An excimer laser with a cage type light path adjusting rod and a coaxial fine adjustment device

Abstract

This invention relates to the field of optical path adjustment technology, specifically to an excimer laser with a cage-type optical path adjustment rod and a coaxial fine-tuning device. It includes a support assembly comprising a support rod inserted at the ends of two optical path bases. The support rod is a hollow structure, with an intermediate layer and an inner layer rod fixedly disposed inside. The thickness of the intermediate layer is gradually distributed along the axial direction. This invention conducts heat to the support assembly through the laser cavity, generating an axial temperature gradient on the support assembly. Because the thermal expansion coefficient of the intermediate layer is much greater than that of the inner layer rod, and the thickness of the intermediate layer is greater at the hot end, the expansion of the intermediate layer at the hot end is constrained by the inner layer rod, resulting in greater axial compressive stress. This causes the support assembly to produce a slight bend in the direction away from the laser cavity, making the inherent bending direction of the support assembly opposite to the thermal bending direction. The two cancel each other out, thereby preventing the degradation of the directional stability of the output laser.

Description

Technical Field

[0001] This invention relates to the field of optical path adjustment technology, and more specifically, to an excimer laser having a cage-type optical path adjustment rod and a coaxial fine-tuning device. Background Technology

[0002] An excimer laser is a gas laser, such as one using a mixture of xenon (Xe) and chlorine (Cl2) gas, excited by a high-voltage pulsed discharge to generate an excimer laser with a wavelength of 308 nm. It is primarily used for interventional procedures and ablation within blood vessels. Due to its use in interventional procedures, the precision requirements for laser energy are extremely stringent. The laser cavity is mounted on a chassis via a cavity base, and the resonant cavity mirrors and optical path support rods are fixed by the optical path base and optical path support flange to ensure high coaxiality between the laser cavity and the resonant cavity mirrors. To reduce the thermal impact, current designs often avoid direct contact between the optical path support rod and the cavity base, thus preventing heat transfer to the support rod to some extent.

[0003] Due to the significant temperature gradient along the axial direction of the optical path support rod (the temperature near the laser source end is significantly higher than that at the far end), the uneven thermal expansion of the support rod material causes bending deformation towards the hot side. This bending deformation is directly transmitted to the resonant cavity lens flange plate fixed on the support rod, causing a small but not negligible angular shift in the optical axis direction of the lens. In actual working scenarios, after the laser has been running continuously for 30 minutes, the temperature difference between the near and far ends of the support rod can reach 15℃ to 20℃. The resulting lens angular shift typically exceeds 30 arcseconds, which is sufficient to degrade the directional stability of the output laser and reduce the resonant efficiency.

[0004] Furthermore, excimer lasers generate laser light by exciting a working gas through discharge. Unlike conventional solid-state lasers, their lasers are mostly cylindrical in structure. During prolonged operation under discharge excitation or during long-distance transport and impacts, the cavity can vibrate, causing the laser to shift laterally and resulting in the laser energy not reaching the expected level.

[0005] In existing technologies, two main approaches are used to suppress the aforementioned thermal bending effect and vibration offset: First, adding a heat insulation pad or rubber shock absorber between the cavity base and the optical path base to reduce the heat conduction path and absorb vibration; second, designing the optical path support rod as a single-material rod with a uniform cross-section and relying on an external adjustment rod for manual calibration. However, heat insulation measures cannot completely block heat conduction, and the uniform material support rod will inevitably bend under the temperature gradient, and the direction of this bending is fixedly related to the position of the hot end and cannot be dynamically offset by itself. The external adjustment rod can only be statically fine-tuned when the laser is stopped, and cannot track temperature changes in real time during operation, nor can it eliminate the bending deformation of the support rod that gradually develops during operation. In view of this, the present invention proposes an excimer laser with a cage-type optical path adjustment rod and a coaxial fine-tuning device. Summary of the Invention

[0006] The purpose of this invention is to provide an excimer laser with a cage-type optical path adjustment rod and a coaxial fine-tuning device, in order to solve the problem mentioned in the background art that the optical path support rod of the excimer laser is thermally bent and deformed due to the temperature difference between the near end and the far end, which causes the lens angle to shift, and that existing heat insulation or uniform material designs and static calibration cannot dynamically eliminate this problem.

[0007] To solve the above problems, an excimer laser with a cage-type optical path adjustment rod and a coaxial fine-tuning device is provided. The laser cavity includes an optical path base for fixing the optical path, which is symmetrically arranged on the lower side of the laser cavity. The laser cavity is not in contact with the surface of the optical path base. Support components are symmetrically arranged at both ends of the optical path base. The support components include support rods that pass through the ends of the two optical path bases.

[0008] The support rod is a hollow structure, with an intermediate layer and an inner layer rod fixedly installed inside, and the intermediate layer is sleeved on the outside of the inner layer rod;

[0009] The thickness of the intermediate layer is gradually distributed along the axial direction, with the end closer to the laser source inside the laser cavity being thicker and the end farther from the laser source being thinner.

[0010] The inner layer rod has the lowest coefficient of thermal expansion, the middle layer rod has the highest coefficient of thermal expansion, and the support rod has a medium coefficient of thermal expansion.

[0011] Two optical path adjustment plates are axially arranged in the middle of the support rod, and an adjustment knob is threadedly connected to the middle of the optical path adjustment plate.

[0012] When the heat generated by the laser cavity is conducted to the support rod through the installation path, an axial temperature gradient is generated on the support rod, specifically, the end near the laser source is hot and the end far is cold. Since the coefficient of thermal expansion of the intermediate layer is much greater than that of the inner rod, and the thickness of the intermediate layer is greater at the hot end, the axial compressive stress generated by the constraint of the inner rod on the expansion of the hot end of the intermediate layer is greater. This uneven stress distribution causes the support rod to produce a slight bend in the direction away from the laser cavity, making the inherent bending direction of the support rod opposite to the thermal bending direction. The two cancel each other out, thus achieving dynamic thermal self-compensation.

[0013] As a further improvement to this technical solution, the surface of the support rod is uniformly distributed with multiple annular grooves, and the interior of the annular grooves is filled with graphite-copper composite thermally conductive adhesive. The annular grooves are used to cut off the continuous rigid path of the support rod along the axial direction.

[0014] The annular groove cuts off the continuous rigid path of the support rod along the axial direction, allowing the support rod to produce local micro-deformation when subjected to thermal stress transmitted from the intermediate and inner layers. This releases the axial thermal stress and avoids delamination or micro-cracks caused by the difference in thermal expansion coefficients between the composite layers.

[0015] As a further improvement to this technical solution, the surface of the inner rod is fixedly provided with a plurality of spiral microgrooves corresponding to the positions of each annular groove. The spiral microgrooves are used to increase the surface area of ​​the inner rod and at the same time serve as buffer folds for thermal stress release.

[0016] The spiral microgroove enhances the diffusion bond strength between the inner rod and the intermediate layer, allowing the inner rod to undergo slight radial shrinkage without affecting the overall bending characteristics.

[0017] As a further improvement to this technical solution, a ball seat is fixedly provided at one end of the support rod, and a ball head is engaged with the ball seat. The ball head is fixedly provided on one side of the corresponding optical path base.

[0018] This design allows for a small amount of free swing at the end of the support rod closest to the heat source.

[0019] As a further improvement to this technical solution, multiple shape memory alloy wires are fixedly and evenly arranged on the side of the annular plate near the optical path base, and the other end of the shape memory alloy wires is fixedly connected to the side wall of the optical path base.

[0020] The shape memory alloy wire is in a relaxed state in the initial state, and the annular plate is parallel to the optical path base in the initial state.

[0021] This structure provides a constraint boundary for the support rod, allowing its end to swing freely with the bending action without generating additional constraint torque when thermally induced reverse bending compensation occurs, thus ensuring that the compensation bending of the support rod is fully released. On the other hand, when abnormal high temperature causes the compensation capacity of the support rod to be overloaded, the shape memory alloy wire actively contracts and forcibly pulls the annular plate back to the initial center position, and simultaneously pulls the end of the support rod back to the initial position.

[0022] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0023] 1. In this excimer laser with a cage-type optical path adjustment rod and a coaxial fine-tuning device, when the heat generated by the laser source inside the laser cavity is conducted to the support assembly through the installation path, an axial temperature gradient is generated on the support assembly. Since the thermal expansion coefficient of the intermediate layer is much greater than that of the inner rod, and the thickness of the intermediate layer is greater at the hot end, the axial compressive stress generated after the expansion of the intermediate layer at the hot end is constrained by the inner rod is greater. This uneven stress distribution causes the support assembly to produce a slight bend in the direction away from the laser cavity. This invention, through material composite and thickness gradient, makes the inherent bending direction of the support assembly opposite to the thermal bending direction, and the two cancel each other out, thereby achieving dynamic thermal self-compensation and preventing the degradation of the directional stability of the output laser.

[0024] 2. In this excimer laser with a cage-type optical path adjustment rod and a coaxial fine-tuning device, the connecting block and the spherical protrusion form a spherical contact fit, allowing the end of the support rod to produce a slight swing. On the one hand, this provides a constraint boundary for the support rod, allowing its end to swing freely with the bending action without generating additional constraint torque when thermally induced reverse bending compensation occurs, thus ensuring that the compensation bending of the support assembly is completely released. On the other hand, when abnormal high temperature causes the compensation capacity of the support assembly to be overloaded, the shape memory alloy wire actively contracts and forcibly pulls one end of the support rod back to the initial center position, further enhancing the long-term reliability and reset accuracy of the passive thermal bending compensation of the support assembly.

[0025] 3. In this excimer laser with a cage-type optical path adjustment rod and a coaxial fine-tuning device, the position of the laser cavity can be finely adjusted after the optical path base and the cavity base are fixed on the chassis via the optical path adjustment plate and its adjustment knob set axially in the middle of the support rod. This ensures that the laser cavity and the laser optical path are in a coaxial state, effectively compensating for cavity vibration and offset caused by discharge excitation or collisions during long-distance transportation, and ensuring the energy output accuracy and optical path stability of the laser under complex working conditions. Attached Figure Description

[0026] Figure 1 This is a schematic diagram of the overall structure of the present invention;

[0027] Figure 2This is a schematic diagram of the installation position structure of the support component and adjustment component of the present invention;

[0028] Figure 3 This is a schematic diagram of the supporting component and adjusting component of the present invention;

[0029] Figure 4 This is a cross-sectional view of the support rod and intermediate layer structure of the present invention;

[0030] Figure 5 This is an exploded view of the support component structure of the present invention;

[0031] Figure 6 This is a schematic diagram of the sleeve structure of the present invention;

[0032] Figure 7 This is a schematic diagram of the adjustment component structure of the present invention.

[0033] The meanings of the labels in the diagram are as follows:

[0034] 1. Laser cavity; 2. Optical path base; 3. Support assembly; 31. Support rod; 32. Intermediate layer; 33. Inner layer rod; 34. Annular groove; 35. Spiral microgroove; 36. Ball seat; 37. Ball head;

[0035] 4. Adjustment component; 41. Annular plate; 42. Connecting block; 43. Spherical protrusion; 44. Shape memory alloy wire;

[0036] 5. Sleeve; 6. Corrugated ring; 7. Optical path support flange plate; 8. Resonant cavity lens flange plate; 9. Optical path adjustment plate; 10. Adjustment knob; 11. Connecting rod; 12. Cavity base. Detailed Implementation

[0037] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0038] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," and "counterclockwise," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0039] Example 1

[0040] First, please refer to Figures 1-3 The purpose of this embodiment is to provide an excimer laser with a cage-type optical path adjustment rod and a coaxial fine-tuning device, including a laser cavity 1. A cavity base 12 for supporting the laser cavity 1 is symmetrically arranged on the lower side of the laser cavity 1. A rubber shock absorber is fixedly arranged between the cavity base 12 and the laser cavity 1 to prevent the laser cavity 1 from shaking significantly.

[0041] Furthermore, optical path support flange plates 7 are fixedly installed at both ends of the laser cavity 1. A resonant cavity lens flange plate 8 is fixedly installed on the side of the optical path support flange plate 7 away from the laser cavity 1. The resonant cavity lens is fixed on the resonant cavity lens flange plate 8. The photons generated by the laser cavity 1 resonate back and forth between the two resonant cavity lenses, and finally form a laser beam that is emitted from the light outlet.

[0042] Furthermore, the lower side of the laser cavity 1 is symmetrically provided with optical path bases 2 for fixing the optical path. The laser cavity 1 is not in contact with the surface of the optical path base 2. The two ends of the optical path base 2 are symmetrically provided with support components 3. The support components 3 include support rods 31 that pass through the ends of the two optical path bases 2. The two ends of the support rods 31 are respectively inserted into the bottom of the two optical path support flange plates 7. The support rods 31 pass through the cavity base 12 and do not contact the cavity base 12, so as to prevent the heat generated by the laser during operation from being transferred from the cavity base 12 to the support rods 31, thereby reducing the thermal deformation of the support rods 31.

[0043] Secondly, two optical path adjustment plates 9 are axially arranged in the middle of the support rod 31. The middle of the optical path adjustment plate 9 is threaded with an adjustment knob 10 for adjusting the position of the laser cavity 1. The upper side of the optical path support flange plate 7 is symmetrically fixed with connecting rods 11. The connecting rods 11 are inserted into the ends of the two optical path adjustment plates 9 respectively. After the optical path base 2 and the cavity base 12 are fixed on the chassis, the position of the laser cavity 1 can be finely adjusted by adjusting the adjustment knobs 10 on each optical path adjustment plate 9, so that the laser cavity 1 and the laser optical path are in a coaxial state to compensate for the vibration and displacement of the laser cavity 1 caused by discharge excitation or transportation collision.

[0044] When the laser cavity 1 is working, some heat is still transferred to the support rod 31. To prevent the laser direction from shifting due to thermal deformation of the support rod 31, please refer to [the relevant documentation]. Figures 2-4 The support rod 31 is a hollow structure, with an intermediate layer 32 and an inner rod 33 fixedly installed inside. The intermediate layer 32 is sleeved on the outside of the inner rod 33. The support rod 31, the intermediate layer 32 and the inner rod 33 are formed as a whole by diffusion welding to ensure no relative sliding.

[0045] Furthermore, the thickness of the intermediate layer 32 is gradually distributed along the axial direction, with the end closer to the laser source inside the laser cavity 1 being thicker and the end farther from the laser source being thinner. The inner layer rod 33 has the lowest coefficient of thermal expansion, the intermediate layer 32 has the highest coefficient of thermal expansion, and the support rod 31 has a medium coefficient of thermal expansion.

[0046] When the heat generated by the laser cavity 1 is conducted to the support rod 31 through the installation path, an axial temperature gradient is generated on the support rod 31, specifically, the end near the laser source is hot and the end far is cold. Since the coefficient of thermal expansion of the intermediate layer 32 is much greater than that of the inner rod 33, and the thickness of the intermediate layer 32 is greater at the hot end, the axial compressive stress generated by the expansion of the hot end of the intermediate layer 32, constrained by the inner rod 33, is greater. This uneven stress distribution causes the support rod 31 to produce a slight bend in the direction away from the laser cavity 1, i.e., the hot end bends outward.

[0047] Traditional uniform material support devices tend to bend inwards towards the hot end under the same temperature gradient because the hot end elongates more, causing the rod to bend towards the hot side. This invention, through material composites and thickness gradients, makes the inherent bending direction of the support rod 31 opposite to the thermal bending direction, so that the two cancel each other out, thereby achieving dynamic thermal self-compensation and preventing the support rod 31 from deteriorating the directional stability of the output laser after being bent by heat.

[0048] For further details, please refer to Figures 3-5 The surface of the support rod 31 is evenly distributed with multiple annular grooves 34. The interior of the annular grooves 34 is filled with graphite-copper composite thermally conductive adhesive to ensure that heat can still be transferred along the axial direction, maintain the designed temperature gradient, and at the same time not hinder stress release. The annular grooves 34 are used to cut off the continuous rigid path of the support rod 31 along the axial direction, so that when the support rod 31 is subjected to thermal stress transmitted by the intermediate layer 32 and the inner layer rod 33, it can produce local micro-deformation, release axial thermal stress, and avoid delamination or micro-cracks caused by the difference in thermal expansion coefficient between the composite layers.

[0049] Furthermore, the surface of the inner rod 33 is fixedly provided with a plurality of spiral microgrooves 35 corresponding to the positions of each annular groove 34. The spiral microgrooves 35 are used to increase the surface area of ​​the inner rod 33, improve the diffusion bonding strength with the intermediate layer 32, and at the same time serve as buffer folds for thermal stress release, allowing the inner rod 33 to generate slight radial shrinkage without affecting the overall bending characteristics.

[0050] To facilitate rapid heat dissipation around support rod 31, please refer to... Figure 2 and Figure 6 A sleeve 5 is fitted on the surface of the support rod 31. The sleeve 5 is fixedly inserted into the bottom of the two corresponding optical path adjustment plates 9, and the inner wall of the sleeve 5 does not contact the surface of the support rod 31. In order to ensure that the sleeve 5 can quickly conduct heat, the sleeve 5 is made of copper with excellent thermal conductivity.

[0051] Multiple corrugated rings 6 are evenly arranged on the surface of the sleeve 5. One end of the sleeve 5 is close to the heat source. The high thermal conductivity of copper is used to quickly transfer some of the heat along the axial direction of the sleeve 5 to the optical path support flange plate 7, thereby changing the temperature field distribution around the support rod 31. The hot-end-cold-end temperature gradient that would originally be generated on the support rod 31 is weakened by the bypass heat conduction of the sleeve 5.

[0052] The compensation capability of the support rod 31 is designed for medium temperature gradients, and the sleeve 5 has a spiral guide groove inside. When the device operates for a long time and the temperature gradient exceeds the design value, the spiral guide groove on the inner wall of the sleeve 5 will induce micro-convection of air, further drawing heat away from the end of the support rod 31 near the heat source, so that the actual temperature gradient of the support rod 31 is actively limited within the effective compensation range of the core component.

[0053] For further details, please refer to Figure 3 and Figure 5 One end of the support rod 31 is fixedly provided with a ball seat 36, and a ball head 37 is engaged with the ball seat 36. The ball head 37 is fixedly provided on one side of the corresponding optical path base 2. This design allows the end of the support rod 31 near the heat source to swing freely with a small amplitude.

[0054] For further details, please refer to Figure 3 and Figure 7 An adjustment component 4 is provided at one end of the support rod 31 near the ball seat 36. The adjustment component 4 includes an annular plate 41. A connecting block 42 is fixedly provided on the inner side of the annular plate 41. A spherical protrusion 43 is engaged with the inner side of the connecting block 42. The spherical protrusion 43 is fixedly provided at one end of the support rod 31 near the ball seat 36. When the end of the support rod 31 near the adjustment component 4 swings slightly, the annular plate 41 and the connecting block 42 swing accordingly.

[0055] Multiple shape memory alloy wires 44 are fixedly and evenly arranged on one side of the annular plate 41 near the optical path base 2. The other end of the shape memory alloy wires 44 is fixedly connected to the side wall of the optical path base 2. The shape memory alloy wires 44 are in a relaxed state in the initial state. The shape memory alloy wires 44 shrink after being heated. The annular plate 41 is parallel to the optical path base 2 in the initial state.

[0056] On the one hand, this structure provides a constraint boundary for the support rod 31, allowing its end to swing freely with the bending action without generating additional constraint torque when thermally induced reverse bending compensation occurs, thereby ensuring that the compensation bending of the support rod 31 is completely released. On the other hand, when abnormal high temperature causes the compensation capacity of the support rod 31 to be overloaded, the shape memory alloy wire 44 actively contracts and forcibly pulls the annular plate 41 back to the initial center position, and simultaneously pulls the end of the support rod 31 back to the initial position.

[0057] Therefore, when the adjustment component 4 and the support component 3 are linked, not only is the thermally induced reverse bending compensation always in an unconstrained ideal motion state across the entire temperature range, but the self-correction function of the compensation zero point is also realized, further enhancing the long-term reliability and reset accuracy of the passive thermal bending compensation of the core component.

[0058] Therefore, based on the above, the working principle of the present invention can be summarized as follows: When the laser cavity 1 operates for a long time, some of the heat is conducted to the support component 3, and an axial temperature gradient is generated on the support rod 31. At this time, the expansion of the hot end of the middle layer 32 is constrained by the inner layer rod 33, resulting in a greater axial compressive stress, which causes the support rod 31 to bend in the opposite direction of its inherent bending direction, which cancels out the bending caused by the heat of the support rod 31, thus achieving dynamic thermal compensation. When the device operates for a long time and the temperature gradient exceeds the design value, the heat near the heat source end of the support rod 31 is extracted by the sleeve 5, so that the actual temperature gradient of the support rod 31 is actively limited within the effective compensation range of the core component. When the abnormal high temperature causes the compensation capacity of the support rod 31 to be overloaded, the shape memory alloy wire 44 actively contracts to pull one end of the support rod 31 back to the initial position, thereby achieving automatic correction of the zero compensation point.

[0059] The foregoing has shown and described the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely preferred examples and are not intended to limit the invention. Various changes and modifications can be made to the invention without departing from its spirit and scope, and all such changes and modifications fall within the scope of the present invention as claimed. The scope of protection of the present invention is defined by the appended claims and their equivalents.

Claims

1. An excimer laser with a cage-type optical path adjustment rod and a coaxial fine-tuning device, comprising a laser cavity (1), wherein optical path bases (2) for fixing the optical path are symmetrically arranged on the lower side of the laser cavity (1), and the laser cavity (1) is not in contact with the surface of the optical path base (2), characterized in that: The optical path base (2) is provided with support components (3) symmetrically arranged at both ends. The support components (3) include support rods (31) inserted through the ends of the two optical path bases (2). Both ends of the laser cavity (1) are fixedly provided with optical path support flange plates (7), and a resonant cavity lens flange plate (8) is fixedly provided on the side of the optical path support flange plate (7) away from the laser cavity (1). The two ends of the support rod (31) are respectively inserted into the bottom of the two optical path support flange plates (7). Two optical path adjustment plates (9) are provided in the middle axis of the support rod (31). An adjustment knob (10) is threaded in the middle of the optical path adjustment plate (9) to adjust the position of the laser cavity (1). The laser cavity (1) is symmetrically provided with cavity bases (12) for supporting the laser cavity (1) on the lower side. The support rod (31) passes through the cavity base (12) and does not contact the cavity base (12).

2. The excimer laser with a cage-type optical path adjustment rod and a coaxial fine-tuning device according to claim 1, characterized in that: The upper side of the optical path support flange plate (7) is symmetrically fixed with connecting rods (11), and the connecting rods (11) are inserted into the ends of the two optical path adjustment plates (9).

3. The excimer laser with a cage-type optical path adjustment rod and a coaxial fine-tuning device according to claim 1, characterized in that: The support rod (31) is a hollow structure, with an intermediate layer (32) and an inner rod (33) fixedly installed inside it, and the intermediate layer (32) is sleeved on the outside of the inner rod (33); The thickness of the intermediate layer (32) is gradually distributed along the axial direction, with the end closer to the laser source inside the laser cavity (1) being thicker and the end farther away from the laser source being thinner. The inner rod (33) has the lowest coefficient of thermal expansion, the middle layer (32) has the highest coefficient of thermal expansion, and the support rod (31) has a medium coefficient of thermal expansion.

4. The excimer laser with a cage-type optical path adjustment rod and a coaxial fine-tuning device according to claim 3, characterized in that: The surface of the support rod (31) is evenly distributed with a plurality of annular grooves (34), the interior of which is filled with graphite-copper composite thermally conductive adhesive, and the annular grooves (34) are used to cut off the continuous rigid path of the support rod (31) along the axial direction.

5. The excimer laser with a cage-type optical path adjustment rod and a coaxial fine-tuning device according to claim 4, characterized in that: The inner rod (33) has a plurality of spiral microgrooves (35) fixedly provided on its surface, which correspond to the positions of each annular groove (34). The spiral microgrooves (35) are used to increase the surface area of ​​the inner rod (33) and at the same time serve as buffer folds for thermal stress release.

6. The excimer laser with a cage-type optical path adjustment rod and a coaxial fine-tuning device according to claim 1, characterized in that: One end of the support rod (31) is fixedly provided with a ball seat (36), and a ball head (37) is engaged with the ball seat (36). The ball head (37) is fixedly provided on one side of the corresponding optical path base (2).

7. The excimer laser with a cage-type optical path adjustment rod and a coaxial fine-tuning device according to claim 6, characterized in that: An adjustment component (4) is provided at one end of the support rod (31) near the ball seat (36). The adjustment component (4) includes an annular plate (41), and a connecting block (42) is fixedly provided on the inner side of the annular plate (41).

8. The excimer laser with a cage-type optical path adjustment rod and a coaxial fine-tuning device according to claim 7, characterized in that: The inner side of the connecting block (42) is engaged with a spherical protrusion (43), which is fixedly disposed at one end of the support rod (31) near the ball seat (36).

9. The excimer laser with a cage-type optical path adjustment rod and a coaxial fine-tuning device according to claim 8, characterized in that: The annular plate (41) has multiple memory alloy wires (44) evenly arranged on one side near the optical path base (2), and the other end of the memory alloy wires (44) is fixedly connected to the side wall of the optical path base (2). The shape memory alloy wire (44) is in a relaxed state in the initial state, and the annular plate (41) is parallel to the optical path base (2) in the initial state.

10. The excimer laser with a cage-type optical path adjustment rod and a coaxial fine-tuning device according to claim 1, characterized in that: A sleeve (5) is fitted on the surface of the support rod (31), and the inner wall of the sleeve (5) does not contact the surface of the support rod (31). The sleeve (5) is fixedly inserted into the bottom of the two corresponding optical path adjustment plates (9); The sleeve (5) has multiple corrugated rings (6) evenly arranged on its surface, and a spiral guide groove is provided inside the sleeve (5).

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