Dispensing device

Abstract

This invention relates to a dispensing device. The dispensing device may include a cylinder and a nozzle. The cylinder can contain dispensing material. The nozzle can be attached to the lower part of the cylinder and can receive and discharge the dispensing material from the cylinder. An injection port connected to a first material receiving space of the cylinder may be provided at the upper part of the cylinder. An outlet connected to a second material receiving space of the nozzle may be provided at the lower part of the nozzle. A through hole connected to the second material receiving space may be provided on the side of the nozzle. A second distance in the vertical direction from the outlet to the through hole may be less than a first distance in the vertical direction from the outlet to the injection port.

Description

Technical Field

[0001] The present invention relates to a dispensing device, and more specifically, to a dispensing device capable of improving the problem of discharge delay of high-viscosity dispensing materials. Background Technology

[0002] Electronic devices that provide images to users, such as smartphones, digital cameras, laptops, navigators, and smart TVs, include display devices for displaying images.

[0003] The display device generates an image and provides the generated image to the user through the display screen.

[0004] Display panels for display devices include liquid crystal display panels (LCDs) and organic light emitting display panels (OLEDs).

[0005] The manufacturing of existing display panels mainly uses photolithography equipment, which forms a layer on the substrate and then removes the remaining portion except for the desired portion by etching. However, recently, the use of inkjet printing equipment, which includes a dispensing device, has been increasing. Summary of the Invention

[0006] Embodiments of the present invention provide a dispensing device that can improve the problem of discharge delay of high-viscosity dispensing materials.

[0007] A dispensing device according to one aspect of the present invention may include a cylinder and a nozzle.

[0008] The cylinder can hold and dispense materials.

[0009] The nozzle can be attached to the lower part of the cylinder, and can receive and discharge the dispensing material from the cylinder.

[0010] An injection port connected to a first material receiving space of the cylinder may be provided at the upper part of the cylinder.

[0011] A discharge port connected to a second material receiving space can be provided at the lower part of the nozzle.

[0012] A through hole connected to the second material receiving space may be provided on the side of the nozzle.

[0013] The second distance from the outlet to the through hole in the vertical direction can be less than the first distance from the outlet to the injection port in the vertical direction.

[0014] According to one embodiment of the present invention, the upper part of the nozzle may be detachably attached to the lower part of the cylinder.

[0015] According to one embodiment of the present invention, the distribution device may further include a main pressure regulator and an auxiliary pressure regulator.

[0016] The main pressure regulator can be connected to the injection port to adjust the pressure of the first material receiving space.

[0017] The auxiliary pressure regulator can be connected to the through hole to adjust the pressure of the second material receiving space.

[0018] According to one embodiment of the present invention, the main pressure regulator can supply gas to the first material containing space through the injection port to regulate the pressure of the first material containing space.

[0019] According to one embodiment of the present invention, the gas may be clean dry air (CDA) or nitrogen.

[0020] According to one embodiment of the present invention, the main pressure regulator may include a syringe pump.

[0021] According to one embodiment of the present invention, the main pressure regulator may include a screw pump.

[0022] According to one embodiment of the present invention, the auxiliary pressure regulator can discharge the dispensing material contained in the second material receiving space through the through hole or inject the dispensing material into the second material receiving space through the through hole to adjust the pressure of the second material receiving space.

[0023] According to one embodiment of the present invention, the auxiliary pressure regulator may include a valve and a pump disposed in a flow path connected to the through hole.

[0024] According to one embodiment of the present invention, the auxiliary pressure regulator can supply gas to the flow path connected to the through hole to regulate the pressure of the second material receiving space.

[0025] According to one embodiment of the present invention, the dispensing device may further include a control unit.

[0026] The control unit can link and control the auxiliary pressure regulator with the main pressure regulator.

[0027] According to one embodiment of the present invention, the control unit can control the auxiliary pressure regulator to increase the pressure of the second material storage space when the main pressure regulator increases the pressure of the first material storage space, and to decrease the pressure of the second material storage space when the main pressure regulator decreases the pressure of the first material storage space.

[0028] According to another aspect of the invention, the dispensing device may include a cylinder, a nozzle, a main pressure regulator, and an auxiliary volume regulator.

[0029] The cylinder can hold and dispense materials.

[0030] The nozzle can be attached to the lower part of the cylinder, and can receive and discharge the dispensing material from the cylinder.

[0031] An injection port connected to a first material receiving space of the cylinder may be provided at the upper part of the cylinder.

[0032] A discharge port connected to a second material receiving space can be provided at the lower part of the nozzle.

[0033] The main pressure regulator can be connected to the injection port to adjust the pressure of the first material receiving space.

[0034] The auxiliary volume adjuster can be combined with the nozzle to adjust the volume of the dispensed material contained in the second material receiving space.

[0035] According to one embodiment of the present invention, the auxiliary volume regulator may include a membrane and a membrane deformation section.

[0036] The membrane can be incorporated into the nozzle to adjust the volume of the dispensed material contained in the second material receiving space by means of deformation.

[0037] The membrane deformation section can deform the membrane.

[0038] According to one embodiment of the present invention, the membrane deformation section may include a piezo actuator, which is combined with the nozzle and the membrane, and whose length is adjusted according to the power supply.

[0039] According to one embodiment of the invention, the membrane may be incorporated into the inner surface of the nozzle, thereby providing an isolation space between the membrane and the inner surface of the nozzle that is not filled with the dispensing material.

[0040] According to one embodiment of the present invention, the upper and lower ends of the membrane can be attached to the inner side of the nozzle, thereby extending in a circumferential direction on the inner side of the nozzle to form a ring shape.

[0041] According to one embodiment of the present invention, the membrane deformation section can supply gas to the isolation space to deform the membrane.

[0042] According to one embodiment of the present invention, the membrane deformation section can supply hydraulic pressure to the isolation space to deform the membrane.

[0043] According to one embodiment of the present invention, the nozzle may include a fastening part, a nozzle part, and a connecting part.

[0044] The fastener can be attached to the cylinder.

[0045] The nozzle portion may be arranged on the lower side of the fastening portion, and the nozzle portion may be provided with the discharge port.

[0046] The connecting part can connect the fastening part and the nozzle part, and can extend and retract in the vertical direction.

[0047] The auxiliary volume adjuster can move the fastening part or the nozzle part to increase or decrease the length of the connecting part in the vertical direction.

[0048] According to embodiments of the present invention, the problem of discharge delay in high-viscosity dispensing materials can be improved. As a result, the discharge delay (i.e., the coating defects that may occur due to sluggish response) can be improved, and high-speed and precise dispensing of high-viscosity dispensing materials can be achieved. Attached Figure Description

[0049] Figure 1 This is a diagram illustrating a display device that can be manufactured using a dispensing device according to an embodiment of the present invention.

[0050] Figure 2 It is along Figure 1 A cross-sectional view taken from line II.

[0051] Figure 3 It is shown in Figure 1 The figure shows an example of a possible coating defect in part A.

[0052] Figure 4 It is shown in Figure 1 The figure shows an example of a possible coating defect in part B.

[0053] Figure 5 This is a block diagram of an electronic device according to an embodiment of the present invention.

[0054] Figure 6 These are schematic diagrams of electronic devices according to various embodiments.

[0055] Figure 7This is a front view showing a dispensing device according to a first embodiment of the present invention.

[0056] Figure 8 yes Figure 7 Longitudinal section view of part A.

[0057] Figure 9 It is separation Figure 8 The diagram shows the nozzle.

[0058] Figure 10 It is separation Figure 8 The diagram shows the cylinder.

[0059] Figure 11 It is used for explanation Figure 7 A diagram of another example of an auxiliary pressure regulator.

[0060] Figure 12 yes Figure 11 The longitudinal section view of part B.

[0061] Figure 13 This is a front view showing a dispensing device according to a second embodiment of the present invention.

[0062] Figure 14 yes Figure 13 Longitudinal section view of part C.

[0063] Figure 15 It is separation Figure 14 The diagram shows the nozzle.

[0064] Figure 16 It is used for explanation Figure 13 A diagram of another example of an auxiliary volume regulator.

[0065] Figure 17 and Figure 18 It is used for explanation Figure 14 and Figure 15 A diagram of another example of an auxiliary volume regulator.

[0066] Figure 19 It is used for explanation Figure 13 A diagram of another example of an auxiliary volume regulator.

[0067] Figure 20 yes Figure 19 Longitudinal section view of part D.

[0068] Figure 21 It is separation Figure 20 The diagram shows the nozzle.

[0069] Figure 22 This is a diagram illustrating another example of the main pressure regulator in an embodiment of the present invention.

[0070] Figure 23 This is a diagram illustrating yet another example of the main pressure regulator in an embodiment of the present invention.

[0071] Figure 24 This is a graph illustrating the linkage control between the main pressure regulator and the auxiliary pressure (or volume) regulator executed by the control unit in an embodiment of the present invention.

[0072] Explanation of reference numerals in the attached figures Detailed Implementation

[0073] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

[0074] To aid in understanding the invention, the accompanying drawings may exaggerate the dimensions of some of the constituent elements rather than showing them to actual scale.

[0075] The terms used in the specification and claims of this invention should not be limited to their ordinary or dictionary meanings, but should be interpreted only in accordance with the meaning and concept of the technical idea of ​​this invention, based on the principle that the inventors can appropriately define the concepts of the terms in order to best explain their own invention.

[0076] In this specification, unless otherwise stated, the singular form may also include the plural form.

[0077] Furthermore, when it is recorded that a certain part "includes" a certain constituent element, it means that the corresponding part may also include other constituent elements.

[0078] Furthermore, when it is recorded as "above" a certain constituent element, it means above or below the corresponding constituent element, and does not necessarily mean that it is located on the upper side based on the direction of gravity.

[0079] Furthermore, when a constituent element is described as being "connected to" or "integrated with" another constituent element, it may include not only cases where the corresponding constituent element is directly connected to or integrated with the other constituent element, but also cases where the corresponding constituent element is indirectly connected to or integrated through other constituent elements.

[0080] Furthermore, when describing a constituent element, terms such as "first" and "second" may be used, but these terms are only used to distinguish the corresponding constituent element from another constituent element, and the nature, order, or sequence of the corresponding constituent elements are not limited by these terms.

[0081] In embodiments of the present invention, a first direction DR1 to a third direction DR3 can be defined. The first direction DR1 can be a direction parallel to one side of the display panel DP. The second direction DR2 can be a direction that intersects the first direction DR1 and is parallel to the other side of the display panel DP. The third direction DR3 can be a direction perpendicular to one surface of the display panel DP. In embodiments of the present invention, the expression "on a plane" can refer to the view from the third direction DR3.

[0082] Figure 1 This is a diagram illustrating a display device that can be manufactured using a dispensing device according to an embodiment of the present invention. Figure 2 It is along Figure 1 A cross-sectional view taken from line II.

[0083] Reference Figure 1 and Figure 2 The display device DD, as an image display device, may include a display panel DP.

[0084] The display panel DP can be one of the following: organic light-emitting display panel, liquid crystal display panel, plasma display panel, field emission display panel, electrophoretic display panel, electrowetting display panel, quantum dot light-emitting display panel, and micro LED display panel. The following description will focus on the case where the display panel DP is an organic light-emitting display panel, but it is not necessarily limited to this.

[0085] The display panel (DP) can be defined with a display area (DA) and a non-display area (NDA).

[0086] The display area DA is the area where the image is displayed, while the non-display area NDA, which is the area surrounding the display area DA, is the area where no image is displayed.

[0087] The case shown is a rectangular shape for the display area DA and a shape for the non-display area NDA that surrounds the display area DA. However, it is not necessary to limit it to this, and the shape of the display area DA and the non-display area NDA can be designed in various ways.

[0088] Pixels that realize images can be arranged in the display area DA. Each pixel may include a light-emitting element and pixel circuitry that controls the driving of the light-emitting element. The light-emitting element may include an organic light-emitting element, and the pixel circuitry may include a thin-film transistor.

[0089] Pixels can have a predetermined arrangement and be repeatedly arranged within the display area DA. For example, pixels can have a pentiline shape. ® Arrangement pattern, stripe arrangement pattern, or diamond pixel ® Arrangement pattern, etc.

[0090] Signal wiring connected to pixels can be arranged in the non-display area NDA. Here, signal wiring may include data lines connected to the source electrode of the thin-film transistor to provide data signals, gate lines connected to the gate electrode of the thin-film transistor to provide gate signals, power lines connected to the light-emitting element to apply voltage, etc.

[0091] The display panel (DP) may include a base substrate (BS), a circuit layer (CL), a display element layer (EDL), and a packaging layer (TFE).

[0092] The base substrate BS can be a component that provides the base surface for arranging the circuit layers CL.

[0093] The base substrate BS can include glass, ceramics, metals, or polymer resins such as polyimide. However, it is not limited to these; the base substrate BS can be an inorganic layer, an organic layer, or a composite material layer, and can be formed as a single layer or multiple layers.

[0094] The circuit layer CL can be arranged on the base substrate BS and can include pixel circuits and signal wiring.

[0095] Pixel circuitry may include pixel transistors for driving light-emitting elements.

[0096] The circuit layer CL may include surrounding transistors arranged in the non-display area NDA and outputting signals for controlling the pixel transistors.

[0097] The display element layer (EDL) can be arranged on the circuit layer (CL) and can include light-emitting elements and pixel definition films.

[0098] Each of the light-emitting elements may include a first electrode, a hole functional layer, a light-emitting layer, an electron functional layer, and a second electrode.

[0099] The pixel definition film can be disposed on the circuit layer CL and can be arranged to cover the area between the first electrodes on the plane. The pixel definition film can be disposed corresponding to the non-light-emitting area, and the light-emitting area can be defined by the pixel definition film.

[0100] The encapsulation layer TFE can be placed on the display element layer EDL and can protect the light-emitting elements of the display element layer EDL from moisture, oxygen and / or foreign matter.

[0101] The encapsulation layer TFE may include the encapsulation substrate ENS and the glass frit seal FS.

[0102] The encapsulation substrate ENS may include glass, metal, or a polymer resin such as polyimide.

[0103] The base substrate BS or the packaging substrate ENS can define a coating area AA coated with a dispensing material for forming a glass frit seal FS.

[0104] The dispensing materials used to form the glass frit seal FS may include adhesives, glass powder, ceramic fillers, etc. The coating area AA may be a closed curve shape surrounding the display area DA on a plane.

[0105] The dispensing device according to an embodiment of the present invention can be used to coat for forming with Figure 1 and Figure 2 The device for dispensing material for the aforementioned glass frit seal FS. However, it is not necessarily limited to this.

[0106] As an example, the dispensing device according to an embodiment of the present invention can also be used to coat a dispensing material for forming a specific layer among a plurality of layers constituting a display panel DP. In this case, the coating area to which the dispensing material is coated may include a specific pattern.

[0107] As another example, the dispensing device according to an embodiment of the invention can also be used to apply dispensing material for forming an adhesive layer used in the bonding of a display panel DP with other components (e.g., cover glass or housing).

[0108] In this specification, the dispensing material may be in liquid or paste form.

[0109] Hereinafter, for ease of explanation, the object to which the dispensing material is coated by the dispensing device according to an embodiment of the present invention will be referred to as a substrate.

[0110] Figure 3 It is shown in Figure 1 The figure shows an example of possible coating defects that may occur in part A. Figure 4 It is shown in Figure 1 The figure shows an example of a possible coating defect in part B.

[0111] exist Figure 3 and Figure 4 For ease of illustration and understanding, only the substrate S and the dispensing material M coated on the substrate S are shown.

[0112] Reference Figure 3 In the coating area AA, the starting and ending points of the coating process overlap, and coating defects such as material agglomeration may occur due to the delayed discharge.

[0113] For example, when the dispensing device reaches the end point, it is necessary to simultaneously reduce the relative speed between the dispensing device and the substrate S and reduce the amount of dispensing material discharged. However, due to the discharge delay, the reduction in the amount of discharge cannot be achieved in time, which may result in coating defects such as material agglomeration.

[0114] In this specification, discharge delay can refer to the time difference between the time point at which pressure is applied or adjusted in the dispensing device to begin discharging the dispensing material or to change the discharge amount of the dispensing material, and the time point at which discharge begins or the discharge amount changes according to the application or adjustment of pressure.

[0115] It can be confirmed that, as described above, the time difference increases with the viscosity of the dispensing material and with the distance between the outlet and the pressure application location.

[0116] Reference Figure 4 In the coating area AA, there may be a deceleration zone or acceleration zone where the relative speed between the dispensing device and the substrate S decreases or increases. In the deceleration zone or acceleration zone, coating defects such as breakage may occur due to discharge delay.

[0117] For example, the stage for transferring the substrate S may decelerate before or after the dispensing device moves from the straight section to the curved section of the coating area AA, and may accelerate before or after the dispensing device moves from the curved section to the straight section of the coating area AA.

[0118] In this situation, it is necessary to simultaneously adjust the relative speed between the dispensing device and the substrate S and adjust the discharge amount of the dispensing material. However, due to the discharge delay, the discharge amount cannot be adjusted in time, which may result in coating defects such as breakage.

[0119] Furthermore, although not shown in the accompanying drawings, coating defects such as increased dispersion of line width or cross-sectional area may also occur in the deceleration or acceleration zones.

[0120] The display device DD according to an embodiment of the present invention can be applied to various electronic devices.

[0121] The electronic device according to an embodiment of the present invention includes the above-described display device DD, and may also include modules or devices with other additional functions in addition to the display device DD.

[0122] Figure 5 This is a block diagram of an electronic device according to an embodiment of the present invention.

[0123] Reference Figure 5 According to an embodiment of the present invention, the electronic device 10 may include a display module 11, a processor 12, a memory 13, and a power module 14.

[0124] The processor 12 may include at least one of a central processing unit (CPU), an application processor (AP), a graphics processing unit (GPU), a communication processor (CP), an image signal processor (ISP), and a controller.

[0125] The memory 13 may store data information required for the operation of the processor 12 or the display module 11. If the processor 12 executes an application stored in the memory 13, image data signals and / or input control signals are transmitted to the display module 11, and the display module 11 can process the received signals and output image information through the display screen.

[0126] The power module 14 may include a power supply module such as a power adapter or battery device and a power conversion module that generates the power required for the operation of the electronic device 10 by converting the power supplied by the power supply module.

[0127] At least one of the various components of the electronic device 10 described above can be included within the display device DD according to the above embodiment. Furthermore, functionally, a portion of a single module included in a module can be included within the display device DD, while another portion of the module can be separately configured from the display device DD. For example, the display device DD may include a display module 11, and the processor 12, memory 13, and power module 14 can be configured as other devices within the electronic device 10 besides the display device DD.

[0128] Figure 6 These are schematic diagrams of electronic devices according to various embodiments.

[0129] Reference Figure 6 The various electronic devices 10 that apply the display device DD according to embodiments of the present invention may include not only image display electronic devices such as smartphones 10_1a, tablet PCs 10_1b, laptop computers 10_1c, TVs 10_1d, and desktop monitors 10_1e, but also wearable electronic devices including display modules such as smart glasses 10_2a, head-mounted displays 10_2b, and smartwatches 10_2c, and vehicle electronic devices 10_3 including display modules such as car dashboards, central dashboards, central information displays (CID) arranged on dashboards, and room mirror displays.

[0130] Figure 7 This is a front view showing a dispensing device according to a first embodiment of the present invention. Figure 8 yes Figure 7 Longitudinal section view of part A. Figure 9 It is separation Figure 8 The diagram shown is of the nozzle. Figure 10 It is separation Figure 8 The diagram shows the cylinder.

[0131] exist Figure 7 In the diagram, for ease of illustration, a portion of the main pressure regulator 300 and the auxiliary pressure regulator 400 are represented by boxes.

[0132] In this embodiment, the first direction DR1 to the third direction DR3 can be defined as described above or as described below. The third direction DR3, as a vertical direction, can be the length direction of the cylinder 100. The first direction DR1 can be a direction intersecting the third direction DR3. The second direction DR2 can be a direction intersecting both the first direction DR1 and the third direction DR3.

[0133] In this embodiment, the vertical direction, upper part or upper end, and lower part or lower end are considered to be set based on the accompanying drawings.

[0134] Reference Figures 7 to 10 According to a first embodiment of the present invention, the dispensing device 20 includes a cylinder 100, a nozzle 200, a main pressure regulator 300, an auxiliary pressure regulator 400, a control unit 500, and a worktable 600. However, it is not necessarily limited to this, and some of the above-described components of the dispensing device 20 may be omitted.

[0135] A first material receiving space S1 may be provided inside the cylinder 100, and the first material receiving space S1 may contain the dispensing material M.

[0136] The cylinder 100 may have a cylindrical shape extending in the third direction DR3.

[0137] An injection port 101 connected to the first material receiving space S1 may be provided on the upper part or upper end face of the cylinder 100. The injection port 101 may be a hole for injecting and dispensing material M into the first material receiving space S1, but is not necessarily limited to this.

[0138] A first connection port 102 connected to the first material receiving space S1 may be provided at the lower part or lower end face of the cylinder 100.

[0139] The cylinder 100 may also be equipped with a supply port (not shown) for replenishing material when the dispensed material M is depleted.

[0140] The supply port can connect the first material containment space S1 to the material supply source (not shown).

[0141] However, it is not necessary to be limited to this; the supply port can also be omitted in cylinder 100.

[0142] The nozzle 200 can be attached to the lower part or lower end of the cylinder 100, and can receive and discharge the dispensing material M from the cylinder 100.

[0143] The upper part of the nozzle 200 can be detachably attached to the lower part of the cylinder 100.

[0144] As a result, cylinder 100 can be replaced. For example, if the dispensed material M is depleted to a predetermined level, cylinder 100 can be separated from nozzle 200 and replaced.

[0145] In this case, the cylinder 100 may also be equipped with a valve (not shown) for opening and closing the first connection port 102.

[0146] Specifically, a first fastening part 103 in the form of a hole may be provided on the lower part or lower end face of the cylinder 100, and a second fastening part 201 in the form of a protrusion that can be inserted into the first fastening part 103 may be provided on the upper part or upper end face of the nozzle 200. However, it is not necessarily limited to this.

[0147] For example, the second fastening part 201 may be in the form of a hole, and the first fastening part 103 may be in the form of a protrusion that can be inserted into the second fastening part 201. Furthermore, the first fastening part 103 and the second fastening part 201 may also include internal or external threads so that the cylinder 100 and the nozzle 200 can be threadedly engaged with each other.

[0148] A second material receiving space S2 may be provided inside the nozzle 200, and the second material receiving space S2 may be filled with the dispensing material M supplied from the cylinder 100.

[0149] A second connection port 202 connected to the second material receiving space S2 may be provided on the upper part or upper end face of the nozzle 200. The second material receiving space S2 can be connected to the first material receiving space S1 of the cylinder 100 through the second connection port 202 and the first connection port 102 of the cylinder 100.

[0150] A discharge port 203 connected to the second material receiving space S2 may be provided at the lower part or lower end face of the nozzle 200. The dispensing material M of the second material receiving space S2 can be discharged through the discharge port 203 and coated onto the substrate S.

[0151] A through hole 204 connected to the second material receiving space S2 may be provided on the side of the nozzle 200.

[0152] The main pressure regulator 300 can be connected to the injection port 101 of the cylinder 100 to adjust the pressure of the first material receiving space S1.

[0153] As an example, the main pressure regulator 300 can regulate the pressure of the first material containing space S1 by supplying the first gas G1 to the first material containing space S1 through the injection port 101.

[0154] Specifically, the main pressure regulator 300 may include: a first gas supply module 310, which supplies first gas G1 and can adjust the supply pressure of first gas G1; and a first connecting pipe 320, which connects the first gas supply module 310 and the injection port 101.

[0155] The first gas supply module 310 may include gas tanks, valves, gas pumps, etc.

[0156] The first gas G1 may include clean dry air (CDA) or nitrogen.

[0157] The main pressure regulator 300 can be combined with the cylinder 100 to apply pressure so that the dispensing material M in the first material receiving space S1 can be supplied to and discharged from the nozzle 200.

[0158] However, if the discharge rate of the distributed material M is controlled solely by the main pressure regulator 300, then as with Figure 3 and Figure 4 As mentioned above, a delay in discharge may occur.

[0159] In this embodiment, in addition to the main pressure regulator 300, an adjustable pressure auxiliary pressure regulator 400 can be added near the outlet 203 to ensure rapid responsiveness in the range where the discharge volume needs to be changed according to speed changes, such as at the start and end points or in the deceleration or acceleration range. It can also achieve high-speed and precise dispensing of dispensing materials with high viscosity (e.g., viscosity from 100 cPs to 300,000 cPs).

[0160] The auxiliary pressure regulator 400 can be connected to the through hole 204 of the nozzle 200 to adjust the pressure of the second material receiving space S2.

[0161] The second distance D2 from the outlet 203 of the nozzle 200 to the through hole 204 in the third direction DR3 can be less than the first distance D1 from the outlet 203 of the nozzle 200 to the injection port 101 of the cylinder 100 in the third direction DR3.

[0162] As a result, the auxiliary pressure regulator 400 connected to the through hole 204 of the nozzle 200 can adjust the discharge pressure of the dispensing material M at a position close to the discharge port 203 of the nozzle 200, compared with the main pressure regulator 300 connected to the injection port 101 of the cylinder 100.

[0163] As an example, the auxiliary pressure regulator 400 can regulate the pressure of the second material receiving space S2 by controlling the flow rate of the dispensing material M in the second material receiving space S2.

[0164] That is, the auxiliary pressure regulator 400 can discharge the dispensing material M contained in the second material receiving space S2 through the through hole 204 or inject the dispensing material M into the second material receiving space S2 through the through hole 204, thereby adjusting the pressure of the second material receiving space S2.

[0165] Specifically, the auxiliary pressure regulator 400 may include a material supply module 410 and a second connecting pipe 420 connecting the material supply module 410 and the through hole 204.

[0166] The material supply module 410 may include a valve for discharging the dispensing material M contained in the second material receiving space S2 and a pump for injecting the dispensing material M into the second material receiving space S2.

[0167] Here, the valve may include one of the following: needle valve, pinch valve, diaphragm valve, solenoid valve, and the pump may include a syringepump.

[0168] The control unit 500 can control the auxiliary pressure regulator 400 and the main pressure regulator 300 in a coordinated manner. The explanation of the coordinated control by the control unit 500 will be described later.

[0169] The worktable 600 can be arranged below the nozzle 200 and can support the substrate S.

[0170] The worktable 600 can be moved in the first direction DR1 and / or the second direction DR2 by means of the worktable transfer unit (not shown).

[0171] As a result, the dispensing material M discharged from the nozzle 200 can be coated along the coating area onto the substrate S supported and transported by the worktable 600.

[0172] However, it is not necessary to limit it to this; nozzle 200 may also be moved.

[0173] Figure 11 It is used for explanation Figure 7Another example of an auxiliary pressure regulator is shown in the figure. Figure 12 yes Figure 11 The longitudinal section view of part B.

[0174] exist Figure 11 In the diagram, for ease of illustration, a portion of the auxiliary pressure regulator 400a is represented by a box.

[0175] Reference Figure 11 and Figure 12 For the dispensing device 20a according to this modification, the auxiliary pressure regulator 400a can supply the second gas G2 to the flow path connected to the through hole 204 of the nozzle 200, thereby adjusting the pressure of the second material receiving space S2.

[0176] Specifically, the auxiliary pressure regulator 400a includes: a second gas supply module 430, which supplies the second gas G2 and is capable of adjusting the supply pressure of the second gas G2; and a third connecting pipe 440, which connects the second gas supply module 430 and the through hole 204.

[0177] The second gas supply module 430 may include gas tanks, valves, gas pumps, etc.

[0178] As a non-limiting example, the second gas G2 may include clean dry air (CDA) or nitrogen.

[0179] The auxiliary pressure regulator 400a and the main pressure regulator 300 can be linked and controlled by the control unit 500. The linkage control of the control unit 500 will be described later.

[0180] Figure 13 This is a front view showing a dispensing device according to a second embodiment of the present invention. Figure 14 yes Figure 13 Longitudinal section view of part C. Figure 15 It is separation Figure 14 The diagram shows the nozzle.

[0181] exist Figure 13 In the diagram, for ease of explanation, a portion of the main pressure regulator 300 and the auxiliary volume regulator 700 are represented by boxes.

[0182] In this embodiment, the first direction DR1 to the third direction DR3 can be defined as described above or as described below. The third direction DR3, as a vertical direction, can be the length direction of the cylinder 100. The first direction DR1 can be a direction intersecting the third direction DR3. The second direction DR2 can be a direction intersecting both the first direction DR1 and the third direction DR3.

[0183] In this embodiment, the vertical direction, upper part or upper end, and lower part or lower end are considered to be set based on the accompanying drawings.

[0184] Reference Figures 13 to 15 According to a second embodiment of the present invention, the dispensing device 20b may include a cylinder 100, a nozzle 200, a main pressure regulator 300, an auxiliary volume regulator 700, a control unit 500, and a worktable 600. However, it is not necessarily limited to this, and some of the above-mentioned components of the dispensing device 20b may be omitted.

[0185] Cylinder 100 and nozzle 200 can be with Figures 7 to 10 Since the content is related and identical to the preceding content, a detailed description of it will be omitted.

[0186] The main pressure regulator 300 can be connected to the injection port 101 of the cylinder 100 to adjust the pressure of the first material receiving space S1.

[0187] As an example, the main pressure regulator 300 can regulate the pressure of the first material containing space S1 by supplying the first gas G1 to the first material containing space S1 through the injection port 101.

[0188] Specifically, the main pressure regulator 300 includes: a first gas supply module 310, which supplies first gas G1 and can adjust the supply pressure of first gas G1; and a first connecting pipe 320, which connects the first gas supply module 310 and the injection port 101.

[0189] The first gas supply module 310 may include gas tanks, valves, gas pumps, etc.

[0190] The first gas G1 may include clean dry air (CDA) or nitrogen.

[0191] The main pressure regulator 300 can be combined with the cylinder 100 to apply pressure so that the dispensing material M in the first material receiving space S1 can be supplied to and discharged from the nozzle 200.

[0192] However, if the discharge rate of the distributed material M is controlled solely by the main pressure regulator 300, then... Figure 3 and Figure 4 As mentioned above, a delay in discharge may occur.

[0193] In this embodiment, in addition to the main pressure regulator 300, an auxiliary volume regulator 700 can be added near the outlet 203 to adjust the volume of the dispensing material M contained in the second material receiving space S2. This ensures rapid responsiveness in the range where the discharge volume needs to be changed according to speed changes, such as at the start and end points or in the deceleration or acceleration range. It also enables high-speed and precise dispensing of dispensing materials with high viscosity (e.g., viscosity from 100 cPs to 300,000 cPs).

[0194] The auxiliary volume adjuster 700 can be combined with the nozzle 200 to adjust the volume of the dispensing material M contained in the second material receiving space S2.

[0195] As a result, compared to the main pressure regulator 300 connected to the injection port 101 of the cylinder 100, the discharge pressure of the dispensing material M can be adjusted at a position near the discharge port 203 of the nozzle 200.

[0196] As an example, the auxiliary volume regulator 700 may include a membrane 710 and a membrane deformation section 720.

[0197] The membrane 710 can be attached to the inner side of the nozzle 200 to provide an isolation space S3 that is not filled with the dispensed material M between the inner side of the nozzle 200 and the membrane 710.

[0198] The upper and lower ends of the membrane 710 can be attached to the inner side of the nozzle 200, and the membrane 710 can have an annular shape extending along the circumferential direction of the nozzle 200 on the inner side of the nozzle 200.

[0199] The isolation space S3 provided by the membrane 710 can be connected to the through hole 204 of the nozzle 200.

[0200] As an example, the membrane deformation section 720 can supply a third gas G3 to the isolation space S3 to deform the membrane 710.

[0201] Specifically, the membrane deformation section 720 may include: a third gas supply module 721, which supplies the third gas G3 and is capable of adjusting the supply pressure of the third gas G3; and a third connecting pipe 722, which connects the third gas supply module 721 and the through hole 204.

[0202] The third gas supply module 721 may include gas tanks, valves, gas pumps, etc.

[0203] As a non-limiting example, the third gas G3 may include clean dry air (CDA) or nitrogen.

[0204] As a result, if the supply pressure of the third gas G3 to the isolation space S3 increases, the membrane 710 can deform to expand the isolation space S3, and the volume of the dispensing material M contained in the second material containing space S2 can decrease, and the pressure of the second material containing space S2 can increase.

[0205] Conversely, if the supply pressure of the third gas G3 to the isolation space S3 decreases, the membrane 710 can deform to shrink the isolation space S3, and the volume of the dispensing material M contained in the second material containing space S2 can increase, and the pressure of the second material containing space S2 can decrease.

[0206] Additionally, membrane 710 may include a material capable of expanding and contracting according to applied pressure.

[0207] The control unit 500 can control the auxiliary volume regulator 700 and the main pressure regulator 300 in a coordinated manner. The explanation of the coordinated control by the control unit 500 will be described later.

[0208] The worktable 600 can be arranged below the nozzle 200 and can support the substrate S.

[0209] The worktable 600 can be moved in the first direction DR1 and / or the second direction DR2 by means of the worktable transfer unit (not shown).

[0210] As a result, the dispensing material M discharged from the nozzle 200 can be coated along the coating area onto the substrate S supported and transported by the worktable 600.

[0211] However, it is not necessary to limit it to this; nozzle 200 may also be moved.

[0212] Figure 16 It is used for explanation Figure 13 A diagram of another example of an auxiliary volume regulator.

[0213] exist Figure 16 In the illustration, for ease of understanding, a portion of the auxiliary volume adjuster 700a is represented by a box.

[0214] Reference Figure 16 For the dispensing device 20c according to this modified example, the auxiliary volume adjuster 700a may include a membrane 710 and a membrane deformation section 720a. The membrane deformation section 720a may supply hydraulic pressure to the isolation space S3 to deform the membrane 710.

[0215] The membrane 710, the isolation space S3, and the through hole 204 described below can be connected with Figures 13 to 15 Since the content is related and identical to the preceding content, its detailed description will be omitted.

[0216] The membrane deformation section 720a may include: a hydraulic supply module 723 that supplies oil O and is capable of adjusting the supply pressure of oil O; and a fourth connecting pipe 724 that connects the hydraulic supply module 723 to the through hole 204.

[0217] The hydraulic supply module 723 may include a pressure tank, valves, pumps, etc. Oil O may include oil or a liquid substance.

[0218] The auxiliary volume regulator 700a and the main pressure regulator 300 can be linked and controlled by the control unit 500. The linkage control of the control unit 500 will be described later.

[0219] Figure 17 and Figure 18 It is used for explanation Figure 14 and Figure 15 A diagram of another example of an auxiliary volume regulator.

[0220] Reference Figure 17 and Figure 18 In this modified example, the auxiliary volume regulator 700b may include a membrane 710 and a membrane deformation section 720b, and the membrane deformation section 720b may include a piezoelectric actuator 725.

[0221] The membrane 710 can be attached to the inner side of the nozzle 200a to create an isolation space S3 that is not filled with the dispensed material M between the inner side of the nozzle 200a and the membrane 710.

[0222] However, it is not necessary to limit it to this; the nozzle 200a may be a structure in which the upper and lower parts are separated based on the membrane 710.

[0223] The piezoelectric actuator 725 can be integrated with the nozzle 200a and the membrane 710, and the length of the piezoelectric actuator 725 can be adjusted according to the power supply. The piezoelectric actuator 725 can be arranged in the isolation space S3.

[0224] As a result, if the length of the piezoelectric actuator 725 increases with the increase of the power supply, the membrane 710 can deform to expand the isolation space S3, and the volume of the dispensing material M contained in the second material containing space S2 can be reduced, and the pressure of the second material containing space S2 can be increased.

[0225] Conversely, if the length of the piezoelectric actuator 725 decreases as the power supply decreases, the membrane 710 can deform to reduce the isolation space S3, and the volume of the dispensing material M contained in the second material containing space S2 can increase, and the pressure in the second material containing space S2 can decrease.

[0226] In this modified example, the nozzle 200a may include a second fastening part 201, a second connection port 202, an outlet port 203 and a second material receiving space S2, but the through hole 204 may be omitted.

[0227] The auxiliary volume regulator 700b and the main pressure regulator 300 can be linked and controlled by the control unit 500. The linkage control of the control unit 500 will be described later.

[0228] Figure 19 It is used for explanation Figure 13 Another example of an auxiliary volume regulator is shown in the figure. Figure 20 yes Figure 19 Longitudinal section view of part D. Figure 21 It is separation Figure 20 The diagram shows the nozzle.

[0229] exist Figure 19 In the diagram, for ease of illustration, a portion of the auxiliary volume adjuster 700c is represented by a box.

[0230] Reference Figure 19 and Figure 21 For the dispensing device 20d according to this modified example, the nozzle 200b may include a fastening part 210, a nozzle part 220 and a connecting part 230.

[0231] The fastening part 210 can be attached to the cylinder 100. For example, the fastening part 210 can be equipped with a second fastening part 201 and a second connection port 202.

[0232] The nozzle portion 220 may be arranged below the fastening portion 210, and the nozzle portion 220 may be provided with an outlet 203.

[0233] The connecting part 230 can connect the fastening part 210 and the nozzle part 220, and can be a structure that can extend and retract along the third direction DR3.

[0234] For example, the connection 230 may include bellows, but is not necessarily limited to this.

[0235] As an example, the auxiliary volume adjuster 700c can increase or decrease the length of the connecting part 230 on the third direction DR3 by transferring the nozzle part 220.

[0236] Specifically, the auxiliary volume adjuster 700c may include: a vertical transfer module 730, which is coupled to the nozzle portion 220 to cause the nozzle portion 220 to rise or fall along the third direction DR3.

[0237] As a non-limiting example, the up-and-down movement module 730 may include a pneumatic or hydraulic cylinder, a motor, etc.

[0238] However, it is not necessary to limit it to this. The auxiliary volume adjuster 700c can also move the fastening part 210 along the third direction DR3 to adjust the length of the connecting part 230.

[0239] The auxiliary volume regulator 700c and the main pressure regulator 300 can be linked and controlled by the control unit 500. The linkage control of the control unit 500 will be described later.

[0240] Figure 22 This is a diagram illustrating another example of the main pressure regulator in an embodiment of the present invention. Figure 23 This is a diagram illustrating yet another example of the main pressure regulator in an embodiment of the present invention.

[0241] Reference Figure 22 The main pressure regulator 300a may include an injection pump 330 connected to the injection port 101 of the cylinder 100.

[0242] The injection pump 330 may be equipped with a piston 331. The piston 331 may rise or fall in the third direction DR3 within the first material receiving space S1 of the cylinder 100 to pressurize the dispensing material M received in the first material receiving space S1.

[0243] Reference Figure 23 The main pressure regulator 300b may include a screw pump 340 connected to the injection port 101 of the cylinder 100.

[0244] The screw pump 340 may include a stirring shaft 341. The stirring shaft 341 can pressurize the dispensing material M contained in the first material receiving space S1 of the cylinder 100 by rotating about a third direction DR3.

[0245] Figure 24 This is a graph illustrating the linkage control between the main pressure regulator and the auxiliary pressure (or volume) regulator executed by the control unit in an embodiment of the present invention.

[0246] exist Figure 24 In the graph, the horizontal axis can represent time, and the vertical axis can represent the movement speed of the worktable 600, the main pressure generated by the main pressure regulators 300, 300a, and 300b, and the auxiliary pressure generated by the auxiliary pressure regulators 400, 400a or the auxiliary volume regulators 700, 700a, 700b, and 700c.

[0247] Reference Figure 24The control unit 500 can link the auxiliary pressure regulators 400, 400a or the auxiliary volume regulators 700, 700a, 700b, 700c with the main pressure regulators 300, 300a, 300b.

[0248] As an example, in the acceleration range where the movement speed of the worktable 600 increases, if the main pressure regulators 300, 300a, and 300b operate to increase the pressure of the first material receiving space S1 of the cylinder 100, the control unit 500 can control the auxiliary pressure regulators 400 and 400a or the auxiliary volume regulators 700, 700a, 700b, and 700c to increase the pressure of the second material receiving space S2 of the nozzles 200, 200a, and 200b.

[0249] As another example, in the deceleration range where the movement speed of the worktable 600 decreases, if the main pressure regulators 300, 300a, and 300b operate to reduce the pressure in the first material receiving space S1 of the cylinder 100, the control unit 500 can control the auxiliary pressure regulators 400 and 400a or the auxiliary volume regulators 700, 700a, 700b, and 700c to reduce the pressure in the second material receiving space S2 of the nozzles 200, 200a, and 200b.

[0250] As a result, the problem of discharge delay of high viscosity dispensing material M can be improved, and the coating defects that may occur due to discharge delay (i.e., sluggish responsiveness) can be improved, and high-speed and precise dispensing of high viscosity dispensing material M can be achieved.

[0251] The above description focuses on preferred embodiments of the present invention, but these are merely examples and do not limit the invention. Anyone skilled in the art can modify and alter the embodiments in various ways by adding, changing, deleting, or supplementing constituent elements without departing from the technical concept of the invention as described in the claims; these modifications and alterations are also included within the scope of the claims.

Claims

1. A dispensing device, comprising: Cylinders are used to hold and dispense materials. as well as A nozzle, attached to the lower part of the cylinder, receives the dispensing material from the cylinder and discharges the dispensing material. The cylinder has an injection port at its upper part, which is connected to the first material receiving space of the cylinder. A discharge port connected to a second material receiving space is provided at the lower part of the nozzle. A through hole connected to the second material receiving space is provided on the side of the nozzle. The second distance from the outlet to the through hole in the vertical direction is less than the first distance from the outlet to the injection port in the vertical direction.

2. The dispensing device according to claim 1, further comprising: A main pressure regulator, connected to the injection port, is used to adjust the pressure in the first material receiving space. as well as An auxiliary pressure regulator is connected to the through hole to adjust the pressure in the second material receiving space.

3. The dispensing device according to claim 2, wherein, The main pressure regulator supplies gas to the first material containing space through the injection port to regulate the pressure of the first material containing space.

4. The dispensing device according to claim 3, wherein, The gas is clean, dry air or nitrogen.

5. The dispensing device according to claim 2, wherein, The main pressure regulator includes an injection pump.

6. The dispensing device according to claim 2, wherein, The main pressure regulator includes a screw pump.

7. The dispensing device according to claim 2, wherein, The auxiliary pressure regulator discharges the dispensing material contained in the second material receiving space through the through hole or injects the dispensing material into the second material receiving space through the through hole to regulate the pressure of the second material receiving space.

8. The dispensing device according to claim 7, wherein, The auxiliary pressure regulator includes a valve and a pump disposed in a flow path connected to the through hole.

9. The dispensing device according to claim 2, wherein, The auxiliary pressure regulator supplies gas to the flow path connected to the through hole to regulate the pressure of the second material containing space.

10. The dispensing device according to claim 2, further comprising: The control unit links the auxiliary pressure regulator with the main pressure regulator for coordinated control. The control unit controls the auxiliary pressure regulator to increase the pressure of the second material storage space when the main pressure regulator increases the pressure of the first material storage space, and to decrease the pressure of the second material storage space when the main pressure regulator decreases the pressure of the first material storage space.

Images