A vacuum purification system and its control method for suppressing acid gas corrosion.

Abstract

This invention discloses a vacuum purification system and its control method for inhibiting acidic gas corrosion. The vacuum purification system includes a purification furnace and a vacuum pump. The vacuum pump is connected to the purification furnace via a suction pipe. It also includes an air filter, which is installed on the suction pipe and filled with activated carbon. This invention achieves this by incorporating a gas filtration device in the suction pipe and using activated carbon material with high adsorption capacity to adsorb the acidic gas.

Description

Technical Field

[0001] This invention relates to the field of semiconductor thermoelectric material manufacturing technology, specifically to a vacuum purification system. Background Technology

[0002] In the manufacturing process of semiconductor thermoelectric materials, tellurium materials need to be purified by vacuum distillation to remove impurity elements in order to improve their thermoelectric properties. The purification process typically employs a vacuum purification furnace, and a vacuum pump maintains the system in a low-pressure environment to achieve effective separation.

[0003] In existing technologies, the vacuum pump is directly connected to the purification furnace via an extraction pipeline to extract gas from the furnace during distillation. However, in actual production, it has been found that tellurium feedstock releases gases containing acidic components during high-temperature distillation. These acidic gases enter the vacuum pump through the extraction pipeline, corroding the internal metal components and causing performance degradation or even malfunction. This significantly reduces the vacuum pump's interval between failures, impacting continuous operation, leading to frequent downtime, decreased production efficiency, and increased maintenance costs. Furthermore, existing technologies lack effective treatment for the gases entering the vacuum pump and lack protective measures against corrosive gases.

[0004] Therefore, there is an urgent need for a technical solution that can effectively reduce the amount of acidic gas entering the vacuum pump without changing the existing purification process parameters. Summary of the Invention

[0005] To address the problems existing in the prior art, the present invention provides a vacuum purification system and its control method for inhibiting acidic gas corrosion, thereby solving at least one of the aforementioned technical problems.

[0006] The technical solution of the present invention is: a vacuum purification system for inhibiting acidic gas corrosion, comprising a purification furnace and a vacuum pump, wherein the vacuum pump is connected to the purification furnace through an exhaust pipe, characterized in that it further comprises an air filter, wherein the air filter is installed on the exhaust pipe and the air filter is filled with activated carbon.

[0007] This invention incorporates a gas filtration device in the extraction pipeline and uses activated carbon material with high adsorption capacity to adsorb acidic gases.

[0008] More preferably, the purification furnace is used for vacuum distillation to purify tellurium materials.

[0009] More preferably, the activated carbon can be a granular activated carbon material.

[0010] More preferably, the activated carbon is activated carbon with a honeycomb structure.

[0011] Activated carbon with a honeycomb structure is used to improve gas permeability and reduce flow resistance.

[0012] More preferably, the activated carbon is pretreated before use, and the pretreatment method is: drying in an oven; the drying time is 24 to 72 hours.

[0013] Pre-drying activated carbon reduces the impact of moisture on extraction efficiency.

[0014] More preferably, the air filter includes a filter chamber and activated carbon filled in the filter chamber;

[0015] Before installing the filter chamber on the exhaust pipe, fill the filter chamber with activated carbon and place it in an oven to dry for 24 to 72 hours at 80 to 120°C.

[0016] After drying, install the air filter onto the extraction line.

[0017] This step removes the moisture adsorbed in the activated carbon, thus avoiding prolonged evacuation time due to water vapor during the vacuuming process.

[0018] More preferably, the extraction pipeline includes a first pipeline connected to a vacuum pump and a second pipeline connected to a purification furnace;

[0019] The other end of the first pipeline is connected to the air outlet of the filter chamber;

[0020] The other end of the second pipeline is connected to the air inlet of the filter chamber.

[0021] A control method for a vacuum purification system for inhibiting acidic gas corrosion is characterized in that, during the vacuuming process, a vacuum pump evacuates the vacuum level in the purification furnace to a target vacuum level of 30 Pa, and the evacuation time is controlled to be 30–60 min.

[0022] A control method for a vacuum purification system to suppress corrosion by acidic gases, characterized by comprising the following steps:

[0023] Step 1: Fill the filter with activated carbon;

[0024] Step 2: Dry the activated carbon.

[0025] Step 3: Install the filter device into the air extraction line;

[0026] Step 4: Start the purification furnace to carry out the purification process;

[0027] Step 5: During the distillation process, start the vacuum pump to extract the gas from the furnace. During the extraction process, the filter filters the gas, and the filtered gas enters the vacuum pump.

[0028] In a further preferred embodiment, in step five, the vacuum pump evacuates the vacuum level in the purification furnace to the target vacuum level of 30 Pa, and the evacuation time is controlled to be 40-45 min.

[0029] Compared with the prior art, the present invention has the following advantages:

[0030] 1) Effectively blocks acidic gases from entering the vacuum pump, reducing corrosion;

[0031] 2) Significantly extends the service life of vacuum pumps;

[0032] 3) Maintain air extraction efficiency while ensuring filtration effectiveness;

[0033] 4) The original process parameters are not changed, and the product quality is not affected;

[0034] 5) Improve equipment operation stability and production efficiency. Detailed Implementation

[0035] Specific embodiment 1: A vacuum purification system for inhibiting acidic gas corrosion includes a purification furnace and a vacuum pump. The vacuum pump is connected to the purification furnace via a suction pipe. The system also includes an air filter, which is installed on the suction pipe and filled with activated carbon. This invention utilizes a gas filtration device in the suction pipe and employs activated carbon material with high adsorption capacity to adsorb acidic gases. The purification furnace is used for vacuum distillation purification of tellurium materials.

[0036] Activated carbon can be granular activated carbon material.

[0037] The extraction pipeline includes a first pipeline connected to the vacuum pump and a second pipeline connected to the purification furnace; the other end of the first pipeline is connected to the outlet of the filter chamber; the other end of the second pipeline is connected to the inlet of the filter chamber.

[0038] Specific embodiment 2 differs from specific embodiment 1 in that the activated carbon is a honeycomb structure. Activated carbon with a honeycomb structure has a through-hole structure. The advantages of this structure include reduced gas flow resistance; improved extraction efficiency; and maintenance of ventilation performance while ensuring adsorption capacity.

[0039] In Specific Example 3, based on Specific Example 1, the activated carbon undergoes pretreatment before use. The pretreatment method is drying in an oven for 24–72 hours. Pre-drying the activated carbon reduces the impact of moisture on extraction efficiency.

[0040] In specific embodiment 4, based on specific embodiment 1, the air filter includes a filter chamber and activated carbon filled within the filter chamber. Before installing the filter chamber on the extraction pipeline, the activated carbon is filled into the filter chamber, and the filter chamber is placed in an oven and dried at 80–120°C for 24–72 hours. After drying, the air filter is installed on the extraction pipeline. This step removes the moisture adsorbed in the activated carbon, thereby avoiding prolonged extraction time due to water vapor during the vacuuming process.

[0041] A control method for a vacuum purification system used to suppress corrosion by acidic gases is characterized in that, during the vacuuming process, a vacuum pump evacuates the purification furnace to a target vacuum level of 30 Pa, and the evacuation time is controlled to be 30–60 min. The vacuum pump maintains the vacuum level inside the purification furnace at less than or equal to 30 Pa. Through this control, the evacuation efficiency can be approached the level of when no filter is installed, while ensuring the filtration effect.

[0042] A control method for a vacuum purification system to suppress corrosion by acidic gases, characterized by comprising the following steps:

[0043] Step 1: Fill the filter with activated carbon;

[0044] Step two: Dry the activated carbon.

[0045] Step 3: Install the filter device into the air extraction line;

[0046] Step 4: Start the purification furnace to carry out the purification process;

[0047] Step 5: During the distillation process, start the vacuum pump to extract the gas from the furnace. During the extraction process, the filter filters the gas, and the filtered gas enters the vacuum pump.

[0048] In step five, the vacuum pump evacuates the vacuum level in the purification furnace to the target vacuum level of 30 Pa, and the evacuation time is controlled to be 40-45 minutes.

[0049] After implementing the above technical solutions, the interval between vacuum pump failures was significantly extended; the pumping efficiency remained basically unchanged; the operational stability of the equipment was significantly improved; and the quality of the purified products was not affected.

[0050] The above are merely preferred embodiments of the present invention. It should be noted that those skilled in the art can make various improvements and modifications without departing from the principle of the present invention, and these improvements and modifications should also be considered within the scope of protection of the present invention.

Claims

1. A vacuum purification system for inhibiting corrosion by acidic gases, comprising a purification furnace and a vacuum pump, wherein the vacuum pump is connected to the purification furnace via a suction pipe, characterized in that, It also includes an air filter, which is installed on the air extraction line and is filled with activated carbon.

2. The vacuum purification system for inhibiting acidic gas corrosion according to claim 1, characterized in that: The purification furnace is used for vacuum distillation to purify tellurium materials.

3. The vacuum purification system for inhibiting acidic gas corrosion according to claim 1, characterized in that: The activated carbon is a granular activated carbon material.

4. A vacuum purification system for inhibiting acidic gas corrosion according to claim 1, characterized in that: The activated carbon is a honeycomb structure activated carbon.

5. A vacuum purification system for inhibiting acidic gas corrosion according to claim 1, characterized in that: Activated carbon should be pretreated before use. The pretreatment method is to dry it in an oven for 24 to 72 hours.

6. A vacuum purification system for inhibiting acidic gas corrosion according to claim 1, characterized in that: An air filter includes a filter chamber and activated carbon filled within the filter chamber; Before installing the filter chamber on the exhaust pipe, fill the filter chamber with activated carbon and place it in an oven to dry for 24 to 72 hours at 80 to 120°C. After drying, install the air filter onto the extraction line.

7. A vacuum purification system for inhibiting acidic gas corrosion according to claim 1, characterized in that: The extraction pipeline includes a first pipeline connected to a vacuum pump and a second pipeline connected to a purification furnace. The other end of the first pipeline is connected to the air outlet of the filter chamber; The other end of the second pipeline is connected to the air inlet of the filter chamber.

8. The control method for a vacuum purification system for suppressing acidic gas corrosion according to claim 1, characterized in that, During the vacuuming process, the vacuum pump evacuates the purification furnace to the target vacuum level of 30 Pa, and the evacuation time is controlled to be 30–60 min.

9. The control method for a vacuum purification system for suppressing acidic gas corrosion according to claim 1, characterized in that, Includes the following steps: Step 1: Fill the filter with activated carbon; Step two: Dry the activated carbon. Step 3: Install the filter device into the air extraction line; Step 4: Start the purification furnace to carry out the purification process; Step 5: During the distillation process, start the vacuum pump to extract the gas from the furnace. During the extraction process, the filter filters the gas, and the filtered gas enters the vacuum pump.

10. A control method for a vacuum purification system for suppressing acidic gas corrosion according to claim 9, characterized in that, In step five, the vacuum pump evacuates the vacuum level in the purification furnace to the target vacuum level of 30 Pa, and the evacuation time is controlled to be 40-45 minutes.