Plasma discharge chamber loading and unloading tool cart

Abstract

This invention relates to the field of semiconductor manufacturing technology, and provides a plasma discharge cavity loading and unloading tool cart, including a lifting cart, at least two track assemblies, and a flipping connection mechanism. The lifting cart has a lifting platform; the at least two track assemblies are spaced apart on the lifting platform, and each track assembly has at least one track surface; the flipping connection mechanism includes a connector and a flipping component, the connector being located at one end of the track assembly; the flipping component is rotatably connected to the connector, and has a first working position and a second working position. In the first working position, the flipping component is retracted to one end of the track assembly; in the second working position, the flipping component is extended outward for docking with the machine tool track. This invention not only provides lifting and movement functions, solving the alignment and rigid connection problems between the tool cart and the machine tool, but also ensures that the discharge cavity is not subjected to any external forces.

Description

Technical Field

[0001] This invention relates to the field of semiconductor manufacturing technology, and in particular to a plasma discharge cavity loading and unloading tool cart. Background Technology

[0002] Photolithography machines are the most core and critical equipment in integrated circuit manufacturing processes. Their performance directly determines the process node of integrated circuits and profoundly affects the development level of the entire industry. The basic principle of photolithography technology is to use an optical projection system to accurately image and transfer the pre-designed integrated circuit device structure pattern on a photomask onto the surface of a silicon wafer coated with photoresist. In the rapid development of very large-scale integrated circuits following Moore's Law, the continuous advancement of photolithography technology has played a vital supporting role.

[0003] In photolithography, to print nanoscale intricate circuits on silicon wafers, a special light source with extremely high energy, excellent directionality, and monochromaticity—the excimer laser—is required. The core equipment for generating this laser is the excimer laser. One of the core subsystems within this laser is the discharge chamber. The discharge chamber contains precision components such as electrodes, pre-ionization devices, and fans. Its operating environment is extremely harsh, requiring stable operation under multiple extreme conditions, including high-voltage, high-frequency discharge, strong ultraviolet radiation, corrosive gases containing fluorine or chlorine, and high-energy ion bombardment.

[0004] This extreme working environment inevitably leads to internal electrode contamination, component wear, and minor structural changes in the discharge cavity during long-term operation. These problems directly manifest as a decrease in laser output power, deterioration in beam quality, and reduced pulse energy stability. In severe cases, they may even cause major safety failures such as discharge breakdown or cavity explosion. More importantly, a vicious cycle can form between contaminant accumulation and component wear (for example, contaminants exacerbate energy loss, wear leads to abnormal discharge, and thus generates more contaminants). Therefore, the discharge cavity must be periodically removed from the lithography machine for deep cleaning, maintenance, or component replacement.

[0005] However, as ultra-precision manufacturing equipment, lithography machines have extremely high integration and precise coupling in their light source systems. The discharge cavity, a core subsystem, can weigh up to 200 kg and is subject to multi-dimensional, precise connections and constraints with the entire machine, including mechanical, vacuum, gas, optical, and electrical connections. Furthermore, the lithography machine's internal environment demands ultra-cleanliness and stress-free operation, further complicating the disassembly and assembly of the discharge cavity. Currently, there is a lack of dedicated disassembly and assembly aids for such heavy, high-value, and complex precision components. Summary of the Invention

[0006] This invention provides a plasma discharge cavity loading and unloading tool cart to solve the above-mentioned technical defects in the prior art. It not only provides basic lifting and moving functions, but also solves the alignment and rigid connection problems between the tool cart and the machine, and can ensure that the discharge cavity is not subjected to any external force.

[0007] This invention provides a plasma discharge cavity loading and unloading tool cart, comprising: A lifting truck, which has a lifting platform; At least two track assemblies are spaced apart on the lifting platform, and each track assembly has at least one track surface on its surface. The flip connection mechanism includes: A connector is located at one end of the track assembly; A flipper is rotatably connected to the connector. The flipper has a first working position and a second working position. In the first working position, the flipper is retracted to one end of the track assembly. In the second working position, the flipper is extended outward for docking with the machine track.

[0008] According to the plasma discharge cavity loading and unloading tool cart provided by the present invention, the flipping connection mechanism further includes: A rotating support shaft passes through the connector and the flipping member, so that the connector and the flipping member are rotatably connected. An elastic element is sleeved on the rotating support shaft. One end of the elastic element abuts against the flipping element, and the other end of the elastic element abuts against the shaft end retaining ring at the end of the rotating support shaft. The elastic element is used to hold the flipping element in the first working position.

[0009] According to the plasma discharge cavity loading and unloading tool cart provided by the present invention, one of the flipping component and the connecting component is provided with a limiting protrusion, and the other of the flipping component and the connecting component is provided with a limiting groove, wherein the limiting groove cooperates with the limiting protrusion to limit the movement. When the flipping member is in the first working position, the elastic member is used to apply force to keep the limiting protrusion in the limiting groove.

[0010] According to the plasma discharge cavity loading and unloading tool cart provided by the present invention, the flipping connection mechanism further includes a first docking member and a second docking member respectively adapted to at least two different machine tool tracks, and the first docking member and the second docking member are replaceably mounted on the flipping member.

[0011] According to the plasma discharge cavity loading and unloading tool cart provided by the present invention, the surface of the connecting member is adapted to the shape of the track surface; the surface of the flipping member is adapted to the shape of the track surface.

[0012] According to the plasma discharge cavity loading and unloading tool vehicle provided by the present invention, each of the track assemblies includes: The track base is fixedly mounted on the lifting platform; At least one track body is fixedly mounted on the track base, and two adjacent track bodies are stacked together. The connector is located at one end of the track base.

[0013] According to the plasma discharge cavity loading and unloading tool vehicle provided by the present invention, the width of the track body gradually decreases from bottom to top; The lower track body is used to support the rollers of the first type of discharge cavity; the upper track body is used to support the rollers of the second type of discharge cavity, and the upper track body is also used to limit the rollers of the first type of discharge cavity.

[0014] The plasma discharge cavity loading and unloading tool cart provided by the present invention further includes: A limiting member is provided at the other end of each of the track assemblies, the limiting member being used to limit the discharge cavity after the discharge cavity moves onto the track assembly.

[0015] According to the plasma discharge cavity loading and unloading tool vehicle provided by the present invention, the track assembly is provided with a plurality of mounting positions for mounting the limiting member, so that the front and rear positions of the limiting member are adjustable, thereby adapting to discharge cavities of different sizes.

[0016] According to the plasma discharge chamber loading and unloading tool cart provided by the present invention, the lifting cart is a manual hydraulic lifting cart, and the bottom of the lifting cart is provided with four casters that can be turned.

[0017] The plasma discharge chamber loading and unloading tool cart provided by this invention features at least two track assemblies spaced apart on a lifting cart, with a flipping connecting mechanism attached to one end of each track assembly. The flipping mechanism is rotatably connected to the connecting mechanism and has a first working position and a second working position. In the first working position, the flipping mechanism is retracted to one end of the track base; in the second working position, the flipping mechanism extends outward to dock with the machine platform track. This not only provides basic lifting and movement functions but also solves the alignment and rigid connection problems between the tool cart and the machine platform, ensuring that the discharge chamber is not subjected to any external forces.

[0018] The continuous track formed by the flipper transforms the transfer process of the discharge cavity into a smooth rolling motion, avoiding the stress that may occur with traditional hoisting or prying methods and protecting the precision coupling interface between the discharge cavity and the machine tool. Combining the lifting function of the trolley with the unfolding and positioning of the flipper enables precise alignment between the tool cart and the machine tool track, meeting the high-precision coupling requirements of the lithography machine's light source system. Furthermore, the flipper's design simplifies the docking process, allowing for operation by a single person. Simultaneously, the retractable function improves the tool cart's maneuverability and safety when not in operation. Attached Figure Description

[0019] To more clearly illustrate the technical solutions in this invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0020] Figure 1 This is an exploded view of the structure of the plasma discharge cavity loading and unloading tool vehicle provided in an embodiment of the present invention.

[0021] Figure 2 This is a schematic diagram of the structure of the plasma discharge cavity loading and unloading tool vehicle provided in an embodiment of the present invention.

[0022] Figure 3 yes Figure 2 Enlarged view of part A in the middle.

[0023] Figure 4 yes Figure 2 Enlarged view of section B in the middle.

[0024] Figure 5 This is a docking schematic diagram of an embodiment of the plasma discharge cavity loading and unloading tool vehicle provided in this invention.

[0025] Figure 6 This is one of the usage diagrams of a plasma discharge cavity loading and unloading tool vehicle provided in this embodiment of the invention.

[0026] Figure 7 This is the second schematic diagram of the usage state of an embodiment of the plasma discharge cavity loading and unloading tool vehicle provided in this invention.

[0027] Figure 8 This is the third schematic diagram of the usage state of an embodiment of the plasma discharge cavity loading and unloading tool vehicle provided in this invention.

[0028] Figure 9 This is a docking schematic diagram of another embodiment of the plasma discharge cavity loading and unloading tool vehicle provided in this invention.

[0029] Figure 10 This is one of the usage diagrams of another embodiment of the plasma discharge chamber loading and unloading tool vehicle provided in this invention.

[0030] Figure 11 This is a second schematic diagram of the usage state of another embodiment of the plasma discharge chamber loading and unloading tool vehicle provided in this invention.

[0031] Figure 12 This is the third schematic diagram of the usage state of another embodiment of the plasma discharge chamber loading and unloading tool vehicle provided in this invention.

[0032] Figure label: 10. Lifting truck; 11. Lifting platform; 12. Casters; 20. Track assembly; 21. Track base; 211. Mounting position; 22. Track body; 23. Track surface; 30. Flip-over connection mechanism; 31. Connector; 311. Limiting groove; 32. Flip-over component; 321. Limiting protrusion; 33. Rotary support shaft; 34. Elastic component; 35. First mating component; 36. Second mating component; 40. Limiting component; 50. Machine track; 60. Plasma discharge chamber. Detailed Implementation

[0033] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this invention. All other embodiments obtained by those skilled in the art based on the embodiments of this invention without creative effort are within the scope of protection of this invention.

[0034] In the description of the embodiments of this application, it should be noted that, unless otherwise explicitly specified and limited, the terms "connected" and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in the embodiments of this application based on the specific circumstances.

[0035] In the embodiments of this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0036] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of the embodiments of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0037] See Figures 1 to 4 This invention provides a plasma discharge cavity loading and unloading tool cart, which includes a lifting vehicle 10, at least two track assemblies 20 and a flipping connection mechanism 30.

[0038] The lifting carriage 10 is the basic platform of the entire tool carriage. It features a vertically movable lifting platform 11 and a traveling mechanism (such as casters) at the bottom of the platform. The lifting platform 11 carries all subsequent components, such as the track assembly 20, the flipping connection mechanism 30, and the plasma discharge chamber 60, which is eventually disassembled. The lifting function precisely adjusts the height of the tool carriage, ensuring that the lifting carriage 10 is strictly aligned vertically with the lithography machine's track 50.

[0039] The track assembly 20 is used to receive the plasma discharge cavity 60 sliding out from the machine tool track 50 and to guide and position the plasma discharge cavity 60 on the tool cart. At least two track assemblies 20 are defined to correspond to at least two rows of rollers typically provided at the bottom of the discharge cavity, forming a stable double-sided support. In actual operation, two symmetrical assemblies are usually used. At least the track assemblies 20 are spaced apart on the lifting platform 11, meaning that the two track assemblies 20 are parallel to each other, and the distance between the two track assemblies 20 matches the wheel spacing of the rollers on both sides of the discharge cavity to be disassembled.

[0040] Each track assembly 20 has a track surface 23 on its surface, which is the actual path that the discharge chamber rollers travel. It should be noted that the track assembly 20 may have multiple parallel track surfaces 23 to accommodate different types of discharge chambers.

[0041] The flipping connection mechanism 30 includes a connector 31 and a flipping member 32. The connector 31 is located at one end of the track assembly 20, which refers to the side of the track assembly 20 closest to the machine tool. The connector 31 itself is a base fixed to the end of the track assembly 20. The flipping member 32 is rotatably connected to the connector 31, meaning that the flipping member 32 can rotate relative to the connector 31 via a shaft, hinge, or other means. Therefore, the flipping member 32 has a first working position and a second working position. In the first working position, the flipping member 32 is retracted to one end of the track assembly 20; in the second working position, the flipping member 32 is extended outward for docking with the machine tool track 50.

[0042] When the tool carriage is not in operation or is moving, the tilting component 32 rotates to fit or approach the side of the track assembly 20, and is in a retracted state. This makes the overall structure of the tool carriage compact, facilitates movement around the narrow lithography machine platform, and avoids collisions with other precision components during movement.

[0043] When it is necessary to disassemble the discharge chamber, the operator rotates the flipper 32 outward to unfold it. At this time, the flipper 32 spans the gap between the tool cart and the machine, and the end of the flipper 32 (or through the additional docking part on it) rests on the machine track 50 for docking with the machine track 50.

[0044] Based on the above structural description, the working process of the plasma discharge cavity loading and unloading tool cart provided in this embodiment of the invention is as follows: First, push the tool cart to the side of the lithography machine and ensure that the flip part 32 is in the first working position (folded position) to avoid collision with the machine during the movement.

[0045] Operate the lifting vehicle 10 and adjust the height of the lifting platform 11 so that the track surface 23 of the track assembly 20 is basically flush with the machine track 50 inside the machine. Then, manually operate the tilting component 32 to rotate it from the retracted state to the second working position (expanded position). At this time, the tilting component 32 extends outward, and the docking part at the front end of the tilting component 32 precisely fits or connects with the machine track 50.

[0046] Release the discharge chamber from the machine platform, then push the discharge chamber so that the rollers at the bottom of the discharge chamber roll smoothly from the machine platform track 50, through the tilting component 32, onto the tool cart's track assembly 20. Thanks to the support and guidance of at least two track assemblies 20, the discharge chamber remains stable during the transfer process and will not tilt or derail.

[0047] After securing the discharge chamber on the tool cart, operate the tilting mechanism 32 again to rotate it from the second working position back to the first working position (retracted position). Finally, readjust the height of the lifting cart 10 and safely move the tool cart (along with the discharge chamber on it) out.

[0048] After unfolding, the surface of the flipper 32, together with the track surface 23 of the track assembly 20 and the surface of the machine track 50, forms a continuous and smooth rolling path, ensuring that the rollers of the discharge cavity can pass through without obstruction and avoiding jamming or impact that may be caused by steps or gaps. The retracted state setting fully considers the characteristics of the precious space around the lithography machine and the extremely high environmental requirements. When not in operation, retracting the flipper 32 avoids long-term occupation of the operating space and also reduces the risk of accidentally touching other precision pipelines.

[0049] It is understood that the plasma discharge chamber loading and unloading tool cart provided in this embodiment of the invention, by arranging at least two track assemblies 20 at intervals on the lifting cart 10, and providing a connecting member 31 of a flipping connecting mechanism 30 at one end of the track assembly 20, with a flipping member 32 rotatably connected to the connecting member 31, has a first working position and a second working position. In the first working position, the flipping member 32 is retracted to one end of the track base 21; in the second working position, the flipping member 32 is extended outward for docking with the machine tool track 50. This not only provides basic lifting and moving functions, but also solves the alignment and rigid connection problems between the tool cart and the machine tool.

[0050] The continuous track formed by the flipper 32 transforms the transfer process of the discharge cavity into a smooth rolling motion, avoiding the stress that may occur with traditional hoisting or prying methods and protecting the precision coupling interface between the discharge cavity and the machine tool. Combining the lifting function of the lifting cart 10 with the unfolding and positioning of the flipper 32, precise alignment between the tool cart and the machine tool track 50 can be achieved, meeting the high-precision coupling requirements of the lithography machine's light source system. Furthermore, the design of the flipper 32 simplifies the docking process, allowing for operation by a single person. Simultaneously, the retractable function improves the tool cart's maneuverability and safety when not in operation.

[0051] Continue reading Figures 1 to 4 In some embodiments of the present invention, the flipping connection mechanism 30 further includes a rotary support shaft 33 and an elastic element 34. The rotary support shaft 33 is a precision shaft that passes through pre-set through holes on the connector 31 and the flipping element 32. The rotary support shaft 33 cooperates with both the connector 31 and the flipping element 32, thereby mounting the flipping element 32 on the connector 31 and providing a fulcrum (i.e., hinge axis) for the rotational movement of the flipping element 32. The flipping element 32 can rotate 90 degrees (or other preset angles) around the axis of this shaft.

[0052] The elastic element 34 is typically a helical spring with an inner diameter slightly larger than the diameter of the rotating support shaft 33. The elastic element 34 is fitted onto the rotating support shaft 33 and can be compressed or extended along the axial direction of the shaft. One end of the elastic element 34 abuts against the flipping element 32, and the other end abuts against the shaft end retaining ring at the end of the rotating support shaft 33. The elastic element 34 is used to hold the flipping element 32 in a first working position.

[0053] The shaft end retaining ring is a fastener installed at the end of the rotating support shaft 33, such as a nut, snap ring, or welded retaining ring. The shaft end retaining ring abuts against the other end of the elastic element 34. The function of the shaft end retaining ring is to provide an axial support point for the elastic element 34, prevent the elastic element 34 from slipping off the shaft, and withstand the pressure applied by the elastic element 34.

[0054] It is understood that this embodiment utilizes the axial compression of the elastic element to generate continuous axial pressure, thereby locking the position of the flipping member 32. When the elastic element 34 (spring) is mounted on the rotating support shaft 33 and is in a compressed state, it generates a force that pushes it apart at both ends. This force acts on the flipping member 32 at one end and on the shaft end retaining ring at the other end.

[0055] Since the retaining ring at the shaft end is fixed to the shaft, the axial force F generated by the spring will press the side of the flipper 32 tightly against the side of the connecting member 31 or against the mating surface between the flipper 32 and the connecting member 31 through the flipper 32. This pressing force generates friction. It is this friction generated by the spring compression that prevents the flipper 32 from rotating freely unless it is subjected to a sufficiently large external force to overcome this friction. This achieves the function of keeping the flipper 32 in the first working position, preventing the flipper 32 from accidentally unfolding (wobbling) due to gravity or slight vibration during the movement of the tool cart, thereby avoiding the risk of collision.

[0056] In actual operation, when the operator needs to unfold the flipping component 32, a force needs to be applied axially (in the direction of the compressed spring) to temporarily reduce the clamping force, allowing the flipping component 32 to overcome friction and rotate. After being released, the axial force of the spring comes into effect again, pressing the flipping component 32 into the new position.

[0057] Essentially, this embodiment achieves stable maintenance of the working position (especially the retracted state) of the flipping component 32 through a simple mechanical structure (spring and shaft), preventing accidental flipping during the movement of the tool cart. It also serves as a limiter on the rear side of the discharge chamber, preventing the discharge chamber from sliding on the tool cart and derailing, thus avoiding unnecessary losses.

[0058] Continue reading Figure 3 and Figure 4In some embodiments of the present invention, one of the flipping member 32 and the connecting member 31 is provided with a limiting protrusion 321, and the other of the flipping member 32 and the connecting member 31 is provided with a limiting groove 311. The limiting groove 311 cooperates with the limiting protrusion 321 to limit the movement.

[0059] Essentially, this embodiment adds a mechanical limiting structure to the above embodiment, upgrading simple friction retention to surface locking. Specifically, a limiting protrusion (such as a pin or bump) is machined on one component of the flipper 32 or the connector 31, and a recessed structure (such as a hole or limiting groove 311) matching the shape of the protrusion is machined on the other component of the connector 31 or the flipper 32. When the flipper 32 is in the first working position, the elastic member 34 applies force to keep the limiting protrusion 321 within the limiting groove 311.

[0060] Understandably, this embodiment achieves dual protection through elastic pre-tensioning and mechanical limiting. When the operator rotates the flipper 32 from the unfolded position to the retracted position (first working position), the flipper 32 gradually approaches the endpoint. Just before reaching the endpoint, the limiting protrusion 321 contacts the surface of the connecting member 31 and is compressed, causing the spring to be further compressed. As the flipper 32 continues to rotate, when the limiting protrusion 321 aligns with the limiting groove 311, the compressed spring immediately releases its energy, generating an axial thrust that pushes the flipper 32 (or the connecting member 31), causing the limiting protrusion 321 to automatically spring into the limiting groove 311.

[0061] Once the limiting protrusion 321 enters the limiting groove 311, the two form a mechanical lock. Under the action of the spring, the limiting protrusion 321 is firmly locked in the limiting groove 311 and will not jump out due to vibration.

[0062] Therefore, precise mechanical positioning is achieved through the cooperation of the limiting protrusion 321 and the limiting groove 311, avoiding the slight displacement that may occur during friction locking and ensuring that the tilting part 32 stops in the same precise position every time. The combination of mechanical locking and spring compression ensures that even if the tool cart is subjected to a large impact or vibration, the tilting part 32 can be firmly locked in the predetermined position, improving safety.

[0063] Continue reading Figures 1 to 4 In some embodiments of the present invention, the flipping connection mechanism 30 further includes a first docking member 35 and a second docking member 36 adapted to at least two different machine tool tracks 50, and the first docking member 35 and the second docking member 36 are replaceably mounted on the flipping member 32.

[0064] Essentially, the first docking component 35 and the second docking component 36 are two (or more) different parts, which share the common feature of being able to be mounted on the flipping component 32. However, the shape, size, and connection method (such as the position of the threaded hole and the shape of the snap-fit) of their interface parts that contact the machine track 50 are different. The purpose is to adapt to different models of lithography machine track 50.

[0065] The first docking part 35 and the second docking part 36 are fixed to the flipping part 32 in a detachable manner (such as screws or quick-change connectors), and the operator can quickly replace them as needed.

[0066] Since the interface between the tilting component 32 and the tool cart body is standardized, and the connecting component 31 acts as an adapter, one side is adapted to the standardized tilting component 32, and the other side is adapted to the non-standard machine tool track 50. When it is necessary to disassemble the type A discharge chamber (corresponding to the type A machine tool track 50), the first docking component 35 is installed onto the tilting component 32. When it is necessary to disassemble the type B discharge chamber, only a few screws need to be unscrewed, the first docking component 35 is removed, and the second docking component 36 is replaced, without replacing the entire tool cart.

[0067] This configuration allows a single tool cart to be compatible with various machines, improving equipment utilization and reducing customers' equipment procurement and maintenance costs. When faced with different models of lithography machines in a factory, maintenance personnel can quickly change connector 31 to handle different tasks without having to transport multiple specialized tool carts back and forth. Meanwhile, connector 31, as the part that directly interfaces with the machine, is the fastest-wearing and most easily damaged component. The replaceable design makes maintenance very simple and economical; only the damaged connector 31 needs to be replaced, rather than the entire flip-connection mechanism 30.

[0068] Continue reading Figures 1 to 4 In some embodiments of the present invention, the surface of the connector 31 is adapted to the shape of the track surface 23; the surface of the flipper 32 is adapted to the shape of the track surface 23.

[0069] The surface of connector 31 refers to its upper surface, which is the area that the discharge chamber roller will pass through when transitioning from the machine track 50 to the tool cart. The surface of flipper 32 refers to its upper surface, which is also the area that the roller will pass through. Shape compatibility means that, in the unfolded state, the upper surfaces of connector 31 and flipper 32 have a shape (including height, width, flatness, slope, etc.) that is continuous and smooth with the track surface 23 on the track assembly 20, without any steps, abrupt gaps, or height differences.

[0070] Since the roller in the discharge chamber is a rigid body, it requires a smooth, continuous support surface to roll smoothly. When the tilting component 32 unfolds and aligns with the machine tool track 50, its upper surface becomes a bridge between the surface of the machine tool track 50 and the tool cart track surface 23. If the surface of this bridge is inconsistent with the track surfaces 23 at both ends in height and width, the roller will experience impact, jamming, or lateral slippage when passing through. By defining a suitable shape, a smooth transition from the machine tool to the tool cart is ensured.

[0071] This avoids impacts and vibrations caused by track discontinuities, protecting the precision optical components and mechanical structures inside the discharge cavity. Simultaneously, it prevents collisions and friction between the rollers and the track edges, extending the service life of the discharge cavity rollers.

[0072] Continue reading Figures 1 to 4 In some embodiments of the present invention, each track assembly 20 includes a track base 21 and at least one track body 22. The track base 21 is the base of the track assembly 20 and is a high-strength metal block or profile. The track base 21 is fixed to the lifting platform 11 of the lifting vehicle 10 by fasteners such as screws.

[0073] At least one track body 22 means that there can be a single layer or multiple layers. The track body 22 is the component that actually provides the track surface 23, and at least one track body 22 is fixedly mounted on the track base 21.

[0074] When there are multiple track bodies 22, two adjacent track bodies 22 are stacked together. This stacked structure forms a three-dimensional guide rail assembly, and the connector 31 is located at one end of the track base 21, indicating that the connector 31 is attached to the solid track base 21, rather than the weak track body 22, making the structure more stable.

[0075] Understandably, this embodiment simplifies manufacturing and assembly by decomposing the track assembly 20 into a track base 21 and a track body 22. This layered arrangement provides the physical basis for handling multiple discharge cavities on a single tool cart. The track base 21 is first mounted on the lifting platform 11, ensuring the stability of the entire track assembly 20. Then, depending on the task, one or more track bodies 22 can be installed on the base. These layered track bodies 22 collectively form a three-dimensional space for the movement and positioning of the discharge cavity rollers.

[0076] The independent track base 21 provides a robust mounting foundation, reliably bearing the dynamic and static loads generated during the movement of the 200kg discharge cavity. The design of the track base 21 allows the entire track assembly 20 to be pre-assembled as a module before being installed onto the lifting vehicle 10, ensuring the parallelism and spacing accuracy of the left and right track assemblies 20. The layered track body 22 design provides structural feasibility for subsequently realizing the complex function of a single tool cart accommodating multiple discharge cavities.

[0077] Continue reading Figures 1 to 4 In some embodiments of the present invention, the width of the track body 22 gradually decreases from bottom to top, meaning that the bottom track body 22 is the widest, the second layer above is narrower than the bottom layer, and if there is a third layer, it is even narrower, forming a stepped structure.

[0078] The upper surface of the lower track body 22 serves as the roller support surface for the first type of discharge cavity. Due to its wide width, it can provide stable support for larger rollers.

[0079] The upper track body 22 has a dual function: support and limiting. Specifically, the upper surface of the upper track body 22 serves as a support surface for the rollers of the second type of discharge cavity. Since the width of the upper track body 22 is narrower than that of the lower track body 22, the side of the upper track body 22 can act as a lateral limiting plate for the rollers on the lower track, preventing the rollers of the first type of discharge cavity from swinging left and right and deviating from the predetermined track during movement.

[0080] It is understandable that this embodiment cleverly utilizes the width difference of the track body 22 of different layers to provide separate travel paths and guiding devices for two discharge cavities with different wheel gauges or wheel diameters on the same physical structure.

[0081] like Figures 5 to 8 When processing the first type of discharge cavity: its rollers are wider or have a larger wheelbase, and they travel directly on the lower track body 22. At this time, although the upper track body 22 does not support it, its side acts as a limiting wall to ensure that the rollers travel in the center.

[0082] like Figures 9 to 12 When handling the second type of discharge cavity: its rollers are narrower or have a smaller wheelbase, and it travels on the upper track body 22. The lower track body 22 does not participate in the operation at this time. Although the upper track body 22 does not support it, its side acts as a limiting wall to ensure that the rollers travel in the center. Through this design, a single tool cart has the ability to load and unload at least two types of discharge cavities, and each type of discharge cavity can receive dedicated support and limiting.

[0083] Thus, a clever stepped track design provides independent travel and guidance tracks for at least two completely different discharge cavities on a single tool cart. There is no need to manufacture and replace the entire track assembly 20 separately for each discharge cavity. Operators do not need to perform complex modifications; they simply push the corresponding discharge cavity onto the corresponding track.

[0084] By providing dedicated limits for each type of discharge cavity (limiting the second type of discharge cavity from the upper track, and limiting the first type of discharge cavity from the side of the upper track), it is ensured that the movement trajectory is precisely controllable regardless of which cavity is loaded or unloaded, thus avoiding the risk of derailment.

[0085] Continue reading Figures 1 to 12 In some embodiments of the present invention, the plasma discharge cavity loading and unloading tool cart further includes a limiting member 40, which is disposed at the other end of each track assembly 20. The limiting member 40 is used to limit the discharge cavity after it has moved onto the track assembly 20.

[0086] The limiting component 40 is an independent mechanical part, such as a stop, positioning pin, or latch. The limiting component 40 is located on the end of the track assembly 20 away from the machine tool (i.e., away from the flipping connection mechanism 30). After the discharge chamber is completely moved from the machine tool to the tool cart, the limiting component 40 is used to cooperate with the corresponding structure on the discharge chamber (such as a pre-drilled hole or groove) to fix the discharge chamber.

[0087] After the discharge chamber is transferred to the tool cart, the tool cart needs to be moved. During this movement, any sudden stop, turn, or uneven ground could cause the discharge chamber to slide along the track due to inertia, or even break off the tool cart, causing a serious accident. The limit device 40 is a stop designed to prevent this danger.

[0088] In actual operation, the discharge chamber is pushed from the machine tool onto the tool cart and moved along the track assembly 20 to the innermost end (i.e., the end where the limiting member 40 is located). The operator manipulates the limiting member 40 (e.g., inserting a pin or rotating a stop block) to connect the limiting member 40 with the fixed point on the discharge chamber. After locking, the discharge chamber is fixed on the tool cart and will not slide back or forth no matter how the tool cart moves.

[0089] This design avoids the risk of the discharge chamber slipping during transportation, protecting the expensive discharge chamber equipment and the safety of surrounding operators.

[0090] Continue reading Figure 1 In some embodiments of the present invention, the track assembly 20 is provided with a plurality of mounting positions 211 for mounting the limiting member 40, so that the front and rear positions of the limiting member 40 are adjustable, thereby adapting to discharge cavities of different sizes.

[0091] The mounting positions 211 are multiple threaded holes, pin holes, or elongated slots provided on the track assembly 20 (e.g., on the track base 21) along the front-back direction (i.e., the direction of movement of the discharge cavity). The limiting member 40 can be installed on different mounting positions 211 as needed, thereby changing its front-back position on the track assembly 20.

[0092] Since the length of different models of discharge chambers may vary, the location of the locking hole (or the part that mates with the limiting member 40) on the discharge chamber will also be different after the discharge chamber is completely moved onto the tool cart.

[0093] Before using a discharge chamber for the first time, the operator can first push it onto the tool cart and locate the position of the track assembly 20 corresponding to the locking hole on the discharge chamber. Then, the limiting member 40 is installed on the mounting position 211 closest to this location. In this way, the next time the discharge chamber is moved, the limiting member 40 will be perfectly aligned with the locking hole once it is in place.

[0094] It is understandable that by adjusting the position of the limiting member 40, this embodiment enables the tool cart to perfectly adapt to a wider variety of discharge cavities of different lengths, further expanding its versatility and eliminating the need for secondary processing of the tool cart.

[0095] Continue reading Figures 1 to 12 In some embodiments of the present invention, the lifting vehicle 10 is a manual hydraulic lifting vehicle, a common type of industrial handling equipment. It raises the platform by manually pressing a handle to drive a hydraulic pump and lowers the platform by manually releasing a hydraulic valve. The bottom of the lifting vehicle 10 is equipped with four steerable casters 12, allowing the vehicle to move flexibly in all directions, including rotating in place and lateral movement.

[0096] Because power tools should be avoided around precision equipment such as lithography machines to prevent electromagnetic interference, electrical sparks, or the need to drag power cords, manual hydraulic systems are a safer option. Four casters are crucial for omnidirectional movement in the confined space behind the machine, where it is filled with precision wiring. This allows operators to move the tool cart in and out of the workstation with minimal turning radius and the most flexible path.

[0097] The operator pushes the tool cart, using its four casters to move it flexibly to the side of the machine. Once in the designated position, the operator manually presses the handle to precisely control the height of the lifting platform 11, achieving docking with the machine's track 50. The entire tool cart has no electric components, is dust-free and free from electromagnetic interference, and complies with the operating procedures of the cleanroom where the lithography machine is located.

[0098] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A plasma discharge cavity loading and unloading tool cart, characterized in that, include: A lifting truck, which has a lifting platform; At least two track assemblies are spaced apart on the lifting platform, and each track assembly has at least one track surface on its surface; The flip connection mechanism includes: A connector is located at one end of the track assembly; A flipper is rotatably connected to the connector. The flipper has a first working position and a second working position. In the first working position, the flipper is retracted to one end of the track assembly. In the second working position, the flipper is extended outward for docking with the machine track.

2. The plasma discharge cavity loading and unloading tool cart according to claim 1, characterized in that, The flip-connection mechanism further includes: A rotating support shaft passes through the connector and the flipping member, so that the connector and the flipping member are rotatably connected. An elastic element is sleeved on the rotating support shaft. One end of the elastic element abuts against the flipping element, and the other end of the elastic element abuts against the shaft end retaining ring at the end of the rotating support shaft. The elastic element is used to hold the flipping element in the first working position.

3. The plasma discharge cavity loading and unloading tool cart according to claim 2, characterized in that, One of the flipping component and the connecting component is provided with a limiting protrusion, and the other of the flipping component and the connecting component is provided with a limiting groove. The limiting groove cooperates with the limiting protrusion to limit the movement. When the flipping member is in the first working position, the elastic member is used to apply force to keep the limiting protrusion in the limiting groove.

4. The plasma discharge cavity loading and unloading tool cart according to claim 1, characterized in that, The flipping connection mechanism further includes a first docking component and a second docking component that are respectively adapted to at least two different machine tool tracks, and the first docking component and the second docking component are interchangeably mounted on the flipping component.

5. The plasma discharge cavity loading and unloading tool cart according to claim 1, characterized in that, The surface of the connector is adapted to the shape of the track surface; the surface of the flipper is adapted to the shape of the track surface.

6. The plasma discharge cavity loading and unloading tool cart according to claim 1, characterized in that, Each of the aforementioned track components includes: The track base is fixedly mounted on the lifting platform; At least one track body is fixedly mounted on the track base, and two adjacent track bodies are stacked together. The connector is located at one end of the track base.

7. The plasma discharge cavity loading and unloading tool cart according to claim 6, characterized in that, The width of the main track body gradually decreases from bottom to top; The lower track body is used to support the rollers of the first type of discharge cavity; the upper track body is used to support the rollers of the second type of discharge cavity, and the upper track body is also used to limit the rollers of the first type of discharge cavity.

8. The plasma discharge cavity loading and unloading tool cart according to any one of claims 1 to 7, characterized in that, Also includes: A limiting member is provided at the other end of each of the track assemblies, the limiting member being used to limit the discharge cavity after the discharge cavity moves onto the track assembly.

9. The plasma discharge cavity loading and unloading tool cart according to claim 8, characterized in that, The track assembly is provided with multiple mounting positions for installing the limiting member, so that the front and rear positions of the limiting member are adjustable, thereby adapting to discharge cavities of different sizes.

10. The plasma discharge cavity loading and unloading tool cart according to any one of claims 1 to 7, characterized in that, The lifting vehicle is a manual hydraulic lifting vehicle, and the bottom of the lifting vehicle is equipped with four steerable casters.

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