A cantilever probe card nitrogen purging dust protection system

Abstract

This invention discloses a nitrogen purging dust protection system for cantilever probe cards, belonging to the field of semiconductor testing equipment technology. It includes a support base and a vertical adjustment frame. The vertical adjustment frame is fixed to the top of the support base, and vertical rails are fixed to both its inner sides. A translation mechanism is slidably installed on the outside of the vertical rails. A vertical sliding screw is threaded through the top of the vertical adjustment frame, and the bottom end of the vertical sliding screw is rotatably connected to the translation mechanism. The translation mechanism includes a sliding frame, and two transverse slots are fixed to the bottom of the sliding frame. A fixing plate is fixed between the two transverse slots, and a translation plate is slidably installed between the two transverse slots. Fixing blocks are fixed to the top of both the translation plate and the fixing plate. A transverse sliding screw is threaded through the fixing block of the fixing plate, and the transverse sliding screw is rotatably connected to the fixing block of the translation plate. This invention can be adapted for use with different models of probe cards for purging, and the nozzles can be retracted, effectively protecting the nozzles.

Description

Technical Field

[0001] This invention belongs to the field of semiconductor testing equipment technology, specifically a nitrogen purging dust protection system for cantilever probe cards. Background Technology

[0002] In the field of semiconductor wafer testing, probe cards are core components connecting test equipment and wafers. The probes within the probe head need to make precise contact with the pads on the wafer surface to perform electrical performance testing. To ensure the stability and accuracy of the test, a nitrogen purging system is required to clean and protect the probe tips, preventing dust, particles, moisture, and other contaminants from adhering to the tip surface, which could lead to increased contact resistance and test failure.

[0003] Currently, existing cantilever probe card purging systems have many technical defects: First, the nozzle angle is fixed and cannot be adjusted, making it impossible to flexibly adjust the spray direction according to the probe card model and test requirements. This results in insufficient matching between the purging range and the probe tip, easily leading to purging blind spots or airflow turbulence, affecting test stability. Furthermore, the nozzle is exposed for a long time without any storage and protection measures, making it not only susceptible to damage from external impacts but also easily contaminated by dust, causing nozzle blockage and spray angle deviation, which in turn affects test accuracy. Summary of the Invention

[0004] This invention provides a nitrogen purging dust protection system for cantilever probe cards, which can solve the technical problems of fixed and non-adjustable nozzle angle and lack of storage and protection measures in the existing nitrogen purging dust protection system for cantilever probe cards.

[0005] A cantilever probe card nitrogen purging dust protection system includes a support base and a vertical adjustment frame. The vertical adjustment frame is fixed to the top of the support base, and vertical rails are fixed on both sides of the frame. A translation mechanism is slidably installed on the outside of the vertical rails. A vertical sliding screw is threaded through the top of the vertical adjustment frame, and the bottom end of the vertical sliding screw is rotatably connected to the translation mechanism. The translation mechanism includes a sliding frame, and two transverse slot plates are fixed at the bottom of the sliding frame. A fixed plate is fixed between the two transverse slot plates, and a translation plate is slidably installed between the two transverse slot plates. Fixed blocks are fixed at the top of both the translation plate and the fixed plate. A transverse screw is threaded through the fixed block of the fixed plate, and the transverse screw is rotatably connected to the fixed block of the translation plate. A blowing mechanism is fixedly connected to the side of the translation plate away from its fixed block.

[0006] As a further technical solution of the present invention, the support base is arranged in the shape of a rectangular frame, with two connecting seats fixed on each of its four outer sides, and a floating seat is provided at the bottom of the connecting seat. A damping shock absorber is fixed inside the floating seat, and the top of the damping shock absorber is fixedly connected to the bottom of the connecting seat.

[0007] As a further technical solution of the present invention, there is a gap between the floating seat and the connecting seat, the floating seat is provided with an opening for the damping shock absorber rod to pass through, and guide rods fixed to the bottom surface of the connecting seat are slidably connected to both sides of the opening.

[0008] As a further technical solution of the present invention, the sliding frame is arranged in an inverted U-shape, and grooves are provided on both sides of the frame. The sliding frame is slidably connected to the vertical rail through the grooves on both sides.

[0009] As a further technical solution of the present invention, the blowing mechanism includes two parallel extension rods. A positioning rail is fixed to the top of the extension rods, and a movable clamping block is slidably connected to the outside of the positioning rail. A fixed clamping block is also fixed to the top of the two extension rods. The fixed clamping block is located on one side of the movable clamping block, and two spring rods are connected between the fixed clamping block and the movable clamping block. A blowing ring is also clamped and fixed between the fixed clamping block and the movable clamping block. The blowing ring is located between the two spring rods, and a connecting ring plate is fixedly connected to the top surface of the blowing ring. Four positioning plates are equidistantly fixed to the top surface of the connecting ring plate. The top of the four positioning plates is connected to a limit frame through a connecting rod. A lifting screw is threaded through the center of the limit frame, and an adjusting cone is connected to the bottom end of the lifting screw.

[0010] As a further technical solution of the present invention, the adjusting cone is located inside the inner groove of the blowing ring, and its top outer diameter is larger than its bottom outer diameter. When the top surface of the adjusting cone is aligned with the top surface of the connecting ring plate, its outer wall is in contact with the connecting ring plate.

[0011] As a further technical solution of the present invention, the vertical height of the adjusting cone is less than the vertical height of the inner groove of the blow ring.

[0012] As a further technical solution of the present invention, the bottom of the blow ring is provided with a concave portion, and a number of fixing seats are fixed at equal intervals on the inner wall of the concave portion. A fan-shaped nozzle is connected to the fixing seat through a shaft, and a spring is installed on both sides of the inside of the fixing seat and fixedly connected to the shaft.

[0013] As a further technical solution of the present invention, when the adjusting cone is aligned with the top surface of the connecting ring plate, its bottom is in contact with the outer wall of the fan-shaped nozzle.

[0014] As a further technical solution of the present invention, the vertical height of the blow ring is greater than the vertical height of the fixed clamp block and the moving clamp block, and an air inlet connector and a pressure relief valve are respectively provided on both sides of the blow ring. The inner diameter of the concave part is greater than the inner diameter of the inner groove of the blow ring, and it is connected to the inner groove.

[0015] The beneficial effects of this invention are: This invention, by setting up a translation mechanism in conjunction with a vertical adjustment frame, can effectively adjust the horizontal and vertical height of the spray mechanism through the adjustment of the vertical and horizontal screws, so that the spray ring can be accurately aligned with the probe head area of ​​the probe card. Furthermore, after adjusting the tilt of the fan-shaped nozzle, the height of the spray ring can be adjusted to compensate for the change in the spray range of the fan-shaped nozzle, so that an air curtain can be stably formed between each fan-shaped nozzle. By setting an adjusting cone, the adjusting cone can be adjusted up and down by rotating the lifting screw. After the adjusting cone moves down, it can drive each fan-shaped nozzle to tilt downward, thereby adjusting the tilt angle of each fan-shaped nozzle. This makes the fan-shaped nozzles compatible with different types of probe cards, giving them better applicability and making them not limited to the blowing of a single probe card. When the fan-shaped nozzle is tilted, the spring connected to its shaft tightens, ensuring stable contact with the surface of the adjusting cone during tilting. Furthermore, after the adjusting cone returns to its original position, the fan-shaped nozzle retracts into the concave portion under the spring's return. At this point, the adjusting cone contacts the inner wall of the blow ring, sealing the top of the blow ring. The fan-shaped nozzle, retracted into the concave portion, prevents external dust from falling into it and causing blockage. Completely concealed within the ring, the fan-shaped nozzle is protected from external impacts and scratches during equipment operation, changeover, and maintenance, preserving its structural precision and spray performance. Attached Figure Description To facilitate understanding by those skilled in the art, the present invention will be further described below with reference to the accompanying drawings.

[0016] Figure 1 This is a schematic diagram of the overall structure of the present invention; Figure 2 This is a structural diagram of the translation mechanism in this invention; Figure 3 This is a structural diagram of the jetting mechanism in this invention; Figure 4 This is an assembly structure diagram of the adjusting cone in this invention; Figure 5 This is a cross-sectional view of the jet ring in this invention; Figure 6 This is a cross-sectional view of the fixing base in this invention; Figure 7 This is the front view of the adjusting cone in this invention.

[0017] In the diagram: 1. Support base; 2. Connecting seat; 3. Floating seat; 4. Damping shock absorber rod; 5. Vertical adjustment frame; 6. Vertical rail; 7. Translation mechanism; 71. Horizontal slot plate; 72. Fixed plate; 73. Sliding frame; 74. Translation plate; 75. Fixed block; 76. Horizontal screw; 77. Blowing mechanism; 771. Extension rod; 772. Positioning rail; 773. Moving clamp block; 774. Fixed clamp block; 775. Spring rod; 776. Blowing ring; 777. Connecting ring plate; 778. Positioning plate; 779. Limiting frame; 7710. Lifting screw; 7711. Adjusting cone; 7712. Concave part; 7713. Fixed seat; 7714. Fan-shaped nozzle; 7715. Spring; 8. Vertical screw. Detailed Implementation

[0018] The technical solution of the present invention will be clearly and completely described below with reference to the embodiments. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0019] like Figure 1 - Figure 7 As shown, a cantilever probe card nitrogen purging dust protection system includes a support base 1 and a vertical adjustment frame 5. The vertical adjustment frame 5 is fixed to the top of the support base 1, and vertical rails 6 are fixed on both sides of its inner side. A translation mechanism 7 is slidably installed on the outside of the vertical rails 6. A vertical sliding screw 8 is threaded through the top of the vertical adjustment frame 5, and the bottom end of the vertical sliding screw 8 is rotatably connected to the translation mechanism 7. The translation mechanism 7 includes a sliding frame 73, and two transverse slot plates 71 are fixed at the bottom of the sliding frame 73. A fixing plate 72 is fixed between the two transverse slot plates 71, and a translation plate 74 is slidably installed between the two transverse slot plates 71. A fixing block 75 is fixed at the top of both the translation plate 74 and the fixing plate 72. A transverse screw 76 is threaded through the fixing block 75 of the fixing plate 72, and the transverse screw 76 is rotatably connected to the fixing block 75 of the translation plate 74. A blowing mechanism 77 is fixedly connected to the side of the translation plate 74 away from its fixing block 75.

[0020] Specifically, when adjusting the translation mechanism 7, firstly, by rotating the vertical screw 8, the sliding frame 73 is moved up and down, thereby adjusting the vertical height of the blowing mechanism 77. Then, by rotating the horizontal screw 76, the translation plate 74 is moved horizontally within the horizontal slot plate 71, thereby adjusting the horizontal position of the blowing mechanism 77, so that the blowing mechanism 77 can be aligned with the probe head area of ​​the cantilever probe card, thereby realizing the blowing operation.

[0021] The support base 1 is rectangular, with two connecting seats 2 fixed to each of its four outer sides. A floating seat 3 is located at the bottom of each connecting seat 2, and a damping shock absorber rod 4 is fixed inside the floating seat 3. The top of the damping shock absorber rod 4 is fixedly connected to the bottom of the connecting seat 2. There is a gap between the floating seat 3 and the connecting seat 2. The floating seat 3 has an opening for the damping shock absorber rod 4 to pass through, and guide rods fixed to the bottom surface of the connecting seat 2 are slidably connected to both sides of the opening.

[0022] Specifically, by setting up a floating seat 3 in conjunction with a damping shock absorber rod 4 to reduce the vibration of the connecting seat 2, the shock absorption effect is achieved through the above-mentioned shock absorption structure after the support base 1 is fixed to the test equipment, thus avoiding vibration transmission and improving the stability of the blowing mechanism 77 during operation.

[0023] The sliding frame 73 is arranged in an inverted U-shape, with grooves on both sides. The sliding frame 73 is slidably connected to the vertical rail 6 through the grooves on both sides. When moving, the sliding frame 73 moves along the surface of the vertical rail 6 through the grooves, improving its stability.

[0024] The blowing mechanism 77 includes two parallel extension rods 771. A positioning rail 772 is fixed to the top of the extension rods 771, and a movable clamping block 773 is slidably connected to the outside of the positioning rail 772. A fixed clamping block 774 is also fixed to the top of the two extension rods 771. The fixed clamping block 774 is located on one side of the movable clamping block 773, and two spring rods 775 are connected between the fixed clamping block 774 and the movable clamping block 773. The fixed clamping block 774 and the movable clamping block 773 are also clamped and fixed. A blow ring 776 is located between two spring rods 775. A connecting ring plate 777 is fixedly connected to the top surface of the blow ring 776. Four positioning plates 778 are equidistantly fixed to the top surface of the connecting ring plate 777. The tops of the four positioning plates 778 are connected to a limit frame 779 via connecting rods. A lifting screw 7710 is threaded through the center of the limit frame 779, and an adjusting cone 7711 is connected to the bottom end of the lifting screw 7710. The adjusting cone 7711 is located inside the inner groove of the blow ring 776, and its top outer diameter is larger than its bottom outer diameter. When the top surface of the adjusting cone 7711 is flush with the top surface of the connecting ring plate 777, its outer wall contacts the connecting ring plate 777. The vertical height of the adjusting cone 7711 is less than the vertical height of the inner groove of the blow ring 776.

[0025] Specifically, by rotating the lifting screw 7710, the adjusting cone 7711 is driven to move downward. As the adjusting cone 7711 moves downward, the inclination of the fan-shaped nozzle 7714 changes under the downward pressure of the adjusting cone 7711, so that it can spray towards the probe head area of ​​the cantilever probe card.

[0026] The bottom of the blow ring 776 has a recessed portion 7712, and several fixed seats 7713 are fixedly fixed at equal intervals on the inner wall of the recessed portion 7712. A fan-shaped nozzle 7714 is connected to the fixed seat 7713 via a shaft, and a spring 7715, fixedly connected to the shaft, is installed on both sides of the fixed seat 7713. When the adjusting cone 7711 is level with the top surface of the connecting ring plate 777, its bottom contacts the outer wall of the fan-shaped nozzle 7714. The vertical height of the blow ring 776 is greater than the vertical height of the fixed clamping block 774 and the moving clamping block 773. An air inlet connector and a pressure relief valve are respectively provided on both sides of the blow ring 776. The inner diameter of the recessed portion 7712 is greater than the inner diameter of the inner groove of the blow ring 776, and it communicates with the inner groove.

[0027] Specifically, the fan-shaped nozzle 7714 sprays nitrogen gas in a fan shape, thereby forming an air curtain with multiple fan-shaped nozzles 7714 to protect the probe head area. After the fan-shaped nozzle 7714 is tilted, the spring 7715 is tightened, so that after the adjusting cone 7711 is reset, it can be reset by the restoring force of the spring 7715 and then retracted into the interior of the concave portion 7712.

[0028] The present invention discloses a nitrogen purging dust protection system for a cantilever probe card. In use, after the cantilever probe card is fixed, the position of the blowing mechanism 77 is first adjusted according to the position of the probe head in the central area of ​​the cantilever probe card, so that the blowing mechanism 77 can perform the blowing operation above the probe head.

[0029] When adjusting the blowing mechanism 77, first rotate the vertical moving screw 8 to drive the sliding frame 73 to move upward along the vertical rail 6 to adjust the height of the blowing mechanism 77. Then, adjust the horizontal position of the blowing mechanism 77 by rotating the horizontal moving screw 76. The horizontal moving screw 76 pushes the fixed block 75 on the translation plate 74 to move, thereby driving the translation plate 74 to move horizontally. The vertical height of the extension rod 771 is used to provide the vertical height of the blowing ring 776 so that it always maintains a suitable distance from the probe head.

[0030] Then, the tilt angle of each fan-shaped nozzle 7714 is adjusted. By rotating the lifting screw 7710, the adjusting cone 7711 is moved down, and the fan-shaped nozzle 7714 fits against the outer wall of the adjusting cone 7711. The outer diameter of the adjusting cone 7711 continues to increase, and the angle between the fan-shaped nozzle 7714 and the horizontal direction gradually increases. At the same time, the spring 7715 is tightened.

[0031] As the tilt angle of the fan-shaped nozzle 7714 increases, the spacing between adjacent fan-shaped nozzles 7714 increases, thus adapting to different types of probe cards. Furthermore, by adjusting the height of the fan-shaped nozzle 7714, the fan-shaped air surface of the fan-shaped nozzle 7714 increases with the distance between the air and the probe head, thereby always forming a stable air curtain and providing a good protective effect. During testing, by moving the wafer, the probe array inside the probe head presses down against the pads on the wafer surface to complete the wafer-level electrical performance testing of the semiconductor device. The blow ring 776 connects to an external nitrogen source through the air inlet connector to achieve air intake, and the air is continuously sprayed out through the fan-shaped nozzle 7714 to achieve protection.

[0032] The above description is merely an example and illustration of the structure of the present invention. Those skilled in the art can make various modifications or additions to the specific embodiments described, or use similar methods to replace them, as long as they do not deviate from the structure of the invention or exceed the scope defined in the claims, all of which should fall within the protection scope of the present invention.

Claims

1. A nitrogen purging dust protection system for a cantilever probe card, comprising a support base (1) and a vertical adjustment frame (5), characterized in that, The vertical adjustment frame (5) is fixed on the top of the support base frame (1), and vertical rails (6) are fixed on both sides of it. A translation mechanism (7) is slidably installed on the outside of the vertical rails (6). A vertical sliding screw (8) is threaded through the top of the vertical adjustment frame (5), and the bottom end of the vertical sliding screw (8) is rotatably connected to the translation mechanism (7). The translation mechanism (7) includes a sliding frame (73), and two transverse slot plates (71) are fixed at the bottom of the sliding frame (73). A fixing plate (72) is fixed between the two transverse slot plates (71), and a translation plate (74) is slidably installed between the two transverse slot plates (71). A fixing block (75) is fixed at the top of both the translation plate (74) and the fixing plate (72). A transverse screw (76) is threaded through the fixing block (75) of the fixing plate (72), and the transverse screw (76) is rotatably connected to the fixing block (75) of the translation plate (74). A blowing mechanism (77) is fixedly connected to the side of the translation plate (74) away from its fixing block (75).

2. The cantilever probe card nitrogen purging dust protection system according to claim 1, characterized in that, The support base (1) is a rectangular frame with two connecting seats (2) fixed on its four outer sides. A floating seat (3) is provided at the bottom of the connecting seat (2). A damping rod (4) is fixed inside the floating seat (3). The top of the damping rod (4) is fixedly connected to the bottom of the connecting seat (2).

3. The cantilever probe card nitrogen purging dust protection system according to claim 2, characterized in that, There is a gap between the floating seat (3) and the connecting seat (2). The floating seat (3) is provided with an opening for the damping shock absorber rod (4) to pass through. Guide rods fixed to the bottom surface of the connecting seat (2) are slidably connected to both sides of the through opening.

4. The cantilever probe card nitrogen purging dust protection system according to claim 1, characterized in that, The sliding frame (73) is arranged in an inverted U-shape, with grooves on both sides. The sliding frame (73) is slidably connected to the vertical rail (6) through the grooves on both sides.

5. The nitrogen purging dust protection system for a cantilever probe card according to claim 1, characterized in that, The blowing mechanism (77) includes two parallel extension rods (771). A positioning rail (772) is fixed to the top of the extension rods (771), and a movable clamping block (773) is slidably connected to the outside of the positioning rail (772). A fixed clamping block (774) is also fixed to the top of the two extension rods (771). The fixed clamping block (774) is located on one side of the movable clamping block (773), and two spring rods (775) are connected between the fixed clamping block (774) and the movable clamping block (773). A clamping mechanism is also used between the fixed clamping block (774) and the movable clamping block (773). A blow ring (776) is fixedly attached between two spring rods (775), and a connecting ring plate (777) is fixedly connected to the top surface of the blow ring (776). Four positioning plates (778) are fixedly fixed at equal intervals on the top surface of the connecting ring plate (777). The top of the four positioning plates (778) are connected to a limit frame (779) through a connecting rod. A lifting screw (7710) is threaded through the center of the limit frame (779), and an adjusting cone (7711) is connected to the bottom end of the lifting screw (7710).

6. The cantilever probe card nitrogen purging dust protection system according to claim 5, characterized in that, The adjusting cone (7711) is located inside the inner groove of the blowing ring (776), and its top outer diameter is larger than its bottom outer diameter. When the top surface of the adjusting cone (7711) is aligned with the top surface of the connecting ring plate (777), its outer wall contacts the connecting ring plate (777).

7. The cantilever probe card nitrogen purging dust protection system according to claim 6, characterized in that, The vertical height of the adjusting cone (7711) is less than the vertical height of the inner groove of the blow ring (776).

8. The cantilever probe card nitrogen purging dust protection system according to claim 7, characterized in that, The bottom of the blow ring (776) is provided with a concave part (7712), and a number of fixed seats (7713) are fixed at equal intervals on the inner wall of the concave part (7712). A fan-shaped nozzle (7714) is connected to the fixed seat (7713) through a shaft, and a spring (7715) fixedly connected to the shaft is installed on both sides of the inside of the fixed seat (7713).

9. A nitrogen purging dust protection system for a cantilever probe card according to claim 8, characterized in that, When the top surface of the adjusting cone (7711) is aligned with the top surface of the connecting ring plate (777), its bottom is in contact with the outer wall of the fan-shaped nozzle (7714).

10. A nitrogen purging dust protection system for a cantilever probe card according to claim 8, characterized in that, The vertical height of the blow ring (776) is greater than the vertical height of the fixed clamp block (774) and the moving clamp block (773), and the blow ring (776) is provided with an air inlet connector and a pressure relief valve on both sides. The inner diameter of the concave part (7712) is greater than the inner diameter of the inner groove of the blow ring (776) and is connected to the inner groove.

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