Singularity-enhanced micro-opto-electro-mechanical angular velocity sensing system

Abstract

This invention relates to the field of micro-opto-electro-mechanical (MEMS) gyroscope technology, specifically a singularity-enhanced MEMS angular velocity sensing system. The system includes a laser, an isolator, a beam splitter, two photodetectors, a dual-trace oscilloscope, a computer, and a chip-on-a-chip (SoC). The SoC includes a substrate with two long longitudinal beams fixed to its upper surface. Two straight waveguides A are fixedly supported between the two beams, and each of the two waveguides A has a ring resonant cavity A coupled to its opposite side. Two straight waveguides B are longitudinally slidably supported between the two beams, and each waveguide B is coupled to a corresponding waveguide A. The two output ends of the beam splitter are connected to the left ends of the two waveguides B, and the left ends of the two waveguides A are connected to the input ends of the two photodetectors. This system solves the problem of existing MEMS gyroscopes being unable to simultaneously achieve miniaturization and high sensitivity, and is suitable for angular velocity measurement.

Description

Technical Field

[0001] This invention relates to the field of micro-opto-electro-mechanical gyroscope technology, specifically a singularity-enhanced micro-opto-electro-mechanical angular velocity sensing system. Background Technology

[0002] Currently, micro-opto-electromechanical (MEMS) gyroscopes, with their unique advantages of combining light and MEMS, exhibit significant competitiveness in size control and anti-interference capabilities, and have become an important development direction for miniaturized navigation devices. However, in practical applications, existing MEMS gyroscopes are limited by their sensing mechanism (using optical interferometry to detect nanoscale displacement of micrometer-scale mechanical structures and achieving angular velocity measurement through reciprocal structures). Their sensitivity is constrained by size (i.e., size reduction leads to a significant decrease in sensitivity) and by parasitic non-reciprocal noise interference. Therefore, they cannot simultaneously achieve miniaturization and high sensitivity, making it impossible to accurately measure weak rotational signals under miniaturized conditions. Based on this, it is necessary to invent a singularity-enhanced MEMS angular velocity sensing system to solve the problem of existing MEMS gyroscopes being unable to achieve both miniaturization and high sensitivity. Summary of the Invention

[0003] To address the problem that existing micro-opto-electro-mechanical gyroscopes cannot simultaneously achieve miniaturization and high sensitivity, this invention provides a singularity-enhanced micro-opto-electro-mechanical angular velocity sensing system.

[0004] This invention is achieved using the following technical solution:

[0005] A singularity-enhanced micro-opto-electromechanical angular velocity sensing system includes a laser, isolator, beam splitter, two photodetectors, dual-trace oscilloscope, computer, and on-chip architecture;

[0006] The on-chip structure includes a substrate; two long longitudinal beams distributed laterally are fixed on the upper surface of the substrate; two horizontally arranged and front-back straight waveguides A are fixedly supported between the two long longitudinal beams; a ring resonant cavity A is coupled to the opposite side of each of the two straight waveguides A, and both ring resonant cavities A are fixed to the upper surface of the substrate; two horizontally arranged and front-back straight waveguides B are longitudinally slidably supported between the two long longitudinal beams, and both straight waveguides B are located between the two straight waveguides A; a ring resonant cavity B is coupled to each straight waveguide B and its corresponding straight waveguide A; a connecting plate is fixed to each ring resonant cavity B and its corresponding straight waveguide B; a sensitive element is installed between the two connecting plates;

[0007] The laser's output end is connected to the beam splitter's input end via an isolator; the two output ends of the beam splitter are respectively connected to the left ends of two straight waveguides B; the left ends of the two straight waveguides A are respectively connected to the input ends of two photodetectors; the signal output ends of the two photodetectors are respectively connected to the two signal input ends of a dual-trace oscilloscope; the signal output end of the dual-trace oscilloscope is connected to the signal input end of a computer.

[0008] Furthermore, the sensitive unit includes two crossbeams; the two crossbeams are respectively fixed to the opposite sides of the two connecting plates, and both crossbeams can be longitudinally slidably supported between the two long longitudinal beams; two short longitudinal beams distributed left and right are fixedly supported between the two crossbeams; a frame is supported between the two short longitudinal beams by a spring assembly; a mass block is fixedly embedded in the inner cavity of the frame; two electrostatic actuators distributed left and right are fixed on the outer side of the frame.

[0009] Furthermore, the spring assembly includes four transversely arranged springs in a rectangular distribution; two of the springs are located between one of the short longitudinal beams and the frame; and the other two springs are located between the other short longitudinal beam and the frame.

[0010] Furthermore, each long longitudinal beam has two through-holes for supporting the straight waveguide A; each long longitudinal beam has two through-holes for supporting the straight waveguide B; and each long longitudinal beam has two grooves on its inner side for supporting the crossbeam.

[0011] Furthermore, it also includes two spacers; the two annular resonant cavities A are respectively fixed to the upper surface of the substrate by the two spacers.

[0012] Furthermore, the laser is a 1550nm narrow linewidth laser; the beam splitter has a splitting ratio of 50:50.

[0013] A singularity-enhanced micro-opto-electro-mechanical angular velocity measurement method, which is based on the singularity-enhanced micro-opto-electro-mechanical angular velocity sensing system described in this invention, is implemented through the following steps:

[0014] Step 1: Adjust the sensing system and stabilize it in its initial state, thereby placing the sensing system at a singular point;

[0015] Step 2: Apply voltage to the two electrostatic actuators so that they alternately generate electrostatic force; under the action of electrostatic force, the frame vibrates laterally at high frequency, and drives the mass block to vibrate laterally at high frequency.

[0016] Step 3: Activate the laser. The laser emits a probe beam, which passes through an isolator and is incident on a beam splitter, where it is split into two optical signals. The first optical signal passes sequentially through the corresponding straight waveguide B, the corresponding ring resonator B, the corresponding straight waveguide A, the corresponding ring resonator A, and the corresponding straight waveguide A to the first photodetector, where it is converted into a first electrical signal. The second optical signal passes sequentially through the corresponding straight waveguide B, the corresponding ring resonator B, the corresponding straight waveguide A, the corresponding ring resonator A, and the corresponding straight waveguide A to the second photodetector, where it is converted into a second electrical signal. Both electrical signals are transmitted to a dual-trace oscilloscope, where they are converted into two transmission spectra. These two transmission spectra are displayed on the dual-trace oscilloscope and simultaneously transmitted to a computer.

[0017] When the sensing system is not rotating, the operating point is locked at the singularity, and neither of the two transmission spectra splits. When the sensing system rotates, the mass block reciprocates longitudinally under the action of the Coriolis force, driving the frame, spring assembly, two short longitudinal beams, two cross beams, two connecting plates, two annular resonant cavities B, and two straight waveguides B to reciprocate longitudinally as well. This causes the coupling distance between the two annular resonant cavities B and the two straight waveguides A to change in equal magnitude but opposite direction. The change in coupling distance induces the operating point to be pushed away from the singularity, thus causing the two transmission spectra to split alternately. The computer monitors the splitting distance of the transmission spectra in real time and substitutes the splitting distance into the angular velocity measurement equation of the sensing system to calculate the angular velocity of the sensing system. The angular velocity measurement equation of the sensing system is expressed as follows:

[0018] ;

[0019] In the formula: Indicates the splitting distance of the transmission spectrum; This represents the resonant frequency of the ring resonant cavity A; This represents the resonant frequency of the ring resonant cavity B; This represents the coupling coefficient between the ring resonator B and the straight waveguide A; express The attenuation coefficient; Indicates the mass of the mass block; Indicates the amplitude of transverse high-frequency vibration; This indicates the frequency of transverse high-frequency vibration; Indicates the stiffness coefficient of the spring assembly; It represents angular velocity.

[0020] Compared to existing opto-electromechanical gyroscopes, this invention employs a novel sensing mechanism (combining a singular point structure with a Coriolis force opto-electromechanical structure, utilizing the approximate proportionality between the splitting distance of the transmission spectrum and the square root of the measured angular velocity, and achieving angular velocity measurement through a non-reciprocal structure). This sensing mechanism ensures that sensitivity is neither limited by size nor affected by parasitic non-reciprocal noise, thus effectively balancing miniaturization and high sensitivity, enabling accurate measurement of weak rotational signals under miniaturized conditions. Figure 7 As shown, the sensitivity of the present invention is significantly higher than that of existing micro-opto-electro-mechanical gyroscopes.

[0021] This invention effectively solves the problem that existing micro-opto-electromechanical gyroscopes cannot simultaneously achieve miniaturization and high sensitivity, and is suitable for angular velocity measurement. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the structure of the present invention.

[0023] Figure 2 yes Figure 1 A partial structural diagram.

[0024] Figure 3 yes Figure 2 AA sectional view.

[0025] Figure 4 yes Figure 3 A partial structural diagram.

[0026] Figure 5 yes Figure 2 A partial structural diagram.

[0027] Figure 6 This is a schematic diagram of the angular velocity measurement equation curve of the present invention.

[0028] Figure 7 This is a schematic diagram comparing the sensitivity curve of the present invention with the sensitivity curve of an existing micro-opto-electro-mechanical gyroscope.

[0029] In the diagram: 1-Laser, 2-Isolator, 3-Beam splitter, 4-Photodetector, 5-Dual-trace oscilloscope, 6-Computer, 7-Substrate, 8-Long longitudinal beam, 8.1-Support hole, 8.2-Sliding hole, 8.3-Sliding groove, 9-Straight waveguide A, 10-Ring resonator A, 11-Straight waveguide B, 12-Ring resonator B, 13-Connecting plate, 14-Crossbeam, 15-Short longitudinal beam, 16-Frame, 17-Mass block, 18-Electrostatic driver, 19-Spring, 20-Padded block; Arrows indicate the direction of optical signal propagation. Detailed Implementation

[0030] A singularity-enhanced micro-opto-electromechanical angular velocity sensing system includes a laser 1, an isolator 2, a beam splitter 3, two photodetectors 4, a dual-trace oscilloscope 5, a computer 6, and an on-chip architecture.

[0031] The on-chip structure includes a substrate 7; two long longitudinal beams 8 are fixed on the upper surface of the substrate 7; two horizontally arranged and front-back straight waveguides A9 are fixedly supported between the two long longitudinal beams 8; a ring resonant cavity A10 is coupled to the opposite side of each of the two straight waveguides A9, and both ring resonant cavities A10 are fixed to the upper surface of the substrate 7; two horizontally arranged and front-back straight waveguides B11 are longitudinally slidably supported between the two long longitudinal beams 8, and both straight waveguides B11 are located between the two straight waveguides A9; a ring resonant cavity B12 is coupled between each straight waveguide B11 and its corresponding straight waveguide A9; a connecting plate 13 is fixed together on each ring resonant cavity B12 and its corresponding straight waveguide B11; a sensitive element is installed between the two connecting plates 13.

[0032] The output end of laser 1 is connected to the input end of beam splitter 3 through isolator 2; the two output ends of beam splitter 3 are respectively connected to the left ends of two straight waveguides B11; the left ends of two straight waveguides A9 are respectively connected to the input ends of two photodetectors 4; the signal output ends of the two photodetectors 4 are respectively connected to the two signal input ends of dual-trace oscilloscope 5; the signal output end of dual-trace oscilloscope 5 is connected to the signal input end of computer 6.

[0033] The sensitive unit includes two crossbeams 14; the two crossbeams 14 are respectively fixed to the opposite sides of two connecting plates 13, and both crossbeams 14 can be longitudinally slidably supported between two long longitudinal beams 8; two short longitudinal beams 15 distributed to the left and right are fixedly supported between the two crossbeams 14; a frame 16 is supported between the two short longitudinal beams 15 by a spring assembly; a mass block 17 is fixedly embedded in the inner cavity of the frame 16; two electrostatic actuators 18 distributed to the left and right are fixed on the outer side of the frame 16.

[0034] The spring assembly includes four transversely arranged springs 19 in a rectangular pattern; two springs 19 are located between one of the short longitudinal beams 15 and the frame 16; the other two springs 19 are located between the other short longitudinal beam 15 and the frame 16.

[0035] Each longitudinal beam 8 has two through-holes 8.1 for supporting the straight waveguide A9; each longitudinal beam 8 has two through-holes 8.2 for supporting the straight waveguide B11; and each longitudinal beam 8 has two grooves 8.3 on its inner side for supporting the crossbeam 14.

[0036] It also includes two pads 20; the two annular resonant cavities A10 are respectively fixed to the upper surface of the substrate 7 by the two pads 20.

[0037] Laser 1 is a 1550nm narrow linewidth laser; beam splitter 3 has a splitting ratio of 50:50.

[0038] A singularity-enhanced micro-opto-electro-mechanical angular velocity measurement method, which is based on the singularity-enhanced micro-opto-electro-mechanical angular velocity sensing system described in this invention, is implemented through the following steps:

[0039] Step 1: Adjust the sensing system and stabilize it in its initial state, thereby placing the sensing system at a singular point;

[0040] Step 2: Apply voltage to the two electrostatic actuators 18, so that the two electrostatic actuators 18 alternately generate electrostatic force; under the action of electrostatic force, the frame 16 performs transverse high-frequency vibration, and drives the mass block 17 to perform transverse high-frequency vibration.

[0041] Step 3: Start laser 1. Laser 1 emits a probe beam, which passes through isolator 2 and enters beam splitter 3. Beam splitter 3 then splits the beam into two optical signals: The first optical signal passes sequentially through the corresponding straight waveguide B11, the corresponding ring resonator B12, the corresponding straight waveguide A9, the corresponding ring resonator A10, and the corresponding straight waveguide A9 before entering the first photodetector 4, where it is converted into a first electrical signal; The second optical signal passes sequentially through the corresponding straight waveguide B11, the corresponding ring resonator B12, the corresponding straight waveguide A9, the corresponding ring resonator A10, and the corresponding straight waveguide A9 before entering the second photodetector 4, where it is converted into a second electrical signal; Both electrical signals are transmitted to dual-trace oscilloscope 5 and converted into two transmission spectra; The two transmission spectra are displayed on dual-trace oscilloscope 5 and transmitted to computer 6.

[0042] When the sensing system is not rotating, the operating point is locked at the singularity, and neither of the two transmission spectra splits. When the sensing system rotates, the mass block 17 reciprocates longitudinally under the action of the Coriolis force, driving the frame 16, spring assembly, two short longitudinal beams 15, two cross beams 14, two connecting plates 13, two annular resonant cavities B12, and two straight waveguides B11 to reciprocate longitudinally as well. This causes the coupling distance between the two annular resonant cavities B12 and the two straight waveguides A9 to change in equal magnitude but opposite direction. The change in coupling distance induces the operating point to be pushed away from the singularity, thereby causing the two transmission spectra to split alternately. The computer 6 monitors the splitting distance of the transmission spectrum in real time and substitutes the splitting distance of the transmission spectrum into the angular velocity measurement equation of the sensing system to calculate the angular velocity of the sensing system. The angular velocity measurement equation of the sensing system is expressed as follows:

[0043] ;

[0044] In the formula: Indicates the splitting distance of the transmission spectrum; This represents the resonant frequency of the ring resonant cavity A10; This represents the resonant frequency of the ring resonant cavity B12; This represents the coupling coefficient between the ring resonator B12 and the straight waveguide A9; express The attenuation coefficient; This indicates the mass of mass block 17; Indicates the amplitude of transverse high-frequency vibration; This indicates the frequency of transverse high-frequency vibration; Indicates the stiffness coefficient of the spring assembly; It represents angular velocity.

[0045] While specific embodiments of the present invention have been described above, those skilled in the art should understand that these are merely illustrative examples, and the scope of protection of the present invention is defined by the appended claims. Those skilled in the art can make various changes or modifications to these embodiments without departing from the principles and essence of the present invention, but all such changes and modifications fall within the scope of protection of the present invention.

Claims

1. A singularity-enhanced micro-opto-electro-mechanical angular velocity sensing system, characterized in that: Includes a laser (1), an isolator (2), a beam splitter (3), two photodetectors (4), a dual-trace oscilloscope (5), a computer (6), and an on-chip structure; The on-chip structure includes a substrate (7); two long longitudinal beams (8) are fixed on the upper surface of the substrate (7); two horizontally arranged and front-back arranged straight waveguides A (9) are fixedly supported between the two long longitudinal beams (8); a ring resonant cavity A (10) is coupled to the opposite side of each of the two straight waveguides A (9), and both ring resonant cavities A (10) are fixed to the upper surface of the substrate (7); two horizontally arranged and front-back arranged straight waveguides B (11) are longitudinally slidably supported between the two long longitudinal beams (8), and both straight waveguides B (11) are located between the two straight waveguides A (9); a ring resonant cavity B (12) is coupled between each straight waveguide B (11) and the corresponding straight waveguide A (9); a connecting plate (13) is fixed together on each ring resonant cavity B (12) and the corresponding straight waveguide B (11); a sensitive unit is installed between the two connecting plates (13); The output end of the laser (1) is connected to the input end of the beam splitter (3) through the isolator (2); the two output ends of the beam splitter (3) are respectively connected to the left ends of the two straight waveguides B (11); the left ends of the two straight waveguides A (9) are respectively connected to the input ends of the two photodetectors (4); the signal output ends of the two photodetectors (4) are respectively connected to the two signal input ends of the dual-trace oscilloscope (5); the signal output end of the dual-trace oscilloscope (5) is connected to the signal input end of the computer (6).

2. The singularity-enhanced micro-opto-electro-mechanical angular velocity sensing system according to claim 1, characterized in that: The sensitive unit includes two crossbeams (14); the two crossbeams (14) are fixed to the opposite sides of the two connecting plates (13), and both crossbeams (14) can be longitudinally slidably supported between the two long longitudinal beams (8); two short longitudinal beams (15) distributed to the left and right are fixedly supported between the two crossbeams (14); a frame (16) is supported between the two short longitudinal beams (15) by a spring assembly; a mass block (17) is fixedly embedded in the inner cavity of the frame (16); two electrostatic actuators (18) distributed to the left and right are fixed on the outer side of the frame (16).

3. The singularity-enhanced micro-opto-electro-mechanical angular velocity sensing system according to claim 2, characterized in that: The spring assembly includes four transversely arranged springs (19) in a rectangular arrangement; two of the springs (19) are located between one of the short longitudinal beams (15) and the frame (16); the other two springs (19) are located between the other short longitudinal beam (15) and the frame (16).

4. The singularity-enhanced micro-opto-electro-mechanical angular velocity sensing system according to claim 2, characterized in that: Two support holes (8.1) for supporting the straight waveguide A (9) are opened through each long longitudinal beam (8); two sliding holes (8.2) for supporting the straight waveguide B (11) are opened through each long longitudinal beam (8); two sliding grooves (8.3) for supporting the crossbeam (14) are opened on the inner side of each long longitudinal beam (8).

5. The singularity-enhanced micro-opto-electro-mechanical angular velocity sensing system according to claim 1, characterized in that: It also includes two pads (20); the two annular resonant cavities A (10) are fixed to the upper surface of the substrate (7) by the two pads (20).

6. The singularity-enhanced micro-opto-electro-mechanical angular velocity sensing system according to claim 1, characterized in that: The laser (1) is a 1550nm narrow linewidth laser; the beam splitter (3) has a splitting ratio of 50:

50.

7. A singularity-enhanced micro-opto-electro-mechanical angular velocity measurement method, the method being implemented based on the singularity-enhanced micro-opto-electro-mechanical angular velocity sensing system as described in claim 2, characterized in that: This method is implemented using the following steps: Step 1: Adjust the sensing system and stabilize it in its initial state, thereby placing the sensing system at a singular point; Step 2: Apply voltage to the two electrostatic actuators (18) so that the two electrostatic actuators (18) alternately generate electrostatic force; under the action of electrostatic force, the frame (16) vibrates laterally at high frequency, and drives the mass block (17) to vibrate laterally at high frequency. Step 3: Start the laser (1). The laser (1) emits a probe light. The probe light is incident on the beam splitter (3) through the isolator (2) and split into two optical signals by the beam splitter (3): The first optical signal is incident on the first photodetector (4) through the corresponding straight waveguide B (11), the corresponding ring resonator B (12), the corresponding straight waveguide A (9), the corresponding ring resonator A (10), and the corresponding straight waveguide A (9) in sequence, and is converted into the first electrical signal by the first photodetector (4); the second optical signal... The signal is sequentially incident on the second photodetector (4) through the corresponding straight waveguide B (11), the corresponding ring resonator B (12), the corresponding straight waveguide A (9), the corresponding ring resonator A (10), and the corresponding straight waveguide A (9), and is converted into a second electrical signal by the second photodetector (4); both electrical signals are transmitted to the dual-trace oscilloscope (5), and are converted into two transmission spectra by the dual-trace oscilloscope (5); the two transmission spectra are displayed on the dual-trace oscilloscope (5) on one hand, and transmitted to the computer (6) on the other hand. When the sensing system does not rotate, the operating point is locked at the singularity, and neither of the two transmission spectra splits. When the sensing system rotates, the mass block (17) moves longitudinally back and forth under the action of the Coriolis force, and drives the frame (16), spring group, two short longitudinal beams (15), two cross beams (14), two connecting plates (13), two annular resonant cavities B (12), and two straight waveguides B (11) to move longitudinally back and forth together. This causes the coupling distance between the two annular resonant cavities B (12) and the two straight waveguides A (9) to change in equal magnitude and opposite direction. The change in coupling distance induces the operating point to be pushed away from the singularity, thereby causing the two transmission spectra to split alternately. The computer (6) monitors the splitting distance of the transmission spectrum in real time and substitutes the splitting distance of the transmission spectrum into the angular velocity measurement equation of the sensing system to calculate the angular velocity of the sensing system. The angular velocity measurement equation of the sensing system is expressed as follows: ； In the formula: Indicates the splitting distance of the transmission spectrum; This represents the resonant frequency of the ring resonant cavity A(10); This represents the resonant frequency of the ring resonant cavity B(12); This represents the coupling coefficient between the ring resonator B(12) and the straight waveguide A(9); express The attenuation coefficient; This indicates the mass of mass block (17); Indicates the amplitude of transverse high-frequency vibration; This indicates the frequency of transverse high-frequency vibration; Indicates the stiffness coefficient of the spring assembly; It represents angular velocity.

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