A flexible ionized pressure sensor, sensing array and its fabrication method

Abstract

This invention provides a flexible ionized pressure sensor, a sensing array, and a method for fabricating the same. The flexible ionized pressure sensor includes first and second flexible electrode layers and first and second ion-gel elastic layers, arranged sequentially along the stacking direction as a first flexible electrode layer, a first ion-gel elastic layer, a second ion-gel elastic layer, and a second flexible electrode layer. The first ion-gel elastic layer includes first magnetic particles, and the second ion-gel elastic layer includes second magnetic particles. A first magnetization direction and a second magnetization direction are respectively directed towards both sides of the stacking surface between the first and second ion-gel elastic layers. This flexible ionized pressure sensor combines high sensitivity and high responsiveness, and can be applied in fields such as artificial intelligence, the Internet of Things, and wearable electronics, and can be used to form a flexible ionized pressure sensing array.

Description

Technical Field

[0001] This invention belongs to the field of flexible electronic sensing technology, specifically relating to a flexible ionized pressure sensor, a sensing array, and a method for fabricating the same. Background Technology

[0002] With the booming development of artificial intelligence, the Internet of Things, wearable electronics and other fields, flexible pressure sensors are receiving increasing attention as an important component of human-machine interfaces, showing great market application prospects.

[0003] Flexible ionized pressure sensors typically employ a "sandwich structure," featuring two flexible electrodes and an ion-functionalized material as a dielectric layer between them. Due to the attraction between charges, an electric double layer is formed at the ion-electron interface, resulting in a large capacitance per unit area. When pressure is applied, the ion-functionalized material is compressed, increasing the effective area at the interface for forming the electric double layer. This is equivalent to more electric double-layer capacitors forming in parallel, significantly increasing the overall capacitance. Therefore, flexible ionized pressure sensors exhibit high sensitivity and are considered an important approach to developing highly sensitive pressure sensors.

[0004] Currently, the dielectric layer of flexible ionized pressure sensors generally uses ion gel elastic materials. These materials have high ionic conductivity and a wide electrochemical stability window, which can significantly improve sensor sensitivity. However, these materials have problems such as slow deformation recovery rate, large hysteresis, and insufficient cycle stability.

[0005] Therefore, improving the reactivity of flexible ionized pressure sensors is crucial for their cyclic stability, reusability, and cost reduction. Furthermore, achieving a balance between high sensitivity and high reactivity is essential for expanding the applications of flexible ionized pressure sensors. Summary of the Invention

[0006] In view of the above-mentioned technical status, the present invention provides a flexible ionized pressure sensor that can balance the sensor's high sensitivity and high responsiveness.

[0007] The technical solution provided by the present invention is: a flexible ionized pressure sensor, which has a stacked structure, including a first flexible electrode layer, a second flexible electrode layer, a first ion gel elastic layer and a second ion gel elastic layer, and the first flexible electrode layer, the first ion gel elastic layer, the second ion gel elastic layer and the second flexible electrode layer are arranged sequentially along the stacking direction. The first ionogel elastic layer includes a first magnetic particle, and the second ionogel elastic layer includes a second magnetic particle; the first magnetic particle is magnetized along a first magnetization direction, and the second magnetic particle is magnetized along a second magnetization direction. The first magnetization direction and the second magnetization direction are respectively directed toward both sides of the laminated surface between the first ionogel elastic layer and the second ionogel elastic layer.

[0008] Preferably, the first magnetization direction and the second magnetization direction are symmetrical about the laminated surface between the first ionogel elastic layer and the second ionogel elastic layer.

[0009] Preferably, the mass of the first magnetic particle accounts for 5%-20% of the mass of the first ionogel elastic layer.

[0010] Preferably, the mass of the second magnetic particle accounts for 5%-20% of the mass of the second ionogel elastic layer.

[0011] The preparation method of the first ionic gel elastic layer is not limited. For example, it can be formed by uniformly mixing the first ionic liquid, the first polymer, the first crosslinking agent and the first curing agent and then crosslinking and curing them.

[0012] The preparation method of the second ionic gel elastic layer is not limited. For example, it can be formed by uniformly mixing and cross-linking a second ionic liquid, a second polymer, a second cross-linking agent and a second curing agent.

[0013] The first ionic liquid includes, but is not limited to, one or more of 1-butyl-3-methylimidazolium hexafluorophosphate and 1-ethyl-3-methylimidazolium bis(trifluoromethanesulfonyl)imide.

[0014] The first polymer includes, but is not limited to, acrylate compounds, preferably one or more of polyethylene glycol diacrylate, hydroxyethyl acrylate, and methyl methacrylate.

[0015] The first crosslinking agent includes, but is not limited to, one or more of the following: ethylene glycol dimethacrylate (EGDMA), N,N-methylenebisacrylamide, divinylbenzene, pentaerythritol triacrylate, trimethylolpropane triacrylate, dipentaerythritol hexaacrylate, and polyethylene glycol dimethacrylate.

[0016] The second ionic liquid includes, but is not limited to, one or more of 1-butyl-3-methylimidazolium hexafluorophosphate and 1-ethyl-3-methylimidazolium bis(trifluoromethanesulfonyl)imide.

[0017] The second polymer includes, but is not limited to, one or more of fluorinated acrylates, silicone-modified acrylates, and polyurethane acrylates.

[0018] The second crosslinking agent includes, but is not limited to, one or more of EGDMA, N,N-methylenebisacrylamide, divinylbenzene, pentaerythritol triacrylate, trimethylolpropane triacrylate, dipentaerythritol hexaacrylate, and polyethylene glycol dimethacrylate.

[0019] The first curing agent is determined according to the type of the first polymer. For example, the first polymer can be a photocurable polymer, a thermocurable polymer, or a photothermal curable polymer. Correspondingly, the curing agent is selected as a photocurable agent, a thermocurable agent, or a photothermal curable agent, respectively. The second curing agent is determined according to the type of the second polymer. For example, the second polymer can be a light-curing polymer, a thermo-curing polymer, or a photothermal-curing polymer. Correspondingly, the curing agent is selected as a light-curing agent, a thermo-curing agent, or a photothermal-curing agent, respectively.

[0020] The first magnetic particle includes, but is not limited to, neodymium iron boron, ferrite, and other permanent magnet particles. The particle size of the first magnetic particle is not limited, but is preferably controlled between 10 nm and 50 μm.

[0021] The second magnetic particle includes, but is not limited to, neodymium iron boron, ferrite, and other permanent magnet particles. The particle size of the second magnetic particle is not limited, but is preferably controlled between 10 nm and 50 μm.

[0022] The material of the first flexible electrode layer is not limited, and includes one or more of the following: silver, copper, carbon nanotubes, graphene, stainless steel, conductive polymers, and conductive fabrics.

[0023] The material of the second flexible electrode layer is not limited, and includes one or more of the following: silver, copper, carbon nanotubes, graphene, stainless steel, conductive polymers, and conductive fabrics.

[0024] The materials of the first flexible electrode layer and the second flexible electrode layer may be the same or different.

[0025] The first magnetic particle and the second magnetic particle may be the same or different.

[0026] The first ionogel elastic layer and the second ionogel elastic layer may be the same or different.

[0027] Preferably, in the first ionogel elastic layer, the distribution of the first magnetic particles is close to the lamination surface, that is, the density of the first magnetic particles is higher near the lamination surface. More preferably, the density of the first magnetic particles increases as the distance from the lamination surface decreases.

[0028] Preferably, in the second ionogel elastic layer, the distribution of the second magnetic particles is close to the lamination surface, that is, the density of the second magnetic particles is higher near the lamination surface. More preferably, the density of the second magnetic particles increases as the distance from the lamination surface decreases.

[0029] In a preferred embodiment, the first ionogel elastic layer comprises two layers, denoted as first ionogel elastic layer A and first ionogel elastic layer B. First ionogel elastic layer A does not contain the first magnetic particle, and the first magnetic particle is located within first ionogel elastic layer B. The second ionogel elastic layer comprises two layers, denoted as second ionogel elastic layer A and second ionogel elastic layer B. Second ionogel elastic layer A does not contain the second magnetic particle, and the second magnetic particle is located within second ionogel elastic layer B. Along the stacking direction, the layers are, in sequence, first ionogel elastic layer A, first ionogel elastic layer B, second ionogel elastic layer B, and second ionogel elastic layer A.

[0030] The present invention also provides a method for fabricating the flexible ionized pressure sensor, comprising the following steps: (1) The first ionic liquid, the first polymer, the first magnetic particles, the first crosslinking agent and the first curing agent are mixed to obtain the first ionic gel precursor liquid; The second ionic liquid, the second polymer, the second magnetic particles, the second crosslinking agent, and the second curing agent are mixed to obtain the second ionic gel precursor solution; The first ion gel precursor liquid is covered on the surface of the first flexible electrode layer and solidified to form the first ion gel elastic layer; then the first magnetic field is applied to magnetize the first magnetic particles, that is, the first magnetic particles are magnetized along the direction of the first magnetic field, which is the first magnetization direction. The second ion gel precursor liquid is covered on the surface of the second flexible electrode layer and solidified to form the second ion gel elastic layer; then a second magnetic field is applied to magnetize the second magnetic particles, that is, the second magnetic particles are magnetized along the direction of the second magnetic field, which is the second magnetization direction. (2) The first flexible electrode layer with the first ion gel elastic layer obtained in step (1) is stacked with the second flexible electrode layer with the second ion gel elastic layer, so that the first ion gel elastic layer faces the second ion gel elastic layer, to obtain the flexible ion-gel type pressure sensor.

[0031] The covering method is not limited, and includes coating, scraping, spraying, printing, casting, etc.

[0032] In step (1), in order to improve the dispersibility of the first magnetic particles, it is preferable to add the first magnetic particles after mixing the first ionic liquid and the first polymer evenly, mix them evenly, and then add the first crosslinking agent and the first curing agent to obtain the first ionic gel precursor liquid.

[0033] In step (1), in order to improve the dispersibility of the second magnetic particles, it is preferable to add the second magnetic particles after the second ionic liquid and the second polymer are mixed evenly, and then add the second crosslinking agent and the second curing agent to mix evenly to obtain the second ionic gel precursor liquid.

[0034] As one implementation method, the preparation method includes the following steps: (1) The first ionic liquid, the first polymer, the first crosslinking agent and the first curing agent are mixed to obtain the first ionic gel precursor liquid A; The first ionic liquid, the first polymer, the first magnetic particles, the first crosslinking agent, and the first curing agent are mixed to obtain the first ionic gel precursor liquid B; The second ionic liquid, the second polymer, the second crosslinking agent and the second curing agent are mixed to obtain the second ionic gel precursor liquid A; The second ionic liquid, the second polymer, the second magnetic particles, the second crosslinking agent, and the second curing agent are mixed to obtain the second ionic gel precursor liquid B. A first ion gel precursor liquid A is coated on the surface of the first flexible electrode layer, and after cross-linking and curing, a first ion gel elastic layer A is formed; a first ion gel precursor liquid B is coated on the surface of the first ion gel elastic layer A, and after cross-linking and curing, a first ion gel elastic layer B is formed. The first magnetic particle is magnetized by applying a first magnetic field, that is, the first magnetic particle is magnetized along the direction of the first magnetic field, which is the first magnetization direction. A second ion gel precursor liquid A is coated on the surface of the second flexible electrode layer, and after cross-linking and curing, a second ion gel elastic layer A is formed; a second ion gel precursor liquid B is coated on the surface of the second ion gel elastic layer A, and after curing, a second ion gel elastic layer B is formed. The second magnetic particle is magnetized by applying a second magnetic field, that is, the second magnetic particle is magnetized along the direction of the second magnetic field, which is the second magnetization direction; (2) The first flexible electrode layer with the first ion gel elastic layer A and the first ion gel elastic layer B obtained in step (1) is stacked with the second flexible electrode layer with the second ion gel elastic layer A and the second ion gel elastic layer B, so that the first ion gel elastic layer B faces the second ion gel elastic layer B, to obtain the flexible ionized pressure sensor.

[0035] The present invention also provides a flexible ionized pressure sensing array, comprising a plurality of (two or more) flexible ionized pressure sensors as described in the present invention, wherein these sensors are arranged in an array.

[0036] This invention also provides a method for fabricating a flexible ionized pressure sensing array, comprising the following steps: S1: Employs a first flexible conductive layer and a second flexible conductive layer; The first flexible conductive layer is composed of M parallel conductive strips, with spacing between adjacent conductive strips and conductive insulation between them; The second flexible conductive layer consists of N parallel conductive strips with spacing between adjacent conductive strips and is conductive and insulating; M and N are natural numbers, and M≥1, N≥1; The first ionic liquid, the first polymer, the first magnetic particles, the first crosslinking agent, and the first curing agent are mixed to obtain the first ionic gel precursor solution; The second ionic liquid, the second polymer, the second magnetic particles, the second crosslinking agent, and the second curing agent are mixed to obtain the second ionic gel precursor solution; A first ion gel precursor liquid is covered on the surface of each conductive strip of the first flexible conductive layer. After curing, a first ion gel elastic layer is formed on the surface of each conductive strip, and there is a gap between adjacent first ion gel elastic layers, which are conductive and insulating. A second ion gel precursor liquid is covered on the surface of each conductive strip of the second flexible conductive layer. After curing, a second ion gel elastic layer is formed on the surface of each conductive strip, and there is a gap between adjacent second ion gel elastic layers, which are conductive and insulating. Magnetize the first ion gel elastic layer on the surface of each conductive strip of the first flexible conductive layer along the first magnetization direction. The second ion gel elastic layer on the surface of each conductive strip of the second flexible conductive layer is magnetized along the second magnetization direction. S2: The first flexible conductive layer and the second flexible conductive layer after step S1 are stacked together, so that the first ion gel elastic layer faces the second ion gel elastic layer and the whole is in a cross shape, resulting in M×N crosses. Each cross is connected to form a flexible ionized pressure sensing unit, and the whole is formed into an M×N flexible ionized pressure sensing array.

[0037] In step S1, as one implementation, the conductive strips of the first flexible conductive layer can be woven from conductive fibers; as another implementation, the first flexible conductive layer is a zebra stripe fabric with parallel distribution of conductive and non-conductive intervals, woven from non-conductive and conductive fibers using a textile method.

[0038] In step S1, as one implementation, the conductive strips of the second flexible conductive layer can be woven from conductive fibers; as another implementation, the second flexible conductive layer is a zebra stripe fabric with parallel distribution of conductive and non-conductive intervals, woven from non-conductive and conductive fibers using a textile method.

[0039] The conductive fibers include, but are not limited to, one or more of the following: silver fiber, copper fiber, carbon nanotube fiber, graphene fiber, stainless steel fiber, and conductive polymer fiber.

[0040] The non-conductive fibers include, but are not limited to, one or more of polyester, nylon, spandex, cotton, and linen.

[0041] In step S1, the method for covering the surface of each conductive strip of the first flexible conductive layer with the first ionic gel precursor liquid is not limited, including one or more of coating, scraping, spraying, printing, casting, etc.; the first ionic gel precursor liquid can be directly covered on the surface of each conductive strip of the first flexible conductive layer, or it can be directly covered on the surface of each conductive strip of the first flexible conductive layer using a mold. Preferably, the first ionic gel precursor liquid is covered on the surface of each conductive strip of the first flexible conductive layer using a mold alignment printing method.

[0042] In step S1, the method for covering the surface of each conductive strip of the second flexible conductive layer with the second ionic gel precursor liquid is not limited, including one or more of coating, scraping, spraying, printing, casting, etc.; the second ionic gel precursor liquid can be directly covered on the surface of each conductive strip of the second flexible conductive layer, or it can be directly covered on the surface of each conductive strip of the second flexible conductive layer using a mold. Preferably, the second ionic gel precursor liquid is covered on the surface of each conductive strip of the second flexible conductive layer using a mold alignment printing method.

[0043] As a further preferred option, a mold is used, which has M×N through holes arranged in an array of M rows and N columns; the M rows correspond to the M conductive strip groups of the first flexible conductive layer, and the N columns correspond to the N conductive strip groups of the second flexible conductive layer. The mold is placed on the surface of the first flexible conductive layer. The M rows of holes of the mold are respectively located on the M conductive strips on the surface of the first flexible conductive layer. The mold forms a first ion gel elastic layer on the surface of the first flexible conductive layer. The first ion gel elastic layer consists of M×N ion gel elastic blocks, which are arranged in an M×N array. The mold is placed on the surface of the second flexible conductive layer. The N columns of holes in the mold are respectively located on the N conductive strips on the surface of the second flexible conductive layer. The mold forms a second ion gel elastic layer on the surface of the second flexible conductive layer. The second ion gel elastic layer consists of M×N ion gel elastic blocks, which are arranged in an M×N array. In step S2, the first flexible conductive layer and the second flexible conductive layer after step S1 are stacked together, so that the first ion gel elastic layer faces the second ion gel elastic layer and the whole is in a cross shape. The M×N ion gel elastic blocks in the first ion gel elastic layer correspond one-to-one with the M×N ion gel elastic blocks in the second ion gel elastic layer.

[0044] Compared with the prior art, the present invention has the following beneficial effects: (1) This invention uses ion gel elastic material as the dielectric layer of a flexible ionized pressure sensor, and designs the dielectric layer as two stacked ion gel elastic layers, referred to as the first ion gel elastic layer and the second ion gel elastic layer. The first ion gel elastic layer contains a first magnetic particle, and the second ion gel elastic layer contains a second magnetic particle. The magnetization directions of the first magnetic particle and the second magnetic particle are respectively directed towards the two sides of the stacked surface, which enables magnetic repulsion between the first magnetic particle and the second magnetic particle. Since the ion gel elastic material has high ionic conductivity and a wide electrochemical stability window, it can significantly improve the sensor sensitivity when compressed under pressure. At the same time, the magnetic repulsion between the first magnetic particle and the second magnetic particle causes the two ion gel elastic layers to generate active restoring force. Therefore, this invention improves the defects of poor recovery, large hysteresis, and easy plastic deformation when the ion gel elastic material is used as the dielectric layer of the ionized pressure sensor, so that the ionized pressure sensor can achieve high sensitivity and high restoring performance.

[0045] (2) In this invention, magnetic particles are added to the ionogel elastic layer. When the ionogel elastic layer deforms under pressure, the magnetic repulsion weakens its deformation ability, thus affecting the sensing sensitivity. In order to better balance high sensitivity and high responsiveness, this invention preferably designs the distribution of the first magnetic particles and the second magnetic particles close to the lamination surface. Preferably, as the distance from the lamination surface decreases, the density of the first magnetic particles and the second magnetic particles increases. For example, as a preferred structure, the first ionogel elastic layer and the second ionogel elastic layer are each designed as two layers, and the magnetic particles are only contained in the layer close to the lamination surface. In this structure, when the dielectric layer of the flexible ionized pressure sensor is compressed, the ion gel elastic material containing few or no magnetic particles is compressed first. At this time, because there are few or no magnetic particles, the magnetic repulsion is absent or small, so the ion gel elastic material is easy to compress and deform, which can fully improve the sensor sensitivity. As the compression deformation gradually approaches the laminated surface, the magnetic repulsion gradually increases due to the increasing density of magnetic particles. The compression deformation of the ion gel elastic material gradually becomes more difficult, which reduces the sensor sensitivity and gradually enhances the active recovery force. When the pressure ends, the magnetic repulsion reaches its strongest point, making the active recovery force of the ion gel elastic layer the highest. Therefore, this structure can further balance the high sensitivity and high recovery of the sensor.

[0046] (3) This invention involves adding magnetic particles to an ionic gel precursor solution composed of an ionic liquid, a polymer, and a crosslinking agent, and then curing it into an ionic gel elastic layer. This not only ensures that the magnetic particles are uniformly dispersed in the ionic gel elastic layer, but also controls the particle size of the magnetic particles so as not to affect the gel film-forming properties and elasticity. This method is simple and easy to implement, and can be used for large-area fabrication.

[0047] (4) The flexible ionized pressure sensor of the present invention preferably uses conductive fabric as the flexible electrode layer. The conductive fabric itself has a natural porous microstructure and can be directly used as the ionized sensing interface without the need for additional interface treatments such as photolithography, etching, and mold imprinting, which further reduces the manufacturing cost and complexity.

[0048] (5) The ionized pressure sensor of the present invention can be configured into a sensing array and can be integrated into a large-area array.

[0049] (6) In the ionized pressure sensing array of the present invention, the flexible conductive layer can be a zebra strip fabric with conductive and non-conductive intervals, which is integrally formed by textile process and is woven from ordinary fibers and conductive fibers alternately. The conductive strips and non-conductive strips are distributed in parallel intervals, naturally forming an arrayed electrode channel. No subsequent etching, deposition and other processing is required, which greatly simplifies the process flow. Then, the gel is solidified by ionic liquid gel precursor, so that the gel is firmly bonded to the fabric substrate and is not easy to fall off. The ionic liquid will penetrate into the conductive fabric to form an interface microstructure. Finally, through directional magnetization, a sensing fabric with high sensitivity and high recovery is obtained, which solves the technical problem that has long existed in the industry that the sensing sensitivity and recovery of the fabric cannot be obtained at the same time, the process is complicated and the arraying is difficult.

[0050] (7) This invention preferably utilizes a mold with M×N through-holes arranged in an M-row × N-column array. An ion gel precursor solution is directly coated onto the surfaces of a first flexible conductive layer composed of M parallel conductive strips and a second flexible conductive layer composed of N parallel conductive strips to obtain M×N ion gel elastic blocks arranged in an M×N array. These blocks are then magnetized and stacked so that the M×N ion gel elastic blocks face each other and correspond one-to-one, thus obtaining an M×N flexible ionized pressure sensing array. This method is simple, easy to operate, and can be mass-produced.

[0051] (8) The flexible ionized pressure sensor and its preparation method of the present invention can be widely used in fields such as artificial intelligence, Internet of Things, and wearable electronics, such as robot electronic skin, smart mattress, smart seat cushion, human body pressure distribution monitoring, rehabilitation medicine and human-computer interaction. Attached Figure Description

[0052] Figure 1 This is a schematic diagram of the flexible ionized pressure sensor in Embodiment 1 of the present invention.

[0053] Figure 2 This is a schematic diagram of the first magnetization direction and the second magnetization direction in Embodiment 2 of the present invention.

[0054] Figure 3 This is a schematic diagram of the flexible ionized pressure sensor in embodiments 3 and 4 of the present invention.

[0055] Figure 4 This is a schematic diagram of the zebra strip fabric substrate in Embodiment 5 of the present invention.

[0056] Figure 5 This is a schematic diagram of the process of covering the surface of zebra strip fabric with a mold-coated ion gel precursor in Embodiment 5 of the present invention.

[0057] Figure 6This is a schematic diagram of the ion gel elastic layer A and ion gel elastic layer B obtained by covering the surface of the zebra strip fabric with a mold in Embodiment 5 of the present invention.

[0058] Figure 7 yes Figure 6 A cross-sectional schematic diagram.

[0059] Figure 8 This is a schematic diagram of a pressure array sensor formed by cross-stacking two zebra strip fabrics after processing in Embodiment 5 of the present invention.

[0060] Figures 1 to 8 The attached figures are labeled as follows: First flexible electrode layer 10, first ion gel elastic layer 20, second ion gel elastic layer 30, second flexible electrode layer 40, first magnetic particle 50, second magnetic particle 60, first ion gel elastic layer A 21, first ion gel elastic layer B 22, second ion gel elastic layer A 31, second ion gel elastic layer B 32; zebra strip fabric 1, non-conductive strip 11, conductive strip 12, ion gel elastic block 2, ion gel elastic block containing magnetic particles 3, mold 4, hole 41 on the mold. Detailed Implementation

[0061] The present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be noted that the embodiments described below are intended to facilitate the understanding of the present invention and do not limit it in any way.

[0062] Example 1: like Figure 1 As shown, the flexible ionized pressure sensor has a stacked structure, including a first flexible electrode layer 10, a second flexible electrode layer 40, a first ion gel elastic layer 20, and a second ion gel elastic layer 30, arranged sequentially along the stacking direction. The first ion gel elastic layer 20 includes first magnetic particles 50, and the second ion gel elastic layer 30 includes second magnetic particles 60. The first magnetization direction and the second magnetization direction are respectively directed towards both sides of the stacked surface between the first and second ion gel elastic layers. Figure 1 As shown, the first magnetization direction faces the upper side of the laminated surface, and the second magnetization direction faces the lower side of the laminated surface. In this structure, the first magnetic particle 50 and the second magnetic particle 60 generate magnetic repulsion.

[0063] In some embodiments, the first magnetization direction and the second magnetization direction are symmetrical about the laminated surfaces between the first and second ionogel elastic layers. This embodiment employs such a structure, as shown below. Figure 1As shown, the first magnetization direction and the second magnetization direction are symmetrical about the laminated surface between the first ionogel elastic layer and the second ionogel elastic layer.

[0064] In this embodiment, the first flexible electrode layer 10 and the second flexible electrode layer 40 are conductive fabrics woven from silver fibers.

[0065] The first ionogel elastic layer 20 and the second ionogel elastic layer 30 are ionogel elastomer materials formed by cross-linking and curing ionic liquid 1-butyl-3-methylimidazolium hexafluorophosphate and polyethylene glycol diacrylate.

[0066] The first magnetic particle 50 and the second magnetic particle 60 are ferrite particles with a particle size of 50 nm.

[0067] The fabrication method of this flexible ionized pressure sensor is as follows: (1) Based on a total mass of 100 parts of 1-butyl-3-methylimidazolium hexafluorophosphate, polyethylene glycol diacrylate, crosslinking agent EGDMA and photoinitiator 1173, the mass ratio of 1-butyl-3-methylimidazolium hexafluorophosphate to polyethylene glycol diacrylate is 80:18:2 (after the mass ratios of crosslinking agent EGDMA and photoinitiator 1173), and the mass ratio of ferrite particles is 10 parts.

[0068] After mixing the specified mass fractions of 1-butyl-3-methylimidazolium hexafluorophosphate and polyethylene glycol diacrylate evenly, the specified mass fractions of ferrite particles are added, and after mixing evenly, crosslinking agent EGDMA and photoinitiator 1173 are added. The mixture is then ultrasonically dispersed for 30 minutes to obtain a composite ion gel precursor solution. A composite ion gel precursor solution is coated on the surface of the first flexible electrode layer 10 and cured under ultraviolet light for 30 seconds to obtain the first ion gel elastic layer 20. A composite gel precursor liquid was coated on the surface of the second flexible electrode layer 40 and cured under ultraviolet light for 30 seconds to obtain the second ion gel elastic layer 30. The first flexible electrode layer 10 with the first ion gel elastic layer is placed in a magnetization device with a magnetic field strength of 1T and magnetized along the first magnetization direction for 30 minutes. The second flexible electrode layer 40 with the second ion gel elastic layer is placed in a magnetization device with a magnetic field strength of 1T and magnetized along the second magnetization direction for 30 minutes. (2) The first flexible electrode layer 10 with the first ion gel elastic layer obtained in step (1) is stacked with the second flexible electrode layer 40 with the second ion gel elastic layer, so that the first ion gel elastic layer 20 faces the second ion gel elastic layer 30, to obtain the flexible ion-gel type pressure sensor.

[0069] Example 2: This embodiment is basically the same as Embodiment 1, except that the first magnetization direction and the second magnetization direction are as follows: Figure 2 As shown, the first magnetization direction is perpendicular to the surface of the first flexible electrode layer 10 and toward the first ion gel elastic layer 20; the second magnetization direction is perpendicular to the surface of the second flexible electrode layer 40 and toward the second ion gel elastic layer 30. Example 3:

[0070] like Figure 3 As shown, the flexible ionized pressure sensor has a stacked structure, including a first flexible electrode layer 10, a second flexible electrode layer 40, a first ion gel elastic layer 20 and a second ion gel elastic layer 30, and the first flexible electrode layer 10, the first ion gel elastic layer 20, the second ion gel elastic layer 30 and the second flexible electrode layer 40 are arranged sequentially along the stacking direction.

[0071] In some embodiments, in the first ionogel elastic layer 10, the distribution of the first magnetic particles 50 is close to the lamination surface, that is, the density of the first magnetic particles 50 is relatively high near the lamination surface, and in particular, the density of the first magnetic particles 50 can increase as the distance from the lamination surface decreases. Similarly, in the second ionogel elastic layer 40, the distribution of the second magnetic particles 60 is close to the lamination surface, that is, the density of the second magnetic particles 60 is relatively high near the lamination surface, and in particular, the density of the second magnetic particles 60 can increase as the distance from the lamination surface decreases. In this embodiment, the first ionogel elastic layer 20 consists of two layers, denoted as the first ionogel elastic layer A 21 and the first ionogel elastic layer B 22. The first ionogel elastic layer A does not contain the first magnetic particles 50, while the first ionogel elastic layer B contains the first magnetic particles 50.

[0072] The second ionogel elastic layer 30 consists of two layers, referred to as the second ionogel elastic layer A31 and the second ionogel elastic layer B32. The second ionogel elastic layer A31 does not contain the second magnetic particles 60, while the second ionogel elastic layer B32 contains the second magnetic particles 60.

[0073] The first magnetization direction is perpendicular to the surface of the first flexible electrode layer 10 and toward the first ion gel elastic layer B22; the second magnetization direction is perpendicular to the surface of the second flexible electrode layer 40 and toward the second ion gel elastic layer B32, that is, the magnetization direction of the first magnetic particle is opposite to the magnetization direction of the second magnetic particle.

[0074] In this embodiment, the first flexible electrode layer 10 and the second flexible electrode layer 40 are conductive fabrics woven from silver fibers.

[0075] The first magnetic particle 50 and the second magnetic particle 60 are ferrite particles with a particle size of 50 nm.

[0076] The first ionogel elastic layer A21 and the second ionogel elastic layer A31 are ionogel elastomer materials formed by polymerization and curing of ionic liquid 1-butyl-3-methylimidazolium hexafluorophosphate and polyethylene glycol diacrylate.

[0077] The first ionogel elastic layer B22 and the second ionogel elastic layer B32 are gel elastomer materials formed by cross-linking and curing ionic liquid 1-butyl-3-methylimidazolium hexafluorophosphate and polyethylene glycol diacrylate, respectively, and contain ferrite particles.

[0078] The fabrication method of this flexible ionized pressure sensor is as follows: (1) Based on a total mass of 100 parts of 1-butyl-3-methylimidazolium hexafluorophosphate, polyethylene glycol diacrylate, crosslinking agent EGDMA and photoinitiator 1173, the mass ratio of 1-butyl-3-methylimidazolium hexafluorophosphate to polyethylene glycol diacrylate is 80:18:2 (after the mass ratio of crosslinking agent EGDMA and photoinitiator 1173), and the mass ratio of ferrite particles with a particle size of 50 nm is 10 parts. After mixing the specified mass fractions of 1-butyl-3-methylimidazolium hexafluorophosphate and polyethylene glycol diacrylate evenly, the specified mass fractions of crosslinking agent EGDMA and photoinitiator 1173 are added to obtain the ion gel precursor solution. After mixing the specified mass fractions of 1-butyl-3-methylimidazolium hexafluorophosphate and polyethylene glycol diacrylate evenly, the specified mass fractions of ferrite particles are added, and after mixing evenly, crosslinking agent EGDMA and photoinitiator 1173 are added. The mixture is then ultrasonically dispersed for 30 minutes to obtain a composite ion gel precursor solution. An ion gel precursor solution is coated on the surface of the first flexible electrode layer 10 and cured under ultraviolet light for 30 seconds to obtain the first ion gel elastic layer A21; a composite ion gel precursor solution is coated on the surface of the first ion gel elastic layer A21 and cured under ultraviolet light for 60 seconds to obtain the first ion gel elastic layer B22. An ion gel precursor solution is coated on the surface of the second flexible electrode layer 40 and cured with ultraviolet light for 30 seconds to obtain the second ion gel elastic layer A31; a composite ion gel precursor solution is coated on the surface of the second ion gel elastic layer A31 and cured with ultraviolet light for 60 seconds to obtain the second ion gel elastic layer B32. The first flexible electrode layer 10 with the first ion gel elastic layer A21 and the first ion gel elastic layer B22 is placed in a magnetization device with a magnetic field strength of 1T and magnetized for 30 minutes in a direction perpendicular to the surface of the first flexible electrode layer 10 and toward the first ion gel elastic layer B22, so that one pole of the first magnetic particle 50 stands upright toward the surface. The second flexible electrode layer 40 with the second ion gel elastic layer A31 and the second ion gel elastic layer B32 is placed in a magnetization device with a magnetic field strength of 1T and magnetized for 30 minutes in a direction perpendicular to the surface of the second flexible electrode layer 40 and toward the second ion gel elastic layer B32, so that one pole of the second magnetic particle 60 stands upright toward the surface. (2) The first flexible electrode layer 10 with the first ion gel elastic layer A21 and the first ion gel elastic layer B22 obtained in step (1) is stacked with the second flexible electrode layer 40 with the second ion gel elastic layer A31 and the second ion gel elastic layer B32, so that the first ion gel elastic layer B22 faces the second ion gel elastic layer B32, to obtain the flexible ionized pressure sensor.

[0079] Example 4: In this embodiment, the structure of the flexible ionized pressure sensor is basically the same as that in Embodiment 3, except that: (1) The first flexible electrode layer 10 and the second flexible electrode layer 40 are conductive fabrics woven from carbon nanotube fibers; (2) The first magnetic particle 50 and the second magnetic particle 60 are neodymium iron boron magnetic particles with a particle size of 5 μm; (3) The first ion gel elastic layer A21 and the second ion gel elastic layer A31 are gel elastomer materials formed by polymerization and curing of ionic liquid 1-ethyl-3-methylimidazolium bis(trifluoromethanesulfonyl)imide salt and polyethylene glycol diacrylate, respectively. The first ionogel elastic layer B22 and the second ionogel elastic layer B32 are gel elastomer materials formed by polymerization and curing of ionic liquid 1-ethyl-3-methylimidazolium bis(trifluoromethanesulfonyl)imide salt and polyethylene glycol diacrylate, respectively, and contain neodymium iron boron magnetic particles.

[0080] The fabrication method of this flexible ionized pressure sensor is as follows: (1) Based on a total mass of 100 parts of 1-ethyl-3-methylimidazolium bis(trifluoromethanesulfonyl)imide salt, polyethylene glycol diacrylate, crosslinking agent EGDMA and photoinitiator 819, the mass ratio of 1-ethyl-3-methylimidazolium bis(trifluoromethanesulfonyl)imide salt to polyethylene glycol diacrylate is 75:22:3 (after the mass ratio of crosslinking agent EGDMA and photoinitiator 819), and the mass ratio of neodymium iron boron magnetic particles is 15 parts.

[0081] After mixing the 1-ethyl-3-methylimidazolium bis(trifluoromethanesulfonyl)imide salt and polyethylene glycol diacrylate in the specified mass proportions, the crosslinking agent EGDMA and photoinitiator 819 in the specified mass proportions are added to obtain the ion gel precursor solution. After mixing the 1-ethyl-3-methylimidazolium bis(trifluoromethanesulfonyl)imide salt and polyethylene glycol diacrylate in the specified mass proportions evenly, add the NdFeB magnetic particles in the specified mass proportions, mix evenly, and then add the crosslinking agent EGDMA and photoinitiator 819 in the specified mass proportions to obtain a composite ion gel precursor solution. Disperse the solution by ultrasonication for 30 min to obtain a composite ion gel precursor solution. An ion gel precursor solution is coated on the surface of the first flexible electrode layer 10 and cured under ultraviolet light for 25 seconds to obtain the first ion gel elastic layer A21; a composite ion gel precursor solution is coated on the surface of the first ion gel elastic layer A21 and cured under ultraviolet light for 50 seconds to obtain the first ion gel elastic layer B22. An ion gel precursor solution is coated on the surface of the second flexible electrode layer 40 and cured under ultraviolet light for 25 seconds to obtain the second ion gel elastic layer A31; a composite ion gel precursor solution is coated on the surface of the second ion gel elastic layer A31 and cured under ultraviolet light for 50 seconds to obtain the second ion gel elastic layer B32. The first flexible electrode layer 10 with the first ion gel elastic layer A21 and the first ion gel elastic layer B22 is placed in a magnetization device with a magnetic field strength of 1.5T and magnetized for 20 minutes in a direction perpendicular to the surface of the first flexible electrode layer 10 and toward the first ion gel elastic layer B22, so that one pole of the first magnetic particle 50 stands upright toward the surface. The second flexible electrode layer 40 with the second ion gel elastic layer A31 and the second ion gel elastic layer B32 is placed in a magnetization device with a magnetic field strength of 1T and magnetized for 30 minutes in a direction perpendicular to the surface of the second flexible electrode layer 40 and toward the second ion gel elastic layer B32, so that one pole of the second magnetic particle 60 stands upright toward the surface. (2) The first flexible electrode layer 10 with the first ion gel elastic layer A21 and the first ion gel elastic layer B22 obtained in step (1) is stacked with the second flexible electrode layer 40 with the second ion gel elastic layer A31 and the second ion gel elastic layer B32, so that the first ion gel elastic layer B22 faces the second ion gel elastic layer B32, to obtain the flexible ionized pressure sensor.

[0082] Example 5: like Figure 4 As shown, the flexible ionized pressure sensing array includes 25 flexible ionized pressure sensors arranged in a 5×5 directional array.

[0083] The fabrication method of this flexible ionized pressure sensing array includes the following steps: S1: Employs a first flexible conductive layer and a second flexible conductive layer; The first flexible conductive layer consists of 5 parallel conductive strips with spacing between adjacent conductive strips and is electrically insulating; the second flexible conductive layer consists of 5 parallel conductive strips with spacing between adjacent conductive strips and is electrically insulating.

[0084] In this embodiment, as Figure 4 As shown, the first flexible conductive layer is the same as the second flexible conductive layer, and is a zebra strip fabric 1 with parallel spacing between conductive and non-conductive fibers, woven together using a textile method. The conductive fibers are silver fibers, and the non-conductive fibers are nylon. The width of each conductive strip 12 is 2 mm, and the width of each non-conductive strip 11 is 3 mm.

[0085] Based on a total mass fraction of 100 parts of 1-butyl-3-methylimidazolium hexafluorophosphate, polyethylene glycol diacrylate, crosslinking agent EGDMA, and photoinitiator 1173, the mass fraction of 1-butyl-3-methylimidazolium hexafluorophosphate : the mass fraction of polyethylene glycol diacrylate : (after the mass fractions of crosslinking agent EGDMA and photoinitiator 1173) = 80 : 18 : 2, and the mass fraction of ferrite particles is 10 parts.

[0086] After mixing the specified mass fractions of 1-butyl-3-methylimidazolium hexafluorophosphate and polyethylene glycol diacrylate evenly, the specified mass fractions of crosslinking agent EGDMA and photoinitiator 1173 are added to obtain the ion gel precursor solution.

[0087] After mixing the specified mass fractions of 1-butyl-3-methylimidazolium hexafluorophosphate and polyethylene glycol diacrylate evenly, the specified mass fractions of ferrite particles are added, and after mixing evenly, crosslinking agent EGDMA and photoinitiator 1173 are added. The mixture is then ultrasonically dispersed for 30 minutes to obtain the composite ion gel precursor solution.

[0088] like Figure 5 As shown, mold 4 is used, which has 25 through holes arranged in a 5-row × 5-column array.

[0089] The mold is placed on the surface of the first flexible conductive layer. The five rows of holes in the mold are respectively located on the five conductive strips 12 on the surface of the first flexible conductive layer. An ionic liquid gel precursor liquid is applied through the mold, and the ionic liquid penetrates into the conductive strips 12 to form an interface microstructure. Then, it is cured with ultraviolet light for 25 seconds, forming an ionic gel elastic layer A on the surface of the first flexible conductive layer. This ionic gel elastic layer A consists of 25 ionic gel elastic blocks 2 arranged in a 5×5 array. Keeping the position of the mold 4 unchanged, a composite gel precursor liquid is applied to the surface of the cured ionic gel elastic layer A and cured with ultraviolet light for 50 seconds to form an ionic gel elastic layer B. This ionic gel elastic layer B consists of ionic gel elastic blocks 3 containing magnetic particles arranged in a 5×5 array. After curing, the mold 4 is removed, resulting in the following... Figure 6 The zebra strip fabric 1 shown has ion gel elastic blocks 2 and ion gel elastic blocks 3 containing magnetic particles on its surface.

[0090] Zebra strip fabric 1 with ion gel elastic block 2 and ion gel elastic block 3 containing magnetic particles on its surface is placed in a magnetization device with a magnetic field strength of 1.5T and magnetized for 20 minutes in a direction perpendicular to the fabric plane and towards the ion gel elastomer 3 containing magnetic particles, so that one pole of the magnetic particles stands upright facing the surface.

[0091] S2: As Figure 7 , 8 As shown, two zebra strip fabrics 1 with ion gel elastic blocks 2 and ion gel elastic blocks 3 containing magnetic particles on their surfaces are stacked together after step S1. The ion gel elastic layers B of the two zebra strip fabrics 1 face each other and are in a cross shape. 5×5 ion gel elastic blocks 3 correspond one-to-one. Each cross connection is a flexible ionized pressure sensing unit. The whole array forms a 5×5 flexible ionized pressure sensing array.

[0092] Example 6: like Figure 4 As shown, the flexible ionized pressure sensing array includes 25 flexible ionized pressure sensors arranged in a 5×5 directional array.

[0093] The fabrication method of this flexible ionized pressure sensing array includes the following steps: S1: Employs a first flexible conductive layer and a second flexible conductive layer; The first flexible conductive layer consists of 5 parallel conductive strips with spacing between adjacent conductive strips and is electrically insulating; the second flexible conductive layer consists of 5 parallel conductive strips with spacing between adjacent conductive strips and is electrically insulating.

[0094] In this embodiment, as Figure 4As shown, the first flexible conductive layer is the same as the second flexible conductive layer, and is a zebra strip fabric 1 made by weaving non-conductive and conductive fibers together using a textile method, with conductive and non-conductive fibers spaced parallel to each other. The conductive fibers are carbon nanotube fibers, and the non-conductive fibers are nylon. The width of each conductive strip 12 is 2 mm, and the width of each non-conductive strip 11 is 3 mm.

[0095] Based on a total mass fraction of 100 parts of 1-ethyl-3-methylimidazolium bis(trifluoromethanesulfonyl)imide salt, polyethylene glycol diacrylate, crosslinking agent EGDMA, and photoinitiator 819, the mass fraction of 1-ethyl-3-methylimidazolium bis(trifluoromethanesulfonyl)imide salt : the mass fraction of polyethylene glycol diacrylate : (after the mass fractions of crosslinking agent EGDMA and photoinitiator 1173) = 75 : 22 : 3, and the mass fraction of NdFeB magnetic particles with a particle size of 5 μm is 15 parts.

[0096] After uniformly mixing the specified mass fractions of 1-ethyl-3-methylimidazolium bis(trifluoromethanesulfonyl)imide salt and polyethylene glycol diacrylate, the specified mass fractions of crosslinking agent EGDMA and photoinitiator 819 are added to obtain the ion gel precursor solution.

[0097] After mixing the 1-ethyl-3-methylimidazolium bis(trifluoromethanesulfonyl)imide salt and polyethylene glycol diacrylate in the specified mass fractions, add the neodymium iron boron magnetic particles in the specified mass fractions, mix evenly, then add the crosslinking agent EGDMA and photoinitiator 819, and ultrasonically disperse for 40 min to obtain the composite ion gel precursor solution.

[0098] like Figure 5 As shown, mold 4 is used, which has 25 through holes arranged in a 5-row × 5-column array.

[0099] The mold is placed on the surface of the first flexible conductive layer. The five rows of holes in the mold are respectively located on the five conductive strips 12 on the surface of the first flexible conductive layer. An ionic liquid gel precursor liquid is applied through the mold, and the ionic liquid penetrates into the conductive strips 12 to form an interface microstructure. Then, it is cured with ultraviolet light for 25 seconds, forming an ionic gel elastic layer A on the surface of the first flexible conductive layer. This ionic gel elastic layer A consists of 25 ionic gel elastic blocks 2 arranged in a 5×5 array. Keeping the position of the mold 4 unchanged, a composite gel precursor liquid is applied to the surface of the cured ionic gel elastic layer A and cured with ultraviolet light for 50 seconds to form an ionic gel elastic layer B. This ionic gel elastic layer B consists of ionic gel elastic blocks 3 containing magnetic particles arranged in a 5×5 array. After curing, the mold 4 is removed, resulting in the following... Figure 6 The zebra strip fabric 1 shown has ion gel elastic blocks 2 and ion gel elastic blocks 3 containing magnetic particles on its surface.

[0100] Zebra strip fabric 1 with ion gel elastic block 2 and ion gel elastic block 3 containing magnetic particles on its surface is placed in a magnetization device with a magnetic field strength of 1.5T and magnetized for 20 minutes in a direction perpendicular to the fabric plane and towards the ion gel elastomer 3 containing magnetic particles, so that one pole of the magnetic particles stands upright facing the surface.

[0101] S2: As Figure 7 , 8 As shown, two zebra strip fabrics 1 with ion gel elastic blocks 2 and ion gel elastic blocks 3 containing magnetic particles on their surfaces are stacked together after step S1. The ion gel elastic layers B of the two zebra strip fabrics 1 face each other and are in a cross shape. 5×5 ion gel elastic blocks 3 correspond one-to-one. Each cross connection is a flexible ionized pressure sensing unit. The whole array forms a 5×5 flexible ionized pressure sensing array.

Claims

1. A flexible ionized pressure sensor, characterized in that: It has a layered structure, including a first flexible electrode layer, a second flexible electrode layer, a first ion gel elastic layer and a second ion gel elastic layer, and the layers are arranged sequentially along the stacking direction as the first flexible electrode layer, the first ion gel elastic layer, the second ion gel elastic layer and the second flexible electrode layer. The first ionogel elastic layer includes a first magnetic particle, and the second ionogel elastic layer includes a second magnetic particle; the first magnetic particle is magnetized along a first magnetization direction, and the second magnetic particle is magnetized along a second magnetization direction. The first magnetization direction and the second magnetization direction are respectively directed toward both sides of the laminated surface between the first ionogel elastic layer and the second ionogel elastic layer.

2. The flexible ionized pressure sensor as described in claim 1, characterized in that: The first magnetization direction and the second magnetization direction are symmetrical about the laminated surface between the first ionogel elastic layer and the second ionogel elastic layer.

3. The flexible ionized pressure sensor as described in claim 1, characterized in that: At least one of the following conditions must be met: The mass of the first magnetic particle accounts for 5%-20% of the mass of the first iontophoretic gel elastic layer; The first ion gel elastic layer is formed by uniformly mixing and cross-linking and curing a first ion liquid, a first polymer, a first cross-linking agent, and a first curing agent; The second ion gel elastic layer is formed by cross-linking and curing a uniform mixture of a second ion liquid, a second polymer, a second cross-linking agent and a second curing agent.

4. The flexible ionized pressure sensor as described in claim 1, characterized in that: At least one of the following conditions must be met: The first ionic liquid includes one or more of 1-butyl-3-methylimidazolium hexafluorophosphate and 1-ethyl-3-methylimidazolium bis(trifluoromethanesulfonyl)imide. The first polymer comprises acrylate compounds, preferably one or more of polyethylene glycol diacrylate, hydroxyethyl acrylate, and methyl methacrylate; The first crosslinking agent includes one or more of EGDMA, N,N-methylenebisacrylamide, divinylbenzene, pentaerythritol triacrylate, trimethylolpropane triacrylate, dipentaerythritol hexaacrylate, and polyethylene glycol dimethacrylate.

5. The flexible ionized pressure sensor as described in claim 1, characterized in that: At least one of the following conditions must be met: The mass of the second magnetic particle accounts for 5%-20% of the mass of the second iontophoretic gel elastic layer; The second ionic liquid includes one or more of 1-butyl-3-methylimidazolium hexafluorophosphate and 1-ethyl-3-methylimidazolium bis(trifluoromethanesulfonyl)imide. The second polymer comprises acrylate compounds, preferably one or more of polyethylene glycol diacrylate, hydroxyethyl acrylate, and methyl methacrylate; The second crosslinking agent includes one or more of EGDMA, N,N-methylenebisacrylamide, divinylbenzene, pentaerythritol triacrylate, trimethylolpropane triacrylate, dipentaerythritol hexaacrylate, and polyethylene glycol dimethacrylate.

6. The flexible ionized pressure sensor as described in claim 1, characterized in that: At least one of the following conditions must be met: The first magnetic particle has a particle size of 10nm-50μm; The second magnetic particle has a particle size of 10nm-50μm.

7. The flexible ionized pressure sensor as described in claim 1, characterized in that: At least one of the following conditions must be met: The first flexible electrode layer material includes one or more of the following: silver, copper, carbon nanotubes, graphene, stainless steel, conductive polymers, and conductive fabrics. The second flexible electrode layer material includes one or more of the following: silver, copper, carbon nanotubes, graphene, stainless steel, conductive polymers, and conductive fabrics.

8. The flexible ionized pressure sensor as described in claim 1, characterized in that: in In the first ion gel elastic layer, the distribution of the first magnetic particles is close to the lamination surface, that is, the density of the first magnetic particles is relatively large near the lamination surface. In the second ion gel elastic layer, the distribution of the second magnetic particles is close to the lamination surface, that is, the density of the second magnetic particles is relatively large near the lamination surface. Preferably, the density of the first magnetic particle increases as the distance from the laminated surface decreases; Preferably, the density of the second magnetic particle increases as the distance from the laminated surface decreases.

9. The flexible ionized pressure sensor as described in claim 8, characterized in that: The first ion gel elastic layer comprises two layers, referred to as the first ion gel elastic layer A and the first ion gel elastic layer B. The first magnetic particle is located in the first ion gel elastic layer B, and the first ion gel elastic layer A does not contain the first magnetic particle. The second ionogel elastic layer comprises two layers, referred to as the second ionogel elastic layer A and the second ionogel elastic layer B. The second magnetic particle is located in the second ionogel elastic layer B, and the second ionogel elastic layer A does not contain the second magnetic particle. Along the stacking direction, the layers are, in sequence, the first ionogel elastic layer A, the first ionogel elastic layer B, the second ionogel elastic layer B, and the second ionogel elastic layer A.

10. The method for manufacturing the flexible ionized pressure sensor according to any one of claims 1 to 9, characterized in that: Includes the following steps: (1) The first ionic liquid, the first polymer, the first magnetic particles, the first crosslinking agent and the first curing agent are mixed to obtain the first ionic gel precursor liquid; The second ionic liquid, the second polymer, the second magnetic particles, the second crosslinking agent, and the second curing agent are mixed to obtain the second ionic gel precursor solution; The first ion gel precursor liquid is covered on the surface of the first flexible electrode layer and solidified to form the first ion gel elastic layer; then the first magnetic field is applied to magnetize the first magnetic particles, that is, the first magnetic particles are magnetized along the direction of the first magnetic field, which is the first magnetization direction. The second ion gel precursor liquid is covered on the surface of the second flexible electrode layer and solidified to form the second ion gel elastic layer; then a second magnetic field is applied to magnetize the second magnetic particles, that is, the second magnetic particles are magnetized along the direction of the second magnetic field, which is the second magnetization direction. (2) The first flexible electrode layer with the first ion gel elastic layer obtained in step (1) is stacked with the second flexible electrode layer with the second ion gel elastic layer, so that the first ion gel elastic layer faces the second ion gel elastic layer, to obtain the flexible ion-gel type pressure sensor.

11. The application of the flexible ionized pressure sensor as described in any one of claims 1 to 9 in at least one of electronic skin, smart mattress, smart seat cushion, pressure distribution monitoring, and human-computer interaction.

12. A flexible ionized pressure sensing array, characterized in that: Includes the flexible ionized pressure sensor as described in any one of claims 1 to 9.

13. A method for fabricating a flexible ionized pressure sensing array, characterized in that: Includes the following steps: S1: Employs a first flexible conductive layer and a second flexible conductive layer; The first flexible conductive layer is composed of M parallel conductive strips, with spacing between adjacent conductive strips and conductive insulation between them; The second flexible conductive layer consists of N parallel conductive strips, with spacing between adjacent conductive strips and both conductive and insulating properties. M and N are natural numbers, and M≥1, N≥1; The first ionic liquid, the first polymer, the first magnetic particles, the first crosslinking agent, and the first curing agent are mixed to obtain the first ionic gel precursor solution; The second ionic liquid, the second polymer, the second magnetic particles, the second crosslinking agent, and the second curing agent are mixed to obtain the second ionic gel precursor solution; A first ion gel precursor liquid is covered on the surface of each conductive strip of the first flexible conductive layer. After curing, a first ion gel elastic layer is formed on the surface of each conductive strip, and there is a gap between adjacent first ion gel elastic layers, which are conductive and insulating. A second ion gel precursor liquid is covered on the surface of each conductive strip of the second flexible conductive layer. After curing, a second ion gel elastic layer is formed on the surface of each conductive strip, and there is a gap between adjacent second ion gel elastic layers, which are conductive and insulating. Magnetize the first ion gel elastic layer on the surface of each conductive strip of the first flexible conductive layer along the first magnetization direction. The second ion gel elastic layer on the surface of each conductive strip of the second flexible conductive layer is magnetized along the second magnetization direction. S2: The first flexible conductive layer and the second flexible conductive layer after step S1 are stacked together, so that the first ion gel elastic layer faces the second ion gel elastic layer and the whole is in a cross shape, resulting in M×N crosses. Each cross is connected to form a flexible ionized pressure sensing unit, and the whole is formed into an M×N flexible ionized pressure sensing array.

14. The method for fabricating the flexible ionized pressure sensing array as described in claim 13, characterized in that: In step S1, the conductive strips of the first flexible conductive layer are woven from conductive fibers. Preferably, the conductive strips of the second flexible conductive layer are woven from conductive fibers; Preferably, the first flexible conductive layer is a zebra stripe fabric with parallel distribution of conductive and non-conductive intervals, woven from non-conductive and conductive fibers using a textile method. Preferably, the second flexible conductive layer is a zebra stripe fabric with parallel conductive-non-conductive intervals, woven from non-conductive and conductive fibers using a textile method.

15. The method for fabricating the flexible ionized pressure sensing array as described in claim 13, characterized in that: A mold is used, which has M×N through holes arranged in an array of M rows and N columns; the M rows correspond to the M conductive strip groups of the first flexible conductive layer, and the N columns correspond to the N conductive strip groups of the second flexible conductive layer. The mold is placed on the surface of the first flexible conductive layer. The M rows of holes of the mold are respectively located on the M conductive strips on the surface of the first flexible conductive layer. The mold forms a first ion gel elastic layer on the surface of the first flexible conductive layer. The first ion gel elastic layer consists of M×N ion gel elastic blocks, which are arranged in an M×N array. The mold is placed on the surface of the second flexible conductive layer. The N columns of holes in the mold are respectively located on the N conductive strips on the surface of the second flexible conductive layer. The mold forms a second ion gel elastic layer on the surface of the second flexible conductive layer. The second ion gel elastic layer consists of M×N ion gel elastic blocks, which are arranged in an M×N array. In step S2, the first flexible conductive layer and the second flexible conductive layer after step S1 are stacked together, so that the first ion gel elastic layer faces the second ion gel elastic layer and the whole is in a cross shape. The M×N ion gel elastic blocks in the first ion gel elastic layer correspond one-to-one with the M×N ion gel elastic blocks in the second ion gel elastic layer.

Images