Gas circuit control system, gas circuit control method and transmission valve

Abstract

This invention discloses a gas path control system, a gas path control method, and a transmission valve. The gas distribution device has a first gas inlet and a second gas inlet. A first gas flow channel connects the gas distribution device and a longitudinal cylinder. When gas enters through the first gas inlet, the longitudinal cylinder moves upward and exhausts gas through the second gas inlet. A second gas flow channel connects the gas distribution device and the longitudinal cylinder. When gas enters through the second gas inlet, the longitudinal cylinder moves downward and exhausts gas through the first gas inlet. A third gas flow channel connects the gas distribution device and a transverse cylinder. When gas enters through the first gas inlet, the transverse cylinder tilts forward and exhausts gas through the second gas inlet. A fourth gas flow channel connects the gas distribution device and the transverse cylinder. When gas enters through the second gas inlet, the transverse cylinder tilts backward and exhausts gas through the first gas inlet. This invention overcomes the technical problems of cumbersome gas path layout, large volume, increased risk of gas leakage, and poor reliability of state switching.

Description

Technical Field

[0001] This invention relates to the field of semiconductor manufacturing equipment and vacuum technology, specifically to a gas path control system, a gas path control method, and a transmission valve. Background Technology

[0002] In the semiconductor manufacturing process, the cleanliness of the wafer transfer environment directly affects the product yield. As a key component connecting different vacuum chambers, the vacuum transfer valve's moving parts generate tiny particles due to friction during opening and closing, which can contaminate the wafer. Therefore, higher requirements are placed on the motion control of the vacuum transfer valve. To reduce the generation of fine particles, the sealing component (valve plate) of the vacuum transfer valve needs to move along a specific spatial trajectory to minimize friction between the valve plate and the sealing surface. For example, an L-shaped motion trajectory is used, employing two sets of cylinders (e.g., a longitudinal cylinder and a transverse cylinder). Each set has two cylinders: one set of longitudinal cylinders moves the valve plate up and down, and the other set of transverse cylinders moves the valve plate back and forth. This motion trajectory reduces friction between the valve plate and the sealing surface, thus reducing the generation of fine particles. However, in order to enable multiple sets of cylinders to work independently without interfering with each other, and to drive the cylinders for precise sequential control and reliable state switching, a large number of independent valve bodies need to be arranged and connected by external pipelines. This results in a complicated pipeline layout with numerous connection points, low system integration, large volume, and increased risk of gas leakage, leading to unstable pressure control. At the same time, in the complex interlocking conditions of multiple check valves working together, the control pressure transmission is prone to mutual interference, and the reliability of state switching is difficult to guarantee, making it difficult to meet the requirements of long-term stable operation of vacuum transmission valves. Summary of the Invention

[0003] To address the aforementioned shortcomings in related technologies, the aim is to provide a gas path control system, gas path control method, and transmission valve to solve the technical problems of cumbersome gas path layout, large volume, increased risk of gas leakage, and poor reliability of state switching in related technologies. The technical solution to achieve the objective is: a gas path control system, including: Longitudinal cylinder; The transverse cylinder is angled relative to the longitudinal cylinder; The gas distribution device has a first gas inlet and a second gas inlet. The first gas flow channel connects the gas distribution device and the longitudinal cylinder. When air enters through the first gas inlet, the longitudinal cylinder moves upward and exhausts air through the second gas inlet. The second gas flow channel connects the gas distribution device and the longitudinal cylinder. When air enters through the second gas inlet, the longitudinal cylinder moves downward and exhausts air through the first gas inlet. The third gas flow channel connects the gas distribution device and the horizontal cylinder. When air enters through the first air inlet, the horizontal cylinder moves forward and exhausts air through the second air inlet. And a fourth gas flow channel, which connects the gas distribution device and the transverse cylinder. When air enters through the second air inlet, the transverse cylinder tilts backward and exhausts air through the first air inlet.

[0004] Furthermore: the gas distribution device includes: a gas distribution body, which is connected to the first gas flow channel, the second gas flow channel, the third gas flow channel and the fourth gas flow channel, for distributing gas; The pressure regulating body is located at the notch on the gas distribution body; And several connecting screws, connecting the gas distribution body and the pressure regulating body.

[0005] Furthermore: the gas distribution body includes: a gas distribution valve housing, the gas distribution valve housing having a first installation space, a second installation space, a third installation space, a fourth installation space, a fifth installation space and a sixth installation space, and the gas distribution valve housing having a first gas inlet and a second gas inlet; A first mechanical control valve is connected to the gas distribution valve housing and is disposed in the fifth installation space; The second mechanical control valve is connected to the gas distribution valve housing and is disposed in the sixth installation space at an angle to the first mechanical control valve. A first one-way valve is disposed on the housing of the gas distribution valve and disposed in the first installation space; The second one-way valve is disposed on the gas distribution valve housing and disposed in the second installation space; The third one-way valve is disposed on the gas distribution valve housing and disposed in the third installation space; And a fourth one-way valve, which is disposed on the gas distribution valve housing and disposed in the fourth mounting space.

[0006] Furthermore: the pressure regulating body includes: a pressure regulating valve housing connected to the gas distribution valve housing, the pressure regulating valve housing having a seventh mounting space and an eighth mounting space; A first pressure regulating valve is connected to the pressure regulating valve housing and is located in the seventh mounting space; And a second pressure regulating valve, connected to the pressure regulating valve housing, and disposed in the eighth mounting space.

[0007] Furthermore: the gas distribution valve housing includes: a main housing, connected to the pressure regulating body, the first mechanical control valve, the second mechanical control valve, the first one-way valve, the second one-way valve, the third one-way valve, and the fourth one-way valve, and the main housing has a plurality of air guide grooves and a plurality of air passages, the air passages being connected to the first air inlet, the second air inlet, the first mounting space, the second mounting space, the third mounting space, the fourth mounting space, the fifth mounting space, the sixth mounting space, the seventh mounting space, and the eighth mounting space; A bottom cover plate is attached to the bottom of the main housing, covering the air guide groove. The bottom cover plate has a first air port, a second air port, a third air port, and a fourth air port. The first air port, the second air port, the third air port, and the fourth air port are respectively connected to the air guide groove. The first air port is connected to the first gas flow channel, the second air port is connected to the second gas flow channel, the third air port is connected to the third gas flow channel, and the fourth air port is connected to the fourth gas flow channel.

[0008] Furthermore: the air guide groove includes: a first air guide groove, which is connected to the first air port; The second air guide groove is connected to the second air port; The third air guide groove is connected to the third air port; The fourth air guide groove is connected to the fourth air port; And a fifth air guide groove, wherein the fifth air guide groove, the fourth air guide groove, the third air guide groove, the second air guide groove and the first air guide groove are spaced apart.

[0009] Furthermore, the number of gas channels is twenty-seven, used for gas flow, including: a first gas channel; a second gas channel; a third gas channel; a fourth gas channel; a fifth gas channel; a sixth gas channel; a seventh gas channel; an eighth gas channel; a ninth gas channel; a tenth gas channel; an eleventh gas channel; a twelfth gas channel; a thirteenth gas channel; a fourteenth gas channel; a fifteenth gas channel; a sixteenth gas channel; a seventeenth gas channel; an eighteenth gas channel; a nineteenth gas channel; a twentieth gas channel; a twenty-first gas channel; a twenty-second gas channel; a twenty-third gas channel; a twenty-fourth gas channel; a twenty-fifth gas channel; a twenty-sixth gas channel; and a twenty-seventh gas channel.

[0010] The gas path control method, based on the aforementioned gas path control system, includes: Firstly, the longitudinal cylinder moves upward: the first air inlet, the first air passage, the first one-way valve, the fifth air passage, the first air guide groove, and the first gas flow channel are connected to form an air passage one; The air passage one receives air through the first air inlet, which drives the longitudinal piston on the longitudinal cylinder to move upward; Meanwhile, the second gas flow channel, the second gas guide groove, the seventh gas channel, the eighth gas channel, the ninth gas channel, the tenth gas channel, the eleventh gas channel, the second mechanical control valve, the fourth gas guide groove, the twelfth gas channel, the thirteenth gas channel, the second one-way valve and the second gas inlet are connected to form a second gas path, and the second gas path exhausts gas through the second gas inlet; Furthermore, during the upward stroke, the first air inlet, the first air passage, the first one-way valve, and the second one-way valve are connected to form air passage three. Air passage three enters through the first air inlet, the first one-way valve is open in one direction, and the second one-way valve is fully open. Secondly, the lateral cylinder moves forward: the lateral piston on the lateral cylinder moves to a position that triggers the first mechanical control valve to open, connecting the first air inlet, the first air passage, the second air passage, the fifth air guide groove, the fourth air passage, the first mechanical control valve, the fifteenth air passage, the nineteenth air passage, the first pressure regulating valve, the twentieth air passage, the second pressure regulating valve, the twenty-fifth air passage, the twenty-second air passage, the twenty-third air passage, the twenty-fourth air passage, the third one-way valve, the third air guide groove, and the third gas flow channel to form air path four. Air path four enters through the first air inlet, pushing the lateral piston on the lateral cylinder to move forward. At the same time, the fourth gas flow channel, the fourth one-way valve, the thirteenth gas channel, the second one-way valve, and the second gas inlet are connected to form gas path five, and gas path five exhausts gas through the second gas inlet; Furthermore, during the forward stroke, the first air inlet, the first air passage, the second air passage, the third air passage, the fifth air guide groove, the fourth air passage, the first mechanical control valve, the fifteenth air passage, the sixteenth air passage, the seventeenth air passage, the eighteenth air passage, and the fourth one-way valve are connected to form air passage six, and the fourth one-way valve is fully open; Third, the lateral cylinder tilts backward: the lateral piston moves backward, triggering the second mechanical control valve to close, and the second air inlet, the second one-way valve, the thirteenth air passage, the twelfth air passage, the fourth air guide groove and the fourth gas flow passage are connected to form air passage seven. Air passage seven enters through the second air inlet, driving the lateral piston to move backward. Simultaneously, the third gas flow channel, the third gas guide groove, the third one-way valve, the twenty-fourth gas channel, the twenty-third gas channel, the twenty-second gas channel, the twenty-fifth gas channel, the second pressure regulating valve, the twenty-tenth gas channel, the first pressure regulating valve, the nineteenth gas channel, the fifteenth gas channel, the first mechanical control valve, the fourth gas channel, the fifth gas guide groove, the third gas channel, the second gas channel, the first gas channel, and the first gas inlet are connected to form gas path eight, and gas path eight exhausts through the first gas inlet; Furthermore, during the backward tilting stroke, the second air inlet, the second one-way valve, the thirteenth air passage, the twelfth air passage, the fourteenth air passage, and the third one-way valve are connected to form air passage nine, and the third one-way valve is fully open; Fourth, the longitudinal cylinder moves downward: the transverse piston triggers the second mechanical control valve to open, and the second air inlet, the second one-way valve, the thirteenth air passage, the twelfth air passage, the fourth air guide groove, the second mechanical control valve, the eleventh air passage, the tenth air passage, the ninth air passage, the eighth air passage, the seventh air passage, the second air guide groove and the second gas flow channel are connected to form air passage ten. Air passage ten enters through the second air inlet, driving the longitudinal piston to move downward. Meanwhile, the first gas flow channel, the first gas guide groove, the fifth gas channel, the first one-way valve, the first gas channel and the first gas inlet are connected to form gas path eleven, and the gas path eleven exhausts gas through the first gas inlet; Furthermore, during the downward stroke, the second air inlet, the second one-way valve, the thirteenth air passage, the twelfth air passage, the fourth air guide groove, the second mechanical control valve, the eleventh air passage, the tenth air passage, the ninth air passage, the eighth air passage, the seventh air passage, the second air guide groove, the twenty-sixth air passage, the twenty-seventh air passage, and the first one-way valve are connected to form air passage twelve, and the first one-way valve is fully open.

[0011] The transmission valve includes the aforementioned air circuit control system.

[0012] Furthermore, the transmission valve further includes a valve body for providing the first gas flow channel, the second gas flow channel, the third gas flow channel, the fourth gas flow channel, the longitudinal cylinder, and the transverse cylinder, and is connected to the gas distribution device; A bridge connector is slidably connected to a groove on the valve body. The bridge connector is moved along the groove by the longitudinal cylinder and is slidably connected to the transverse cylinder. The valve shaft is connected to the bridge connector, and one end extends out of the valve body; A valve plate, connected to one end of the valve shaft, is disposed outside the valve body; And several cover plates are connected to the valve body, covering the longitudinal cylinder, the transverse cylinder, the bridge connector, the valve shaft and the air distribution device.

[0013] The above technical solution has the following beneficial effects: the gas path control system, gas path control method and transmission valve are equipped with a gas distribution device, a first gas flow channel, a second gas flow channel, a third gas flow channel and a fourth gas flow channel compared with related technologies. The gas distribution device has a first gas inlet and a second gas inlet; a first gas flow channel connects the gas distribution device and a longitudinal cylinder. When air enters through the first gas inlet, the longitudinal cylinder moves upward and exhausts through the second gas inlet; a second gas flow channel connects the gas distribution device and the longitudinal cylinder. When air enters through the second gas inlet, the longitudinal cylinder moves downward and exhausts through the first gas inlet; a third gas flow channel connects the gas distribution device and a transverse cylinder. When air enters through the first gas inlet, the transverse cylinder tilts forward and exhausts through the second gas inlet; a fourth gas flow channel connects the gas distribution device and the transverse cylinder. When air enters through the second gas inlet, the transverse cylinder tilts backward and exhausts through the first gas inlet. It achieves a relatively compact gas path layout, a relatively small volume, relatively smooth airflow, reduced risk of gas leakage, relatively stable pressure control, and relatively good reliability of state switching; This overcomes the technical problems of cumbersome gas path layout, large volume, increased risk of gas leakage, and poor reliability of state switching, and achieves the technical effects of relatively compact gas path layout, relatively small volume, reduced risk of gas leakage, relatively stable pressure control, and relatively good reliability of state switching. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the gas circuit control system. Figure 2 This is one of the structural schematic diagrams of a gas separator; Figure 3 This is the second schematic diagram of the gas distribution device; Figure 4 This is one of the exploded diagrams of a gas distribution device; Figure 5 This is the second exploded diagram of the gas distribution device; Figure 6 This is one of the structural schematic diagrams of the first air inlet, the second air inlet, the air passage, and the air guide groove on the air distribution device; Figure 7 This is the second structural schematic diagram of the first air inlet, the second air inlet, the air passage, and the air guide groove on the air distribution device. Figure 8This is the third structural schematic diagram of the first air inlet, the second air inlet, the air passage, and the air guide groove on the air distribution device. Figure 9 This is the fourth structural schematic diagram of the first air inlet, the second air inlet, the air passage, and the air guide groove on the air distribution device. Figure 10 A partial sectional view of the first check valve, the second check valve, the third check valve, or the fourth check valve; Figure 11 This is one of the structural schematic diagrams of a transmission valve; Figure 12 This is the second schematic diagram of the transmission valve. In the diagram: 10. Gas distributor, 11. First gas inlet, 12. Second gas inlet, 101. Gas distributor body, 101-1. Notch, 102. Pressure regulating body, 103. Connecting screw, 10-1. Gas distributor valve housing, 10-11. First installation space, 10-12. Second installation space, 10-13. Third installation space, 10-14. Fourth installation space, 10-15. Fifth installation space, 10-16. Sixth installation space, 10-2. First mechanical control valve, 10-3. Second mechanical control valve, 10-4. First check valve, 10-5. Second check valve, 10-6. Third check valve, 10-7. Fourth check valve, 10-41. Control port, 10-4 2. Air inlet, 10-43. Air outlet, 102-1. Pressure regulating valve housing, 102-11. Seventh installation space, 102-12. Eighth installation space, 102-2. First pressure regulating valve, 102-3. Second pressure regulating valve, 10-1-1. Main housing, 10-1-2. Bottom cover plate, 10-1-21. First air port, 10-1-22. Second air port, 10-1-23. Third air port, 10-1-24. Fourth air port, 10-1-11. First air guide groove, 10-1-12. Second air guide groove, 10-1-13. Third air guide groove, 10-1-14. Fourth air guide groove, 10-1-15. Fifth air guide groove, 10-111. First air passage, 10 -112. Second Qi Channel, 10-113. Third Qi Channel, 10-114. Fourth Qi Channel, 10-115. Fifth Qi Channel, 10-116. Sixth Qi Channel, 10-117. Seventh Qi Channel, 10-118. Eighth Qi Channel, 10-119. Ninth Qi Channel, 10-1110. Tenth Qi Channel, 10-1111. Eleventh Qi Channel, 10-1112. Twelfth Qi Channel, 10-1113. Thirteenth Qi Channel, 10-1114. Fourteenth Qi Channel; 10-1115. Fifteenth Qi Channel; 10-1116. Sixteenth Qi Channel; 10-1117. Seventeenth Qi Channel; 10-1118. Eighteenth Qi Channel; 10-1119. Nineteenth Qi Channel; 10-11 20. Twentieth gas passage; 10-1121. Twenty-first gas passage; 10-1122. Twenty-second gas passage; 10-1123. Twenty-third gas passage; 10-1124. Twenty-fourth gas passage; 10-1125. Twenty-fifth gas passage; 10-1126. Twenty-sixth gas passage; 10-1127. Twenty-seventh gas passage; 20. First gas flow passage; 30. Second gas flow passage; 40. Third gas flow passage; 50. Fourth gas flow passage; 100. Longitudinal cylinder; 100-1. Longitudinal piston; 200. Lateral cylinder; 200-1. Lateral piston; 300. Valve body; 301. Slide groove; 400. Bridge connector; 500. Valve shaft; 600. Valve plate; 700. Cover plate. Detailed Implementation

[0015] To make the content easier to understand, the following detailed description is provided with reference to specific embodiments and accompanying drawings; The gas path control system, gas path control method, and transmission valve solve the technical problems of cumbersome gas path layout, large volume, increased risk of gas leakage, and poor reliability of state switching in related technologies. They achieve the positive effects of a relatively compact gas path layout, relatively small volume, reduced risk of gas leakage, relatively stable pressure control, and relatively good reliability of state switching. The overall approach is as follows: Implementation Method

[0016] like Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 , Figure 7 , Figure 8 , Figure 9 , Figure 10 , Figure 11 , Figure 12 As shown; the gas circuit control system, gas circuit control method, and transmission valve; The gas path control system includes: Longitudinal cylinder 100; The transverse cylinder 200 is set at an angle to the longitudinal cylinder 100; Gas distribution device 10, which has a first gas inlet 11 and a second gas inlet 12; The first gas flow channel 20 connects the gas distribution device 10 and the longitudinal cylinder 100. When the first gas inlet 11 is inlet, the longitudinal cylinder 100 moves upward and exhausts gas through the second gas inlet 12. The second gas flow channel 30 connects the gas distribution device 10 and the longitudinal cylinder 100. When the second gas inlet 12 is inlet, the longitudinal cylinder 100 moves downward and exhausts gas through the first gas inlet 11. The third gas flow channel 40 connects the gas distribution device 10 and the horizontal cylinder 200. When the first gas inlet 11 is inlet, the horizontal cylinder 200 is tilted forward and exhaust is discharged through the second gas inlet 12. And the fourth gas flow channel 50, which connects the gas distribution device 10 and the transverse cylinder 200. When the second gas inlet 12 is inlet, the transverse cylinder 200 tilts backward and exhausts gas from the first gas inlet 11. By reusing the inlet and outlet air of the first air inlet 11 and the second air inlet 12, and cooperating with the first gas flow channel 20, the second gas flow channel 30, the third gas flow channel 40 and the fourth gas flow channel 50, the four working states of the longitudinal cylinder 100 and the transverse cylinder 200 are controlled. This reduces the number of external pipeline connection points, lowers the risk of compressed gas leakage, and improves the stability of pressure control. At the same time, the highly integrated and compact structure reduces the system size, making this gas circuit control system adaptable to various installation environments.

[0017] The specific structure of the gas distribution device 10 is as follows: The gas distribution device 10 includes: a gas distribution body 101, which is connected to the first gas flow channel 20, the second gas flow channel 30, the third gas flow channel 40 and the fourth gas flow channel 50, for gas distribution; a pressure regulating body 102, which is disposed at a notch 101-1 on the gas distribution body 101; and a plurality of connecting screws 103, which connect the gas distribution body 101 and the pressure regulating body 102. The gas distribution body 101 includes: a gas distribution valve housing 10-1, which has a first mounting space 10-11, a second mounting space 10-12, a third mounting space 10-13, a fourth mounting space 10-14, a fifth mounting space 10-15, and a sixth mounting space 10-16; the gas distribution valve housing 10-1 also has a first gas inlet 11 and a second gas inlet 12; a first mechanical control valve 10-2, connected to the gas distribution valve housing 10-1 and disposed in the fifth mounting space 10-15; and a second mechanical control valve 10-3, connected to the gas distribution valve housing 10-1 and disposed in the sixth mounting space 10-16, positioned opposite the first mechanical control valve 10-2. The angle is set to match the angle between the longitudinal cylinder 100 and the transverse cylinder 200, for example, the angle is 90°. The second mechanical control valve 10-3 is set perpendicular to the first mechanical control valve 10-2; the first one-way valve 10-4 is set on the gas distribution valve housing 10-1 and is set in the first mounting space 10-11; the second one-way valve 10-5 is set on the gas distribution valve housing 10-1 and is set in the second mounting space 10-12; the third one-way valve 10-6 is set on the gas distribution valve housing 10-1 and is set in the third mounting space 10-13; and the fourth one-way valve 10-7 is set on the gas distribution valve housing 10-1 and is set in the fourth mounting space 10-14. The gas distribution valve housing 10-1 includes: a main housing 10-1-1, connected to the pressure regulating body 102, the first mechanical control valve 10-2, the second mechanical control valve 10-3, the first one-way valve 10-4, the second one-way valve 10-5, the third one-way valve 10-6, and the fourth one-way valve 10-7. The main housing 10-1-1 has several air guide grooves and several air channels, which connect to the first air inlet 11, the second air inlet 12, the first mounting space 10-11, the second mounting space 10-12, the third mounting space 10-13, the fourth mounting space 10-14, the fifth mounting space 10-15, the sixth mounting space 10-16, the seventh mounting space 102-11, and the eighth mounting space 102-1. 2. A connection is made between the main housing 10-1-1 and the bottom cover plate 10-1-2, which is connected to the bottom of the main housing 10-1-1 and covers the air guide groove. The bottom cover plate 10-1-2 has a first air port 10-1-21, a second air port 10-1-22, a third air port 10-1-23 and a fourth air port 10-1-24. The first air port 10-1-21, the second air port 10-1-22, the third air port 10-1-23 and the fourth air port 10-1-24 are respectively connected to the air guide groove. The first air port 10-1-21 is connected to the first gas flow channel 20, the second air port 10-1-22 is connected to the second gas flow channel 30, the third air port 10-1-23 is connected to the third gas flow channel 40 and the fourth air port 10-1-24 is connected to the fourth gas flow channel 50. The air guide groove includes: a first air guide groove 10-1-11, communicating with the first air port 10-1-21; a second air guide groove 10-1-12, communicating with the second air port 10-1-22; a third air guide groove 10-1-13, communicating with the third air port 10-1-23; a fourth air guide groove 10-1-14, communicating with the fourth air port 10-1-24; and a fifth air guide groove 10-1-15, wherein the fifth air guide groove 10-1-15, the fourth air guide groove 10-1-14, the third air guide groove 10-1-13, the second air guide groove 10-1-12 and the first air guide groove 10-1-11 are spaced apart; The number of air passages is twenty-seven, used for gas flow, including: first air passage 10-111; second air passage 10-112; third air passage 10-113; fourth air passage 10-114; fifth air passage 10-115; sixth air passage 10-116; seventh air passage 10-117; eighth air passage 10-118; ninth air passage 10-119; tenth air passage 10-1110; eleventh air passage 10-1111; twelfth air passage 10-1112; thirteenth air passage 10-1113; fourteenth air passage 10- 1114; Fifteenth Breathway 10-1115; Sixteenth Breathway 10-1116; Seventeenth Breathway 10-1117; Eighteenth Breathway 10-1118; Nineteenth Breathway 10-1119; Twentieth Breathway 10-1120; Twenty-first Breathway 10-1121; Twenty-second Breathway 10-1122; Twenty-third Breathway 10-1123; Twenty-fourth Breathway 10-1124; Twenty-fifth Breathway 10-1125; Twenty-sixth Breathway 10-1126; and Twenty-seventh Breathway 10-1127; It is equipped with a first air inlet 11, a second air inlet 12, an air guide groove and an air passage. The air path layout is relatively compact and occupies a relatively small volume, which reduces the risk of gas leakage and makes the pressure control relatively stable. The first mechanical control valve 10-2, the second mechanical control valve 10-3, the first check valve 10-4, the second check valve 10-5, the third check valve 10-6, and the fourth check valve 10-7 are respectively installed in the mounting space on the gas distribution valve housing 10-1, integrated into one unit, with a relatively compact layout and a relatively small volume. The first mechanical control valve 10-2 and the second mechanical control valve 10-3 are common structures in the prior art, used in conjunction with the transverse piston 200-1. The transverse piston 200-1 triggers them to open or close, which helps to complete the cyclic action of the four strokes of "upward movement → forward tilting → backward tilting → downward movement" without relying on other electronic control components, and the action is relatively smooth. The first check valve 10-4, the second check valve 10-5, the third check valve 10-6, and the fourth check valve 10-7 are commonly used structures in the prior art. Their typical structure includes a valve body, a valve core, a return spring, and a control piston. Control pressure pushes the piston to overcome the spring force, thereby switching the valve core state. They also have a control port 10-41, an inlet port 10-42, and an outlet port 10-43. The pressure at the control port 10-41 changes the on / off state of the check valve. When there is no pressure at the control port 10-41, the check valve only allows gas to flow forward. When the flow is reversed and blocked, this state is called "one-way". When control pressure is introduced into the control port 10-41, the one-way valve switches to a state where both directions can flow, which is called "full-way". This is beneficial for controlling and switching the flow direction of the gas, allowing the gas to flow in different gas paths, thereby realizing the four strokes of "upward movement → forward tilt → backward tilt → downward movement". Those skilled in the art can directly and without doubt know how to set up the one-way valve after seeing the disclosed content, without needing to put in creative effort or conduct excessive experiments. The pressure regulating body 102 includes: a pressure regulating valve housing 102-1, connected to the gas distribution valve housing 10-1, the pressure regulating valve housing 102-1 having a seventh mounting space 102-11 and an eighth mounting space 102-12; a first pressure regulating valve 102-2, connected to the pressure regulating valve housing 102-1 and disposed in the seventh mounting space 102-11; and a second pressure regulating valve 102-3, connected to the pressure regulating valve housing 102-1 and disposed in the eighth mounting space 102-12; The first pressure regulating valve 102-2 is located in the seventh installation space 102-11, the second pressure regulating valve 102-3 is located in the eighth installation space 102-12, and the pressure regulating valve housing 102-1 is located at the notch 101-1. All these components are integrated into one unit, resulting in a relatively compact layout and a relatively small footprint. The first pressure regulating valve 102-2 and the second pressure regulating valve 102-3 are common structures in the prior art, used to adjust the moving speed of the transverse piston 200-1, so that the movement of the transverse piston 200-1 is more stable. When the transverse piston 200-1 moves back and forth in conjunction with the bridge connector 400, valve shaft 500 and valve plate 600, the stability is relatively good, reducing the contact wear between the valve plate 600 and the sealing surface. Those skilled in the art can directly and without doubt know how to set the pressure regulating valve after seeing the disclosed content, without needing to put in creative effort or conduct excessive experiments. The connecting screw 103 is used to connect the gas distribution body 101 and the pressure regulating body 102. It is relatively easy to assemble and has relatively good structural reliability. The valve body 300 is provided with a first gas flow channel 20, a second gas flow channel 30, a third gas flow channel 40, and a fourth gas flow channel 50. For example, the first gas flow channel 20, the second gas flow channel 30, the third gas flow channel 40, and the fourth gas flow channel 50 are gas passages provided on the valve body 300. The partial cross-section of the gas passage is circular. The circular structure is relatively smooth. When pressurized gas flows along it, the frictional resistance is relatively small, which makes the pressurized gas flow relatively smoothly. Alternatively, the first gas flow channel 20, the second gas flow channel 30, the third gas flow channel 40, and the fourth gas flow channel 50 can be external pipes for the purpose of circulating gas.

[0018] The gas path control method, based on the aforementioned gas path control system, includes: Firstly, the longitudinal cylinder 100 moves upward: the first air inlet 11, the first air passage 10-111, the first one-way valve 10-4, the fifth air passage 10-115, the first air guide groove 10-1-11, and the first gas flow passage 20 are connected to form an air passage one; The air passage one takes in air through the first air inlet 11, which drives the longitudinal piston 100-1 on the longitudinal cylinder 100 to move upward; Simultaneously, the second gas flow channel 30, the second gas guide groove 10-1-12, the seventh gas channel 10-117, the eighth gas channel 10-118, the ninth gas channel 10-119, the tenth gas channel 10-1110, the eleventh gas channel 10-1111, the second mechanical control valve 10-3, the fourth gas guide groove 10-1-14, the twelfth gas channel 10-1112, the thirteenth gas channel 10-1113, the second one-way valve 10-5, and the second gas inlet 12 are connected to form a second gas path, and the second gas path exhausts gas through the second gas inlet 12; Furthermore, during the upward stroke, the first air inlet 11, the first air passage 10-111, the first one-way valve 10-4, and the second one-way valve 10-5 are connected to form air passage three. Air passage three enters through the first air inlet 11, the first one-way valve 10-4 is one-way, and the second one-way valve 10-5 is fully open. Secondly, the lateral cylinder 200 moves forward: the lateral piston 200-1 on the lateral cylinder 200 moves to a position that triggers the first mechanical control valve 10-2 to open, opening the first air inlet 11, the first air passage 10-111, the second air passage 10-112, the fifth air guide groove 10-1-15, the fourth air passage 10-114, the first mechanical control valve 10-2, the fifteenth air passage 10-1115, the nineteenth air passage 10-1119, the first pressure regulating valve 102-2, and the second... The tenth air passage 10-1120, the second pressure regulating valve 102-3, the twenty-fifteenth air passage 10-1125, the twenty-twelfth air passage 10-1122, the twenty-thirteenth air passage 10-1123, the twenty-fourth air passage 10-1124, the third one-way valve 10-6, the third air guide groove 10-1-13 and the third gas flow channel 40 are connected to form the fourth air passage. The fourth air passage takes in air through the first air inlet 11 and pushes the transverse piston 200-1 on the transverse cylinder 200 to move forward. Meanwhile, the fourth gas flow channel 50, the fourth one-way valve 10-7, the thirteenth gas channel 10-1113, the second one-way valve 10-5, and the second gas inlet 12 are connected to form gas path five, and gas path five exhausts through the second gas inlet 12. Furthermore, during the forward-leaning stroke, the first air inlet 11, the first air passage 10-111, the second air passage 10-112, the third air passage 10-113, the fifth air guide groove 10-1-15, the fourth air passage 10-114, the first mechanical control valve 10-2, the fifteenth air passage 10-1115, the sixteenth air passage 10-1116, the seventeenth air passage 10-1117, the eighteenth air passage 10-1118, and the fourth one-way valve 10-7 are connected to form air passage six, and the fourth one-way valve 10-7 is fully open; Third, the transverse cylinder 200 tilts backward: the transverse piston 200-1 moves backward, triggering the second mechanical control valve 10-3 to close, and the second air inlet 12, the second one-way valve 10-5, the thirteenth air passage 10-1113, the twelfth air passage 10-1112, the fourth air guide groove 10-1-14 and the fourth gas flow channel 50 are connected to form air passage seven. Air passage seven enters through the second air inlet 12, driving the transverse piston 200-1 to move backward. Simultaneously, the third gas flow channel 40, the third gas guide groove 10-1-13, the third one-way valve 10-6, the twenty-fourth gas channel 10-1124, the twenty-third gas channel 10-1123, the twenty-twelfth gas channel 10-1122, the twenty-fifth gas channel 10-1125, the second pressure regulating valve 102-3, the twenty-first gas channel 10-1120, the first pressure regulating valve 102-2, the nineteenth gas channel 10-1119, the fifteenth gas channel 10-1115, the first mechanical control valve 10-2, the fourth gas channel 10-114, the fifth gas guide groove 10-1-15, the third gas channel 10-113, the second gas channel 10-112, the first gas channel 10-111, and the first gas inlet 11 are connected to form gas path eight, and gas path eight exhausts through the first gas inlet 11; Furthermore, during the backward tilting stroke, the second air inlet 12, the second one-way valve 10-5, the thirteenth air passage 10-1113, the twelfth air passage 10-1112, the fourteenth air passage 10-1114, and the third one-way valve 10-6 are connected to form air passage nine, and the third one-way valve 10-6 is fully open; Fourth, the longitudinal cylinder 100 moves downward: the transverse piston 200-1 triggers the second mechanical control valve 10-3 to open, and the second air inlet 12, the second one-way valve 10-5, the thirteenth air passage 10-1113, the twelfth air passage 10-1112, the fourth air guide groove 10-1-14, the second mechanical control valve 10-3, the eleventh air passage 10-1111, the tenth air passage 10-1110, the ninth air passage 10-119, the eighth air passage 10-118, the seventh air passage 10-117, the second air guide groove 10-1-12 and the second gas flow channel 30 are connected to form air passage ten. Air passage ten enters through the second air inlet 12, driving the longitudinal piston 100-1 to move downward; Simultaneously, the first gas flow channel 20, the first gas guide groove 10-1-11, the fifth gas channel 10-115, the first one-way valve 10-4, the first gas channel 10-111 and the first gas inlet 11 are connected to form gas path eleven, and the gas path eleven exhausts through the first gas inlet 11. Furthermore, during the downward stroke, the second air inlet 12, the second one-way valve 10-5, the thirteenth air passage 10-1113, the twelfth air passage 10-1112, the fourth air guide groove 10-1-14, the second mechanical control valve 10-3, the eleventh air passage 10-1111, the tenth air passage 10-1110, the ninth air passage 10-119, the eighth air passage 10-118, the seventh air passage 10-117, the second air guide groove 10-1-12, the twenty-sixth air passage 10-1126, the twenty-seventh air passage 10-1127, and the first one-way valve 10-4 are connected to form air passage twelve, with the first one-way valve 10-4 fully open; The system achieves an automatic sequential cycle of four strokes: "rise → forward tilt → backward tilt → fall" entirely through pneumatic logic. A first air inlet 11 and a second air inlet 12 are installed within the air distribution device 10 to connect with an external air source and the atmosphere, respectively. Simultaneously, a first one-way valve 10-4, a second one-way valve 10-5, a third one-way valve 10-6, and a fourth one-way valve 10-7 are arranged in the internal air path. These one-way valves all have control ports, allowing them to switch between one-way and full-way states depending on the presence or absence of air pressure at the control ports. The system utilizes the piston displacement of the longitudinal cylinder 100 and the transverse cylinder 200 to trigger the switching or opening / closing of the first mechanical control valve 10-2 and the second mechanical control valve 10-3, respectively. Combined with the four specially constructed one-way valve control air paths, the same air inlet can perform either intake or exhaust functions in different strokes, thus achieving a complete four-step cycle with the fewest possible valve ports.

[0019] The transmission valve includes: the aforementioned gas path control system; and further includes: a valve body 300, used to provide the first gas flow channel 20, the second gas flow channel 30, the third gas flow channel 40, the fourth gas flow channel 50, the longitudinal cylinder 100, and the transverse cylinder 200, and connected to the gas distribution device 10; and a bridge connector 400, slidably connected to a slide groove 301 on the valve body 300, the bridge connector 400 being moved along the slide groove 301 by the longitudinal cylinder 100. The valve body 300 is positioned such that the bridge connector 400 is slidably connected to the transverse cylinder 200; the valve shaft 500 is connected to the bridge connector 400 and one end extends out of the valve body 300; the valve plate 600 is connected to one end of the valve shaft 500 and is disposed outside the valve body 300; and several cover plates 700 are connected to the valve body 300 and cover the longitudinal cylinder 100, the transverse cylinder 200, the bridge connector 400, the valve shaft 500 and the air distribution device 10. The longitudinal cylinder 100, transverse cylinder 200, valve body 300, slide groove 301, bridge connector 400, valve shaft 500, valve plate 600, and cover plate 700 are common structures in the prior art. For example, the longitudinal cylinder 100 includes an end cap, a longitudinal piston 100-1, and a seal; the transverse cylinder 200 includes an end cap, a transverse piston 200-1, and a seal. The longitudinal cylinder 100 and the transverse cylinder 200 are disposed in a preset space on the valve body 300. The slide groove 301 is an "L"-shaped groove. The two ends of the bridge connector 400 are slidably connected to the slide groove 301, and the valve shaft 500 is connected in the middle. The bridge connector 400 is connected to... The piston rod on the longitudinal piston 100-1 is slidably connected to the transverse piston 200-1 (the purpose is that when the longitudinal piston 100-1 moves along the sliding position of the bridge connector 400 along the slide groove 301, it will not move in conjunction with the transverse piston 200-1, but when the transverse piston 200-1 moves back and forth, it can move in conjunction with the bridge connector 400). The valve plate 600 is connected to one end of the valve shaft 500 by screws. Anyone skilled in the art, after seeing the disclosed content, can directly and without doubt know how to set it up, without needing to expend creative labor or conduct excessive experimentation. The transverse cylinder 200 and the longitudinal cylinder 100 are set at an angle, for example, the angle is 90°. When moving upward, the longitudinal cylinder 100 is linked by the air circuit control system, the longitudinal piston 100-1 moves upward, and the longitudinal piston 100-1, together with the bridge connector 400, moves upward along the slide groove 301, thereby linking the valve shaft 500 and the valve plate 600 to move upward until the valve plate 600 is in place. When the cylinder is tilted forward, the lateral cylinder 200 is linked by the air circuit control system, the lateral piston 200-1 moves forward, and the lateral piston 200-1 is linked to the bridge connector 400 to move forward along the slide groove 301 until the valve plate 600 is in contact with the sealing surface. When tilting backward, the lateral cylinder 200 is linked by the air circuit control system, the lateral piston 200-1 moves backward, and the lateral piston 200-1, in conjunction with the bridge connector 400, moves backward along the slide groove 301 until the valve plate 600 is away from the sealing surface. When moving downwards, the longitudinal cylinder 100 is linked by the air circuit control system, the longitudinal piston 100-1 moves downwards, and the longitudinal piston 100-1, in conjunction with the bridge connector 400, moves downwards along the slide groove 301, thereby linking the valve shaft 500 and the valve plate 600 to move downwards, and the valve plate 600 returns to its original position. It achieves a relatively compact gas path layout, a relatively small volume, relatively smooth airflow, reduced risk of gas leakage, relatively stable pressure control, and relatively good reliability of state switching; In the description, it should be understood that the terms "up", "down", "left", "right", "front", "back", etc., indicate the orientation or positional relationship based on the positional relationship shown in the accompanying drawings. They are only for the convenience or simplification of the description and do not indicate a specific orientation that must be present. The operation process described in the embodiments is not an absolute usage step, and corresponding adjustments can be made in actual use. Unless otherwise defined, the technical or scientific terms used herein shall have the ordinary meaning as understood by one of ordinary skill in the art; the words “first,” “second,” and similar terms used in the specification and claims do not indicate any order, quantity, or importance, but are merely used to distinguish different components, and similarly, the words “a” or “a” and similar terms do not determine a quantity limitation, but rather indicate the presence of at least one, as determined by the content of the embodiments; The above description is only a preferred embodiment, but the scope of protection is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art based on the technical solution and inventive concept within the scope of the technology disclosed should be included within the scope of protection.

Claims

1. A pneumatic control system, characterized in that, include: Longitudinal cylinder; The transverse cylinder is angled relative to the longitudinal cylinder; The gas distribution device has a first gas inlet and a second gas inlet. The first gas flow channel connects the gas distribution device and the longitudinal cylinder. When air enters through the first gas inlet, the longitudinal cylinder moves upward and exhausts air through the second gas inlet. The second gas flow channel connects the gas distribution device and the longitudinal cylinder. When air enters through the second gas inlet, the longitudinal cylinder moves downward and exhausts air through the first gas inlet. The third gas flow channel connects the gas distribution device and the transverse cylinder. When air enters through the first air inlet, the transverse cylinder moves forward and exhausts air through the second air inlet. And a fourth gas flow channel, which connects the gas distribution device and the transverse cylinder. When air enters through the second air inlet, the transverse cylinder tilts backward and exhausts air through the first air inlet.

2. The gas path control system according to claim 1, characterized in that: The gas distribution device includes: a gas distribution body, which is connected to the first gas flow channel, the second gas flow channel, the third gas flow channel and the fourth gas flow channel, for distributing gas; The pressure regulating body is located at the notch on the gas distribution body; And several connecting screws, connecting the gas distribution body and the pressure regulating body.

3. The gas path control system according to claim 2, characterized in that: The gas distribution body includes: a gas distribution valve housing, which has a first installation space, a second installation space, a third installation space, a fourth installation space, a fifth installation space and a sixth installation space, and has a first gas inlet and a second gas inlet; A first mechanical control valve is connected to the gas distribution valve housing and is disposed in the fifth installation space; The second mechanical control valve is connected to the gas distribution valve housing and is disposed in the sixth installation space at an angle to the first mechanical control valve. A first one-way valve is disposed on the housing of the gas distribution valve and disposed in the first installation space; The second one-way valve is disposed on the gas distribution valve housing and disposed in the second installation space; The third one-way valve is disposed on the gas distribution valve housing and disposed in the third installation space; And a fourth one-way valve, which is disposed on the gas distribution valve housing and disposed in the fourth mounting space.

4. The gas path control system according to claim 3, characterized in that: The pressure regulating body includes: a pressure regulating valve housing connected to the gas distribution valve housing, and the pressure regulating valve housing has a seventh mounting space and an eighth mounting space; A first pressure regulating valve is connected to the pressure regulating valve housing and is located in the seventh mounting space; And a second pressure regulating valve, connected to the pressure regulating valve housing, and disposed in the eighth mounting space.

5. The gas path control system according to claim 4, characterized in that: The gas distribution valve housing includes: a main housing, which connects the pressure regulating body, the first mechanical control valve, the second mechanical control valve, the first one-way valve, the second one-way valve, the third one-way valve, and the fourth one-way valve. The main housing has a plurality of air guide grooves and a plurality of air channels, which communicate with the first air inlet, the second air inlet, the first mounting space, the second mounting space, the third mounting space, the fourth mounting space, the fifth mounting space, the sixth mounting space, the seventh mounting space, and the eighth mounting space. A bottom cover plate is attached to the bottom of the main housing, covering the air guide groove. The bottom cover plate has a first air port, a second air port, a third air port, and a fourth air port. The first air port, the second air port, the third air port, and the fourth air port are respectively connected to the air guide groove. The first air port is connected to the first gas flow channel, the second air port is connected to the second gas flow channel, the third air port is connected to the third gas flow channel, and the fourth air port is connected to the fourth gas flow channel.

6. The gas path control system according to claim 5, characterized in that: The air guide groove includes: a first air guide groove, which is connected to the first air port; The second air guide groove is connected to the second air port; The third air guide groove is connected to the third air port; The fourth air guide groove is connected to the fourth air port; And a fifth air guide groove, wherein the fifth air guide groove, the fourth air guide groove, the third air guide groove, the second air guide groove and the first air guide groove are spaced apart.

7. The pneumatic control system according to claim 6, characterized in that: The number of air channels is twenty-seven, used for the flow of gas, including: the first air channel; the second air channel; the third air channel; the fourth air channel; the fifth air channel; the sixth air channel; the seventh air channel; the eighth air channel; the ninth air channel; the tenth air channel; the eleventh air channel; the twelfth air channel; the thirteenth air channel; the fourteenth air channel; the fifteenth air channel; the sixteenth air channel; the seventeenth air channel; the eighteenth air channel; the nineteenth air channel; the twentieth air channel; the twenty-first air channel; the twenty-second air channel; the twenty-third air channel; the twenty-fourth air channel; the twenty-fifth air channel; the twenty-sixth air channel; and the twenty-seventh air channel.

8. A gas path control method, characterized in that, The gas path control system based on claim 7 includes: Firstly, the longitudinal cylinder moves upward: the first air inlet, the first air passage, the first one-way valve, the fifth air passage, the first air guide groove, and the first gas flow channel are connected to form an air passage one; The air passage one receives air through the first air inlet, which drives the longitudinal piston on the longitudinal cylinder to move upward; Meanwhile, the second gas flow channel, the second gas guide groove, the seventh gas channel, the eighth gas channel, the ninth gas channel, the tenth gas channel, the eleventh gas channel, the second mechanical control valve, the fourth gas guide groove, the twelfth gas channel, the thirteenth gas channel, the second one-way valve and the second gas inlet are connected to form a second gas path, and the second gas path exhausts gas through the second gas inlet; Furthermore, during the upward stroke, the first air inlet, the first air passage, the first one-way valve, and the second one-way valve are connected to form air passage three. Air passage three enters through the first air inlet, the first one-way valve is open in one direction, and the second one-way valve is fully open. Secondly, the lateral cylinder moves forward: the lateral piston on the lateral cylinder moves to a position that triggers the first mechanical control valve to open, connecting the first air inlet, the first air passage, the second air passage, the fifth air guide groove, the fourth air passage, the first mechanical control valve, the fifteenth air passage, the nineteenth air passage, the first pressure regulating valve, the twentieth air passage, the second pressure regulating valve, the twenty-fifth air passage, the twenty-second air passage, the twenty-third air passage, the twenty-fourth air passage, the third one-way valve, the third air guide groove, and the third gas flow channel to form air path four. Air path four enters through the first air inlet, pushing the lateral piston on the lateral cylinder to move forward. At the same time, the fourth gas flow channel, the fourth one-way valve, the thirteenth gas channel, the second one-way valve, and the second gas inlet are connected to form gas path five, and gas path five exhausts gas through the second gas inlet; Furthermore, during the forward stroke, the first air inlet, the first air passage, the second air passage, the third air passage, the fifth air guide groove, the fourth air passage, the first mechanical control valve, the fifteenth air passage, the sixteenth air passage, the seventeenth air passage, the eighteenth air passage, and the fourth one-way valve are connected to form air passage six, and the fourth one-way valve is fully open; Third, the lateral cylinder tilts backward: the lateral piston moves backward, triggering the second mechanical control valve to close, and the second air inlet, the second one-way valve, the thirteenth air passage, the twelfth air passage, the fourth air guide groove and the fourth gas flow passage are connected to form air passage seven. Air passage seven enters through the second air inlet, driving the lateral piston to move backward. Simultaneously, the third gas flow channel, the third gas guide groove, the third one-way valve, the twenty-fourth gas channel, the twenty-third gas channel, the twenty-second gas channel, the twenty-fifth gas channel, the second pressure regulating valve, the twenty-tenth gas channel, the first pressure regulating valve, the nineteenth gas channel, the fifteenth gas channel, the first mechanical control valve, the fourth gas channel, the fifth gas guide groove, the third gas channel, the second gas channel, the first gas channel, and the first gas inlet are connected to form gas path eight, and gas path eight exhausts through the first gas inlet; Furthermore, during the backward tilting stroke, the second air inlet, the second one-way valve, the thirteenth air passage, the twelfth air passage, the fourteenth air passage, and the third one-way valve are connected to form air passage nine, and the third one-way valve is fully open; Fourth, the longitudinal cylinder moves downward: the transverse piston triggers the second mechanical control valve to open, and the second air inlet, the second one-way valve, the thirteenth air passage, the twelfth air passage, the fourth air guide groove, the second mechanical control valve, the eleventh air passage, the tenth air passage, the ninth air passage, the eighth air passage, the seventh air passage, the second air guide groove and the second gas flow channel are connected to form air passage ten. Air passage ten enters through the second air inlet, driving the longitudinal piston to move downward. Meanwhile, the first gas flow channel, the first gas guide groove, the fifth gas channel, the first one-way valve, the first gas channel and the first gas inlet are connected to form gas path eleven, and the gas path eleven exhausts gas through the first gas inlet; Furthermore, during the downward stroke, the second air inlet, the second one-way valve, the thirteenth air passage, the twelfth air passage, the fourth air guide groove, the second mechanical control valve, the eleventh air passage, the tenth air passage, the ninth air passage, the eighth air passage, the seventh air passage, the second air guide groove, the twenty-sixth air passage, the twenty-seventh air passage, and the first one-way valve are connected to form air passage twelve, and the first one-way valve is fully open.

9. A transmission valve, characterized in that, include: The pneumatic control system as described in any one of claims 1-7.

10. The transmission valve according to claim 9, characterized in that: Also includes: The valve body is used to provide the first gas flow channel, the second gas flow channel, the third gas flow channel, the fourth gas flow channel, the longitudinal cylinder and the transverse cylinder, and is connected to the gas distribution device; A bridge connector is slidably connected to a groove on the valve body. The bridge connector is moved along the groove by the longitudinal cylinder and is slidably connected to the transverse cylinder. The valve shaft is connected to the bridge connector, and one end extends out of the valve body; A valve plate, connected to one end of the valve shaft, is disposed outside the valve body; And several cover plates are connected to the valve body, covering the longitudinal cylinder, the transverse cylinder, the bridge connector, the valve shaft and the air distribution device.

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