Wafer handling fork and wafer contact state visual detection jig and method

Abstract

This application provides a visual detection fixture and method for the contact status between a wafer handling forklift and a wafer. A power circuit module is located at the center of the top surface of the fixture. Indicator lights are positioned on the top surface of the fixture at locations corresponding to the three silicon wafer support points when the wafer handling forklift is in position. A groove is formed on the bottom surface of the fixture at the corresponding positions of the indicator lights, and a varistor is located at the bottom of the groove. When the wafer handling forklift contacts the fixture, if the difference in the rising height of the robot controlling the movement of the wafer handling forklift—whether the first indicator light illuminates or all three indicator lights illuminate simultaneously—is within 1 mm, it is determined that the wafer handling forklift has achieved normal contact with the wafer. Through varistor sensing and visual feedback, real-time feedback and horizontal calibration of the contact status between the silicon wafer support points and the wafer are achieved, improving the efficiency and accuracy of installation debugging and periodic preventive maintenance verification.

Description

Technical Field

[0001] This application relates to the field of semiconductor technology, specifically to a visual detection fixture and method for the contact state between a wafer handling fork and a wafer. Background Technology

[0002] Existing semiconductor wafer handling forks are mainly divided into three categories: vacuum adsorption, clamp holding, and silicon wafer pin kits. For silicon wafer pin kit type wafer handling forks, such as... Figure 1 As shown, the position is fixed during the conveying and moving process by relying on the friction between the three silicon wafer support points 2 distributed at different positions of the mechanical fork 1 and the back of the wafer 3.

[0003] When the relative horizontal difference between the surface formed by the three silicon wafer support points 2 and the wafer 3 is large, there is a risk of friction and scratching of the wafer 3 within the front-opening wafer transfer box (Foup) 5 during wafer 3 handling. Due to visual obstruction caused by light refraction on the surface of the front-opening wafer transfer box 5, and the obstruction of the robotic arm structure by the silicon wafer support points 2 located at the front of the robotic fork 1, it is difficult to observe the direct contact between the silicon wafer support points 2 and the wafer 3 during actual debugging and subsequent preventative maintenance. Therefore, the debugging process relies more heavily on experience, resulting in low efficiency and the inability to standardize operations through visual judgment. Summary of the Invention

[0004] In view of the shortcomings of the prior art described above, the purpose of this application is to provide a visual detection fixture and method for the contact state between a wafer handling forklift and a wafer, so as to solve the problem that the detection of the contact state between the wafer handling forklift and the wafer cannot be standardized in the prior art.

[0005] To achieve the above and other related objectives, this application provides a visual detection fixture for the contact state between a wafer handling fork and a wafer. A power circuit module is provided at the center of the top surface of the fixture. Indicator lights are provided on the top surface of the fixture at positions corresponding to the three silicon wafer support points when the wafer handling fork moves into place. A groove is formed on the bottom surface of the fixture at the position corresponding to the indicator lights, and a varistor is provided at the bottom of the groove.

[0006] Preferably, the power circuit module is connected to the varistor and indicator light via wires. When the protrusion on the silicon wafer support of the wafer handling fork touches the varistor, the power circuit module receives a signal and lights up the corresponding indicator light.

[0007] Preferably, the fixture is located inside a front-opening wafer transfer box used for testing wafer handling forks.

[0008] Preferably, the indicator light is an LED light.

[0009] Preferably, a lithium battery is used as the power source for the power circuit module.

[0010] This application also provides a method for visually detecting the contact state between a wafer handling forklift and a wafer. A front-opening wafer transfer box for testing the wafer handling forklift is placed on a leveled machine. In jog mode, the wafer handling forklift is brought into contact with the fixture. If the difference in the rising height of the robot controlling the movement of the wafer handling forklift is within 1mm when the first indicator light illuminates or all three indicator lights illuminate simultaneously, it is determined that the wafer handling forklift can make normal contact with the wafer.

[0011] As described above, the wafer handling fork and the wafer contact state visualization detection fixture and method provided in this application have the following beneficial effects: through pressure-sensitive sensing and visualization feedback, real-time feedback and horizontal calibration of the contact status between the silicon wafer support point of the wafer handling fork and the wafer are realized, thereby improving the efficiency and accuracy of installation, commissioning and regular preventive maintenance confirmation. Attached Figure Description

[0012] To more clearly illustrate the technical solutions in the specific embodiments of this application or the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this application. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0013] Figure 1 The diagram shows a wafer handling forklift, which is a type of silicon wafer support, picking up and delivering wafers in a front-opening wafer transfer box. Figure 2 The diagram shows a visual detection fixture for the contact state between the wafer handling fork and the wafer provided in an embodiment of this application. Figure 3 Displayed as Figure 2 The diagram shows the bottom of a visual inspection fixture for detecting the contact status between the wafer handling fork and the wafer. Figure 4 Displayed as wafer handling forklift and Figure 2 The diagram shows a visual inspection fixture for normal contact between the wafer handling fork and the wafer. Detailed Implementation

[0014] The following specific examples illustrate the implementation of this application. Those skilled in the art can easily understand other advantages and effects of this application from the content disclosed in this specification. This application can also be implemented or applied through other different specific embodiments, and various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of this invention.

[0015] The technical solutions of this application will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this application. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0016] In the description of this application, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," indicating orientation or positional relationships, are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on this application. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0017] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal connection of two components; and they can refer to a wireless connection or a wired connection. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0018] Furthermore, the technical features involved in the different embodiments of this application described below can be combined with each other as long as they do not conflict with each other.

[0019] Please see Figure 2 The diagram illustrates a visual detection fixture for the contact state between the wafer handling fork and the wafer provided in an embodiment of this application.

[0020] like Figure 2 As shown, the dimensions, curvature, and thickness of the fixture 20 are consistent with those of the wafer. A power circuit module 21 is located at the center of the top surface of the fixture 20, as shown. Figure 4 As shown, when the wafer handling fork 1 moves into position, all three indicator lights 22 located on the top surface of the fixture 20, corresponding to the three silicon wafer support points of the wafer handling fork 1, illuminate. Figure 3 As shown, a groove 23 is formed on the bottom surface of the fixture 20 at the position corresponding to the indicator light 22. A varistor (not shown in the figure) is provided at the bottom of the groove 23. When the wafer transport fork 1 moves into place, the silicon wafer support point of the wafer transport fork 1 is precisely matched with the groove 23, and the protrusion on the silicon wafer support point touches the varistor, and the indicator light 22 lights up.

[0021] The fixture 20 is housed within a front-opening wafer transfer box used for testing wafer handling forks. The power circuit module 21 is connected to the varistor and indicator light 22 via wires. When the protrusion on the silicon wafer support point of the wafer handling fork 1 touches the varistor, the power circuit module 21 receives a signal and illuminates the corresponding indicator light 22. For example, the indicator light 22 is an LED, and a lithium battery is used as the power source for the power circuit module 21.

[0022] This application also provides a method for visually detecting the contact state between a wafer handling forklift and a wafer. A front-opening wafer transfer box for testing the wafer handling forklift is placed on a machine that has been leveled. In jog mode, the wafer handling forklift is brought into contact with the fixture 20. If the difference in the rising height of the robot controlling the movement of the wafer handling forklift is within 1mm when the first indicator light illuminates and all three indicator lights illuminate simultaneously, it is determined that the wafer handling forklift can make normal contact with the wafer. When picking up and placing wafers, there is no risk of friction or scratching of the wafers in the front-opening wafer transfer box.

[0023] It should be noted that the illustrations provided in this embodiment are only schematic representations of the basic concept of this application. Therefore, the drawings only show the components related to this invention and are not drawn according to the actual number, shape and size of the components. In actual implementation, the form, quantity and proportion of each component can be arbitrarily changed, and the layout of the components may also be more complex.

[0024] In summary, the wafer handling forklift and wafer contact state visualization detection fixture and method provided in this application, through pressure-sensitive sensing and visual feedback, achieve real-time feedback and horizontal calibration of the contact status between the wafer handling forklift's silicon wafer support point and the wafer, improving the efficiency and accuracy of installation debugging and periodic preventive maintenance verification. Therefore, this application effectively overcomes the various shortcomings of the prior art and has high industrial application value.

[0025] The above embodiments are merely illustrative of the principles and effects of this application and are not intended to limit this application. Any person skilled in the art can modify or alter the above embodiments without departing from the spirit and scope of this application. Therefore, all equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in this invention should still be covered by the claims of this application.

Claims

1. A visual detection fixture for the contact state between a wafer handling forklift and a wafer, characterized in that, A power circuit module is provided at the center of the top surface of the fixture. Indicator lights are provided on the top surface of the fixture at the positions corresponding to the three silicon wafer support points when the wafer handling fork is moved into place. A groove is formed on the bottom surface of the fixture at the position corresponding to the indicator lights, and a varistor is provided at the bottom of the groove.

2. The fixture according to claim 1, characterized in that, The power circuit module is connected to the varistor and the indicator light via wires. When the protrusion on the silicon wafer support of the wafer handling fork touches the varistor, the power circuit module receives a signal and lights up the corresponding indicator light.

3. The fixture according to claim 1, characterized in that, The fixture is located inside a front-opening wafer transfer box used for testing the wafer handling forklift.

4. The fixture according to claim 1, characterized in that, The indicator light is an LED light.

5. The fixture according to claim 1, characterized in that, A lithium battery is used as the power source for the power circuit module.

6. A method for visually detecting the contact state between a wafer handling forklift and a wafer, characterized in that, Place a front-opening wafer transfer box for testing the wafer handling forklift on a leveled machine. In jog mode, bring the wafer handling forklift into contact with the fixture as described in any one of claims 1-5. If the difference in the rising height of the robot controlling the movement of the wafer handling forklift is within 1mm when the first indicator light illuminates and all three indicator lights illuminate simultaneously, it is determined that the wafer handling forklift can make normal contact with the wafer.

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