Accelerometers and electronic devices

Abstract

This invention discloses an accelerometer and electronic device. The accelerometer's base has four anchor points. Four inner coupling parts and four outer coupling parts are elastically connected to four first connecting arms, which in turn are elastically connected to the four anchor points. The base has a first electrode and a second electrode. The inner coupling parts have a third electrode, and the outer coupling parts have a fourth electrode. The third and fourth electrodes have different polarities and are arranged alternately. The first and third electrodes are arranged alternately to form a capacitor, and the second and fourth electrodes are also arranged alternately to form a capacitor. The first connecting arms, the inner coupling parts, and the outer coupling parts constitute a detection unit. The four detection units surround the geometric center of the base. When the detection units experience out-of-plane flipping and / or in-plane offset, the displacements of different detection units can compensate for each other, allowing the changes in positive and negative capacitance between different electrodes to cancel each other out. This suppresses detection errors caused by out-of-plane flipping and / or in-plane offset, improving detection accuracy.

Description

Technical Field

[0001] This invention relates to the field of micromechanical structure technology, and in particular to an accelerometer and electronic device. Background Technology

[0002] An accelerometer is a sensor that measures acceleration. Accelerometers typically include a mechanical acceleration sensor and a displacement sensor. A common mechanical acceleration sensor works by using an asymmetrical test mass along a rotation axis under acceleration to drive a torsion spring to rotate around the axis, causing out-of-plane displacement of the corresponding capacitor plate region of the structure. By placing capacitor plates above or below the corresponding capacitor plate region of the structure to form a differential capacitor, changes in capacitance can be detected to obtain changes in acceleration.

[0003] However, traditional accelerometers have limited ability to suppress the out-of-plane flipping motion of the test mass, and cannot effectively limit the impact of this flipping on the detection results, resulting in low accuracy. Therefore, improving the structural design of accelerometers to enhance their detection accuracy is an important research topic in this field. Summary of the Invention

[0004] The purpose of this invention is to provide an accelerometer and electronic device that can effectively suppress unexpected movement of the detection structure in the accelerometer and improve the detection accuracy of the accelerometer.

[0005] To solve the above-mentioned technical problems, a first aspect of the present invention provides an accelerometer, comprising: The base has four anchor points arranged around the geometric center of the base; A plurality of first electrodes are arranged on the surface of the substrate where the anchor point is provided, and the plurality of first electrodes are spaced apart from the anchor point; A plurality of second electrodes are arranged on the surface of the substrate where the anchor point is provided, and the plurality of second electrodes are arranged at intervals from the first electrode; A detection structure is arranged with the substrate in a first direction, the detection structure comprising: Four first connecting arms are arranged corresponding to the four anchor points and are elastically connected to the four anchor points. Four inner coupling parts are elastically connected to one end of the four first connecting arms near the anchor point and are arranged corresponding to the four anchor points. The four inner coupling parts are provided with a third electrode. Four outer coupling parts are elastically connected to the ends of the four first connecting arms away from the anchor point, and are arranged corresponding to the four inner coupling parts. Each of the four outer coupling parts is provided with a fourth electrode. The third electrode and the fourth electrode have different polarities and are arranged alternately. Wherein, the first electrode and the third electrode are spaced apart in the first direction, and the second electrode and the fourth electrode are spaced apart in the first direction.

[0006] The accelerometer of the present invention has four anchor points on a substrate. The detection structure includes four first connecting arms, four inner coupling parts, and four outer coupling parts, which are elastically connected to the four first connecting arms, and the four first connecting arms are elastically connected to the four anchor points. The substrate has a first electrode and a second electrode, the four inner coupling parts have a third electrode, and the four outer coupling parts have a fourth electrode. The third and fourth electrodes have different polarities and are arranged alternately. The first and third electrodes are arranged alternately to form a capacitor, and the second and fourth electrodes are arranged alternately to form a capacitor. The first connecting arms, inner coupling parts, and outer coupling parts can constitute a detection unit. By setting the detection structure of the accelerometer as four detection units arranged around the geometric center of the substrate, when the detection units experience out-of-plane flipping and / or in-plane offset, the flipping displacement and / or in-plane offset of different detection units can compensate for each other. This allows the changes in positive and negative capacitance between the electrodes on the detection units and the electrodes on the substrate caused by out-of-plane flipping and / or in-plane offset to cancel each other out, suppressing the detection error caused by out-of-plane flipping and / or in-plane offset, and improving the detection accuracy of the accelerometer.

[0007] A second aspect of the present invention provides an accelerometer comprising: The base is equipped with anchor points; A plurality of first electrodes are arranged on the surface of the substrate where the anchor point is provided, and the plurality of first electrodes are spaced apart from the anchor point; A plurality of second electrodes are arranged on the surface of the substrate where the anchor point is provided, and the plurality of second electrodes are arranged at intervals from the first electrode; A detection structure is arranged with the substrate in a first direction, the detection structure comprising: The first connecting arm is arranged corresponding to the anchor point; A first elastic element, wherein the first connecting arm and the anchor point are elastically connected through the first elastic element; An inner coupling portion is located at one end of the first connecting arm near the anchor point, and the inner coupling portion is provided with a third electrode. The second elastic element is used to elastically connect the first connecting arm and the inner coupling portion. An outer coupling portion is located at the end of the first connecting arm away from the anchor point. Each outer coupling portion is provided with a fourth electrode, and the polarities of the third electrode and the fourth electrode are different. The third elastic element is used to elastically connect the first connecting arm and the outer coupling portion; The first electrode and the third electrode are spaced apart in the first direction, the second electrode and the fourth electrode are spaced apart in the first direction, and the first elastic element, the second elastic element and the third elastic element all extend along the second direction, which is perpendicular to the second direction.

[0008] In the accelerometer of the present invention, a base and a detection structure are arranged in a first direction. A first connecting arm of the detection structure is elastically connected to an anchor point on the base via a first elastic member, and an inner coupling portion and an outer coupling portion are elastically connected to the first connecting arm via a second elastic member and a third elastic member, respectively. The first, second, and third elastic members all extend along a second direction perpendicular to the first direction. This reduces the extension length of the first, second, and third elastic members in other directions perpendicular to the second direction, thereby helping to reduce the size of the detection structure in the direction perpendicular to the second direction, achieving a smaller size design for the accelerometer and improving its integration.

[0009] A third aspect of the present invention provides an electronic device including the accelerometer described in the first or second aspect above.

[0010] By incorporating a first-party accelerometer, electronic devices can obtain more accurate acceleration detection. Incorporating a second-party accelerometer helps improve the compactness of the internal structure design of electronic devices, facilitating miniaturization.

[0011] The accelerometer of the present invention has at least the following advantages over the prior art: The accelerometer provided by this invention has a first connecting arm, an inner coupling part, and an outer coupling part that can constitute a detection part. By setting the detection structure of the accelerometer as four detection parts arranged around the geometric center of the base, when the detection part undergoes out-of-plane flipping and / or in-plane offset, the flipping displacement and / or in-plane offset of different detection parts can compensate for each other. This allows the changes in positive and negative capacitance between the electrodes on the detection part and the electrodes on the base caused by out-of-plane flipping and / or in-plane offset to cancel each other out, suppressing the detection error caused by out-of-plane flipping and / or in-plane offset, and improving the detection accuracy of the accelerometer. Attached Figure Description

[0012] One or more embodiments are illustrated by way of example with reference numerals in the accompanying drawings. These illustrations do not constitute a limitation on the embodiments. Elements with the same reference numerals in the drawings are denoted as similar elements. Unless otherwise stated, the figures in the drawings are not to be limited by scale.

[0013] Figure 1 This is a schematic diagram of a detection structure of an accelerometer in an embodiment of the present invention; Figure 2 yes Figure 1 A top view of the accelerometer shown; Figure 3 yes Figure 2 The diagram shows a cross-sectional view of the accelerometer along the A-A' direction; Figure 4 yes Figure 2 Enlarged view of region B in the middle; Figure 5 yes Figure 2 Enlarged view of region C in the middle; Figure 6 yes Figure 2 Enlarged schematic diagram of region D in the middle; Figure 7 yes Figure 2 A schematic diagram of the Z-axis detection mode of the accelerometer is shown. Figure 8 This is a schematic diagram of another detection structure of the accelerometer in an embodiment of the present invention; Figure 9 yes Figure 8 A schematic diagram of the Z-axis detection mode of the accelerometer is shown. Figure 10 This is a schematic diagram of another detection structure of the accelerometer in an embodiment of the present invention; Figure 11 yes Figure 10 A schematic diagram of the Z-axis detection mode of the accelerometer is shown. Figure 12 This is a schematic diagram of the structure of an accelerometer in an embodiment of the present invention; Figure 13 yes Figure 12 A schematic diagram of the Y-axis detection mode of the accelerometer is shown. Figure 14 yes Figure 12 A schematic diagram of the X-axis detection mode of the accelerometer is shown. Figure 15 This is another structural schematic diagram of the accelerometer in an embodiment of the present invention; Figure 16 yes Figure 15 A schematic diagram of the Y-axis detection mode of the accelerometer is shown. Figure 17 yes Figure 15 A schematic diagram of the X-axis detection mode of the accelerometer is shown. Figure 18 This is another structural schematic diagram of the accelerometer in an embodiment of the present invention; Figure 19 yes Figure 18 A schematic diagram of the Y-axis detection mode of the accelerometer is shown. Figure 20 yes Figure 18 A schematic diagram of the X-axis detection mode of the accelerometer is shown. Figure 21 This is a schematic diagram of the structure of an electronic device according to an embodiment of the present invention.

[0014] Explanation of reference numerals in the attached figures 1. Accelerometer; 11. Base; 110. Anchor point; 111. First electrode; 112. Second electrode; 113. Fifth electrode; 114. Seventh electrode; 12. Detection structure; 120. First connecting arm; 1201. First end; 1202. Second end; 121. Inner coupling part; 1211. First comb tooth; 122. Outer coupling part; 122a. First hollow part; 122b. Second hollow part; 1221. Second comb tooth; 123. First elastic element; 1231. First cantilever; 1232. Second cantilever; 124. Second elastic element; 1241. Third cantilever; 1242. Fourth cantilever; 1243. Fifth cantilever; 125. Third elastic element; 1251. Sixth cantilever; 1252. Seventh cantilever; 1253. Eighth cantilever; 126. Second connecting arm; 2. Electronic equipment; A1, First quadrant region; A2, Second quadrant region; A3, Third quadrant region; A4, Fourth quadrant region; L1, First center line; L2, Second center line; L3, First symmetry line; L4, Second symmetry line; L5, Third symmetry line; L6, Fourth symmetry line; Z, First direction; Y, Second direction; X, Third direction. Detailed Implementation

[0015] To make the objectives, technical solutions, and advantages of this invention clearer, the various embodiments of this invention will be described in detail below with reference to the accompanying drawings. However, those skilled in the art will understand that many technical details have been provided in the various embodiments of this invention to facilitate a better understanding of the invention. However, the technical solutions claimed in the claims of this invention can be implemented even without these technical details and with various variations and modifications based on the following embodiments.

[0016] In embodiments of the present invention, the terms "upper," "lower," "left," "right," "front," "rear," "top," "bottom," "inner," "outer," "middle," "vertical," "horizontal," "lateral," and "longitudinal" indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings. These terms are primarily for the purpose of better describing the present invention and its embodiments, and are not intended to limit the indicated devices, elements, or components to having a specific orientation, or to be constructed and operated in a specific orientation.

[0017] Furthermore, some of the aforementioned terms, besides indicating direction or positional relationships, may also have other meanings. For example, the term "above" may, in certain circumstances, indicate a dependency or connection. Those skilled in the art can understand the specific meaning of these terms in this invention based on the specific circumstances.

[0018] Furthermore, the terms "installation," "setting," "equipped with," "opening," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral structure; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium, or an internal connection between two devices, components, or parts. Those skilled in the art can understand the specific meaning of these terms in this invention according to the specific circumstances.

[0019] Furthermore, the terms "first," "second," etc., are primarily used to distinguish different devices, components, or parts (which may be the same or different in specific type and construction), and are not intended to indicate or imply the relative importance or quantity of the indicated devices, components, or parts. Unless otherwise stated, "a plurality of" means two or more.

[0020] Traditional accelerometers, due to structural design flaws, are prone to measurement errors in actual acceleration testing scenarios caused by unexpected motion. Furthermore, their design is susceptible to stress concentration due to displacement of the sensing structure or changes in internal temperature, leading to changes in the internal structure of the accelerometer and ultimately reducing its accuracy, or even causing it to fail completely. In addition, the complex structure and large size of traditional accelerometers hinder the miniaturization of the accelerometer itself and the electronic devices that house it.

[0021] Based on the above problems, embodiments of the present invention provide an accelerometer and an electronic device. In the accelerometer, the first connecting arm, the inner coupling part, and the outer coupling part can constitute a detection part. By setting the detection structure of the accelerometer as four detection parts arranged around the geometric center of the base, when the detection part undergoes out-of-plane flipping and / or in-plane offset, the flipping displacement and / or in-plane offset of different detection parts can compensate for each other. This allows the changes in positive and negative capacitance between the electrodes on the detection part and the electrodes on the base caused by out-of-plane flipping and / or in-plane offset to cancel each other out, suppressing the detection error caused by out-of-plane flipping and / or in-plane offset, and improving the detection accuracy of the accelerometer.

[0022] The following is a detailed description of the implementation details of the accelerometer and electronic device in this embodiment. The following content is only for the convenience of understanding and is not necessary for implementing this solution.

[0023] Please see also Figures 1 to 3 , Figure 1 This is a schematic diagram of a detection structure of an accelerometer in an embodiment of the present invention. Figure 2 yes Figure 1 The diagram shown is a top view of the accelerometer. Figure 3 yes Figure 2 The diagram shows a cross-sectional view of the accelerometer along the A-A' direction.

[0024] The first aspect of the present invention discloses an accelerometer 1, including a base 11 and a detection structure 12, wherein the detection structure 12 is movably connected to the base 11 relative to the base 11. When the accelerometer 1 is subjected to external forces in different directions and thus experiences acceleration, the detection structure 12 is displaced relative to the base 11, and the accelerometer 1 can obtain the corresponding acceleration by acquiring the displacement of the detection structure 12 relative to the base 11.

[0025] Specifically, the substrate 11 can be a plate-like structure. Multiple anchor points 110 are provided on one side of the substrate 11. The anchor points 110 can be arranged around the geometric center O of the substrate 11. The detection structure 12 is elastically connected to the multiple anchor points 110, allowing the detection structure 12 to move relative to the substrate 11. Multiple first electrodes 111 and multiple second electrodes 112 can be provided on the side of the substrate 11 with the anchor points 110. Both the first electrodes 111 and the second electrodes 112 are spaced apart from the anchor points 110.

[0026] In some embodiments, the base 11 may be a square plate. Of course, in other embodiments, the base 11 may also be a plate of other shapes. The following description uses a square plate as an example, but it is not intended to imply that the following content applies only to this example.

[0027] The detection structure 12 and the substrate 11 are arranged sequentially in the first direction Z. For example, the substrate 11 and the detection structure 12 are arranged sequentially in the thickness direction of the substrate 11. The detection structure 12 includes a plurality of first connecting arms 120, a plurality of inner coupling portions 121, and a plurality of outer coupling portions 122. The plurality of first connecting arms 120 are arranged corresponding to a plurality of anchor points 110. For example, the corresponding first connecting arms 120 and anchor points 110 can be arranged adjacent to each other, and the first connecting arms 120 are elastically connected to the anchor points 110. The inner coupling portions 121 are elastically connected to the ends of the corresponding first connecting arms 120 near the anchor points 110, and the outer coupling portions 122 are elastically connected to the ends of the corresponding first connecting arms 120 away from the anchor points 110. The inner coupling portions 121 are configured as third electrodes, and the outer coupling portions 122 are configured as fourth electrodes. The first electrodes 111 and the third electrodes are spaced apart in the first direction Z, and the second electrodes 112 and the fourth electrodes are spaced apart in the first direction Z. The third electrodes and the fourth electrodes have different polarities and are arranged alternately.

[0028] It should be noted that both the inner coupling portion 121 and the outer coupling portion 122 can be made of semiconductor silicon. Thus, both the inner coupling portion 121 and the outer coupling portion 122 can themselves be configured as electrodes, thereby forming a parallel plate capacitor with the electrodes disposed on the substrate 11. In other embodiments, the accelerometer 1 may also include a cavity cover (not shown) covering the detection structure 12. Electrodes corresponding to the inner coupling portion 121 and the outer coupling portion 122 can be disposed on the cavity cover, thereby forming a parallel plate capacitor with the inner coupling portion 121 and the outer coupling portion 122. When electrodes are disposed on the cavity cover, electrodes may not be disposed on the substrate 11. Of course, when the inner coupling portion 121 and the outer coupling portion 122 are made of non-conductors, corresponding third and fourth electrodes may also be separately disposed on the inner coupling portion 121 and the outer coupling portion 122.

[0029] In some embodiments, the four anchor points 110 connected to the first connecting arm 120 can be arranged rotationally symmetrically about the geometric center O of the base 11, and these four anchor points 110 are arranged adjacent to the geometric center O of the base 11. In this way, the overall structure and mechanical properties of the detection structure 12 are symmetrically distributed about the geometric center O of the base 11, making the stress and deformation of the detection structure 12 tend to be symmetrically balanced in all directions. If the four anchor points 110 are offset, the stress distribution of the detection structure 12 will be asymmetrical, which may cause the detection structure 12 to produce additional bending, torsion, or warping, thereby introducing a larger stress gradient change, causing the initial position of the sensitive structure to deviate from the expected design position, resulting in a larger initial capacitance shift in the accelerometer 1, reducing the zero-point stability and detection sensitivity of the accelerometer 1. The design in this invention enables the deformation mode of the detection structure 12 to be more inclined towards tension / compression rather than bending, thus making the stress distribution of the detection structure 12 more uniform and reducing the number of stress concentration points, which helps to maintain the internal structure of the accelerometer 1 in a balanced and stable manner. Furthermore, the differential arrangement of electrodes based on polarity can compensate for and cancel out the capacitance changes caused by the bending deformation of the detection structure 12 in the first direction Z, thereby improving the zero-point stability of the accelerometer 1.

[0030] It is understandable that, since multiple anchor points 110 are arranged around the geometric center O of the base 11, the first connecting arm 120, the inner coupling portion 121, and the outer coupling portion 122 corresponding to the arrangement of the multiple anchor points 110 can all be considered to be arranged around the geometric center O of the base 11. Furthermore, since the first electrode 111 and the third electrode form a capacitor, and the second electrode 112 and the fourth electrode form a capacitor, and the third electrode and the fourth electrode have different polarities, the polarities of the first electrode 111 and the second electrode 112 are also different.

[0031] With this configuration, the first connecting arm 120, the inner coupling part 121, and the outer coupling part 122 can constitute a detection unit. By setting the detection structure of the accelerometer 1 as four detection units arranged around the geometric center O of the base 11, when the detection units experience out-of-plane flipping and / or in-plane offset, the flipping displacement and / or in-plane offset of different detection units can compensate for each other. This allows the changes in positive and negative capacitance between the electrodes on the detection units and the electrodes on the base 11 caused by out-of-plane flipping and / or in-plane offset to cancel each other out, suppressing the detection error caused by out-of-plane flipping and / or in-plane offset, and improving the detection accuracy of the accelerometer 1. In addition, the third and fourth electrodes have different polarities and are arranged alternately. When the accelerometer 1 is in its initial state, that is, when the accelerometer 1 is not affected by external forces, but is subjected to structural deformation caused by the processing error of the accelerometer 1 and internal temperature changes, the electrode plates of different polarities have similar deformations, which significantly reduces the amplitude of the initial capacitance offset of the accelerometer 1.

[0032] In some embodiments, four first connecting arms 120, four inner coupling portions 121, and four four outer coupling portions 122 are each provided. Correspondingly, four of the plurality of anchor points 110 are arranged at intervals around the geometric center O of the base 11, and the four first connecting arms 120 are arranged corresponding to these four anchor points 110 and are respectively connected to the four anchor points 110. That is, the four first connecting arms 120 are also arranged at intervals around the geometric center O of the base 11.

[0033] In some embodiments, all four first connecting arms 120 extend along the second direction Y, and two of the four first connecting arms 120 constitute a first group of connecting arms, while the other two constitute a second group of connecting arms. In the third direction X, the first group of connecting arms is located between two anchor points 110 spaced apart in the third direction X, and the second group of connecting arms is located between two other anchor points 110 spaced apart in the third direction X. Simultaneously, the first group of connecting arms and the second group of connecting arms are arranged at intervals in the second direction Y, and two of the first connecting arms 120 in the first group of connecting arms and the second group of connecting arms are also arranged at intervals in the third direction X. The first direction Z, the second direction Y, and the third direction X are all perpendicular to each other. For example, when the base 11 is a rectangular plate, the first direction Z can be the thickness direction of the base 11, the second direction Y can be the extension direction of the long side of the base 11, and the third direction X can be the extension direction of the short side of the base 11.

[0034] In some embodiments, the base 11 is a rectangular plate-shaped component as an example. The two first connecting arms 120 in the first group of connecting arms and the two first connecting arms 120 in the second group of connecting arms are symmetrically arranged with a straight line passing through the geometric center O of the base 11 and parallel to the long side of the base 11 as the axis of symmetry; the first group of connecting arms and the second group of connecting arms are symmetrically arranged with a straight line passing through the geometric center O of the base 11 and parallel to the short side of the base 11 as the axis of symmetry.

[0035] In some embodiments, the first connecting arm 120 extends along the second direction Y, wherein the first end 1201 of the first connecting arm 120 near the anchor point 110 in the second direction Y is elastically connected to the inner coupling portion 121, the second end 1202 of the first connecting arm 120 away from the anchor point 110 in the second direction Y is elastically connected to the outer coupling portion 122, and the portion of the first connecting arm 120 located between the first end 1201 and the second end 1202 in the second direction Y is elastically connected to the anchor point 110. Thus, when the detection structure 12 is subjected to an external force, the first connecting arm 120 can move relative to the anchor point 110, thereby generating acceleration relative to the anchor point 110. Furthermore, since the inner coupling portion 121 and the outer coupling portion 122 are respectively connected to the opposite ends of the first connecting arm 120, the first connecting arm 120, the inner coupling portion 121, and the outer coupling portion 122 form a seesaw structure. When the accelerometer 1 is subjected to acceleration in the first direction Z, the inner coupling portion 121 and the outer coupling portion 122 move in opposite directions relative to the base 11 in the first direction Z. That is, the inner coupling portion 121 and the outer coupling portion 122 perform differential motion relative to the base 11 in the first direction Z, causing differential changes in the capacitance between the first electrode 111 and the third electrode, and the capacitance between the second electrode 112 and the fourth electrode. In this way, by detecting the change in capacitance, an accurate acceleration in the first direction Z can be obtained.

[0036] In some embodiments, on the third direction X, the inner coupling portion 121 and the outer coupling portion 122 may be disposed on the outer side of the first connecting arm 120, that is, on the side of the first connecting arm 120 away from the geometric center O of the base 11 on the third direction X.

[0037] See you again Figure 2 and Figure 3 In some embodiments, the inner coupling portion 121 has a first comb tooth portion configured as the third electrode described above, and the outer coupling portion 122 has a second comb tooth portion configured as the fourth electrode described above. The first comb tooth portion and the second comb tooth portion are nested together in the second direction Y. It is understood that the first comb tooth portion constitutes part of the inner detection mass block, and the second comb tooth portion constitutes part of the outer detection mass block.

[0038] For example, the first comb portion has a plurality of first comb teeth 1211 spaced apart in the third direction X, and the plurality of first comb teeth 1211 extend in the second direction Y. The first comb teeth 1211 can be configured as a third electrode. Similarly, the second comb portion has a plurality of second comb teeth 1221 spaced apart in the third direction X, and the plurality of second comb teeth 1221 extend in the second direction Y. The second comb teeth 1221 can be configured as a fourth electrode. More specifically, the first comb teeth 1211 and the second comb teeth 1221 extend toward each other in the second direction Y. The first comb teeth 1211 extend into the spacing between adjacent second comb teeth 1221 in the second direction Y, and the second comb teeth 1221 enter into the spacing between adjacent first comb teeth 1211. By setting the inner coupling portion 121 and the outer coupling portion 122 as the above-described comb tooth coupling nested structure, the rotational co-coupling of the seesaw structure can be achieved, suppressing the remaining translational and rotational modes of the seesaw structure other than in the out-of-plane direction (i.e., the first direction Z), and preventing angular acceleration from affecting the detection results of the accelerometer 1. Meanwhile, since the first comb teeth 1211 and the second comb teeth 1221 are arranged alternately, when the inner coupling part 121 and the outer coupling part 122 are deformed due to stress, the bending deformation of the first comb teeth 1211 and the second comb teeth 1221 is similar to the bowl-shaped deformation, which makes the capacitance changes formed by electrodes of different polarities similar, which helps to reduce the initial capacitance offset of the accelerometer 1 and thus improves the detection accuracy of the accelerometer 1.

[0039] Please see also Figures 4 to 6 , Figure 4 yes Figure 2 Enlarged diagram of region B in the middle. Figure 5 yes Figure 2 Enlarged diagram of region C in the middle. Figure 6 yes Figure 2 A magnified diagram of region D in the middle.

[0040] In some embodiments, the detection structure 12 further includes a first elastic element 123, a second elastic element 124, and a third elastic element 125. The first elastic element 123 has two opposing ends, one end of which is connected to the anchor point 110, and the other end is connected to the first connecting arm 120. The second elastic element 124 has two opposing ends, one end of which is connected to the first end 1201, and the other end is connected to the inner coupling portion 121. The third elastic element 125 has two opposing ends, one end of which is connected to the second end 1202, and the other end is connected to the outer coupling portion 122. Thus, the first connecting arm 120 is movable relative to the anchor point 110 in the first direction Z, the second direction Y, and the third direction X via the first elastic element 123, while the inner coupling portion 121 and the outer coupling portion 122 are respectively movable relative to the first connecting arm 120 in the first direction Z, the second direction Y, and the third direction X via the second elastic element 124 and the third elastic element 125.

[0041] Understandably, in the third direction X, the first elastic element 123, the second elastic element 124 and the third elastic element 125 can also be disposed on the outside of the first connecting arm 120, that is, on the side of the first connecting arm 120 away from the geometric center O of the base 11 in the third direction X.

[0042] In some embodiments, the first elastic element 123, the second elastic element 124, and the third elastic element 125 all extend along a third direction X. As described above, the first connecting arm 120 extends in the second direction Y. Since the first elastic element 123, the second elastic element 124, and the third elastic element 125 are connected to different positions of the first connecting arm 120 along its extension direction, that is, the first elastic element 123, the second elastic element 124, and the third elastic element 125 are spaced apart in the second direction Y. Thus, by setting the first elastic element 123, the second elastic element 124, and the third elastic element 125 to extend along a third direction X, the dimensions of the first elastic element 123, the second elastic element 124, and the third elastic element 125 in the second direction Y can be reduced, thereby helping to reduce the size of the accelerometer 1 in the second direction Y, which is beneficial for achieving a miniaturized design of the accelerometer 1.

[0043] In some embodiments, the first elastic member 123 includes a first cantilever 1231 and a second cantilever 1232 arranged at intervals in the second direction Y. Both the first cantilever 1231 and the second cantilever 1232 extend along the third direction X. One end of the first cantilever 1231 is connected to the first connecting arm 120, and the other end of the first cantilever 1231 is connected to one end of the second cantilever 1232. The other end of the second cantilever 1232 is connected to the anchor point 110. That is, the first elastic member 123 has a U-shaped structure with an opening in the third direction X facing the first connecting arm 120.

[0044] In some embodiments, the first elastic member 123 and the anchor point 110 can be connected by a second connecting arm 126. Specifically, the second connecting arm 126 extends along the second direction Y and has two opposing ends in the second direction Y. The end of the second connecting arm 126 in the second direction Y that is closer to the third elastic member 125 is connected to one end of the aforementioned second cantilever 1232, and the end of the second connecting arm 126 in the second direction Y that is farther away from the third elastic member 125 is connected to the anchor point 110.

[0045] In some embodiments, the second elastic member 124 includes a third cantilever 1241, a fourth cantilever 1242, and a fifth cantilever 1243 arranged at intervals in the second direction Y. The third cantilever 1241, the fourth cantilever 1242, and the fifth cantilever 1243 all extend in the third direction X. One end of the fourth cantilever 1242 is connected to the first end 1201, and the other end of the fourth cantilever 1242 is connected to one end of both the third cantilever 1241 and the fifth cantilever 1243. The other ends of both the third cantilever 1241 and the fifth cantilever 1243 are connected to the inner coupling portion 121. As can be seen, the second elastic member 126 is connected to the inner coupling part 121 through the third cantilever 1241 and the fifth cantilever 1243 located on opposite sides of the fourth cantilever 1242. In this way, the stress distribution on the second elastic member 124 is more balanced, the stress at the end of the fourth cantilever 1242 connecting the third cantilever 1241 and the fifth cantilever 1243 is reduced, and stress concentration is avoided in the second elastic member 124 during the movement of the inner coupling part 121.

[0046] In some embodiments, similar to the second elastic member 124, the third elastic member 125 includes a sixth cantilever 1251, a seventh cantilever 1252, and an eighth cantilever 1253 spaced apart in the second direction Y. The sixth cantilever 1251, the seventh cantilever 1252, and the eighth cantilever 1253 all extend along the third direction X. One end of the seventh cantilever 1252 is connected to the second end 1202, and the other end is connected to one end of both the sixth cantilever 1251 and the eighth cantilever 1253. The other ends of both the sixth cantilever 1251 and the eighth cantilever 1253 are connected to the outer coupling portion 122. As can be seen, the third elastic member 125 is connected to the outer coupling part 122 through the sixth cantilever 1251 and the eighth cantilever 1253 located on opposite sides of the seventh cantilever 1252. In this way, the stress distribution on the third elastic member 125 is more balanced, the stress at the end of the seventh cantilever 1252 connecting the sixth cantilever 1251 and the eighth cantilever 1253 is reduced, and stress concentration is avoided in the third elastic member 125 during the movement of the outer coupling part 122.

[0047] In some embodiments, in the second direction Y, the first comb tooth portion and the second comb tooth portion may be disposed between the first elastic member 123 and the second elastic member 124.

[0048] Please see also Figure 7 , Figure 7 yes Figure 2 The diagram shows a schematic of the Z-axis detection mode of the accelerometer.

[0049] In some embodiments, a straight line passing through the geometric center O of the substrate 11 and extending in the second direction Y is designated as the first centerline L1. The third and fourth electrodes located on opposite sides of the first centerline L1 are symmetrically arranged with the first centerline L1 as the axis of symmetry. That is, in the third direction X, the third and fourth electrodes located on one side of the first centerline L1 are symmetrically arranged with respect to the third and fourth electrodes located on the other side of the first centerline L1.

[0050] Understandably, since the third electrode is located on the first comb tooth 1211 and the fourth electrode is located on the second comb tooth 1221, the first comb tooth 1211 and the second comb tooth 1221 located on one side of the first center line L1 are symmetrically arranged with the first comb tooth 1211 and the second comb tooth 1221 located on the other side of the first center line L1 in the third direction X.

[0051] In some embodiments, the second centerline L2 is defined as a straight line passing through the geometric center O of the substrate 11 and extending in the third direction X. In the second direction Y, the minimum distance between the third and fourth electrodes located on one side of the second centerline L2 and the second centerline L2 is equal to the minimum distance between the third and fourth electrodes located on the other side of the second centerline L2 and the second centerline L2. Thus, based on the symmetry of the third and fourth electrodes about the first centerline L1, the spacing between the third and fourth electrodes and the second centerline L2 is reasonably set. When the third and fourth electrodes, or the first comb teeth 1211 and the second comb teeth 1221, are deformed due to stress along the second direction Y, the electrodes of different polarities have the same displacement in the second direction Y. Therefore, the positive and negative capacitance offsets in the second direction Y can cancel each other out. When the accelerometer 1 detects acceleration in the first direction Z, the initial capacitance offset caused by stress in the second direction Y can be reduced, thereby improving the detection accuracy in the first direction Z. Understandably, the first centerline L1 and the second centerline L2 intersect at the geometric center O of the base 11.

[0052] Accordingly, in some embodiments, the minimum distance between the first comb tooth 1211 and the second comb tooth 1221 located on one side of the second center line L2 and the second center line L2 is the same as the minimum distance between the first comb tooth 1211 and the second comb tooth 1221 located on the other side of the second center line L2 and the second center line L2.

[0053] In some embodiments, the first comb tooth 1211 and the second comb tooth 1221, located on the same side of the second center line L2, have the same minimum distance from the second center line L2; and / or, the third electrode and the fourth electrode, located on the same side of the second center line L2, have the same minimum distance from the second center line L2. This configuration allows for better reduction of the difference in capacitance changes between different polarities when the accelerometer 1 is subjected to stress along the second direction Y, thereby reducing capacitance offset and improving the detection accuracy of the accelerometer 1 in the first direction Z.

[0054] Please see also Figure 8 and Figure 9 , Figure 8 This is a schematic diagram of another detection structure of the accelerometer in an embodiment of the present invention. Figure 9 yes Figure 8 The diagram shows a schematic of the Z-axis detection mode of the accelerometer.

[0055] In other embodiments, the first center line L1 and the second center line L2 divide the region into a first quadrant region A1, a second quadrant region A2, a third quadrant region A3, and a fourth quadrant region A4, arranged sequentially. The third and fourth electrodes located in the first quadrant region A1 are symmetrically arranged with respect to the third and fourth electrodes located in the fourth quadrant region A4, with the geometric center O of the base 11 as the symmetry point. Similarly, the third and fourth electrodes located in the second quadrant region A2 are symmetrically arranged with respect to the third and fourth electrodes located in the third quadrant region A3, with the geometric center O of the base 11 as the symmetry point. This arrangement ensures that when the accelerometer 1 detects acceleration in the first direction Z, if the accelerometer 1 is subjected to stress along the second direction Y and / or the third direction X, the displacements of the electrodes in different quadrant regions are approximately the same. This allows the positive and negative capacitance offsets in different quadrant regions to cancel each other out, reducing the initial capacitance offset caused by stress in the second direction Y and / or the third direction X, thereby improving the detection accuracy in the first direction Z.

[0056] It is understood that, since the third electrode is located on the first comb tooth 1211 and the fourth electrode is located on the second comb tooth 1221, in some embodiments, the first comb tooth 1211 and the second comb tooth 1221 located in the first quadrant region A1 are symmetrically arranged with respect to the first comb tooth 1211 and the second comb tooth 1221 located in the fourth quadrant region A4, with the geometric center O of the base 11 as the symmetry point. The first comb tooth 1211 and the second comb tooth 1221 located in the second quadrant region A2 are symmetrically arranged with respect to the first comb tooth 1211 and the second comb tooth 1221 located in the third quadrant region A3, with the geometric center O of the base 11 as the symmetry point.

[0057] It should be noted that the sequential arrangement of the first quadrant region A1, the second quadrant region A2, the third quadrant region A3, and the fourth quadrant region A4 means that the first quadrant region A1, the second quadrant region A2, the third quadrant region A3, and the fourth quadrant region A4 are arranged in a clockwise or counterclockwise direction.

[0058] Please see also Figure 10 and Figure 11 , Figure 10 This is a schematic diagram of another detection structure of the accelerometer in an embodiment of the present invention. Figure 11 yes Figure 10 The diagram shows a schematic of the Z-axis detection mode of the accelerometer.

[0059] In some embodiments, four inner coupling portions 121 and four outer coupling portions 122 are arranged around the geometric center of the base 11 and alternately on the outside of the four anchor points 110. In other words, the four inner coupling portions 121 and four outer coupling portions 122 are arranged alternately around the geometric center O of the base 11. In some embodiments, the four inner coupling portions 121 and four outer coupling portions 122 may be arranged alternately along a circle centered on the geometric center O of the base 11.

[0060] Understandably, the third and fourth electrodes are arranged alternately around the geometric center O of the substrate 11. For example, the third and fourth electrodes can be arranged alternately along a circle centered on the geometric center O of the substrate 11.

[0061] In some embodiments, within the four quadrant regions divided by the first center line L1 and the second center line L2, the third and fourth electrodes located in the first quadrant region A1 are arranged rotationally symmetrically with respect to the third and fourth electrodes located in the second quadrant region A2, the third quadrant region A3, and the fourth quadrant region A4, respectively, with the geometric center O of the substrate 11 as the rotation center. For example, the rotational symmetry angle can be 90°. With this arrangement, when the accelerometer 1 is subjected to stress on a surface parallel to the substrate 11 with anchor points 110, and simultaneously at an angle to the extension directions of both the first center line L1 and the second center line L2, the positional offsets of electrodes of different polarities are the same or nearly equal. This allows the positive and negative capacitances of different quadrant regions to cancel each other out, reducing the initial capacitance shift caused by stress in the corresponding direction of the accelerometer 1, thereby improving the detection accuracy in the first direction Z.

[0062] Understandably, with the geometric center O of base 11 as the center, the central angles corresponding to the four quadrant regions are 90°. In some embodiments, the third and fourth electrodes located in the first quadrant region A1 can be arranged symmetrically about a first symmetry line L3 as the axis of symmetry, and the first symmetry line L3 can be parallel to the angle bisector of the first quadrant region A1. Correspondingly, the third and fourth electrodes located in the second quadrant region A2 are arranged symmetrically about a second symmetry line L4 parallel to the angle bisector of the second quadrant region A2 as the axis of symmetry. The third and fourth electrodes located in the third quadrant region A3 are arranged symmetrically about a third symmetry line L5 parallel to the angle bisector of the third quadrant region A3 as the axis of symmetry. The third and fourth electrodes located in the fourth quadrant region A4 are arranged symmetrically about a fourth symmetry line L6 parallel to the angle bisector of the fourth quadrant region A4 as the axis of symmetry. By symmetrically arranging the third and fourth electrodes located in the same quadrant region, when the accelerometer 1 is affected by stress along the extension direction of the first center line L1 or the second center line L2, the positional offset of the electrodes of different polarities is basically the same, so that the change amplitude of the positive and negative capacitances is basically equal and can cancel each other out. This can better reduce the initial capacitance offset caused by stress in the corresponding direction of the accelerometer 1, thereby improving the detection accuracy in the first direction Z.

[0063] Please see also Figures 12 to 20 , Figure 12 This is a schematic diagram of an accelerometer structure in one embodiment of the present invention. Figure 13 yes Figure 12 The diagram shown illustrates the Y-axis detection mode of the accelerometer. Figure 14 yes Figure 12 The diagram shows the X-axis detection mode of the accelerometer. Figure 15 This is another structural schematic diagram of the accelerometer in an embodiment of the present invention. Figure 16 yes Figure 15 The diagram shown illustrates the Y-axis detection mode of the accelerometer. Figure 17 yes Figure 15 The diagram shows the X-axis detection mode of the accelerometer. Figure 18 This is another structural schematic diagram of the accelerometer in an embodiment of the present invention. Figure 19 yes Figure 18 The diagram shown illustrates the Y-axis detection mode of the accelerometer. Figure 20 yes Figure 18 The diagram shows the X-axis detection mode of the accelerometer.

[0064] In some embodiments, the substrate 11 further includes a fifth electrode 113, and the outer coupling portion 122 includes a first cutout portion 122a, with a sixth electrode (not shown) in the first cutout portion 122a. The fifth electrode 113 and the sixth electrode are spaced apart in the second direction Y. Thus, the fifth electrode 113 and the sixth electrode form a capacitance in the second direction Y. When the accelerometer 1 is subjected to acceleration along the second direction Y, the acceleration in the second direction Y can be detected by detecting the change in capacitance between the fifth electrode 113 and the sixth electrode.

[0065] Specifically, the fifth electrode 113 can be fixed to an anchor point 110 provided on the base 11, and the anchor point 110 for fixing the fifth electrode 113 is different from the anchor point 110 connected to the first connecting arm 120. The fifth electrode 113 extends along a third direction X and extends into the first hollow portion 122a, and a sixth electrode is provided on the inner wall of the first hollow portion 122a opposite to the fifth electrode 113 in the second direction Y. Alternatively, the inner wall of the first hollow portion 122a can directly form the sixth electrode.

[0066] For example, as described above, when the outer coupling portion 122 is made of a semiconductor material, it can itself form an electrode. In this case, the inner wall of the first hollow portion 122a opposite to the fifth electrode 113 can form a parallel plate capacitor with the fifth electrode 113. When the accelerometer 1 is affected by acceleration along the second direction Y, the outer coupling portion 122 moves relative to the fifth electrode 113, wherein the inner wall of the first hollow portion 122a on one side in the second direction Y moves closer to the fifth electrode 113, while the inner wall on the other side moves away from the fifth electrode 113, thereby realizing a differential change in capacitance.

[0067] In some embodiments, two fifth electrodes 113 may be provided within a first hollow portion 122a. The two fifth electrodes 113 are arranged back-to-back in the second direction Y, and respectively form capacitors with two sixth electrodes on the inner walls of the first hollow portion 122a facing each other in the second direction Y. In this way, when the accelerometer 1 is subjected to stress along the second direction Y, the distance between one fifth electrode 113 and its corresponding sixth electrode decreases, while the distance between the other fifth electrode 113 and its corresponding sixth electrode increases.

[0068] In some embodiments, the outer coupling portion 122 may be provided with a plurality of first hollow portions 122a, and the plurality of first hollow portions 122a are arranged at intervals in the second direction Y.

[0069] In some embodiments, each outer coupling portion 122 is provided with the aforementioned first hollow portion 122a. And / or, each outer coupling portion 122 is provided with a plurality of first hollow portions 122a.

[0070] In some embodiments, on a third direction X, the first hollow portions 122a located on opposite sides of the first center line L1 are arranged symmetrically with the first center line L1 as the axis of symmetry. Further, the fifth electrode 113 and the sixth electrode located on opposite sides of the first center line L1 are arranged symmetrically with the first center line L1 as the axis of symmetry, respectively.

[0071] In some embodiments, a seventh electrode 114 is further provided on the substrate 11, and a second hollow portion 122b is further provided on the outer coupling portion 122. An eighth electrode (not shown) is provided on the second hollow portion 122b, and the seventh electrode 114 and the eighth electrode are spaced apart in the third direction X. Thus, the seventh electrode 114 and the eighth electrode form a capacitance in the third direction X. When the accelerometer 1 is subjected to stress along the third direction X, the acceleration in the third direction X can be detected by detecting the change in capacitance between the seventh electrode 114 and the eighth electrode. Similarly, when the outer coupling portion 122 is made of a semiconductor material, the inner wall of the second hollow portion 122b can directly form the eighth electrode.

[0072] Specifically, the seventh electrode 114 can be fixed to an anchor point 110 provided on the base 11, and the anchor point 110 for fixing the seventh electrode 114 is different from the anchor point 110 for connecting the first connecting arm 120 and fixing the fifth electrode 113. The seventh electrode 114 extends along the second direction Y and extends into the second hollow portion 122b, and the inner wall of the second hollow portion 122b opposite to the seventh electrode 114 in the third direction X is provided with or constitutes an eighth electrode.

[0073] It is understood that the first hollow portion 122a and the second hollow portion 122b can be arranged at intervals in the second direction Y or the third direction X, and the present invention does not specifically limit this.

[0074] In some embodiments, two seventh electrodes 114 may be provided within a second hollow portion 122b. The two seventh electrodes 114 are arranged opposite each other in the third direction X, and respectively form capacitors with two eighth electrodes on the inner walls of the second hollow portion 122b that face each other in the third direction X. In this way, when the accelerometer 1 is subjected to stress along the third direction X, the distance between one of the seventh electrodes 114 and its corresponding eighth electrode decreases, while the distance between the other seventh electrode 114 and its corresponding eighth electrode increases.

[0075] In some embodiments, the outer coupling portion 122 may be provided with a plurality of second hollow portions 122b, and the plurality of second hollow portions 122b are arranged at intervals in the third direction Z.

[0076] In some embodiments, each outer coupling portion 122 is provided with the aforementioned second hollow portion 122b. And / or, each outer coupling portion 122 is provided with a plurality of second hollow portions 122b.

[0077] In some embodiments, in the second direction Y, the second hollow portions 122b located on opposite sides of the second center line L2 are arranged symmetrically with the second center line L2 as the axis of symmetry. Further, the seventh electrode 114 and the eighth electrode located on opposite sides of the second center line L2 are arranged symmetrically with the second center line L2 as the axis of symmetry, respectively.

[0078] In this invention, the accelerometer 1 detects acceleration in the first direction Z, the second direction Y, and the third direction X by using the inner coupling part 121 and the outer coupling part 122 as a shared test mass block. This reduces the need for dividing the test mass block, making the weight of the test mass block greater than the weight of separate mass blocks for each direction, thus improving the detection sensitivity of the accelerometer 1.

[0079] Please see also Figure 21 , Figure 21 This is a schematic diagram of the structure of an electronic device according to an embodiment of the present invention.

[0080] A second aspect of the present invention provides an electronic device 2, which includes an accelerometer 1 according to any embodiment of the first aspect.

[0081] This invention does not impose any specific limitations on the type and specifications of the electronic device 2. As long as it is necessary to detect the acceleration of the electronic device 2 in different directions to determine its state in actual use scenarios, the accelerometer 1 provided by this invention can be used. For example, the electronic device 2 can be a smartphone, smartwatch, aircraft, etc.

[0082] The accelerometer and electronic device provided by the embodiments of the present invention have been described in detail above. Specific examples have been used to illustrate the principle and implementation of the present invention. The above description of the embodiments is only for the purpose of helping to understand the idea of ​​the present invention. There may be changes in the specific implementation and application scope. Therefore, the content of this specification should not be construed as a limitation of the present invention.

Claims

1. An accelerometer, characterized in that, include: The base has four anchor points arranged around the geometric center of the base; A plurality of first electrodes are arranged on the surface of the substrate where the anchor point is provided, and the plurality of first electrodes are spaced apart from the anchor point; A plurality of second electrodes are arranged on the surface of the substrate where the anchor point is provided, and the plurality of second electrodes are arranged at intervals from the first electrode; A detection structure is arranged with the substrate in a first direction, the detection structure comprising: Four first connecting arms are arranged corresponding to the four anchor points and are elastically connected to the four anchor points. Four inner coupling parts are elastically connected to one end of the four first connecting arms near the anchor point and are arranged corresponding to the four anchor points. Each of the four inner coupling parts is provided with a third electrode. Four outer coupling parts are elastically connected to the ends of the four first connecting arms away from the anchor point, and are arranged corresponding to the four inner coupling parts. Each of the four outer coupling parts is provided with a fourth electrode. The third electrode and the fourth electrode have different polarities and are arranged alternately. Wherein, the first electrode and the third electrode are spaced apart in the first direction, and the second electrode and the fourth electrode are spaced apart in the first direction.

2. The accelerometer according to claim 1, characterized in that, The first connecting arm extends along a second direction, and the first end of the first connecting arm near the anchor point in the second direction is elastically connected to the inner coupling portion, the second end of the first connecting arm away from the anchor point in the second direction is elastically connected to the outer coupling portion, and the portion of the first connecting arm located between the first end and the second end in the second direction is elastically connected to the anchor point. Wherein, the first direction is perpendicular to the second direction.

3. The accelerometer according to claim 2, characterized in that, The detection structure also includes: A first elastic element has two opposing ends, one end of which is connected to the anchor point, and the other end of which is connected to the first connecting arm. The second elastic member has two opposing ends, one end of which is connected to the first end, and the other end of which is connected to the inner coupling portion. The third elastic element has two opposing ends, one end of which is connected to the second end, and the other end of which is connected to the outer coupling portion.

4. The accelerometer according to claim 3, characterized in that, The first elastic element, the second elastic element, and the third elastic element all extend in a third direction; Wherein, the first direction, the second direction, and the third direction are perpendicular to each other.

5. The accelerometer according to claim 3, characterized in that, The first elastic element includes a first cantilever and a second cantilever arranged at a distance in the second direction. Both the first cantilever and the second cantilever extend along the third direction. One end of the first cantilever is connected to the first connecting arm, the other end of the first cantilever is connected to one end of the second cantilever, and the other end of the second cantilever is connected to the anchor point. Wherein, the first direction, the second direction, and the third direction are perpendicular to each other.

6. The accelerometer according to claim 3, characterized in that, The second elastic member includes a third cantilever, a fourth cantilever, and a fifth cantilever arranged at intervals in the second direction. The third cantilever, the fourth cantilever, and the fifth cantilever all extend along the third direction. One end of the fourth cantilever is connected to the first end, and the other end of the fourth cantilever is connected to one end of both the third cantilever and the fifth cantilever. The other ends of both the third cantilever and the fifth cantilever are connected to the inner coupling portion. Wherein, the first direction, the second direction, and the third direction are perpendicular to each other.

7. The accelerometer according to claim 3, characterized in that, The third elastic element includes a sixth cantilever, a seventh cantilever, and an eighth cantilever arranged at intervals in the second direction. The sixth cantilever, the seventh cantilever, and the eighth cantilever all extend along the third direction. One end of the seventh cantilever is connected to the second end, and the other end of the seventh cantilever is connected to one end of both the sixth and eighth cantilever. The other ends of both the sixth and eighth cantilever are connected to the outer coupling portion. Wherein, the first direction, the second direction, and the third direction are perpendicular to each other.

8. The accelerometer according to claim 1, characterized in that, The inner coupling portion has a first comb tooth portion, the outer coupling portion has a second comb tooth portion, the first comb tooth portion is provided with the third electrode, the second comb tooth portion is provided with the fourth electrode, and the first comb tooth portion and the second comb tooth portion are nested together in the second direction. Wherein, the first direction is perpendicular to the second direction.

9. The accelerometer according to claim 8, characterized in that, With a straight line passing through the geometric center of the substrate and extending in the second direction as the first center line, the third electrode and the fourth electrode located on opposite sides of the first center line are symmetrically arranged with the first center line as the axis of symmetry.

10. The accelerometer according to claim 8, characterized in that, A first center line is defined as a straight line passing through the geometric center of the substrate and extending in the second direction. A second center line is defined as a straight line passing through the geometric center of the substrate and extending upward in the third direction. The first center line and the second center line intersect at the geometric center of the substrate. The first center line and the second center line divide the substrate into a first quadrant region, a second quadrant region, a third quadrant region, and a fourth quadrant region arranged sequentially. The third electrode and the fourth electrode located in the first quadrant region are symmetrically arranged with respect to the third electrode and the fourth electrode located in the fourth quadrant region, with respect to the geometric center of the substrate. The third electrode and the fourth electrode located in the second quadrant region are symmetrically arranged with respect to the third electrode and the fourth electrode located in the third quadrant region, with respect to the geometric center of the substrate. Wherein, the first direction, the second direction, and the third direction are perpendicular to each other.

11. The accelerometer according to claim 1, characterized in that, The four inner coupling portions and the four outer coupling portions surround the geometric center of the base and are alternately arranged on the outside of the four anchor points.

12. The accelerometer according to claim 11, characterized in that, A first center line is defined by a straight line passing through the geometric center of the substrate and extending in a second direction, and a second center line is defined by a straight line passing through the geometric center of the substrate and extending in a third direction. The first center line and the second center line are relative to the geometric center of the substrate, and the first center line and the second center line divide the first quadrant region, the second quadrant region, the third quadrant region and the fourth quadrant region arranged sequentially. The third electrode and the fourth electrode located in the first quadrant region are arranged in a rotationally symmetrical manner with respect to the third electrode and the fourth electrode located in the second quadrant region, the third electrode and the fourth electrode located in the third quadrant region and the fourth electrode located in the fourth quadrant region, with the geometric center of the substrate as the rotation center. Wherein, the first direction, the second direction, and the third direction are perpendicular to each other.

13. The accelerometer according to any one of claims 1-12, characterized in that, The four first connecting arms extend along the second direction, and two of the four first connecting arms constitute a first group of connecting arms, and the other two of the four first connecting arms constitute a second group of connecting arms. In the third direction, the first group of connecting arms is located between two anchor points spaced apart in the third direction, and the second group of connecting arms is located between another two anchor points spaced apart in the third direction. The first group of connecting arms and the second group of connecting arms are spaced apart in the second direction, and two of the first connecting arms in the first group of connecting arms and the second group of connecting arms are spaced apart in the third direction. Wherein, the first direction, the second direction, and the third direction are perpendicular to each other.

14. The accelerometer according to any one of claims 1-12, characterized in that, The substrate is further provided with a fifth electrode, the outer coupling portion is provided with a first hollow portion, the first hollow portion is provided with a sixth electrode, and the fifth electrode and the sixth electrode are spaced apart in a second direction; Wherein, the first direction is perpendicular to the second direction.

15. The accelerometer according to any one of claims 1-12, characterized in that, The substrate is further provided with a seventh electrode, the outer coupling portion is provided with a second hollow portion, the second hollow portion is provided with an eighth electrode, and the seventh electrode and the eighth electrode are spaced apart in a third direction; Wherein, the first direction is perpendicular to the third direction.

16. An accelerometer, characterized in that, include: The base is equipped with anchor points; A plurality of first electrodes are arranged on the surface of the substrate where the anchor point is provided, and the plurality of first electrodes are spaced apart from the anchor point; A plurality of second electrodes are arranged on the surface of the substrate where the anchor point is provided, and the plurality of second electrodes are arranged at intervals from the first electrode; A detection structure is arranged with the substrate in a first direction, the detection structure comprising: The first connecting arm is arranged corresponding to the anchor point; A first elastic element, wherein the first connecting arm and the anchor point are elastically connected through the first elastic element; An inner coupling portion is located at one end of the first connecting arm near the anchor point, and the inner coupling portion is provided with a third electrode. The second elastic element is used to elastically connect the first connecting arm and the inner coupling portion. An outer coupling portion is located at the end of the first connecting arm away from the anchor point. Each outer coupling portion is provided with a fourth electrode, and the polarities of the third electrode and the fourth electrode are different. The third elastic element is used to elastically connect the first connecting arm and the outer coupling portion; The first electrode and the third electrode are spaced apart in the first direction, the second electrode and the fourth electrode are spaced apart in the first direction, and the first elastic element, the second elastic element and the third elastic element all extend along the second direction, which is perpendicular to the second direction.

17. An electronic device, characterized in that, Including the accelerometer as described in any one of claims 1-16.

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