A slit coating apparatus and method for controlling film thickness

Abstract

This invention belongs to the field of slit coating technology, specifically a slit coating device and method for film thickness control. Addressing the issue that existing devices require the syringe to be disassembled and refilled after the coating solution is depleted, leading to frequent disassembly and reassembly and significantly reducing work efficiency, the present invention proposes the following solution: a slit coating machine body with a coating head mounted on it; a fixing frame positioned on the upper side of the slit coating machine body; an anti-disassembly refilling component mounted on the fixing frame, comprising a multi-column base; and a clamping injection component mounted on the fixing frame. The slit coating device and method for film thickness control disclosed in this invention allows for rapid refilling and injection of the syringe in a dust-free environment using the anti-disassembly refilling component, avoiding the need for multiple disassembly and reassembly of the syringe for refilling in traditional devices, thus greatly improving work efficiency.

Description

Technical Field

[0001] This invention relates to the field of slit coating technology, and more particularly to a slit coating apparatus and method for controlling film thickness. Background Technology

[0002] Slit coating is a precision, non-contact wet coating technology. Its working principle is to extrude a coating liquid under certain pressure through a precise die slit and transfer it evenly to a moving substrate to form a thin film. Its application range has expanded from early photographic film and papermaking to lithium-ion battery electrode sheets and perovskite solar cells in the new energy field, as well as high-tech industries such as semiconductor packaging, flexible printed electronics, smart glass and high-performance boards.

[0003] Existing slot coating devices typically use an integrated syringe and stepper motor to precisely control the amount of coating solution, thereby achieving precise film thickness control. However, the syringe in existing devices usually needs to be disassembled and refilled after all the coating solution has been injected, which greatly reduces work efficiency due to the need for multiple disassembly and refilling during operation. Summary of the Invention

[0004] This invention discloses a slit coating apparatus and method for film thickness control, aiming to solve the technical problem in the prior art where the syringe of the existing device needs to be disassembled and refilled after the coating liquid is used up, resulting in frequent disassembly and assembly during operation and greatly reducing work efficiency.

[0005] The present invention provides a slit coating apparatus for controlling film thickness, comprising: The slit coating machine body is equipped with a coating head; A mounting bracket is installed on the upper side of the slit coating machine body; An anti-tamper fluid replenishment assembly is mounted on a fixed frame and includes a multi-column base. A liquid injection clamping assembly is mounted on a fixed frame, and the liquid injection clamping assembly includes a sliding groove plate; A syringe, which is mounted on a clamping injection assembly.

[0006] In a preferred embodiment, the tamper-proof fluid replenishment assembly further includes: An arc-shaped dustproof chamber is located on the upper side of a multi-column base, and a sliding groove is provided inside the arc-shaped dustproof chamber; An arc-shaped sealing plate is disposed in a sliding groove inside an arc-shaped dustproof chamber, and an insertion hole is provided on one side of the arc-shaped sealing plate.

[0007] In a preferred embodiment, the tamper-proof fluid replenishment assembly further includes: Two electric telescopic rods are equally spaced on the upper side of the arc-shaped dustproof chamber, and the telescopic ends of the two electric telescopic rods are respectively fixedly connected with fixing collars; A support plate is provided on one side of the multi-column base, and a liquid storage cylinder is provided on the upper side of the support plate.

[0008] In a preferred embodiment, the tamper-proof fluid replenishment assembly further includes: Two movable connecting pipes are respectively set inside the corresponding fixed collar. One end of each of the two movable connecting pipes is provided with one end of the insertion pipe. The other ends of the two insertion pipes pass through the outer wall of the arc-shaped dustproof chamber and are located inside it. Two solenoid valves are respectively installed on the outer wall of the other end of the corresponding connector, and each of the two connectors is also provided with a sensing ring on the outer wall of the other end.

[0009] In a preferred embodiment, the tamper-proof fluid replenishment assembly further includes: A limiting tube, one end of which is located inside the other end of one of the movable connecting tubes; A liquid supply pipe, one end of which is located inside the other end of another movable connecting pipe, and the other end of which is located inside the coating head.

[0010] In a preferred embodiment, the tamper-proof fluid replenishment assembly further includes: A fixed tank tube is installed on the liquid storage cylinder. Multiple limiting grooves are equally spaced inside the fixed tank tube, and the other end of the limiting tube slides inside the multiple limiting grooves of the fixed tank tube. A liquid filling pipe is located on the upper side of the liquid storage cylinder; A booster pump is installed on the upper side of the liquid storage tank, and the boosting end of the booster pump is connected to the air inlet on the liquid storage tank.

[0011] In a preferred embodiment, the clamping injection assembly further includes: A rotating shaft is disposed inside a rotating hole opened on the upper side of the fixed frame, and the upper end of the rotating shaft is fixedly connected to the slide plate; A rotary motor is mounted on a fixed frame, and the drive end of the rotary motor is connected to one end of a rotating shaft via a coupling.

[0012] In a preferred embodiment, the clamping injection assembly further includes: Two movable blocks are equally spaced inside the slide plate, and two-jaw chucks are respectively provided on the upper side of the two movable blocks; Two frames are equally spaced on the slide plate, and the same lead screw is installed inside the two frames.

[0013] In a preferred embodiment, the clamping injection assembly further includes: A stepper motor is mounted on one side of one of the frames, and the drive end of the stepper motor is connected to one end of a lead screw via a coupling. Two sliding frames are equally spaced on another frame; An injection pusher plate, the upper end of which is sleeved on a lead screw, and the lower end of which slides inside two sliding frames.

[0014] A method of using a slit coating apparatus for film thickness control, comprising the following steps: Step 1: Before coating the substrate, first adjust the angle of the liquid injection clamping assembly to a suitable position, then place the syringe filled with coating liquid on the liquid injection clamping assembly and adjust its position, and finally clamp the syringe by opening the liquid injection clamping assembly. Step 2: After the syringe is clamped, connect the syringe to the inside of the supply tube by activating the anti-disassembly fluid replenishment assembly; Step 3: When coating the substrate, the coating liquid inside the syringe is introduced into the coating head through the supply tube by opening the clamping liquid injection assembly, so that the coating head can coat the substrate. Step 4: When the coating liquid inside the syringe is depleted and needs to be replenished, disconnect the syringe from the supply tube by opening the anti-tamper replenishment component. Then, rotate the syringe to the replenishment area by opening the clamping injection component. Next, open the anti-tamper replenishment component again to connect the syringe to the reservoir, thus completing the replenishment of the syringe.

[0015] As can be seen from the above, the slit coating device for film thickness control provided by the present invention has the ability to quickly switch between liquid replenishment and injection modes in a dust-free environment when using the anti-disassembly liquid replenishment component, avoiding the need for multiple disassembly and reassembly of the syringe for liquid replenishment in traditional devices during operation, thus greatly improving work efficiency. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the overall structure of a slit coating device for film thickness control proposed in this invention. Figure 2 This is a schematic diagram of the overall structure of the fixing frame of the slit coating device for film thickness control proposed in this invention; Figure 3 This is a schematic diagram of the overall structure of the anti-tampering liquid replenishment component of a slit coating device for film thickness control proposed in this invention; Figure 4 This is a schematic cross-sectional view of the internal structure of the arc-shaped dustproof chamber in the anti-tampering liquid replenishment component of a slit coating device for film thickness control proposed in this invention. Figure 5 This is an exploded view of the movable connecting pipe in the anti-tampering liquid replenishment component structure of a slit coating device for film thickness control proposed in this invention. Figure 6 This is a schematic diagram of the overall structure of the clamping and injection assembly of a slit coating device for film thickness control proposed in this invention. Figure 7 This is an exploded view of the clamping and injection assembly of a slit coating device for film thickness control proposed in this invention.

[0017] In the diagram: 1. Slit coating machine body; 2. Coating head; 3. Liquid supply pipe; 4. Fixing frame; 5. Anti-tampering liquid replenishment assembly; 501. Support plate; 502. Liquid storage cylinder; 503. Booster pump; 504. Fixing tank pipe; 505. Electric telescopic rod; 506. Arc-shaped dustproof chamber; 507. Arc-shaped sealing plate; 508. Multi-column base; 509. Fixing collar; 510. Limiting pipe; 511. Moving connecting pipe; 512. Insertion pipe; 513. Solenoid valve; 514. Sensing ring; 515. Liquid filling pipe; 6. Clamping and injection assembly; 601. Rotary motor; 602. Frame; 603. Stepper motor; 604. Lead screw; 605. Moving block; 606. Sliding plate; 607. Rotating shaft; 608. Two-jaw chuck; 609. Sliding frame; 610. Injection pusher plate; 7. Syringe. Detailed Implementation

[0018] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments.

[0019] The slit coating device for film thickness control disclosed in this invention is mainly used in scenarios where the syringe of the existing device needs to be disassembled and refilled after the coating liquid is used up, resulting in frequent disassembly and reassembly during operation, which greatly reduces work efficiency.

[0020] Reference Figures 1-5 A slit coating apparatus for film thickness control, comprising: The slit coating machine body 1 is equipped with a coating head 2. Fixing frame 4 is located on the upper side of the slit coating machine body 1; Anti-tamper fluid replenishment component 5, which is mounted on the fixing frame 4, includes a multi-column base 508; The liquid injection assembly 6 is clamped and disposed on the fixed frame 4. The liquid injection assembly 6 includes a sliding plate 606. Syringe 7 is disposed on the liquid-holding injection assembly 6.

[0021] In this invention, the anti-tampering fluid replenishment component 5 further includes: The arc-shaped dustproof chamber 506 is located on the upper side of the multi-column base 508, and the interior of the arc-shaped dustproof chamber 506 is provided with a sliding groove. The arc-shaped sealing plate 507 is disposed in a sliding groove inside the arc-shaped dustproof chamber 506, and an insertion hole is provided on one side of the arc-shaped sealing plate 507.

[0022] In this invention, the anti-tampering fluid replenishment component 5 further includes: Two electric telescopic rods 505 are equally spaced on the upper side of the arc-shaped dustproof chamber 506, and the telescopic ends of the two electric telescopic rods 505 are respectively fixedly connected to a fixing collar 509. Support plate 501 is located on one side of multi-column base 508, and liquid storage cylinder 502 is located on the upper side of support plate 501.

[0023] In this invention, the anti-tampering fluid replenishment component 5 further includes: Two movable connecting pipes 511 are respectively disposed inside the corresponding fixed collar 509. One end of each of the two movable connecting pipes 511 is provided with one end of the insertion pipe 512. The other ends of the two insertion pipes 512 pass through the outer wall of the arc-shaped dustproof chamber 506 and are located inside it. Two solenoid valves 513 are respectively disposed on the outer wall of the other end of the corresponding insertion tube 512, and each of the two insertion tubes 512 is also provided with a sensing ring 514 on the outer wall of the other end.

[0024] In this invention, the anti-tampering fluid replenishment component 5 further includes: A limiting tube 510, one end of which is disposed inside the other end of one of the movable connecting tubes 511; Liquid supply pipe 3, one end of which is located inside the other end of another movable connecting pipe 511, and the other end of which is located inside the coating head 2.

[0025] In this invention, the anti-tampering fluid replenishment component 5 further includes: A fixed tank tube 504 is installed on the liquid storage cylinder 502. Multiple limiting grooves are evenly spaced inside the fixed tank tube 504. The other end of the limiting tube 510 slides inside the multiple limiting grooves of the fixed tank tube 504. Liquid filling pipe 515 is located on the upper side of liquid storage cylinder 502; A booster pump 503 is located on the upper side of the liquid storage tank 502, and the boosting end of the booster pump 503 is connected to the air inlet on the liquid storage tank 502.

[0026] Specifically, before coating the substrate, the injection head of the syringe 7 is inserted into the insertion hole on the arc-shaped sealing plate 507. At this time, the injection head of the syringe 7 is located inside the arc-shaped dustproof chamber 506. After the syringe 7 is clamped, one of the electric telescopic rods 505 is activated. Under the retraction of the electric telescopic rod 505, the movable connecting pipe 511 connected to the liquid supply pipe 3 moves, and the insertion tube 512 on it is inserted into the injection head of the syringe 7 during this process. Since the injection head of the syringe 7 has rotated to a position aligned with the axial direction of the insertion tube 512, i.e., this position is the liquid injection station, the electric telescopic rod 505 drives the movable connecting pipe 511 to move forward linearly along this axial direction, so that the insertion tube 512 can be accurately inserted into the injection head of the syringe 7. The insertion tube 512 is inserted into the inner hole of the syringe 7 until the sensing ring 514 on the insertion tube 512 contacts the injection head of the syringe 7, indicating that the insertion tube 512 has been inserted to the predetermined depth, that is, it is properly inserted. The sensing ring 514 generates a positioning signal to control the electric telescopic rod 505 to stop moving, proving that the insertion tube 512 is properly inserted. The sensing ring 514 generates a positioning electrical signal when it contacts the injection head. This signal directly controls the corresponding solenoid valve 513 to open automatically, thereby realizing the connection between the liquid supply tube 3 and the inside of the syringe 7. When the coating liquid inside the syringe 7 is exhausted and needs to be replenished, one of the electric telescopic rods 505 is opened again, causing the movable connecting tube 511 connected to the liquid supply tube 3 to move, thereby causing the insertion tube 512 on it to leave the injection head of the syringe 7. When the insertion tube 512 is inserted into the syringe 7, the insertion tube 512 is inserted into the syringe 7. The moment the syringe 7 moves away from the injection head, the sensing ring 514 disengages and generates an interruption signal. This signal controls the corresponding solenoid valve 513 to close immediately, preventing backflow of the coating liquid inside the supply tube 3. When the syringe 7 rotates, because the injection head of the syringe 7 is inserted into the insertion hole inside the arc-shaped sealing plate 507, the arc-shaped sealing plate 507 slides in the groove inside the arc-shaped dustproof chamber 506. Furthermore, the length of the arc-shaped sealing plate 507 far exceeds that of the arc-shaped dustproof chamber 506, ensuring that the arc-shaped dustproof chamber 506 remains sealed during the switching between replenishment and injection of the syringe 7. This prevents dust and impurities from entering and contaminating the injection head and coating liquid, ensuring the quality of the coating liquid and subsequent coating processes. By opening another... The electric telescopic rod 505 moves the movable connecting pipe 511 connected to the limiting pipe 510, thereby inserting the insertion pipe 512 into the injection head of the syringe 7. Combined with the use of the sensing ring 514 and the solenoid valve 513, the syringe 7 is connected to the inside of the liquid reservoir 502. Then, by turning on the booster pump 503 and having the operator manually pull the piston rod of the syringe 7 backward, the coating liquid is replenished from the liquid reservoir 502 into the syringe 7 through the limiting pipe 510, the movable connecting pipe 511 and the insertion pipe 512 under the pressure of the booster pump 503 and the piston suction, thus completing the liquid replenishment. During the liquid replenishment process, the injection push plate 610 is in a disengaged or non-contact state with the piston rod of the syringe 7 to avoid interfering with manual operation.

[0027] In specific application scenarios, the electric telescopic rod 505 drives the movable connecting tube 511 and its insert tube 512 to automatically insert into or detach from the injection head of the syringe 7. Combined with the sensing ring 514 detecting the positioning signal and automatically opening the solenoid valve 513, this achieves rapid, automatic, and sealed connection between the supply tube 3 or the reservoir 502 and the syringe 7, avoiding human error and leakage risks. The moment the insert tube 512 leaves the injection head, the sensing ring 514 immediately triggers the solenoid valve 513 to close, effectively preventing leakage from the supply tube 3. The coating liquid is returned to the injection head to ensure system cleanliness and coating liquid utilization. Two sets of electric telescopic rods 505 control the switching between the liquid supply and replenishment channels respectively. Combined with the structural design of the arc-shaped sealing plate 507 and the arc-shaped dustproof chamber 506, when the syringe 7 rotates to switch positions, the arc-shaped sealing plate 507 always slides inside the arc-shaped dustproof chamber 506 and its length far exceeds that of the dustproof chamber. This ensures that the injection head area remains sealed during the liquid replenishment and injection switching process, effectively preventing dust and impurities from contaminating the injection head and coating liquid, and ensuring coating quality.

[0028] Reference Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 6 and Figure 7 In a preferred embodiment, the clamping injection assembly 6 further includes: A rotating shaft 607 is disposed inside a rotating hole opened on the upper side of the fixed frame 4, and the upper end of the rotating shaft 607 is fixedly connected to the slide plate 606. A rotary motor 601 is mounted on a fixed frame 4, and the drive end of the rotary motor 601 is connected to one end of a rotary shaft 607 via a coupling.

[0029] In this invention, the clamping injection assembly 6 further includes: Two movable blocks 605 are equally spaced inside the slide plate 606, and two-jaw chucks 608 are respectively provided on the upper side of the two movable blocks 605. Two frames 602 are equally spaced on the slide plate 606, and the same lead screw 604 is installed inside the two frames 602.

[0030] In this invention, the clamping injection assembly 6 further includes: Stepper motor 603 is located on one side of one of the frames 602, and the drive end of stepper motor 603 is connected to one end of lead screw 604 via a coupling. Two sliding frames 609 are equally spaced on another frame 602; The upper end of the injection pusher plate 610 is sleeved on the lead screw 604, and the lower end of the injection pusher plate 610 slides inside the two sliding frames 609.

[0031] Specifically, before coating the substrate, the rotary motor 601 is turned on to rotate the rotating shaft 607 and drive the slide plate 606 to the desired position. Then, the two two-jaw chucks 608 are turned on to firmly clamp and fix the syringe 7. Through the action of the anti-tampering liquid replenishment component 5, the liquid supply tube 3 is connected to the inside of the syringe 7. Therefore, the stepper motor 603 is turned on to drive the lead screw 604 to rotate. Since the injection push plate 610 is sleeved on the lead screw 604, the injection push plate 610 moves along the two sliding frames 609 and pushes the piston of the syringe 7 to squeeze the coating liquid inside into the liquid supply tube 3. Then, it is delivered to the inside of the coating head 2 through the liquid supply tube 3. Finally, the coating head 2 performs coating work on the substrate. The precise control of the film thickness is achieved by the stepper motor 603 combined with the precise pushing of the injection push plate 610 to inject the solution, thereby improving the coating effect.

[0032] In specific application scenarios, the stepper motor 603 drives the lead screw 604 to drive the injection pusher plate 610 to move along the sliding frame 609, thereby achieving precise pushing of the piston of the syringe 7, thus accurately controlling the extrusion volume and flow rate of the coating liquid, and ultimately achieving precise control of the coating film thickness, significantly improving the coating effect.

[0033] A method of using a slit coating apparatus for film thickness control, comprising the following steps: Step 1: Before coating the substrate, first adjust the angle of the clamping liquid injection assembly 6 to a suitable position (during this process, turn on the rotary motor 601 to make the rotating shaft 607 drive the slide plate 606 to rotate to the required position). Then, place the syringe 7 filled with coating liquid on the clamping liquid injection assembly 6 and adjust its position (during this process, place the syringe 7 in the two two-jaw chucks 608 and insert the injection head of the syringe 7 into the insertion hole on the arc-shaped sealing plate 507. At this time, the injection head of the syringe 7 is located inside the arc-shaped dustproof chamber 506). Finally, clamp the syringe 7 by opening the clamping liquid injection assembly 6 (during this process, open the two two-jaw chucks 608 to firmly clamp and fix the syringe 7). Step 2: After the syringe 7 is clamped, the anti-disassembly fluid replenishment assembly 5 is activated to connect the syringe 7 to the inside of the fluid supply tube 3. (During this process, one of the electric telescopic rods 505 is activated. As the electric telescopic rod 505 retracts, the movable connecting tube 511 connected to the fluid supply tube 3 moves. The insertion tube 512 on it is inserted into the injection head of the syringe 7 during this process until the sensing ring 514 on the insertion tube 512 contacts the injection head of the syringe 7, proving that the insertion tube 512 is inserted in place. As a result, the solenoid valve 513 is automatically opened, thereby realizing the connection between the fluid supply tube 3 and the inside of the syringe 7.) Step 3: When coating the substrate, the coating liquid inside the syringe 7 is introduced into the coating head 2 through the supply tube 3 by opening the clamping injection assembly 6. This allows the coating head 2 to coat the substrate. (During this process, the supply tube 3 is connected to the syringe 7 by the anti-tampering replenishment assembly 5. Therefore, the stepper motor 603 is turned to rotate the lead screw 604. Since the injection push plate 610 is sleeved on the lead screw 604, the injection push plate 610 moves along the two sliding frames 609 and pushes the piston of the syringe 7, thereby squeezing the coating liquid inside into the supply tube 3. Then, it is delivered to the coating head 2 through the supply tube 3. Finally, the coating head 2 coats the substrate. The precise control of the film thickness is achieved by the stepper motor 603 combined with the precise pushing of the injection push plate 610 to inject the solution, thereby improving the coating effect.) Step 4: When the coating liquid inside the syringe 7 is depleted and needs to be replenished, the connection between the syringe 7 and the supply tube 3 is disconnected by opening the anti-tampering replenishment component 5 (during this process, one of the electric telescopic rods 505 is opened again, causing the movable connecting tube 511 connected to the supply tube 3 to move, thereby causing the insertion tube 512 on it to leave the injection head of the syringe 7. The moment the insertion tube 512 moves away from the injection head, it can be sensed by the sensing ring 514, so that the solenoid valve 513 closes immediately to prevent the coating liquid inside the supply tube 3 from flowing back). Then, the syringe 7 is rotated to the replenishment area by opening the clamping injection component 6 (during this process, when the syringe 7 is rotated, because the injection head of the syringe 7 is inserted into the insertion hole inside the arc-shaped sealing plate 507, the arc-shaped sealing plate 507 slides in the groove inside the arc-shaped dustproof chamber 506, and the length of the arc-shaped sealing plate 507 is much greater than the arc). The arc-shaped dustproof chamber 506 ensures that the syringe 7 remains sealed during the switching between replenishment and injection, preventing dust and impurities from entering and contaminating the injection head and coating liquid, thus ensuring the quality of the coating liquid and subsequent coating. Then, the anti-tamper replenishment assembly 5 is activated again to connect the syringe 7 to the reservoir 502. (During this process, another electric telescopic rod 505 is activated, causing the movable connecting pipe 511 connected to the limiting pipe 510 to move, allowing the insertion pipe 512 to be inserted into the injection head of the syringe 7. Combined with the use of the sensing ring 514 and the solenoid valve 513, communication between the syringe 7 and the reservoir 502 is achieved. Then, by activating the booster pump 503 and pulling the piston of the syringe 7, the coating liquid is replenished from the reservoir 502 into the syringe 7, completing the replenishment.) This completes the replenishment of the syringe 7.

[0034] The above description is only a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in the present invention, based on the technical solution and inventive concept of the present invention, should be covered within the scope of protection of the present invention.

Claims

1. A slit coating apparatus for controlling film thickness, characterized in that, include: The slit coating machine body (1) is equipped with a coating head (2). The fixing frame (4) is located on the upper side of the slit coating machine body (1); Anti-dismantling fluid replenishment component (5), the anti-dismantling fluid replenishment component (5) is mounted on the fixing frame (4), the anti-dismantling fluid replenishment component (5) includes a multi-column base (508); A clamping injection assembly (6) is mounted on a fixed frame (4). The clamping injection assembly (6) includes a sliding groove plate (606). Syringe (7), which is mounted on the clamping injection assembly (6); The anti-tamper fluid replenishment component (5) also includes: An arc-shaped dustproof chamber (506) is disposed on the upper side of a multi-column base (508), and a sliding groove is provided inside the arc-shaped dustproof chamber (506); An arc-shaped sealing plate (507) is disposed in a sliding groove inside an arc-shaped dustproof chamber (506), and an insertion hole is provided on one side of the arc-shaped sealing plate (507).

2. The slit coating apparatus for film thickness control according to claim 1, characterized in that, The anti-tamper fluid replenishment component (5) also includes: Two electric telescopic rods (505) are equally spaced on the upper side of the arc-shaped dustproof chamber (506), and the telescopic ends of the two electric telescopic rods (505) are respectively fixedly connected with fixing collars (509). A support plate (501) is provided on one side of a multi-column base (508), and a liquid storage cylinder (502) is provided on the upper side of the support plate (501).

3. The slit coating apparatus for film thickness control according to claim 2, characterized in that, The anti-tamper fluid replenishment component (5) also includes: Two movable connecting pipes (511) are respectively disposed inside the corresponding fixed collar (509). One end of each of the two movable connecting pipes (511) is provided with one end of the insertion pipe (512). The other end of each insertion pipe (512) passes through the outer wall of the arc-shaped dustproof chamber (506) and is located inside it. Two solenoid valves (513) are respectively disposed on the outer wall of the other end of the corresponding insertion tube (512), and the outer wall of the other end of the two insertion tubes (512) is also provided with a sensing ring (514).

4. The slit coating apparatus for film thickness control according to claim 3, characterized in that, The anti-tamper fluid replenishment component (5) also includes: A limiting tube (510) is provided at one end inside the other end of one of the movable connecting tubes (511); The liquid supply pipe (3) has one end located inside the other end of another movable connecting pipe (511), and the other end of the liquid supply pipe (3) is located inside the coating head (2).

5. The slit coating apparatus for film thickness control according to claim 4, characterized in that, The anti-tamper fluid replenishment component (5) also includes: A fixed tank tube (504) is provided on the liquid storage cylinder (502). Multiple limiting grooves are equally spaced inside the fixed tank tube (504). The other end of the limiting tube (510) slides inside the multiple limiting grooves of the fixed tank tube (504). A liquid filling pipe (515) is provided on the upper side of the liquid storage cylinder (502); A booster pump (503) is located on the upper side of the liquid storage tank (502), and the booster end of the booster pump (503) is connected to the air inlet on the liquid storage tank (502).

6. The slit coating apparatus for film thickness control according to claim 1, characterized in that, The clamping injection assembly (6) further includes: A rotating shaft (607) is disposed inside a rotating hole opened on the upper side of the fixed frame (4), and the upper end of the rotating shaft (607) is fixedly connected to the slide plate (606); A rotary motor (601) is mounted on a fixed frame (4), and the drive end of the rotary motor (601) is connected to one end of a rotating shaft (607) via a coupling.

7. The slit coating apparatus for film thickness control according to claim 6, characterized in that, The clamping injection assembly (6) further includes: Two movable blocks (605) are equally spaced inside the slide plate (606), and two-jaw chucks (608) are respectively provided on the upper side of the two movable blocks (605). Two frames (602) are equally spaced on the slide plate (606), and the two frames (602) are equipped with the same lead screw (604) inside.

8. The slit coating apparatus for film thickness control according to claim 7, characterized in that, The clamping injection assembly (6) further includes: A stepper motor (603) is disposed on one side of one of the frames (602), and the drive end of the stepper motor (603) is connected to one end of a lead screw (604) via a coupling; Two sliding brackets (609) are equally spaced on another frame (602); The upper end of the injection pusher plate (610) is sleeved on the lead screw (604), and the lower end of the injection pusher plate (610) slides inside the two sliding frames (609).

9. A method of using a slit coating apparatus for film thickness control, comprising using a slit coating apparatus for film thickness control as described in any one of claims 1-8, characterized in that, Includes the following steps: Step 1: Before coating the substrate, first adjust the angle of the clamping liquid injection assembly (6) to a suitable position, then place the syringe (7) filled with coating liquid on the clamping liquid injection assembly (6) and adjust its position, and finally clamp the syringe (7) by opening the clamping liquid injection assembly (6). Step 2: After the syringe (7) is clamped, the syringe (7) is connected to the inside of the supply tube (3) by opening the anti-disassembly fluid replenishment component (5); Step 3: When coating the substrate, the coating liquid inside the syringe (7) is introduced into the coating head (2) through the supply pipe (3) by opening the clamping liquid injection assembly (6), so that the coating head (2) can coat the substrate. Step 4: When the coating liquid inside the syringe (7) is exhausted and needs to be replenished, disconnect the syringe (7) from the liquid supply tube (3) by opening the anti-disassembly liquid replenishment component (5), then rotate the syringe (7) to the liquid replenishment area by opening the clamping liquid injection component (6), and then open the anti-disassembly liquid replenishment component (5) again to connect the syringe (7) to the liquid storage cylinder (502), thereby completing the liquid replenishment work of the syringe (7).

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