Closed loop flux monitoring electronic plasma precision regulation system

Abstract

This invention relates to the field of precision voltage regulation technology, specifically a closed-loop flux monitoring system for precise voltage regulation of electron plasma. The system adopts a three-in-one architecture of flux closed-loop monitoring, adaptive precise voltage regulation, and dynamic energy-saving optimization, including a plasma flux closed-loop monitoring module, a high-precision signal preprocessing module, an adaptive voltage regulation control module, a dynamic energy-saving power supply module, a load condition sensing module, and a fault protection module. These modules work collaboratively to form a fully closed-loop intelligent operation system of "monitoring-analysis-control-energy saving-protection," pioneering a flux-voltage dual-closed-loop collaborative control architecture, significantly improving voltage regulation accuracy and stability. This invention breaks through the traditional single voltage closed-loop control mode, using the core parameters of plasma electron, ion, and electric field flux as the control benchmark to establish a precise coupling model between flux and voltage. Combined with an improved fuzzy PID hierarchical control algorithm, the voltage regulation accuracy can reach ±0.1V, and the dynamic response time is ≤5ms.

Description

Technical Field

[0001] This invention relates to the field of precision voltage regulation technology, specifically to a closed-loop flux monitoring electronic plasma precision voltage regulation system. Background Technology

[0002] Electron plasma equipment ionizes gas through high-voltage discharge, forming a plasma system containing electrons, ions, and free radicals. The uniformity and stability of the electron and ion flux within the plasma directly affect its performance. In actual industrial operation, factors such as grid voltage fluctuations, load impedance changes, ambient temperature drift, and gas velocity fluctuations can directly cause plasma discharge voltage deviations, resulting in uneven flux distribution, discharge flicker, and decreased ionization efficiency. This not only significantly reduces processing accuracy but also leads to substantial energy waste.

[0003] Existing plasma voltage regulation systems mostly adopt a single voltage closed-loop control mode, which only adjusts the output voltage itself without considering the core working parameter of plasma—particle flux, thus exhibiting significant technical defects.

[0004] First, the monitoring dimensions are limited, lacking closed-loop monitoring of plasma electron flux, ion flux, and spatial electric field flux. This makes it impossible to accurately capture fluctuations in the internal working conditions of the plasma, and voltage regulation is lagging, resulting in poor steady-state voltage regulation accuracy and insufficient adaptability under dynamic working conditions.

[0005] Secondly, the control algorithms are rigid, mostly using fixed-parameter PID control, which cannot dynamically correct the control parameters according to the flux fluctuation amplitude and load changes. When facing complex industrial conditions, it is prone to overshoot, oscillation and untimely adjustment, resulting in poor plasma discharge stability.

[0006] Third, the energy-saving performance is weak. Traditional voltage stabilizing equipment always maintains full power redundant output and does not dynamically match the power supply according to the actual working conditions. The switching loss, reactive power loss and line heat loss are serious, the overall energy efficiency of the equipment is low, and the long-term operating energy consumption cost is extremely high.

[0007] Fourth, it has poor adaptability to different operating conditions and cannot meet the different voltage regulation and energy-saving requirements of plasma steady state, dynamic fluctuation, start-stop standby, etc. It has high standby power consumption and serious waste of redundant energy consumption.

[0008] In existing technologies, some solutions attempt to improve voltage regulation by optimizing the power supply circuit structure, but they can only achieve basic voltage stability and do not establish a coupling control mechanism between flux and voltage, thus failing to solve the discharge fluctuation problem from the fundamental level of plasma operation. A few other solutions introduce flux monitoring technology, but they only achieve single-point flux detection without a closed-loop feedback control link. The monitoring data cannot guide voltage optimization and adjustment, and there is no energy-saving and consumption-reducing mechanism, resulting in insufficient practicality and economy of the technology.

[0009] Currently, the industry lacks an integrated voltage regulation system that can achieve full-dimensional closed-loop monitoring of flux, precise adaptive voltage control, and dynamic energy efficiency optimization under operating conditions. This makes it difficult to meet the dual requirements of high-precision voltage regulation and low-energy operation, thus restricting the industrial-scale, efficient, and energy-saving application of plasma equipment.

[0010] To address the numerous shortcomings of existing technologies, there is an urgent need to develop a closed-loop flux monitoring system for precise voltage regulation of electronic plasma. By constructing a flux-voltage dual closed-loop collaborative control architecture and combining adaptive algorithms and dynamic energy-saving technologies, this system can achieve precise voltage regulation of plasma, adaptive adaptation to operating conditions, and efficient energy-saving operation, thus solving the industry pain points of low voltage regulation accuracy, slow response, high energy consumption, and poor stability of existing equipment. Summary of the Invention

[0011] The purpose of this invention is to overcome the shortcomings of the prior art and provide a closed-loop flux monitoring electronic plasma precise voltage stabilization system. This system solves the technical problems of traditional plasma voltage stabilization systems, such as lack of flux monitoring, low voltage stabilization accuracy, lag in dynamic response, high energy consumption, and poor adaptability to operating conditions. It achieves closed-loop monitoring of plasma particle flux, millisecond-level precise voltage stabilization, and dynamic energy-saving operation under all operating conditions, significantly improving the working stability and energy utilization rate of plasma equipment and reducing industrial operating energy costs.

[0012] Technical solution

[0013] To achieve the above objectives, this invention provides a closed-loop flux monitoring and precise voltage regulation system for electronic plasma. The system adopts a three-in-one architecture of closed-loop flux monitoring, adaptive precise voltage regulation, and dynamic energy-saving optimization. It includes a plasma flux closed-loop monitoring module, a high-precision signal preprocessing module, an adaptive voltage regulation control module, a dynamic energy-saving power supply module, a load condition sensing module, and a fault protection module. These modules work collaboratively to form a fully closed-loop intelligent operation system of "monitoring-analysis-control-energy saving-protection." The specific technical solution is as follows.

[0014] The plasma flux closed-loop monitoring module is the core sensing unit of the system. It adopts a multi-region array-type monitoring structure, including an array-type flux sensor group, an electric field sensing unit, a timing acquisition unit, and a data feedback unit. The array-type flux sensor group is distributed in the core region, edge region, and exhaust gas region of the plasma discharge, simultaneously collecting real-time data on electron flux and ion flux to avoid data deviation caused by single-point monitoring. The electric field sensing unit detects the electric field flux density and potential fluctuations in the discharge space in real time, supplementing the dimensions of plasma operating parameters. The timing acquisition unit adopts a 200kHz microsecond-level high-frequency sampling mechanism to eliminate monitoring lag. The data feedback unit feeds back all flux parameters to the control terminal in real time in a closed loop, providing accurate data support for voltage regulation.

[0015] The high-precision signal preprocessing module is electrically connected to the flux closed-loop monitoring module, and its core function is to purify the original monitoring signal. Due to electromagnetic interference and environmental noise in industrial environments, the original flux signal suffers from noise, drift, and amplitude instability. This module uses multi-stage active filter circuits, differential amplifier circuits, and analog-to-digital conversion circuits to perform noise reduction, filtering, amplitude calibration, and digital conversion on the original signal, eliminating interference signals and transmitting a precise and stable digital flux signal to the adaptive voltage regulation control module to ensure control accuracy.

[0016] The adaptive voltage regulation control module is the core control unit of the system, with a built-in flux-voltage coupled control model and an improved fuzzy PID algorithm. The system pre-inputs standard flux thresholds and voltage reference values ​​corresponding to different plasma processes. The control module compares the deviation values ​​of the actual flux parameters with the standard thresholds in real time. Based on the deviation fluctuation amplitude, it classifies the system into three operating conditions: small steady-state fluctuation, medium dynamic fluctuation, and large sudden fluctuation. It dynamically and adaptively corrects the PID proportional, integral, and derivative parameters, accurately outputs voltage regulation commands, and realizes graded differentiated voltage regulation. This effectively avoids the overshoot and oscillation problems of traditional fixed algorithms, controlling the voltage regulation accuracy within ±0.1V and the dynamic response time within 5ms.

[0017] The dynamic energy-saving power supply module is the core of the system's energy saving, adapting to the energy efficiency optimization requirements under all operating conditions. It includes a controllable rectifier unit, a resonant soft-switching unit, a reactive power compensation unit, and a heat loss suppression unit. The controllable rectifier unit adopts adaptive pulse width modulation technology to dynamically adjust the output voltage, current, and frequency parameters according to load conditions and flux fluctuations, eliminating full-power redundant output. The resonant soft-switching unit achieves zero-voltage turn-on and zero-current turn-off of the switching transistors, thoroughly reducing power loss during switching. The reactive power compensation unit monitors the reactive power of the circuit in real time and dynamically adds compensation capacitors to stabilize the system power factor above 0.98, significantly reducing reactive power loss. The heat loss suppression unit balances the circuit branch current through multi-channel dynamic current sharing regulation, reducing line voltage drop and device heat loss, achieving comprehensive energy saving from the hardware level.

[0018] The load condition sensing module collects real-time operating parameters such as plasma load impedance, discharge current, operating temperature, and gas flow rate, and links with the voltage regulation control module and energy-saving power supply module to achieve adaptive load matching. When the load impedance or operating environment changes, the system automatically corrects the voltage regulation parameters and power supply to avoid voltage instability and energy consumption surges caused by sudden changes in operating conditions, thereby improving the system's overall adaptability.

[0019] The fault protection module integrates overvoltage protection, overcurrent protection, overtemperature protection, abnormal throughput protection, and short circuit protection functions. It monitors system operating parameters in real time and immediately triggers current limiting, voltage reduction, and shutdown protection actions when abnormal parameters occur. At the same time, it uploads fault codes to ensure the safe and stable operation of the equipment and avoid the expansion of faults that could cause equipment damage and energy waste.

[0020] This invention innovatively sets three adaptive energy-saving operation modes, covering the entire operating cycle of the equipment: In steady-state energy-saving mode, the plasma flux is stable and without fluctuations, and the system automatically reduces redundant power supply to maintain accurate voltage regulation while minimizing operating energy consumption; In dynamic adaptation mode, the voltage and power supply are adjusted synchronously in real time to address fluctuations in operating conditions and flux deviations, taking into account both voltage regulation accuracy and dynamic energy efficiency; In standby low-power mode, the redundant power supply of the main circuit is automatically cut off when the equipment stops working, and only the monitoring and control units are kept running at low power, with standby power consumption of less than 1W, which significantly reduces standby energy consumption compared to traditional equipment.

[0021] Beneficial effects

[0022] Compared with existing technologies, this invention has the following significant technical advantages, energy-saving advantages, and application advantages, effectively solving many core defects of existing technologies. The specific beneficial effects are as follows:

[0023] This invention pioneers a dual-closed-loop collaborative control architecture for flux and voltage, significantly improving voltage regulation accuracy and stability. Breaking away from the traditional single-voltage closed-loop control mode, it establishes a precise coupling model between flux and voltage using core parameters of plasma electron, ion, and electric field flux as the control benchmark. Combined with an improved fuzzy PID hierarchical control algorithm, voltage regulation accuracy can reach ±0.1V, with a dynamic response time ≤5ms. This completely solves the problems of voltage regulation lag, overshoot oscillation, and unstable discharge in traditional equipment. Plasma flux uniformity is improved by more than 30%, significantly enhancing industrial processing precision and product qualification rate.

[0024] This invention offers comprehensive energy conservation and environmental protection, significantly reducing energy consumption and losses, and demonstrating outstanding energy-saving effects. It achieves end-to-end energy-saving optimization across five dimensions: switching losses, reactive power losses, heat losses, redundancy losses, and standby losses. Through soft-switching technology, dynamic reactive power compensation, adaptive load power matching, and multi-mode energy-saving operation strategies, it effectively reduces the overall energy consumption of the system. Actual test data shows that compared to traditional plasma voltage regulators, this system achieves a comprehensive energy saving rate of 18%-25%, reduces standby power consumption by over 90%, and can significantly reduce electricity costs during long-term industrial operation, meeting the needs of green and energy-saving industrial production and possessing extremely high energy-saving and environmental protection value.

[0025] With wide adaptability to various operating conditions and strong dynamic anti-interference capability, this invention, through multi-region flux closed-loop monitoring and multi-dimensional operating condition perception, can adapt to all operating conditions such as steady-state plasma operation, dynamic fluctuations, start-stop switching, and low-load standby. It can effectively resist external interference such as power grid fluctuations, ambient temperature changes, gas flow rate disturbances, and load impedance changes. Even in complex industrial environments, it can maintain high-precision voltage stabilization and high-efficiency energy-saving operation. The equipment's operational stability and adaptability far exceed those of traditional equipment.

[0026] Highly integrated and highly reliable. This invention integrates monitoring, voltage stabilization, energy saving, and protection functions into one compact structure with convenient operation and maintenance. Equipped with multiple fault linkage protection mechanisms, it can avoid fault risks such as overvoltage, overcurrent, overtemperature, and abnormal throughput in real time, avoiding equipment damage and energy waste. The failure rate of continuous equipment operation is greatly reduced, and the service life is significantly extended, making it suitable for long-term industrial continuous operation scenarios.

[0027] The invention features an original technical architecture with a wide range of applications. Its core control logic and energy-saving strategy are original designs, with no overlap with existing technologies. It is widely adaptable to various plasma devices, including those for semiconductor plasma etching, industrial waste gas plasma purification, material surface modification, and low-temperature plasma disinfection and dust removal. With strong versatility and low promotion costs, it possesses extremely high industrial application prospects and market value.

[0028] Obviously, based on the above description of the present invention, and according to common technical knowledge and conventional methods in the field, various other modifications, substitutions or alterations can be made without departing from the basic technical concept of the present invention.

[0029] The following detailed embodiments further illustrate the above-described content of the present invention. However, this should not be construed as limiting the scope of the present invention to the following examples. All technologies implemented based on the above-described content of the present invention fall within the scope of the present invention. Attached Figure Description

[0030] Figure 1 This is a schematic diagram of the overall closed-loop frame structure of the system of the present invention;

[0031] Figure 2 This is a schematic diagram of the plasma flux closed-loop monitoring and acquisition structure of the present invention;

[0032] Figure 3 This is a schematic diagram of the adaptive voltage-stabilizing fuzzy PID algorithm control structure of the present invention;

[0033] Figure 4 This is a schematic diagram of the internal control structure of the dynamic energy-saving power supply module of the present invention;

[0034] Figure 5This is a schematic diagram of the automatic switching structure for all-condition energy-saving operation modes of the present invention. Detailed Implementation

[0035] The present invention is illustrated below with specific embodiments, but these are not intended to limit the scope of the invention. Figure 1-5 As shown, a closed-loop flux monitoring and precise voltage regulation system for electronic plasma is described.

[0036] Example 1: Implementation of the Overall System Architecture

[0037] This invention discloses a closed-loop flux monitoring electronic plasma precision voltage stabilization system. The overall architecture consists of a plasma flux closed-loop monitoring module, a high-precision signal preprocessing module, an adaptive voltage stabilization control module, a dynamic energy-saving power supply module, a load condition sensing module, and a fault protection module. Each module achieves coordinated operation through electrical lines and a communication bus. After the system is powered on, the load condition sensing module and the flux closed-loop monitoring module are first initialized synchronously to complete sensor self-test, circuit self-test, and condition parameter acquisition and calibration. Then, the timing acquisition unit continuously acquires plasma multi-region electron flux, ion flux, and electric field flux parameters at a frequency of 200kHz and transmits them to the high-precision signal preprocessing module. After noise reduction, filtering, and analog-to-digital conversion, the accurate digital signal is sent to the adaptive voltage regulation control module. The control module compares the parameter deviations through the flux-voltage coupling model and outputs accurate voltage regulation commands in combination with the improved fuzzy PID algorithm. The dynamic energy-saving power supply module dynamically matches the output voltage, power, and frequency according to the regulation commands and real-time load conditions, and simultaneously activates soft switching loss reduction, reactive power compensation, and heat loss suppression functions. The system monitors the operating fault parameters in real time throughout the process to achieve closed-loop control of voltage regulation and energy-saving operation. At the same time, it automatically switches between three operating modes: steady-state energy saving, dynamic adaptation, and standby low power consumption, according to the operating conditions.

[0038] Example 2: Precise Implementation of Flux Closed-Loop Monitoring

[0039] This invention's flux closed-loop monitoring module adopts a three-zone array monitoring layout. High-precision flux sensors are arranged in the core discharge zone, edge diffusion zone, and exhaust gas output zone of the plasma discharge cavity, simultaneously collecting particle flux data from different regions to avoid the one-sidedness of single-point monitoring data. An electric field sensing unit is embedded inside the discharge cavity to capture minute fluctuations in spatial electric field flux density and potential in real time, with a sampling accuracy of up to 0.01mV. The timing acquisition unit employs a microsecond-level time-division sampling mechanism to synchronously acquire electron flux, ion flux, electric field flux, and load operating parameters, eliminating data timing deviations. All monitoring data is transmitted back to the control module in real time via a high-speed bus, forming an uninterrupted closed-loop feedback link. This ensures that voltage regulation is always based on the actual working state of the plasma, guaranteeing voltage stability accuracy from the source and avoiding the shortcomings of traditional voltage regulation that are disconnected from the actual plasma operating conditions.

[0040] Example 3: Implementation of Adaptive Precision Voltage Regulation

[0041] This invention's adaptive voltage regulation control module incorporates an original flux-voltage coupling control model, pre-storing standard flux thresholds and reference voltage parameters for different process scenarios. During operation, the control module calculates the relative deviation between the actual flux parameters and the standard thresholds in real time, classifying the control mode into three levels based on the deviation magnitude: when the flux deviation is ≤3%, it is determined to be a steady-state fluctuation, employing a small-parameter PID fine-tuning mode to maintain voltage stability and avoid energy loss from frequent adjustments; when 3% < flux deviation ≤8%, it is determined to be a dynamic fluctuation, adaptively correcting the PID integral and derivative parameters to quickly eliminate flux offset and restore voltage regulation; when the flux deviation >8%, it is determined to be a sudden change in operating conditions, activating a fast-response control mode to maximize dynamic response speed, completing precise voltage correction within 5ms and eliminating plasma discharge disturbances. This graded control mode balances steady-state voltage regulation accuracy and dynamic response speed, while reducing ineffective control actions and lowering control energy consumption.

[0042] Example 4: Implementation of Comprehensive Energy Conservation and Consumption Reduction

[0043] This invention's dynamic energy-saving power supply module achieves energy-saving optimization from multiple dimensions. The core energy-saving implementation methods are as follows: First, soft-switching energy saving: through a resonant circuit, the switching transistor achieves zero-voltage turn-on and zero-current turn-off, completely eliminating switching losses in the traditional hard-switching mode, reducing switching losses by more than 80%. Second, reactive power optimization: real-time detection of circuit reactive power and dynamic switching of compensation units stabilize the system power factor above 0.98, eliminating reactive power loss and grid energy waste. Third, load adaptive energy saving: dynamically adjusting the power output according to the real-time plasma load power, abandoning the traditional fixed full-power output mode, reducing redundant power by about 20% under steady-state conditions. Fourth, heat loss suppression: balancing the current in each branch through dynamic current sharing regulation reduces heat loss in lines and power devices, minimizing heat dissipation. Fifth, standby low-power control: automatically cutting off the main power circuit when the equipment is in standby mode, retaining only the low-power monitoring and control unit, controlling standby power consumption to within 1W. These multi-dimensional energy-saving technologies work synergistically to achieve energy saving and consumption reduction throughout the entire operating cycle of the equipment.

[0044] Example 5: Implementation of Adaptive Operating Conditions and Fault Protection

[0045] The load condition sensing module collects parameters such as plasma load impedance, discharge current, operating temperature, and inlet flow rate in real time. When external conditions fluctuate, the system automatically corrects the flux-voltage coupling parameters to adapt to load changes and maintain discharge stability. The fault protection module is equipped with a multi-level threshold protection mechanism. When faults such as output voltage exceeding the threshold, current overload, device over-temperature, abnormal flux disturbance, or circuit short circuit are detected, current limiting, voltage reduction, and shutdown protection actions are immediately executed. At the same time, the fault status is locked and fault information is uploaded to prevent the fault from escalating, ensuring the safe, stable, and energy-efficient operation of the equipment and eliminating ineffective energy consumption under fault conditions.

[0046] Working principle

[0047] The core working principle of this invention is flux-voltage dual closed-loop coordinated control + dynamic energy-saving optimization under all operating conditions. The system uses plasma electron flux, ion flux, and electric field flux as core control benchmarks. It captures fluctuations in the internal plasma conditions in real time through multi-region closed-loop monitoring, replacing the traditional single voltage monitoring mode. A precise coupling relationship is established between flux fluctuation parameters and voltage control parameters. An improved fuzzy PID hierarchical algorithm achieves adaptive and precise voltage control, ensuring uniform and stable plasma discharge flux. Simultaneously, based on real-time load conditions and operating status, the system dynamically matches power supply and optimizes circuit operation. Through soft-switching loss reduction, reactive power compensation, heat loss suppression, and multi-mode energy-saving switching technologies, it comprehensively reduces equipment operating energy consumption. While achieving high-precision voltage regulation and high-stability discharge, it maximizes energy utilization, realizing a two-way synergy between precise voltage regulation and energy conservation and environmental protection.

[0048] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0049] The above description is merely a preferred embodiment of the present invention and does not limit the patent scope of the present invention. Any equivalent structural transformations made using the contents of the present invention's specification and drawings under the inventive concept of the present invention, or direct / indirect applications in other related technical fields, are included within the patent protection scope of the present invention.

[0050] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A closed-loop flux monitoring and precise voltage regulation system for electron plasma, characterized in that, It includes a plasma flux closed-loop monitoring module, a high-precision signal preprocessing module, an adaptive voltage regulation control module, a dynamic energy-saving power supply module, a load condition sensing module, and a fault protection module. The plasma flux closed-loop monitoring module is used to collect electron flux, ion flux, space potential and electric field flux parameters in the plasma discharge region in real time, forming continuous closed-loop monitoring data. The high-precision signal preprocessing module is electrically connected to the plasma flux closed-loop monitoring module and is used to perform noise reduction, filtering, amplification and analog-to-digital conversion on the acquired raw flux signal to remove environmental interference noise signals. The adaptive voltage regulation control module has a built-in improved fuzzy PID control algorithm, which dynamically outputs precise voltage regulation commands based on the deviation between the preprocessed flux signal and the preset standard flux threshold. The dynamic energy-saving power supply module is electrically connected to the adaptive voltage regulation control module and the load condition sensing module, respectively. It dynamically matches the output power according to the real-time load condition of the plasma to suppress reactive power loss and circuit heat loss. The load condition sensing module is used to collect plasma load impedance, discharge current and operating temperature parameters in real time to achieve adaptive operation. The fault protection module is used for real-time monitoring and linkage protection of overvoltage, overcurrent, overtemperature, and abnormal flow faults.

2. The closed-loop flux monitoring electron plasma precision voltage stabilization system according to claim 1, characterized in that, The plasma flux closed-loop monitoring module includes an array of flux sensors, an electric field sensing unit, a timing acquisition unit, and a data transmission unit. The array-type flux sensor group adopts a multi-point distributed layout, which is respectively arranged in the core area, edge area and exhaust gas area of ​​plasma discharge, and simultaneously collects electron and ion flux data in different areas. The electric field sensing unit is used to detect the electric field flux density and potential fluctuation parameters of the plasma discharge space. The timing acquisition unit adopts a microsecond-level timing sampling mechanism with a sampling frequency of not less than 200kHz, to achieve lag-free acquisition of throughput parameters. The data feedback unit feeds back the real-time monitored throughput data to the adaptive voltage regulation control module in a closed loop, forming a continuous closed-loop control link.

3. The closed-loop flux monitoring electron plasma precision voltage stabilization system according to claim 1, characterized in that, The adaptive voltage regulation control module incorporates a flux-voltage coupling regulation model, establishing a linear coupling relationship between plasma flux fluctuations and voltage regulation. It dynamically corrects PID parameters using a fuzzy algorithm, achieving graded and precise voltage regulation for three operating conditions: small flux fluctuations, sudden fluctuations, and steady-state fluctuations. The voltage regulation accuracy error is ≤ ±0.1V, and the dynamic response time is ≤ 5ms.

4. The closed-loop flux monitoring electron plasma precision voltage stabilization system according to claim 1, characterized in that, The dynamic energy-saving power supply module includes a controllable rectifier unit, a resonant soft-switching unit, a reactive power compensation unit, and a heat loss suppression unit. The controllable rectifier unit adopts pulse width adaptive modulation to dynamically adjust the output voltage amplitude and frequency according to the load conditions. The resonant soft-switching unit enables the switching transistor to turn on with zero voltage and turn off with zero current, significantly reducing switching losses. The reactive power compensation unit cancels the reactive power of the circuit in real time, improving the power factor to above 0.98; The heat loss suppression unit reduces line voltage drop and heat loss through dynamic current sharing regulation, achieving energy-saving operation throughout the process.

5. The closed-loop flux monitoring electron plasma precision voltage stabilization system according to claim 1, characterized in that, The system is equipped with an adaptive energy efficiency optimization strategy, which includes three operating modes: steady-state energy saving mode, dynamic adaptation mode, and standby low power consumption mode. Under steady-state conditions, it automatically reduces redundant output power; under dynamic fluctuation conditions, it matches power supply parameters in real time; and in standby mode, it cuts off redundant power supply. Standby power consumption is less than 1W, and the overall energy saving rate is improved by 18%-25% compared with traditional plasma voltage stabilization equipment.

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