Rotor and vacuum pump

Abstract

This invention discloses a rotor and a vacuum pump, relating to the field of rotating fluid machinery technology. The rotor includes a rotor body with multiple annular microgrooves formed on its outer circumferential surface. These annular microgrooves are spaced apart along the axial direction of the rotor body, and each microgroove extends in a closed loop along the circumference of the rotor body. The depth and width of each microgroove are on the micrometer scale. This invention utilizes annular microgrooves on the outer circumferential surface of the rotor body, forming a biomimetic structure that can disrupt the low-speed airflow boundary layer on the rotor body surface, reducing particle sedimentation and adhesion. Simultaneously, the centrifugal force generated by the rotor body's rotation interacts with the annular microgrooves to create turbulence, reducing the likelihood of dust particles accumulating on the outer circumferential surface of the rotor body. This reduces the possibility of rotor jamming and improves the operational stability of the vacuum pump.

Description

Technical Field

[0001] This invention relates to the field of rotating fluid machinery technology, and more particularly to a rotor and a vacuum pump. Background Technology

[0002] In industrial applications such as dust conveying and etching processes, the rotor, as a core component of rotating fluid machinery (such as vacuum pumps), directly determines the flow performance, sealing effect, and operational stability of the equipment through its profile structure.

[0003] In working environments containing fine particles, the radial clearance between the rotor and the pump chamber wall, and the axial clearance between the rotor end face and the end cover, easily become the core areas for dust particle accumulation. Long-term static accumulation of these fine particles increases the frictional resistance between the rotor and the pump chamber / end cover, causing rotor jamming, and in severe cases, burning out the drive motor and damaging equipment components. Furthermore, the accumulated dust exacerbates wear on the rotor surface, shortening its service life, and also impairs sealing performance, leading to media leakage and flow rate reduction, thereby affecting conveying efficiency or process stability. Summary of the Invention

[0004] The purpose of this invention is to at least solve the problem of dust particle accumulation in vacuum pumps. This purpose is achieved through the following technical solution: In a first aspect, the present invention proposes a rotor, including a rotor body, wherein a plurality of annular microgrooves are formed on the outer peripheral surface of the rotor body, the plurality of annular microgrooves are arranged at intervals along the axial direction of the rotor body, and the length of each annular microgroove extends in a closed manner along the circumference of the rotor body, and the groove depth and groove width of the annular microgrooves are both on the micrometer level.

[0005] By adopting the above technical solution, an annular microgroove is formed on the outer peripheral surface of the rotor body. The annular microgroove forms a biomimetic structure, which can destroy the low-speed airflow boundary layer on the surface of the rotor body, reduce particle sedimentation and adhesion, and at the same time, the centrifugal force of the rotor body during rotation and the annular microgroove form turbulence, reducing the possibility of dust particles accumulating on the outer peripheral surface of the rotor body, thereby reducing the possibility of rotor jamming and improving the operational stability of the vacuum pump.

[0006] In some embodiments of the present invention, the maximum groove depth of the annular microgroove is no greater than 100 micrometers, the maximum groove width of the annular microgroove is no greater than 150 micrometers, and the maximum axial distance between adjacent annular microgrooves is no greater than 250 micrometers.

[0007] By adopting the above technical solution, the reasonable size range of the micron-level structure is further clarified, which ensures the suppression of particle deposition while avoiding the reduction of the rotor body structure strength due to excessively large microgroove size.

[0008] In some embodiments of the present invention, the maximum groove depth of the annular microgroove ranges from 30 micrometers to 80 micrometers, the maximum groove width of the annular microgroove ranges from 50 micrometers to 100 micrometers, and the maximum axial distance between two adjacent annular microgrooves ranges from 100 micrometers to 200 micrometers.

[0009] By adopting the above technical solution, the groove depth, groove width and the distance between adjacent grooves of the annular microgroove are optimized to a more refined numerical range, so that the biomimetic annular microgroove is better matched with the airflow field, which can further improve the turbulence and centrifugal dust removal effect.

[0010] In some embodiments of the present invention, the width of the annular microgroove gradually increases along the direction away from the axis of the rotor body.

[0011] By adopting the above technical solution, this structural design forms an annular microgroove with a gradually increasing width outward. Particles entering the annular microgroove can be discharged more smoothly to the outside under the centrifugal force of the rotor, further reducing the possibility of stagnation and blockage. At the same time, it can reduce airflow disturbance resistance and further reduce dust deposition and accumulation.

[0012] In some embodiments of the present invention, the rotor body has two end faces arranged opposite each other along the axial direction, and at least one of the two end faces is provided with a flow guiding structure, the flow guiding structure including at least one flow guiding air passage pointing from the axis of the rotor body to the outer periphery.

[0013] By adopting the above technical solution, by setting a flow guiding structure on the end face of the rotor body, the airflow can be guided to flow along the end face to the outer peripheral surface, reducing the possibility of dust particles accumulating on the end face. At the same time, in conjunction with the annular microgroove on the outer peripheral surface, the overall surface of the rotor is protected against deposition, further improving the vacuum pump's anti-dust jamming ability and operational stability.

[0014] In some embodiments of the present invention, the flow guiding structure includes a plurality of micro-protrusions, the height and width of the micro-protrusions and the spacing between two adjacent micro-protrusions being on the micrometer level, a flow guiding gap being formed between two adjacent micro-protrusions, and the plurality of flow guiding gaps defining the flow guiding channel for guiding airflow toward the outer peripheral surface.

[0015] By adopting the above technical solution, the anti-adhesion properties of the micro-protrusion structure are utilized. Dust particles flow along the guide gap formed by the micro-protrusion to the edge of the rotor body and finally merge into the annular micro-groove. They are discharged to the exhaust port along with the airflow, realizing the coordinated guidance of dust in the axial and radial gaps of the rotor body and effectively preventing dust from accumulating in each rotor gap.

[0016] In some embodiments of the present invention, the plurality of micro-protrusions are arranged in multiple rows radially along the end face and in multiple columns circumferentially along the end face.

[0017] By adopting the above technical solution, the micro-protrusions are designed as an array of multiple rows radially and multiple columns circumferentially. When the rotor body rotates, the micro-protrusions can form an orderly disturbance and guide the airflow at the end face of the rotor body, which can more efficiently throw dust particles to the edge of the rotor body, thereby facilitating the dust to enter the annular micro-groove and be discharged with the airflow.

[0018] In some embodiments of the present invention, the multiple rows of micro-protrusions are arranged concentrically in multiple rings along the circumference of the end face, and the multiple columns of micro-protrusions are arranged radially along the radial direction of the end face.

[0019] By adopting the above technical solution, the multiple micro-protrusions are designed as a combination of concentric ring arrangement and radial arrangement, which can form a uniform and outward-pointing guiding channel for the airflow at the end face during rotation, further enhancing the radial guiding and centrifugal ejection of particles and improving the overall anti-deposition effect at the end face.

[0020] In some embodiments of the present invention, the micro-protrusions gradually increase in size and then gradually decrease in size along the direction perpendicular to their column, wherein the side of the micro-protrusions that gradually increases in size is closer to the axis of the rotor body than the side of the micro-protrusions that gradually decreases in size.

[0021] By adopting the above technical solution, the circumferential dimensions of the micro-protrusion are designed to increase first and then decrease along the radial direction, which can match the streamlined shape of the biomimetic papilla, reduce airflow resistance and form uniform guidance, and further reduce the retention and adhesion of particles on the end face.

[0022] In some embodiments of the present invention, the outer contour of the micro-protrusion is a continuous and smooth curve.

[0023] By adopting the above technical solution, a continuous smooth curve can avoid the occurrence of sharp-angle vortices and particle adhesion, thereby improving the smoothness of airflow.

[0024] In some embodiments of the present invention, along the direction of the column where the micro-protrusions are located, each micro-protrusion includes a first part and a second part connected in sequence. The first part is circular, and the second part is conical with a rounded transition surface at the tip. The minimum distance between the first part and the axis of the rotor body is less than the minimum distance between the second part and the axis of the rotor body.

[0025] By adopting the above technical solution, the micro-protrusion is designed as a cone with a circular base and an arc-shaped apex, which is more in line with the biomimetic shape of plant papillae. It can effectively disturb the airflow and guide dust radially, while using the arc transition at the tip to avoid stress concentration, thus balancing the guiding effect and structural reliability.

[0026] In some embodiments of the present invention, the maximum height of the micro-protrusion is no greater than 150 micrometers, the maximum width of the micro-protrusion is no greater than 200 micrometers, and the distance between two adjacent micro-protrusions is no greater than 400 micrometers.

[0027] Using the above technical solution, the micron-sized protrusions can effectively create airflow disturbance and guide flow, and will not increase the rotational resistance of the rotor body due to excessive size.

[0028] In some embodiments of the present invention, the maximum height of the microprotrusion is 50 to 100 micrometers, the maximum width of the microprotrusion is 80 to 150 micrometers, and the spacing between two adjacent microprotrusions is 200 to 300 micrometers.

[0029] By adopting the above technical solution, the height, width and spacing of the protrusions will be optimized to a more precise range, which will make the biomimetic flow guiding structure more compatible with the airflow field and further improve the rotor body's ability to resist dust retention and accumulation.

[0030] In some embodiments of the present invention, the rotor body includes a base portion and a claw portion extending out of the base portion. A notch portion is provided between the base portion and the claw portion. Along the circumference of the base portion, from a first end adjacent to the claw portion to a second end adjacent to the notch portion, the outer circumferential surface of the base portion is smoothly connected by a first curved segment and a second curved segment. The minimum radius of curvature of the first curved segment is greater than the maximum radius of curvature of the second curved segment. The arc length of the first curved segment is greater than the arc length of the second curved segment. From the first end to the second end, the radii of curvature of the first curved segment and the second curved segment gradually decrease.

[0031] By adopting the above technical solution, the curvature radius of the first and second curve segments is designed to gradually decrease, which can better adapt the base to the airflow trajectory, avoid the formation of low-speed dead zones in the flow channel, and ensure high-flow transmission.

[0032] In some embodiments of the present invention, along the circumferential direction of the rotor body, the claw portion includes a first side, a second side, and a third side connected at an angle in sequence. The first side is connected to the first curved segment, and the third side is connected to the notch portion. The third side is an arc surface, and along the arrangement direction from the third side to the second side, the radius of curvature of the second side gradually decreases.

[0033] By adopting the above technical solution, the radius of curvature of the second side is designed to gradually decrease, making the claw more adaptable to the airflow trajectory and further reducing the possibility of low-speed dead angles formed by airflow in the flow channel.

[0034] Secondly, the present invention provides a vacuum pump, comprising a pump body and a rotor as described in any of the above technical solutions, wherein the rotor is rotatably mounted in the pump body about its own axial direction. Attached Figure Description

[0035] Various other advantages and benefits will become apparent to those skilled in the art upon reading the following detailed description of preferred embodiments. The accompanying drawings are for illustrative purposes only and are not intended to limit the invention. Furthermore, the same reference numerals denote the same parts throughout the drawings. In the drawings: Figure 1 Schematic diagrams of the rotor body provided for some embodiments of the present invention; Figure 2 for Figure 1 Enlarged view of part A; Figure 3 for Figure 1 Enlarged view of part b; Figure 4 for Figure 1 Enlarged view of part C; Figure 5 Line drawing of the outer contour of the rotor body provided for some embodiments of the present invention.

[0036] The attached figures are labeled as follows: 100. Rotor body; 10. Outer circumferential surface; 11. Annular microgroove; 20. End face; 21. Flow guiding structure; 211. Micro-protrusion; 2111. First part; 2112. Second part; 212. Flow guiding gap; 30. Base part; 31. First end; 32. Second end; 40. Claw part; 41. First side; 42. Second side; 43. Third side; 50. Notch part. Detailed Implementation

[0037] Exemplary embodiments of the present disclosure will now be described in more detail with reference to the accompanying drawings. While exemplary embodiments of the present disclosure are shown in the drawings, it should be understood that the present disclosure may be implemented in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the disclosure to those skilled in the art.

[0038] It should be understood that the terminology used herein is for the purpose of describing particular exemplary embodiments only and is not intended to be limiting. Unless the context clearly indicates otherwise, the singular forms “a,” “an,” and “described” as used herein may also include the plural forms. The terms “comprising,” “including,” “containing,” and “having” are inclusive and therefore indicate the presence of the stated features, steps, operations, elements, and / or components, but do not exclude the presence or addition of one or more other features, steps, operations, elements, components, and / or combinations thereof. The method steps, processes, and operations described herein are not construed as requiring them to be performed in a particular order described or illustrated unless the order of performance is explicitly indicated. It should also be understood that additional or alternative steps may be used.

[0039] Although terms such as first, second, third, etc., may be used in this document to describe multiple elements, components, regions, layers, and / or segments, these elements, components, regions, layers, and / or segments should not be limited by these terms. These terms may be used only to distinguish one element, component, region, layer, or segment from another. Unless the context clearly indicates otherwise, terms such as "first," "second," and other numerical terms used herein do not imply order or sequence. Therefore, the first element, component, region, layer, or segment discussed below may be referred to as the second element, component, region, layer, or segment without departing from the teachings of the exemplary embodiments.

[0040] For ease of description, spatial relative terms may be used in the text to describe the relationship of one element or feature relative to another element or feature, as shown in the figure. These relative terms include, for example, "inside," "outside," "middle," "outer," "below," "below," "above," "over," etc. Such spatial relative terms are intended to include different orientations of the device in use or operation, other than those depicted in the figure. For example, if the device in the figure is flipped, an element described as "below other elements or features" or "below other elements or features" would subsequently be oriented as "above other elements or features" or "above other elements or features." Therefore, the example term "below" can include both upper and lower orientations. The device may be otherwise oriented (rotated 90 degrees or in other directions), and the spatial relative descriptors used in the text will be interpreted accordingly.

[0041] In working environments containing fine particles, the radial clearance between the vacuum pump rotor and the inner wall of the pump chamber, as well as the axial clearance between the rotor end face and the end cover, easily become core areas for dust particle accumulation. Long-term static accumulation of fine particles can lead to several problems. First, it increases the frictional resistance between the rotor and the pump chamber / end cover, causing rotor jamming, and in severe cases, burning out the drive motor and damaging equipment components. Second, accumulated dust exacerbates wear on the rotor surface, shortens its service life, and impairs sealing performance, resulting in media leakage, flow rate reduction, and affecting conveying efficiency or process stability.

[0042] To address the issue of dust accumulation, various technologies employ methods such as adding additional cleaning devices, increasing clearances, or periodic disassembly and cleaning. However, additional cleaning devices increase equipment structural complexity and manufacturing costs, and are prone to interfering with rotor movement. Increasing clearances severely reduces equipment sealing performance and flow efficiency. Periodic disassembly and cleaning, on the other hand, increases maintenance costs and impacts production continuity.

[0043] In view of this, this embodiment provides a rotor that solves the above-mentioned technical problems by designing biomimetic structures on the end face and circumferential surface of the rotor.

[0044] Combined with appendix Figure 1 and attached Figure 2 As shown, this embodiment provides a rotor, including a rotor body 100. The rotor may also include a shaft and keyways (not shown in the figure). The rotor can be applied to rotating fluid machinery such as rotor pumps, fans, and compressors.

[0045] The rotor body 100 includes a base portion 30 and a claw portion 40 extending from the base portion 30. On one side of the claw portion 40, the base portion 30 is provided with a notch portion 50. The outer peripheral surface 10 of the entire rotor body 100 is composed of the outer peripheral surface 10 of the base portion 30, the outer peripheral surface 10 of the claw portion 40, and the outer peripheral surface 10 of the notch portion 50.

[0046] Multiple annular microgrooves 11 are formed on the outer peripheral surface 10 of the entire rotor body 100. The multiple annular microgrooves 11 are arranged sequentially along the axial direction (the extension direction of the rotation axis) of the rotor body 100, and the spacing between two adjacent annular microgrooves 11 can be constant.

[0047] The length of the annular microgroove 11 extends in a closed loop along the circumference of the rotor body 100. It should be noted that the "annular" in the annular microgroove 11 of this embodiment should be interpreted in a broad sense, that is, it is not necessarily a circular ring, but can also be an approximately circular ring or other annular rings that are closed along the outer circumferential surface 10 of the rotor.

[0048] The depth and width of the annular microgroove 11 are both in the micrometer range, that is, the depth and width of the annular microgroove 11 do not exceed one thousand micrometers. For example, it can be from a few micrometers to several hundred micrometers. The specific range is given below.

[0049] The above structural design is based on the applicant's discovery that existing methods and structures for preventing dust accumulation all require a significant increase in costs, such as maintenance or production costs. Although there are some microgrooves on the surface of shark skin, these microgrooves not only prevent the accumulation of impurities such as microorganisms and algae, but also make the surface of shark skin smoother and more conducive to the shark's swimming.

[0050] Research has revealed that the reason lies in the fact that the micron-sized grooves distributed along the water flow direction on the surface of shark skin can reduce fluid friction resistance by changing the turbulent structure of the near-wall fluid, weakening the strong shearing effect between the flow vortex and the wall, and forming microscale lubricating vortices. At the same time, this microgroove structure significantly reduces the effective contact area of ​​attached organisms such as microorganisms and algae, disrupting their stable colonization conditions. Combined with the gas-liquid isolation effect between the interfaces, it achieves anti-adhesion and self-cleaning effects.

[0051] Therefore, the rotor body 100 of this embodiment is designed with a biomimetic structure of annular microgrooves 11. By setting the annular microgrooves 11 along the rotation circumference of the rotor body 100, the flow state of the near-wall airflow of the rotor body 100 when it rotates at high speed is changed, the low-speed airflow boundary layer on the surface of the rotor body 100 is destroyed, thereby quickly throwing out the particles and reducing particle sedimentation and adhesion.

[0052] At the same time, the centrifugal force of the rotor body 100 during rotation and the turbulence formed by the annular microgroove 11 further reduce the possibility of dust particles accumulating on the outer circumferential surface 10 of the rotor body 100, thereby reducing the possibility of rotor jamming and improving the operational stability of the vacuum pump.

[0053] In some embodiments, the maximum groove depth of the annular microgroove 11 is less than or equal to 100 micrometers, the maximum groove width of the annular microgroove 11 is less than or equal to 150 micrometers, and the maximum axial distance between two adjacent annular microgrooves 11 is less than or equal to 250 micrometers.

[0054] The groove depth refers to the depth of the annular microgroove 11 in the radial direction along the rotor body 100, the groove width refers to the width of the annular microgroove 11 in the axial direction along the rotor body 100, and the maximum axial distance of the annular microgroove 11 refers to the center distance between two annular microgrooves 11 in the axial direction along the rotor body 100.

[0055] This numerical design clarifies the reasonable upper limit of the micron-scale structure of the annular microgroove 11, ensuring that particle deposition is suppressed while avoiding a reduction in the structural strength of the rotor body 100 due to excessively large microgroove size.

[0056] Furthermore, in some embodiments, the maximum groove depth of the annular microgroove 11 ranges from 30 micrometers to 80 micrometers, for example, the maximum groove depth can be 30 micrometers, 40 micrometers, 50 micrometers, 60 micrometers, 70 micrometers, and 80 micrometers, etc.

[0057] The maximum width of the annular microgroove 11 ranges from 50 micrometers to 100 micrometers. For example, the maximum width can be 50 micrometers, 60 micrometers, 70 micrometers, 80 micrometers, 90 micrometers, and 100 micrometers.

[0058] The maximum axial distance between two adjacent annular microgrooves 11 ranges from 100 micrometers to 200 micrometers. The maximum axial distance refers to the center distance between the two annular microgrooves 11 along the axial direction of the rotor body 100. Specifically, the maximum axial distance can be 100 micrometers, 120 micrometers, 140 micrometers, 160 micrometers, 180 micrometers, and 200 micrometers, etc.

[0059] The following description, in conjunction with Table 1, compares the effects of the annular microgroove 11 of the above-mentioned dimensions in this embodiment with the effects of annular microgroove 11 of other dimensions in comparative examples.

[0060] The test conditions for each embodiment and comparative example in Table 1 are the same. Specifically, the rotor drive speed is set to 3000 r / min; the dust used is SiO2 dust with a particle size distribution of 1 μm to 5 μm and a dust concentration controlled at 50 mg / m³; and the test duration is uniformly 60 min.

[0061] The deposition rate test method is as follows: After the test, the dust deposited on the rotor surface is cleaned with ethanol using ultrasonic cleaning, the cleaning liquid is collected, dried and weighed, and the surface deposition rate (mg / cm²) is calculated based on the dust mass per unit area; the deposition coverage rate (%) is obtained by statistically analyzing the proportion of the dust-attached area on the rotor surface to the total test area using high-definition microscopic imaging combined with image analysis software.

[0062] The sampling locations in Table 1 are the central axial region of the outer peripheral surface 10 of the rotor body 100, and the sampling locations in Table 2 below are the radial central region of the end face 20. The average value of three sets of parallel test data is taken for each sample.

[0063] In addition, it should be noted that the test methods and test conditions in Table 2 are the same as those described above, and will not be repeated in this embodiment.

[0064]

[0065] Table 1 The surface deposition rate of existing smooth rotors is generally 1.0 to 1.1 mg / cm², with a deposition coverage of over 90%.

[0066] As can be seen from Table 1 above, compared with the existing smooth rotor body 100, the rotor body 100 with annular microgrooves 11 but whose size range exceeds the preferred values ​​of this embodiment can effectively reduce the surface deposition rate and deposition coverage.

[0067] The rotor body 100 with groove depth, groove width and adjacent groove spacing in Examples 1-3 has a lower surface deposition rate and deposition coverage, which makes the biomimetic annular microgroove 11 more compatible with the airflow field and can further improve the turbulence and centrifugal dust removal effect.

[0068] Combined with appendix Figure 2 As shown, in some embodiments, the width of the annular microgroove 11 in this embodiment gradually increases along the direction away from the rotation axis (or rotation center) of the rotor body 100.

[0069] Specifically, on the radial cross section of the rotor body 100, the annular microgroove 11 can be triangular, conical, trapezoidal, etc. This embodiment will not list them all, as long as the groove width of the annular microgroove 11 can gradually increase along the rotation axis away from the rotor body 100.

[0070] This structural design creates an annular microgroove 11 with a gradually increasing width outwards. Particles entering the annular microgroove 11 can be discharged more smoothly from the gradually increasing groove opening under the centrifugal force of the rotor, further reducing the possibility of stagnation and blockage. At the same time, it can also reduce airflow disturbance resistance to a certain extent, further reducing dust deposition and accumulation.

[0071] Combined with appendix Figure 1 , 3 As shown in Figure 4, in order to reduce dust accumulation on the end face 20 of the rotor body 100, this embodiment also improves the structure of the end face 20 of the rotor body 100. A flow guiding structure 21 is provided on at least one of the two end faces 20 of the rotor body 100 that are opposite in the axial direction. The flow guiding structure 21 is used to guide the airflow to flow towards the outer peripheral surface 10. The flow guiding structure 21 includes at least one flow guiding air passage pointing from the axis of the rotor body 100 to the outer peripheral edge.

[0072] It should be noted that, Figure 4 Multiple arrows extending from the radially protruding column 211 on both sides to the outer peripheral surface 10 indicate the airflow direction. Figure 4 The three parallel arrows on the annular microgroove 11 also indicate the airflow direction.

[0073] The airflow can be guided along the end face 20 to the outer peripheral face 10 by the flow guide structure 21, which reduces the possibility of dust particles accumulating on the end face 20. At the same time, the annular microgroove 11 on the outer peripheral face 10 is used to discharge dust, thereby achieving anti-deposition protection for the entire surface of the rotor and further improving the vacuum pump's anti-dust jamming ability and operational stability.

[0074] In some embodiments, the flow guiding structure 21 includes a plurality of micro protrusions 211. The height, width and spacing between two adjacent micro protrusions 211 are at the micrometer level. The micrometer level has been explained above and will not be repeated in this embodiment.

[0075] A guide gap 212 is formed between two adjacent micro-protrusions 211, and multiple guide gaps 212 define a guide air passage that guides the airflow to flow to the outer peripheral surface 10.

[0076] This structure utilizes the anti-adhesion properties of the micro-protrusions 211. Dust particles flow along the guide gaps 212 formed by the micro-protrusions 211 toward the edge of the rotor body 100 and eventually converge into the annular micro-groove 11. They are then discharged to the exhaust port along with the airflow, achieving coordinated discharge of dust in the axial and radial gaps of the rotor body 100 and effectively preventing dust from accumulating in the gaps between rotors.

[0077] The applicant discovered this structural design by chance, as the micro-protrusions 211 on the surface of plant leaves also have anti-adhesion properties. Based on this property, this embodiment designs the arrangement of the micro-protrusions 211 so that they can guide the airflow to the outer peripheral surface 10. This not only reduces the possibility of dust particles accumulating on the end face 20, but also allows the dust particles to be discharged through the annular microgrooves 11 on the outer peripheral surface 10 to the exhaust port of the vacuum pump.

[0078] In some embodiments, the plurality of micro protrusions 211 are arranged in an array. Specifically, the plurality of protrusions form multiple rows along the radial direction of the end face 20, and the plurality of protrusions form multiple columns along the circumferential direction of the end face 20.

[0079] This array configuration allows the micro-protrusions 211 to create orderly disturbances and guides to the airflow at the end face 20 of the rotor body 100 when the rotor body 100 rotates, thus more efficiently throwing dust particles toward the edge of the rotor body 100, which is conducive to the dust entering the annular micro-groove 11 and being discharged with the airflow.

[0080] In some embodiments, the multiple rows of micro-protrusions 211 are arranged in multiple concentric rings along the circumference of the end face 20, and the multiple columns of micro-protrusions 211 are arranged radially along the radial direction of the end face 20.

[0081] The multiple micro-protrusions 211 are designed as a combination of concentric ring arrangement and radial arrangement. When the rotor body 100 rotates, the airflow on the end face 20 can form a uniform and outward guiding channel during the rotation process, which further enhances the radial guiding and centrifugal throwing effect on the particles and improves the overall anti-deposition effect of the end face 20.

[0082] In some embodiments, the micro-protrusion 211 gradually increases in size along the direction perpendicular to its column and then gradually decreases, wherein the side of the micro-protrusion 211 that gradually increases in size is closer to the axis of the rotor body 100 than the side that gradually decreases in size.

[0083] The structure, which gradually increases in size and then gradually decreases in size, combined with the centrifugal force of the rotor rotation, can quickly guide and throw out the contacted particles. At the same time, a uniform microchannel is formed between adjacent protrusions to prevent particles from accumulating in the gaps, thereby improving the anti-deposition effect of the end face 20.

[0084] In some embodiments, the outer contour of the micro-protrusion 211 is a continuous and smooth curve. This design enables the micro-protrusion 211 to form a continuous and smooth biomimetic surface, which can reduce airflow adhesion and eddy formation, making it less likely for dust to remain on the surface of the micro-protrusion 211.

[0085] In some embodiments, along the direction away from the axis of the rotor body 100, the micro protrusion 211 includes a first part 2111 and a second part 2112 connected in sequence. The first part 2111 is circular, and the second part 2112 is conical with a rounded transition surface at the tip.

[0086] Specifically, along the direction of the column where the micro-protrusions 211 are located, each micro-protrusion 211 includes a first part 2111 and a second part 2112 connected in sequence. The first part 2111 is circular, and the second part 2112 is conical with a rounded transition surface at the tip. The minimum distance between the first part 2111 and the axis of the rotor body 100de is less than the minimum distance between the second part 2111 and the axis of the rotor body 100de.

[0087] The first part 2111 and the second part 2112 form a biomimetic gourd-shaped protrusion structure, which is more in line with the biomimetic shape of plant papillae. It can effectively disturb the airflow and radially guide dust, while using the rounded transition at the tip to avoid stress concentration, thus balancing the guiding effect and structural reliability.

[0088] In some embodiments, the maximum height of the micro-protrusion 211 is less than or equal to 150 micrometers, the maximum width of the micro-protrusion 211 is not greater than 200 micrometers, and the spacing between two adjacent micro-protrusions 211 is not greater than 400 micrometers.

[0089] The height of the micro-protrusion 211 refers to the axial protrusion height of the micro-protrusion 211 along the rotor body 100. The width of the micro-protrusion 211 refers to the straight-line distance between opposite sides of the micro-protrusion 211 along the circumference of the end face 20 of the rotor body 100. The spacing between two micro-protrusions 211 refers to the maximum distance between the two micro-protrusions 211 along the circumference of the end face 20 of the rotor body 100. Micron-sized protrusions can effectively create airflow disturbance and guidance without increasing the rotational resistance of the rotor body due to excessive size.

[0090] In some embodiments, the maximum height of the microprotrusion 211 is 50 to 100 micrometers, the maximum width of the microprotrusion 211 is 80 to 150 micrometers, and the spacing between two adjacent microprotrusions 211 is 200 to 300 micrometers.

[0091] Specifically, the maximum height of the micro-protrusion 211 can be 50 micrometers, 60 micrometers, 70 micrometers, 80 micrometers, 90 micrometers, and 100 micrometers, etc. The maximum width of the micro-protrusion 211 can be 80 micrometers, 100 micrometers, 120 micrometers, 140 micrometers, and 150 micrometers, etc. The spacing between two adjacent micro-protrusions 211 can be 200, 220 micrometers, 250 micrometers, 270 micrometers, 290 micrometers, and 300 micrometers, etc., which will not be listed in detail in this embodiment.

[0092] The following comparison, in conjunction with Table 2, illustrates the effect of the micro-protrusion 211 of the above-mentioned size in this embodiment and the effect of the micro-protrusion 211 of other sizes in comparative examples.

[0093]

[0094] Table 2 Through the above experimental steps, it was found that the deposition rate of the end face 20 of the existing smooth rotor is generally greater than 1.0 mg / cm², and the deposition coverage is over 90%.

[0095] As can be seen from Table 2 above, compared with the existing smooth rotor body 100, the rotor body 100 with a raised end face 20 but a size range exceeding the preferred values ​​of this embodiment can also effectively reduce the surface deposition rate and deposition coverage.

[0096] The surface deposition rate and deposition coverage of the rotor body 100 in Examples 1-3 are in a lower range, which makes the biomimetic flow guiding structure 21 more compatible with the airflow field and further improves the ability of the rotor body 100 to resist dust retention and accumulation.

[0097] In addition to the above-mentioned structural improvements on the outer peripheral surface 10 and end face 20 of the rotor body 100, this embodiment also optimizes the profile of the rotor body 100, forming an optimized cycloidal-circular arc composite profile.

[0098] Specifically, in conjunction with the appendix Figure 5 As shown, in this embodiment, the rotor body 100 is sequentially divided into segments AB, BC, CD, DE, EF, FG, GH, HI, IJ, JK, KL, LM, and MA according to the linear shape. It should be noted that the above English labels are for ease of understanding only and are not the reference numerals for the actual structure.

[0099] In some embodiments, along the circumferential direction of the base portion 30, and from the first end 31 adjacent to the claw portion 40 to the second end 32 adjacent to the notch portion 50, the outer peripheral surface 10 of the base portion 30 is smoothly connected by a first curved segment (DE segment) and a second curved segment (EF segment).

[0100] The minimum radius of curvature of the first curve segment is greater than the maximum radius of curvature of the second curve segment, and the arc length of the first curve segment is greater than the arc length of the second curve segment. Specifically, the arc length of the first curve segment can be two to five times the arc length of the second curve segment.

[0101] Furthermore, from the first end 31 to the second end 32, the radii of curvature of both the first and second curved segments gradually decrease. This design allows the base portion 30 to better adapt to the airflow trajectory, preventing the formation of low-speed dead zones within the flow channel and ensuring high-flow-rate transmission.

[0102] The reason is that when the airflow moves in a curve, it is constrained by centrifugal force and the outer peripheral surface 10 of the rotor body 100, forming a streamline with gradually changing curvature. When the radius of curvature of the rotor body 100 decreases synchronously with the curvature of the airflow trajectory, the tangent direction of the outer peripheral surface 10 of the rotor body 100 can be basically consistent with the direction of airflow velocity, so that the airflow does not need to be forced to change direction significantly and can flow smoothly along the outer peripheral surface 10 of the rotor body 100.

[0103] Similarly, the claw portion 40 can be adapted. Along the circumferential direction of the rotor body 100, the claw portion 40 includes a first side 41 (BC segment and CD segment), a second side 42 (AB segment) and a third side 43 (LM segment and MA segment) connected at an angle in sequence. The first side 41 is connected to the first curved segment, and the third side 43 is connected to the notch portion 50. The third side 43 is an arc surface.

[0104] Along the arrangement direction from the third side 43 to the second side 42, the radius of curvature of the second side 42 gradually decreases. Designing the radius of curvature of the second side 42 to gradually decrease makes the claw part 40 more adaptable to the airflow trajectory, further reducing the possibility of low-speed dead zones forming in the airflow channel.

[0105] In some embodiments, the rotor body 100 with the above structure can control the radial clearance between the rotor body 100 and the inner wall of the vacuum pump cavity to 0.1mm to 0.3mm, which balances sealing performance and anti-jamming redundancy, prevents media leakage, and provides reasonable space for dust evacuation.

[0106] In some embodiments, a polytetrafluoroethylene coating may be applied to the rotor body 100 to improve the wear resistance and anti-adhesion properties of the rotor body 100, extend the rotor service life, reduce equipment replacement costs, and improve production continuity.

[0107] Based on the rotor body 100 described above, the present invention provides a vacuum pump, which can be a claw-type vacuum pump, including a pump body (not shown in the figure) and the aforementioned rotor. The pump body is provided with an air inlet and an exhaust outlet. The rotor is rotatably mounted in the pump body around its own axial direction, and the rotor body 100 rotates within the pump chamber of the vacuum pump to achieve vacuuming operations.

[0108] The above description is merely a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in the present invention should be included within the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be determined by the scope of the claims.

Claims

1. A rotor, characterized in that, The rotor body (100) includes a rotor body (100). The outer peripheral surface (10) of the rotor body (100) is provided with a plurality of annular microgrooves (11). The plurality of annular microgrooves (11) are arranged at intervals along the axial direction of the rotor body (100), and the length of each annular microgroove (11) extends in a closed manner along the circumference of the rotor body (100). The groove depth and groove width of the annular microgrooves (11) are both at the micrometer level.

2. The rotor according to claim 1, characterized in that, Along the direction away from the axis of the rotor body (100), the width of the annular microgroove (11) gradually increases.

3. The rotor according to claim 1, characterized in that, The rotor body (100) has two end faces (20) arranged opposite each other along the axial direction. At least one of the two end faces (20) is provided with a flow guiding structure (21). The flow guiding structure (21) includes at least one flow guiding passage pointing from the axis of the rotor body (100) to the outer periphery.

4. The rotor according to claim 3, characterized in that, The flow guiding structure (21) includes a plurality of micro protrusions (211), the height and width of the micro protrusions (211) and the spacing between two adjacent micro protrusions (211) are at the micrometer level, and a flow guiding gap (212) is formed between two adjacent micro protrusions (211), and the plurality of flow guiding gaps (212) define the flow guiding channel.

5. The rotor according to claim 4, characterized in that, The plurality of micro-protrusions (211) are arranged in multiple rows radially along the end face (20) and in multiple columns circumferentially along the end face (20).

6. The rotor according to claim 5, characterized in that, The multiple rows of micro-protrusions (211) are arranged concentrically in multiple rings along the circumference of the end face (20), and the multiple columns of micro-protrusions (211) are arranged radially along the radial direction of the end face (20).

7. The rotor according to claim 6, characterized in that, The micro-protrusion (211) gradually increases in size and then gradually decreases in size along the direction perpendicular to its column, wherein the side of the micro-protrusion (211) that gradually increases in size is closer to the axis of the rotor body (100) than the side that gradually decreases in size.

8. The rotor according to claim 7, characterized in that, The outer contour of the micro-protrusion (211) is a continuous and smooth curve.

9. The rotor according to claim 8, characterized in that, Along the direction of the column where the micro-protrusions (211) are located, each micro-protrusion (211) includes a first part (2111) and a second part (2112) connected in sequence. The first part (2111) is circular, and the second part (2112) is conical with a rounded transition surface at the tip. The minimum distance between the first part (2111) and the axis of the rotor body (100) is less than the minimum distance between the second part (2111) and the axis of the rotor body (100).

10. The rotor according to any one of claims 1-9, characterized in that, The rotor body (100) includes a base portion (30) and a claw portion (40) extending from the base portion (30). A notch portion (50) is provided between the base portion (30) and the claw portion (40). Along the circumference of the base portion (30), from the first end (31) adjacent to the claw portion (40) to the second end (32) adjacent to the notch portion (50), the outer peripheral surface (10) of the base portion (30) is smoothly connected by a first curved segment and a second curved segment. The minimum radius of curvature of the first curved segment is greater than the maximum radius of curvature of the second curved segment. The arc length of the first curved segment is greater than the arc length of the second curved segment. From the first end (31) to the second end (32), the radius of curvature of the first curved segment and the second curved segment gradually decreases.

11. The rotor according to claim 10, characterized in that, Along the circumferential direction of the rotor body (100), the claw portion (40) includes a first side (41), a second side (42), and a third side (43) connected at an angle in sequence. The first side (41) is connected to the first curved segment, and the third side (43) is connected to the notch portion (50). The third side (43) is an arc surface, and along the direction from the third side (43) to the second side (42), the radius of curvature of the second side (42) gradually decreases.

12. A vacuum pump, characterized in that, It includes a pump body and a rotor as described in any one of claims 1-11, the rotor being mounted in the pump body in a manner rotatable about its own axis.

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