A pre-adsorption circulating reaction tail gas treatment device and a tail gas treatment method

Abstract

The present application relates to a kind of front adsorption cyclic reaction tail gas treatment device and tail gas treatment method, cooling chamber and reaction chamber are formed in reaction chamber, upper portion of cooling chamber and upper portion of reaction chamber are communicated, reaction chamber includes heating element, heating element is located inside reaction chamber, the gas outlet of front adsorption assembly is communicated with the gas inlet of reaction chamber, front adsorption assembly is communicated with water tank, front adsorption assembly is adsorbed with absorption liquid tail gas, the water inlet and water outlet of first circulating pump are respectively communicated with the inside of water tank and cooling chamber, the water inlet of drainage device is communicated with cooling chamber.The absorption liquid of the present application that absorption tail gas is pumped into cooling chamber, absorption liquid not only reduces the temperature of the outside of reaction chamber and the machine table installed therein, but also releases ammonia gas and other absorbed gases in cooling chamber, the released gas enters reaction chamber and high-temperature reaction with tail gas, the harmful components in tail gas are removed more thoroughly, and the pollution of waste water to the environment and the cost of harmless waste water are reduced.

Description

Technical Field

[0001] This invention relates to the field of semiconductor exhaust gas treatment, and in particular to a pre-adsorption cycle re-reaction exhaust gas treatment device and exhaust gas treatment method. Background Technology

[0002] Semiconductor manufacturing processes (such as etching, chemical vapor deposition, etc.) generate a large amount of harmful exhaust gases, mainly including silane, ammonia (NH3), hydrogen fluoride (HF), hydrogen chloride (HCl), and perfluorinated compounds (PFCs). To meet environmental emission requirements, high-temperature reaction (combustion or thermal decomposition) devices are widely used in industry to treat the above-mentioned exhaust gases in a harmless manner. Some existing technology equipment adds a water spray treatment unit before the high-temperature reaction section to adsorb the exhaust gas before the high-temperature reaction. The main purposes of designing this pre-spray include: (1) removing particulate matter in the exhaust gas by washing with water to prevent it from melting and sintering in the high-temperature reactor, causing blockage; (2) using water to absorb water-soluble acidic gases (HF, HCl) and alkaline gases (NH3) to slow down the corrosion of downstream equipment; (3) reducing the temperature of the exhaust gas to avoid the thermal shock of the high-temperature airflow to the subsequent reactor. In addition, the pre-spray can also convert some easily hydrolyzed gases (such as silane) into oxides in advance, reducing the load on the high-temperature reaction section.

[0003] However, the above-mentioned pre-reaction water spraying configuration has significant drawbacks. First, after the sprayed water efficiently absorbs ammonia, it produces high-concentration ammonia nitrogen wastewater, transforming air pollution into water pollution. If discharged without deep treatment, it can easily lead to eutrophication of water bodies, and the subsequent wastewater treatment costs will increase significantly. Summary of the Invention

[0004] The present invention aims to solve the above problems by providing a pre-adsorption, recycling, and re-reaction tail gas treatment device and tail gas treatment method, which solves the problem of excessive harmful components in wastewater caused by pre-adsorption and re-reaction.

[0005] A pre-adsorption recirculation and re-reaction tail gas treatment device includes: a reaction chamber, a water tank, a first circulation pump, a drainage device, and a pre-adsorption assembly. The reaction chamber contains a cooling chamber and a reaction chamber, with the upper part of the cooling chamber connected to the upper part of the reaction chamber. The reaction chamber includes a heating element located inside the reaction chamber. The outlet of the pre-adsorption assembly is connected to the inlet of the reaction chamber. The pre-adsorption assembly is connected to the water tank. The pre-adsorption assembly adsorbs tail gas using an absorbent liquid. The inlet and outlet of the first circulation pump are connected to the inside of the water tank and the cooling chamber, respectively. The inlet of the drainage device is connected to the cooling chamber.

[0006] Furthermore, the reaction chamber includes an outer cylinder, an inner cylinder, a sealing plate, and an air inlet pipe. The upper and lower ends of the outer cylinder are fixedly connected to the sealing plate, and the lower part of the inner cylinder is fixedly connected to the sealing plate. The air inlet pipe and the heating element are fixedly connected to the upper sealing plate, and the air inlet pipe is connected to the reaction chamber. The outer cylinder is provided with a circulating liquid inlet pipe and a circulating liquid outlet pipe at its upper and lower ends, respectively. The circulating liquid inlet pipe is connected to the first circulating pump, and the circulating liquid outlet pipe is connected to the drainage device.

[0007] Furthermore, the reaction chamber also includes a water baffle and a gas outlet. The lower end of the gas outlet is fixed to the upper end of the inner cylinder, and the upper end of the gas outlet is fixed to the upper sealing plate. The water baffle is fitted around the outside of the gas outlet and fixed to the gas outlet. An annular gas groove with an upper opening is formed between the water baffle and the gas outlet. A gas outlet hole is formed radially on the gas outlet. The gas outlet hole is connected to the annular gas groove. The opening above the annular gas groove is connected to the upper part of the cooling chamber.

[0008] Furthermore, the pre-adsorption assembly includes an exhaust gas inlet pipe, a gas collection box, and a second circulation pump. The inlet of the second circulation pump is connected to the inside of the water tank, and the outlet of the second circulation pump is connected to the first connector of the exhaust gas inlet pipe through a second water supply pipe. The first connector is used to spray absorbent liquid into the exhaust gas inlet pipe. The upper end of the gas collection box is fixedly connected to and communicates with multiple exhaust gas inlet pipes, and the lower end of the gas collection box is fixedly connected to and communicates with the first air inlet of the water tank. A second connector is provided on the top of the gas collection box, and the second connector is connected to the second water supply pipe. The second connector is used to spray absorbent liquid into the gas collection box.

[0009] Furthermore, it also includes a post-adsorption assembly, the air inlet of which is connected to the air outlet of the reaction chamber, and the post-adsorption assembly is connected to the first water inlet of the water tank. It also includes a partition, which is located inside the water tank and fixedly connected to the upper inner wall of the water tank. The partition only forms a first gap with the lower inner wall of the water tank at its bottom. The water level in the water tank is higher than the first gap. The first air outlet of the water tank is fixed to the outer cylinder and connected to the reaction chamber. The water inlet, the first air inlet and the first air outlet of the first circulation pump are located on the same side of the partition. The water inlet of the first circulation pump and the water inlet of the second circulation pump are located on the side of the partition away from the first air inlet and the first air outlet.

[0010] Furthermore, the post-adsorption assembly includes a hydrotubule, which comprises an outer shell and an inner shell. The outer shell is fixedly connected to the inner cylinder and communicates with the gas outlet of the reaction chamber. The inner shell is located inside the outer shell and is fixedly connected to the outer shell. The inner shell has a water spray hole only at one end away from the inner cylinder. A water inlet pipe is formed on the side of the outer shell. A water spray cavity is formed between the outer shell and the inner shell. The water spray cavity is only connected to the water inlet pipe and the water spray hole. The cross-sectional area of ​​the water spray cavity is larger than the cross-sectional area of ​​the water spray hole.

[0011] Furthermore, the post-adsorption assembly also includes a spray chamber, which includes a spray cylinder, a spray pipe, and a nozzle. The end of the outer shell away from the inner cylinder is fixedly connected to and communicates with the spray cylinder. The spray cylinder is fixedly connected to and communicates with the first water inlet of the water tank. The spray pipe is located inside the spray cylinder and is fixedly connected to the spray cylinder. Two sets of spray pipes are located on the upper and lower sides of the connection between the outer shell and the spray cylinder, respectively. The two sets of spray pipes are fixed with nozzles facing each other. The water inlet pipe and the spray pipe are respectively connected to a clean water source.

[0012] Furthermore, it also includes a separation device and an exhaust device. The exhaust device includes a second outer shell and a second inner shell. The second outer shell is fixedly connected to the upper end of the separation device and the interior of the second outer shell is connected to the interior of the separation device. The second inner shell is located inside the second outer shell and is fixedly connected to the second outer shell. An air jet cavity is formed between the second outer shell and the second inner shell. An air jet through hole is opened at the upper end of the second inner shell. A second air inlet pipe is provided on the side of the second outer shell and is connected to a compressed air source. The air jet cavity is only connected to the second air inlet pipe and the air jet through hole. The cross-sectional area of ​​the air jet cavity is larger than the cross-sectional area of ​​the air jet through hole.

[0013] Further, the separation device includes a separation outer cylinder, a separation middle cylinder, a separation inner cylinder, a first baffle, and a second baffle. The lower end of the separation outer cylinder is fixed relative to the upper end of the spray cylinder and communicates with the interior of the spray cylinder. The upper end of the separation outer cylinder is fixed relative to the lower end of the second outer shell. The separation middle cylinder is located between the separation outer cylinder and the separation inner cylinder. An outer cavity is formed between the separation middle cylinder and the separation outer cylinder. An inner cavity is formed between the separation middle cylinder and the separation inner cylinder. The lower end of the separation middle cylinder is fixedly connected to the first baffle. The first baffle has a first vent hole communicating with the outer cavity and a drain hole communicating with the inner cavity. The second baffle is placed on the upper end of the separation middle cylinder. The second baffle has a second vent hole for connecting the outer cavity and the inner cavity. The upper and lower ends of the separation inner cylinder are respectively connected to the interior of the second outer shell and the inner cavity.

[0014] A method for treating exhaust gas using the aforementioned pre-adsorption cycle re-reaction exhaust gas treatment device: The exhaust gas first enters the pre-adsorption assembly, where the absorbent liquid adsorbs the exhaust gas. The adsorbed absorbent liquid enters the water tank, and the adsorbed gas enters the reaction chamber. The first circulating pump drives the absorbent liquid in the water tank into the cooling chamber. The absorbent liquid in the cooling chamber absorbs the heat from the reaction chamber and then heats up. The absorbent liquid releases the adsorbed tail gas, and the released tail gas enters the reaction chamber. The heating element heats the exhaust gas, causing it to react. The drainage device drains the absorbent liquid from the cooling chamber.

[0015] The present invention has the following advantages: 1. The first circulation pump pumps the absorbent liquid that has absorbed the tail gas into the cooling chamber. The absorbent liquid not only lowers the temperature outside the reaction chamber and inside the machine where it is installed, preventing the equipment inside the machine from overheating, but also releases absorbed gases such as ammonia in the cooling chamber. The released gases enter the reaction chamber and react with the tail gas at high temperature, removing harmful components from the tail gas more thoroughly, reducing the content of harmful components in the discharged wastewater, reducing the pollution of wastewater to the environment and the cost of harmless wastewater treatment. 2. The pre-adsorption assembly uses the clean water absorbed by the post-adsorption assembly after the high-temperature reaction as spray water, which not only saves water and reduces water costs, but also increases the gas content per unit volume of absorbent liquid sent into the cooling chamber, resulting in a lower concentration of harmful components in the subsequent discharge of the drainage device, thus saving the treatment cost of the discharged wastewater. 3. When either the first or second circulating pump fails, the intermediate valve switches to the open position, and the first and second water supply pipes are connected through a connecting pipe. A normally operating circulating pump supplies water to both the front and rear sections simultaneously, maintaining the correct operation of the equipment and improving its stability. 4. The hydrograph and the exhaust system have the same structure and can be used interchangeably, which simplifies the number of parts in manufacturing and reduces manufacturing costs; it also reduces the number of spare parts required for maintenance and lowers operating costs. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only one embodiment of the present invention. For those skilled in the art, other embodiments can be derived from the provided drawings without creative effort.

[0017] Figure 1 : A top view of the structure of the present invention; Figure 2 :exist Figure 1 Schematic diagram of the cross-sectional structure at point AA; Figure 3 :exist Figure 2 A magnified schematic diagram of the local structure at point B; Figure 4 : A three-dimensional structural schematic diagram of the present invention; Figure 5 : A three-dimensional structural diagram of the water tank; Figure 6 : Schematic diagram of the front cross-sectional structure of the post-adsorption assembly; Figure 7 : A three-dimensional structural diagram of the separation device and the exhaust device; Figure 8 : A cross-sectional schematic diagram of the separation device and the exhaust device; Figure 9 : Figure 8 A magnified schematic diagram of the structure at point C. Detailed Implementation

[0018] The present invention will be further described below with reference to the accompanying drawings and examples: Embodiments of the present invention are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention.

[0019] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0020] In the description of this invention, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention. Example 1: like Figures 1 to 9As shown, this embodiment provides a pre-adsorption recirculation and re-reaction tail gas treatment device, including: a reaction chamber 4, a water tank 31, a first circulation pump 32, a drainage device 34, and a pre-adsorption assembly. The reaction chamber 4 forms a cooling chamber 40 and a reaction chamber 400, with the upper part of the cooling chamber 40 and the upper part of the reaction chamber 400 connected. The reaction chamber 4 includes a heating element 46. The tail gas first passes through the pre-adsorption assembly and is adsorbed by the absorbent liquid in the pre-adsorption assembly. Then, the tail gas flows from the outlet of the pre-adsorption assembly to the inlet of the reaction chamber 400, while the absorbent liquid after adsorbing the tail gas in the pre-adsorption assembly enters the water tank 31. The inlet and outlet of the first circulation pump 32 are respectively connected to the inside of the water tank 31 and the cooling chamber 40, pumping the absorbent liquid after adsorbing the tail gas into the cooling chamber 40. The absorbent liquid in the cooling chamber 40 absorbs heat, causing some components in the absorbent liquid to leave the absorbent liquid in gaseous form. Simultaneously, the absorption liquid lowers the temperature outside the reaction chamber 4. The heating element 46 inside the reaction chamber 400 heats the exhaust gas entering from the pre-adsorption assembly and the gas released from the absorbent liquid, causing a chemical reaction between the exhaust gas and the released gas. The exhaust gas leaving the pre-adsorption assembly can directly enter the reaction chamber 400, or it can first pass through the water tank 31 before entering the reaction chamber 400. The heating element 46 can be an electric heating rod, a plasma reactor, or a flame.

[0021] As the first circulation pump 32 pumps more and more absorbent into the cooling chamber 40, the water level in the cooling chamber 40 will rise. The drainage device 34 continuously or intermittently drains the absorbent from the cooling chamber 40 to prevent the absorbent from overflowing into the reaction chamber 400 due to excessively high water levels. The drainage device 34 is either a pump or a valve.

[0022] When the drainage device 34 is a pump, its inlet is also connected to the water tank 31. A valve is connected in series with the inlet, and the valve connects the water tank 31 and the cooling chamber 40 to the drainage device 34 respectively. Under normal conditions, the drainage device 34 does not pump water from the water tank 31. However, when the water level in the water tank 31 is too high, the drainage device 34 will connect to the water tank 31 through the valve and pump the water out of the water tank 31.

[0023] like Figure 5 As shown, the water tank 31 has a second water inlet 314, which is connected to a clean water source. The second water inlet 314 is equipped with a valve, which is normally closed and only temporarily replenishes water to the water tank 31 when the water level is too low.

[0024] It should be noted that, in this embodiment, "adsorption" refers to the absorption liquid dissolving water-soluble components in the exhaust gas, capturing solid particles in the exhaust gas, and encapsulating insoluble gases in the exhaust gas (forming small bubbles in the absorption liquid). Preferably, the absorption liquid is water; in this case, the clean water source is a water storage tank or a pipe network.

[0025] like Figure 2As shown, the reaction chamber 4 includes an outer cylinder 41, an inner cylinder 42, a sealing plate 44, and an air inlet pipe 45. The upper and lower ends of the outer cylinder 41 are fixedly connected to the sealing plate 44, and the lower part of the inner cylinder 42 is fixedly connected to the sealing plate 44. The air inlet pipe 45 and the heating element 46 are fixedly connected to the upper sealing plate 44, respectively. The air inlet pipe 45 is connected to the reaction chamber 400 to supply air to the reaction chamber 400. The air and the exhaust gas undergo a chemical reaction when heated in the reaction chamber 400. The outer cylinder 41 is provided with a circulating liquid inlet pipe 411 and a circulating liquid outlet pipe 412 at the top and bottom, respectively. The circulating liquid inlet pipe 411 is connected to the first circulating pump 32. The circulating liquid inlet pipe 411 is above the circulating liquid outlet pipe 412, so that the incoming absorbent is located in the upper part of the liquid in the cooling chamber 40, and the absorbent is closer to the heating element 46. Water-soluble components (such as ammonia) and bubbles in the absorbent are more likely to leave the absorbent. After releasing the gas, the absorbent continuously moves downward in the cooling chamber 40, and after entering the circulating liquid outlet pipe 412, it is discharged from the cooling chamber 40 through the drainage device 34.

[0026] Preferably, the circulating liquid inlet pipe 411 is located above the liquid surface in the cooling chamber 40, and the circulating liquid inlet pipe 411 is equipped with multiple nozzles to spray the absorbent liquid into the cooling chamber 40. The droplets generated by the spraying increase the total surface area of ​​the absorbent liquid, which is beneficial for the absorbent liquid to release gas.

[0027] like Figure 2 and Figure 3 As shown, to prevent the absorbent sprayed from the circulating liquid inlet pipe 411 from entering the reaction chamber 400, the reaction chamber 4 also includes a water baffle 47 and an air outlet 48. The lower end of the air outlet 48 is fixed to the upper end of the inner cylinder 42, and the upper end of the air outlet 48 is fixed to the upper sealing plate 44. The water baffle 47 is fitted on the outside of the air outlet 48 and fixed to the air outlet 48. An annular air groove with an upper opening is formed between the water baffle 47 and the air outlet 48. The outer wall of the water baffle 47 prevents the splashed absorbent from entering the annular air groove. An air outlet hole 481 is formed radially in the air outlet 48. The air outlet hole 481 is connected to the annular air groove. The opening above the annular air groove is connected to the upper part of the cooling chamber 40.

[0028] Preferably, the multiple vent holes 481 are arranged evenly in a circle so that the released gas is evenly released into the reaction chamber 400.

[0029] like Figure 2 As shown, the reaction chamber 4 also includes a gas guide tube 43, which passes through the lower sealing plate 44. The opening above the gas guide tube 43 is located inside the reaction chamber 400. The gas guide tube 43 is surrounded by multiple heating elements 46 to improve the uniformity of exhaust gas heating. The opening above the gas guide tube 43 is higher than the exhaust port of the inner cylinder 42, so that the exhaust gas undergoes sufficient reaction before flowing out from the exhaust port of the inner cylinder 42.

[0030] like Figure 4 and Figure 5As shown, the pre-adsorption assembly includes an exhaust gas inlet pipe 1, a gas collection box 2, and a second circulation pump 33. The inlet of the second circulation pump 33 is connected to the interior of the water tank 31, and the outlet of the second circulation pump 33 is connected to the first connector 11 of the exhaust gas inlet pipe 1 through a second water supply pipe 331. The first connector 11 is used to spray absorbent liquid into the exhaust gas inlet pipe 1. The upper end of the gas collection box 2 is fixedly connected to and communicates with multiple exhaust gas inlet pipes 1, and the lower end of the gas collection box 2 is fixedly connected to and communicates with the first air inlet 311 of the water tank 31. A second connector 21 is provided on the top of the gas collection box 2, and the second connector 21 is connected to the second water supply pipe 331. The second connector 21 is used to spray absorbent liquid into the gas collection box 2. The absorbent liquid pumped out by the second circulation pump 33 is sprayed out from the first connector 11 after passing through the second water supply pipe 331. The droplets adsorb solid particles in the exhaust gas and dissolve soluble components in the exhaust gas within the exhaust gas inlet pipe 1. The exhaust gas then enters the gas collection box 2, and the absorbent liquid pumped out by the second circulation pump 33 enters the second connector 21 and is sprayed into the gas collection box 2 to further absorb the exhaust gas.

[0031] like Figure 5 As shown, the outlet of the first circulating pump 32 is connected to the first water supply pipe 321, and the first water supply pipe 321 is connected to the circulating liquid inlet pipe 411. The two ends of the connecting pipe 35 are connected to the first water supply pipe 321 and the second water supply pipe 331 respectively. An intermediate valve 351 is installed in series on the connecting pipe 35 to control the opening and closing of the connecting pipe 35. During normal operation, the intermediate valve 351 is closed, and the first circulating pump 32 and the second circulating pump 33 supply water to the cooling chamber 40 and the exhaust gas inlet pipe 1 respectively. When either the first circulating pump 32 or the second circulating pump 33 fails, the intermediate valve 351 switches to the open state, and the first water supply pipe 321 and the second water supply pipe 331 are connected through the connecting pipe 35. Water is supplied to both the first water supply pipe 321 and the second water supply pipe 331 simultaneously by a normally operating circulating pump, keeping the equipment temporarily operational. At this time, the operating circulating pump can increase its speed to increase the output flow rate.

[0032] like Figure 2 and Figure 6 As shown, to more thoroughly remove harmful components from the exhaust gas, this embodiment also includes a post-adsorption assembly. The air inlet of the post-adsorption assembly is connected to the air outlet of the reaction chamber 400, the post-adsorption assembly is connected to the first water inlet 313 of the water tank 31, and the post-adsorption assembly is connected to a clean water source. Figure 2As shown, it also includes a partition 315, which is located inside the water tank 31 and fixedly connected to the upper inner wall of the water tank 31. The partition 315 forms a first gap with the lower inner wall of the water tank 31 only at its bottom. The water level in the water tank 31 is higher than the first gap. The first air outlet 312 of the water tank 31 is fixed to the outer cylinder 41 and connected to the reaction chamber 400. The water inlet, the first air inlet 311, and the first air outlet 312 of the first circulation pump 32 are located on the same side of the partition 315. The first water inlet 313 and the water inlet of the second circulation pump 33 are located on the side of the partition 315 away from the first air inlet 311 and the first air outlet 312. The clean water provided by the clean water source enters the water tank after the exhaust gas from the post-adsorption assembly adsorbs the reaction. Figure 2 The right side region of the partition 315. The second circulation pump 33 pumps the water in the right side region of the partition 315 as absorbent to the exhaust gas inlet pipe 1 and the gas collection box 2, absorbing the unburned exhaust gas for the second time. After absorption, the absorbent enters from the gas collection box 2. Figure 2 The left side region of the partition 315 contains a significant amount of soluble gas and gas bubbles from the absorbent liquid that has undergone two absorption processes. Therefore, the absorbent liquid from the left side region of the partition 315 is pumped into the cooling chamber 40 for cooling and gas release. The exhaust gas inlet pipe 1 and the gas collection box 2 use clean water that has absorbed the exhaust gas after combustion as spray water, which not only saves water but also increases the gas content per unit volume of absorbent liquid sent into the cooling chamber 40.

[0033] like Figure 2 and Figure 6 As shown, the post-adsorption assembly includes a hydrotubule 5, which comprises an outer shell 51 and an inner shell 52. The outer shell 51 is fixedly connected to the inner cylinder 42 and communicates with the air outlet of the reaction chamber 400. The inner shell 52 is located inside the outer shell 51 and is fixedly connected to it. The inner shell 52 has a water spray hole 520 only at the end away from the inner cylinder 42. A water inlet pipe 511 is formed on the side of the outer shell 51. A water spray cavity 50 is formed between the outer shell 51 and the inner shell 52. The water spray cavity 50 is only connected to the water inlet pipe 511 and the water spray hole 520. The cross-sectional area of ​​the water spray cavity 50 is larger than that of the water spray hole 520. The post-adsorption assembly also includes a three-way pipe 53, whose three ports are respectively connected to the water inlet pipe 511, a clean water source, and a compressed air source. The compressed air source is an air compressor. During operation, compressed air and clean water enter the inner cavity 50 of the water sprayer through the three-way pipe 53. The pressurized water and compressed air are sprayed out at high speed from the water spray hole 520. Multiple high-speed water jets form a circle, and the high flow velocity generates negative pressure, driving the exhaust gas in the inner side of the inner shell 52 from left to right. Figure 2(In the direction of movement). Thus, the exhaust gas passing through the inner shell 52 can only flow in one direction forward, preventing the exhaust gas from carrying water droplets back into the reaction chamber and reducing equipment corrosion in the reaction chamber 4. The water column not only drives the movement of the exhaust gas, but also gradually disperses into water droplets as the water column moves away from the water spray hole 520, thereby adsorbing and dissolving the exhaust gas.

[0034] like Figure 2 and Figure 6 As shown, the post-adsorption assembly also includes a spray chamber 6, which includes a spray cylinder 61, spray pipes 62, and nozzles 63. The end of the outer shell 51 furthest from the inner cylinder 42 is fixedly connected to and communicates with the spray cylinder 61. The spray cylinder 61 is fixedly connected to and communicates with the first water inlet 313 of the water tank 31. The spray pipes 62 are located inside the spray cylinder 61 and fixedly connected to it. Two sets of spray pipes 62 are located on the upper and lower sides of the connection between the outer shell 51 and the spray cylinder 61, respectively. Two sets of spray pipes 62 are fixed with nozzles 63 facing each other. The water inlet pipe 511 and the spray pipes 62 are respectively connected to a clean water source. After being heated and reacted by the heating element 46, the exhaust gas leaves the reaction chamber 4, passes through the hydroturbine 5, and enters the interior of the spray cylinder 61. After being driven into the spray cylinder 61 by the hydroturbine 5, the exhaust gas is driven downwards by the air guide plate 64 to the space between the two sets of spray pipes 62. Two sets of spray pipes 62 spray water onto the exhaust gas from both above and below, adsorbing harmful residual components in the exhaust gas and cooling it. Finally, the exhaust gas moves upward and leaves the spray cylinder 61.

[0035] like Figures 7 to 9As shown, this embodiment also includes a separation device 7 and an exhaust device 8. The exhaust device 8 includes a second outer shell 81 and a second inner shell 82. The second outer shell 81 is fixedly connected to the upper end of the separation device 7, and the interior of the second outer shell 81 is connected to the interior of the separation device 7. The second inner shell 82 is located inside the second outer shell 81 and is fixedly connected to the second outer shell 81. A jet cavity 80 is formed between the second outer shell 81 and the second inner shell 82. A jet through-hole 820 is opened at the upper end of the second inner shell 82. A second air inlet pipe 811 is provided on the side of the second outer shell 81. The second air inlet pipe 811 is connected to a compressed air source. The jet cavity 80 is only connected to the second air inlet pipe 811 and the jet through-hole 820. The cross-sectional area of ​​the jet cavity 80 is larger than the cross-sectional area of ​​the jet through-hole 820. During operation, compressed air enters the jet cavity 80 through the second air inlet pipe 811, and the compressed air is ejected outward at high speed from the jet through-hole 820. The high-velocity air ejected generates negative pressure, driving the exhaust gas inside the lower part of the second outer casing 81 to move upwards. After passing through the second inner casing 82, the exhaust gas moves upwards and leaves the second outer casing 81. The exhaust device 8 utilizes the Venturi effect to drive the exhaust gas inside the separation device 7 to move upwards. When the exhaust gas exhaust speed is the same, the exhaust device 8 is smaller in size than the exhaust fan of the prior art, saving space inside the machine and allowing the separation device 7 to be larger, thereby improving the water-gas separation efficiency of the separation device 7.

[0036] Among them, the hydrological tube 5 and the exhaust device 8 have the same structure and can be used interchangeably, which simplifies the number of parts during manufacturing and reduces manufacturing costs; it also reduces the number of spare parts required for maintenance and reduces usage costs.

[0037] like Figures 7 to 9As shown, the separation device 7 includes an outer separation cylinder 71, a middle separation cylinder 72, an inner separation cylinder 73, a first baffle 74, and a second baffle 75. The lower end of the outer separation cylinder 71 is fixed relative to the upper end of the spray cylinder 61 and communicates with the interior of the spray cylinder 61. The upper end of the outer separation cylinder 71 is fixed relative to the lower end of the second outer shell 81. The middle separation cylinder 72 is located between the outer separation cylinder 71 and the inner separation cylinder 73. An outer cavity 710 is formed between the middle separation cylinder 72 and the outer separation cylinder 71. An inner cavity 720 is formed between the two outer cylinders 71 and 72. The lower end of the separating cylinder 72 is fixedly connected to the first baffle 74. The first baffle 74 has a first vent 741 communicating with the outer cavity 710 and a drain 742 communicating with the inner cavity 720. The second baffle 75 is placed on the upper end of the separating cylinder 72. The second baffle 75 has a second vent 751 for connecting the outer cavity 710 and the inner cavity 720. The upper and lower ends of the separating inner cylinder 73 are respectively connected to the interior of the second outer shell 81 and the inner cavity 720. The separating device 7 also includes a third baffle 77, which is fixedly connected to the upper end of the separating inner cylinder 73 and the upper end of the separating outer cylinder 71. A third cavity 750 is formed between the third baffle 77 and the second baffle 75. The third cavity 750 is connected to the outer cavity 710 and the inner cavity 720 through the corresponding second vent 751.

[0038] After entering the outer cavity 710 through the first vent 741, the exhaust gas first moves upward, then passes through the second vent 751 on the outer side and enters the third cavity 750. In the third cavity 750, the exhaust gas impacts the third baffle 77 and turns downward. After passing through the second vent 751 on the inner side, the exhaust gas continues to move downward into the inner cavity 720. Upon reaching the bottom of the inner cavity 720, the exhaust gas impacts the middle of the first baffle 74, turning upward and moving upward through the separating inner cylinder 73. Afterward, the exhaust gas leaves the separating device 7 and enters the exhaust device 8. During the movement of the exhaust gas, it makes several turns; due to the density difference between gas and liquid, inertia removes liquid droplets carried in the gas.

[0039] Preferably, the outer cavity 710 is filled with packing material (not shown in the figure). More preferably, the packing material is a Pall ring. The Pall ring forces the airflow through a tortuous channel and intercepts, captures, and aggregates fine droplets in the gas on its wetted surface. The aggregated droplets flow downwards under gravity, while the separated gas moves upwards and leaves the Pall ring.

[0040] Furthermore, the separation device 7 also includes a water spray pipe 76 and a second water inlet pipe 711. The water spray pipe 76 is located at the upper end of the outer cavity 710 and is fixedly connected to the outer separation cylinder 71. The water spray pipe 76 is annular, and a water nozzle is provided below the water spray pipe 76. The second water inlet pipe 711 passes through the outer separation cylinder 71 and is fixedly connected to it, and is connected to the water spray pipe 76. When the exhaust gas passes through the packing material, the solid particles carried by the exhaust gas will deposit on the surface of the packing material. After prolonged use, the solid particles will clog the inner pores of the packing material, affecting the normal passage of the exhaust gas. The water spray pipe 76 intermittently sprays water downwards, using the water flow to flush away the solid particles attached to the surface and interior of the packing material below, keeping the packing material unobstructed.

[0041] like Figure 7 and Figure 8 As shown, the second outer casing 81 is provided with a plurality of detection connectors 812 for mounting sensors. The sensors can be existing technology sensors such as temperature, humidity, flow rate and gas detection sensors. The sensors are used to detect whether the exhaust gas meets the standards. The detection connectors 812 are located at the openings on the inner wall of the second outer casing 81 below the second inner casing 82.

[0042] Example 2: like Figures 1 to 9 As shown, this embodiment provides a tail gas treatment method using the pre-adsorption cycle re-reaction tail gas treatment device described in Embodiment 1: The exhaust gas first enters the pre-adsorption assembly, where the absorbent liquid adsorbs the exhaust gas. The adsorbed absorbent liquid and the exhaust gas, after being adsorbed, enter the water tank 31 together through the first air inlet 311. The absorbent liquid remains in the water tank 31, while the exhaust gas... Figure 2 The gas flows into the first outlet 312 from the left side of the partition 315, and then the exhaust gas moves upward along the inside of the air guide tube 43 into the reaction chamber 400. The first circulation pump 32 drives the absorbent liquid in the water tank 31 into the cooling chamber 40. The absorbent liquid in the cooling chamber 40 absorbs the heat of the reaction chamber 400 and then heats up. The absorbent liquid releases the adsorbed tail gas (such as ammonia) and the released tail gas enters the reaction chamber 400. Air enters the reaction chamber 400 through the air inlet pipe 45, and the heating element 46 heats the exhaust gas and air, causing the reactive components in the exhaust gas to react with the air. The drainage device 34 drains the absorbent liquid from the cooling chamber 40, and the first circulation pump 32 replenishes it with new absorbent liquid.

[0043] The present invention has been described above by way of example, but the present invention is not limited to the specific embodiments described above. Any modifications or variations made based on the present invention shall fall within the scope of protection claimed by the present invention.

Claims

1. A pre-adsorption recirculation and re-reaction tail gas treatment device, characterized in that, include: The reaction chamber (4), water tank (31), first circulation pump (32), drainage device (34) and pre-adsorption assembly are provided. The reaction chamber (4) has a cooling chamber (40) and a reaction chamber (400). The upper part of the cooling chamber (40) and the upper part of the reaction chamber (400) are connected. The reaction chamber (4) includes a heating element (46). The heating element (46) is located inside the reaction chamber (400). The outlet of the pre-adsorption assembly is connected to the inlet of the reaction chamber (400). The pre-adsorption assembly is connected to the water tank (31). The pre-adsorption assembly adsorbs tail gas with absorbent liquid. The inlet and outlet of the first circulation pump (32) are connected to the inside of the water tank (31) and the cooling chamber (40) respectively. The inlet of the drainage device (34) is connected to the cooling chamber (40). The reaction chamber (4) includes an outer cylinder (41), an inner cylinder (42), a sealing plate (44), and an air inlet pipe (45). The upper and lower ends of the outer cylinder (41) are fixedly connected to the sealing plate (44), and the lower part of the inner cylinder (42) is fixedly connected to the sealing plate (44). The air inlet pipe (45) and the heating element (46) are fixedly connected to the upper sealing plate (44). The air inlet pipe (45) is connected to the reaction chamber (400). The outer cylinder (41) is provided with a circulating liquid inlet pipe (411) and a circulating liquid outlet pipe (412) at the top and bottom, respectively. The circulating liquid inlet pipe (411) is connected to the first circulating pump (32), and the circulating liquid outlet pipe (412) is connected to the drainage device (34). The reaction chamber (4) also includes a water baffle (47) and an air outlet (48). The lower end of the air outlet (48) is fixed to the upper end of the inner cylinder (42), and the upper end of the air outlet (48) is fixed to the upper sealing plate (44). The water baffle (47) is fitted on the outside of the air outlet (48) and fixed to the air outlet (48). An annular air groove with an upper opening is formed between the water baffle (47) and the air outlet (48). An air outlet hole (481) is formed radially on the air outlet (48). The air outlet hole (481) is connected to the annular air groove. The opening above the annular air groove is connected to the upper part of the cooling chamber (40). The pre-adsorption assembly includes an exhaust gas inlet pipe (1), a gas collection box (2), and a second circulation pump (33). The inlet of the second circulation pump (33) is connected to the inside of the water tank (31), and the outlet of the second circulation pump (33) is connected to the first connector (11) of the exhaust gas inlet pipe (1) through the second water supply pipe (331). The first connector (11) is used to spray absorbent liquid into the exhaust gas inlet pipe (1). The upper end of the gas collection box (2) is fixedly connected to and connected to multiple exhaust gas inlet pipes (1). The lower end of the gas collection box (2) is fixedly connected to and connected to the first air inlet (311) of the water tank (31). A second connector (21) is provided on the top of the gas collection box (2). The second connector (21) is connected to the second water supply pipe (331). The second connector (21) is used to spray absorbent liquid into the gas collection box (2).

2. The pre-adsorption recirculation and re-reaction tail gas treatment device according to claim 1, characterized in that: It also includes a post-adsorption assembly, the air inlet of which is connected to the air outlet of the reaction chamber (400), the post-adsorption assembly is connected to the first water inlet (313) of the water tank (31), and the post-adsorption assembly is connected to a clean water source. It also includes a partition (315), which is located inside the water tank (31) and fixedly connected to the upper inner wall of the water tank (31). The partition (315) forms a first gap with the lower inner wall of the water tank (31) only at the bottom. The water level in the water tank (31) is higher than the first gap. The first air outlet (312) of the water tank (31) is fixed to the outer cylinder (41) and connected to the reaction chamber (400). The water inlet, the first air inlet (311) and the first air outlet (312) of the first circulation pump (32) are located on the same side of the partition (315). The first water inlet (313) and the water inlet of the second circulation pump (33) are located on the side of the partition (315) away from the first air inlet (311) and the first air outlet (312).

3. The pre-adsorption recirculation and re-reaction tail gas treatment device according to claim 2, characterized in that: The post-adsorption assembly includes a hydrotubule (5), which includes an outer shell (51) and an inner shell (52). The outer shell (51) is fixedly connected to the inner cylinder (42) and communicates with the gas outlet of the reaction chamber (400). The inner shell (52) is located inside the outer shell (51) and is fixedly connected to the outer shell (51). The inner shell (52) has a water spray hole (520) only at one end away from the inner cylinder (42). A water inlet pipe (511) is formed on the side of the outer shell (51). A water spray cavity (50) is formed between the outer shell (51) and the inner shell (52). The water spray cavity (50) is only connected to the water inlet pipe (511) and the water spray hole (520). The cross-sectional area of ​​the water spray cavity (50) is larger than the cross-sectional area of ​​the water spray hole (520).

4. The pre-adsorption recirculation and re-reaction tail gas treatment device according to claim 3, characterized in that: The post-adsorption assembly also includes a spray chamber (6), which includes a spray cylinder (61), a spray pipe (62), and a nozzle (63). The outer shell (51) is fixedly connected to and communicates with the spray cylinder (61) at one end away from the inner cylinder (42). The spray cylinder (61) is fixedly connected to and communicates with the first water inlet (313) of the water tank (31). The spray pipe (62) is located inside the spray cylinder (61) and is fixedly connected to the spray cylinder (61). Two sets of spray pipes (62) are located on the upper and lower sides of the connection between the outer shell (51) and the spray cylinder (61), respectively. The two sets of spray pipes (62) are fixed with nozzles (63) facing each other. The water inlet pipe (511) and the spray pipe (62) are respectively connected to a clean water source.

5. The pre-adsorption recirculation and re-reaction tail gas treatment device according to claim 4, characterized in that: It also includes a separation device (7) and an exhaust device (8). The exhaust device (8) includes a second outer shell (81) and a second inner shell (82). The second outer shell (81) is fixedly connected to the upper end of the separation device (7). The interior of the second outer shell (81) is connected to the interior of the separation device (7). The second inner shell (82) is located inside the second outer shell (81) and is fixedly connected to the second outer shell (81). An air jet cavity (80) is formed between the second outer shell (81) and the second inner shell (82). An air jet through hole (820) is opened at the upper end of the second inner shell (82). A second air inlet pipe (811) is provided on the side of the second outer shell (81). The second air inlet pipe (811) is connected to a compressed air source. The air jet cavity (80) is only connected to the second air inlet pipe (811) and the air jet through hole (820). The cross-sectional area of ​​the air jet cavity (80) is larger than the cross-sectional area of ​​the air jet through hole (820).

6. The pre-adsorption recirculation and re-reaction tail gas treatment device according to claim 5, characterized in that: The separation device (7) includes an outer separation cylinder (71), a middle separation cylinder (72), an inner separation cylinder (73), a first baffle (74), and a second baffle (75). The lower end of the outer separation cylinder (71) is fixed relative to the upper end of the spray cylinder (61) and communicates with the interior of the spray cylinder (61). The upper end of the outer separation cylinder (71) is fixed relative to the lower end of the second outer shell (81). The middle separation cylinder (72) is located between the outer separation cylinder (71) and the inner separation cylinder (73). An outer cavity (710) is formed between the middle separation cylinder (72) and the outer separation cylinder (71). The middle separation cylinder (72) and the inner separation cylinder (73) are connected. An inner cavity (720) is formed between the two parts (73). The lower end of the separating cylinder (72) is fixedly connected to the first baffle (74). The first baffle (74) has a first vent hole (741) communicating with the outer cavity (710) and a drain hole (742) communicating with the inner cavity (720). The second baffle (75) is placed on the upper end of the separating cylinder (72). The second baffle (75) has a second vent hole (751) for communicating with the outer cavity (710) and the inner cavity (720). The upper and lower ends of the separating inner cylinder (73) are respectively connected to the inside of the second outer shell (81) and the inner cavity (720).

7. A tail gas treatment method using the pre-adsorption cycle re-reaction tail gas treatment device as described in any one of claims 1 to 6, characterized in that: The exhaust gas first enters the pre-adsorption assembly, where the absorbent liquid adsorbs the exhaust gas. The adsorbed absorbent liquid enters the water tank (31), and the adsorbed gas enters the reaction chamber (400). The first circulating pump (32) drives the absorbent liquid in the water tank (31) into the cooling chamber (40). The absorbent liquid in the cooling chamber (40) absorbs the heat of the reaction chamber (400) and then heats up. The absorbent liquid releases the adsorbed tail gas, and the released tail gas enters the reaction chamber (400). The heating element (46) heats the exhaust gas, causing the exhaust gas to react; The drainage device (34) drains the absorbent liquid from the cooling chamber (40).

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