Suction Cup Device and Substrate Suction Method for Substrate Suction Plate

CN122561597APending Publication Date: 2026-08-14THINKTRANS SEMICON TECH LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2026-06-11
Publication Date
2026-08-14

AI Technical Summary

Technical Problem

吸嘴本身容易破损、老化,需要定期检查与更换;真空回路中的过滤器因堵塞会导致真空度不足,且过滤器脏污可能反向污染产品,需频繁清洁或更换;各连接接头在使用过程中可能出现松动或破裂,进一步增加了后期维护的工作量与成本

Benefits of technology

1、利用吹气形成负压,完成吸盘模组对基板的吸附,避免基板和吸盘膜组之间的直接接触。具有如下优点:

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Abstract

This invention discloses a suction cup device and method for substrate suction plates. A mounting frame is fixed to the end of a robotic arm, and a suction cup module is fixed to the mounting frame. The suction cup module includes a connecting bracket, one or more suction cup bodies, and a sensor assembly. The working surface of each suction cup body has a conical groove and an annular airflow nozzle, which ejects an annular airflow. The grooves of the conical grooves in all suction cup bodies within the suction cup module are located on the same working plane. An air supply unit is connected to the annular airflow nozzle. The sensor assembly includes a distance sensor and a pressure sensor. A control unit activates and controls the flow rate of the annular airflow nozzle based on the distance between the conical groove and the substrate and the pressure within the conical groove. Based on these measures, negative pressure is created by blowing air, achieving non-contact suction and avoiding direct contact between the substrate and the suction cup assembly. This method features high yield, high production efficiency, low investment cost, high stability, and strong applicability and compatibility.
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Description

Technical Field

[0001] This invention relates to the field of automated production line handling technology for electronic components, ultra-thin boards, or precision structural parts, specifically to a suction cup device and a substrate suction method for substrate suction plates. Background Technology

[0002] In automated production lines, especially in the handling, positioning, and assembly of electronic components, ultra-thin sheets, or precision structural parts, vacuum adsorption technology is widely used due to its advantages such as fast response, non-destructive operation, and strong adaptability. Typically, the adsorption device uses a nozzle to contact the product surface and create negative pressure, thereby gripping or fixing the product. However, in actual production applications, existing adsorption methods and nozzle configurations still have several prominent problems, restricting production stability and product yield.

[0003] First, vacuum adsorption places high demands on the surface quality and rigidity of the product. The product surface must have good flatness to form a reliable seal with the nozzle; if there are holes, grooves, or irregular textures on the product surface, air leakage and insufficient adsorption force are very likely to occur. At the same time, the product itself should have a certain degree of rigidity. If the product is a thin plate or a flexible material, local stress after adsorption can easily cause deformation, affecting the accuracy of subsequent processes.

[0004] Secondly, the management of nozzles in the equipment is quite complex. Different production lines use nozzles that vary significantly in material, size, and even arrangement, resulting in a large number of nozzle models and specifications that need to be managed on-site. In actual operation, the dense arrangement and diverse structures of the nozzles pose a high risk of misuse and mixing, hindering standardized operations and on-site material management.

[0005] In terms of operational stability, the existing solution also reveals significant shortcomings. For example, when there is strong static electricity between products, stacking can easily occur, with multiple products being lifted together during the adsorption process; when the product surface is dirty, or the nozzle is damaged or deformed, abnormalities such as plate falling off and adsorption failure can easily occur. All of the above problems can directly lead to production interruptions or product scrapping.

[0006] Furthermore, nozzle compatibility is poor between different machines. The materials, arrangement, and fixing methods of nozzles are often inconsistent in the design of different machines, making them incompatible for use on different machines. Even on the same machine, the nozzle arrangement often needs to be readjusted for different product models, resulting in low production changeover flexibility and increased complexity of equipment management.

[0007] It is worth noting that the nozzle, as an actuator that comes into direct contact with the product, can also introduce new appearance defects. After prolonged use, the nozzle is prone to aging or the adhesion of foreign matter to its surface. When it comes into contact with or slides relative to the product surface, it can easily cause scratches, indentations, or contamination. At the same time, the friction process can easily generate static electricity. For ultra-thin sheet metal parts, localized stress concentration can even lead to creases or damage, seriously affecting the product's appearance and structural integrity.

[0008] From the perspective of maintenance and usage costs, existing adsorption systems require frequent maintenance. The suction nozzles themselves are prone to damage and aging, requiring regular inspection and replacement; the filters in the vacuum circuit may become clogged, leading to insufficient vacuum, and dirty filters may back-contaminate the product, requiring frequent cleaning or replacement; various connection joints may loosen or break during use, further increasing the workload and cost of later maintenance.

[0009] Finally, during the changeover process, the adjustment time for the existing solution is relatively long. When the product shape, size, or surface characteristics change, operators need to readjust multiple conditions such as the arrangement of the suction cups, the installation height, and the vacuum parameters. The changeover process is cumbersome and significantly affects the overall efficiency of the equipment.

[0010] Therefore, it is evident that, while ensuring adsorption reliability, simplifying nozzle structure management, improving compatibility, reducing maintenance costs, and minimizing adverse effects on product surfaces are technical problems that urgently need to be solved by those skilled in the art. Summary of the Invention

[0011] To address the aforementioned deficiencies in existing technologies, a suction cup device and a substrate suction method are provided, which achieve non-contact suction and feature high yield, high production efficiency, low investment cost, high stability, and strong applicability and compatibility.

[0012] The technical solution adopted by the present invention to solve the above-mentioned technical problems is as follows: In a first aspect, a suction cup device for a substrate suction plate includes a robotic arm and a mounting frame disposed on the robotic arm; it also includes a suction cup module, an air supply unit and a control unit; the suction cup module is detachably fixed to the mounting frame, and the suction cup module includes a connecting bracket, one or more suction cup bodies fixed on the connecting bracket and a sensor assembly disposed within the suction cup body; The working surface of the suction cup body is provided with a conical groove, and an annular airflow nozzle is provided at the bottom of the conical groove. The annular airflow nozzle sprays out annular airflow, and the annular airflow has an annular center, which is perpendicular to the substrate surface. The groove openings of the conical grooves of all suction cup bodies in the suction cup module are located on the same working plane. The air supply unit is connected to the annular airflow nozzle. The sensor assembly includes a distance sensor and a pressure sensor. The distance sensor is located on the working surface side of the suction cup body and is used to detect the distance between the bottom of the conical groove and the substrate. The pressure sensor is located inside the conical groove and is used to monitor the pressure inside the conical groove. The control unit opens and controls the flow rate of the annular airflow nozzle based on the distance between the conical groove and the substrate and the pressure inside the conical groove.

[0013] According to the above technical solution, the conical groove is a conical groove body, and the annular airflow nozzle sprays airflow along the generatrix direction of the conical groove.

[0014] According to the above technical solution, the sensor assembly also includes a stacked plate sensor, which is located on the working surface side of the suction cup body and is used to detect whether the substrate being adsorbed is adhered to another substrate.

[0015] According to the above technical solution, the suction cup module has various specifications, and the number of suction cup bodies in the suction cup module of different specifications is different; based on the size of the substrate, the corresponding specification of suction cup module is installed.

[0016] According to the above technical solution, the angle between the direction of the airflow ejected from the annular airflow nozzle and the plane of the substrate being adsorbed is in the range of 20°~40°.

[0017] According to the above technical solution, the annular airflow nozzle includes an air inlet at the top, an annular cavity in the middle, and an annular air outlet at the bottom; the air inlet is connected to the air supply unit; the top of the annular cavity is connected to the air inlet, and the bottom of the annular cavity is connected to the annular air outlet; the annular air outlet is an annular gap, and the cross-section of the annular gap gradually increases.

[0018] According to the above technical solution, the air supply unit includes a pressure regulating valve, a flow regulating valve, and a proportional valve; the pressure regulating valve and the flow regulating valve are used to control the flow rate and pressure stability of the compressed air leading to the annular airflow nozzle; the proportional valve and the control unit adjust the opening degree of the proportional valve based on the distance sensor detecting the distance between the substrate and the suction cup unit.

[0019] Secondly, a substrate suction plate method is applied in a suction cup device for a substrate suction plate as described in any of the above descriptions; the method includes: Move the suction cup module above the substrate so that the distance between the working plane and the substrate surface to be suctioned is the distance setting value a; Based on the spacing setting value 'a', the annular airflow nozzles of all suction cup bodies are opened with a set flow rate to lift the substrate and complete the suction plate operation.

[0020] According to the above technical solution, the sensor assembly further includes a stacked plate sensor; the method further includes: After the suction cup module completes the substrate suction operation, the robotic arm moves the suction cup module to the external loading platform. The stacking sensor identifies whether the substrate is stacked. If it is not stacked, the substrate is placed on the loading platform. If the stacking is detected, the control mechanism is triggered to alarm and the mechanism stops operating.

[0021] According to the above technical solution, during the suction process, the pressure sensor monitors the air pressure in the conical groove in real time; The pressure sensor obtains real-time detection values ​​and compares them with the preset pressure range. The opening of the proportional valve is adjusted to maintain the stability of the substrate in the suction plate state.

[0022] The present invention has the following beneficial effects: 1. By using air to create negative pressure, the suction cup module adsorbs the substrate, avoiding direct contact between the substrate and the suction cup membrane assembly. This has the following advantages: First, the non-contact handling method is not affected by the flatness of the product surface, avoiding appearance defects such as contamination and scratches caused by direct contact; it avoids the creases and board damage defects caused by stress during the traditional vacuum adsorption loading and unloading process; the nozzles on the suction cup continuously spray air outward, which helps to remove floating foreign objects from the product surface, playing a certain cleaning role in the product surface, reducing the scrap rate of the product, and thus improving production efficiency.

[0023] Secondly, the same suction cup module can perform suction operations on products of different shapes and sizes, without being limited by grooves or holes on the product surface; when switching product production, if the substrate size changes within a certain range, no extra time is needed for adjustment; and they can be used interchangeably.

[0024] Third, this device only requires an initial one-time cost investment, and because it can perform suction plate operations on products of different sizes and specifications, it does not require the use of multiple sizes of suction nozzles, simplifying the product structure and reducing the cost of use and maintenance.

[0025] 2. Add a stacking sensor to the sensor assembly to handle stacking and dropping conditions, so as to achieve stable handling of products and avoid damage to products or equipment.

[0026] 3. The annular airflow nozzle is configured from top to bottom as an air inlet, an annular cavity, and an annular air outlet. Together with the conical cavity, it forms a stable annular airflow, ensuring the reliability of the suction cup body's adsorption of the substrate.

[0027] The above description is merely an overview of the technical solution of the present invention. In order to better understand the technical means of the present invention and to implement it according to the contents of the specification, the preferred embodiments of the present invention are described in detail below with reference to the accompanying drawings. Specific embodiments of the present invention are given in detail below with reference to the accompanying drawings. Attached Figure Description

[0028] The accompanying drawings, which are included to provide a further understanding of the invention and form part of this application, illustrate exemplary embodiments of the invention and are used to explain the invention, but do not constitute an undue limitation of the invention.

[0029] Figure 1 This is a schematic diagram of the suction cup body according to an embodiment of the present invention; Figure 2 This is a flowchart of an embodiment of the present invention; Figure 3 This is a flowchart illustrating another embodiment of the present invention; In the diagram, 1 is the suction cup body; 1-1 is the conical groove; 2 is the annular airflow nozzle; 2-1 is the air inlet; 2-2 is the annular cavity; 2-3 is the annular air outlet; 3 is the distance sensor; and 4 is the stacked plate sensor. Detailed Implementation

[0030] The following is in conjunction with the appendix Figure 1-3 The principles and features of the present invention are described below. The examples given are for illustrative purposes only and are not intended to limit the scope of the invention. The invention is described more specifically in the following paragraphs by way of example with reference to the accompanying drawings. The advantages and features of the invention will become clearer from the following description and claims. It should be noted that the drawings are in a very simplified form and use non-precise proportions, and are only used to facilitate and clarify the illustration of the embodiments of the invention.

[0031] It should be noted that when a component is described as "fixed to" another component, it can be directly on the other component or may have a component in between. When a component is considered "connected to" another component, it can be directly connected to the other component or may have a component in between. When a component is considered "set on" another component, it can be directly set on the other component or may have a component in between. The terms "vertical," "horizontal," "left," "right," and similar expressions used in this document are for illustrative purposes only.

[0032] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used herein in the description of the invention is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0033] Example 1 The suction cup device for substrate suction plate provided by the present invention includes a robotic arm and a mounting bracket disposed on the robotic arm.

[0034] It also includes a suction cup module, an air supply unit, and a control unit; the suction cup module is detachably fixed to the mounting bracket, and the suction cup module includes a connecting bracket, one or more suction cup bodies 1 fixed on the connecting bracket, and a sensor assembly disposed in the suction cup body; preferably, the suction cup body is a cylindrical structure.

[0035] The working surface of the suction cup body is provided with a conical groove 1-1, and an annular airflow nozzle 2 is provided at the bottom of the conical groove. The annular airflow nozzle sprays out annular airflow, and the annular airflow has an annular center, which is perpendicular to the substrate surface. The groove openings of the conical grooves of all suction cup bodies in the suction cup module are located on the same working plane. The air supply unit is connected to the annular airflow nozzle. The sensor assembly includes a distance sensor 3 and a pressure sensor. The distance sensor is located on the working surface side of the suction cup body and is used to detect the distance between the bottom of the conical groove and the substrate. The pressure sensor is located inside the conical groove and is used to monitor the pressure inside the conical groove. The control unit opens and controls the flow rate of the annular airflow nozzle based on the distance between the conical groove and the substrate and the pressure inside the conical groove.

[0036] During operation, two distance ranges are set between the substrate and the suction cup body: one is the air supply distance of the annular airflow nozzle of the air supply unit box, and the other is the suction plate distance when the substrate is picked up by the suction cup.

[0037] The gap between the suction cup module and the substrate is adjusted by a robotic arm to be within the range of the air supply distance; during this process, the distance sensor of the sensor assembly monitors in real time. Then, the air supply unit is turned on, and the air supply unit sprays annular airflow through an annular airflow nozzle into the conical groove. After the annular airflow touches the substrate surface, the airflow direction changes and blows outward along the gap between the substrate and the suction cup body, with the conical gap as the center, thereby creating a negative air pressure in the conical cavity. The negative air pressure picks up the substrate, and the gap between the substrate and the suction cup body is adjusted to the suction plate gap.

[0038] During the above process, only when the suction cup body moves within the air supply distance range can the annular airflow nozzle spray air to form a negative pressure in the conical cavity; within other distance ranges, the airflow cannot form a negative pressure to adsorb the substrate.

[0039] Based on the above measures, negative pressure is created by blowing air to achieve the adsorption of the substrate by the suction cup module, avoiding direct contact between the substrate and the suction cup film assembly. This has the following advantages: First, the non-contact handling method is not affected by the flatness of the product surface, avoiding appearance defects such as contamination and scratches caused by direct contact; it avoids the creases and board damage defects caused by stress during the traditional vacuum adsorption loading and unloading process; the nozzles on the suction cup continuously spray air outward, which helps to remove floating foreign objects from the product surface, playing a certain cleaning role in the product surface, reducing the scrap rate of the product, and thus improving production efficiency.

[0040] Secondly, the same suction cup module can perform suction operations on products of different shapes and sizes, without being limited by grooves or holes on the product surface; when switching product production, if the substrate size changes within a certain range, no extra time is needed for adjustment; and they can be used interchangeably.

[0041] Third, this device only requires an initial one-time cost investment, and because it can perform suction plate operations on products of different sizes and specifications, it does not require the use of multiple sizes of suction nozzles, simplifying the product structure and reducing the cost of use and maintenance.

[0042] In Embodiment 1, preferably, the conical groove is a conical groove body, and the annular airflow nozzle ejects airflow along the generatrix of the conical groove. As shown in the figure, the airflow adheres to the inner wall of the conical groove, and then changes direction to be blown out between the substrate and the suction cup body.

[0043] Example 2 Based on Embodiment 1, the sensor assembly further includes a stacked plate sensor 4, which is located on the working surface side of the suction cup body and is used to detect whether the substrate being adsorbed is adhered to another substrate.

[0044] In Examples 1 and 2, the suction cup modules are available in various specifications, with different numbers of suction cup bodies within each specification. Based on the size of the substrate, suction cup modules of corresponding specifications are installed. For example, for large boards (530*630mm) and small boards (74*240mm), generally 1-2 suction cup bodies are set for the 74*240mm size, and 4-6 suction cup bodies are set for the 530*630mm size.

[0045] In Examples 1 and 2, the angle between the direction of the airflow ejected from the annular airflow nozzle and the plane of the substrate being adsorbed ranges from 20° to 40°.

[0046] In embodiments 1 and 2, a preferred structural form of the annular airflow nozzle is provided. The annular airflow nozzle includes an air inlet 2-1 at the top, an annular cavity 2-2 in the middle, and an annular air outlet 2-3 at the bottom; the air inlet is connected to the air supply unit; the top of the annular cavity is connected to the air inlet, and the bottom of the annular cavity is connected to the annular air outlet; the annular air outlet is an annular gap, and the cross-section of the annular gap gradually increases.

[0047] like Figure 1 As shown, a preferred suction cup structure is presented; however, the dimensions of the suction cup body are not limited to the preferred dimensions and can be adjusted according to the workpiece to be picked up. The width dimension 'a' of the annular cavity is designed as follows: The suction cup diameter b and the actual air outlet diameter d can be adjusted appropriately according to the actual scenario. In this design, the suction cup diameter is controlled at 25±1mm, the air outlet diameter is controlled at 15±1mm, the air outlet angle θ is designed at 30±10°, and the air outlet depth c is controlled at 5±1mm.

[0048] In embodiments 1 and 2, the air supply unit has an existing structure, mainly composed of multiple valves; for example, the air supply unit includes a pressure regulating valve, a flow regulating valve, and a proportional valve; the pressure regulating valve and the flow regulating valve are used to control the flow rate and pressure of compressed air leading to the annular airflow nozzle to ensure smooth operation of the board. The proportional valve and control unit adjust the opening of the proportional valve based on the distance sensor detecting the distance between the substrate and the suction cup unit. A filter cotton core can also be added inside the air pipe to filter the compressed air and prevent the blown gas from contaminating the board.

[0049] Example 3 Reference Figure 2 As shown, the present invention also provides a substrate suction plate method, applied in a suction cup device for a substrate suction plate as described in any of the above descriptions; the method includes: S1: Turn on the device and move the suction cup module above the substrate so that the distance between the working plane and the substrate surface to be suctioned is the distance setting value a; during this process, the distance sensor starts to work and monitors the distance between the product surface and the suction cup in real time.

[0050] S2: Based on the spacing setting value 'a', the annular airflow nozzles of all suction cup bodies are activated at the set flow rate to lift the substrate and complete the suction operation. The airflow ejected from the annular airflow nozzles flows along the inner wall of the conical cavity, then forms an air cushion between the working surface side of the suction cup body and the substrate, and forms a negative pressure perpendicular to the substrate upwards within the conical cavity, thus completing the suction operation of the substrate.

[0051] Example 4 Reference Figure 3 As shown, based on Embodiment 3, the sensor assembly further includes a stacked plate sensor; the method further includes step S3; S3: After the suction cup module completes the substrate suction operation, the robotic arm moves the suction cup module to the external loading platform; the stacking sensor identifies whether the substrate is stacked. If the substrate is not stacked, the substrate is placed on the table of the loading platform. If the stacking is detected, the control mechanism alarm is triggered and the mechanism stops operating.

[0052] In embodiments 3 and 4, during the suction process, a pressure sensor monitors the air pressure within the conical groove in real time and feeds it back to the control mechanism. The real-time detection value of the pressure sensor is obtained and compared with a preset pressure range. The opening of the proportional valve is adjusted to maintain the stability of the substrate in the suction state.

[0053] When performing air pressure testing, if the actual value is greater than the target value, it indicates that the suction is too strong. Reduce the airflow parameters according to the set parameters. If the actual value is less than the target value, it indicates that the suction is too weak. Increase the airflow parameters according to the set parameters.

[0054] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention in any way. Those skilled in the art can readily implement the present invention based on the accompanying drawings and the above description. However, any modifications, alterations, or variations made by those skilled in the art without departing from the scope of the present invention, utilizing the disclosed technical content, are equivalent embodiments of the present invention. Furthermore, any modifications, alterations, or variations made to the above embodiments based on the essential technology of the present invention are still within the protection scope of the present invention.

Claims

1. A suction cup device for a substrate suction plate, comprising a robotic arm and a mounting bracket disposed on the robotic arm; characterized in that: It also includes a suction cup module, an air supply unit, and a control unit; the suction cup module is detachably fixed to the mounting bracket, and the suction cup module includes a connecting bracket, one or more suction cup bodies fixed on the connecting bracket, and a sensor assembly disposed within the suction cup body. The working surface of the suction cup body is provided with a conical groove, and an annular airflow nozzle is provided at the bottom of the conical groove. The annular airflow nozzle sprays out annular airflow, and the annular airflow has an annular center, which is perpendicular to the substrate surface. The groove openings of the conical grooves of all suction cup bodies in the suction cup module are located on the same working plane. The air supply unit is connected to the annular airflow nozzle. The sensor assembly includes a distance sensor and a pressure sensor. The distance sensor is located on the working surface side of the suction cup body and is used to detect the distance between the bottom of the conical groove and the substrate. The pressure sensor is located inside the conical groove to monitor the pressure inside the conical groove; The control unit opens and controls the flow rate of the annular airflow nozzle based on the distance between the conical groove and the substrate and the pressure inside the conical groove.

2. The suction cup device for a substrate suction plate according to claim 1, characterized in that: The conical groove is a conical groove body, and the annular airflow nozzle sprays airflow along the generatrix of the conical groove.

3. The suction cup device for a substrate suction plate according to claim 1, characterized in that: The sensor assembly also includes a stack sensor, which is located on the working surface side of the suction cup body and is used to detect whether the substrate being adsorbed is adhered to another substrate.

4. The suction cup device for a substrate suction plate according to claim 1, characterized in that: The suction cup modules come in various specifications, with different specifications having a different number of suction cup bodies; based on the size of the substrate, the corresponding specification of suction cup module is installed.

5. The suction cup device for a substrate suction plate according to claim 1, characterized in that: The angle between the direction of the airflow ejected from the annular airflow nozzle and the plane of the substrate being adsorbed ranges from 20° to 40°.

6. The suction cup device for a substrate suction plate according to claim 1, characterized in that: The annular airflow nozzle includes an air inlet at the top, an annular cavity in the middle, and an annular air outlet at the bottom; the air inlet is connected to the air supply unit; the top of the annular cavity is connected to the air inlet, and the bottom of the annular cavity is connected to the annular air outlet; the annular air outlet is an annular gap, and the cross-section of the annular gap gradually increases.

7. The suction cup device for a substrate suction plate according to claim 1, characterized in that: The air supply unit includes a pressure regulating valve, a flow regulating valve, and a proportional valve; the pressure regulating valve and the flow regulating valve are used to control the flow rate and pressure stability of the compressed air leading to the annular airflow nozzle; the proportional valve and the control unit adjust the opening of the proportional valve based on the distance sensor detecting the distance between the substrate and the suction cup unit.

8. A substrate suction plate method, characterized in that: The method is applied in a suction cup device for a substrate suction plate as described in any one of claims 1-7; the method includes: Move the suction cup module above the substrate so that the distance between the working plane and the substrate surface to be suctioned is the distance setting value a; Based on the spacing setting value 'a', the annular airflow nozzles of all suction cup bodies are opened with a set flow rate to lift the substrate and complete the suction plate operation.

9. The substrate suction plate method according to claim 8, characterized in that: The sensor assembly further includes a stacked plate sensor; the method further includes: After the suction cup module completes the substrate suction operation, the robotic arm moves the suction cup module to the external loading platform. The stacking sensor identifies whether the substrate is stacked. If it is not stacked, the substrate is placed on the loading platform. If the stacking is detected, the control mechanism is triggered to alarm and the mechanism stops operating.

10. The substrate suction plate method according to claim 8, characterized in that: During the suction process, the pressure sensor monitors the air pressure inside the conical groove in real time; The pressure sensor obtains real-time detection values ​​and compares them with the preset pressure range. The opening of the proportional valve is adjusted to maintain the stability of the substrate in the suction plate state.