A laser biased incident additive manufacturing device and method for online co-firing with synchrotron radiation

Abstract

This invention relates to the field of additive manufacturing technology and discloses a laser bias incident additive manufacturing method combined with online synchrotron radiation. This method aims to solve the technical problems of the incompatibility between fixed observation of the workpiece and laser bias incident radiation, as well as the easy instability of the laser spot under bias scanning. Its core steps include: fixing the workpiece on the synchrotron radiation optical path; setting the target bias incident angle θ; based on the geometric relationship between this angle θ and the fixed focal length F of the laser scanning component, controlling the displacement mechanism to drive the laser scanning component to perform coordinated displacement, i.e., horizontal movement Δx = F*sinθ to change the incident angle, and simultaneously vertical movement Δz = F*(1-cosθ) to compensate for the optical path, so that the total optical path is constant and the laser spot is stable. This invention achieves precise adjustment of the laser beam bias incident angle without moving the workpiece, ensuring high-quality in-situ observation of the molten pool by synchrotron radiation, and providing a high-precision and cost-effective technical means.

Description

Technical Field

[0001] This invention relates to the field of additive manufacturing technology, and in particular to a laser biased incident additive manufacturing apparatus and method for online synchrotron radiation. Background Technology

[0002] The extremely high temperature gradients and rapid cooling rates in laser additive manufacturing easily induce defects such as porosity and cracks, severely impairing the fatigue performance and reliability of components and hindering the application of this technology in critical fields such as aerospace. The key to overcoming this bottleneck lies in a deep understanding of the dynamic evolution of the molten pool and revealing the defect formation mechanism. Synchrotron radiation technology, with its advantages of non-destructive operation, high penetration, and high spatiotemporal resolution, can capture and quantitatively analyze key physical processes such as the internal flow and extreme non-equilibrium solidification dynamics of the molten pool in real time, and has become a core research tool for exploring the formation and evolution of defects in laser additive manufacturing.

[0003] The in-depth advancement of the aforementioned in-situ research on laser additive manufacturing urgently requires a dedicated in-situ characterization device capable of accurately reproducing additive manufacturing process parameters and highly compatible with synchrotron radiation beamlines. However, existing in-situ characterization devices for laser additive manufacturing still suffer from two key technical deficiencies: First, in terms of structural design, because the position of the workpiece is rigidly constrained near the center of the horizontal synchrotron radiation optical path, its vertical and horizontal adjustment range is very limited, preventing the laser from being incident on the powder bed surface at a large offset angle, thus significantly increasing the difficulty of conducting laser offset incident experiments. Second, in terms of laser optical path control, most devices default to a design scheme where the laser is incident perpendicularly on the surface of the workpiece, without specifically optimizing for the problems of laser path length changes (directly affecting the stability of the spot size) and incident angle changes (indirectly leading to abnormal molten pool morphology and distribution) during the scanning process, which seriously affects the experimental accuracy. Although existing 3D dynamic focusing systems can solve the above problems to some extent, they have inherent disadvantages such as high manufacturing costs, complex control systems, and difficult maintenance, which greatly limit the in-depth exploration of the in-situ dynamic evolution process of laser additive manufacturing. Summary of the Invention

[0004] The technical problem this invention aims to solve is that synchrotron radiation imaging experiments have two core constraints: first, the workpiece to be processed must be on the synchrotron radiation optical path; second, the laser scanning plane must be strictly perpendicular to the synchrotron radiation beam, thereby achieving accurate two-dimensional vertical projection monitoring of the molten pool evolution process. Directly translating the workpiece to achieve offset incidence cannot simultaneously meet the above requirements.

[0005] To address the aforementioned technical problems, this invention provides a laser biased incident additive manufacturing method for online co-firing with synchrotron radiation, comprising the following steps:

[0006] The workpiece is fixed in place and positioned in the path of the synchrotron radiation beam;

[0007] A laser beam is emitted through a laser scanning component, which has a fixed focal length F and focuses the laser beam onto the workpiece.

[0008] Pre-set the target offset incident angle of the laser beam;

[0009] In response to the setting of the target offset incident angle, a multi-axis displacement mechanism is controlled to drive the laser scanning assembly to perform coordinated displacement motion, so as to adjust the laser beam to be incident on the workpiece at the target offset incident angle, wherein the coordinated displacement motion includes:

[0010] Drive the laser scanning component to move by a first displacement along a first direction to adjust the offset incident angle of the laser beam;

[0011] Wherein, the first direction is parallel to the workpiece to be processed, and the second direction is perpendicular to the workpiece to be processed; and,

[0012] Based on the geometric relationship between the target offset incident angle and the fixed focal length F, the laser scanning component is synchronously driven to move a second displacement along the second direction to compensate for the change in laser optical path caused by the movement in the first direction, so that the total optical path of the laser beam from the laser scanning component to the workpiece remains consistent with the fixed focal length.

[0013] Preferably, in the step of driving the laser scanning assembly to move along a first direction parallel to the surface of the workpiece, the multi-axis displacement mechanism includes a first linear drive device and a second linear drive device. The first linear drive device calculates and drives the laser scanning assembly to move a first displacement based on the target offset incident angle, thereby realizing the adjustment of the laser beam offset incident angle.

[0014] Preferably, in the step of driving the laser scanning component to move along the second direction, the multi-axis displacement mechanism includes a first linear driving device and a second linear driving device. The second linear driving device calculates and drives the laser scanning component to move a second displacement based on the target offset incident angle, thereby realizing the adjustment of the laser beam offset incident angle.

[0015] Preferably, the step of coordinating displacement control based on the target offset incident angle includes:

[0016] Based on the target offset incident angle θ and the fixed focal length F, calculate the first displacement Δx required by the first linear drive device and the second displacement Δz required by the second linear drive device.

[0017] Where, Δx = F * sinθ, Δz = F * (1 - cosθ).

[0018] Preferably, the fixed focal length F is the focal length of the focusing lens in the laser scanning assembly.

[0019] Preferably, while the laser scanning component is scanning and processing the workpiece, a control module synchronously triggers the synchrotron radiation imaging system to acquire images, so that the laser processing process and the synchrotron radiation dynamic imaging are synchronized in the time domain.

[0020] Preferably, the scanning plane of the laser scanning component is perpendicular to the propagation direction of the synchrotron radiation beam, so that the synchrotron radiation beam can perform vertical projection imaging of the processing area of ​​the workpiece.

[0021] Preferably, the laser scanning assembly includes a laser and a laser galvanometer system. The laser galvanometer system is used to deflect and focus the laser beam emitted by the laser onto the workpiece, and to control the laser beam to scan along a preset trajectory.

[0022] Preferably, by coordinating the displacement of the laser scanning component in the first and second directions, the offset incident angle of the laser beam on the workpiece can be continuously adjusted within the range of 0° to 20°.

[0023] A laser biased incident additive manufacturing apparatus for online co-firing with synchrotron radiation, used to realize the laser biased incident additive manufacturing method for online co-firing with synchrotron radiation as described in any of the above technical solutions, comprising:

[0024] A worktable is used to hold the workpiece to be processed.

[0025] A laser scanning assembly is used to emit a processing laser beam and deflect and focus the laser beam onto the surface of the workpiece.

[0026] A multi-axis displacement mechanism, driven and connected to the laser scanning assembly, includes:

[0027] A first linear drive device is used to drive the laser scanning assembly to move along a first direction parallel to the surface of the worktable;

[0028] A second linear drive device is used to drive the laser scanning assembly to move along a second direction; and

[0029] The control module, which is signal-connected to the first linear drive device and the second linear drive device, is configured to coordinately control the movement of the first linear drive device and the second linear drive device according to the target offset incident angle, so that the laser optical path from the laser scanning component to the surface of the workpiece remains constant during the movement of the laser scanning component.

[0030] Compared with existing technologies, the advantages of the laser biased incident additive manufacturing method and apparatus for online synchrotron radiation combined with the present invention are as follows:

[0031] When laser processing is required at a non-perpendicular angle, the traditional method changes the angle by moving the workpiece, which immediately destroys the workpiece position and field of view parallelism condition required for synchrotron radiation imaging.

[0032] In this embodiment of the invention, the workpiece remains absolutely stationary, while the multi-axis displacement mechanism is controlled to move in a coordinated manner. The core steps of the laser offset incident additive manufacturing method for online synchrotron radiation include: fixing the workpiece on the synchrotron radiation optical path; setting a target offset incident angle θ; and, based on the geometric relationship between this angle θ and the fixed focal length F of the laser scanning component, controlling the displacement mechanism to drive the laser scanning component to perform coordinated displacement, i.e., horizontal movement Δx = F*sinθ to change the incident angle, and vertical movement Δz = F*(1-cosθ) to compensate for the optical path, ensuring a constant total optical path and a stable light spot. Without touching the workpiece, the laser beam incident angle is precisely and continuously adjustable, while simultaneously ensuring the absolute stability of the focused light spot size at any offset angle. This resolves the fundamental contradiction between "achieving offset incident" and "maintaining synchrotron radiation observation conditions" in the background technology, as well as the secondary problem of "light spot instability under offset scanning."

[0033] Firstly, it enables researchers to freely study the impact of the key process parameter, the laser incident angle, on molten pool dynamics and defect formation mechanisms, under the condition that the workpiece is always in the optimal synchrotron radiation observation position, greatly improving the feasibility and data reliability of in-situ experiments. Secondly, by abandoning the expensive 3D dynamic focusing system, constant optical path is achieved solely through the coordinated control of conventional precision displacement mechanisms, significantly reducing system complexity and cost, and improving the practicality and accessibility of the method. Finally, the entire control process is based on a defined geometric model, with high precision and good repeatability, providing a stable, reliable, and cost-effective innovative experimental method for the fundamental research of laser additive manufacturing processes. Attached Figure Description

[0034] Figure 1 This is a schematic diagram of an embodiment of the device of the present invention;

[0035] Figure 2 This is a graph showing the change in the moving distance of the laser scanning component driven by the multi-axis displacement mechanism according to an embodiment of the present invention as a function of the target offset incident angle θ;

[0036] In the diagram, 100 represents the worktable.

[0037] 1. Parts to be processed;

[0038] 2. Laser scanning assembly; 21. Laser beam; 22. Fixed focal length F;

[0039] 3. Multi-axis displacement mechanism; 31. First linear drive device; 32. Second linear drive device;

[0040] 4. Synchrotron radiation beam. Detailed Implementation

[0041] The specific embodiments of the present invention will be described in further detail below with reference to the accompanying drawings and examples. The following examples are for illustrative purposes only and are not intended to limit the scope of the invention.

[0042] In the description of this invention, it should be understood that the terms "longitudinal," "lateral," "vertical," "horizontal," "upper," "lower," "front," "rear," "left," "right," "top," "bottom," "inner," and "outer," etc., used to indicate orientation or positional relationships are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing this invention and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this invention.

[0043] In the description of the invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installed," "equipped with," "connected," etc., should be interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be a connection within two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0044] like Figure 1 and Figure 2 As shown, a preferred embodiment of the present invention provides a laser biased incident additive manufacturing method for online synchrotron radiation, comprising the following steps:

[0045] The workpiece 1 is fixed in place and positioned on the path of the synchrotron radiation beam 4;

[0046] The laser beam 21 is emitted through the laser scanning component 2, which has a fixed focal length F22 and focuses the laser beam 21 onto the workpiece to be processed.

[0047] The target offset incident angle of laser beam 21 is preset;

[0048] In response to the setting of the target offset incident angle, a multi-axis displacement mechanism 3 is controlled to drive the laser scanning assembly 2 to perform a coordinated displacement motion, so as to adjust the laser beam 21 to be incident on the workpiece 1 at the target offset incident angle, wherein the coordinated displacement motion includes:

[0049] Drive the laser scanning component 2 to move by a first displacement along the first direction to adjust the offset incident angle of the laser beam 21;

[0050] Wherein, the first direction is parallel to the workpiece 1, and the second direction is perpendicular to the workpiece 1; and,

[0051] Based on the geometric relationship between the target offset incident angle and the fixed focal length F22, the laser scanning component 2 is synchronously driven to move by a second displacement along the second direction to compensate for the change in laser optical path caused by the movement in the first direction, so that the total optical path of the laser beam from the laser scanning component 2 to the workpiece 1 remains consistent with the fixed focal length F22.

[0052] Based on the above technical solution, the overall purpose of this embodiment is to achieve laser beam 21 incident on workpiece 1 at a controllable bias angle under the strict constraints of fixed path of synchrotron radiation beam 4 and immovable position of workpiece 1, while precisely maintaining constant laser optical path, so as to meet the high spatiotemporal resolution requirements of in-situ observation for the dynamic evolution process of molten pool.

[0053] The method first fixes the workpiece 1 (e.g., a metal powder bed or alloy substrate) on the processing stage 100 of the synchrotron radiation imaging system, ensuring that the workpiece 1 is precisely located at the center of the horizontal penetration path of the synchrotron radiation beam 4, thus ensuring that the synchrotron radiation imaging system can acquire a two-dimensional vertical projection image of the processing area without obstruction. Then, a laser beam 21 is emitted from the laser scanning component 2 (specifically, a combination structure of a fiber laser and a laser galvanometer, or other equivalent programmable laser emitting unit) and focused on the workpiece 1. Next, the target offset incident angle of the laser beam 21 is preset (more preferably, this angle can be continuously adjusted within the range of 0° to 19.5° as needed). In response to the setting of the target angle, a multi-axis displacement mechanism 3 (specifically, a suspended dual-axis mechanism consisting of a horizontal X-axis electric linear displacement device and a vertical Z-axis electric precision screw or electric cylinder, or other equivalent linear drive unit capable of in-plane translation and height compensation) drives the laser scanning component 2 to perform coordinated displacement motion. The coordinated displacement motion includes: driving the laser scanning component 2 to move a first displacement along a first direction (i.e., a direction parallel to the workpiece 1, such as a horizontal X-axis linear slide) to precisely adjust the offset incident angle of the laser beam 21; simultaneously, based on the geometric relationship between the target offset incident angle and the fixed focal length of the laser scanning component 2, synchronously driving the laser scanning component 2 to move a second displacement along a second direction (i.e., a direction perpendicular to the workpiece 1, such as a vertical Z-axis lifting mechanism) to compensate for the optical path change caused by the movement in the first direction in real time, so that the total optical path of the laser beam 21 from the laser scanning component 2 to the workpiece 1 always remains consistent with the fixed focal length.

[0054] Compared to existing technologies where the rigid fixed position of the workpiece 1 prevents the laser from achieving a large offset incidence, or where changes in the optical path cause fluctuations in the focused spot size, making it impossible to accurately capture the evolution of the molten pool and keyhole, this preferred embodiment first avoids the interference of directly moving the workpiece 1 on the synchrotron radiation optical path, ensuring the stability of the imaging system and the clear acquisition of the two-dimensional vertical projection morphology. Second, through multi-axis cooperative displacement and geometric compensation, the optical path drift during the offset incidence process is completely eliminated, thereby keeping the focused spot size highly stable throughout the processing, avoiding abnormal molten pool morphology or experimental data distortion. Finally, it achieves high-precision, non-destructive, real-time observation of the in-situ dynamic process of laser additive manufacturing, providing a reliable technical means to reveal the formation mechanism of defects such as porosity and cracks, significantly reducing the manufacturing cost and maintenance difficulty that rely on expensive three-dimensional dynamic focusing systems, and significantly improving the reliability evaluation efficiency of laser additive components in key fields such as aerospace.

[0055] Furthermore, in the step of driving the laser scanning component 2 to move along a first direction parallel to the surface of the workpiece 1, the first linear driving device 31 calculates and drives the laser scanning component 2 to move a first displacement based on the target offset incident angle, thereby realizing the adjustment of the offset incident angle of the laser beam 21.

[0056] Based on this embodiment, the first linear drive device 31 precisely realizes the driving step in the first direction, thereby achieving precise and controllable adjustment of the offset incident angle of the laser beam 21 under the condition that the path of the synchrotron radiation beam 4 is fixed and the position of the workpiece 1 cannot be moved. This step firstly involves the first linear drive device 31 accurately calculating the required first displacement Δx=F*sinθ based on the preset target offset incident angle θ and the fixed focal length F22 of the laser scanning component 2 using the Pythagorean theorem geometric relationship. Then, the laser scanning component 2 is driven to move the corresponding displacement along the first direction, thereby adjusting the laser beam 21 to be incident on the workpiece 1 at the target offset incident angle. Specifically, the first linear drive device 31 can be a horizontal X-axis electric linear displacement device, such as a precision ball screw paired with a servo motor, linear motor, or linear guide slide, or it can be replaced with other equivalent high-precision planar translation linear drive units.

[0057] Compared to the existing technologies where the workpiece 1 is rigidly fixed at the center of the synchrotron radiation optical path, resulting in the inability to achieve a large offset incidence of the laser, the difficulty in keeping the laser scanning plane perpendicular to the synchrotron radiation beam 4, and the low accuracy of monitoring the morphology of the molten pool and keyhole, this invention, through the computational driving structure of the aforementioned first linear driving device 31, firstly precisely changes the relative spatial position of the laser output port and the workpiece 1 without moving the workpiece 1, ensuring that the laser scanning plane is always perpendicular to the path of the synchrotron radiation beam 4; secondly, this computational driving process is controlled in real time based on the geometric relationship between the target offset incidence angle and the fixed focal length F22, avoiding errors caused by manual adjustment or complex three-dimensional dynamic focusing systems; ultimately, it enables the synchrotron radiation imaging system to stably acquire clear two-dimensional vertical projection images of the molten pool and keyhole, solving the core problems of high difficulty in implementing offset incidence, abnormal molten pool morphology, and distorted experimental data in existing devices. It provides a high-precision, low-cost, and easily engineeringable technical path for in-depth revelation of the in-situ dynamic evolution law of laser additive manufacturing, and significantly improves the research efficiency of the defect formation mechanism of additive components in key fields such as aerospace.

[0058] Furthermore, in the step of driving the laser scanning component 2 to move along the second direction, the second linear driving device 32 calculates and drives the laser scanning component 2 to move a second displacement based on the target offset incident angle, thereby realizing the adjustment of the offset incident angle of the laser beam 21.

[0059] Based on this embodiment, the second linear drive device 32 precisely realizes the driving step in the second direction, thereby compensating for changes in the laser optical path and maintaining a stable adjustment of the offset incident angle in real time, under the condition that the path of the synchrotron radiation beam 4 is fixed and the position of the workpiece 1 cannot be moved. This step first involves the second linear drive device 32 precisely calculating the required second displacement Δz=F*(1-cosθ) using the Pythagorean theorem geometric relationship based on the preset target offset incident angle θ and the fixed focal length F22 of the laser scanning component 2. Then, the laser scanning component 2 is driven to move along the second direction by the corresponding displacement, thereby achieving precise adjustment of the offset incident angle of the laser beam 21. Specifically, the second linear drive device 32 can be a vertical Z-axis electric linear displacement device, such as a precision ball screw paired with a servo motor, an electric precision cylinder, a linear motor guide slide, or other equivalent linear drive units capable of achieving high-precision vertical lifting compensation.

[0060] Furthermore, the steps for coordinated displacement control based on the target offset incident angle include:

[0061] Based on the target offset incident angle θ and the fixed focal length F22, calculate the first displacement Δx required by the first linear drive device 31 and the second displacement Δz required by the second linear drive device 32.

[0062] Where, Δx = F * sinθ, Δz = F * (1 - cosθ).

[0063] Based on this embodiment, active constant control of the laser optical path is further achieved through precise displacement compensation calculation steps, thereby eliminating the focusing spot size fluctuation caused by offset incidence under the stringent conditions that the path of the synchrotron radiation beam 4 is fixed and the position of the workpiece 1 cannot be moved. The method first fixes the workpiece 1 on the processing stage 100 of the synchrotron radiation imaging system, ensuring that the workpiece 1 is precisely located at the center of the horizontal penetration path of the synchrotron radiation beam 4; a laser beam 21 is emitted through the laser scanning assembly 2 and focused on the workpiece 1; a target offset incidence angle θ is preset; subsequently, in response to the setting of the target offset incidence angle θ, the multi-axis displacement mechanism 3 drives the laser scanning assembly 2 to perform coordinated displacement motion, wherein the first linear drive device 31 drives the laser scanning assembly 2 to move along a first direction parallel to the workpiece 1. The first displacement Δx, and the second linear drive device 32 drive the laser scanning component 2 to move the second displacement Δz along a second direction perpendicular to the workpiece 1; the core of this claim is that, based on the target offset incident angle θ and the fixed focal length F22 of the laser scanning component 2, the first displacement Δx=F*sinθ and the second displacement Δz=F*(1-cosθ) are accurately calculated using the geometric relationship of the Pythagorean theorem, thereby ensuring that the total optical path of the laser beam 21 from the laser scanning component 2 to the workpiece 1 is always completely consistent with the fixed focal length F22.

[0064] Through the above-mentioned Pythagorean theorem compensation calculation structure based on the target offset incident angle θ and the fixed focal length F22, the optical path change caused by the movement in the first direction is eliminated in real time without moving the workpiece 1. Secondly, the calculation process directly drives the first linear drive device 31 and the second linear drive device 32 to perform coordinated displacement, avoiding the errors and complexities caused by manual adjustment or reliance on expensive three-dimensional dynamic focusing systems. Finally, the laser scanning plane is kept perpendicular to the synchrotron radiation beam 4, and the synchrotron radiation imaging system can stably acquire high-resolution two-dimensional vertical projection images of the molten pool and keyhole. This solves the core problems of unstable spot size, low experimental accuracy, and difficulty in implementing offset incident in existing devices. It provides a high-precision, low-cost, and easily engineeringable technical path for in-depth revelation of the in-situ dynamic evolution law of laser additive manufacturing, and greatly improves the research efficiency of the defect formation mechanism of additive components in key fields such as aerospace.

[0065] Furthermore, the fixed focal length F22 is the focal length of the focusing lens in the laser scanning assembly 2.

[0066] Based on this embodiment, the specific source of the fixed focal length F22 is further clarified, thereby achieving precise and constant control of the laser optical path under the stringent conditions that the path of the synchrotron radiation beam 4 is fixed and the position of the workpiece 1 cannot be moved. The method first fixes the workpiece 1 on the processing stage 100 of the synchrotron radiation imaging system, ensuring that the workpiece 1 is precisely located at the center of the horizontal penetration path of the synchrotron radiation beam 4; a laser beam 21 is emitted from the laser scanning assembly 2 and focused on the workpiece 1, wherein the laser scanning assembly 2 adopts a combination structure of a fiber laser and a laser galvanometer, the laser galvanometer having a built-in focusing lens; a target offset incident angle θ is preset; in response to the setting of the target offset incident angle θ, the multi-axis displacement mechanism 3 drives the laser scanning assembly 2 to perform coordinated displacement motion, wherein the first linear drive device 31 drives the laser scanning assembly 2 to move a first displacement Δx along a first direction parallel to the workpiece 1, and the second ... The line drive device 32 drives the laser scanning assembly 2 to move a second displacement Δz along a second direction perpendicular to the workpiece 1. The core is that the fixed focal length F22 is specifically defined as the focal length of the focusing lens in the laser scanning assembly 2. The focusing lens can be an f-theta flat lens, a telecentric lens, or other equivalent optical lens assembly that can achieve high-precision laser focusing. Based on the target offset incident angle θ and the focal length F of the focusing lens, the first displacement Δx=F*sinθ and the second displacement Δz=F*(1-cosθ) are accurately calculated through geometric relationships. Finally, it is ensured that the total optical path of the laser beam 21 from the laser scanning assembly 2 to the workpiece 1 is always completely consistent with the focal length F of the focusing lens.

[0067] This preferred embodiment, by explicitly defining the fixed focal length F22 as the focal length of the focusing lens, firstly eliminates the optical path change caused by movement in the first direction in real time without moving the workpiece 1; secondly, the calculation process directly uses the focal length of the focusing lens as a reference for coordinated displacement control, avoiding the errors and complexities caused by manual adjustment or reliance on expensive three-dimensional dynamic focusing systems; finally, it ensures that the laser scanning plane and the synchrotron radiation beam 4 remain perpendicular, and the synchrotron radiation imaging system can stably acquire high-resolution two-dimensional vertical projection images of the molten pool and keyhole, solving the core problems of unstable spot size, low experimental accuracy, and difficulty in implementing offset incident in existing devices. It provides a high-precision, low-cost, and easily engineeringable technical path for in-depth revelation of the in-situ dynamic evolution law of laser additive manufacturing, and significantly improves the research efficiency of the defect formation mechanism of additive components in key fields such as aerospace.

[0068] Furthermore, while the laser scanning component 2 is scanning and processing the workpiece 1, a control module synchronously triggers the synchrotron radiation imaging system to acquire images, so that the laser processing process and the synchrotron radiation dynamic imaging are synchronized in the time domain.

[0069] Based on this embodiment, the laser processing process and synchrotron radiation dynamic imaging are precisely synchronized in the time domain through the control module. This allows for high spatiotemporal resolution in-situ observation of both laser offset incident processing and the evolution of the molten pool and keyhole, under the stringent conditions of a fixed synchrotron radiation beam 4 path and an immovable workpiece 1. The method first fixes the workpiece 1 on the processing stage 100 of the synchrotron radiation imaging system, ensuring it is precisely positioned at the center of the horizontal penetration path of the synchrotron radiation beam 4. A laser beam 21 is emitted from the laser scanning assembly 2 and focused on the workpiece 1. A target offset incident angle θ is pre-set. In response to the set target offset incident angle θ, the multi-axis displacement mechanism 3 drives the laser scanning assembly 2 to perform coordinated displacement motion. Specifically, the first linear drive device 31 drives the laser scanning assembly 2 to move a first displacement Δx along a first direction parallel to the workpiece 1, and the second linear drive device 32 drives the laser scanning assembly 2 to move a second displacement Δz along a second direction perpendicular to the workpiece 1. The movement is determined based on the target offset incident angle θ and the focal length of the focusing lens. F is calculated using the Pythagorean theorem to obtain Δx=F*sinθ and Δz=F*(1-cosθ), thereby ensuring that the total optical path of the laser beam 21 from the laser scanning component 2 to the workpiece 1 is always completely consistent with the focal length F of the focusing lens. While the laser scanning component 2 is scanning and processing the workpiece 1, the synchrotron radiation imaging system is synchronously triggered by the control module to acquire images. The control module adopts an integrated control unit, PLC controller, industrial computer or other equivalent timing control device with TTL signal synchronous triggering mechanism. The laser scanning component 2, multi-axis displacement mechanism 3 and synchrotron radiation imaging system are connected through the TTL signal synchronous triggering mechanism, so that the laser processing process and synchrotron radiation dynamic imaging are precisely synchronized in the time domain.

[0070] This preferred embodiment, through the synchronous triggering structure of the control module, firstly ensures a strict temporal correspondence between laser bias incident processing and synchrotron radiation imaging without moving the workpiece 1; secondly, the control module uses a TTL signal as the synchronous triggering medium, avoiding delay errors caused by manual triggering or complex external clock systems; ultimately, it enables the synchrotron radiation imaging system to stably acquire two-dimensional vertical projection images of the molten pool and keyhole that completely correspond to the laser scanning process, solving the core problems of temporal asynchrony, difficulty in capturing dynamic processes, and low experimental accuracy in existing devices.

[0071] Furthermore, the scanning plane of the laser scanning component 2 is perpendicular to the propagation direction of the synchrotron radiation beam 4, enabling the synchrotron radiation beam 4 to perform vertical projection imaging of the processing area of ​​the workpiece 1.

[0072] Based on this embodiment, by arranging the scanning plane of the laser scanning component 2 perpendicular to the propagation direction of the synchrotron radiation beam 4, vertical projection imaging of the processing area of ​​the workpiece 1 can be achieved. Thus, under the stringent conditions that the path of the synchrotron radiation beam 4 is fixed and the position of the workpiece 1 cannot be moved, high-precision in-situ observation of the dynamic evolution process of laser bias incident processing, molten pool and keyhole can be completed. The method first fixes the workpiece 1 on the processing stage 100 of the synchrotron radiation imaging system, ensuring that the workpiece 1 is precisely positioned at the center of the horizontal penetration path of the synchrotron radiation beam 4. A laser beam 21 is emitted from the laser scanning assembly 2 and focused onto the workpiece 1. Specifically, the laser scanning assembly 2 employs a combination structure of a fiber laser and a laser galvanometer. A target offset incident angle θ is preset. In response to the setting of the target offset incident angle θ, the multi-axis displacement mechanism 3 drives the laser scanning assembly 2 to perform coordinated displacement motion. Specifically, the first linear drive device 31 drives the laser scanning assembly 2 to move a first displacement Δx along a first direction parallel to the workpiece 1, and the second linear drive device 32 drives the laser scanning assembly 2 to move a second displacement Δz along a second direction perpendicular to the workpiece 1. The movement is adjusted according to the target offset angle. The incident angle θ and the focal length F of the focusing lens are calculated using the Pythagorean theorem to obtain Δx=F*sinθ and Δz=F*(1-cosθ), thereby ensuring that the total optical path of the laser beam 21 from the laser scanning component 2 to the workpiece 1 is always completely consistent with the focal length F of the focusing lens. While the laser scanning component 2 is scanning the workpiece 1, the synchrotron radiation imaging system is synchronously triggered by the control module with a TTL signal to acquire images. The core of this claim is that the scanning plane of the laser scanning component 2 is perpendicular to the propagation direction of the synchrotron radiation beam 4, wherein the laser beam 21 penetrates the workpiece 1 in a horizontal direction, and the laser scanning plane is in a vertical plane perpendicular to the propagation direction, so that the synchrotron radiation beam 4 can perform standard vertical projection imaging on the processing area of ​​the workpiece 1.

[0073] This preferred embodiment, through the structure where the scanning plane is strictly perpendicular to the propagation direction of the synchrotron radiation beam 4, firstly ensures the geometric correspondence between the laser processing area and the imaging field of view without moving the workpiece 1; secondly, this vertical arrangement directly realizes the vertical projection of the laser beam 21 onto the processing area, avoiding image distortion and loss of depth information caused by oblique projection; ultimately enabling the synchrotron radiation imaging system to stably acquire high-resolution, distortion-free two-dimensional vertical projection images of the molten pool and keyhole.

[0074] Furthermore, the laser scanning component 2 includes a laser and a laser galvanometer system. The laser galvanometer system is used to deflect and focus the laser beam 21 emitted by the laser onto the workpiece 1, and to control the laser beam 21 to scan according to a preset trajectory.

[0075] Based on this embodiment, the laser beam 21 is deflected, focused and tracked with high precision through the specific configuration of the laser scanning component 2. Thus, under the harsh conditions that the path of the synchrotron radiation beam 4 is fixed and the position of the workpiece 1 cannot be moved, high-precision in-situ observation of the laser bias incident processing and the dynamic evolution of the molten pool and keyhole is completed. The method first fixes the workpiece 1 on the processing stage 100 of the synchrotron radiation imaging system, ensuring that the workpiece 1 is precisely located at the center of the horizontal penetration path of the synchrotron radiation beam 4; a laser beam 21 is emitted through the laser scanning assembly 2 and focused on the workpiece 1; a target offset incident angle θ is preset; in response to the setting of the target offset incident angle θ, the multi-axis displacement mechanism 3 drives the laser scanning assembly 2 to perform coordinated displacement motion, wherein the first linear drive device 31 drives the laser scanning assembly 2 to move a first displacement Δx along a first direction parallel to the workpiece 1, and the second linear drive device 32 drives the laser scanning assembly 2 to move a second displacement Δz along a second direction perpendicular to the workpiece 1. Based on the target offset incident angle θ and the focal length F of the focusing lens, Δx = F*sinθ and Δz = F*(1-cosθ) are calculated using the Pythagorean theorem, thereby ensuring the laser beam 2 is focused and focused. The total optical path of the laser beam 21 from the laser scanning component 2 to the workpiece 1 is always kept exactly consistent with the focal length F of the focusing lens. While the laser scanning component 2 is scanning and processing the workpiece 1, the synchrotron radiation imaging system is synchronously triggered by the control module with a TTL signal to acquire images. The core of this claim is that the laser scanning component 2 includes a laser and a laser galvanometer system. Specifically, the laser can be a fiber laser, semiconductor laser, or carbon dioxide laser, or other laser source that can provide stable output power. The laser galvanometer system can be a two-dimensional laser galvanometer scanning head combined with an f-theta flat focusing lens, a telecentric lens, or other equivalent programmable laser deflection and focusing optical components. The laser galvanometer system rapidly deflects and focuses the laser beam 21 emitted by the laser onto the workpiece 1, and controls the laser beam 21 to scan any path according to a preset trajectory.

[0076] This preferred embodiment, through the combination structure of the laser and laser galvanometer system described above, firstly achieves rapid deflection and arbitrary trajectory scanning control of the laser beam 21 without moving the workpiece 1, ensuring that laser processing can accurately reproduce the complex path of actual additive manufacturing; secondly, the laser galvanometer system, through its built-in focusing optical components and high-speed galvanometer deflection mechanism, avoids inertial errors and response delays caused by mechanically moving the laser head; finally, it enables the synchrotron radiation imaging system to stably acquire two-dimensional vertical projection images of the molten pool and keyhole that completely correspond to the laser scanning trajectory, solving the core problems of limited scanning path, difficulty in capturing dynamic processes, and unreliable experimental data in existing devices.

[0077] Furthermore, by coordinating the displacement of the laser scanning component 2 in the first and second directions, the laser beam 21 can be continuously adjusted within the range of 0° to 20° at the offset incident angle of the workpiece 1.

[0078] Based on this embodiment, under the stringent constraints of a fixed path for the synchrotron radiation beam 4 and an immovable position for the workpiece 1, the offset incident processing of the laser beam 21 and the dynamic evolution of the molten pool and keyhole are achieved through the coordinated control of the multi-axis displacement mechanism 3. The method first fixes the workpiece 1 on the processing stage 100 of the synchrotron radiation imaging system, ensuring that the workpiece 1 is precisely located at the center of the horizontal penetration path of the synchrotron radiation beam 4; a laser beam 21 is emitted through the laser scanning component 2 and focused on the workpiece 1; a target offset incident angle θ is preset; in response to the setting of the target offset incident angle θ, the multi-axis displacement mechanism 3 drives the laser scanning component 2 to perform coordinated displacement motion, wherein the first linear drive device 31 drives the laser scanning component 2 to move a first displacement Δx along a first direction parallel to the workpiece 1, and the second linear drive device 32 drives the laser scanning component 2 to move a second displacement Δz along a second direction perpendicular to the workpiece 1. Based on the target offset incident angle θ and the focal length F of the focusing lens, Δx = F*sinθ and Δz = F*(1-cosθ) are calculated using the Pythagorean theorem, thereby ensuring that the total optical path of the laser beam 21 from the laser scanning component 2 to the workpiece 1 is always maintained. The focal length F of the focusing lens is exactly the same; while the laser scanning component 2 is scanning and processing the workpiece 1, the control module synchronously triggers the synchrotron radiation imaging system to acquire images via a TTL signal; the core of this claim is that by coordinating the displacement of the laser scanning component 2 in the first direction and the second direction, the offset incident angle of the laser beam 21 on the workpiece 1 can be continuously adjusted within the range of 0° to 20°. The displacement in the first direction and the second direction is respectively completed by the first linear drive device 31 and the second linear drive device 32. Specifically, the first linear drive device 31 and the second linear drive device 32 can be precision ball screws combined with servo motors, linear motor guide slides, electric precision cylinders or other equivalent high-precision linear drive units that can provide a sufficient stroke range. The stroke design ensures that the offset incident angle can be continuously and smoothly adjusted from the 0° vertical incident state to the maximum 20° oblique incident state.

[0079] This preferred embodiment, through the aforementioned coordinated control structure of displacement in the first and second directions, firstly achieves continuous adjustment of the laser offset incident angle without moving the workpiece 1; secondly, the coordinated control process, based on precise calculations using the Pythagorean theorem, ensures constant optical path length and stable spot size at any angle within the range of 0° to 20°; ultimately, it enables the synchrotron radiation imaging system to stably acquire distortion-free, high-resolution two-dimensional vertical projection images of the molten pool and keyhole from different perspectives, from vertical incidence to maximum offset incidence. This solves the core problems of high difficulty in implementing offset incidence, single imaging perspective, and narrow experimental data coverage in existing devices, providing a high-precision, low-cost, and easily engineeringable technical path for in-depth revelation of the in-situ dynamic evolution law of laser additive manufacturing, and significantly improving the research efficiency of the defect formation mechanism of additive components in key fields such as aerospace.

[0080] In summary, the working process of this invention is as follows: First, the workpiece 1 is fixed on the processing stage 100, so that the workpiece 1 is located at the center of the laser beam 21 path; the laser scanning assembly 2 emits a laser beam 21 and focuses it onto the workpiece 1 through the laser galvanometer system; the operator or control system presets a target offset incident angle θ (this angle can be continuously adjusted within the range of 0° to 20°); the control module calculates the first displacement Δx = F*sinθ and the second displacement Δz = F*(1-cosθ) precisely using the Pythagorean theorem based on the target offset incident angle θ and the focal length F of the focusing lens in the laser scanning assembly 2; then the control module drives the first linear drive device 31 to move Δx along the first direction, and simultaneously drives the second linear drive device 32 along the first direction. The laser scanning component 2 is moved in two directions by Δz, causing the laser beam 21 to be incident on the workpiece 1 at the target offset incident angle after the overall displacement of the laser scanning component 2. The total optical path from the laser scanning component 2 to the workpiece 1 is always kept completely consistent with the focal length F of the focusing lens. While the laser scanning component 2 is scanning and processing the workpiece 1 according to the preset trajectory, the control module sends a trigger signal to the synchrotron radiation imaging system through the TTL signal synchronous triggering mechanism to achieve precise synchronization between the laser processing process and the synchrotron radiation dynamic imaging in the time domain. Since the scanning plane of the laser scanning component 2 is perpendicular to the propagation direction of the synchrotron radiation beam 4, the synchrotron radiation imaging system can perform standard vertical projection imaging of the processing area, thereby stably acquiring high-resolution, distortion-free two-dimensional projection images of the molten pool and keyhole.

[0081] A laser biased incident additive manufacturing apparatus for online co-firing with synchrotron radiation, used to implement the laser biased incident additive manufacturing method for online co-firing with synchrotron radiation as described in any of the above embodiments, comprising:

[0082] The processing table 100 is used to fix the workpiece 1 to be processed.

[0083] Laser scanning component 2 is used to emit a processing laser beam 21 and deflect and focus the laser beam 21 onto the surface of the workpiece 1 to be processed;

[0084] The multi-axis displacement mechanism 3 is driven and connected to the laser scanning assembly 2. The multi-axis displacement mechanism 3 includes:

[0085] The first linear drive device 31 is used to drive the laser scanning assembly 2 to move along a first direction parallel to the surface of the worktable 100.

[0086] The second linear drive device 32 is used to drive the laser scanning assembly 2 to move along the second direction; and

[0087] The control module, which is signal-connected to the first linear drive device 31 and the second linear drive device 32, is configured to coordinately control the movement of the first linear drive device 31 and the second linear drive device 32 according to the target offset incident angle, so that the laser optical path from the laser scanning component 2 to the surface of the workpiece 1 remains constant during the movement of the laser scanning component 2.

[0088] Based on this embodiment, under the stringent constraints of a fixed path for the synchrotron radiation beam 4 and an immovable position for the workpiece 1, high-precision in-situ observation of the dynamic evolution of laser biased incident additive manufacturing and the molten pool and keyhole is achieved, thereby providing a reliable technical means for the study of the defect formation mechanism in laser additive manufacturing. The device first includes a processing stage 100, used to fix the workpiece 1 and precisely position it at the center of the horizontal penetration path of the synchrotron radiation beam 4; then, a processing laser beam 21 is emitted through a laser scanning component 2 and deflected and focused onto the surface of the workpiece 1. Specifically, the laser scanning component 2 can be a combination of a fiber laser and a laser galvanometer system. The core part is a multi-axis displacement mechanism 3, which is driven and connected to the laser scanning component 2. The multi-axis displacement mechanism 3 includes a first linear drive device 31 and a second linear drive device 32. The first linear drive device 31 can be a horizontal X-axis electric linear displacement device, such as a precision ball screw combined with a servo motor, a linear motor guide slide, or other equivalent linear drive units capable of high-precision planar translation, used to drive the laser scanning component 2 to move along a first direction parallel to the surface of the processing stage 100. The second linear drive device 32 can be... A vertical Z-axis electric linear displacement device, such as a precision ball screw paired with a servo motor, electric precision cylinder, or other equivalent linear drive unit capable of achieving high-precision vertical lifting compensation, is used to drive the laser scanning component 2 to move along a second direction perpendicular to the surface of the workpiece 100. It also includes a control module, which is signal-connected to the first linear drive device 31 and the second linear drive device 32. Specifically, it can be an integrated control unit, PLC controller, industrial computer, or other equivalent timing control device with real-time calculation and synchronous output functions. It is configured to coordinately control the movement of the first linear drive device 31 and the second linear drive device 32 according to the target offset incident angle. The first displacement Δx = F*sinθ and the second displacement Δz = F*(1-cosθ) are calculated using the Pythagorean theorem, thereby keeping the laser path length from the laser scanning component 2 to the surface of the workpiece 1 constant throughout the entire movement process.

[0089] Compared to existing laser additive manufacturing in-situ devices, which suffer from limitations such as the rigid fixed position of the workpiece 1, preventing the achievement of large offset incidence, or the inability to accurately capture the evolution of the molten pool and keyhole due to fluctuations in the focused spot size caused by changes in optical path, this invention, through the integrated structure of the aforementioned workpiece stage 100, laser scanning component 2, multi-axis displacement mechanism 3, and control module, firstly precisely changes the relative spatial position of the laser output port and the workpiece 1 without moving the workpiece 1, ensuring that the laser scanning plane is always perpendicular to the path of the synchrotron radiation beam 4; secondly, this collaborative control process uses the target offset incidence angle as input and applies the Pythagorean theorem in real time. The first linear drive device 31 and the second linear drive device 32 are driven to perform displacement compensation, avoiding the errors and maintenance difficulties caused by manual adjustment or reliance on expensive three-dimensional dynamic focusing systems. Ultimately, this enables the synchrotron radiation imaging system to stably acquire high-resolution, distortion-free two-dimensional vertical projection images of the molten pool and keyhole. It solves the core problems of high difficulty in implementing offset incident, unstable spot size, and time-domain asynchrony in existing devices. It provides a high-precision, low-cost, and easily engineeringable technical path for in-depth revelation of the in-situ dynamic evolution law of laser additive manufacturing, and greatly improves the research efficiency of the defect formation mechanism of additive components in key fields such as aerospace.

[0090] In summary, this invention provides a laser biased incident additive manufacturing method and apparatus for online synchrotron radiation, aiming to resolve a contradiction in laser additive manufacturing research: the workpiece 1 must be fixed to receive non-destructive synchrotron radiation observation, while the laser often needs to be incident at an angle to study the effect of the angle on the process. Traditional methods of changing the angle by moving the workpiece 1 disrupt the observation geometry, while using complex optical focusing systems to maintain a stable laser spot under tilted incident radiation is costly. This invention employs a method of fixing the workpiece 1 and coordinating the movement of the laser head. Specifically, the workpiece 1 is first precisely fixed on the path of the synchrotron radiation horizontal beam. Then, a target laser offset incident angle is set. The control system calculates the horizontal and vertical displacements based on this angle and the fixed focal length F22 of the laser focusing lens using geometric relationships (usually the Pythagorean theorem). Next, a multi-axis displacement mechanism 3 (such as a cross slide composed of X-axis and Z-axis precision electric slides) is driven to move the entire laser scanning head in a coordinated manner: horizontal movement changes the laser irradiation point to achieve offset incident radiation, while vertical movement precisely compensates for the change in laser optical path caused by horizontal displacement, ensuring that the total distance from the laser output port to the surface of the workpiece 1 is always equal to the focal length, thereby maintaining the absolute stability of the focused spot size. Ultimately, this method allows researchers to freely adjust the laser incident angle for processing experiments while ensuring high-quality, distortion-free vertical projection images from synchrotron radiation. It provides a key technical means for in-depth research into the molten pool dynamics and defect formation mechanism in laser additive manufacturing in a low-cost and highly reliable manner.

[0091] The above description is only a preferred embodiment of the present invention. It should be noted that for those skilled in the art, several improvements and substitutions can be made without departing from the technical principles of the present invention, and these improvements and substitutions should also be considered within the scope of protection of the present invention.

Claims

1. A laser biased incident additive manufacturing method coupled with synchrotron radiation online, characterized in that, Includes the following steps: The workpiece to be processed is fixed in place and positioned in the path of the synchrotron radiation beam; A laser beam is emitted through a laser scanning component, which has a fixed focal length F and focuses the laser beam onto the workpiece to be processed. The target offset incident angle of the laser beam is preset; In response to the setting of the target offset incident angle, a multi-axis displacement mechanism is controlled to drive the laser scanning assembly to perform a coordinated displacement motion, so as to adjust the laser beam to be incident on the workpiece at the target offset incident angle, wherein the coordinated displacement motion includes: Drive the laser scanning component to move by a first displacement along a first direction to adjust the offset incident angle of the laser beam; Wherein, the first direction is parallel to the workpiece to be processed, and the second direction is perpendicular to the workpiece to be processed; and, Based on the geometric relationship between the target offset incident angle and the fixed focal length F, the laser scanning component is synchronously driven to move a second displacement along the second direction to compensate for the change in laser optical path caused by the movement in the first direction, so that the total optical path of the laser beam from the laser scanning component to the workpiece remains consistent with the fixed focal length F.

2. The laser biased incident additive manufacturing method for online synchrotron radiation as described in claim 1, characterized in that, In the step of driving the laser scanning component to move along a first direction parallel to the surface of the workpiece, the multi-axis displacement mechanism includes a first linear driving device and a second linear driving device. The first linear driving device calculates and drives the laser scanning component to move a first displacement based on the target offset incident angle, so as to adjust the offset incident angle of the laser beam.

3. The laser biased incident additive manufacturing method for online synchrotron radiation as described in claim 1, characterized in that, In the step of driving the laser scanning component to move along the second direction, the multi-axis displacement mechanism includes a first linear driving device and a second linear driving device. The second linear driving device calculates and drives the laser scanning component to move a second displacement based on the target offset incident angle, thereby realizing the adjustment of the laser beam offset incident angle.

4. The laser biased incident additive manufacturing method for online synchrotron radiation according to any one of claims 1-3, characterized in that, The step of coordinating displacement control based on the target offset incident angle includes: Based on the target offset incident angle θ and the fixed focal length F, calculate the first displacement Δx required by the first linear drive device and the second displacement Δz required by the second linear drive device. Where, Δx = F * sinθ, Δz = F * (1 - cosθ).

5. The laser biased incident additive manufacturing method for online synchrotron radiation according to claim 4, characterized in that, The fixed focal length F is the focal length of the focusing lens in the laser scanning assembly.

6. The laser biased incident additive manufacturing method for online synchrotron radiation according to claim 1, characterized in that, While the laser scanning component scans and processes the workpiece, a control module synchronously triggers the synchrotron radiation imaging system to acquire images, so that the laser processing process and the dynamic imaging of the synchrotron radiation beam are synchronized in the time domain.

7. The laser biased incident additive manufacturing method for online synchrotron radiation according to claim 6, characterized in that, The scanning plane of the laser scanning component is perpendicular to the propagation direction of the synchrotron radiation beam, enabling the synchrotron radiation beam to perform vertical projection imaging on the processing area of ​​the workpiece.

8. The laser biased incident additive manufacturing method for online synchrotron radiation according to claim 1, characterized in that, The laser scanning assembly includes a laser and a laser galvanometer system. The laser galvanometer system is used to deflect and focus the laser beam emitted by the laser onto the workpiece and control the laser beam to scan along a preset trajectory.

9. The laser biased incident additive manufacturing method for online synchrotron radiation according to claim 1, characterized in that, By coordinating the control of the displacement of the laser scanning component in the first direction and the second direction, the laser beam can be continuously adjusted within the range of 0° to 20° at the offset incident angle of the workpiece.

10. A laser biased incident additive manufacturing apparatus for online co-firing with synchrotron radiation, used to implement the laser biased incident additive manufacturing method for online co-firing with synchrotron radiation as described in any one of claims 1-9, characterized in that, include: A worktable is used to hold the workpiece to be processed. A laser scanning assembly is used to emit a processing laser beam and deflect and focus the laser beam onto the surface of the workpiece to be processed; A multi-axis displacement mechanism is driven and connected to the laser scanning assembly, the multi-axis displacement mechanism comprising: A first linear drive device is used to drive the laser scanning assembly to move along a first direction parallel to the surface of the worktable; A second linear drive device is used to drive the laser scanning assembly to move along a second direction; and The control module, which is signal-connected to the first linear drive device and the second linear drive device, is configured to coordinately control the movement of the first linear drive device and the second linear drive device according to the target offset incident angle θ, so that the laser optical path from the laser scanning component to the surface of the workpiece remains constant during the movement of the laser scanning component.

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