All the first limiting members 408 are spaced apart on the second slide 302. Some of the first limiting members 408 are located on one side of the first slide 401 along the first direction a, and the other part of the first limiting members 408 are located on the other side of the first slide 401 along the first direction a. All the first limiting members 408 on both sides of the first slide 401 are used to detect the proximity signal of the first slide 401. When the first slide 401 moves to the threshold position, it stops moving, thereby limiting the maximum movement stroke of the first slide 401 along the first direction a.

[0047] Furthermore, the sample carrier device also includes a communication adapter 102, which includes at least two connectors disposed on the door 101. The inner wall of the door 101 is also provided with a control board, which can be a circuit board. The aforementioned driving components, encoders, etc. are respectively connected to the control board, and each connector is connected to the control board, thereby realizing the communication connection between the inside and outside of the sample carrier device.

[0048] Furthermore, the sample carrying device also includes a guide assembly 103. The scanning electron microscope includes a sample chamber, and the chamber door 101 is connected to the sample chamber through the guide assembly 103. The guide assembly 103 specifically includes a first guide rail and a second guide rail arranged in parallel at intervals. One end of the first guide rail is connected to the chamber door 101, and the other end of the first guide rail is connected to the wall around the sample chamber. The second guide rail is connected in the same way. The first guide rail and the second guide rail have a telescopic structure. When the chamber door 101 is opened or closed relative to the sample chamber, the guide assembly 103 can guide the sample.

[0049] In summary, the sample carrying device provided in this application can realize multi-dimensional motion of the sample, such as rotation and sliding. Furthermore, the various driving mechanisms are rationally arranged to make full use of the space inside the sample chamber, effectively increasing the motion stroke of the sample in all dimensions. Compared with traditional adjustment methods, this sample carrying device adopts a deceleration adjustment method, thereby significantly improving the adjustment accuracy of the sample posture.

[0050] The embodiments of this application also provide a scanning electron microscope, including the sample support device described in any of the above embodiments, and thus have all the beneficial technical effects of the sample support device, which will not be repeated here.

[0051] This application provides a scanning electron microscope, including the sample support device described above. Therefore, the sample support device can meet the basic sample support requirements and can also provide high-precision position and attitude adjustment, thereby improving the shooting angle and shooting accuracy of the sample.

[0052] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application.

Claims

1. A sample carrying device, characterized in that, The sample carrier includes: A first slide stage, the first slide stage being used to support the sample; A first drive mechanism is provided, wherein the first slide is movably disposed on the first drive mechanism; the first drive mechanism is capable of driving the first slide to reciprocate along a first direction. The second drive mechanism is movably disposed on the first drive mechanism, and the second drive mechanism is capable of driving the first drive mechanism to reciprocate along a second direction different from the first direction; A storage door and a rotary drive mechanism, wherein the rotary drive mechanism is disposed on the storage door and is connected to the second drive mechanism.

2. The sample carrying device of claim 1, wherein, The rotary drive mechanism includes: A first driving component is disposed at the compartment door; A speed reducer assembly is provided, wherein the door is provided with an installation port, and the speed reducer assembly is rotatably connected to the installation port; A first transmission assembly is connected to the first drive member and the reducer assembly.

3. The sample carrying device of claim 2, wherein, The first driving mechanism includes: A second transmission assembly is connected to the first slide table; The second driving component is connected to the second transmission assembly. The second driving component can drive the second transmission assembly to operate, thereby causing the first slide to reciprocate along the first direction.

4. The sample carrying device of claim 3, wherein, The second drive mechanism includes: The second slide is provided on which the first slide is movably disposed; A base, wherein the second slide is movably disposed on the base, and the base is connected to the reducer assembly; A third transmission assembly is connected to the second slide table; The third driving component is connected to the third transmission assembly and can drive the third transmission assembly to operate, thereby causing the second slide to reciprocate linearly relative to the base along the second direction.

5. The sample carrying device of claim 2, wherein, The bottom of the compartment door is provided with a notch, and the first driving member is disposed in the notch; the axis of the first driving member extends along the second direction; The first transmission assembly is connected to the reducer assembly on the outside of the compartment door.

6. The sample carrier according to claim 4, characterized in that, The second transmission assembly includes a first lead screw, and a second driving member is disposed on the side of the first lead screw, with the axis of the second driving member being parallel to the axis of the first lead screw. The third transmission assembly includes a second lead screw, and the third driving member is disposed on the side of the second lead screw, with the axis of the third driving member being parallel to the axis of the second lead screw.

7. The sample carrier according to claim 4, characterized in that, The sample carrier device further includes: A first limiting member is disposed on the second slide table, and the first limiting member is used to limit the movement stroke of the first slide table along the first direction; The second limiting member is disposed on the base and is used to limit the movement stroke of the second slide table along the second direction.

8. The sample carrying device of claim 2, wherein, The sample carrier device further includes: A sealing element, wherein the sealing element is disposed on the inner wall surface of the compartment door; A dynamic sealing sleeve, the dynamic sealing sleeve including a main body and a flange disposed on the main body, the main body being disposed on the reducer assembly; A face sealing ring is disposed between the flange and the compartment door; A shaft seal ring is disposed between the main body and the reducer assembly.

9. The sample carrying device of claim 8, wherein, The sample carrier device further includes: A reset detection element is disposed on the compartment door or the dynamic sealing sleeve; The rotary drive mechanism further includes a connecting flange, which is connected to the reducer assembly, and the sensing element is disposed on the connecting flange. A communication switching component is disposed at the compartment door; A guide component is disposed on the compartment door.

10. A scanning electron microscope characterized by, The sample carrier device includes any one of claims 1 to 9.

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