A coating equipment and PCVD coating process

Abstract

This invention discloses a coating equipment and a PCVD coating process, relating to the technical field of coating equipment. The invention features a socket that can be adjusted between an unfolded state and a closed clamping state. When the plug connected to the substrate is not inserted into the socket, the socket is in an open state. The socket closes and clamps the plug after insertion, achieving circuit continuity. This prevents sliding friction between the plug and socket during insertion, reducing frictional resistance during installation and facilitating rapid substrate insertion within the vacuum chamber. It also prevents wear and tear from repeated insertion and removal, which could affect the connection stability of the plug and socket. Furthermore, a locking mechanism secures the plug and socket when they are connected, further improving connection stability and preventing loose connections from affecting the coating effect.

Description

Technical Field

[0001] This invention belongs to the field of coating equipment technology, and more specifically, relates to a coating equipment and a PCVD coating process. Background Technology

[0002] PCVD coating is a technique that uses plasma to activate gaseous precursors in a vacuum chamber, causing them to undergo a low-temperature chemical reaction and deposit a film on the surface of a substrate. During the coating process, the reaction chamber is first evacuated to a set vacuum and a reactive gas (such as silane, ammonia, methane, etc.) is introduced. Then, high-energy electrons, ions, and active groups are generated by exciting them through radio frequency, microwave, or hot wire. These active substances are adsorbed, migrated, and undergo chemical reactions on the workpiece surface, ultimately forming a dense and uniform solid film. The entire process is completed at a temperature much lower than that of traditional CVD, and it has the advantages of high film quality, good step coverage, and strong process controllability. It is often used for coating processing of semiconductor wafers and other workpieces.

[0003] For example, Chinese patent CN111020534B discloses a coating equipment, including a reaction chamber, a gas supply unit, a vacuum pumping device, a pulse power supply, and a radio frequency power supply. The reaction chamber has a reaction cavity, the gas supply unit is used to supply gas to the reaction cavity, the vacuum pumping device is connected to the reaction chamber in a way that is communicatively connected to the reaction cavity, the pulse power supply is used to provide a pulse electric field to the reaction chamber, and the radio frequency power supply is used to provide a radio frequency electric field to the reaction chamber. Multiple coating workpieces are held in the reaction chamber. When the pulse power supply and the radio frequency power supply are turned on, the gas in the reaction chamber is ionized under the action of the radio frequency electric field and the pulse electric field to generate plasma, and the plasma is deposited toward the surface of the workpiece to be coated.

[0004] In PCVD coating, the substrate carrying the workpiece typically needs to be connected to the cathode to promote the deposition of active materials onto the substrate surface and improve the coating effect. However, in existing technologies, conductive inserts are usually fixedly connected to the substrate, and then a socket with a bent metal plate connected to the cathode is fixedly installed in the vacuum reaction chamber. When the substrate is slidably installed in the vacuum reaction chamber, the conductive insert just plugs into the metal plate in the socket. To ensure the stability of the electrical connection between the conductive insert and the metal plate, the metal plate needs to be bent to form a very small insertion gap, thus increasing the insertion resistance of the conductive insert and consequently increasing the installation resistance of the substrate, which is detrimental to the rapid assembly of the substrate in the vacuum reaction chamber. Furthermore, during long-term use of the coating equipment, the reciprocating insertion and removal friction between the conductive insert and the metal plate causes wear, affecting the stability of the electrical connection between them and ultimately impacting the coating effect. Summary of the Invention

[0005] In view of the problems in the related technologies, the present invention proposes a coating equipment and a PCVD coating process to overcome the above-mentioned technical problems existing in the existing related technologies.

[0006] To solve the above-mentioned technical problems, the present invention is achieved through the following technical solution: This invention relates to a coating device, comprising a vacuum reaction section, a workpiece positioning section, and an electrode section. The vacuum reaction section includes a vacuum section and a material conveying section. The vacuum section can be adjusted to a vacuum state, and the material conveying section can convey reaction materials into the vacuum section. The workpiece positioning part includes a positioning bracket and multiple base plates. The positioning bracket can be fixedly installed inside the vacuum part. The base plates are provided with workpiece positioning grooves, and the multiple base plates can be stacked in sequence and slidably inserted into the positioning bracket. The electrode section includes an anode section and a cathode section disposed within the vacuum section. The cathode section includes multiple plug sections, multiple socket sections, and multiple locking sections. The multiple plug sections are respectively fixedly mounted on multiple substrates, and the plug sections are electrically connected to the corresponding substrates. The multiple socket sections and multiple locking sections are stacked one-to-one within the vacuum section. When the substrate is slidably inserted into the positioning bracket, it can drive the plug part on it to be inserted into the corresponding socket part; The socket includes an unfolded state and a closed clamping state. When the plug is inserted into the socket, the socket can move from the unfolded state to the closed clamping state to achieve a conductive connection between the plug and the socket, so that the substrate can be conductively connected to the cathode through the cooperation of the plug and the socket. The locking part can lock and position the plug and the socket when the plug is inserted into the socket.

[0007] Preferably, the vacuum section includes a vacuum chamber, an opening is provided on one side of the vacuum chamber, and a sealing door panel is installed at the opening by means of a hinge and a door lock. The vacuum chamber is also provided with a vacuum port, which is connected to a vacuum pump through a vacuum pipe. The material conveying unit includes a storage tank, which is connected to a vacuum chamber via a feeding conduit, and a material conveying valve is installed on the feeding conduit.

[0008] Preferably, the positioning bracket includes two sets of side support plates, which are respectively fixedly installed on both sides inside the vacuum section, and the inner surfaces of the two sets of side support plates are provided with multiple sliding guide grooves from top to bottom, so that the base plate can be slidably assembled between the two side support plates through the sliding guide grooves.

[0009] Preferably, the positioning bracket further includes multiple substrate positioning frames, which are grouped in pairs, and the two substrate positioning frames in the same group are fixedly connected by a sliding shaft. The end of the sliding shaft extends to the outer end of the substrate positioning frame and can be slidably engaged in the sliding guide groove. The inner end of the substrate positioning frame is provided with a support part that can support the end of the substrate, and the outer end of the substrate positioning frame is fixedly installed with a sliding pin that can be slidably engaged with the sliding guide groove. The support portion is provided with positioning holes, and the bottom surface of the substrate is fixedly installed with positioning pins that can be inserted into the positioning holes.

[0010] Preferably, the socket portion includes a conductive insert, which is fixedly mounted on the substrate and electrically connected to the substrate, and the conductive inserts on adjacent substrates are staggered. The cathode section also includes multiple electrode posts, which are fixedly installed inside the vacuum section. The multiple electrode posts are located on the moving insertion path of the corresponding conductive inserts, and multiple socket sections and multiple locking sections are stacked inside the electrode posts in a corresponding manner.

[0011] Preferably, the socket includes two sets of clamps, which are located above and below the conductive insert insertion position, respectively. A connecting rod is rotatably mounted on the outer surface of the clamps. One end of the connecting rod is rotatably connected to the electrode post through a rotating shaft. Electrode plates are provided on the inner surface of the clamps. The connecting rod can flexibly support the clamps so that the two sets of clamps are in an open state. A stop block extending towards the conductive insert is fixedly installed on the side of the clamping plate. The side of the conductive insert is provided with a protrusion corresponding to the stop block. When the conductive insert is inserted and connected, the stop block can be pushed forward by the protrusion, so that the clamping plate can move forward. When the clamping plate moves forward, the connecting rod can drive the clamping plate to move closer to the conductive insert, so that the clamping plate abuts and clamps the electrode plate onto the conductive insert, thereby realizing the conductive connection between the electrode plate and the conductive insert.

[0012] Preferably, an elastic connector is connected and installed on the inner side of the clamping plate, and a pressure plate is connected and installed at one end of the elastic connector, with the electrode sheet fixedly and tightly installed on the inner side of the pressure plate.

[0013] Preferably, the locking part includes an elastic telescopic shaft and a locking rod. The locking rod is rotatably installed inside the electrode post. A limit pin is fixedly installed at one end of the locking rod. The conductive insert is provided with a limit groove that can slide and engage with the limit pin. The limit pin can slide and engage with the limit groove after the conductive insert reaches the insertion position and is inserted into the socket, so as to limit and lock the conductive insert. The limit pin can also release the lock between the limit pin and the limit groove when the conductive insert is pushed forward, so that the conductive insert can be pulled out from inside the socket. The elastic telescopic shaft is located at the end of the conductive plug insertion path so that when the conductive plug is inserted into the socket, the elastic telescopic shaft can elastically abut against the end of the conductive plug to elastically limit the conductive plug.

[0014] Preferably, the limiting groove includes a guide slope, a locking guide groove, a locking guide arc surface, a vertex groove, a locking groove, an unlocking guide arc surface, and an unlocking guide groove. When the conductive insert is inserted, the limiting pin can slide into the locking guide groove under the guidance of the guide slope, and slide into the vertex groove under the guidance of the locking guide arc surface when it slides to the end of the locking guide groove. Then, the conductive insert moves backward under the drive of the elastic telescopic shaft so that the limiting pin is engaged in the locking groove, thereby limiting and locking the conductive insert. When the conductive insert is unlocked and pulled out, the conductive insert is pushed forward, the limiting pin moves out of the locking groove, and slides into the unlocking guide groove under the guidance of the unlocking guide arc surface to complete the unlocking. A stop block is fixedly installed at the end of the elastic telescopic shaft. A positioning groove is provided on the front side of the stop block, which can slide against the limiting pin. The positioning groove can guide the limiting pin to slide against the limiting pin, so as to drive the limiting pin to slide back after unlocking.

[0015] This invention also discloses a PCVD coating process, the specific steps of which are as follows: Place the workpiece in the workpiece positioning groove on the substrate, and then stack multiple substrates loaded with workpieces in sequence and slide them onto the positioning bracket. When the substrate is inserted, the plug part on it is driven to be inserted into the corresponding socket part. At this time, the socket part can enter the closed clamping state from the unfolded state, realizing the conductive connection between the plug part and the socket part, so that the substrate can be conductively connected to the cathode part through the cooperation of the plug part and the socket part. At the same time, the locking part locks the plug part and the socket part in place. The vacuum section is adjusted to a vacuum state, and the reaction gas is transported into the vacuum section through the material conveying section. At the same time, the anode section and cathode section are energized to ionize the reaction gas and generate active substances for deposition coating on the workpiece surface.

[0016] The present invention has the following beneficial effects: 1. In this invention, a socket portion that can be adjusted to open and close between an unfolded state and a closed clamping state is provided. When the plug portion connected to the substrate is not inserted into the socket portion, the socket portion is in an open state. The socket portion closes and clamps the plug portion after the plug portion is inserted to achieve circuit conduction. This prevents the plug portion from sliding and rubbing against the socket portion when it is inserted. This not only reduces the frictional resistance when the plug portion and the substrate are connected and installed, facilitating the rapid insertion of the substrate in the vacuum section, but also prevents the plug portion and the socket portion from being worn by repeated insertion and removal, which would affect the connection stability of the plug portion and the socket portion.

[0017] 2. In this invention, by setting a locking part, when the plug part and the socket part are plugged in and connected, the locking part can lock and position the plug part and the socket part. This not only further improves the stability of the connection between the plug part and the socket part and prevents the coating effect from being affected by the loose connection, but also improves the stability of the substrate in the vacuum part by locking and positioning, and prevents the substrate from shaking under the feed air pressure during coating and affecting the coating effect.

[0018] 3. In this invention, the locking part includes an elastic telescopic shaft and a locking rod. One end of the locking rod is fixedly installed with a limiting pin. The limiting pin can slide and engage with the limiting groove on the conductive insert after the conductive insert reaches the insertion position and is inserted into the socket part, so as to quickly limit and lock the conductive insert. The limiting pin can also release the lock between the limiting pin and the limiting groove when the conductive insert is pushed forward, and then the substrate and the conductive insert can be pulled outward, thereby realizing the quick unlocking and unloading of the substrate and the workpiece, making the unloading process more convenient and faster.

[0019] Of course, any product implementing this invention does not necessarily need to achieve all of the advantages described above at the same time. Attached Figure Description

[0020] To more clearly illustrate the technical solutions of the embodiments of the invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0021] Figure 1 This is one of the three-dimensional structural schematic diagrams of the coating equipment of the present invention; Figure 2 This is a second three-dimensional structural schematic diagram of the coating equipment of the present invention; Figure 3 This is a three-dimensional structural diagram of the vacuum chamber of the present invention; Figure 4 This is a front structural diagram of the vacuum chamber of the present invention; Figure 5 This is one of the three-dimensional structural schematic diagrams of the workpiece positioning part of the present invention; Figure 6 This is a second three-dimensional structural schematic diagram of the workpiece positioning part of the present invention; Figure 7 For the present invention Figure 6 A magnified structural diagram at point A; Figure 8 This is a schematic diagram of the mounting structure of the substrate of the present invention; Figure 9 This is the third three-dimensional structural schematic diagram of the workpiece positioning part of the present invention; Figure 10 For the present invention Figure 9A magnified structural diagram at point B; Figure 11 This is a side view of the workpiece positioning part of the present invention; Figure 12 For the present invention Figure 11 A magnified structural diagram at point C; Figure 13 This is a schematic diagram of the structure of the conductive insert of the present invention; Figure 14 This is a schematic diagram of the process of locking the conductive insert in this invention. Figure 15 This is a schematic diagram of the process for unlocking and removing the conductive insert of the present invention.

[0022] In the diagram: 1. Vacuum reaction section; 11. Vacuum chamber; 12. Sealing door panel; 13. Storage tank; 14. Vacuum extraction port; 2. Workpiece positioning section; 21. Side support plate; 22. Sliding guide groove; 23. Substrate positioning frame; 24. Sliding shaft; 25. Substrate; 26. Sliding pin; 27. Positioning hole; 28. Positioning pin; 3. Electrode section; 31. Electrode post; 32. Conductive insert; 33. Electrode plate; 34. Clamping plate; 35. Stop block; 36. 37. Connecting rod; 38. Protruding ridge; 39. Limiting pin; 30. Limiting groove; 310. Abutment block; 311. Elastic telescopic shaft; 312. Locking rod; 313. Positioning groove; 314. Elastic connector; 315. Pressure plate; 3901. Guide slope; 3902. Locking guide groove; 3903. Locking guide arc surface; 3904. Vertex groove; 3905. Locking groove; 3906. Unlocking guide arc surface; 3907. Unlocking guide groove. Detailed Implementation

[0023] Many specific details are set forth in the following description in order to provide a full understanding of the invention. However, the invention may also be practiced in other ways different from those described herein, and those skilled in the art can make similar extensions without departing from the spirit of the invention. Therefore, the invention is not limited to the specific embodiments disclosed below.

[0024] Secondly, the term "one embodiment" or "embodiment" as used herein refers to a specific feature, structure, or characteristic that may be included in at least one implementation of the present invention. The phrase "in one embodiment" appearing in different places in this specification does not necessarily refer to the same embodiment, nor is it a single or selective embodiment that is mutually exclusive with other embodiments.

[0025] Example 1 Please see Figures 1-5 The present embodiment is a coating equipment, including a vacuum reaction section 1, a workpiece positioning section 2 and an electrode section 3. The vacuum reaction section 1 includes a vacuum section and a material conveying section. The vacuum section can be adjusted to a vacuum state, and the material conveying section can convey reaction materials into the vacuum section. The workpiece positioning part 2 includes a positioning bracket and multiple base plates 25. The positioning bracket can be fixedly installed inside the vacuum part. The base plates 25 are provided with workpiece positioning grooves, and the multiple base plates 25 can be stacked in sequence and slidably inserted into the positioning bracket. The electrode part 3 includes an anode part and a cathode part disposed in the vacuum part. The cathode part includes multiple plug parts, multiple socket parts and multiple locking parts. The multiple plug parts are respectively fixedly mounted on multiple substrates 25, and the plug parts are electrically connected to the corresponding substrates 25. The multiple socket parts and multiple locking parts are stacked in the vacuum part one by one. When the substrate 25 is slidably inserted into the positioning bracket, it can drive the plug part on it to be inserted into the corresponding socket part; The socket includes an unfolded state and a closed clamping state. When the plug is inserted into the socket, the socket can move from the unfolded state to the closed clamping state to achieve a conductive connection between the plug and the socket, so that the substrate 25 can be conductively connected to the cathode through the engagement of the plug and the socket. The locking part can lock and position the plug and the socket when the plug is inserted into the socket.

[0026] The anode section can be connected to the anode of the radio frequency power supply, and the cathode section can be connected to the cathode of the radio frequency power supply. When coating a workpiece using this coating equipment, the workpiece is placed in the workpiece positioning groove on the substrate 25, and multiple substrates 25 loaded with workpieces are sequentially stacked and slidably inserted into the positioning bracket. When the substrate 25 is inserted, the plug section on it is driven to insert into the corresponding socket section. At this time, the socket section can enter the closed clamping state from the unfolded state, clamping tightly against the surface of the plug section, realizing the conductive connection between the plug section and the socket section, so that the substrate 25 can be conductively connected to the cathode section through the cooperation of the plug section and the socket section. At the same time, the locking section locks and positions the plug section and the socket section. Then, the vacuum section is adjusted to a vacuum state, and the reaction gas (at least one of silane, ammonia, and methane) is transported into the vacuum section through the material conveying section. At the same time, the anode section and the cathode section are connected to the radio frequency power supply, and the reaction gas is ionized to generate active substances. Then, the active substances are gradually drawn and deposited on the surface of the workpiece to perform deposition coating on the surface of the workpiece.

[0027] When the plug is not inserted into the socket, the socket is in an open state. It closes and clamps the plug after the plug is inserted to achieve circuit conduction. This prevents the plug from sliding and rubbing against the socket during insertion, reducing frictional resistance during the insertion of the plug and the substrate 25, facilitating rapid insertion of the substrate in the vacuum chamber, and preventing wear from repeated insertion and removal that could affect the connection stability of the plug and socket. By providing a locking part, the plug and socket are locked in place when they are connected. This further improves the stability of the connection, preventing loose connections from affecting the coating effect. It also improves the stability of the substrate 25 during installation in the vacuum chamber, preventing it from shaking under the feed air pressure during coating and affecting the coating effect.

[0028] Example 2 Please see Figure 1 , Figure 2 As shown, the difference between this embodiment and the above embodiment is that the vacuum section includes a vacuum chamber 11, an opening is provided on one side of the vacuum chamber 11, and a sealing door panel 12 is installed at the opening through a hinge and a door lock. The vacuum chamber 11 is also provided with a vacuum port 14, which is connected to a vacuum pump through a vacuum pipe. The material conveying section includes a storage tank 13, which is connected to the vacuum chamber 11 through a feeding conduit, and a material conveying valve is installed on the feeding conduit.

[0029] The sealing door 12 is used to seal the vacuum chamber 11. The vacuum pump evacuates the vacuum chamber 11 through the vacuum port 14. The storage tank 13 is a high-pressure gas storage tank used to store the reaction gas. During the coating process, the material conveying valve on the feeding conduit is opened so that the reaction gas in the storage tank 13 can be conveyed into the vacuum chamber 11 under the action of gas pressure.

[0030] Example 3 Please see Figures 3-8 As shown, the difference between this embodiment and the above embodiment is that the positioning bracket includes two sets of side support plates 21. The two sets of side support plates 21 are fixedly installed on both sides inside the vacuum section, and the inner surfaces of the two sets of side support plates 21 are provided with multiple sliding guide grooves 22 from top to bottom. The base plate 25 can be slidably assembled between the two side support plates 21 through the sliding guide grooves 22. The positioning bracket also includes multiple substrate positioning frames 23, which are grouped in pairs. The two substrate positioning frames 23 in the same group are fixedly connected by a sliding shaft 24. The end of the sliding shaft 24 extends to the outer end of the substrate positioning frame 23 and can be slidably engaged in the sliding guide groove 22. The inner end of the substrate positioning frame 23 is provided with a support part that can support the end of the substrate 25. The outer end of the substrate positioning frame 23 is fixedly installed with a sliding pin 26 that can be slidably engaged with the sliding guide groove 22. During the coating process, the substrate 25 carrying the workpiece is placed on the substrate positioning frames 23 on both sides. Then, the ends of the sliding pins 26 and sliding shafts 24 on the outer side of the substrate positioning frames 23 are slidably engaged in the sliding guide grooves 22 on the inner side of the side support plates 21, thereby slidably engaging the substrate positioning frames 23 and the substrate 25 between the two side support plates 21, completing the rapid assembly of the substrate 25 and the workpiece in the vacuum chamber 11.

[0031] Furthermore, the support is provided with positioning holes 27, and the bottom surface of the substrate 25 is fixedly installed with positioning pins 28 that can be inserted into the positioning holes 27. When the substrate 25 is attached to the substrate positioning frames 23 on both sides, the positioning pins 28 on the bottom surface of the substrate 25 are inserted into the positioning holes 27 on the substrate positioning frames 23, thereby limiting the substrate 25 through the cooperation of the positioning pins 28 and the positioning holes 27, and improving the stability of the substrate 25 on the substrate positioning frames 23.

[0032] Example 4 Please see Figure 4 , Figure 8 , Figure 9 As shown, the difference between this embodiment and the above embodiment is that the socket part includes a conductive insert 32, which is fixedly mounted on the substrate 25 and electrically connected to the substrate 25, and the conductive inserts 32 on adjacent substrates 25 are staggered. The cathode section also includes multiple electrode posts 31, which are fixedly installed inside the vacuum section. The multiple electrode posts 31 are located on the moving insertion path of the corresponding conductive insert 32, and multiple socket sections and multiple locking sections are stacked inside the electrode posts 31 in a corresponding manner.

[0033] When the substrate 25 is inserted and installed inside the vacuum chamber 11, the conductive insert 32 on the substrate 25 is simultaneously inserted into the socket on the electrode post 31, so that the substrate 25 is connected to the cathode through the cooperation of the conductive insert 32 and the socket, thereby realizing the connection between the substrate 25 and the cathode while the substrate 25 is slidably assembled.

[0034] Example 5 Please see Figures 9-12 As shown, the difference between this embodiment and the above embodiment is that the socket part includes two sets of clamping plates 34, which are located above and below the insertion position of the conductive plug 32, respectively. A connecting rod 36 is rotatably mounted on the outer surface of the clamping plate 34. One end of the connecting rod 36 is rotatably connected to the electrode post 31 through a rotating shaft. An electrode plate 33 is provided on the inner side of the clamping plate 34. The connecting rod 36 can flexibly support the clamping plate 34 so that the two sets of clamping plates 34 are in an open state. Among them, a torsion spring is fitted on the rotating shaft that enables the connecting rod 36 to rotate and connect with the electrode post 31. One end of the torsion spring is fixedly connected to the electrode post 31, and the other end is fixedly connected to the connecting rod 36. The torsion spring torsionally limit the connecting rod 36, so that the connecting rod 36 remains in an inclined state, thereby making the upper and lower electrode plates 33 open. A stop 35 extending toward the conductive insert 32 is fixedly installed on the side of the clamping plate 34. A protrusion 37 corresponding to the stop 35 is provided on the side of the conductive insert 32. When the conductive insert 32 is inserted and connected, the stop 35 can be pushed forward by the protrusion 37, so that the clamping plate 34 moves forward. At this time, the clamping plate 34 pushes the connecting rod 36 from the inclined state to the vertical direction for adjustment. This allows the connecting rod 36 to drive the clamping plate 34 to move closer to the conductive insert 32 when the clamping plate 34 moves forward, so that the clamping plate 34 abuts and clamps the electrode plate 33 onto the conductive insert 32, realizing the conductive connection between the electrode plate 33 and the conductive insert 32. This prevents the conductive insert 32 from sliding and rubbing against the electrode plate 33 when it is inserted and connected. This not only reduces the frictional resistance when the conductive insert 32 and the substrate 25 are inserted and installed, making the installation easier, but also prevents the conductive insert 32 and the electrode plate 33 from being damaged by friction. When the coated substrate 25 and the conductive insert 32 are pulled outward, the conductive insert 32 drives the protrusion 37 to move outward in sync, releasing the push on the stop block 35. At this time, the connecting rod 36 rotates along the axis under the torsional force of the torsion spring and gradually returns to the tilted state. At the same time, the connecting rod 36 drives the clamping plate 34 and the electrode plate 33 to move away from the conductive insert 32, so that the electrode plate 33 separates from the conductive insert 32 and does not generate sliding friction with the conductive insert 32 that has slid out.

[0035] Furthermore, an elastic connector 314 is connected and installed on the inner side of the clamping plate 34, and a pressure plate 315 is connected and installed on one end of the elastic connector 314. The electrode sheet 33 is fixedly and tightly installed on the inner side of the pressure plate 315. The elastic connector 314 can be a spring or an elastic rod. When the clamping plate 34 moves toward the conductive insert 32, the clamping plate 34 uses the elastic force of the elastic connector 314 to press the electrode plate 33 against the surface of the conductive insert 32, thereby improving the tightness of the connection between the conductive insert 32 and the electrode plate 33 and the stability of the conductive connection.

[0036] Example 6 Please see Figure 4 , Figures 9-15As shown, the difference between this embodiment and the above embodiment is that the locking part includes an elastic telescopic shaft 311 and a locking rod 312. The locking rod 312 is rotatably mounted inside the electrode post 31. One end of the locking rod 312 is fixedly mounted with a limiting pin 38. The conductive insert 32 is provided with a limiting groove 39 that can slide and engage with the limiting pin 38. After the conductive insert 32 reaches the insertion position and is inserted into the socket, the limiting pin 38 can slide and engage with the limiting groove 39 to limit and lock the conductive insert 32, thereby realizing the rapid locking of the conductive insert 32. By locking the conductive insert 32, not only can the stability of the connection between the conductive insert 32 and the electrode plate 33 be improved and loosening of the connection be prevented, but the substrate can also be improved. The stability of the 25 is improved when installed in the vacuum chamber 11; the limiting pin 38 can also release the lock between the conductive insert 32 and the limiting groove 39 when the conductive insert 32 is pushed forward, so that the conductive insert 32 can be pulled out from the socket and the conductive insert 32 and the substrate 25 can be quickly unlocked; the elastic telescopic shaft 311 is provided at the end of the insertion path of the conductive insert 32, so that when the conductive insert 32 is inserted into the socket, the elastic telescopic shaft 311 can elastically abut against the end of the conductive insert 32, elastically limit the conductive insert 32, prevent the conductive insert 32 from sliding and causing the limiting pin 38 to slide out of the limiting groove 39 and unlock, thereby improving the stability of the limiting lock between the limiting pin 38 and the limiting groove 39.

[0037] Furthermore, the limiting groove 39 includes a guide slope 3901, a locking guide groove 3902, a locking guide arc surface 3903, a vertex groove 3904, a locking groove 3905, an unlocking guide arc surface 3906, and an unlocking guide groove 3907. The vertex groove 3904 and the locking groove 3905 are staggered. The vertex groove 3904 is closer to the locking guide groove 3902, and the locking groove 3905 is closer to the unlocking guide groove 3907. When the conductive insert 32 is inserted, the limiting pin 38 can slide into the locking guide groove 3902 under the guidance of the guide slope 3901. When it slides to the end of the locking guide groove 3902, it slides into the vertex groove 3904 under the guidance of the locking guide arc surface 3903. Then, the conductive insert 32 moves slightly backward under the drive of the elastic telescopic shaft 311 so that the limiting pin 38 moves backward and engages in the locking groove 3905, thus limiting and locking the conductive insert 32. When the conductive insert 32 is unlocked and pulled out, the substrate 25 is pushed forward slightly, causing the substrate 25 to move the conductive insert 32 forward slightly. At this time, the limiting pin 38 moves out of the locking groove 3905 and slides into the unlocking guide groove 3907 under the guidance of the unlocking guide arc surface 3906 to complete the unlocking. Then the substrate 25 can be pulled out to achieve quick unlocking and unloading of the substrate 25. Furthermore, a stop block 310 is fixedly installed at the end of the elastic telescopic shaft 311. A positioning groove 313 is provided on the front side of the stop block 310, which can slide against the limiting pin 38. The positioning groove 313 guides the sliding contact of the limiting pin 38, driving the limiting pin 38 to slide back to its original position after unlocking. When the conductive insert 32 is pulled outwards, the stop block 310 moves forward to its original position under the return force of the elastic telescopic shaft 311. At this time, the lower end of the limiting pin 38... The slidable abutment is against the arc-shaped inner wall of the positioning groove 313 on the front side of the abutment block 310, and moves towards the center of the abutment block 310 under the guidance of the arc-shaped inner wall of the positioning groove 313, so that the limiting pin 38 and the locking rod 312 are reset and aligned, so that when the conductive insert 32 is inserted in the next round of coating process, the limiting pin 38 can slide and be locked in the limiting groove 39, and cooperate with the limiting groove 39 to lock and limit the conductive insert 32, ensuring that the locking part can reciprocate to lock and unlock.

[0038] Example 7 This embodiment discloses a PCVD coating process, the specific steps of which are as follows: The workpiece is placed in the workpiece positioning groove on the substrate 25, and then multiple substrates 25 loaded with workpieces are stacked and slidably inserted into the positioning bracket. When the substrate 25 is inserted, the plug part on it is driven to be inserted into the corresponding socket part. At this time, the socket part can enter the closed clamping state from the unfolded state, realizing the conductive connection between the plug part and the socket part, so that the substrate 25 can be conductively connected to the cathode part through the cooperation of the plug part and the socket part. At the same time, the locking part locks and positions the plug part and the socket part. The vacuum section is adjusted to a vacuum state, and the reaction gas is transported into the vacuum section through the material conveying section. At the same time, the anode section and cathode section are energized to ionize the reaction gas and generate active substances for deposition coating on the workpiece surface.

[0039] In the description of this specification, references to terms such as "an embodiment," "example," "specific example," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0040] It should be noted that, for the sake of simplicity, the foregoing method embodiments are all described as a series of actions. However, those skilled in the art should understand that the present invention is not limited to the described order of actions, because according to the present invention, some steps can be performed in other orders or simultaneously. Furthermore, those skilled in the art should also understand that the embodiments described in the specification are all optional embodiments, and the actions and modules involved are not necessarily essential to the present invention.

Claims

1. A coating apparatus, comprising a vacuum reaction section, a workpiece positioning section, and an electrode section, characterized in that: The vacuum reaction unit includes a vacuum section and a material conveying section. The vacuum section can be adjusted to a vacuum state, and the material conveying section can convey reaction materials into the vacuum section. The workpiece positioning part includes a positioning bracket and multiple base plates. The positioning bracket can be fixedly installed inside the vacuum part. The base plates are provided with workpiece positioning grooves, and the multiple base plates can be stacked in sequence and slidably inserted into the positioning bracket. The electrode section includes an anode section and a cathode section disposed within the vacuum section. The cathode section includes multiple plug sections, multiple socket sections, and multiple locking sections. The multiple plug sections are respectively fixedly mounted on multiple substrates, and the plug sections are electrically connected to the corresponding substrates. The multiple socket sections and multiple locking sections are stacked one-to-one within the vacuum section. When the substrate is slidably inserted into the positioning bracket, it can drive the plug part on it to be inserted into the corresponding socket part; The socket includes an unfolded state and a closed clamping state. When the plug is inserted into the socket, the socket can move from the unfolded state to the closed clamping state to achieve a conductive connection between the plug and the socket, so that the substrate can be conductively connected to the cathode through the cooperation of the plug and the socket. The locking part can lock and position the plug and the socket when the plug is inserted into the socket.

2. The coating equipment according to claim 1, characterized in that: The vacuum section includes a vacuum chamber, an opening on one side of the vacuum chamber, and a sealing door panel installed at the opening via a hinge and a door lock. The vacuum chamber is also provided with a vacuum port, which is connected to a vacuum pump via a vacuum pipe. The material conveying unit includes a storage tank, which is connected to a vacuum chamber via a feeding conduit, and a material conveying valve is installed on the feeding conduit.

3. The coating equipment according to claim 1, characterized in that: The positioning bracket includes two sets of side support plates, which are fixedly installed on both sides inside the vacuum section. The inner surfaces of the two sets of side support plates are provided with multiple sliding guide grooves from top to bottom. The base plate can be slidably assembled between the two side support plates through the sliding guide grooves.

4. The coating equipment according to claim 3, characterized in that: The positioning bracket also includes multiple substrate positioning frames, which are grouped in pairs. The two substrate positioning frames in the same group are fixedly connected by a sliding shaft. The end of the sliding shaft extends to the outer end of the substrate positioning frame and can be slidably engaged in the sliding guide groove. The inner end of the substrate positioning frame is provided with a support part that can support the end of the substrate. The outer end of the substrate positioning frame is fixedly installed with a sliding pin that can be slidably engaged in the sliding guide groove. The support portion is provided with positioning holes, and the bottom surface of the substrate is fixedly installed with positioning pins that can be inserted into the positioning holes.

5. The coating equipment according to claim 1, characterized in that: The socket includes a conductive insert, which is fixedly mounted on the substrate and electrically connected to the substrate. The conductive inserts on adjacent substrates are staggered. The cathode section also includes multiple electrode posts, which are fixedly installed inside the vacuum section. The multiple electrode posts are located on the moving insertion path of the corresponding conductive inserts, and multiple socket sections and multiple locking sections are stacked inside the electrode posts in a corresponding manner.

6. A coating apparatus according to claim 5, characterized in that: The socket includes two sets of clamps, which are located above and below the conductive insert insertion position, respectively. A connecting rod is rotatably mounted on the outer surface of the clamps. One end of the connecting rod is rotatably connected to the electrode post through a rotating shaft. Electrode plates are provided on the inner surface of the clamps. The connecting rod can flexibly support the clamps so that the two sets of clamps are in an open state. A stop block extending towards the conductive insert is fixedly installed on the side of the clamping plate. The side of the conductive insert is provided with a protrusion corresponding to the stop block. When the conductive insert is inserted and connected, the stop block can be pushed forward by the protrusion, so that the clamping plate can move forward. When the clamping plate moves forward, the connecting rod can drive the clamping plate to move closer to the conductive insert, so that the clamping plate abuts and clamps the electrode plate onto the conductive insert, thereby realizing the conductive connection between the electrode plate and the conductive insert.

7. A coating apparatus according to claim 6, characterized in that: An elastic connector is installed on the inner side of the clamping plate, and a pressure plate is installed on one end of the elastic connector. The electrode sheet is fixedly and tightly installed on the inner side of the pressure plate.

8. A coating apparatus according to claim 5, characterized in that: The locking part includes an elastic telescopic shaft and a locking rod. The locking rod is rotatably installed inside the electrode post. A limit pin is fixedly installed at one end of the locking rod. The conductive insert is provided with a limit groove that can slide and engage with the limit pin. The limit pin can slide and engage with the limit groove after the conductive insert reaches the insertion position and is inserted into the socket, so as to limit and lock the conductive insert. The limit pin can also release the lock between the limit pin and the limit groove when the conductive insert is pushed forward, so that the conductive insert can be pulled out from inside the socket. The elastic telescopic shaft is located at the end of the conductive plug insertion path so that when the conductive plug is inserted into the socket, the elastic telescopic shaft can elastically abut against the end of the conductive plug to elastically limit the conductive plug.

9. A coating apparatus according to claim 8, characterized in that: The limiting groove includes a guide slope, a locking guide groove, a locking guide arc surface, a vertex groove, a locking groove, an unlocking guide arc surface, and an unlocking guide groove. When the conductive insert is inserted, the limiting pin can slide into the locking guide groove under the guidance of the guide slope, and slide into the vertex groove under the guidance of the locking guide arc surface when it slides to the end of the locking guide groove. Then, the conductive insert moves backward under the drive of the elastic telescopic shaft so that the limiting pin is engaged in the locking groove, thereby limiting and locking the conductive insert. When the conductive insert is unlocked and pulled out, the conductive insert is pushed forward, the limiting pin moves out of the locking groove, and slides into the unlocking guide groove under the guidance of the unlocking guide arc surface to complete the unlocking. A stop block is fixedly installed at the end of the elastic telescopic shaft. A positioning groove is provided on the front side of the stop block, which can slide against the limiting pin. The positioning groove can guide the limiting pin to slide against the limiting pin, so as to drive the limiting pin to slide back after unlocking.

10. A PCVD coating process, using the coating equipment as described in any one of claims 1-9, characterized in that, The specific steps are as follows: Place the workpiece in the workpiece positioning groove on the substrate, and then stack multiple substrates loaded with workpieces in sequence and slide them onto the positioning bracket. When the substrate is inserted, the plug part on it is driven to be inserted into the corresponding socket part. At this time, the socket part can enter the closed clamping state from the unfolded state, realizing the conductive connection between the plug part and the socket part, so that the substrate can be conductively connected to the cathode part through the cooperation of the plug part and the socket part. At the same time, the locking part locks the plug part and the socket part in place. The vacuum section is adjusted to a vacuum state, and the reaction gas is transported into the vacuum section through the material conveying section. At the same time, the anode section and cathode section are energized to ionize the reaction gas and generate active substances for deposition coating on the workpiece surface.

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