Non-contact chuck

Abstract

The present application provides a kind of non-contact chuck.It can effectively inhibit the position deviation of workpiece without setting physical guide.Pick-up chuck (10) has porous member (12) made of porous body with air permeability, and a single first suction passage (13) is formed in a linear manner from the opening on the adsorption surface (10A) side to the back surface (10C) side in the up-down direction, and N is a natural number, and at least 2 (N+1) power of second suction passages (15) are formed in a manner extending from the opening on the adsorption surface (10A) side to the back surface (10C) side, and the second suction passage (15) has 2 N power of rotational symmetry with the center line (O) of the first suction passage (13) as the reference.

Description

Technical Field

[0001] This invention relates to a non-contact suction cup used in a non-contact adsorption device for adsorbing workpieces in a non-contact state. Background Technology

[0002] The wafer containing semiconductor elements is diced and monolithized into a chip (workpiece), which is then picked up by a pick-up chuck (adsorption device) using a pick-up clamp (suction cup) and transferred to a mounting device for mounting it onto a substrate.

[0003] A fine circuit is formed on one side of the chip. If it comes into direct contact with the pick-up clips during adsorption, the circuit may be damaged. Furthermore, when joining the chip's surface terminals to the substrate's terminals, surface treatments such as plasma treatment or surface activation are sometimes performed on the chip surface to ensure and improve connectivity, and this surface treatment must be maintained. Therefore, it is preferable to avoid contact with the adsorbed chip.

[0004] Therefore, the chip is adsorbed in a non-contact state with the pickup clip. For example, Patent Documents 1 and 2 disclose that gas is ejected through a porous material component of the pickup clip, and the gas is drawn in through a through hole provided in the center, thereby appropriately combining positive and negative pressure to adsorb the chip in a non-contact state. In addition, Patent Document 1 also discloses that a through hole for drawing in gas can be provided at a position offset from the center.

[0005] Existing technical documents Patent documents Patent Document 1: Japanese Patent Application Publication No. 2022-157320 Patent Document 2: Japanese Patent Application Publication No. 2022-157324 Summary of the Invention

[0006] The problem that the invention aims to solve However, when the pick-up chuck operates with significant acceleration and deceleration while the chip is being held in a non-contact manner, it is unavoidable that the chip will move parallel to the chuck and / or rotate relative to it, potentially causing the chip to shift position. Furthermore, it is also possible that the chip may not be able to maintain its hold and will detach.

[0007] In addition, to suppress positional misalignment, physical guides are sometimes placed on the pick-up chuck to surround the chip. However, in this case, interference between the guides and the chip is unavoidable, which may cause damage, contamination, or other adverse effects on the chip.

[0008] The present invention was made in view of the above points, and its object is to provide a non-contact chuck that can effectively suppress the positional displacement of a workpiece without the need for a physical guide.

[0009] Methods for solving problems The non-contact suction cup of the present invention has a surface for adsorbing a workpiece in a non-contact state and a back surface opposite to the surface in the vertical direction. It is characterized by having a porous member made of a breathable porous material, forming a single first attraction passage in a straight vertical direction extending from the opening on the adsorbent surface towards the back surface, and at least 2 to the power of (N+1) second attraction passages in a manner extending from the opening on the adsorbent surface towards the back surface, wherein the second attraction passages have a rotational symmetry of 2 to the power of N based on the center line of the first attraction passage.

[0010] In the non-contact suction cup of the present invention, when gas is supplied to the porous member from the opposite side, gas is ejected toward the workpiece through the pores of the porous member, generating a positive pressure between the adsorption surface and the workpiece. Furthermore, when gas is attracted via the first and second suction passages, gas between the adsorption surface and the workpiece can be attracted, generating a negative pressure between the adsorption surface and the workpiece. Thus, compared to the technologies disclosed in Patent Documents 1 and 2, by applying the negative pressure generated by the attraction through the second suction passage arranged in a manner having a rotational symmetry of 2 to the Nth power, it is possible to suppress parallel movement and / or rotational motion of the workpiece relative to the adsorption surface.

[0011] Preferably, the non-contact suction cup of the present invention further comprises a first dense member made of a dense body, which covers the entire circumference of the side circumferential surface of the first suction passage.

[0012] In this case, a first dense member is present around the opening on the adsorption surface side of the first suction passage, so when gas is attracted through the first suction passage, the workpiece can be attracted toward the center of the opening, thus suppressing the parallel movement and / or rotational movement of the workpiece relative to the adsorption surface.

[0013] In addition, preferably, the non-contact suction cup of the present invention also includes a second dense member made of a dense body, which covers the entire circumference of the side circumferential surface of the second suction passage.

[0014] In this case, a second dense member is present around each of the openings on the adsorption surface side of the second attraction passage, so that when gas is attracted through each second attraction passage, the workpiece can be attracted toward the center of each opening, thereby suppressing the parallel movement and / or rotational movement of the workpiece relative to the adsorption surface.

[0015] Additionally, preferably, in the non-contact suction cup of the present invention, the second suction passage includes a portion that is inclined toward the opening of the second suction passage in a direction away from the first suction passage.

[0016] In this case, the negative pressure is further directed towards the center, thus effectively suppressing the parallel movement and / or rotational motion of the workpiece.

[0017] In addition, preferably, the non-contact suction cup of the present invention also includes a groove having an opening on the adsorption surface side, having rotational symmetry of 2 to the power of N with respect to the center line, and being formed to connect the second attraction passage, the outer periphery of the groove being surrounded by the second dense member.

[0018] In this situation, a negative pressure is also generated between the adsorption surface and the workpiece at the groove. This negative pressure can more effectively suppress the parallel movement and / or rotational motion of the workpiece.

[0019] In addition, preferably, the non-contact suction cup of the present invention also includes a connecting member that connects the porous member that is separated into an outer side and an inner side by the second dense member.

[0020] In this case, gas can be supplied to the porous component of the partition through a single gas supply mechanism. Attached Figure Description

[0021] Figure 1 This is a schematic perspective view of the pickup clip according to the first embodiment of the present invention.

[0022] Figure 2 yes Figure 1 A schematic cross-sectional view at line II-II.

[0023] Figure 3 yes Figure 1 A schematic cross-sectional view at line III-III.

[0024] Figure 4 This is a schematic cross-sectional view of a modified pickup clip according to the first embodiment of the present invention.

[0025] Figure 5 This is a schematic perspective view of the pickup clip according to the second embodiment of the present invention.

[0026] Figure 6 yes Figure 5 A schematic cross-sectional view at line VI-VI.

[0027] Figure 7 yes Figure 5 A schematic cross-sectional view at line VII-VII.

[0028] Figure 8 This is a schematic perspective view of the pickup clip according to the third embodiment of the present invention.

[0029] Figure 9 yes Figure 8 A schematic cross-sectional view at the IX-IX line.

[0030] Figure 10 This is a schematic perspective view of the pickup clip according to the fourth embodiment of the present invention.

[0031] Figure 11 yes Figure 10 A schematic cross-sectional view at the XI-XI line. Detailed Implementation

[0032] The embodiment of the non-contact chuck of the present invention is a pick-up chuck, which is used in a pick-up chuck as a non-contact adsorption device (non-contact chuck). Furthermore, the workpiece (adsorbed component) adsorbed by the non-contact chuck of the present invention is a chip monolithically formed by dicing a semiconductor wafer. The pick-up chuck is a device that uses a pick-up chuck to adsorb a chip supplied from a supply device and transfers the adsorbed chip to a mounting device for mounting it onto a substrate.

[0033] A pickup collet is mounted on a pickup head, which is located at the front end of an arm of a pickup chuck. For example, a magnet is provided inside the pickup head, and the pickup collet is held on the pickup head by the attraction of the magnet, while being positioned by a positioning mechanism. The positioning mechanism can be configured, for example, by providing a protrusion on one of the pickup collet and the pickup head, and a corresponding recess on the other.

[0034] (First Implementation) Reference Figures 1 to 3 The pickup clip 10 of the first embodiment of the present invention will be described.

[0035] The pickup clip 10 has a surface 10B, which is the side facing the adsorption surface 10A to adsorb the chip W in a non-contact state, and a back surface 10C, which is the opposite side of the surface 10B in the vertical direction. Here, the surface 10B is the lower surface, and the back surface 10C is the upper surface. The pickup clip 10 is generally square plate-shaped, with a small square plate-shaped protrusion in the center of its surface 10B side. The surface of this protrusion facing the surface 10B side is the adsorption surface 10A.

[0036] The pickup clip 10 includes a base 11, a porous member 12, a first dense member 14 surrounding a first suction passage 13 formed on the porous member 12, and a second dense member 16 surrounding a second suction passage 15 formed on the porous member 12. The porous member 12, the first dense member 14, and the second dense member 16 are disposed in the base 11 at a portion including the portion constituting the aforementioned small square plate-shaped protrusion.

[0037] The matrix 11, the first dense member 14, and the second dense member 16 are composed of a non-permeable dense body. The dense body prevents gas from passing through its interior. Here, the dense body is made of metal, but it could also be made of ceramic, resin, or the like.

[0038] The porous component 12 is composed of a porous body with permeability. The pores inside the porous body are interconnected, allowing gas to pass through. Here, the porous body is made of sintered metal, but it can also be made of ceramic, resin, carbon, etc.

[0039] A first supply passage 17 is formed inside the substrate 11, and the first supply passage 17 is formed in a ring shape to surround the lower part of the porous member 12 throughout its entire circumference. In addition, a second supply passage 18 is formed inside the substrate 11, one end of the second supply passage 18 communicating with the first supply passage 17. The other end of the second supply passage 18 opens on the side 10D of the pickup clip 10.

[0040] In addition, although not shown, the second supply passage 18 is connected to the supply passage formed in the pickup head through the opening, and the supply passage is connected to a supply mechanism such as a supply pump for supplying gas.

[0041] Furthermore, the first suction passage 13 is formed to extend in a straight line in the vertical direction from the opening formed on the adsorption surface 10A side toward the back surface 10C side. The centerline O of the first suction passage 13 is located at the center when viewed from below the pickup clip 10. The first sealing member 14 is formed in a cylindrical shape to surround the side peripheral surface of the first suction passage 13 throughout its entire circumference.

[0042] In addition, the four second attraction channels 15 are formed to extend in a straight line inclined from the opening formed on the adsorption surface 10A side toward the back surface 10C side toward the center side.

[0043] Furthermore, the openings of the second attraction passage 15 are located at the four corners of the porous member 12. However, this is not a limitation; the porous member 12 may also be located outside the openings of the second attraction passage 15. Alternatively, the openings of the second attraction passage 15 may be located, for example, at the middle of the four outer edges of the porous member 12 when viewed from below.

[0044] The second dense member 16 is formed as an inclined cylindrical shape, which surrounds the side circumference of the four second attraction channels 15 throughout their entire circumference. Furthermore, the four second attraction channels 15 have a fourfold rotational symmetry (symmetry about a 90° rotation) with respect to the center line O of the first attraction channel 13. Regarding the number of second attraction channels 15, let N be a natural number; it is acceptable as long as it is at least a power of 2 (N+1) or more, and is not limited to four. Moreover, the second attraction channels 15 only need to be configured to have a rotational symmetry of a power of 2 with respect to the center line of the first attraction channel 13.

[0045] A third attraction channel 19 is formed inside the substrate 11, which communicates with the first attraction channel 13 and the second attraction channel 15. One end of the third attraction channel 19 opens on the side 10D of the pickup clip 10.

[0046] In addition, although not shown, the third supply passage 19 is connected via the opening to the suction passage formed in the pickup head, which is connected to a suction mechanism such as a suction pump for attracting gas.

[0047] In the pickup clip 10 configured as described above, when gas is supplied by the supply mechanism, gas can be supplied through the pores of the porous member 12 via the first and second supply passages 17 and 18, and the gas is uniformly sprayed toward the chip W through a plurality of pores on the surface 10B side, generating a positive pressure between the adsorption surface 10A and the chip W.

[0048] Furthermore, in the pickup clip 10, when gas is drawn by the aforementioned suction mechanism, gas can be drawn through the third suction passage 19 via the first and second suction passages 13 and 15. Thus, through these openings, gas between the adsorption surface 10A and the chip W can be drawn, generating a negative pressure between the adsorption surface 10A and the chip W.

[0049] Thus, compared to the technologies disclosed in Patent Documents 1 and 2, by further applying a negative pressure generated by attraction from four directions via the second attraction passage 15 configured in a rotationally symmetrical manner, it is possible to suppress parallel movement and / or rotational movement of the chip W relative to the adsorption surface 10A in any direction. Furthermore, this negative pressure is directed towards the center, thus effectively suppressing parallel movement and / or rotational movement of the chip W.

[0050] In addition, such as Figure 4 As shown, the second attraction channel 15A can also be formed to extend outward in a straight line from the opening formed on the adsorption surface 10A side toward the back surface 10C side (the side opposite to the center side).

[0051] (Second Implementation) Next, refer to Figures 5 to 7 The pickup clip 20 of the second embodiment of the present invention will be described. Furthermore, descriptions of structures identical to the pickup clip 10 of the first embodiment of the present invention will be omitted.

[0052] The pickup clip 20 includes a base 21, a porous member 22, a first dense member 24 surrounding a first suction passage 23 formed on the porous member 22, and a second dense member 26 surrounding a second suction passage 25 and a groove 31 formed on the porous member 22. The porous member 22, the first dense member 24, and the second dense member 26 are disposed in the base 21 at a portion including the portion constituting the aforementioned small square plate-shaped protrusion.

[0053] Furthermore, the first suction passage 23 is formed to extend in a straight line from the opening formed on the adsorption surface 20A side toward the back surface 20C side. The centerline O of the first suction passage 23 is located at the center when viewed from below the pickup clip 20. The first sealing member 24 is formed in a cylindrical shape to surround the side circumference of the first suction passage 23 throughout its entire circumference.

[0054] In addition, the four second attraction channels 25 are formed to extend in a straight line inclined from the opening formed on the adsorption surface 20A side toward the back surface 20C side toward the center side.

[0055] Furthermore, the openings of the second attraction passage 25 are located at the four corners of the porous member 22. However, this is not a limitation; the porous member 22 may also be located outside the openings of the second attraction passage 25. Alternatively, the openings of the second attraction passage 25 may be located, for example, at the middle of each of the four outer edges of the porous member 22 when viewed from below.

[0056] Furthermore, the grooves 31 that connect adjacent second attraction channels 25 to each other have openings on the adsorption surface 20A side, and are formed in four straight lines. The cross-sectional shape of the grooves 31 is semi-circular.

[0057] The second dense member 26 is formed as follows: four inclined cylindrical portions that surround the side circumference of the four second attraction channels 25, and four semi-cylindrical portions that connect these adjacent portions to form a whole surrounding the outer circumference of the groove 31. The second attraction channels 25 and the groove 31 have four rotational symmetries with respect to the center line O of the first attraction channel 23. With this structure, the portion of the porous member 22 between the first attraction channel 23 and the groove 31, and the four linear portions outside the groove 31 and between the second attraction channels 25, are exposed on the adsorption surface 20A.

[0058] Furthermore, regarding the number of second attraction channels 25, let N be a natural number; it is acceptable as long as it is at least a power of 2 (N+1) or more, and is not limited to four. In addition, the second attraction channels 25 and the groove 31 are not limited to having four rotational symmetries based on the center line O of the first attraction channel 23; they are acceptable as long as they have rotational symmetries that are powers of 2 (N).

[0059] In the pickup clip 20 configured as described above, in addition to the effects of the pickup clip 10 of the first embodiment, a negative pressure is also generated between the adsorption surface 20A and the chip W at the annular groove 31. This negative pressure at the annular location more effectively suppresses parallel movement and / or rotational motion of the chip W. Furthermore, although not shown, the second suction passage 25 may also be configured to extend obliquely outward (opposite to the center side) from the opening formed on the adsorption surface 20A side toward the back surface 20C side.

[0060] (Third implementation method) Next, refer to Figure 8 and Figure 9 The pickup clip 40 of the third embodiment of the present invention will be described. Furthermore, descriptions of structures identical to those of the pickup clips 10 and 20 of the first or second embodiments of the present invention will be omitted.

[0061] The pickup clip 40 includes a base 41, a porous member 42, a first dense member 44 surrounding a first suction passage 43 formed on the porous member 42, and a second dense member 46 surrounding a second suction passage 45 formed on the porous member 42. The porous member 42, the first dense member 44, and the second dense member 46 are disposed in the base 41 at a portion including the portion constituting the aforementioned small square plate-shaped protrusion.

[0062] The first suction passage 43 is formed to extend in a straight line from the opening formed on the adsorption surface 40A side toward the back surface 40C side. The center line O of the first suction passage 43 is located at the center when viewed from below the pickup clip 40. The first compacting member 44 is formed in the shape of a regular square prism so as to surround the side peripheral surface of the first suction passage 43 all around. However, the first compacting member 44 may also be formed in a cylindrical shape, for example.

[0063] Furthermore, a second attraction channel 45 is formed, which surrounds the first attraction channel 43 and has a square annular opening on the adsorption surface 40A side. The four sides of the second attraction channel 45 are formed to extend linearly and obliquely from the opening formed on the adsorption surface 40A side toward the back surface 40C side toward the center side. The second attraction channel 45 has four rotational symmetries based on the center line O of the first attraction channel 43.

[0064] Furthermore, regarding the number of second attraction pathways 45, let N be a natural number; it is acceptable as long as there are at least 2 to the power of (N+1) more than four. The second attraction pathways 45 are not limited to having four rotational symmetries based on the center line O of the first attraction pathway 43; let N be a natural number, it is acceptable as long as they have 2 to the power of N rotational symmetries.

[0065] The second dense member 46 is formed in such a way that the portion of it that surrounds the inner and outer sides of the second attraction passage 45 is integrally integrated. With this structure, the portion of the porous member 42 that is square when viewed from below, namely the annular first porous member 42A between the first attraction passage 43 and the second attraction passage 45, and the portion of the annular second porous member 42B that is square when viewed from below, on the outer side of the second attraction passage 45, are exposed on the adsorption surface 40A.

[0066] Furthermore, the first porous components 42A and the second porous components 42B are connected by a third porous component 42C. These first to third porous components 42A-42C are integrally formed. The third porous component 42C is composed of four cylindrical structures that connect the middle portions of the opposing surfaces of the first porous components 42A and the second porous components 42B to each other. The third porous component 42C corresponds to the connecting member of this invention, and its number and placement are not limited thereto. The exposed portion of the third porous component 42C is covered by a covering member 46A made of a dense body. However, the connecting member of this invention connecting the first porous components 42A and the second porous components 42B is not limited to being made of a porous body; it can also be made of a dense body. In this case, the covering member 46A may not be present.

[0067] In the pickup clip 40 configured as described above, in addition to the effects of the pickup clip 10 of the first embodiment, since the second suction passage 45 is annular, a uniform negative pressure is generated in annular shape along the horizontal direction between the adsorption surface 10A and the chip W. This annular negative pressure can more effectively suppress the parallel movement and / or rotational motion of the chip W. Furthermore, although not shown, the second suction passage 45 may also be configured to extend obliquely outward (to the side opposite to the center side) from the opening formed on the adsorption surface 40A side toward the back surface 40C side.

[0068] (Fourth Implementation) Next, refer to Figure 10 and Figure 11 The pickup clip 50 of the fourth embodiment of the present invention will be described. Furthermore, descriptions of structures identical to those of the pickup clips 10, 20, and 40 in any of the first to third embodiments of the present invention will be omitted.

[0069] The pickup clamp 50 includes a base 51, a porous member 52, a first dense member 54 surrounding a first suction passage 53 formed on the porous member 52, and a second dense member 56 surrounding a second suction passage 55 formed on the porous member 52. The porous member 52, the first dense member 54, and the second dense member 56 are disposed in the base 51 at a portion including the portion constituting the aforementioned small square plate-shaped protrusion.

[0070] The first suction passage 53 is formed to extend in a straight line from the opening formed on the adsorption surface 50A side toward the back surface 50C side. The center line O of the first suction passage 53 is located at the center when viewed from below the pickup clip 50. Here, the first dense member 54 is formed in the shape of a regular square prism so as to surround the side peripheral surface of the first suction passage 53 all around. However, the first dense member 54 may also be formed in a cylindrical shape, for example.

[0071] Furthermore, the eight second attraction channels 55 are formed to extend in a straight line from the opening formed on the adsorption surface 50A side toward the back surface 50C side. The second attraction channels 55 have fourfold rotational symmetry with respect to the center line O of the first attraction channel 53. Regarding the number of second attraction channels 55, let N be a natural number; it is acceptable as long as it is at least a power of 2 (N+1), and is not limited to eight. Moreover, the second attraction channels 55 are not particularly limited as long as they are configured to have a power of 2 N rotational symmetry with respect to the center line O of the first attraction channel 53.

[0072] The second dense member 56 is formed as a whole, so as to surround the side peripheral surfaces of the eight second attraction passages 55 continuously throughout the entire circumference. Furthermore, the second dense member 56 is formed as a ring that surrounds the first attraction passage 53 and is square when viewed from below.

[0073] With this structure, the porous member 52 has a square annular portion that appears as a square when viewed from below between the first dense member 54 and the second dense member 56, and a square annular portion located outside the second dense member 56, both exposed on the adsorption surface 50A. Furthermore, the square annular portion located outside the second dense member 56 is positioned to surround the outer periphery of the workpiece W adsorbed by the pick-up chuck 50 when viewed from below.

[0074] Furthermore, the second dense member 56 separates the two portions of the porous member 52 throughout the entire circumference on the surface 50B side, but on the back side 50C side, which is further from the surface 50B, the two portions of the porous member 52 are locally continuous.

[0075] In the pickup clip 50 configured as described above, a negative pressure is generated between the adsorption surface 50A and the chip W at the openings of the plurality of second suction passages 55. The negative pressure generated at these multiple locations effectively suppresses parallel movement and / or rotational motion of the chip W. Furthermore, although not shown, the second suction passages 55 may also be configured to extend obliquely from the opening formed on the surface 50B side toward the back surface 50C side.

[0076] In addition, gas is ejected from the porous member 52, which is exposed from the square annular portion located outside the second dense member 56, in a manner that surrounds the outer periphery of the workpiece W. Thus, the airflow acts as a guide, thereby suppressing the parallel movement and / or rotational movement of the workpiece W.

[0077] The foregoing has described several embodiments of the present invention, but these embodiments are shown as examples and are not intended to limit the scope of the invention. These new embodiments can be implemented in various other ways, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention. These embodiments and their variations are included within the scope or spirit of the invention, and are included within the scope of the invention as described in the claims and its equivalents.

[0078] For example, the case where the adsorption surfaces 10A, 20A, 40A, and 50A are located on the lower surface side of the pickup clips 10, 20, 40, and 50 has been described. However, this is not a limitation; the adsorption surface of the non-contact suction cup of the present invention may also be located on the upper surface side of the non-contact adsorption device. Furthermore, the case where one adsorption surface 10A, 20A, 40A, and 50A is provided for each pickup clip 10, 20, 40, and 50 has been described. However, this is not a limitation; multiple adsorption surfaces 10A, 20A, 40A, and 50A may be provided for each pickup clip 10, 20, 40, and 50.

[0079] Furthermore, the case where the adsorption surfaces 10A, 20A, 40A, and 50A are square has been described. However, they are not limited to this; they can also be rectangular, polygonal, circular, elliptical, etc. Additionally, the pickup clips 10, 20, 40, and 50 are not limited to having a small square plate-shaped protrusion at the center of the square plate-shaped surface 10B; their approximate shape can also be rectangular, polygonal, circular, elliptical, etc. Furthermore, the shape of the protrusion can also be rectangular, polygonal, circular, elliptical, etc., or independent of this shape.

[0080] Alternatively, for example, when the adsorption surfaces 10A, 20A, 40A, and 50A are rectangular plates, four, eight, or twelve second adsorption channels 15, 25, 45, and 55 can be formed with a second rotational symmetry, using the center line O of the first adsorption channels 13, 33, 43, and 53 as a reference. Alternatively, when the adsorption surfaces 10A, 20A, 40A, and 50A are regular octagonal plates, eight, sixteen, or twenty-four second adsorption channels 15, 25, 45, and 55 can be formed with an eighth rotational symmetry, using the center line O of the first adsorption channels 13, 33, 43, and 53 as a reference.

[0081] Furthermore, the case where the outer periphery of the first attraction passages 13, 23, 43, and 53 is surrounded by the first dense members 14, 24, 44, and 54 has been described. However, this is not a limitation; the outer periphery of the first attraction passages 13, 23, 43, and 53 may also be surrounded by porous members 12, 22, 42, and 52. Moreover, the case where the outer periphery of the second attraction passages 15, 25, 45, and 55 is surrounded by the second dense members 16, 26, 46, and 56 has been described. However, this is not a limitation; the outer periphery of the second attraction passages 15, 25, 45, and 55 may also be surrounded by porous members 12, 22, 42, and 52.

[0082] Furthermore, the case where the first suction passages 13, 23, 43, 53 and the second suction passages 15, 25, 45, 55 draw gas through a single third suction passage 19, 29, 49, 59 by a single suction mechanism described above has been described. However, this is not a limitation; they may also draw gas through multiple third suction passages by a single or multiple suction mechanisms described above.

[0083] Furthermore, the case of providing only one second supply passage 18, 28, 48, or 58 has been described. However, multiple passages can also be provided. In this case, preferably, N is a natural number, and the second supply passages 18, 28, 48, and 58 are configured to have rotational symmetry to the power of 2, based on the center line O of the first attraction passages 13, 23, 43, and 53. Additionally, the case of providing only one third attraction passage 19, 29, 49, or 59 has been described. However, multiple passages can also be provided.

[0084] Furthermore, the cases where the other ends of the second supply passages 18, 28, 38, and 48 and one end of the third suction passages 19, 29, 49, and 59 are open on the sides 10D, 20D, 40D, and 50D of the pickup clips 10, 20, 40, and 50 are described. However, they may also be open on the back sides 10C, 20C, 40C, and 50C of the pickup clips 10, 20, 40, and 50.

[0085] Symbol Explanation 10, 20, 40, 50: Pickup clips (non-contact suction cups); 10A, 20A, 40A, 50A: Adsorption surfaces; 10B, 20B, 40B, 50B: Surfaces; 10C, 20C, 40C, 50C: Back faces; 10D, 20D, 40D, 50D: Side faces; 11, 21, 41, 51: Substrate; 12, 22, 42, 52: Porous components; 13, 23, 43, 53: First suction channels; 14, 24, 44, 54: First dense channels. Components; 15, 25, 45, 55: Second attraction passage; 16, 26, 46, 56: Second dense component; 17, 27, 47, 57: First supply passage; 18, 28, 48, 58: Second supply passage; 19, 29, 49, 59: Third attraction passage; 31: Groove; 42A: First porous component; 42B: Second porous component; 42C: Third porous component (connecting component); 46A: Covering component; O: Centerline; W: Chip (workpiece).

Claims

1. A non-contact suction cup, It has a surface for adsorbing workpieces in a non-contact state and a back surface opposite to the surface in the vertical direction, characterized in that, It possesses porous components composed of air-permeable porous materials. A single first attraction channel is formed, extending in a straight line from the opening on the adsorption surface side toward the back side in a vertical direction. Let N be a natural number, and at least 2 (N+1) power-sized second attraction channels are formed such that they extend from the opening on the adsorption surface side toward the back side. The second attraction pathway has a rotational symmetry of 2 to the power of N with respect to the centerline of the first attraction pathway.

2. The non-contact suction cup according to claim 1, characterized in that, The non-contact suction cup also includes a first dense member made of a dense body, which covers the entire circumference of the side circumference of the first suction passage.

3. The non-contact suction cup according to claim 1 or 2, characterized in that, The non-contact suction cup also includes a second dense member made of a dense body, which covers the entire circumference of the side surface of the second suction passage.

4. The non-contact suction cup according to claim 1, characterized in that, The second attraction pathway includes a portion that slopes away from the opening of the second attraction pathway in a direction away from the first attraction pathway.

5. The non-contact suction cup according to claim 3, characterized in that, The non-contact suction cup also includes a groove with an opening on the suction surface side. This groove has a rotational symmetry of 2 to the power of N about the center line and is configured to connect the second suction path. The outer periphery of the groove is surrounded by the second dense member.

6. The non-contact suction cup according to claim 3, characterized in that, The non-contact suction cup also includes a connecting member that connects the porous member, which is separated into an outer and an inner side by the second dense member.

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