A turntable precision detection device

Abstract

The present application relates to the technical fields of precision detection of rotary table, and discloses a precision detection device of rotary table, which comprises a detection table, a rotary table body arranged on the detection table, a height adjusting mechanism one arranged on the detection table, a position adjusting mechanism one arranged at the bottom of the height adjusting mechanism one, a position adjusting mechanism two arranged at the bottom of the position adjusting mechanism one, and a confocal laser probe arranged at the bottom of the position adjusting mechanism two, wherein a detection base plate is arranged on the rotary table body, and the detection base plate comprises a disc body which is congruent with the rotating disc of the rotary table body, and the present application has the beneficial effects compared with the prior art, that is, the device adopts the confocal laser probe to realize non-contact detection, utilizes the confocal optical principle, and only the monochromatic light at the focal point can be received by the detector, so that the reflection interference of the high-reflective surface is completely eliminated, and the measurement resolution can reach the nanometer level; there is no physical contact in the whole process, and the rotary table mirror surface and the detection reference will not be damaged in any way, so that the nondestructive detection requirement of the super-precision components such as the semiconductor magnetic levitation rotary table can be perfectly met.

Description

Technical Field

[0001] This invention relates to the field of turntable accuracy testing technology, specifically to a turntable accuracy testing device. Background Technology

[0002] High-precision turntables are core functional components of semiconductor lithography machines, wafer inspection equipment, five-axis CNC machine tools, and aerospace inertial navigation systems. Their axial runout, end face runout, coaxiality, flatness, and dynamic rotational accuracy directly determine the processing and inspection accuracy of the final product. Especially in the wafer manufacturing field, magnetic levitation turntables, as the motion platform supporting wafers to complete the entire process of lithography, etching, coating, and inspection, require rotational accuracy down to the nanometer level. Even minute precision deviations can directly lead to chip circuit pattern shifts, lithography defects, or even the scrapping of an entire batch of wafers. Therefore, high-precision inspection and periodic calibration of turntables before shipment are crucial for ensuring semiconductor manufacturing yield.

[0003] Current wafer turntable accuracy testing still primarily relies on traditional contact dial indicators, which have fundamental flaws in their technical principles and operational methods. During testing, the operator fixes the lever dial indicator to a rigid support, applies a certain pre-pressure to the turntable surface, and manually rotates the turntable slowly. The axial runout value is read by observing the swing amplitude of the dial indicator pointer. If it is necessary to test the end face runout and coaxiality, the dial indicator must be disassembled and re-clamped multiple times, aligning with different points on the turntable center and edge.

[0004] This contact-type detection method, which involves rigid contact between the probe and the turntable surface, can scratch the ultra-precision mirror of the turntable, causing irreversible damage; it can only achieve single-point static detection and cannot simulate the dynamic accuracy under the actual working speed of the turntable; the detection parameters are limited, and a single clamping can only measure axial runout, and cannot simultaneously obtain key indicators such as coaxiality and flatness.

[0005] In the existing technology, some improved equipment uses ordinary laser triangulation displacement sensors to achieve non-contact detection. Laser triangulation sensors rely on the position of the reflected spot of the laser on the measured surface to calculate the displacement. Affected by the high reflectivity of the wafer turntable mirror, it is prone to spot drift and reflection interference, resulting in poor measurement repeatability and inability to capture the nanometer-level micro-jumps of the turntable. Summary of the Invention

[0006] The technical problem to be solved by the present invention is to overcome the above-mentioned difficulties and provide a turntable accuracy detection device.

[0007] To solve the above-mentioned technical problems, the technical solution provided by the present invention is as follows: A turntable accuracy testing device includes a testing table, a turntable body on the testing table, a height adjustment mechanism I located above the turntable body on the testing table, a position adjustment mechanism I located at the bottom of the height adjustment mechanism I, a position adjustment mechanism II located at the bottom of the position adjustment mechanism I, a confocal laser probe located at the bottom of the position adjustment mechanism II, the position adjustment mechanism II being able to fine adjust the horizontal position of the confocal laser probe, a testing base plate on the turntable body, the testing base plate including a plate body that is identical to the turntable body of the turntable body, a center seat located at the center of the plate body, and a central standard sphere on the center seat that can reflect the laser emitted by the confocal laser probe.

[0008] As an improvement, the second position adjustment mechanism includes an assembly frame fixed to the bottom of the moving block, a working moving block is slidably provided in the assembly frame, the working moving block is driven by an adjustment structure provided in the assembly frame to perform fine position adjustment, a connecting block is provided at the bottom of the working moving block, a mounting base is provided at the bottom of the connecting block, and a confocal laser probe is detachably provided at the bottom of the mounting base.

[0009] As an improvement, the assembly frame consists of front and rear end plates and several support rods. Each of the two support rods at the bottom is equipped with a slide rail, and a slider is slidably mounted on the slide rail. The two sliders are connected to the working moving block slider. The working moving block can move along the slide rail on the slider and can also move relative to the slider in the direction perpendicular to the slide rail.

[0010] As an improvement, the working block is provided with a slot, and the adjustment structure includes a slider two that moves along the length of the working block within the slot. A lead screw two is threaded into the slider two. A toothed plate is provided on the top of the working block, and a toothed roller is meshed and slidably connected to the toothed plate. The shafts at both ends of the toothed plate and the toothed roller pass through the end plate of the assembly frame, and a knob two is provided at one end of the shaft.

[0011] As an improvement, the detection base plate also includes a reflector ring located at the edge of the plate. The reflector ring can reflect the laser emitted by the confocal laser probe. The cross-sectional shape of the reflector ring is arched, and the upper half of the arch is a standard semicircle. The laser point is vertically aligned with the reflector ring.

[0012] As an improvement, the testing station includes a base, on which a side frame is provided. The position adjustment mechanism includes a frame that moves up and down within the side frame. The top of the frame is connected to the height adjustment mechanism. The frame contains a lead screw driven by a motor and a movable seat threadedly connected to the lead screw. The bottom of the movable seat contains a lead screw driven by a motor and a movable block threadedly connected to the lead screw. The position adjustment mechanism is fixed to the bottom of the movable block.

[0013] As an improvement, the height adjustment mechanism includes a driven gear that rotates on the top of the testing platform. A drive gear driven by a motor is meshed on one side of the driven gear. A screw thread is inserted into the driven gear and passes through the top of the testing platform. A top shell is provided on the frame. A slide rod is provided inside the top shell. The screw passes through the top shell and a bottom plate that is slidably connected to the slide rod is provided on the outer side of the bottom. The screw and the top shell together provide a second height adjustment mechanism that can finely adjust the height of the confocal laser probe.

[0014] As an improvement, the height adjustment mechanism 2 includes a rotating shaft passing through the screw, with a lead screw 1 threadedly connected to the inner wall of the screw at the top of the rotating shaft, and the bottom end of the lead screw 1 being rotatably connected to the frame.

[0015] As an improvement, the height adjustment mechanism 2 also includes a worm gear fixedly sleeved at the bottom of the lead screw 1. A worm is meshed with one side of the worm gear, and the shafts at both ends of the worm pass through the top shell. A knob 1 is provided at the end of one of the shafts.

[0016] The advantages of this invention compared to the prior art are as follows: 1. This device uses a confocal laser probe to achieve non-contact detection. Utilizing the principle of confocal optics, only monochromatic light at the focal point can be received by the detector, completely eliminating reflection interference from highly reflective surfaces. The measurement resolution can reach the nanometer level. There is no physical contact throughout the process, and it will not cause any damage to the turntable mirror or the detection reference. It is perfectly suited to the non-destructive testing requirements of ultra-precision components such as semiconductor magnetic levitation turntables.

[0017] 2. This device drives the detection base plate to rotate synchronously through the rotation of the turntable. The confocal laser probe continuously collects the full circumference height data. All key accuracy parameters such as axial runout, end face runout, coaxiality, and flatness can be calculated synchronously in one clamping. It supports dynamic detection of the turntable at the actual working speed, truly restoring the accuracy performance of the turntable under the operating state. The detection efficiency is several times higher than that of traditional methods.

[0018] 3. This device uses a detection base plate that is identical to the turntable being tested, eliminating reference installation errors at the source. It features an innovative design with a dual-reference structure consisting of a central standard sphere and an arched reflector. The center of the central standard sphere coincides with the rotation axis of the turntable, and its height change directly reflects axial runout, while the offset of the sphere's center reflects coaxiality. The upper half of the arched reflector is a standard semicircle, ensuring that the laser point is always aligned with the highest point, completely eliminating the interference of radial offset on height measurement and ensuring that the test data accurately reflects the actual accuracy of the turntable. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the overall structure of a turntable accuracy testing device according to the present invention. Figure 1 .

[0020] Figure 2 This is a schematic diagram of the overall structure of a turntable accuracy testing device according to the present invention. Figure 2 .

[0021] Figure 3 This is a front view structural schematic diagram of a turntable accuracy detection device according to the present invention.

[0022] Figure 4 This is a right-side structural schematic diagram of a turntable accuracy detection device according to the present invention.

[0023] Figure 5 This is a front view cross-sectional schematic diagram of a turntable accuracy detection device according to the present invention.

[0024] Figure 6 This is a partial structural schematic diagram of a turntable accuracy detection device according to the present invention.

[0025] Figure 7 This is a partial cross-sectional view of a turntable accuracy detection device according to the present invention.

[0026] Figure 8 This invention relates to a turntable accuracy detection device. Figure 5 Schematic diagram of the structure at point A in the middle.

[0027] Figure 9 This is a schematic diagram of the two-part structure of the position adjustment mechanism of the turntable accuracy detection device of the present invention.

[0028] Figure 10 This invention relates to a turntable accuracy detection device. Figure 5 Schematic diagram of the structure at point B.

[0029] Figure 11 This is a schematic diagram of the detection base plate structure of a turntable accuracy detection device according to the present invention.

[0030] As shown in the figure: 1. Testing table; 101. Base; 102. Side frame; 2. Height adjustment mechanism one; 201. Driven gear; 202. Screw; 203. Drive gear; 204. Base plate; 3. Height adjustment mechanism two; 301. Rotating shaft; 302. Lead screw one; 303. Worm gear; 304. Worm; 305. Knob one; 4. Position adjustment mechanism one; 401. Frame; 402. Top shell; 403. Slide rod; 404. Lead screw one; 405. Moving seat; 406. Lead screw two; 407. Moving block; 5. Position adjustment mechanism II; 501. Assembly frame; 502. Slide rail; 503. Slider I; 504. Working moving block; 505. Slot; 506. Slider II; 507. Lead screw II; 508. Toothed plate; 509. Toothed roller; 510. Knob II; 511. Connecting block; 512. Mounting base plate; 6. Confocal laser probe; 7. Turntable body; 8. Detection base plate; 801. Plate body; 802. Reflector ring; 803. Center seat; 804. Center standard ball. Detailed Implementation

[0031] The present invention will now be described in further detail with reference to the accompanying drawings.

[0032] Combined with appendix Figure 1 Appendix Figure 2 Appendix Figure 3 Appendix Figure 4 As shown: A turntable accuracy testing device includes a testing table 1, a turntable body 7 on the testing table 1, a height adjustment mechanism 1 2 located above the turntable body 7 on the testing table 1, a position adjustment mechanism 1 4 at the bottom of the height adjustment mechanism 1 2, a position adjustment mechanism 2 5 at the bottom of the position adjustment mechanism 1 4, a confocal laser probe 6 at the bottom of the position adjustment mechanism 2 5, and the position adjustment mechanism 2 5 can finely adjust the horizontal position of the confocal laser probe 6. A testing base plate 8 is provided on the turntable body 7, and a height adjustment mechanism 2 3 is provided inside the height adjustment mechanism 1 2.

[0033] Working principle of this invention: This rotary table precision testing device is designed for the non-contact multi-parameter testing needs of high-precision rotary tables in the semiconductor, machine tool, and aerospace fields. It completely solves the industry pain points of traditional contact dial indicator testing, such as easy damage to workpieces, low testing efficiency, single parameters, insufficient accuracy, and inability to achieve dynamic continuous testing.

[0034] This device uses the testing stage 1 as a rigid support base. The basic testing disk 8, which is identical to the turntable being tested, is placed coaxially on the turntable body 7. The height adjustment mechanism 1 2 achieves large-range coarse adjustment of the probe, and the height adjustment mechanism 2 3 achieves nanometer-level fine adjustment of the height. The position adjustment mechanism 1 4 achieves large-range coarse positioning of the X / Y axis, and the position adjustment mechanism 2 5 achieves nanometer-level fine adjustment of the X / Y axis. The confocal laser probe 6 is precisely aligned with the basic testing disk 8. When the turntable body 7 starts rotating, the confocal laser probe 6 collects data from all directions. The data processing system simultaneously calculates all accuracy parameters of the turntable body 7, such as axial runout, end face runout, coaxiality, and flatness. All inspection items can be completed in one clamping, which greatly improves the inspection efficiency compared with the traditional method. It is perfectly suited to the factory inspection and periodic calibration requirements of high-precision turntables such as inch wafer lithography machine turntables, five-axis machine tool turntables, and aerospace inertial navigation turntables.

[0035] Combined with appendix Figure 1 Appendix Figure 2 Appendix Figure 5 Appendix Figure 11 As shown: This module is the core of the rigid bearing and testing benchmark of the whole set of equipment, including the testing table 1, which is integrally cast from high-strength cast iron. The bottom of the testing table 1 is a base 101 with leveling feet, and vertical side frames 102 are symmetrically welded on both sides of the top. The test turntable body 7 is fixedly installed at the center of the base 101 by bolts, with the turntable facing upward. A detection base plate 8 is coaxially mounted on the turntable. The detection base plate 8 includes a plate body 801 that is completely consistent with the size and precision of the turntable. A cylindrical center seat 803 is fixed to the center of the plate body 801 by interference fit. A central standard ball 804 is embedded at the top of the center seat 803. An annular reflector ring 802 is integrally formed at the outer edge of the plate body 801. The cross-section of the reflector ring 802 is arched, and the upper half of the arch is a standard semicircle. The laser point is vertically aligned with the highest point of the arch of the reflector ring 802.

[0036] The confocal laser probe 6 is an existing technology. Its internal laser source emits a beam of broadband white light, and the optical system focuses light of different wavelengths at different positions on the optical axis to form a continuous sequence of focal points. When the laser shines on the surface being measured, the light reflected from the surface returns along the original path. After passing through the confocal aperture, only the monochromatic light at the focal point can pass through the aperture and be received by the spectral detector. Light of other wavelengths is blocked by the confocal aperture. The signal processing unit analyzes the peak wavelength of the spectrum received by the detector to calculate the distance from the measured point to the probe, thereby obtaining the height value of the measured point. When the turntable body 7 drives the detection base plate 8 to rotate at a set speed, the confocal laser probe 6 continuously collects height data at different angles throughout the entire circumference at a set sampling frequency. After filtering and denoising the collected raw height data, the data processing system calculates the axial runout of the turntable body 7 by the height change of the apex of the central standard sphere 804, calculates the end face runout and radial runout of the turntable body 7 by the height change of the highest point of the arch of the reflector ring 802, calculates the coaxiality of the turntable body 7 by the position offset of the center of the central standard sphere 804 at different angles, and calculates the flatness of the turntable body 7 by the height data at different radius positions. Finally, a complete accuracy test report of the turntable body 7 is generated. The non-contact measurement method will not cause any damage to the surface of the high-precision turntable body 7 and the detection base plate 8.

[0037] The turntable body 7 is a magnetic levitation wafer turntable in the prior art. It mainly consists of a fixed base, an electromagnetic levitation coil group, a levitation bearing platform and an attitude control component. It relies on the mutual balance of electromagnetic forces to make the bearing platform detach from the base to form a uniform levitation gap. It abandons the traditional mechanical shaft contact transmission structure. Then, through electromagnetic drive and closed-loop position control, it drives the platform to rotate at a uniform speed. There is no mechanical friction loss during operation, and it can stably support the wafer to complete circumferential rotation operation.

[0038] The cast iron base 101 of the testing table 1 has undergone artificial aging treatment, which completely eliminates internal stress and can maintain dimensional stability for a long time. The testing table 1 is leveled to a horizontal position by the four leveling feet at the bottom, providing an absolutely stable installation benchmark for the turntable body 7 and the testing mechanism. The test turntable body 7 is precisely fixed to the mounting surface at the center of the base 101 by positioning pins and bolts, ensuring that the rotation axis 301 of the turntable body 7 is parallel to the vertical reference line of the test table 1; the plate body 801 of the test base plate 8 and the turntable body 7 adopt the same processing technology and precision requirements. The central standard sphere 804 is made of non-magnetic materials such as non-magnetic microcrystalline glass and non-magnetic stainless steel to avoid interference with the magnetic levitation field. It has extremely high sphericity, and its center coincides with the rotation axis of the turntable body 7. When the turntable body 7 rotates, the height change of the apex of the central standard sphere 804 directly reflects the axial runout of the turntable body 7, while the positional offset of the center of the central standard sphere 804 reflects the coaxiality of the turntable body 7. The upper half of the arched reflector ring 802 on the edge is a standard semicircle. The laser point of the confocal laser probe 6 is vertically aligned with the highest point of the semicircle. Even if there is a slight radial offset of the turntable body 7, the laser point will always fall on the highest point of the semicircle. The measured height change only reflects the axial runout and end face runout of the turntable body 7, completely eliminating the interference of radial offset on the height measurement results and ensuring the accuracy of the detection data.

[0039] The design of the test base plate 8 and the turntable body 7 being identical eliminates the reference installation error from the source, and the test results directly reflect the true accuracy of the turntable body 7. The dual reference design of the central standard ball 804 and the arched reflector 802 can simultaneously test multiple parameters of the turntable body 7, such as axial runout, radial runout, coaxiality, and flatness. All test items can be completed in one clamping without the need for multiple clamping and adjustment. The unique design of the arched reflector 802 completely eliminates the interference of radial offset on height measurement, greatly improving the accuracy and repeatability of the test results.

[0040] Combined with appendix Figure 1 Appendix Figure 2 Appendix Figure 5 Appendix Figure 6 Appendix Figure 7 Appendix Figure 8 As shown: Height adjustment mechanism 1 2 and height adjustment mechanism 2 3 provide the confocal laser probe 6 with a wide range of coarse adjustment and nanometer-level fine adjustment height adjustment functions. Height adjustment mechanism 1 2 includes a driven gear 201 rotatably mounted on the top of the detection table 1. A drive gear 203 driven by a servo motor is meshed on one side of the driven gear 201. The center of the driven gear 201 has an internal threaded hole, and a screw 202 that passes vertically through the top of the detection table 1 is threaded into it. A horizontal base plate 204 is fixedly connected to the outer side of the bottom of the screw 202. The two ends of the base plate 204 are slidably sleeved on two vertical slide rods 403. The slide rods 403 are fixed inside the top shell 402. The height adjustment mechanism 2 includes a rotating shaft 301 that coaxially passes through the hollow channel inside the screw 202. A lead screw 302 is fixedly connected to the top of the rotating shaft 301. The lead screw 302 is threadedly connected to the internal threaded hole on the inner wall of the screw 202. The bottom end of the lead screw 302 is rotatably connected to the top of the frame 401. A worm gear 303 is fixedly sleeved at the bottom of the lead screw 302. A horizontal worm 304 is meshed on one side of the worm gear 303. The two ends of the worm 304 extend outward through the side wall of the top shell 402. A graduated knob 305 is fixedly installed at the end of one of the shafts.

[0041] When a wide range of height adjustment of the confocal laser probe 6 is required, the servo motor starts, driving the drive gear 203 to rotate. The drive gear 203 meshes with the driven gear 201, driving the driven gear 201 to rotate around its own axis. The internal thread at the center of the driven gear 201 cooperates with the screw 202, converting the rotational motion into the vertical up-and-down movement of the screw 202. The screw 202 drives the entire top shell 402 and frame 401 to move up and down synchronously through the lead screw 302 and the rotating shaft 301, realizing a wide range of coarse adjustment of the confocal laser probe 6, which can adapt to the detection needs of turntable bodies 7 of different heights. After the coarse adjustment is completed, when nanometer-level height fine adjustment is required, manually turn the graduated knob 305 to rotate the worm 304. The worm 304 meshes with the worm wheel 303, causing the worm wheel 303 to rotate synchronously with the lead screw 302. The lead screw 302 engages with the internal thread on the inner wall of the screw 202. Since the screw 202 is locked by the driven gear 201 and cannot rotate, the rotation of the lead screw 302 will cause the frame 401 to move slightly vertically up and down relative to the screw 202. The two sliding rods 403 slide vertically along the bottom plate 204 at the bottom of the screw 202, realizing nanometer-level height fine adjustment of the confocal laser probe 6. This can accurately adjust the laser focus to the surface being measured, ensuring that the confocal laser probe 6 is in the optimal measurement range.

[0042] The height adjustment architecture, which combines electric coarse adjustment and manual fine adjustment, balances the adjustment range and precision. It can quickly adapt to turntable bodies 7 of different heights and achieve nanometer-level precise focusing. The graduated knob 305 can intuitively display the amount of fine adjustment displacement, making it easy for operators to accurately control the focusing process.

[0043] Combined with appendix Figure 1 Appendix Figure 2 Appendix Figure 6 Appendix Figure 7 Appendix Figure 8 Appendix Figure 9 Appendix Figure 10 As shown: The position adjustment mechanism 1 4 includes a frame 401 that moves up and down within the side frame 102. The top of the frame 401 is connected to the height adjustment mechanism 1 2. The frame 401 is provided with a lead screw 1 404 driven by a motor and a movable seat 405 threadedly connected to the lead screw 1 404. The bottom of the movable seat 405 is provided with a lead screw 2 406 driven by a motor and a movable block 407 threadedly connected to the lead screw 2 406. The position adjustment mechanism 2 5 is fixedly connected to the bottom of the movable block 407.

[0044] The second position adjustment mechanism 5 includes an assembly frame 501 fixed to the bottom of the movable block 407. A working block 504 is slidably disposed in the assembly frame 501. The working block 504 is driven by an adjustment structure disposed in the assembly frame 501 to perform fine position adjustment. A connecting block 511 is disposed at the bottom of the working block 504. A mounting base plate 512 is disposed at the bottom of the connecting block 511. The confocal laser probe 6 is detachably disposed at the bottom of the mounting base plate 512.

[0045] The assembly frame 501 consists of front and rear end plates and several support rods. Each of the two support rods at the bottom is equipped with a slide rail 502. A slider 503 slides on the slide rail 502. The two sliders 503 are connected to the slider of the working block 504. The working block 504 can move along the slide rail 502 on the slider 503 and can move relative to the slider 503 in the direction perpendicular to the slide rail 502.

[0046] Position adjustment mechanism 1 4 and position adjustment mechanism 2 5 provide the confocal laser probe 6 with a wide range of coarse positioning and nanometer-level fine adjustment functions; position adjustment mechanism 1 4 includes a rectangular frame 401, a top shell 402 is fixedly connected to the top of the frame 401, and a lead screw 1 404 driven by a servo motor is horizontally installed inside the frame 401. A movable seat 405 is threaded onto the lead screw 1 404 and can move horizontally. The bottom of the movable seat 405 is horizontally mounted with a second lead screw 406 driven by a servo motor. The axis of the second lead screw 406 is perpendicular to the first lead screw 404. A movable block 407 is threaded onto the second lead screw 406. The movable block 407 can move horizontally along the vertical first lead screw 404. The second position adjustment mechanism includes an assembly frame 501 fixed to the bottom of the moving block 407 by bolts. The assembly frame 501 consists of front and rear end plates and four horizontal support rods. Each of the two support rods at the bottom is fixed with a slide rail 502. Each of the two slide rails 502 is slidably fitted with a slider 503. The two sliders 503 together support the working moving block 504. The working moving block 504 can slide along the slide rail 502 and can also slide relative to the slider 503 in the direction perpendicular to the slide rail 502. The working block 504 has a slot 505 along its length. A slider 506 slides within the slot 505. A lead screw 507 is threaded into the slider 506. Both ends of the lead screw 507 are rotatably mounted on the front and rear end plates of the assembly frame 501. A toothed plate 508 is fixed to the top of the working block 504. A toothed roller 509 is meshed on the toothed plate 508. Both ends of the toothed roller 509 are rotatably mounted on the front and rear end plates of the assembly frame 501. A graduated knob 510 is fixedly mounted on one end of the lead screw 507 and the toothed roller 509. A connecting block 511 is fixedly connected to the bottom of the working block 504. A mounting base 512 is fixed to the bottom of the connecting block 511. The confocal laser probe 6 is detachably mounted on the bottom of the mounting base 512.

[0047] like Figure 7 As shown, when it is necessary to perform large-scale planar coarse positioning of the confocal laser probe 6, the servo motor in the frame 401 drives the lead screw 404 to rotate, which drives the moving seat 405 to move horizontally along the X-axis. Another servo motor drives the lead screw 406 to rotate, which drives the moving block 407 to move horizontally along the Y-axis. This causes the entire position adjustment mechanism 5 and the confocal laser probe 6 to move in a large range in the X / Y plane, quickly moving the probe above the central standard ball 804 or the reflector ring 802. After coarse positioning is completed, when nanometer-level fine adjustment and alignment of the measurement points are required, manually rotate the knob 510 corresponding to the X-axis to rotate the toothed roller 509. The toothed roller 509 meshes with the toothed plate 508, driving the working block 504 to make a small movement along the slide rail 502 in the X-axis direction. Manually rotate the knob 510 corresponding to the Y-axis to rotate the lead screw 507. The lead screw 507 is threaded with the slider 506, driving the slider 506 to move along the Y-axis direction within the slot 505, thereby pushing the working block 504 to make a small movement relative to the slider 503 in the Y-axis direction. By independently adjusting the two knobs 510, the confocal laser probe 6 can be finely tuned at the nanometer level in the X / Y plane, accurately aligning the laser point with the apex of the central standard sphere 804 or the highest point of the arch of the reflector ring 802.

[0048] When implementing this turntable accuracy testing device, first fix the turntable body 7 on the base 101 of the testing table 1, and then install the testing base plate 8 on the turntable body 7, so that the central standard ball 804 coincides with the rotation center of the turntable body 7 and the edge of the reflector ring 802 is aligned. Start the height adjustment mechanism 2, which drives the driven gear 201 and screw 202 to raise and lower the probe by the drive gear 203, completing the large-range coarse adjustment of the probe. Then rotate the knob 305, which drives the rotating shaft 301 to finely adjust the height through the worm 304, worm wheel 303 and lead screw 302, so that the confocal laser probe 6 is focused on the surface of the central standard sphere 804 or the reflector ring 802. Next, the position adjustment mechanism 4 is activated. The lead screw 404 and lead screw 406 drive the moving seat 405 and moving block 407 to perform large-range coarse positioning in the X and Y directions. Then, the knob 510 is rotated, and the working moving block 504 is driven by the toothed roller 509, toothed plate 508 and lead screw 507 to perform fine adjustment, so that the laser point is accurately aligned with the vertex of the center standard ball 804 or the highest point of the reflector ring 802. Then, the turntable body 7 is started to rotate at a constant speed, and the confocal laser probe 6 continuously collects the full circumference height data, and simultaneously calculates the accuracy parameters such as axial runout, end face runout, coaxiality, and flatness. After the test is completed, the position adjustment mechanism and height adjustment mechanism are reset in sequence, and the test base plate 8 is removed to complete a complete test process.

[0049] The present invention and its embodiments have been described above. This description is not restrictive, and the accompanying drawings are only one embodiment of the present invention; the actual structure is not limited thereto. In conclusion, if those skilled in the art are inspired by this description and design similar structures and embodiments without departing from the spirit of the invention, such designs should fall within the protection scope of the present invention.

Claims

1. A turntable accuracy testing device, comprising a testing table (1), a turntable body (7) on the testing table (1), a height adjustment mechanism (2) located above the turntable body (7) on the testing table (1), and a position adjustment mechanism (4) at the bottom of the height adjustment mechanism (2), characterized in that: The bottom of the position adjustment mechanism 1 (4) is provided with the position adjustment mechanism 2 (5), the bottom of the position adjustment mechanism 2 (5) is provided with the confocal laser probe (6), the position adjustment mechanism 2 (5) can finely adjust the horizontal position of the confocal laser probe (6), the turntable body (7) is provided with the detection base plate (8), the detection base plate (8) includes a plate body (801) that is identical to the turntable of the turntable body (7), the center of the plate body (801) is provided with the center seat (803), the center seat (803) is provided with the center standard ball (804) that can reflect the laser emitted by the confocal laser probe (6); The detection base plate (8) also includes a reflector (802) located at the edge of the plate body (801). The reflector (802) can reflect the laser emitted by the confocal laser probe (6). The cross-section of the reflector (802) is arched, and the upper half of the arch is a standard semicircle. The laser point is vertically aligned with the reflector (802).

2. The turntable accuracy detection device according to claim 1, characterized in that: The testing table (1) includes a base (101), and a side frame (102) is provided on the base (101). The position adjustment mechanism (4) includes a frame (401) that moves up and down inside the side frame (102). The top of the frame (401) is connected to the height adjustment mechanism (2). The frame (401) is provided with a lead screw (404) driven by a motor and a movable seat (405) threadedly connected to the lead screw (404). The bottom of the movable seat (405) is provided with a lead screw (406) driven by a motor and a movable block (407) threadedly connected to the lead screw (406). The position adjustment mechanism (5) is fixed to the bottom of the movable block (407).

3. The turntable accuracy detection device according to claim 2, characterized in that: The second position adjustment mechanism (5) includes an assembly frame (501) fixed to the bottom of the moving block (407). A working moving block (504) is slidably provided in the assembly frame (501). The working moving block (504) is driven by an adjustment structure provided in the assembly frame (501) for fine position adjustment. A connecting block (511) is provided at the bottom of the working moving block (504). A mounting base plate (512) is provided at the bottom of the connecting block (511). A confocal laser probe (6) is detachably provided at the bottom of the mounting base plate (512).

4. The turntable accuracy detection device according to claim 3, characterized in that: The assembly frame (501) consists of front and rear end plates and several support rods. The bottom support rods are provided with slide rails (502). Slider 1 (503) is slidably provided on slide rails (502). The two sliders 1 (503) are connected to the slider of the working block (504). The working block (504) can move along slide rails (502) on slider 1 (503) and can move relative to slider 1 (503) in the direction perpendicular to slide rails (502).

5. The turntable accuracy detection device according to claim 3, characterized in that: The working block (504) has a slot (505) inside. The adjustment structure includes a slider two (506) that moves along the length of the working block (504) inside the slot (505). A lead screw two (507) is threaded into the slider two (506). A toothed plate (508) is provided on the top of the working block (504). A toothed roller (509) is meshed and slidably connected on the toothed plate (508). The shafts at both ends of the toothed plate (508) and the toothed roller (509) pass through the end plate of the assembly frame (501), and a knob two (510) is provided at one end of the shaft.

6. The turntable accuracy detection device according to claim 2, characterized in that: The height adjustment mechanism 1 (2) includes a driven gear (201) rotatably mounted on the top of the testing platform (1). A drive gear (203) driven by a motor is meshed on one side of the driven gear (201). A screw (202) passing through the top of the testing platform (1) is threaded into the driven gear (201). A top shell (402) is provided on the frame (401). A slide rod (403) is provided inside the top shell (402). The screw (202) passes through the top shell (402) and a bottom plate (204) is provided on the outer side of the bottom, which is slidably connected to the slide rod (403). The screw (202) and the top shell (402) are together equipped with a height adjustment mechanism 2 (3) that can finely adjust the height of the confocal laser probe (6).

7. The turntable accuracy detection device according to claim 6, characterized in that: The height adjustment mechanism 2 (3) includes a rotating shaft (301) passing through the screw (202). The top of the rotating shaft (301) is provided with a lead screw (302) that is threaded to the inner wall of the screw (202). The bottom end of the lead screw (302) is rotatably connected to the frame (401).

8. The turntable accuracy detection device according to claim 7, characterized in that: The height adjustment mechanism 2 (3) also includes a worm gear (303) fixedly sleeved at the bottom of the lead screw 1 (302). A worm (304) is meshed on one side of the worm gear (303). The shafts at both ends of the worm (304) pass through the top shell (402), and a knob 1 (305) is provided at the end of one of the shafts.

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