A gripper mechanism

Abstract

This invention provides a gripper mechanism that is compatible with both REEL reels and CST wafer cassettes, thereby achieving automatic and stable gripping and handling of different materials. It includes: a mounting plate; servo-electric grippers; a pair of gripper fixtures; a vision lens; and a telescopic expansion gripper, comprising a gripper assembly, a telescopic expansion shaft, and a telescopic servo drive mechanism. The vision lens is fixed to one side of the upper surface of the mounting plate, with its field of view facing forward. The telescopic servo drive mechanism is fixed to the other side of the upper surface of the mounting plate. A gripper mounting bracket is fixed to the center of one side of the front end of the mounting plate. A through-hole is provided in the center of the upright plate of the gripper mounting bracket. A protruding gripper assembly is fixed to the front end of the gripper mounting bracket. The center formed by the gripper assembly forms a guide cavity. The rear output end of the telescopic servo drive mechanism is connected to the rear end of the telescopic expansion shaft via a connecting bracket.

Description

Technical Field

[0001] This invention relates to the technical field of semiconductor automation equipment, specifically to a gripper mechanism. Background Technology

[0002] Currently, in semiconductor manufacturing processes, REEL reels and CST wafer cassettes are typically handled separately using different types of grippers, which presents the following problems: 1. Traditional robotic arms require frequent changes of grippers, resulting in long changeover times and impacting production efficiency; 2. Different fixtures require recalibration of both mechanical and software, increasing the complexity of equipment debugging; 3. Most existing grippers can only be used with a single material and cannot be compatible with both reel and wafer bin structures; 4. The reel is large in size and has uneven weight distribution. Traditional clamping methods are prone to causing displacement, material drop, or shaking. 5. Wafer cassettes require high clamping stability; if the clamping force is not controlled stably, it can easily lead to product damage. 6. The existing gripper lacks visual positioning and positioning detection functions, resulting in insufficient stability during automated operation.

[0003] Therefore, there is an urgent need for a gripper mechanism that can be compatible with both REEL reels and CST wafer cassettes, so that the gripper mechanism has high precision, high stability and automatic recognition capability. Summary of the Invention

[0004] To address the aforementioned problems, this invention provides a gripper mechanism that is compatible with both REEL reels and CST wafer cassettes, thereby enabling automatic and stable gripping and handling of different materials.

[0005] A gripper mechanism, characterized in that it comprises: Install a tablet; Servo-driven electric grippers; A pair of gripper clamps; Visual lens; And a telescopic expansion block gripper, which includes a gripper assembly, a telescopic expansion shaft, and a telescopic servo drive mechanism; The vision lens is fixedly mounted on one side of the upper surface of the mounting plate, with its field of view facing forward. A telescopic servo drive mechanism is fixedly mounted on the other side of the upper surface of the mounting plate. A gripper mounting bracket is fixedly mounted in the middle of one side of the front end of the mounting plate. A through clearance hole is provided in the center of the upright plate of the gripper mounting bracket. A protruding gripper assembly is fixedly mounted at the front end of the gripper mounting bracket. The center formed by the gripper assembly forms a guide cavity. The rear output end of the telescopic servo drive mechanism is connected to the rear end of the telescopic expansion shaft through a connecting bracket. The front end of the telescopic expansion shaft is inserted into the through clearance hole and partially located in the guide cavity. Adjacent grippers of the gripper assembly are connected by springs. A servo electric gripper is fixedly mounted on the lower surface of the mounting plate. Corresponding gripper fixtures are fixedly connected to the two gripper ends of the servo electric gripper, with the gripping end of the gripper fixture located below.

[0006] Its further features are: It also includes a robotic arm docking flange, the bottom of which is fixed to the upper rear surface of the mounting plate, which makes the assembly of the gripper mechanism and the robotic arm quick and convenient. It also includes a barcode scanner. The telescopic servo drive mechanism is fixed to the mounting plate by a mounting positioning frame. An L-shaped bracket is fixed to the outer side of the mounting positioning frame. The barcode scanner is fixed to the L-shaped bracket. The scanning area of ​​the barcode scanner faces forward and is arranged in the direction corresponding to the gripper assembly. Both ends of the gripping end of the two sets of grippers are respectively equipped with a gripping position detection sensor. The sensor is used to drive the servo electric gripper according to the sensor prompt. When the gripper is in position, the servo electric gripper pauses the gripping movement.

[0007] With this invention, the telescopic expansion gripper is used to clamp the center hole of the REEL reel, and radial tension is achieved through a telescopic servo drive mechanism to keep the reel stable during transportation; the servo electric gripper is used to clamp the CST wafer cassette, and stable gripping of the wafer cassette is achieved through clamping force control. Its vision lens is set at the front end of the entire gripper mechanism to identify the position of the reel, the position and orientation of the wafer cassette, and to assist the robotic arm in driving the entire gripper mechanism to move and complete automatic positioning; it can be compatible with both REEL reels and CST wafer cassettes, thereby achieving automatic compatible gripping and stable transportation of different materials. Attached Figure Description

[0008] Figure 1 This is a perspective view of a specific embodiment of the present invention; Figure 2 This is a perspective view of the present invention for clamping and positioning REEL reels; Figure 3This is a perspective view of the present invention used for clamping CST wafer cassettes; The names corresponding to the serial numbers in the diagram are as follows: Mounting plate 10, gripper mounting bracket 11, through clearance hole 111, connecting bracket 12, mounting positioning bracket 13, L-shaped bracket 14, servo electric gripper 20, gripper end 21, gripper fixture 30, clamping end 31, gripping position detection sensor 32, vision lens 40, telescopic expansion block gripper 50, gripper assembly 51, gripper 511, spring 512, telescopic expansion shaft 52, telescopic servo drive mechanism 53, robotic arm docking flange 60, barcode scanner 70; REEL reel 100, CST wafer bin 200. Detailed Implementation

[0009] A gripper mechanism, see Figure 1 It includes a mounting plate 10, a servo-electric gripper 20, a pair of gripper clamps 30, a vision lens 40, and a telescopic expansion gripper 50. The telescopic expansion block gripper 50 includes a gripper assembly 51, a telescopic expansion shaft 52, and a telescopic servo drive mechanism 53; A vision lens 40 is fixedly mounted on one side of the upper surface of the mounting plate 10, with its field of view facing forward. A telescopic servo drive mechanism 53 is fixedly mounted on the other side of the upper surface of the mounting plate 10. A gripper mounting bracket 11 is fixedly mounted in the middle of one side of the front end of the mounting plate 10. A through clearance hole 111 is provided in the center of the upright plate of the gripper mounting bracket 11. A forward-protruding gripper assembly 51 is fixedly mounted at the front end of the gripper mounting bracket 11. The center formed by the gripper assembly 51 forms a guide cavity. The telescopic servo drive mechanism... The rear output end of the structure 53 is connected to the rear end of the telescopic expansion shaft 52 through the connecting bracket 12. The front end of the telescopic expansion shaft 52 is inserted into the through clearance hole 111 and partially located in the guide cavity. Adjacent grippers 511 of the gripper assembly 51 are connected by springs 512. A servo electric gripper 20 is fixed on the lower surface of the mounting plate 10. The two gripper ends 21 of the servo electric gripper 20 are respectively fixed with corresponding gripper fixtures 30. The clamping ends 31 of the gripper fixtures 30 are located below, and the two sets of clamping ends 31 are arranged facing each other.

[0010] In practice, the gripper fixture 30 is adapted and assembled according to the upper protruding component of the corresponding CST wafer cassette, and the gripper assembly 51 is adapted and assembled according to the corresponding REEL reel. The adaptation and assembly is quick and efficient, making the entire gripper mechanism highly versatile.

[0011] In practice, it also includes a robotic arm docking flange 60 and a barcode scanner 70; the bottom of the robotic arm docking flange 60 is fixedly mounted on the upper rear surface of the mounting plate 10, which makes the assembly of the gripper mechanism and the robotic arm quick and convenient. The telescopic servo drive mechanism 53 is fixed to the mounting plate 10 by the mounting positioning frame 13. An L-shaped bracket 14 is fixed on the outer side of the mounting positioning frame 13. The barcode scanner 70 is fixed to the L-shaped bracket 14. The scanning area of ​​the barcode scanner 70 faces forward and is arranged in the direction corresponding to the gripper assembly 51. Two sets of gripper clamps 30 are equipped with gripping position detection sensors 32 at both ends of the gripping end 31 along the length direction. The sensors drive the servo electric gripper 20 according to the sensor prompts. When the gripper is in position, the servo electric gripper 20 pauses the gripping movement.

[0012] Its working principle is as follows Figure 2 and Figure 3 The telescopic expansion gripper 50 is used to clamp the center hole of the REEL reel 100. It achieves radial tension and fixation through the telescopic servo drive mechanism 53, so that the reel remains stable during transportation. The servo electric gripper 20 is used to clamp the CST wafer cassette 200. It achieves stable gripping of the wafer cassette through clamping force control. Its vision lens 40 is set at the front end of the entire gripper mechanism to identify the position of the reel, the position and orientation of the wafer cassette, and to assist the robotic arm in driving the entire gripper mechanism to move and complete automatic positioning. It can be compatible with both REEL reels and CST wafer cassettes, so as to realize automatic compatible gripping and stable transportation of different materials.

[0013] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the invention can be implemented in other specific forms without departing from its spirit or essential characteristics. Therefore, the embodiments should be considered in all respects as exemplary and non-limiting, and the scope of the invention is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of equivalents of the claims are intended to be included within the present invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0014] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A gripper mechanism, characterized in that, It includes: Install a tablet; Servo-driven electric grippers; A pair of gripper clamps; Visual lens; And a telescopic expansion block gripper, which includes a gripper assembly, a telescopic expansion shaft, and a telescopic servo drive mechanism; The vision lens is fixedly mounted on one side of the upper surface of the mounting plate, with its field of view facing forward. A telescopic servo drive mechanism is fixedly mounted on the other side of the upper surface of the mounting plate. A gripper mounting bracket is fixedly mounted in the middle of one side of the front end of the mounting plate. A through clearance hole is provided in the center of the upright plate of the gripper mounting bracket. A protruding gripper assembly is fixedly mounted at the front end of the gripper mounting bracket. The center formed by the gripper assembly forms a guide cavity. The rear output end of the telescopic servo drive mechanism is connected to the rear end of the telescopic expansion shaft through a connecting bracket. The front end of the telescopic expansion shaft is inserted into the through clearance hole and partially located in the guide cavity. Adjacent grippers of the gripper assembly are connected by springs. A servo electric gripper is fixedly mounted on the lower surface of the mounting plate. Corresponding gripper fixtures are fixedly connected to the two gripper ends of the servo electric gripper, with the gripping end of the gripper fixture located below.

2. The gripper mechanism according to claim 1, characterized in that: It also includes a robotic arm docking flange, the bottom of which is fixed to the upper rear end surface of the mounting plate.

3. A gripper mechanism according to claim 2, characterized in that: It also includes a barcode scanner. The telescopic servo drive mechanism is fixed to the mounting plate via a mounting positioning frame. An L-shaped bracket is fixed to the outer side of the mounting positioning frame. The barcode scanner is fixed to the L-shaped bracket. The scanning area of ​​the barcode scanner faces forward and is arranged in the direction corresponding to the gripper assembly.

4. A gripper mechanism according to claim 1, characterized in that: Both ends of the gripping ends of the two sets of grippers are respectively equipped with a gripping position detection sensor.

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