A quality inspection device for graphite crucible production

Abstract

This invention discloses a quality inspection device for graphite crucible production, relating to the field of graphite crucible inspection technology. It includes a control mechanism and a high-temperature heating mechanism mounted on top of the control mechanism, comprising an electric furnace. Under heating conditions, the device penetrates deep into the crucible and, through the rotation, downward movement, and resetting of an optical camera, comprehensively captures microcracks and thermal defects that are not visible at room temperature, effectively preventing defect omission. A rotating suction structure simultaneously removes dust generated during heating, preventing dust from obscuring thermal defects and contaminating optical components, ensuring clear imaging under heating conditions and providing a reliable basis for defect judgment. A quartz glass cover, cold air jet, and exhaust system ensure the operating temperature of the optical components and inspection structure, preventing high-temperature damage and ensuring stable inspection throughout the heating process. This device can completely simulate the actual use of the crucible and determine its thermal stability.

Description

Technical Field

[0001] This invention relates to the field of graphite crucible testing technology, and more particularly to a quality testing device for graphite crucible production. Background Technology

[0002] Graphite crucibles are widely used in high-end fields such as semiconductors, photovoltaics, precious metals, and high-temperature alloys. During high-temperature use, they are prone to various thermal defects. Microcracks hidden at room temperature will open and extend when heated. These defects will only be fully manifested under high-temperature conditions and cannot be accurately detected at room temperature.

[0003] Existing high-temperature testing technology for graphite crucibles is insufficient to meet the above requirements: firstly, it cannot penetrate deep into the crucible for comprehensive testing, resulting in blind spots; secondly, the dust generated during heating can easily obscure defects and contaminate optical components; and thirdly, high temperatures can easily damage optical components, and the cooling structure is unreasonable. Summary of the Invention

[0004] This invention proposes a quality inspection device for the production of graphite crucibles to address the aforementioned shortcomings in the prior art.

[0005] To achieve the above objectives, the present invention adopts the following technical solution: A quality inspection device for graphite crucible production includes a control mechanism and further includes: A high-temperature heating mechanism is installed on top of the control mechanism, and the high-temperature heating mechanism includes an electric furnace; A high-temperature hot-state detection and protection mechanism is installed on top of the control mechanism. It includes a quartz glass cover and an exhaust duct. Multiple fixing plates are fixed to the outer wall of the exhaust duct. An annular shell is fixed to one end of the multiple fixing plates that is far apart from each other. The annular shell is located on top of the quartz glass cover. Multiple cold air nozzles are connected to the bottom of the annular shell. A high-temperature hot-state optical inspection mechanism, which is connected to a high-temperature hot-state inspection protection mechanism, includes an optical camera one, an optical camera two fixed to the bottom of the optical camera one, the optical camera one and the optical camera two being fitted inside a quartz glass cover, the optical camera one being opposite to the side wall of the quartz glass cover, and the optical camera two being opposite to the bottom wall of the quartz glass cover. The crack exposure mechanism, which is connected to the high-temperature thermal detection and protection mechanism, includes an L-shaped hollow tube, with multiple air intakes connected to both sides of the L-shaped hollow tube.

[0006] Furthermore, the control mechanism includes a cabinet, and a controller is fixed to the top of the cabinet.

[0007] Furthermore, the high-temperature heating mechanism also includes a detection component fitted inside the electric furnace; The electric furnace is fixed to the top of the cabinet; The electric furnace is electrically connected to the controller.

[0008] Furthermore, the high-temperature thermal detection and protection mechanism also includes multiple support frames fixed to the top of the quartz glass cover; The annular shell is rotatably sealed with an annular plate. A cold air duct is fixed inside the annular plate. One end of the cold air duct is connected to a cold air supply unit, and the other end of the cold air duct is connected to the inside of the annular shell. Multiple support frames are fixedly connected to the annular plate; A mounting plate is fixed between multiple support frames, and the exhaust duct is rotatably connected inside the mounting plate; A motor is fixed to the top of the mounting plate. The motor is electrically connected to the controller. A gear is fixed to the output end of the motor. A gear is engaged with one side of the gear. The gear is fixed to the outer wall of the exhaust duct. A rotary sealing connector is installed at the top of the exhaust duct, and an air pump is connected to the rotary sealing connector. The air pump is electrically connected to the controller.

[0009] Furthermore, the high-temperature thermal detection and protection mechanism also includes a second motor fixed to the top of the cabinet. The second motor is electrically connected to the controller. A screw is fixed to the output end of the second motor. A movable plate is fitted onto the external thread of the screw. One side of the movable plate is fixedly connected to a quartz glass cover. A guide rod is fitted inside the movable plate and is fixed to the top of the cabinet.

[0010] Furthermore, the high-temperature thermal optical detection mechanism also includes a support plate fixed to the outer wall of the exhaust duct, and a reciprocating screw is rotatably connected inside the support plate, with a gear three fixed at the top of the reciprocating screw; An internal gear ring is fixed to the bottom of the mounting plate, and the internal gear ring meshes with the gear in three ways; The reciprocating screw is threaded with a second movable plate, which is fitted onto the outside of the exhaust duct. The first optical camera is fixedly connected to the second movable plate. Both optical camera one and optical camera two include an optical camera, a light source module and a heat-insulating filter. The optical camera is fixed inside the light source module and the heat-insulating filter is installed on the lens of the optical camera. The optical camera one and optical camera two are electrically connected to the controller.

[0011] Furthermore, the crack exposure mechanism also includes a gear four rotatably connected to the outer wall of the quartz glass cover, the L-shaped hollow tube is fixed inside the gear four, and the L-shaped hollow tube is externally connected to a high-temperature resistant air pump. A motor three is fixed inside the movable plate one, and a gear five is fixed at the output end of the motor three, which meshes with a gear four. The motor is electrically connected to the controller.

[0012] Compared with existing technologies, the beneficial effects of this invention are: 1. This invention penetrates deep into the crucible under heating conditions and uses an optical camera to rotate, move downwards, and reset, comprehensively capturing microcracks and thermal defects that cannot be seen at room temperature, effectively avoiding the omission of defects.

[0013] 2. This invention uses a rotating suction structure to simultaneously remove dust generated during the heating process, preventing dust from obscuring heat-induced defects and contaminating optical components, ensuring clear imaging under heating conditions, and providing a reliable basis for defect determination.

[0014] 3. This invention uses a quartz glass cover, cold air jets, and ventilation to ensure the operating temperature of optical components and detection structures, avoid high-temperature damage, ensure stable detection throughout the heating process, and completely simulate the actual use of the crucible to determine its thermal stability.

[0015] 4. This invention integrates heating, dust removal, cooling, and detection functions, enabling simultaneous operation during the heating process. It can eliminate defective products in advance and significantly reduce the risk of crucible cracking at high temperatures and material leakage. Attached Figure Description

[0016] Figure 1 This is a first-view structural schematic diagram of a quality inspection device for graphite crucible production proposed in this invention.

[0017] Figure 2 This is a second-view structural schematic diagram of a quality inspection device for graphite crucible production proposed in this invention.

[0018] Figure 3 This is a schematic diagram of the high-temperature hot-state detection and protection mechanism of a quality inspection device for graphite crucible production proposed in this invention.

[0019] Figure 4 This is a schematic diagram of the crack exposure mechanism of a quality inspection device for graphite crucible production proposed in this invention.

[0020] Figure 5 This is a schematic diagram of the high-temperature hot-state optical detection mechanism of a quality inspection device for graphite crucible production proposed in this invention.

[0021] In the diagram: 1. Cabinet; 2. Controller; 3. Motor II; 4. Screw; 5. Guide rod; 6. Moving plate I; 7. Quartz glass cover; 8. Motor III; 9. Gear V; 10. Gear IV; 11. L-shaped hollow tube; 12. Air intake nozzle; 13. Support frame; 14. Mounting plate; 15. Exhaust duct; 16. Gear II; 17. Rotary sealing connector; 18. Motor I; 19. Gear I; 20. Annular plate; 21. Cold air duct; 22. Annular shell; 23. Cold air nozzle; 24. Fixed plate; 25. Reciprocating screw; 26. Gear III; 27. Internal gear ring; 28. Moving plate II; 29. ​​Optical camera I; 30. Optical camera II; 31. Electric furnace; 32. Testing component. Detailed Implementation

[0022] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments.

[0023] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," and "counterclockwise," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0024] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, features defined with "first" and "second" may explicitly or implicitly include one or more of the stated features. In the description of this invention, "a plurality of" means two or more, unless otherwise explicitly specified. Furthermore, the terms "installed," "connected," and "linked" should be interpreted broadly; for example, they may refer to a fixed connection, a detachable connection, or an integral connection; they may refer to a mechanical connection or an electrical connection; they may refer to a direct connection or an indirect connection through an intermediate medium; and they may refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0025] Example: Refer to Figures 1-5 A quality inspection device for graphite crucible production, including a control mechanism, and further comprising: A high-temperature heating mechanism is installed on top of the control mechanism, and the high-temperature heating mechanism includes an electric furnace 31; The high-temperature hot state detection and protection mechanism is installed on the top of the control mechanism and includes a quartz glass cover 7 and an exhaust duct 15. Multiple fixing plates 24 are fixed on the outer wall of the exhaust duct 15. An annular shell 22 is fixed at one end of the multiple fixing plates 24 that are far apart from each other. The annular shell 22 is set on the top of the quartz glass cover 7. Multiple cold air nozzles 23 are connected to the bottom of the annular shell 22. A high-temperature hot-state optical inspection mechanism, which is connected to a high-temperature hot-state inspection protection mechanism, includes an optical camera 29, an optical camera 30 fixed at the bottom of the optical camera 29, the optical camera 29 and the optical camera 30 being fitted inside a quartz glass cover 7, the optical camera 29 being opposite to the side wall of the quartz glass cover 7, and the optical camera 30 being opposite to the bottom wall of the quartz glass cover 7. The crack exposure mechanism, which is connected to the high-temperature thermal detection and protection mechanism, includes an L-shaped hollow tube 11, with multiple air intakes 12 connected to both sides of the L-shaped hollow tube 11.

[0026] The control mechanism includes a cabinet 1, and a controller 2 is fixed on the top of the cabinet 1.

[0027] The high-temperature heating mechanism also includes a detection component 32 installed inside the electric furnace 31; The electric furnace 31 is fixed to the top of the cabinet 1; The electric furnace 31 is electrically connected to the controller 2.

[0028] The high-temperature thermal detection and protection mechanism also includes multiple support frames 13 fixed to the top of the quartz glass cover 7; An annular shell 22 is rotatably sealed with an annular plate 20. A cold air duct 21 is fixed inside the annular plate 20. One end of the cold air duct 21 is connected to a cold air supply unit, and the other end of the cold air duct 21 is connected to the inside of the annular shell 22. Multiple support frames 13 are fixedly connected to the annular plate 20; A mounting plate 14 is fixed between multiple support frames 13, and the exhaust duct 15 is rotatably connected inside the mounting plate 14; Motor 18 is fixed to the top of mounting plate 14. Motor 18 is electrically connected to controller 2. Gear 19 is fixed to the output end of motor 18. Gear 2 16 is meshed on one side of gear 19. Gear 2 16 is fixed to the outer wall of exhaust duct 15. A rotary sealing connector 17 is installed on the top of the exhaust duct 15. An air pump is connected to the rotary sealing connector 17 and is electrically connected to the controller 2.

[0029] The high-temperature thermal detection and protection mechanism also includes a second motor 3 fixed to the top of the cabinet 1. The second motor 3 is electrically connected to the controller 2. A screw 4 is fixed to the output end of the second motor 3. A movable plate 6 is fitted on the external thread of the screw 4. One side of the movable plate 6 is fixedly connected to the quartz glass cover 7. A guide rod 5 is fitted inside the movable plate 6. The guide rod 5 is fixed to the top of the cabinet 1.

[0030] The high-temperature hot optical inspection mechanism also includes a support plate fixed to the outer wall of the exhaust duct 15. The support plate is rotatably connected to a reciprocating screw 25, and a gear 26 is fixed to the top of the reciprocating screw 25. An internal gear ring 27 is fixed to the bottom of the mounting plate 14, and the internal gear ring 27 meshes with the gear 26. The reciprocating screw 25 is threaded with a movable plate 28, which is fitted onto the outside of the exhaust duct 15. The optical camera 29 is fixedly connected to the movable plate 28. Both optical camera 1 (29) and optical camera 2 (30) include an optical camera, a light source module, and a heat-insulating filter. The optical camera is fixed inside the light source module, and the heat-insulating filter is mounted on the lens of the optical camera. Optical camera 1 29 and optical camera 2 30 are electrically connected to controller 2.

[0031] The crack exposure mechanism also includes a gear 4 10 that is rotatably connected to the outer wall of the quartz glass cover 7, an L-shaped hollow tube 11 that is fixed inside the gear 4 10, and a high-temperature resistant air pump connected to the L-shaped hollow tube 11. The inside of the movable plate 16 is fixed a motor 3 8, and the output end of the motor 3 8 is fixed a gear 5 9, which meshes with gear 4 10. Motor 38 is electrically connected to controller 2.

[0032] Working principle: The starter motor 3 drives the screw 4 to rotate, causing the moving plate 6 to carry the high-temperature thermal detection and protection mechanism, the high-temperature thermal optical detection mechanism and the crack exposure mechanism to move down and fit into the inside of the test piece 32. At this time, the gear 4 10 and above are located at the top of the test piece 32. The electric furnace 31 is controlled to heat the test piece 32, and the temperature of the test piece 32 gradually increases. During the heating process, the motor 38 is started to drive the gear 5 9 to rotate. The gear 5 9 drives the gear 4 10 and the L-shaped hollow tube 11 to rotate within the gap between the quartz glass cover 7 and the test piece 32. During the rotation, the heat-resistant vacuum pump generates suction force, which creates a negative pressure inside the L-shaped hollow tube 11, and the gas enters the tube through the suction nozzle 12.

[0033] Dust will fall off when the test piece 32 is heated: if the dust is adsorbed on the surface of the quartz glass cover 7, it will reduce the clarity of the image; if the dust falls off but still adheres to the inner surface of the test piece 32, it will block the cracks generated by the test piece 32, thus affecting the accuracy of the test. During the rotation of the suction nozzle 12, dust is sucked away from the surface of the quartz glass cover 7 and the test piece 32, so as to avoid affecting the clarity of the image and also to avoid dust obscuring cracks and defects, thus avoiding affecting the accuracy of the test.

[0034] During the heating process, the cold air supply unit is activated to supply cold air to the cold air pipe 21. The cold air enters the interior of the annular shell 22 and is then sprayed out through multiple cold air nozzles 23. The sprayed cold air flows down the inner wall of the quartz glass cover 7, gathers at the bottom, and is then drawn away by the exhaust duct 15. The control motor 18 drives the gear 19 to rotate, the gear 19 drives the gear 2 16 and the exhaust tube 15 to rotate, the exhaust tube 15 rotates during the rotation of multiple fixed plates 24, the fixed plates 24 drive the annular shell 22 and multiple cold air nozzles 23 to rotate, thereby uniformly cooling the quartz glass cover 7. During the rotation of the exhaust duct 15, the reciprocating screw 25, gear 3 26, optical camera 1 29, optical camera 2 30, and moving plate 2 28 rotate synchronously. During the rotation, gear 3 26 continuously meshes with the internal gear ring 27, driving the reciprocating screw 25 to rotate, causing the moving plate 2 28 to move the optical cameras 1 29 and 2 30 downwards, thus achieving rotational downward movement. When the optical camera 1 29 rotates downwards, it obtains an image of the crack generated on the inner wall of the test piece 32 after heating through the quartz glass cover 7. When the optical camera 1 29 moves to the bottom, it obtains an image of the bottom of the test piece 32. When the moving plate 2 28 moves to the bottom end of the reciprocating screw 25, it moves upwards to reset and perform a secondary inspection on the side of the test piece 32. The air sprayed from the cold air nozzle 23 cools the optical cameras to avoid affecting their operation.

[0035] The above description is only a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in the present invention, based on the technical solution and inventive concept of the present invention, should be covered within the scope of protection of the present invention.

[0036] It should be noted that the device structure and accompanying drawings of this invention mainly describe the principle of the invention. The technical details of the device's power mechanism, power supply system, and control system are not fully described. However, those skilled in the art, understanding the principles of the invention, can clearly understand the specifics of its power mechanism, power supply system, and control system. The control method described in the application is automatic control via a controller, and the controller's control circuit can be implemented through simple programming by those skilled in the art. The above description only illustrates certain exemplary embodiments of the invention. Undoubtedly, those skilled in the art can modify the described embodiments in various ways without departing from the spirit and scope of the invention. Therefore, the above drawings and descriptions are illustrative in nature and should not be construed as limiting the scope of protection of the claims of this invention.

Claims

1. A quality inspection device for graphite crucible production, comprising a control mechanism, characterized in that, Also includes: A high-temperature heating mechanism is installed on top of the control mechanism, and the high-temperature heating mechanism includes an electric furnace (31). A high-temperature thermal detection and protection mechanism is installed on top of the control mechanism, including a quartz glass cover (7) and an exhaust duct (15). Multiple fixing plates (24) are fixed on the outer wall of the exhaust duct (15). An annular shell (22) is fixed at one end of the multiple fixing plates (24) that are far apart. The annular shell (22) is located on top of the quartz glass cover (7). Multiple cold air nozzles (23) are connected to the bottom of the annular shell (22). A high-temperature hot-state optical detection mechanism, which is connected to a high-temperature hot-state detection protection mechanism, includes an optical camera one (29), an optical camera two (30) fixed at the bottom of the optical camera one (29), the optical camera one (29) and the optical camera two (30) are fitted inside a quartz glass cover (7), the optical camera one (29) is opposite to the side wall of the quartz glass cover (7), and the optical camera two (30) is opposite to the bottom wall of the quartz glass cover (7); The crack exposure mechanism, which is connected to the high-temperature thermal detection and protection mechanism, includes an L-shaped hollow tube (11), on both sides of which are connected multiple air intakes (12).

2. The quality inspection device for graphite crucible production according to claim 1, characterized in that, The control mechanism includes a cabinet (1), and a controller (2) is fixed on the top of the cabinet (1).

3. The quality inspection device for graphite crucible production according to claim 2, characterized in that, The high-temperature heating mechanism also includes a detection component (32) fitted inside the electric furnace (31). The electric furnace (31) is fixed to the top of the cabinet (1); The electric furnace (31) is electrically connected to the controller (2).

4. The quality inspection device for graphite crucible production according to claim 3, characterized in that, The high-temperature thermal detection and protection mechanism also includes multiple support frames (13) fixed to the top of the quartz glass cover (7). The annular shell (22) is internally sealed and rotatably connected to an annular plate (20). A cold air duct (21) is fixed inside the annular plate (20). One end of the cold air duct (21) is externally connected to a cold air supply unit, and the other end of the cold air duct (21) is connected to the inside of the annular shell (22). The plurality of the support frames (13) are fixedly connected to the annular plate (20); A mounting plate (14) is fixed between multiple support frames (13), and the exhaust duct (15) is rotatably connected inside the mounting plate (14); The top of the mounting plate (14) is fixed with a motor (18), which is electrically connected to the controller (2). The output end of the motor (18) is fixed with a gear (19), and a gear (16) meshes with one side of the gear (19). The gear (16) is fixed to the outer wall of the exhaust duct (15). The top of the exhaust duct (15) is equipped with a rotary sealing connector (17), and the rotary sealing connector (17) is externally connected to an air pump, which is electrically connected to the controller (2).

5. The quality inspection device for graphite crucible production according to claim 4, characterized in that, The high-temperature thermal detection and protection mechanism also includes a second motor (3) fixed on the top of the cabinet (1). The second motor (3) is electrically connected to the controller (2). The output end of the second motor (3) is fixed with a screw (4). The external thread of the screw (4) is fitted with a moving plate (6). One side of the moving plate (6) is fixedly connected to a quartz glass cover (7). The inside of the moving plate (6) is fitted with a guide rod (5). The guide rod (5) is fixed on the top of the cabinet (1).

6. The quality inspection device for graphite crucible production according to claim 5, characterized in that, The high-temperature thermal optical detection mechanism also includes a support plate fixed to the outer wall of the exhaust duct (15), and a reciprocating screw (25) is rotatably connected inside the support plate. A gear three (26) is fixed to the top of the reciprocating screw (25). An internal gear ring (27) is fixed to the bottom of the mounting plate (14), and the internal gear ring (27) meshes with gear three (26); The reciprocating screw (25) has a movable plate two (28) sleeved on its external thread. The movable plate two (28) is sleeved on the outside of the exhaust tube (15). The optical camera one (29) is fixedly connected to the movable plate two (28). Both optical camera one (29) and optical camera two (30) include an optical camera, a light source module and a heat-insulating filter. The optical camera is fixed inside the light source module and the heat-insulating filter is installed on the lens of the optical camera. The optical camera one (29) and optical camera two (30) are electrically connected to the controller (2).

7. The quality inspection device for graphite crucible production according to claim 6, characterized in that, The crack exposure mechanism also includes a gear four (10) rotatably connected to the outer wall of the quartz glass cover (7), the L-shaped hollow tube (11) is fixed inside the gear four (10), and the L-shaped hollow tube (11) is connected to a high-temperature resistant air pump. The interior of the movable plate 1 (6) is fixed with motor 3 (8), and the output end of motor 3 (8) is fixed with gear 5 (9), which meshes with gear 4 (10); The motor (8) is electrically connected to the controller (2).

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