A wide-range, high-resolution soft X-ray spectrometer and a method for diagnosing black cavity radiation.

Abstract

This invention discloses a wide-range, high-resolution soft X-ray spectrometer and a method for diagnosing black cavity radiation, relating to the field of radiation diagnostic technology. The method includes a photon selection component and a detector. The photon selection component includes at least one X-ray photon selector for receiving the X-rays to be diagnosed and simultaneously dispersing, focusing, and suppressing higher-order diffraction of the X-rays to form a dispersive spectrum. This invention enables high-precision and high-reliability diagnosis of black cavity radiation, meeting the measurement requirements of wide range, high resolution, low background noise, and independence from complex spectral interpretation algorithms.

Description

Technical Field

[0001] This invention relates to the field of radiation diagnostic technology, and in particular to a wide-range, high-resolution soft X-ray spectrometer and a black cavity radiation diagnostic method. Background Technology

[0002] In inertial confinement fusion research, the soft X-ray energy spectrum of black cavity radiation is a crucial carrier of core information about the implosion physics process. To obtain this spectrum, current techniques typically employ the Dante spectrometer, based on filters and X-ray diode arrays, for diagnostic purposes. However, the Dante spectrometer relies on multiple discrete broadband energy channels for measurement, resulting in low energy resolution. It can only obtain a coarse envelope of the radiation spectrum, failing to distinguish fine structures such as absorption edges of ablated materials or plasma emission lines. Furthermore, its measurement results are highly dependent on the spectral interpretation algorithm. Since the inversion of continuous energy spectra from finite-channel data is a typical "ill-conditioned" inverse problem, the stability and uniqueness of the spectral interpretation algorithm are difficult to guarantee, leading to significant uncertainties in the measurement results.

[0003] To improve spectral resolution, researchers have attempted to introduce dispersive elements such as crystals or gratings to construct crystal spectrometers. These instruments disperse X-rays through the diffraction characteristics of the elements, achieving high energy resolution. However, in practical applications, since the energy spectral response bandwidth of crystals and gratings is determined by their inherent properties, improving resolution often means reducing the response bandwidth of a single element, thus limiting the spectral range. To extend the range, multiple elements must be combined, which not only introduces problems such as aberration superposition and higher-order diffraction interference but also significantly reduces energy resolution. Furthermore, under the multi-order diffraction characteristics of traditional dispersive elements, the zeroth-order diffraction and the target-order diffraction often lie in the same direction, making effective separation difficult and generating strong background noise that interferes with the extraction of the target signal. These inherent defects make it difficult for existing dispersive elements to simultaneously achieve good dispersive focusing ability, high energy resolution, wide spectral range, and effective suppression of higher-order diffraction. Summary of the Invention

[0004] The technical problem to be solved by this invention is: how to provide a high-confidence soft X-ray spectrometer that can simultaneously achieve wide range, high resolution, low background noise, and does not rely on complex spectral interpretation algorithms when diagnosing black cavity radiation.

[0005] To address the aforementioned problems, in a first aspect, the present invention proposes a wide-range, high-resolution soft X-ray spectrometer, comprising: The photon selection assembly includes at least one X-ray photon selector for receiving X-rays to be diagnosed and simultaneously dispersing, focusing and suppressing higher-order diffraction of the X-rays to form a dispersive spectrum. A detector is positioned on the focusing surface of the photon selection component to receive and record the dispersive spectrum.

[0006] Optionally, the photon selection assembly includes multiple X-ray photon selectors, which have different center wavelengths and spectral ranges, and are used to stitch together to form the dispersive spectrum.

[0007] Optionally, the plurality of X-ray photon selectors are integrated on the same component.

[0008] Optionally, the detector is an X-ray streak camera with a slit cathode arranged along the dispersion direction of the dispersive spectrum.

[0009] Optionally, the length of the slit cathode is greater than 30 mm.

[0010] Optionally, the photon selection component includes a visible light zone plate, which is used for the assembly and aiming of the wide-range, high-resolution soft X-ray spectrometer.

[0011] Optionally, the wide-range high-resolution soft X-ray spectrometer is used to diagnose soft X-rays in the 0.5nm to 25nm band generated by inertial confinement fusion black cavity radiation, and its spectral resolution E / ΔE is greater than 400 and its temporal resolution is better than 100ps.

[0012] Secondly, the present invention proposes a black cavity radiation diagnostic method based on the wide-range high-resolution soft X-ray spectrometer described in the first aspect, comprising the following steps: The X-rays to be diagnosed are received through a photon selection component; The photon selection component is used to simultaneously disperse, focus, and suppress higher-order diffraction of the received X-rays to form a dispersive spectrum; The dispersive spectrum is received and recorded using a detector disposed on the focusing surface of the photon selection component; Based on the dispersive spectrum, the energy spectrum distribution and radiation temperature of the black cavity radiation are obtained by inversion.

[0013] Optionally, before receiving the X-rays to be diagnosed through the photon selection component, the method further includes an assembly step: using the visible light zone plate in the photon selection component to assemble and aim the wide-range high-resolution soft X-ray spectrometer.

[0014] Optionally, the step of inverting the energy spectrum distribution and radiation temperature of the black cavity radiation based on the dispersive spectrum includes: Based on the spatial position and intensity distribution of the dispersive spectrum, combined with the pre-calibrated wavelength-position correspondence and intensity calibration coefficient, the continuous energy spectrum information of the X-rays can be directly obtained.

[0015] Compared with the prior art, the technical effects achieved by the present invention include: This invention proposes a wide-range, high-resolution soft X-ray spectrometer, comprising: a photon selection assembly, including at least one X-ray photon selector, for receiving X-rays to be diagnosed and simultaneously dispersing, focusing, and suppressing higher-order diffraction of the X-rays to form a dispersive spectrum; and a detector, disposed on the focusing surface of the photon selection assembly, for receiving and recording the dispersive spectrum. The photon selection assembly, through a single structure, simultaneously performs dispersion and focusing, combined with higher-order diffraction suppression, enabling the formation of a high-purity dispersive spectrum over a wide measurement range, thus achieving both wide-range measurement and high energy resolution. The detector directly receives and records the dispersive spectrum, obtaining continuous energy spectrum information without the need for inversion of discrete channel data using spectral analysis algorithms, significantly improving the confidence level of the measurement data. Simultaneously, effective suppression of higher-order diffraction reduces background noise, further improving the signal-to-noise ratio. The combined effect of these structures allows this invention to achieve high-precision, high-reliability diagnosis of black cavity radiation in a compact form, meeting the measurement requirements of wide range, high resolution, low background noise, and independence from complex spectral analysis algorithms. Attached Figure Description

[0016] The accompanying drawings, which are incorporated in and form part of this specification, illustrate the invention and, together with the description, serve to explain the principles of the invention.

[0017] To more clearly illustrate the technical solutions in this invention or the prior art, the accompanying drawings used in the description of the prior art will be briefly introduced below. Obviously, those skilled in the art can obtain other drawings based on these drawings without any creative effort.

[0018] One or more are illustrated by way of example with reference numerals in the accompanying drawings. These illustrations do not constitute a limitation thereof. Elements in the drawings that have the same reference numerals are denoted as similar elements. Unless otherwise stated, the figures in the drawings do not constitute a limitation of scale.

[0019] Figure 1 This is a schematic diagram of the structure of a wide-range, high-resolution soft X-ray spectrometer proposed in this invention; Figure 2 This is a partial enlarged view of a wide-range, high-resolution soft X-ray spectrometer proposed in this invention; Figure 3 This is a schematic flowchart of a black cavity radiation diagnosis method proposed in this invention.

[0020] Figure Labels Photon selection component 10, detector 20, black cavity 30, X-ray photon selector 11, slit cathode 21. Detailed Implementation

[0021] The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Similar component reference numerals in the drawings represent similar components. Obviously, the embodiments described below are only some embodiments of the present invention, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without creative effort are within the scope of protection of the present invention.

[0022] It should be understood that, when used in this specification and the appended claims, the terms "comprising" and "including" indicate the presence of the described features, integrals, steps, operations, elements and / or components, but do not exclude the presence or addition of one or more other features, integrals, steps, operations, elements, components and / or collections thereof.

[0023] It should also be understood that the terminology used in this specification of embodiments of the invention is for the purpose of describing particular embodiments only and is not intended to limit the embodiments of the invention. As used in this specification of embodiments of the invention and the appended claims, the singular forms “a,” “an,” and “the” are intended to include the plural forms unless the context clearly indicates otherwise.

[0024] See Figures 1-2 This invention provides a wide-range, high-resolution soft X-ray spectrometer, comprising: The photon selection assembly 10 includes at least one X-ray photon selector 11 for receiving X-rays to be diagnosed and simultaneously dispersing, focusing and suppressing higher-order diffraction of the X-rays to form a dispersive spectrum. The detector 20 is disposed on the focusing surface of the photon selection component 10 and is used to receive and record the dispersive spectrum.

[0025] In specific implementation, this invention provides a wide-range, high-resolution soft X-ray spectrometer. Its core lies in utilizing a photon selection component 10 to simultaneously disperse and focus X-rays while suppressing higher-order diffraction, combined with a detector 20 to directly record the dispersive spectrum, thereby achieving continuous, high-confidence measurements of black cavity radiation. The specific implementation method is as follows.

[0026] The wide-range, high-resolution soft X-ray spectrometer includes a photon selection component 10 and a detector 20. The photon selection component 10 is located upstream of the detector 20 and is used to receive the X-rays to be diagnosed. The X-rays may originate from black cavity radiation in inertial confinement fusion experiments, and their energy spectrum covers the soft X-ray band from 0.5 nm to 25 nm. Specifically, in this embodiment, the black cavity 30 is a cavity structure with an entrance aperture made of a high atomic number material, used to receive laser energy and convert it into a soft X-ray radiation field. The X-rays to be diagnosed may originate from the black cavity 30.

[0027] Furthermore, the photon selection assembly 10 includes at least one X-ray photon selector 11. The X-ray photon selector 11 is a single-stage focusing reflection diffraction element designed based on the Fresnel half-wave zone principle, and its core structure includes a rotating ellipsoidal substrate, multiple ellipsoidal boundaries, and a reflectivity control layer.

[0028] Furthermore, the rotating ellipsoidal substrate is made of high-precision machined transparent materials such as single-crystal silicon or quartz glass, and its surface is polished into a rotating ellipsoid. This rotating ellipsoid, based on a predetermined object point (black cavity radiation source) and image point (focusing surface of detector 20), satisfies the geometric relationship of ideal point-to-point reflection imaging. Let the semi-major axis of the rotating ellipsoid be a, the semi-minor axis be b, and the focal length be c. Light rays emitted from the object point, after being reflected by the ellipsoidal surface, can perfectly converge at the image point; this characteristic provides the optical basis for achieving chromatic aberration-free focusing.

[0029] Furthermore, the multiple ellipsoidal boundaries are formed on the rotating ellipsoidal base, and these boundaries are delineated based on a preset Fresnel half-wave zone condition to define multiple ellipsoidal regions. Specifically, considering the wavelength of the light source, a... n = c + nλ / 2 (where n is a positive integer), and based on this, multiple boundaries can be drawn, dividing the ellipsoid into a series of discrete ellipsoidal regions.

[0030] It should be noted that a n The semi-major axis represents the nth ellipsoidal boundary. By setting different values ​​of n, a series of ellipsoidal boundaries with different semi-major axes can be obtained, thereby dividing the rotating ellipsoid into multiple discrete ellipsoidal regions (i.e., wave zones). c represents the semi-focal length of the rotating ellipsoid, which is the distance from the center of the ellipsoid to the focus. λ represents the design wavelength, that is, the wavelength of the target X-rays that the photon selector targets. By adjusting a... n The value of λ is such that the optical path difference between adjacent wavebands is exactly equal to λ / 2 (half wavelength), thus satisfying the Fresnel half-waveband condition and achieving coherent interference and focusing of light of a specific wavelength.

[0031] This design ensures that the optical path difference between adjacent boundaries is exactly half a wavelength, thus providing the conditions for achieving coherent interference and focusing at specific wavelengths. By setting different n values, a series of ellipsoidal regions corresponding to different diffraction wavelengths can be generated, and these regions constitute the dispersion basis of the element.

[0032] Furthermore, the reflectivity control layer covers the plurality of ellipsoidal regions. The reflectivity control layer is configured to have reflective properties in some areas of the plurality of ellipsoidal regions, while not having reflective properties in other areas. Specifically, in regions satisfying the Fresnel half-wave zone condition (i.e., opaque elliptical wave zone regions), a high-reflectivity material (such as gold, platinum, etc.) is deposited using a sputtering deposition process, making its reflectivity in the target energy region greater than 90%; while in other regions (i.e., transparent elliptical wave zone regions), the substrate is left exposed or the reflective material is etched away, making it non-reflective.

[0033] Furthermore, the mechanism by which the X-ray photon selector 11 simultaneously disperses, focuses, and suppresses higher-order diffraction of incident X-rays is as follows: Achievement of Dispersion and Focusing: When polychromatic X-rays containing multiple wavelengths are incident on the X-ray photon selector 11, the geometric positions satisfying the half-wave zone condition differ because different wavelengths of X-rays correspond to different n values. Specifically, for a light ray of a specific wavelength λ, the position satisfying the reflection and focusing condition is determined by a. n = c + nλ / 2 is uniquely determined. Therefore, longer wavelength light will cause a to be uniquely determined. n A larger wavelength corresponds to an ellipsoidal region further away from the optical axis, and the focusing position is farther from the element; shorter wavelength light will cause a... n The smaller ellipsoidal region corresponds to a region closer to the optical axis, and the focusing position is closer to the element. Therefore, light of different wavelengths is "dispersed" in space, forming separate focal points distributed along a specific direction, i.e., the "rainbow" effect. At the same time, due to the geometric properties of the rotating ellipsoid, these dispersed light rays are focused onto highly clear focal spots on the plane of detector 20.

[0034] Suppression of higher-order diffraction: Traditional reflective zone plates, like square-wave gratings, inevitably produce zero-order and higher-order diffraction, which are the main sources of background noise in spectrometers. In this invention, the distribution of the reflectivity control layer is not a simple periodic structure, but is optimized based on a binary sine or cosine function, and further employs a quasi-random lattice arrangement. This design changes the diffraction amplitude distribution characteristics of traditional square-wave gratings, causing the diffraction energy to be mainly concentrated on the +1st order (target order), while higher-order diffraction such as the zeroth, +2nd, and +3rd orders is significantly suppressed. Therefore, only the +1st-order diffracted light of the target wavelength is correctly focused onto the detector 20 position, and the intensity of other orders of stray light is extremely low, so they do not form interference signals on the focal plane of the detector 20, thereby achieving a significant improvement in signal-to-noise ratio.

[0035] In summary, the X-ray photon selector 11 achieves dispersion and focusing through the geometric combination of the rotating ellipsoidal substrate and the Fresnel half-wave zone structure, and achieves advanced diffraction suppression through the binarized sinusoidal / quasi-random dot matrix reflection pattern. Thus, it completes the complex optical functions that traditional spectrometers require multiple components to work together on a single element.

[0036] Furthermore, the detector 20 is disposed on the focusing surface of the X-ray photon selector 11. When X-rays of different wavelengths, after dispersion, form a spectral line distributed along the dispersion direction on the focusing surface, the detector 20 receives and records the intensity distribution of the spectral line. Since the spectral line directly reflects the relative intensity of the incident X-rays at different wavelengths, the continuous energy spectrum information of the X-ray to be diagnosed can be directly obtained by reading the spatial position and gray value recorded on the detector 20, without relying on complex spectral interpretation algorithms.

[0037] This embodiment constructs a single-stage focusing reflection soft X-ray spectrometer by coupling a photon selection component 10, which includes at least one X-ray photon selector 11, to a detector 20. This spectrometer utilizes the X-ray photon selector 11 to simultaneously disperse (spatially separate light of different wavelengths) and focus (ensure a clear focal spot) X-rays, and directly records the dispersive spectrum on the detector 20, achieving continuous and direct measurement of black cavity radiation, fundamentally eliminating the dependence on spectral interpretation algorithms. Furthermore, because the X-ray photon selector 11 effectively suppresses higher-order diffraction using a binary sine function or a quasi-random lattice pattern, the measurement results more accurately reflect the true spectral distribution, avoiding the spectral aliasing and high background noise problems caused by higher-order diffraction in traditional spectrometers.

[0038] In some preferred embodiments, the photon selection assembly 10 includes a plurality of X-ray photon selectors 11, which have different center wavelengths and spectral ranges for splicing together to form the dispersive spectrum.

[0039] In specific implementation, the photon selection component 10 includes multiple X-ray photon selectors 11, which have different center wavelengths and spectral ranges, and are used to stitch together to form the dispersive spectrum. The specific structure of the X-ray photon selector 11 can be referenced from the components disclosed in CN114646652B, and this invention is not specifically limited thereto. A single X-ray photon selector 11 can achieve high-resolution dispersion within a certain energy range, but its spectral range is limited by the design parameters of the ellipsoidal boundary. Specifically, the elliptical boundary spacing d of a single photon selector is determined by the diffraction equation d(sinα±sinβ) = mλ, where α is the incident angle, β is the diffraction angle, and m is the diffraction order (m=1 in this invention). When the target wavelength λ is fixed, the boundary spacing d is a constant. Therefore, a single component can only maintain high-resolution dispersion performance within a relatively narrow bandwidth near its design wavelength.

[0040] In this embodiment of the invention, to cover a wide range of black cavity radiation from 0.5 nm to 25 nm, multiple X-ray photon selectors 11 with different center wavelengths and spectral ranges are collaboratively stitched together. Specifically, the elliptical boundary spacing and reflectivity pattern of each photon selector are independently designed according to its target wavelength range. For example, photon selectors for lower energies (longer wavelengths) use larger elliptical boundary spacing, while photon selectors for higher energies (shorter wavelengths) use smaller elliptical boundary spacing. These photon selectors are arranged in a certain order along the X-ray incident light path or dispersion direction, so that X-rays of different energy bands are dispersed by the corresponding photon selectors and focused onto different regions of the detector 20. The dispersive spectrum after stitching together the selectors forms a continuous wavelength-position mapping relationship on the detector 20, thereby achieving full-band coverage. This multi-element collaborative integration is the key to overcoming the limitations of single optical element energy range coverage and achieving seamless full-spectrum detection. To achieve high resolution (E / ΔE>400) over a wide range (0.5 nm to 25 nm), it is necessary to systematically optimize the band parameters of multiple photon selectors to ensure smooth, seamless, and non-overlapping spectral stitching between different energy bands.

[0041] This embodiment solves the problem of limited response bandwidth of a single dispersive element over a wide measurement range by introducing multiple X-ray photon selectors 11 with different center wavelengths and spectral ranges. Each photon selector in a different energy band provides high-resolution dispersion within its optimal operating range, and by stitching them together, a continuous and seamless dispersive spectrum is formed, enabling the spectrometer to simultaneously possess both wide measurement range (0.5 nm to 25 nm) and high resolution (E / ΔE > 400). This modular design also facilitates adjustments to the range and resolution for different experimental needs, improving the spectrometer's applicability and flexibility, and providing technical support for full-spectrum diagnostics of black cavity radiation.

[0042] In some preferred embodiments, the plurality of X-ray photon selectors 11 are integrated on the same component.

[0043] In practice, the multiple X-ray photon selectors 11 are integrated onto the same component. This means that photon selectors with different center wavelengths are fabricated on the same substrate surface, rather than being distributed as multiple independent components. Specifically, on a rotating ellipsoidal substrate, multiple sub-region waveband structures with different waveband period parameters are fabricated in different regions of the substrate surface according to the elliptical boundary parameters of different energy bands using micro-nano fabrication processes such as electron beam lithography, sputtering deposition, and ion beam etching.

[0044] Furthermore, when wide-energy X-rays irradiate this integrated element, the X-rays from different energy bands are dispersed and focused by the corresponding sub-regional band structures, ultimately stitching together a continuous, seamless dispersive spectrum on the focal plane of detector 20. This design enables wide-spectrum, high-resolution energy spectral measurements using only a single element. Computer simulations have verified that this single-element spectrometer can achieve a resolution of 500 nm in the spectral range of 1 nm to 700 nm, fully validating the feasibility of this approach.

[0045] This embodiment further simplifies the spectrometer's structure by integrating multiple photon selectors onto a single component. Component integration reduces alignment errors and assembly complexity between multiple independent components, improving the system's mechanical and thermal stability. Simultaneously, the integrated visible light zone plate provides a convenient aiming method for the spectrometer's optical path alignment, solving the problem of difficult assembly and adjustment of soft X-ray spectrometers due to the invisibility of X-rays, thus improving experimental preparation efficiency and measurement repeatability. Furthermore, by integrating the zone structures of multiple photon selectors onto a single component, ultra-wideband measurements from 1 nm to 700 nm (including visible light to soft X-rays) can be achieved, verifying the feasibility of a single-component spectrometer in broadband high-resolution energy spectrum measurements and demonstrating the feasibility of using an X-ray photon selector 11 combined with a streak camera to achieve a wide-range, high-resolution soft X-ray spectrometer for black cavity radiation diagnosis.

[0046] Those skilled in the art should understand that the two descriptions of the photon selection component 10 described above are not mutually exclusive or contradictory technical solutions, but rather belong to a progressive relationship from general to preferred and from higher to lower.

[0047] Specifically, one implementation describes the photon selection component 10 as including multiple X-ray photon selectors 11, each with different center wavelengths and spectral ranges, used to stitch together to form the dispersive spectrum. The core of this implementation lies in defining the "multi-element collaborative stitching" relationship of the photon selection component 10 at the functional level, that is, forming a continuous, seamless broadband spectrum on the focal plane of the detector 20 through the segmented dispersion capabilities of multiple photon selectors targeting different energy bands. However, this implementation does not impose any limitations on the physical spatial arrangement of the multiple X-ray photon selectors 11, and its scope covers two specific forms: one is multiple physically independent X-ray photon selectors 11 arranged along the optical path in a predetermined order; the other is multiple X-ray photon selectors 11 integrated onto the same component.

[0048] Another preferred implementation further defines the second specific form described above, namely, that the multiple X-ray photon selectors 11 are integrated onto a single component. This implementation achieves physical integration of multiple components by fabricating multiple sub-zone structures with different periodic parameters in different regions of the same rotating ellipsoidal substrate. This implementation is a preferred embodiment of the aforementioned implementation, and its technical solution falls entirely within the protection scope defined by the aforementioned implementation, while further improving the structural compactness, stability, and assembly accuracy of the spectrometer.

[0049] In summary, the aforementioned two descriptive methods are related as general and preferred, or superior and inferior, and are not parallel mutually exclusive solutions. This invention, by defining a superior concept of multi-component collaborative splicing on one hand and disclosing specific implementation methods integrated on the same component on the other, forms a technical solution layout with clear hierarchy and reasonable protection scope. Those skilled in the art can choose to use either an independent component arrangement or an integrated component approach to implement the technical solution of this invention according to actual application needs, without departing from the protection scope of this invention.

[0050] In some preferred embodiments, the detector 20 is an X-ray streak camera with a slit cathode 21 arranged along the dispersion direction of the dispersive spectrum.

[0051] In a specific implementation, the detector 20 is an X-ray streak camera with a slit cathode 21, which is positioned along the dispersion direction of the dispersive spectrum. An X-ray streak camera is a high-speed imaging device capable of recording the change in X-ray intensity over time. Its core component is the slit cathode 21. When the dispersed X-ray spectral lines are incident on the slit cathode 21, the number of photoelectrons generated by the cathode material (usually gold, cesium iodine, or other materials with high X-ray photoelectric conversion efficiency) is proportional to the intensity of the incident X-rays. These photoelectrons, after passing through accelerating and focusing electrodes, form an electron beam, which is deflected perpendicular to the slit direction under the influence of a scanning electric field. The deflection angle is linearly related to the arrival time. Finally, the electron beam bombards a fluorescent screen, converting it into a visible light signal, which is then acquired by a charge-coupled device (CCD) or complementary metal-oxide-semiconductor (CMOS) camera.

[0052] Furthermore, by aligning the slit cathode 21 along the dispersion direction, the spatial distribution of X-ray spectral lines on the cathode directly corresponds to the wavelength distribution, while the scanning electric field converts time information into displacement perpendicular to the slit direction, thus forming three-dimensional wavelength-time-intensity information on the acquired image. Specifically, the streak camera's response energy range needs to cover 0.1 keV to 10 keV to meet the requirements of soft X-ray diagnostics. Its electron optical system adopts a rotationally symmetric structure and a multi-focusing electrode design. The electrode geometry parameters are optimized using the finite element / finite difference method, and the geometric and electrical parameters are reasonably adjusted to control edge aberrations, balancing performance such as temporal resolution and dynamic range. In addition, the streak camera has a gain-gated selection function, which can suppress radiation input outside the signal duration, effectively reducing the impact of irrelevant noise on the signal image.

[0053] This embodiment employs an X-ray streak camera as detector 20, endowing the spectrometer with time-resolution capability. The slit cathode 21 is positioned along the dispersion direction, allowing the spectral lines to completely cover the cathode slit, thus simultaneously recording the intensity changes of all wavelengths over time in the same image. Combined with the X-ray streak camera's time resolution of better than 100 ps, ​​it enables the capture of transient evolution of the black cavity radiation spectrum, providing crucial diagnostic data for studying energy transport and plasma state changes during implosion compression. Simultaneously, the streak camera's gain-gated selection function effectively suppresses strong electromagnetic and high-energy radiation interference, ensuring high-quality signal acquisition even in extreme environments.

[0054] In some preferred embodiments, the length of the slit cathode 21 is greater than 30 mm.

[0055] In specific implementation, the length of the slit cathode 21 is greater than 30 mm. Since the spatial width of the dispersive spectrum formed by the photon selection components 10 on the focal plane of the detector 20 is related to the wavelength range, in order to achieve continuous coverage of the 0.5 nm to 25 nm band and ensure that the spatial distance between adjacent wavelengths is large enough to meet the requirements of high resolution (E / ΔE>400), the line length of the dispersive spectrum needs to be at least 30 mm. Therefore, the length of the slit cathode 21 is designed to be greater than 30 mm to ensure that the entire dispersive spectral line can be completely projected into the effective working area of ​​the cathode.

[0056] Furthermore, maintaining consistent spatial resolution between the cathode edge and center is a key technical challenge in the case of long slits. To address this issue, the streak camera's electro-optical system employs a rotationally symmetric structure and a multi-focusing electrode design. By accurately simulating the electro-optical trajectory using the finite element / finite difference method and optimizing the electrode geometry parameters and voltage configuration, edge aberrations caused by the long slit are effectively corrected, resulting in a spatial resolution better than 50 μm for both the edge and center of the slit cathode 21. Simultaneously, this design also considers important performance aspects such as temporal resolution and dynamic range, ensuring that picosecond-level temporal resolution is maintained even with large-size cathodes.

[0057] This embodiment provides sufficient detection space for a wide-range dispersive spectrum by setting the length of the slit cathode 21 to be greater than 30 mm, enabling it to cover the entire wavelength range from 0.5 nm to 25 nm while maintaining high resolution. The large-size cathode, combined with an optimized electron optics system, achieves a spatial resolution better than 50 μm even under long slit conditions, ensuring the positional accuracy of each wavelength point on the spectral line, thus providing a data foundation for high-precision energy spectrum reconstruction. This design overcomes the technical challenge of low edge spatial resolution under long slit conditions, while also considering temporal resolution, dynamic range, and other performance aspects, realizing a manufacturable streak image converter tube.

[0058] In some preferred embodiments, the photon selection component 10 includes a visible light zone plate, which is used for the assembly and aiming of the wide-range high-resolution soft X-ray spectrometer.

[0059] In a specific implementation, the photon selection component 10 includes a visible light zone plate, which is used for the assembly and aiming of the wide-range, high-resolution soft X-ray spectrometer. The visible light zone plate is integrated with the photon selector that disperses the diagnostic X-rays on the same substrate, and its structure is similar to that of the X-ray photon selector 11, but the elliptical boundary spacing is designed according to the visible light wavelength (e.g., 400 nm to 700 nm). Specifically, the zone period d of the visible light zone plate satisfies the diffraction equation d(sinα ± sinβ) = mλ, where λ is taken as the center wavelength of the visible light band (e.g., 532 nm), thereby enabling the visible light to be effectively dispersed and focused.

[0060] Furthermore, during the spectrometer installation and alignment phase, the operator can illuminate the visible light zone plate using a visible light source (such as a helium-neon laser or LED). After passing through the spectrometer's optical path, the visible light is dispersed and focused by the zone plate onto the detector 20, forming a visible light focal point. By observing the position of this focal point, it can be determined whether the spectrometer's optical axis is collimated with the black cavity radiation source. If the visible light focal spot is located at the expected position on detector 20, it indicates that the spectrometer alignment is complete; otherwise, fine-tuning is performed by adjusting the spectrometer's pitch, deflection, and planar position until the focal spot falls in the correct position. After assembly and alignment, the visible light zone plate does not participate in X-ray processing during actual experiments, but its presence does not affect the X-ray dispersion effect. The visible light zone plate can also be used to measure the energy spectrum in the visible light band before experiments as part of system functional verification.

[0061] This embodiment solves the problem of difficult assembly and adjustment of soft X-ray spectrometers under X-ray-invisible conditions by integrating a visible light zone plate. Using visible light for optical path correction allows operators to intuitively and quickly complete spectrometer alignment, significantly shortening experimental preparation time and reducing data deviations caused by alignment errors. This technology is particularly suitable for complex environments such as large laser facility test ranges, improving experimental efficiency and data reliability. Simultaneously, this visible light zone plate can also be used to measure the energy spectrum in the visible light band, expanding the instrument's application range.

[0062] In some preferred embodiments, the wide-range high-resolution soft X-ray spectrometer is used to diagnose soft X-rays in the 0.5 nm to 25 nm band generated by inertial confinement fusion black cavity radiation, and its spectral resolution E / ΔE is greater than 400 and its temporal resolution is better than 100 ps.

[0063] In practice, the wide-range, high-resolution soft X-ray spectrometer is used to diagnose soft X-rays in the 0.5 nm to 25 nm band generated by black cavity radiation in inertial confinement fusion, with a spectral resolution E / ΔE greater than 400 and a temporal resolution better than 100 ps. In inertial confinement fusion experiments, laser energy is injected into a black cavity 30 made of high-Z materials (high atomic number materials, such as gold), which is converted into a soft X-ray radiation field. This radiation field ablates and drives the implosion of the target pellet, compressing and heating the deuterium-tritium fuel to achieve ignition. The soft X-ray energy spectrum inside the black cavity 30, which evolves over time, is a key carrier of core information about the implosion physics process. The 0.5 nm to 25 nm band covers the main energy range of black cavity radiation, including the thermal radiation peak (several keV to hundreds of eV) as well as the high-energy M band and low-energy hyperthermal components.

[0064] Furthermore, the wide-range, high-resolution soft X-ray spectrometer utilizes the high dispersion capability of the photon selection component 10 to achieve an energy resolution exceeding 400 Å in this wavelength band. This allows for the resolution of fine structures such as the K-absorption edge and characteristic emission lines of ablated materials, providing direct experimental evidence for accurately diagnosing the temperature and density evolution of the ablation front, studying the atomic physics processes of different shell materials, and quantitatively analyzing the impact of high-Z plasma radiation on the implosion process. Simultaneously, in conjunction with a streak camera, it provides a temporal resolution better than 100 ps and a time measurement width greater than 10 ns, capturing the entire dynamic evolution of the black cavity radiation energy spectrum with laser pulses and providing key physical quantities such as radiation temperature and energy flux with high confidence levels over time.

[0065] Furthermore, the wide-range, high-resolution soft X-ray spectrometer ensures the reliability of measurement data by real-time correction of the system response through an online calibration channel under real, complex, and transient high-radiation field conditions. Its radiation temperature inversion accuracy is better than ±5%, providing closed-loop experimental data for verifying large-scale numerical simulation programs and offering an indispensable diagnostic tool for optimizing the design of the black cavity 30 and the target pellet, and exploring more efficient implosion paths.

[0066] In some preferred embodiments, the wide-range high-resolution soft X-ray spectrometer further includes an online calibration channel, which integrates an independent light source calibration channel for real-time monitoring of light source intensity and wavelength drift using the dispersion characteristics of the photon selection component 10.

[0067] In specific implementation, the wide-range, high-resolution soft X-ray spectrometer also includes an online calibration channel. This online calibration channel integrates an independent light source calibration channel, used to monitor the light source intensity and wavelength drift in real time using the dispersive characteristics of the photon selection component 10. In traditional spectrometers, calibration is usually performed offline. The calibration curve is easily affected by factors such as radiation damage after long-term use, ambient temperature drift, and device aging under power, leading to systematic errors in the experimental data. These errors are particularly significant in the extreme radiation environment of inertial confinement fusion (ICF).

[0068] In this embodiment, the online calibration channel comprises a miniature, independent light source with known spectral characteristics (e.g., an X-ray tube or fluorescent target with known emission lines). This light source is coupled to the main optical path via a movable mirror or beam splitter. During pre-experiment calibration mode or between experiments, the independent light source in the calibration channel emits calibration light, which is dispersed by the photon selection component 10 and reaches the detector 20. By analyzing the spectral line position and intensity of the calibration light on the detector 20, the current wavelength-position correspondence and absolute intensity response function can be measured. If wavelength drift or changes in response sensitivity are detected, the measurement data can be corrected in real time or the system parameters can be adjusted to achieve self-calibration.

[0069] Furthermore, the implementation of the online calibration channel enables the spectrometer to maintain stable measurement accuracy in extreme radiation environments, significantly reducing the impact of calibration errors on measurement results. This solution addresses the problem of calibration curve failure in traditional offline calibration under the influence of long-term radiation damage and environmental temperature drift, providing a reliable guarantee for long-term, continuous diagnostics in large ICF devices. This online calibration function, combined with the dispersive characteristics of the photon selection component 10, enables real-time self-calibration of the spectrometer.

[0070] This embodiment achieves the spectrometer's self-calibration capability under extreme radiation environments by integrating an online calibration channel and an independent light source. Real-time monitoring of light source intensity and wavelength drift compensates for changes in the response function caused by radiation damage, temperature variations, and other mechanisms, significantly reducing the impact of calibration errors on measurement results and improving the confidence level of each emission. Simultaneously, online calibration reduces the frequency of offline calibration, improving experimental efficiency and ensuring the spectrometer always operates in a known, high-precision state. This technology solves the long-standing bottleneck problems of "inaccurate measurement" and "uncertain spectral interpretation" in ICF diagnostics, demonstrating strong technological advancement and practical application value.

[0071] See Figure 3 This invention proposes a method for diagnosing black cavity radiation using a wide-range, high-resolution soft X-ray spectrometer based on any of the above embodiments, comprising the following steps: S1 receives the X-rays to be diagnosed via a photon selection component.

[0072] In practice, during inertial confinement fusion experiments, the X-rays to be diagnosed originate from black cavity radiation. The black cavity is a cylindrical or spherical cavity made of a high-Z material (such as gold). A laser is injected into the cavity through an entrance aperture, heating the inner walls to generate a soft X-ray radiation field. This radiation field is emitted outward through a diagnostic aperture or an opening created by target ablation, and the X-rays to be diagnosed reach the spectrometer entrance through a pre-defined vacuum optical path.

[0073] S2, the received X-rays are simultaneously dispersed, focused, and high-order diffraction suppressed using the photon selection component to form a dispersive spectrum.

[0074] In specific implementation, the photon selection component includes at least one X-ray photon selector. This X-ray photon selector is based on a Fresnel half-wave zone structure formed on a rotating ellipsoidal substrate, reflecting X-rays of different wavelengths to different spatial positions on the focal plane. Specifically, for the target wavelength λ, its corresponding focusing area is defined by a. n = c + nλ / 2 (where n is a positive integer). Therefore, X-rays of different wavelengths are focused to different spatial positions according to different n values, thus achieving wide-band dispersion. Simultaneously, because the reflectivity control layer of this element employs a binary sine function or quasi-random lattice design, its diffraction energy is mainly concentrated on the +1st order diffraction at the target wavelength, while the zeroth order and other higher-order diffractions are significantly suppressed. This structure ensures that the zeroth-order diffraction and the first-order focusing are not in the same direction, effectively avoiding the adverse effects of zero-order diffraction on imaging, significantly reducing background noise interference, and thus forming a high-purity, high-resolution dispersive spectrum.

[0075] S3, using a detector located on the focusing surface of the photon selection component, the dispersive spectrum is received and recorded.

[0076] In specific implementation, the detector is an X-ray streak camera, with its slit cathode positioned along the dispersion direction. When dispersive spectral lines are incident on the slit cathode, photoelectrons are generated. After being accelerated and focused by the electron optics system, these photoelectrons undergo a time-space conversion under the influence of a scanning electric field, ultimately forming a wavelength-time-intensity image on the fluorescent screen. The slit length of the streak camera's cathode is greater than 30 mm, ensuring that the full-band spectral lines can completely cover the effective area of ​​the cathode. The streak camera has a temporal resolution better than 100 ps and a time measurement width greater than 10 ns, enabling it to completely capture the entire transient change process of black cavity radiation. The streak camera also features gain-gated selection, which can suppress radiation input outside the signal duration, effectively reducing the impact of irrelevant noise on the signal image.

[0077] S4. Based on the dispersive spectrum, the energy spectrum distribution and radiation temperature of the black cavity radiation are obtained by inversion.

[0078] In practice, based on the spatial position and grayscale value of the spectral lines recorded on the detector, and using a pre-calibrated wavelength-position mapping relationship and intensity calibration coefficient, the absolute X-ray intensity corresponding to each wavelength can be calculated, thus obtaining a continuous energy spectrum distribution function. Based on this energy spectrum, the total energy flux is calculated through integration, and then the black cavity radiation temperature and its evolution are inverted using Planck's blackbody radiation formula or a more complex plasma radiation model. The radiation temperature inversion accuracy is better than ±5%, providing high-confidence diagnostic data for confining key physical processes such as energy transport and plasma state evolution.

[0079] In some preferred embodiments, the step of inverting the energy spectrum distribution and radiation temperature of the black cavity radiation based on the dispersive spectrum includes: directly obtaining the continuous energy spectrum information of the X-rays based on the spatial position and intensity distribution of the dispersive spectrum, combined with a pre-calibrated wavelength-position correspondence and intensity calibration coefficient.

[0080] In practice, based on the spatial position and intensity distribution of the dispersive spectrum, combined with the pre-calibrated wavelength-position correspondence and intensity calibration coefficients, the continuous energy spectrum information of the X-rays is directly obtained. Specifically, before the experiment, the spectrometer was precisely calibrated using a series of monochromatic X-ray sources with known wavelengths, and a mapping function (e.g., a polynomial fitting curve) between the detector pixel position and wavelength was established. Simultaneously, the response efficiency of the spectrometer was calibrated using a standard detector (such as an absolutely calibrated silicon drift detector or an ionization chamber), obtaining the intensity calibration coefficients (units of counts / photons or counts / energy) at each wavelength. The intensity calibration coefficients refer to the number of X-ray photons or energy value corresponding to a unit grayscale value (or count) on the detector under a standard X-ray source of known intensity, and are obtained through experimental calibration.

[0081] During the experiment, spectral lines (along the dispersion direction) at a specific time point were extracted from the acquired time-resolved images, and the grayscale values ​​of each pixel were extracted. The pixel coordinates were converted to wavelengths by consulting a wavelength-position mapping table; the grayscale values ​​were then converted to absolute X-ray intensity by multiplying by the intensity calibration coefficient corresponding to the wavelength. This yielded a continuous I(λ) curve. Substituting this energy spectrum curve into a blackbody radiation model or a more complex radiative transport equation, and fitting parameters such as the radiation temperature T and effective emissivity, the black cavity radiation temperature and its time-varying curve were obtained. The black cavity radiation temperature inversion accuracy was better than ±5%, providing crucial constraints for evaluating implosion compression behavior and optimizing ignition conditions.

[0082] It should be noted that in this invention, the I(λ) curve refers to the relationship curve between radiation intensity and wavelength, i.e., the spectral distribution curve. Here, I represents radiation intensity, characterizing the radiant energy passing through a unit area per unit time; λ represents the X-ray wavelength, covering the soft X-ray band from 0.5 nm to 25 nm in this invention. The I(λ) functional relationship describes the distribution characteristics of X-ray radiation intensity at different wavelengths and is a direct expression reflecting the energy spectrum properties of the X-ray source.

[0083] In the technical solution of this invention, the I(λ) curve is obtained by direct measurement and reconstruction of the photon selection component and the detector, rather than by indirect derivation relying on theoretical models or spectral interpretation algorithms. Specifically, the spatial position of the dispersive spectrum on the detector has a pre-defined one-to-one correspondence with the wavelength, and the signal intensity of each pixel position of the detector has a pre-defined quantitative mapping relationship with the radiation intensity at the corresponding wavelength. Therefore, by reading the spatial coordinates and signal intensity of each pixel position along the dispersion direction in the dispersive spectrum, and combining the pre-defined wavelength-position mapping function and intensity-signal calibration coefficient, a series of (wavelength λ, intensity I) data points can be obtained. These data points are arranged in wavelength order and connected to form the I(λ) curve.

[0084] The I(λ) curve contains complete information about the black cavity radiation energy spectrum and is the core data source for subsequent inversion of key physical quantities such as black cavity radiation temperature and energy flux. By integrating the I(λ) curve, the total radiation energy flux can be obtained; by fitting the shape of the I(λ) curve to a blackbody radiation model, the black cavity radiation temperature and its change over time can be accurately inverted. Since the curve is a directly reconstructed continuous spectrum rather than discrete channel data, its richness of physical information and data processing confidence are significantly superior to existing technical solutions.

[0085] This embodiment provides a complete black cavity radiation diagnostic method. Utilizing a photon selection component comprising at least one X-ray photon selector, it achieves direct dispersion, focusing, and single-order diffraction suppression of soft X-rays. Combined with a streak camera, it enables wide-range, high-resolution, and high-time-resolved energy spectrum measurements. This method eliminates reliance on spectral interpretation algorithms and can directly output high-confidence continuous energy spectrum data, providing a reliable foundation for the inversion of key ICF physical quantities (such as radiation temperature and energy flux), which is beneficial for verifying and correcting large-scale numerical simulation programs. By obtaining high-confidence, time-evolving radiation temperature and energy flux data, their impact on implosion compression behavior and ignition success can be assessed.

[0086] In some preferred embodiments, before receiving the X-rays to be diagnosed via the photon selection component, the method further includes an assembly step: assembling and aiming the wide-range high-resolution soft X-ray spectrometer using a visible light zone plate in the photon selection component.

[0087] In practice, the wide-range, high-resolution soft X-ray spectrometer is assembled and aimed using the visible light zone plate in the photon selection assembly. Specifically, before the experiment, a visible light source (such as a helium-neon laser or LED) is placed at the black cavity target location (i.e., the expected X-ray source location). This visible light passes through the spectrometer's optical path and illuminates the photon selection assembly. Because the photon selection assembly integrates a zone plate for the visible light band, the visible light is similarly dispersed and focused, forming a visible light focal point at the detector location. By adjusting the spectrometer's support structure (pitch, deflection, translation), this visible light focal point is precisely positioned at the center of the detector's expected focal plane. Once this position is aligned, the X-ray optical path can be considered aligned as well, since the visible light zone plate and the X-ray photon selector share the same substrate and optical path system. After assembly and adjustment, the visible light source is removed, and preparation for the formal experiment begins.

[0088] This embodiment overcomes the difficulty of optical path alignment caused by the invisibility of X-rays in traditional X-ray spectrometers by utilizing an integrated visible light zone plate for assembly and adjustment. The visible light assembly and adjustment operation is simple, intuitive, and fast, requiring no additional alignment instruments or complex calibration procedures, significantly improving experimental preparation efficiency and optical path alignment accuracy, and ensuring the accuracy and repeatability of measurement data.

[0089] In the above embodiments, the descriptions of each embodiment have different focuses. For parts that are not described in detail in a certain embodiment, please refer to the relevant descriptions in other embodiments.

[0090] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," and "counterclockwise," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0091] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this invention, "a plurality of" means two or more, unless otherwise explicitly specified.

[0092] In this invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0093] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0094] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the invention. The illustrative expressions of the above terms in this specification should not be construed as necessarily referring to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. In addition, those skilled in the art can combine and integrate the different embodiments or examples described in this specification.

[0095] Obviously, those skilled in the art can make various modifications and variations to this invention without departing from its spirit and scope. Since these modifications and variations fall within the scope of the claims and their equivalents, this invention also intends to include these modifications and variations.

[0096] The above description describes specific embodiments of the present invention, but the scope of protection of the present invention is not limited thereto. Any person skilled in the art can easily conceive of various equivalent modifications or substitutions within the technical scope disclosed in the present invention, and these modifications or substitutions should all be covered within the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be determined by the scope of the claims.

Claims

1. A wide-range, high-resolution soft X-ray spectrometer, characterized in that, include: The photon selection assembly includes at least one X-ray photon selector for receiving X-rays to be diagnosed and simultaneously dispersing, focusing and suppressing higher-order diffraction of the X-rays to form a dispersive spectrum. A detector is positioned on the focusing surface of the photon selection component to receive and record the dispersive spectrum.

2. The wide-range, high-resolution soft X-ray spectrometer according to claim 1, characterized in that, The photon selection assembly includes multiple X-ray photon selectors, which have different center wavelengths and spectral ranges, and are used to splice together to form the dispersive spectrum.

3. The wide-range, high-resolution soft X-ray spectrometer according to claim 2, characterized in that, The multiple X-ray photon selectors are integrated on the same component.

4. The wide-range, high-resolution soft X-ray spectrometer according to claim 1, characterized in that, The detector is an X-ray streak camera with a slit cathode, which is positioned along the dispersion direction of the dispersive spectrum.

5. The wide-range, high-resolution soft X-ray spectrometer according to claim 4, characterized in that, The length of the slit cathode is greater than 30 mm.

6. The wide-range, high-resolution soft X-ray spectrometer according to claim 1, characterized in that, The photon selection component includes a visible light zone plate, which is used for the assembly and aiming of the wide-range, high-resolution soft X-ray spectrometer.

7. The wide-range, high-resolution soft X-ray spectrometer according to claim 1, characterized in that, The wide-range high-resolution soft X-ray spectrometer is used to diagnose soft X-rays in the 0.5nm to 25nm band generated by black cavity radiation from inertial confinement fusion. The wide-range high-resolution soft X-ray spectrometer has a spectral resolution E / ΔE greater than 400 and a temporal resolution better than 100ps.

8. A method for black cavity radiation diagnosis based on a wide-range high-resolution soft X-ray spectrometer according to any one of claims 1 to 7, characterized in that, Includes the following steps: The X-rays to be diagnosed are received through a photon selection component; The photon selection component is used to simultaneously disperse, focus, and suppress higher-order diffraction of the received X-rays to form a dispersive spectrum; The dispersive spectrum is received and recorded using a detector disposed on the focusing surface of the photon selection component; Based on the dispersive spectrum, the energy spectrum distribution and radiation temperature of the black cavity radiation are obtained by inversion.

9. The method according to claim 8, characterized in that, Before receiving the X-rays to be diagnosed through the photon selection component, the method further includes an assembly and adjustment step: using the visible light zone plate in the photon selection component to assemble and aim the wide-range high-resolution soft X-ray spectrometer.

10. The method according to claim 8, characterized in that, The process of inverting the energy spectrum distribution and radiation temperature of the black cavity radiation based on the dispersive spectrum includes: Based on the spatial position and intensity distribution of the dispersive spectrum, combined with the pre-calibrated wavelength-position correspondence and intensity calibration coefficient, the continuous energy spectrum information of the X-rays can be directly obtained.

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