Discharge lamp mounting fixtures, discharge lamp mounting methods, and discharge lamp mounting mechanisms

Abstract

This invention provides a discharge lamp mounting fixture, a discharge lamp mounting method, and a discharge lamp mounting mechanism, enabling simple positioning in the XY direction. Three sliders are arranged on the lower ring (10), and the upper ring (20) is placed on the lower ring (10). A ring pin (47) is inserted into a rotating guide hole (D1-D3), and the threaded portion at the front end of the ring pin (47) is threaded into a fixing threaded hole in the lower ring (10). When the upper ring (20) is rotated in the direction of arrow α, the slider (41) moves radially along the movable guide hole (G1-G3). The side of the flange of the lamp head, inserted into the lamp head insertion hole (11), is pressed against the center of the lower ring (10). Thus, positioning of the flange in the XY direction is possible.

Description

Technical Field

[0001] This invention relates to a discharge lamp mounting device, and more particularly to a simple mounting method. Background Technology

[0002] Patent document 1 discloses a discharge lamp with a flange having a diameter larger than that of the lamp head.

[0003] like Figure 10 As shown, the inventors have considered a large lamp employing this flange. In this large lamp, positioning in the direction of gravity (Z direction) when mounted on a longitudinally arranged exposure device via the flange becomes simple.

[0004] Existing technical documents

[0005] Patent documents

[0006] Patent Document 1: Japanese Utility Model Publication No. 3124444 Summary of the Invention

[0007] The problem that the invention aims to solve

[0008] However, in the Figure 10 When a large lamp with a flange is installed in an exposure device, the following problems exist.

[0009] In the aforementioned large lamp, in addition to positioning in the direction of gravity (Z direction), horizontal positioning (XY direction) is also required. To achieve this positioning, it is also considered to provide positioning pins on the flange mounting surface of the exposure device, and to provide holes at opposite positions on the flange so that the two fit together.

[0010] However, in large lamps, the workability of aligning the aforementioned positioning pins with the holes in the flange is poor.

[0011] The problem is not just about large exposure lamps with a vertical orientation.

[0012] The purpose of this invention is to solve the above-mentioned problems and provide a discharge lamp mounting device that simplifies the positioning of a flanged discharge lamp in a direction orthogonal to the insertion direction.

[0013] Methods for solving problems

[0014] (1) In the discharge lamp mounting device of the present invention, it comprises: a first wheel-shaped member having a mounting wheel-shaped surface disposed on a lamp mounting surface of a lighting device of a discharge lamp, and a first wheel-shaped surface opposite to the mounting wheel-shaped surface, and having a wheel-shaped shape with a cavity in the center, the first wheel-shaped member having a flange support surface that supports a flange disposed on the lamp head of the discharge lamp in the cavity; a second wheel-shaped member having a wheel-shaped shape with a cavity in the center and having a second wheel-shaped surface opposite to the first wheel-shaped surface, the first wheel-shaped surface being rotatable parallel to the second wheel-shaped surface, wherein, on the first wheel-shaped surface... The second wheel-shaped component is provided with a plurality of sliding grooves facing the center direction of the first wheel-shaped surface. Each sliding groove is provided with a sliding component. The sliding component has a sliding guide portion on its upper side and a pressing portion on its end side facing the center direction of the first wheel-shaped surface to press the flange toward the center direction. The second wheel-shaped component is provided with a guiding mechanism. When the first wheel-shaped surface and the second wheel-shaped surface rotate parallel to each other, the guiding mechanism guides the sliding guide portion of each sliding component along the sliding groove toward the center direction. Each sliding groove is configured such that the pressing portion of the sliding component positions and presses the flange against the center.

[0015] Therefore, after inserting the lamp head of the discharge lamp into the hole in the central part, positioning can be achieved by rotating the second wheel-shaped component and pressing the flange towards the center using each of the sliding components.

[0016] (2) In the discharge lamp mounting device of the present invention, the guiding mechanism comprises: a guiding groove disposed on the second wheel-shaped member and having a shape that guides the sliding guide portion of each of the sliding members toward the center along the sliding groove; and a sliding member connecting pin inserted into the guiding groove and having its front end fixed to the sliding member, wherein each guiding groove is an elongated groove having a first end hole and a second end hole, and the distance between the first end hole and the center of the elongated groove and the distance between the second end hole and the center are different. Therefore, the pressing portion of each sliding member and the flange can be pressed toward the center direction for positioning with a simple mechanism.

[0017] (3) In the discharge lamp mounting device of the present invention, the elongated groove of the guide groove is arc-shaped. Therefore, the pressing part of each sliding component and the flange can move smoothly toward the center.

[0018] (4) In the discharge lamp mounting device of the present invention, the first wheel-shaped member has an anti-rotation part for inserting the operating rod of the second wheel-shaped member and maintaining the rotation state of the second wheel-shaped member.

[0019] Therefore, the rotation of the second wheel-shaped component can be stopped by operating the lever of the second wheel-shaped component. This maintains the positioning of each sliding component relative to the flange.

[0020] (5) In the discharge lamp mounting device of the present invention, the second wheel-shaped component operating rod is provided with a first engagement portion and a root side wall continuous with the first engagement portion at its front end. The anti-rotation portion has a through hole through which the first engagement portion passes. When the second wheel-shaped component operating rod is operated through the through hole to deepen the engagement of the first engagement portion with the second engagement portion provided on the side of the second wheel-shaped component, the root side wall of the second wheel-shaped component operating rod is pressed against the side of the anti-rotation portion, thereby stretching the second wheel-shaped component to the outside direction of the second wheel-shaped component.

[0021] Therefore, by simply operating the operating rod of the second wheel-shaped component, the rotation of the second wheel-shaped component can be stopped, thereby maintaining the positioning of each sliding component on the flange.

[0022] (6) In the discharge lamp mounting device of the present invention, each of the sliding portions has a pressing portion that presses the pressed portion of the flange in the direction of gravity. Therefore, fixing in the direction of gravity becomes easy.

[0023] (7) In the discharge lamp mounting device of the present invention, the pressed-in portion is a recess provided on the upper surface or side surface of the lamp flange. Therefore, the height of each sliding member can be reduced by the amount of the recess.

[0024] (8) In the discharge lamp mounting device of the present invention, the sliding member has: a main body portion that slides along the sliding groove; and a pressing and retraction mechanism disposed on the flange side of the main body portion that moves a predetermined distance along the sliding groove toward the side opposite to the center when a force in the direction of gravity is applied from the flange.

[0025] Therefore, even if the sliding component is in a protruding state during installation, it can be moved by the specified distance when a force in the weight direction is applied from the flange, thus positioning the flange in the correct position.

[0026] (9) In the discharge lamp mounting fixture of the present invention, the push-in and retraction mechanism has a movable part that slides outward relative to the main body and a force-applying unit that applies force to the movable part toward the center. Therefore, a simple push-in and retraction mechanism that can move the predetermined distance can be provided.

[0027] (10) In the discharge lamp mounting fixture of the present invention, the push-in retraction mechanism is composed of a curved flexural portion whose front end protrudes further toward the center than the main body portion. When a force in the direction of gravity is applied from the flange, the curved flexural portion flexes in a manner that increases curvature, thereby moving the front end a predetermined distance toward the side opposite to the center. Therefore, a simple push-in retraction structure that moves the predetermined distance can be provided.

[0028] (11) In the discharge lamp installation method of the discharge lamp lighting device of the present invention, A) a discharge lamp mounting fixture having the following a1) to a5) is installed on the discharge lamp lighting device, a1) a first wheel-shaped member having a mounting wheel-shaped surface provided on the lamp mounting surface of the discharge lamp lighting device and a first wheel-shaped surface opposite to the mounting wheel-shaped surface, and having a wheel-shaped shape with a cavity in the center, the first wheel-shaped member having a flange support surface that supports a flange provided on the lamp head of the discharge lamp in the cavity; a2) a second wheel-shaped member having a wheel-shaped shape with a cavity in the center and having a second wheel-shaped surface opposite to the first wheel-shaped surface, and being rotatable relative to the first wheel-shaped member; a3) a plurality of sliding grooves arranged in the... A first wheel-shaped surface, and facing the center direction of the first wheel-shaped surface; a4) a sliding member, which is disposed in each of the sliding grooves and has a sliding guide portion on the upper side, and a pressing portion that presses the front end of the lamp head toward the center direction on the end side of the center direction of the first wheel-shaped surface; and a5) a guiding mechanism is provided in the second wheel-shaped member, which has a shape that guides the sliding guide portions of each of the sliding members toward the center direction along the sliding groove when the second wheel-shaped member rotates relative to the first wheel-shaped member; B) by rotating the second wheel-shaped member, each of the sliding members moves on the sliding groove through the guiding mechanism, thereby the pressing portion of the sliding member positions and presses the flange toward the center direction.

[0029] Therefore, after inserting the lamp head of the discharge lamp into the hole in the central part, positioning can be achieved by rotating the second wheel-shaped component and pressing the flange towards the center using each of the sliding components.

[0030] (12) In the discharge lamp mounting device of the present invention, there is a discharge lamp mounting mechanism in a discharge lamp lighting device for lighting a discharge lamp, wherein the discharge lamp includes: a lamp head root; a flange portion whose diameter is larger than that of the lamp head root; a flange setting surface having a lamp head front end portion that is closer to the front end than the flange; the discharge lamp mounting mechanism includes: a flange setting surface for setting the flange portion; a lamp head front end insertion hole provided on the flange setting surface for inserting the lamp head front end portion; in the discharge lamp mounting mechanism, A) the following a1) to a4) are provided in the lamp head front end insertion hole, a1) a first wheel-shaped member having a setting wheel-shaped surface provided on the lamp mounting surface of the discharge lamp lighting device and a first wheel-shaped surface on the opposite side of the setting wheel-shaped surface, and having a wheel-shaped shape with a hole in the center portion; the first wheel-shaped member has a flange support surface that supports the flange provided on the lamp head of the discharge lamp in the hole; a2) a second wheel-shaped member, which has A) A wheel-shaped structure with a hollow center and a second wheel-shaped surface opposite to the first wheel-shaped surface, the first wheel-shaped surface being able to rotate parallel to the second wheel-shaped surface; a3) a plurality of sliding grooves disposed on the first wheel-shaped surface and facing the center direction of the first wheel-shaped surface; and a4) a sliding member disposed in each of the sliding grooves and having a sliding guide portion disposed on the upper side, and a pressing portion that presses the flange toward the center direction at the end side in the center direction of the first wheel-shaped surface; B) a guiding mechanism disposed on the second wheel-shaped member, the guiding mechanism having a shape that guides the sliding guide portions of each of the sliding members toward the center direction along the sliding groove when the second wheel-shaped member rotates relative to the first wheel-shaped member; C) by rotating the second wheel-shaped member, each of the sliding members moves on the sliding groove via the guiding mechanism, thereby the pressing portion of the sliding member positioning and pressing the front end of the lamp head toward the center direction.

[0031] Therefore, after inserting the lamp head into the hole in the central part, the front end of the lamp head can be pressed towards the center by rotating the second wheel-shaped component and thus positioned.

[0032] (13) In the discharge lamp mounting device of the present invention, a small-diameter recess is provided at the front end of the lamp head, and the sliding member presses the small-diameter recess toward the center direction. Therefore, the front end of the lamp head can be held in the center direction.

[0033] The following section explains the correspondence between the terminology in the claims and the embodiments.

[0034] Set the wheel-shaped surface: Lower ring lower surface 17

[0035] First ring-shaped surface: Upper surface of the lower ring 18

[0036] Flange support surface: Upper surface of the lower ring 18

[0037] First wheel-shaped component: Lower ring 10

[0038] Second wheel-shaped component: Upper ring 20

[0039] Second ring-shaped surface: Lower surface of the upper ring 28

[0040] Sliding groove: groove 19

[0041] Sliding component: slider 41

[0042] Sliding guide: Slider pin 42

[0043] Guide groove: Elongated holes G1 to G3 for rotation guidance

[0044] Upper wheel-shaped component operating rod: lever 31

[0045] Root lateral wall: Root lateral wall 31b

[0046] First threaded portion: Threaded portion 31a

[0047] Second threaded part: Threaded hole 22 for fixing

[0048] Press-in part: Protrusion 41a

[0049] Press-in portion: upper surface of flange 71u, pressing surfaces 71a to 71c

[0050] Furthermore, in the embodiment, "configured in a positioning and pressing manner" means that the three slots 19 are arranged at 120-degree intervals, but this angular interval also includes cases where they are precisely evenly spaced. For example, if there are four slots, it also includes cases where they are not evenly spaced at 90-degree intervals. The same applies to cases with more than five slots.

[0051] Furthermore, "multiple sliding grooves facing the center" naturally includes cases where they are arranged radially along the central direction as in the first embodiment, as well as cases where... Figure 6 The case shown in (F) is where the center of the groove is misaligned with the center of the upper ring 20.

[0052] Furthermore, while the embodiment describes a circular "wheel shape," it also includes cases where the shape is not a perfect circle but a polygon composed entirely of straight lines, such as a dodecagon. Additionally, it includes cases where the shape is partly composed of straight lines and partly of circles.

[0053] Furthermore, the term "guidance" was described in the embodiment as an example of sliding the slider 41, which is a sliding member, on the groove 19. However, as long as the movement of the slider 41 can be guided, it can also be a movement other than sliding. Attached Figure Description

[0054] Figure 1 This is an exploded and assembled perspective view of the adapter 1 of the present invention.

[0055] Figure 2 These are top views and CC cross-sectional views of the upper ring 20 as seen from above.

[0056] Figure 3 These are the top view and the main section view of the slider 41 when it is not protruding.

[0057] Figure 4 This is a top view and a sectional view of the main parts of the slider 41 when it is protruding.

[0058] Figure 5 This is a sectional view of the main part showing the state of adapter 1 being installed on the exposure device.

[0059] Figure 6 This is a cross-sectional view showing other shapes of flange 71.

[0060] Figure 7 This is a cross-sectional view showing another structural example of slider 41.

[0061] Figure 8 This is a cross-sectional view showing another structural example of slider 41.

[0062] Figure 9 This is a diagram illustrating other implementation methods.

[0063] Figure 10 This is a schematic diagram showing the state in which a discharge lamp without adapter 1 but with flange 71 is mounted on an exposure device.

[0064] Explanation of reference numerals in the attached figures

[0065] 1… adapter

[0066] 10…lower ring

[0067] 11… Lamp holder insertion hole

[0068] 12… Anti-rotation part

[0069] 13…long hole

[0070] 15…Fixing threaded hole

[0071] 17…Lower ring lower surface

[0072] 18… Lower ring upper surface

[0073] 20…IUD insertion

[0074] 22…Fixing threaded hole

[0075] 28…Upper ring lower surface

[0076] 31… poles

[0077] 41… Slider

[0078] 42… Slider pin

[0079] 47… Ring-shaped pin

[0080] D1~D3… Rotary guide holes

[0081] G1~G3…Modible guide holes Detailed Implementation

[0082] (1. First Implementation Method)

[0083] use Figure 1 The adapter 1 of the present invention, which is a mounting device for a discharge lamp, will be described.

[0084] (1.1 Structure of each part of adapter 1)

[0085] The adapter 1 consists of a lower ring 10, an upper ring 20, a rod 31, and three sliders 41.

[0086] The lower ring 10 has a lower ring lower surface 17 disposed on the lamp mounting surface of the exposure device and a lower ring upper surface 18 on the opposite side, and the lower ring 10 has a wheel-shaped shape with a hole 11 in the central part. In addition, as described later, the lower ring 10 is provided with an anti-rotation part 12.

[0087] The upper ring 20 has a wheel-like shape that is substantially the same as the lower ring 10, and has a lower surface 28 opposite to the upper surface 18 of the lower ring. Furthermore, the diameter of the central cavity 11 is larger than the outer diameter of the flange of the discharge lamp, which will be described later. Additionally, a threaded hole 22 for fixing is provided on the side.

[0088] use Figure 2 The two types of elongated holes set on the upper ring 20 are explained. Figure 2 This indicates the state where the slider pin 42 and ring pin 47 are inserted into the upper ring 20. The first type of elongated hole in the upper ring 20 is the rotary guide elongated hole D1 to D3. The rotary guide elongated holes D1 to D3 are elongated holes that penetrate the upper ring 20, from... Figure 1 The planar shape viewed in the direction of arrow γ is an arc shape, with both ends consisting of semicircles. The center of each semicircle lies on a circle with a radius L3 starting from the center P0. Therefore, when the upper ring 20 rotates relative to the lower ring 10, the rotation guide holes D1 to D3 function as guides that prevent the center of the upper ring 20 from shifting relative to the lower ring 10. Thus, the upper ring 20 can rotate concentrically with the center of the lower ring 10.

[0089] Movable guide elongated holes G1 to G3 are another type of elongated hole. The movable guide elongated holes G1 to G3 are the same as the rotary guide elongated holes D1 to D3 in that they are through elongated holes, have an arc shape in their planar shape, and are formed by semicircles at both ends. However, when viewed from above, the arc shape is tilted such that L1 is the distance from the center P1 of the semicircles at both ends to the center P0, and L2 is the distance from P2 to the center P0, with L1 > L2. Therefore, as will be described later, when the upper ring 20 rotates relative to the lower ring 10 in the direction of arrow α, it functions as a guide that causes the slider 41 to slide towards the center P0.

[0090] use Figure 1 The sliding motion of slider 41 will be explained. For example... Figure 1 As shown, three radially arranged grooves 19 are formed in the lower ring 10, and the slider 41 is configured to slide on the grooves 19 in a manner close to or away from the center P0.

[0091] Furthermore, since the slider 41 protrudes further in the height direction (towards the upper ring 20) than the lower ring 10, a recess 24 is formed in the upper ring 20 to allow the slider 41 to slide. To prevent the recess 24 from colliding with the slider 41 even when the upper ring 20 rotates, it is also countersunk in the direction of rotation, thus avoiding collision.

[0092] By assembling the upper ring 20 and the lower ring 10 and rotating the upper ring 20, the slider 41 slides.

[0093] (1.2 Assembly of Adapter 1)

[0094] The following uses Figure 1 The assembly of adapter 1 will be explained.

[0095] Three sliders 41 are arranged on the lower ring 10, and the upper ring 20 is placed on the lower ring 10. A ring pin 47 is inserted into the rotation guide holes D1 to D3, and the threaded portion at the front end of the ring pin 47 is threaded into the fixing threaded hole of the lower ring 10. The length from the threaded portion at the front end of the ring pin 47 to the head of the pin is the length to which the upper ring 20 and the lower ring 10 can rotate (the threaded portion is within...). Figure 1 (Not shown in the diagram). Thus, the upper ring 20 and the lower ring 10 can be rotatably assembled.

[0096] Additionally, the slider pin 42 is inserted into the movable guide elongated holes G1 to G3, and the front end of the slider pin 42 is threaded into the internal threaded hole on the upper surface of the slider 41 (the threaded part is in...). Figure 1 (Not shown in the figure). The length of the slider pin 42, excluding the threaded portion at its front end, is also configured to rotate according to the relationship between the upper ring 20 and the lower ring 10.

[0097] With the upper ring 20 and lower ring 10 assembled, the threaded hole 22 for fixing the upper ring 20 is located within the elongated hole 13 of the anti-rotation portion 12 of the lower ring 10. The threaded portion 31a provided at the front end of the rod 31 is inserted through this elongated hole 13 and screwed into the threaded hole 22 for fixing the upper ring 20. This screwed engagement is as follows: Figure 2 As shown in (B).

[0098] (1.3 Actions of Adapter 1)

[0099] In this state, such as Figure 3 As shown in (A), the slider 41 is positioned at a distance L1 from the center P0 (the pulled-in position). If the upper ring 20 is rotated from this state in the direction of arrow α, the slider is moved along the movable guide holes G1 to G3 by pin 42. The centers P1 and P2 of the arcs at both ends of the grooves in the movable guide holes G1 to G3 are at different distances (L1 and L2) from the center of the upper ring 20. Therefore, if the upper ring 20 is rotated, as shown in (A), the slider 41 is positioned at a distance L1 from the center P0 (the pulled-in position). Figure 4 As shown in (A), each slider 41 moves radially along the groove 19 towards the center P0. Through this movement, when a flange of the lamp holder is inserted into the lamp holder insertion hole 11, the side of the flange is pressed down towards the center of the lower ring 10 by the slider 41. Thus, by using multiple sliders 41 to press the flange of the lamp holder towards the center P0, the flange of the lamp holder moves towards the center of the lamp holder insertion hole 11. This enables positioning in the XY directions. Furthermore, the flange is not only moved by being pushed towards the center, but is also fixed by being pressed towards the direction of gravity by a protrusion 41a provided at the front end of the slider 41.

[0100] Thus, the guide mechanism is formed by the groove 19, the slider pin 42, and the movable guide elongated holes G1 to G3.

[0101] When the lamp holder (including the flange) is inserted into adapter 1. Figure 3 Sectional view AA of (A) is shown in Figure 3 (B) will Figure 4 The BB section view of (A) is shown in Figure 4 (B). For example Figure 3 As shown in (B), when slider 41 is not protruding, slider 41 and flange 71 are in a non-contact state. In contrast, as shown in (B), Figure 4 As shown in (B), when the slider 41 protrudes, the flange 71 is pressed towards the center P0 by the protrusion 41a of the slider 41 and held in the direction of gravity by the protrusion 41a.

[0102] (1.4 Maintaining the rotational state of adapter 1)

[0103] Figure 4The state of the protrusion (the state of the upper ring 20 rotating relative to the lower ring 10 in the direction of arrow α) is determined by the operator at... Figure 4 In the rotational state, rod 31 (refer to) Figure 1 It rotates in the direction of arrow β and remains in place.

[0104] The inventor believes this is due to the following reasons. When rod 31 is directed towards... Figure 1 When rotated in the direction of arrow β, the threaded portion 31a at the front end of rod 31 engages more deeply with the fixing threaded hole 22 of upper ring 20. Thus, Figure 2 As shown in (B), the root sidewall 31b located at the root of the threaded portion 31a is pressed against the anti-rotation portion 12. As a result, the upper ring 20 is stretched away from the center P0, thereby generating friction between the upper ring 20 and the anti-rotation portion 12. Therefore, the upper ring 20 is held in a stopped-rotation state.

[0105] (1.5 Adapter 1 Installation of Exposure Device)

[0106] Figure 5 This indicates that the adapter 1 is fixed on the upper surface of the lamp mounting part 82 of the exposure apparatus 80, i.e., the lamp mounting surface 81, and then the lamp head 70 of the discharge lamp is inserted, so that the slider 41 is in a protruding state. Although in Figure 5 The text is omitted, but can be accessed through operations. Figure 1 The rod 31 is used to rotate the upper ring 20, and the slider 41 presses the flange 71 evenly towards the center. This achieves positioning in the XY direction. Furthermore, in this state, by moving the rod 31 towards... Figure 1 Rotate in the direction of arrow β, and the lamp head 70 of the discharge tube is fixed to the lamp mounting part 82.

[0107] Furthermore, the adapter 1 can be pre-positioned so that the lamp holder insertion hole 11 is in the desired position relative to the lamp mounting part 82.

[0108] Furthermore, any known method can be used for fixing. For example, a through hole can be provided in the lower ring 10, and a thread can be used for fixing on the lamp mounting surface 81. The lower ring 10 can be countersunk so that the head of the screw is lower than the upper surface of the lower ring 10, and a through hole that the screw head can pass through can be provided in the upper ring 20.

[0109] As explained above, by using adapter 1, after inserting the lamp mounting part 82, positioning in the XY direction can be easily performed to fix the discharge lamp to the exposure device.

[0110] (2. Other implementation methods)

[0111] In the first embodiment, the protrusion 41a of the slider 41 will Figure 6The case where the upper surface 71u of the flange 71 shown in (A) is pressed in the direction of gravity has been described. However, this pressing in the direction of gravity is not limited to this, as... Figure 6 As shown in (B), a recess can also be provided on the side so that the protrusion of the slider 41 is pressed into the lower surface 71a of the recess.

[0112] By adopting this structure, the possibility of lamp breakage can be reduced even in the event of accidental operation during installation. Details are as follows.

[0113] If adapter 1 causes rod 31 to move as already described Figure 1 Rotating in the direction of arrow α results in a protruding state, while rotating in the opposite direction results in a non-protruding state. Therefore, when the lamp head 70 of the discharge lamp is inserted in the protruding state, the lower surface of the flange 71 is positioned on the upper surface of the slider 41. In this case, since the discharge lamp is not in the standard position in the Z direction, the operator temporarily operates lever 31 to make slider 41 non-protruding. As a result, the discharge lamp falls from the upper surface of slider 41 onto the upper surface 18 of the lower ring, potentially damaging the discharge lamp in the worst-case scenario. In contrast, as... Figure 6 As shown in (B), by providing a recess on the side and pressing the protrusion of the slider 41 into the lower surface 71a, the upper surface of the slider 41 can be made lower. This reduces the distance to the upper surface 18 of the lower ring, thus lowering the possibility of the aforementioned damage.

[0114] Furthermore, not only when a recess is formed on the side of the slider 41, but also when the upper surface of the flange 71 is partially removed, as Figure 6 The same effect can be achieved by setting the pressing surface 71b as shown in (C). Additionally, as shown in [the diagram]... Figure 6 As shown in (D), the pressing surface 71c can also be formed at an angle.

[0115] Additionally, regarding the configuration of the slots for the slider's movement, such as... Figure 6 As shown in (E), the angle configuration may not be uniform. This is because if the sliders move in a relative relationship of three or more slider movement directions in the X and Y directions, the slider 41 can be positioned by pressing the flange 71 toward the center P0.

[0116] Additionally, regarding the orientation of the center of the groove, such as Figure 6 As shown in (F), it can also be offset from the center of the upper ring 20. In this way, when the center of the groove is not oriented towards the center but is equally offset from the center, the directional component of the force applied to the lamp head of the discharge lamp is equal in both the X and Y directions, enabling the XY direction positioning of the discharge lamp.

[0117] Furthermore, in the first embodiment, the surface of the protrusion 41a that abuts against the upper surface of the flange 71 is formed by a slanted straight surface, such that the pressing force in the direction of gravity increases as the protrusion 41a moves towards the center. Thus, pressing in the direction of gravity can also be achieved through the protrusion 41a. However, this is not a limitation; any shape capable of positioning in at least the XY directions is acceptable, and the direction (Z direction) orthogonal to the lamp holder 70 or the flange 71 is arbitrary. For example, a plane or curved surface can be formed that abuts against the side of the flange 71. This is because, in the case of a vertically arranged discharge lamp, the Z direction is maintained by gravity.

[0118] Alternatively, when the lamp holder 70 is inserted, the front end of the slider 41 moves away from the center via the lower surface of the flange 71. Figure 7 The structure is described below.

[0119] Figure 7 (A) is a cross-sectional view of the main part of the slider 90. The slider 90 includes: a main body 91 having a cavity 96; a front movable part 92 that blocks the cavity 96; and a spring 95 provided in the cavity 96 to apply force to the front movable part 92 in the direction of arrow η. A gap 97 is provided between the front movable part 92 and the main body 91, and the front movable part 92 can move relative to the main body 91 by an amount corresponding to this distance.

[0120] In addition, the front movable part 92 has an inclined protrusion 93.

[0121] Slider 90 is similarly configured to slide on the lower ring 10.

[0122] When the slider 90 is protruding, there is an inclined protrusion 93 of the front movable part 92 at the position that prevents the flange 71 from descending. However, when the flange 71 descends further, the front movable part 92... Figure 7 As shown by arrow η in (B), move in the direction of η, as Figure 7 As shown in (C), it is held in the lower part of the oblique protrusion 93.

[0123] Thus, by configuring the front end of the slider 90 to be slidable, even when the lamp head 70 of the discharge lamp is inserted with the slider 90 protruding, a force is applied along the direction of gravity while the lamp head 70 is held in place. This causes the movable front end 92 to move and the flange 71 to move along the direction of gravity, thereby enabling... Figure 7 The flange 71 shown in (C) is in a holding state.

[0124] Furthermore, regarding the slider 90, an inclined protrusion 93 is provided on the movable part 92 at the front end, but it can also be provided as follows: Figure 8The hemispherical protrusion 98 is shown in (A). Even with such a hemispherical protrusion 98, when it protrudes, even if the hemispherical protrusion 98 of the front movable part 92 is in a position that prevents the flange 71 from descending, the front movable part 92 also moves in the direction of arrow η as the flange 71 descends further. Therefore, even when the baffle 71 protrudes, it will not be obstructed by the slider 90. In addition, the hemispherical protrusion 98 presses against the side of the flange 71, thus also providing positioning in the XY direction.

[0125] exist Figure 8 In (A), the case where the front end is set as a hemispherical protrusion is explained, but as long as it is spherical, it does not have to be hemispherical.

[0126] Figure 8 (B) indicates other implementation methods. Figure 7 and Figure 8 In (A), the movable part 92 at the front end of the slider 90 moves in the direction of arrow η, so that the flange 71 is not obstructed by the slider 90. However, it is not limited to this; a claw 99 may be provided in the slider 90, and the gap 99k may be provided in a manner in which the curved shape of the front end 99a of the claw 99 is more flexible. With the claw having a flexed shape away from the center, when the flange 71 is inserted, the front end 99a is pressed downward and drills into the gap 99k. As a result, the front end 99a temporarily moves in the direction of arrow η, and the flange 71 can descend.

[0127] Furthermore, in the first embodiment, a flange 71 is inserted into the adapter 1, and a slider 41 is used to push the flange 71 for positioning in the XY direction. Therefore, the diameter of the lamp holder insertion hole 11 of the upper ring 20 is formed to be larger than that of the flange 71. However, as... Figure 9 As shown in (A), the adapter 1 can also be installed inside the outer adapter 102, with the flange 71 mounted on the outer adapter 102, and the slider 41 is used to press the recess 78 formed on the side of the lamp head front end 78 located at the lower part of the flange 71 for positioning in the XY direction.

[0128] The structure of an embodiment in which positioning in the XY direction is achieved by pressing the front end 78 of the lamp head using multiple sliders 41 will be described.

[0129] like Figure 9 As shown in (B), the lamp holder 70 has a flange 71 and a lamp holder front end portion 78 on the front end side of the flange 71, and a circumferential recess 77 is provided on the lamp holder front end portion 78. This recess 77 is pressed by the front end of the slider 41.

[0130] use Figure 9 (C) and (D) describe the external adapter 102 on which adapter 1 is installed. Figure 9 (C) is from Figure 9The view is taken from the direction of arrow γ in (A). When viewed from the direction of arrow γ, the outer adapter 102 has a circular shape with a through hole 102h formed in the center. Figure 9 (D) shows Figure 9 The DD section of (C) is formed. A through hole 102h is formed in the center of the upper surface 102t of the flange support of the outer adapter 102, and it has a sidewall 102s and a skirt 102f. An adapter mounting part 102a is installed in the internal space formed in the upper surface 102t, sidewall 102s, and skirt 102f of the flange support. Figure 1 Adapter 1 is shown. Furthermore, although in Figure 9 The (D) is omitted, but an elongated hole (through hole) is formed in the side wall 102s so that the rod 31 can be inserted into the upper ring 20 and the upper ring 20 can be rotated.

[0131] Therefore, with the flange 71 mounted on the outer adapter 102, positioning in the XY direction can be performed in the same way as in the first embodiment.

[0132] Furthermore, in this embodiment, when the position of the rod 31 is set so that the slider 41 is in a protruding state, the front end of the lamp head 78 is already obstructed by the slider 41 and cannot be inserted. Therefore, the discharge lamp is installed without keeping the rod 31 in a protruding state.

[0133] In addition, Figure 9 In the embodiment shown in (A), the case where the flange 71 is mounted on the outer adapter 102 is described, but as... Figure 9 As shown in (E), the outer adapter 102 can also be positioned lower than the lamp mounting surface 81. In this case, the flange 71 is positioned in the Z direction by the lamp mounting surface 81 and in the XY direction by the front end 78 of the lamp head.

[0134] In addition, Figure 9 In the illustrated embodiment, a recess 77 is formed at the front end 78 of the lamp holder, and the front end of the slider 41 presses against this recess 77. Thus, by having the front end of the slider 41 engage with the recess 77, fixation in the Z direction is also possible. However, this is not a limitation; the front end 78 of the lamp holder can also be pressed directly using the slider 41 without the recess 77.

[0135] In the first embodiment, the flange support surface that supports the flange 71 of the lamp head 70 provided in the discharge lamp is set to be the same as the upper surface 18 of the lower ring, but it can also be formed at a position offset in either the up or down direction from the upper surface 18 of the lower ring.

[0136] In addition, in the first embodiment, the lengths of the rotational guide holes D1 to D3 and the movable guide holes G1 to G3 are determined by the upper ring 20 being able to rotate about 16 degrees relative to the lower ring 10, but it is not limited to this.

[0137] Furthermore, in the first embodiment, the movable guide elongated holes G1 to G3 are also constructed in an arc shape, similar to the rotary guide elongated holes D1 to D3. Therefore, according to the... Figure 1 The rotation angle in the direction of arrow α causes the slider 41 to move linearly towards the center. However, this is not a limitation; the movable guide hole can also be a partially or entirely linear elongated hole.

[0138] Furthermore, this invention can not only position a discharge lamp with a flange on its lamp head, but also fix the discharge lamp. In this case, three or more sliders 41 are required. In contrast, if the invention is to be understood as having only the latter effect, two or more sliders are sufficient.

[0139] In the first embodiment, the case where the discharge lamp lighting device is a large semiconductor exposure apparatus was described, but it can also be applied to other types of exposure apparatuses. Furthermore, it can also be applied to lighting devices for discharge lamps such as ozone generating devices, ultraviolet irradiation devices, and lighting devices.

[0140] In addition, in the first embodiment, a lighting device with a vertically arranged discharge lamp was described as an example, but the direction was not limited.

[0141] In the first embodiment, the flange 71 is described as being pressed in the direction of the center P0 by the inclined surface of the protrusion 41a and also held in the direction of gravity, but it is not limited to this. The flange 71 may also be pressed in the direction of the center P0 by the side wall 41b and held in the direction of gravity by the inclined surface of the protrusion 41a.

Claims

1. A discharge lamp mounting device, comprising: The first wheel-shaped component has a mounting wheel-shaped surface disposed on the lamp mounting surface of the lighting device of the discharge lamp and a first wheel-shaped surface on the opposite side of the mounting wheel-shaped surface, and has a wheel-shaped shape with a cavity in the center. The first wheel-shaped component has a flange support surface that supports a flange disposed on the lamp head of the discharge lamp in the cavity. The second wheel-shaped component has a hollow wheel shape in the center and a second wheel-shaped surface opposite to the first wheel-shaped surface. The first wheel-shaped surface is capable of rotating parallel to the second wheel-shaped surface. Its features are, The first wheel-shaped surface is provided with a plurality of sliding grooves facing the center of the first wheel-shaped surface. Each of the sliding grooves is provided with a sliding component, the sliding component having a sliding guide portion on its upper side and a pressing portion on its centrally located end side of the first wheel-shaped surface to press the flange toward the center direction. The second wheel-shaped component is provided with a guiding mechanism, which guides the sliding guide portion of each sliding component along the sliding groove toward the center direction when the first wheel-shaped surface rotates parallel to the second wheel-shaped surface. Each of the sliding grooves is configured such that the pressing portion of the sliding component positions the flange and presses it against the center.

2. The discharge lamp mounting fixture according to claim 1, characterized in that, The guiding mechanism has a guide groove disposed on the second wheel-shaped component and has a shape that guides the sliding guide portion of each of the sliding components toward the center along the sliding groove; And a sliding component connecting pin, which is inserted into the guide groove and whose front end is fixed to the sliding component. Each of the guide grooves is an elongated groove with a first end hole and a second end hole, and the distance between the first end hole and the center of the elongated groove and the distance between the second end hole and the center are different.

3. The discharge lamp mounting fixture according to claim 2, characterized in that, The guide groove has a long slot in the shape of an arc or a straight elongated hole.

4. The discharge lamp mounting fixture according to claim 1, characterized in that, The first wheel-shaped component has an anti-rotation part into which the operating rod of the second wheel-shaped component is inserted and which maintains the rotation of the second wheel-shaped component. The second wheel-shaped component operating rod has a first threaded portion and a root sidewall continuous with the first threaded portion at its front end.

5. The discharge lamp mounting fixture according to claim 4, characterized in that, The anti-rotation part has a through hole through which the first threaded part passes. When the second wheel-shaped component operating rod is operated through the through hole to deepen the engagement of the first threaded portion with the second threaded portion provided on the side of the second wheel-shaped component, the root side wall of the second wheel-shaped component operating rod is pressed against the side of the anti-rotation portion, thereby stretching the second wheel-shaped component to the outward direction.

6. The discharge lamp mounting fixture according to claim 1, characterized in that, The flange has a press-in portion. Each of the sliding portions has a pressing portion that presses the pressed portion in the direction of gravity.

7. The discharge lamp mounting fixture according to claim 6, characterized in that, The pressed-in portion is a recess provided on the upper surface or side surface of the flange.

8. The discharge lamp mounting fixture according to claim 1, characterized in that, The sliding component has: The main body slides along the sliding groove; and A push-in retraction mechanism is provided on the flange side of the main body, which moves a predetermined distance along the sliding groove toward the side opposite to the center when a force in the direction of gravity is applied from the flange.

9. The discharge lamp mounting fixture according to claim 8, characterized in that, The pressing and retraction mechanism has a movable part that slides outward relative to the main body and a force-applying unit that applies force to the movable part toward the center.

10. The discharge lamp mounting fixture according to claim 8, characterized in that, The pressing and retraction mechanism is composed of a curved and flexural portion that protrudes from the front end of the main body towards the center. When a force in the direction of gravity is applied from the flange, the curved and flexural portion flexes in a manner that increases the curvature, thereby moving the front end a predetermined distance to the side opposite to the center.

11. A method for installing a discharge lamp in a discharge lamp lighting device, characterized in that, A) Install the discharge lamp mounting fixture, which has the following features (a1) to (a5)), into the discharge lamp lighting device. a1) A first wheel-shaped component having a mounting wheel-shaped surface disposed on the lamp mounting surface of the lighting device of the discharge lamp and a first wheel-shaped surface on the opposite side of the mounting wheel-shaped surface, and having a wheel-shaped shape with a cavity in the center. The first wheel-shaped component has a flange support surface that supports a flange disposed on the lamp head of the discharge lamp in the cavity. a2) A second wheel-shaped component, which has a hollow wheel shape in the center and a second wheel-shaped surface opposite to the first wheel-shaped surface, and is rotatable relative to the first wheel-shaped component; a3) A plurality of sliding grooves are disposed on the first wheel-shaped surface and face the center of the first wheel-shaped surface; a4) A sliding component, disposed in each of the sliding grooves, having a sliding guide portion on its upper side and a pressing portion on its central end side of the first wheel-shaped surface to press the flange toward the central direction; and a5) A guide mechanism is provided in the second wheel-shaped component, the guide mechanism having a shape that guides the sliding guide portion of each sliding component toward the center direction along the sliding groove when the second wheel-shaped component rotates relative to the first wheel-shaped component; B) By rotating the second wheel-shaped component, each of the sliding components moves on the sliding groove via the guide mechanism, thereby positioning and pressing the flange toward the center direction by the pressing portion of the sliding component.

12. A discharge lamp mounting mechanism, which is a discharge lamp mounting mechanism in a discharge lamp lighting device for illuminating a discharge lamp, characterized in that, The discharge lamp includes: a lamp base root; a flange portion with a diameter larger than the lamp base root; and a flange setting surface having a lamp base front end portion that is further forward than the flange. The discharge lamp mounting mechanism has the following features: The flange setting surface of the flange portion is provided; and The lamp holder has an insertion hole at the front end, which is located on the flange surface for inserting the front end of the lamp holder. In the discharge lamp mounting mechanism, A) The following a1) to a4) are provided in the insertion hole at the front end of the lamp holder; a1) A first wheel-shaped component having a mounting wheel-shaped surface disposed on the lamp mounting surface of the lighting device of the discharge lamp and a first wheel-shaped surface on the opposite side of the mounting wheel-shaped surface, and having a wheel-shaped shape with a cavity in the center. The first wheel-shaped component has a flange support surface that supports a flange disposed on the lamp head of the discharge lamp in the cavity. a2) A second wheel-shaped component, which has a hollow wheel shape in the center and a second wheel-shaped surface opposite to the first wheel-shaped surface, wherein the first wheel-shaped surface is capable of rotating parallel to the second wheel-shaped surface; a3) A plurality of sliding grooves disposed on the first wheel-shaped surface and facing the center of the first wheel-shaped surface; and a4) A sliding component, which is disposed in each of the sliding grooves, and has a sliding guide portion on its upper side, and a pressing portion on the end side of the first wheel-shaped surface in the central direction to press the front end of the lamp head toward the center direction. B) A guide mechanism is provided on the second wheel-shaped component, the guide mechanism having a shape that guides the sliding guide portion of each of the sliding components toward the central direction along the sliding groove when the second wheel-shaped component rotates relative to the first wheel-shaped component; C) By rotating the second wheel-shaped component, each of the sliding components moves on the sliding groove via the guide mechanism, thereby positioning and pressing the front end of the lamp head towards the center by the pressing portion of the sliding component.

13. The discharge lamp mounting mechanism according to claim 12, characterized in that, The lamp holder has a small-diameter recess at its front end. The sliding component presses the small-diameter recess toward the center.

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