A smart operation and maintenance system and control method for semiconductor plants

Abstract

This invention discloses an intelligent operation and maintenance system and control method for semiconductor plants, including an environmental safety monitoring subsystem, a remote equipment operation and maintenance subsystem, a process pipeline temperature control subsystem, an edge fusion gateway, a standardized interface unit, and a cloud platform. The edge gateway connects to each subsystem via a star topology and multiple interfaces. The standardized interface unit adopts a quick-plug structure integrating signal, power supply, and media, enabling plug-and-play functionality across floors. The pipeline temperature control subsystem uses temperature sensors and resistance wire heaters attached to or wrapped around the outer wall of the pipeline. Heating is initiated when the pipeline wall temperature is lower than a set value and stops when the set value is reached. When a gas leak, smoke, or flame is detected, the gateway sends a command to a hardware safety relay to physically cut off the heating power supply and simultaneously cut off the media supply, with a response time ≤500ms. This invention solves the problems of data fragmentation, difficulties in cross-floor interface, and lack of hardware-level safety linkage in semiconductor plants.

Description

Technical Field

[0001] This invention relates to the field of vibration control technology, specifically to an intelligent operation and maintenance system and control method for semiconductor plants. Background Technology

[0002] Currently, in the construction and operation of advanced semiconductor manufacturing plants, the auxiliary layer (hereinafter referred to as the F1 layer, such as the second layer) is mainly equipped with facilities for safety monitoring, equipment maintenance, and process pipeline control, while the process layer (hereinafter referred to as the F2 layer, such as the third layer) centrally houses precision process equipment and its supporting support base. The industry currently faces the following common technical challenges: (1) The system is isolated and the data is fragmented. The life safety monitoring system, remote equipment operation and maintenance system, and process pipeline temperature control system are deployed independently, with no data sharing and no ability to achieve coordinated and synchronized control of operating conditions. The connection methods of each system are chaotic and the topology is non-standard, which easily causes signal interference and affects the stability of data transmission.

[0003] (2) Heterogeneous protocols make debugging difficult. The lack of standardized communication protocols and data formats across systems makes on-site debugging difficult, operation and maintenance management is fragmented, and the overall level of intelligent control is low. Furthermore, the absence of clear control logic and priority settings leads to delayed responses to abnormal operating conditions.

[0004] (3) There are no standards for cross-layer connection, resulting in a long construction period. The various control systems in the F1 layer lack a unified standard for connection with the equipment support base and process valve group in the F2 layer. The connection method is cumbersome, requiring secondary wiring and piping debugging on site. It cannot achieve standardized connection, plug-and-play rapid deployment, and has a long construction cycle and high adaptation cost.

[0005] (4) Weak local decision-making capabilities and lack of hardware-level security linkage The existing system lacks a clear definition of the internal hardware layout and signal flow, its control principles are vague, and it relies heavily on cloud-based control relay, exhibiting weak local autonomous decision-making capabilities. In particular, the process pipeline temperature control system often uses independent PLC control, lacking linkage with the safety monitoring system. When safety risks such as gas leaks occur, it cannot automatically cut off the pipeline heating power supply, posing a serious safety hazard. Summary of the Invention

[0006] The purpose of this invention is to provide an intelligent operation and maintenance system and control method for semiconductor plants, so as to solve the problems existing in the background art.

[0007] The technical solution of this invention is implemented as follows: An intelligent operation and maintenance system for semiconductor plants is deployed on the first floor (auxiliary layer, hereinafter referred to as F1 layer) of the semiconductor plant, including an environmental safety monitoring subsystem, an equipment remote operation and maintenance subsystem, a process pipeline temperature control subsystem, an edge fusion and aggregation gateway, a standardized interface interaction unit, a base integration system, and a cloud-based intelligent operation and maintenance management platform; the edge fusion and aggregation gateway serves as the core hub, uniformly connecting to the three types of functional subsystems to complete unified data parsing, time synchronization, and data fusion processing; the standardized interface interaction unit establishes a unified communication and physical interface standard, enabling this system to connect with... The second-layer (process layer, hereinafter referred to as F2 layer) base integration system is seamlessly matched, automatically identified, and plug-and-play linked; the base integration system is deployed on the F2 layer, receives control commands issued by the edge fusion and aggregation gateway and executes corresponding actions, while transmitting the execution status back to the edge fusion and aggregation gateway; the cloud-based intelligent operation and maintenance management platform realizes global data aggregation, status visualization, remote operation and maintenance scheduling, intelligent fault analysis and operation data traceability management; each component is connected according to a clear topology structure and standardized hardware layout, and realizes local autonomous decision-making and cross-layer collaborative linkage through hierarchical control logic, forming a complete closed-loop management and control system.

[0008] The environmental safety monitoring subsystem integrates gas detectors, differential pressure sensors, particulate matter counters, and flame detectors as sensing and acquisition units. It adopts a distributed point deployment, with sensor terminals connected to the nearest regional aggregation node to collect real-time safety operation parameters of the factory production area, including the concentration of toxic and harmful gases, spatial differential pressure, and cleanliness level, to complete real-time monitoring of on-site safety status and on-site early warning of anomalies.

[0009] The remote operation and maintenance subsystem connects to the plant's supporting auxiliary equipment via fieldbus, including vacuum pumps, waste gas treatment devices, and cooling water units. It collects data on equipment operating conditions, operating time, current, voltage, power, vibration, and temperature to achieve online equipment status monitoring, remote parameter adjustment, online fault diagnosis, and full lifecycle operation and maintenance management.

[0010] The process pipeline temperature control subsystem addresses the issue of WF6 specialty gas easily condensing during pipeline transportation in semiconductor manufacturing processes. The system continuously heats and insulates the pipeline, and specifically includes the following components: Temperature acquisition unit: Employs a temperature sensor attached to the outer wall of the pipe to collect the pipe wall temperature in real time; Temperature control actuator: It adopts a resistance wire heater, which is attached to the outer wall of the pipe. The heating power is adjusted by a solid-state relay. Heating is started when the pipe wall temperature is lower than the set lower limit and heating is stopped when the set value is reached. Safety protection unit: Includes an independent hardware temperature switch, attached to the outer wall of the pipe, physically isolated from the control system. It automatically cuts off the heating power when the pipe temperature exceeds the safety threshold, without relying on software.

[0011] The edge fusion and aggregation gateway is the core fusion control unit of this system. The hardware adopts an industrial-grade processor and has multiple types of physical interfaces on the board, including RS485 interface, Ethernet interface, analog input interface, analog output interface, and CAN bus interface. It is compatible with multiple communication protocols and completes the unified access, format normalization processing, and timing alignment of multi-source data from three types of subsystems with an alignment accuracy of ≤1ms. It has a built-in linkage logic strategy library, data caching unit, timing synchronization unit, and protocol conversion unit. The onboard circuits of each functional unit are directly connected, and multi-layer shielded PCB wiring is used. Ground wires are arranged on both sides of the key signal lines, which can complete the condition analysis and abnormal linkage handling on-site with a local decision response time of ≤500ms. It also has the ability to communicate with the cloud platform remotely with encryption.

[0012] The standardized docking and interaction unit adopts an integrated docking component, which includes a three-in-one combination interface of signal communication docking end, control power supply docking end and process media adapter docking end. It adopts a quick-plug mechanical locking structure, has an anti-misplugging design and a sealed dustproof structure, supports hot plugging, and automatically completes physical locking, electrical conduction and communication protocol matching after docking.

[0013] The base integration system is deployed on layer F2 and integrated into the bottom of the anti-vibration base of the process equipment. The base integration system includes: Interfacing interface: A quick-connect female connector that matches the standardized interfacing and interaction unit, including a signal communication receiver, a control power supply receiver, and a process media input / output terminal; Process valve assembly: including pneumatic diaphragm valves, mass flow controllers, and pressure regulating valves, used to control the on / off state, flow rate, and pressure of the process medium.

[0014] Valve group controller: Receives instructions from the edge fusion and aggregation gateway, drives the process valve group to perform corresponding actions, and transmits the valve group status, pressure value, and flow value back to the edge fusion and aggregation gateway; The base integration system is connected to the process equipment of the F2 layer through prefabricated pipes and cables, eliminating the need for secondary piping and wiring on site. After the base integration system and the F1 layer intelligent operation and maintenance system complete the docking through a standardized docking and interaction unit, the edge fusion aggregation gateway automatically identifies the type and address of the base integration system and establishes a master-slave communication relationship.

[0015] The cloud-based intelligent operation and maintenance management platform enables centralized storage of full-domain operation data, visualization of configuration, intelligent dispatch of operation and maintenance work orders, analysis of historical operation data, and remote centralized control. It is connected to the edge convergence gateway via an independent network and is physically isolated from the local control link, using an encrypted transmission protocol.

[0016] The connection and deployment methods of the intelligent operation and maintenance system include: (1) Hierarchical physical layout The entire system is integrated and deployed in the auxiliary equipment room on the F1 floor of the plant. The environmental safety monitoring subsystem adopts a distributed point-to-point deployment, with gas detectors, differential pressure sensors, particulate matter counters, and flame detectors connected to the nearest regional aggregation node. The equipment remote operation and maintenance subsystem connects to the plant's supporting auxiliary equipment via fieldbus, including vacuum pumps, waste gas treatment devices, and cooling water units. The process pipeline temperature control subsystem is centrally deployed in the pipeline mezzanine on the F1 floor, with temperature sensors and resistance wire heaters laid along the process pipelines and attached to the outer wall of the pipelines. All terminals of the environmental safety monitoring subsystem, the equipment remote operation and maintenance subsystem, and the process pipeline temperature control subsystem adopt a star topology structure for unified aggregation and connection to the edge fusion aggregation gateway. The edge fusion aggregation gateway and standardized interface interaction units are centrally installed in the F1 floor interface room. The base integration system is deployed on layer F2 and integrated into the bottom of the anti-micro-vibration base of the process equipment; (2) Internal hardware connection relationship The gas detectors, differential pressure sensors, particulate matter counters, and flame detectors of the environmental safety monitoring subsystem are connected to the peripheral ports of the edge fusion and aggregation gateway via RS485 interfaces; the data acquisition terminals of the equipment remote operation and maintenance subsystem are connected to the peripheral ports of the edge fusion and aggregation gateway via Ethernet interfaces; the temperature sensors of the process pipeline temperature control subsystem are connected to the peripheral ports of the edge fusion and aggregation gateway via analog interfaces, and the resistance wire heaters receive control commands from the edge fusion and aggregation gateway via analog interfaces. All of the above interfaces adopt an anti-interference sealed design; The temperature sensor signal lines of the process piping temperature control subsystem are laid separately from the power lines of the resistance wire heater, with a spacing of ≥300mm; the onboard circuits of each functional unit inside the edge fusion aggregation gateway are directly connected, using a multi-layer PCB board, with ground wires arranged on both sides of the key signal lines; the cloud communication module of the edge fusion aggregation gateway is independently networked and physically isolated from the local control link; the environmental safety monitoring subsystem, the equipment remote operation and maintenance subsystem, and the process piping temperature control subsystem are powered independently, with the heating circuit and control circuit of the process piping temperature control subsystem being physically isolated from each other.

[0017] (3) Cross-floor connection method The F1 layer intelligent operation and maintenance system and the F2 layer base integration system are connected using standardized docking and interaction units; The standardized docking and interaction unit runs vertically through the docking channel between F1 and F2 layers and adopts a sealed dustproof design. The standardized docking and interaction unit includes a signal communication docking terminal, a control power supply docking terminal, and a process media adaptation docking terminal, which are independently partitioned and isolated by metal partitions. The standardized docking and interaction unit adopts a quick-plug mechanical locking structure, which automatically completes physical locking, electrical conduction, and communication protocol matching after docking, without the need for on-site soldering and wiring. The standardized interface unit of F1 layer is matched with the interface of the base integration system of F2 layer. After the interface is connected, the edge fusion and aggregation gateway automatically identifies the type and address of the base integration system and establishes a master-slave communication relationship.

[0018] The control principle of the intelligent operation and maintenance system includes: (1) Data acquisition hierarchical control principle The system adopts a hierarchical data collection mechanism, with priorities from highest to lowest as follows: Level 1: Safety monitoring data, including flammable gas concentration, explosive gas concentration, toxic gas concentration, smoke concentration, flame signal, and emergency stop signal, with a collection period of ≤100ms; Level 2: Equipment operating status data, including vibration amplitude, temperature, current, voltage, and fault codes, with a collection period of ≤500ms; Level 3: Pipeline temperature control data, including pipeline wall temperature, with a collection period of ≤1000ms; After the collected data undergoes hardware and software filtering for noise reduction, it is uploaded to the edge fusion and aggregation gateway. (2) Gateway fusion processing control principle The edge fusion and aggregation gateway has a built-in clock synchronization module to align timestamps of multi-channel heterogeneous data acquisition with an error of ≤1ms. Outliers are removed using the 3σ principle, and data of different dimensions are mapped to a 0-100% standard space for normalization. Data fusion calculations are performed according to a preset operating condition model to generate operating condition evaluation results. (3) Local linkage autonomous control principle The edge convergence gateway has a built-in hierarchical linkage control strategy library, which can autonomously execute closed-loop control without relying on cloud-based commands. The control logic is executed according to the priority of the working conditions, as detailed in Table 1: Table 1 Hierarchical linkage control strategy

[0019] (4) Cross-layer collaborative interaction control principle The intelligent operation and maintenance system establishes a master-slave interactive control logic with the base integration system through standardized interface units. The F1 layer intelligent operation and maintenance system is the master control terminal, and the F2 layer base integration system is the execution terminal. The master control terminal issues operating condition adjustment commands, and the execution terminal drives the process valve group to complete the corresponding actions through the valve group controller. After completing the actions, the execution terminal sends the valve group status, pressure value, and flow value back to the master control terminal. The master control terminal judges the execution effect based on the returned data and issues correction commands, forming a two-way closed-loop control circuit.

[0020] (5) Remote operation and maintenance backup control principle Administrators of the cloud-based intelligent operation and maintenance management platform can remotely modify linkage strategies, adjust threshold parameters, and issue mandatory control commands; the edge convergence gateway automatically switches to local independent operation mode when the network is interrupted or the cloud fails, and automatically synchronizes local data to the cloud after the network is restored.

[0021] The control method for intelligent operation and maintenance systems includes the following steps: S1: The environmental safety monitoring subsystem, the equipment remote operation and maintenance subsystem, and the process pipeline temperature control subsystem synchronously collect on-site operating condition data according to the priority of collection period ≤100ms, ≤500ms, and ≤1000ms, and upload the data to the edge fusion and aggregation gateway after filtering and noise reduction. S2: The edge fusion and aggregation gateway performs time-series synchronization, fusion and normalization, and outlier removal on multi-source heterogeneous data to form an integrated operation and maintenance dataset, and generates operation condition evaluation results by combining the preset operating condition model. S3: The edge fusion and aggregation gateway, combined with built-in linkage strategies, completes intelligent judgment of on-site working conditions: When the pipe wall temperature is within the set value range, it maintains the current state; when the pipe wall temperature is lower than the set lower limit, it starts the resistance wire heater; when the pipe wall temperature reaches the set value, it stops the resistance wire heater; when the pipe wall temperature is lower than the set lower limit and the heater has been working continuously for more than the set time but still cannot heat up, it determines that the heater is faulty and pushes an early warning; when the vibration amplitude, current value, or equipment temperature exceeds the set threshold, it triggers an audible and visual alarm, locks the fault data, and pushes a work order; when the gas concentration, smoke concentration, or flame signal exceeds the alarm threshold, it triggers the highest priority linkage action. S4: Establish master-slave interactive control logic with the base integration system through standardized docking and interaction unit, issue collaborative control instructions, drive the process valve group of the F2 layer base integration system through valve group controller to complete the collaborative adjustment of working conditions, receive the status feedback from the execution end and complete the parameter correction, forming a two-way closed loop. S5: The edge convergence gateway synchronizes and uploads converged operation data and event information to the cloud-based intelligent operation and maintenance management platform; it automatically switches to local independent operation mode when the network is interrupted, and automatically synchronizes local data to the cloud after the network is restored.

[0022] The beneficial effects of this invention are as follows: This invention achieves deep hardware and software integration of the environmental safety monitoring subsystem, the equipment remote operation and maintenance subsystem, and the process pipeline temperature control subsystem. It features a star topology connection and onboard shielded cabling, ensuring stable and reliable data transmission and constructing an integrated operation and maintenance management system. The standardized interface unit adopts a three-in-one combined interface and quick-plug connection method, significantly shortening cross-floor interface time and saving wiring and piping costs. When a safety risk occurs, the pipeline heating power is physically cut off via a hardware safety relay, without relying on software control, with a response time ≤500ms, eliminating the risk of continuous heating caused by controller crashes or network latency. The base integration system is integrated into the anti-vibration base of the process equipment and matches the standardized interface unit, achieving plug-and-play functionality without the need for secondary wiring and piping on-site. It conforms to the actual layout of the F1 and F2 layers of semiconductor plants, providing clear management levels and adapting to various advanced process plant renovation and new construction projects. The edge fusion aggregation gateway has rich built-in interfaces and protocol stacks, allowing for the subsequent integration of more functional modules, and the process pipeline temperature control subsystem can flexibly adapt to different process pipeline requirements. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of the system architecture and connections of the present invention.

[0024] In the diagram, 100 is the cleanroom, 101 is the F1 floor, 102 is the F2 floor, 110 is the base integration system, 111 is the docking interface, 112 is the process valve group, 113 is the valve group controller, 120 is the intelligent operation and maintenance system, 121 is the environmental safety monitoring subsystem, 122 is the equipment remote operation and maintenance subsystem, 123 is the process pipeline temperature control subsystem, 124 is the edge fusion aggregation gateway, 125 is the standardized docking and interaction unit, 130 is the cloud intelligent operation and maintenance management platform, and 140 is the process equipment. Detailed Implementation

[0025] The technical solution of the present invention will be clearly and completely described below with reference to the embodiments. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present invention.

[0026] Example: Deployment of FAB (Fab-Apartment) in a 12-inch semiconductor wafer fab 1. Deployment and Configuration One edge convergence gateway was installed in the auxiliary computer room on the F1 floor of the factory building. Environmental safety monitoring points were set up: 30 toxic gas detectors, 50 smoke detectors, 20 differential pressure sensors, and 15 flame detectors. The equipment remote operation and maintenance subsystem is connected to: 20 vacuum pumps, 5 sets of exhaust gas treatment devices, and 4 cooling water units; Process piping temperature control subsystem connection: 60 temperature sensors are attached to the outer wall of the pipe, 40 resistance wire heaters are attached to the outer wall of the pipe, and each resistance wire heater is equipped with an independent hardware temperature switch attached to the outer wall of the pipe. A total of 8 standardized docking and interaction units are set up, and each unit is connected to the 8 base integration systems on the F2 layer through pre-embedded cables; Each base integration system in layer F2 is integrated into the bottom of the anti-vibration base of the process equipment, including a quick-connect female connector that matches the standardized docking and interaction unit, a pneumatic diaphragm valve, a mass flow controller, a pressure regulating valve, and a valve group controller; the base integration system is connected to the process equipment through prefabricated pipes and cables; During docking, insert the combination plug of the standardized docking interaction unit into the quick-connect female socket of the base integration system, lock it in to complete the physical connection. The edge fusion aggregation gateway automatically detects the new device and assigns a communication address, automatically identifies the type of the base integration system, and establishes a master-slave communication relationship. The whole process takes ≤3 seconds.

[0027] 2. Operating Condition 1: Pipeline temperature is lower than the set value A process pipeline is set to a temperature of 35℃. A temperature sensor measures the current pipeline wall temperature at 32℃, which is below the lower limit of the set value. The edge fusion and aggregation gateway determines that heating is needed and automatically sends a command to start the resistance wire heater. After 60 seconds of heating, the pipeline wall temperature rises to 35℃. The edge fusion and aggregation gateway determines that the set value has been reached and automatically stops heating, with the entire process controlled locally.

[0028] 3. Operating Condition Two: Heater Failure The pipe wall temperature remained below 32°C, and the resistance wire heater, despite operating continuously for 300 seconds, failed to raise the temperature to 35°C. The edge fusion aggregation gateway determined that the heater was faulty, pushed an alert to the cloud-based intelligent operation and maintenance management platform, recorded the abnormal temperature curve, and simultaneously marked the heater as faulty in the equipment remote operation and maintenance subsystem.

[0029] 4. Operating Condition 3: Equipment Malfunction If the vibration amplitude of a vacuum pump exceeds the set threshold, the edge fusion aggregation gateway will determine that the equipment is malfunctioning, immediately trigger an audible and visual alarm, lock the operating parameters of the vacuum pump and save the vibration waveform data, push the maintenance work order to the cloud-based intelligent maintenance management platform, and automatically reduce the operating frequency of the vacuum pump. The aforementioned vibration threshold, current threshold, and equipment temperature threshold are preset by the administrator based on the equipment nameplate parameters or historical operating data and stored in the linkage strategy library of the edge fusion and aggregation gateway; the administrator can remotely modify the above thresholds through the cloud-based intelligent operation and maintenance management platform.

[0030] 5. Operating Condition 4: Safety Risk Linkage A Cl2 gas leak occurred in a certain area, and the concentration exceeded the alarm threshold. The environmental safety monitoring subsystem detected the leak within 60ms and uploaded the data to the edge fusion aggregation gateway. The edge fusion aggregation gateway immediately triggered the highest priority linkage and performed the following actions simultaneously: activated the on-site audible and visual alarm, cut off the power supply to the corresponding pipeline resistance wire heater through the hardware safety relay, urgently cut off the pneumatic valve of the gas supply pipeline, issued a command to the valve group controller of the base integrated system to close the equipment isolation valve in the process valve group, started the exhaust fan, pushed the level 3 alarm to the central control room and the safety officer's mobile phone, and triggered the fire linkage interface. From gas detection to the physical disconnection of the resistance wire heater power supply, it takes 120ms. During this time, even if the edge fusion aggregation gateway software crashes or the network is interrupted, the resistance wire heater power supply circuit has been disconnected by the hardware safety relay, and the power supply will not be restored. The valve group controller of the base integrated system transmits the valve group status, pressure value, and flow value back to the edge fusion aggregation gateway in real time. The edge fusion aggregation gateway judges the execution effect and ensures that the medium has been reliably cut off.

[0031] 6. Cloud-based management All operational data is uploaded to the cloud-based intelligent operation and maintenance management platform via the edge convergence gateway. Managers can remotely view real-time data, modify alarm thresholds, modify pipeline temperature setpoints, remotely force stop heating, query historical data, and dispatch work orders through the cloud-based intelligent operation and maintenance management platform.

[0032] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. An intelligent operation and maintenance system for semiconductor plants, comprising an environmental safety monitoring subsystem, a remote equipment operation and maintenance subsystem, a process pipeline temperature control subsystem, and a cloud-based intelligent operation and maintenance management platform, characterized in that, Also includes: Edge convergence gateway and standardized interface interaction unit; The edge fusion and aggregation gateway is connected to the environmental safety monitoring subsystem, the equipment remote operation and maintenance subsystem, and the process pipeline temperature control subsystem via a star topology, and is connected to the peripheral port of the edge fusion and aggregation gateway via at least one of RS485 interface, Ethernet interface or analog interface. One end of the standardized docking and interaction unit is connected to the edge fusion and aggregation gateway, and the other end is used for pluggable connection to the base integration system on the second floor of the semiconductor plant. The cloud-based intelligent operation and maintenance management platform is remotely connected to the edge convergence gateway. The standardized docking and interaction unit is a three-in-one combination interface that includes a signal communication docking terminal, a control power supply docking terminal, and a process media adapter docking terminal. It adopts a quick-plug mechanical locking structure and has an anti-misplugging design and a sealed dustproof structure. The edge fusion aggregation gateway has a built-in data caching unit, timing synchronization unit, linkage logic operation unit and protocol conversion unit. The onboard circuits of each functional unit are directly connected, and multi-layer shielded PCB wiring is adopted. Ground wires are arranged on both sides of the key signal lines. The edge fusion aggregation gateway has a built-in linkage strategy library. The priority of linkage actions, from high to low, is as follows: security linkage, equipment linkage, and pipeline temperature control linkage. When the environmental safety monitoring subsystem detects a gas leak, smoke, or flame, the edge fusion convergence gateway sends a command to the hardware safety relay of the process pipeline temperature control subsystem to physically cut off the power supply to the heating execution unit, and sends a media cut-off command to the base integration system through the standardized docking interaction unit.

2. The intelligent operation and maintenance system for semiconductor plants according to claim 1, characterized in that, The environmental safety monitoring subsystem adopts a distributed point deployment, with sensor terminals connected to the nearest regional aggregation node to collect environmental safety parameters of the factory production area and achieve on-site early warning.

3. The intelligent operation and maintenance system for semiconductor plants according to claim 1, characterized in that, The remote operation and maintenance subsystem connects to the plant's supporting auxiliary equipment via fieldbus to collect equipment operating condition data and enable remote parameter adjustment.

4. The intelligent operation and maintenance system for semiconductor plants according to claim 1, characterized in that, The process pipeline temperature control subsystem includes a temperature acquisition unit, a temperature control execution unit, and an independent hardware temperature switch. The temperature acquisition unit is a temperature sensor attached to the outer wall of the pipeline. The temperature control execution unit is a resistance wire heater wrapped around or attached to the outer wall of the pipeline, and the heating power is adjusted by a solid-state relay. The independent hardware temperature switch is attached to the outer wall of the pipeline and automatically cuts off the heating power without relying on software when the temperature exceeds the limit.

5. The intelligent operation and maintenance system for semiconductor plants according to claim 1, characterized in that, The edge fusion and aggregation gateway and the cloud-based intelligent operation and maintenance management platform adopt an independent networking and physical isolation design, and the communication between the two adopts an encrypted transmission protocol; the environmental safety monitoring subsystem, the equipment remote operation and maintenance subsystem, and the process pipeline temperature control subsystem adopt independent power supply, wherein the heating circuit and control circuit power supply of the process pipeline temperature control subsystem are physically isolated, and the spacing between the signal line and the power line is ≥300mm.

6. The intelligent operation and maintenance system for semiconductor plants according to claim 1, characterized in that, The local decision response time of the edge fusion aggregation gateway is ≤500ms, and the response time from the detection of gas leak, smoke or flame by the environmental safety monitoring subsystem to the physical cut-off of the power supply of the heating execution unit by the hardware safety relay is ≤500ms.

7. A method for intelligent operation and maintenance control of semiconductor plants, characterized in that, The intelligent operation and maintenance system applied to any one of claims 1 to 6 includes the following steps: Step 1: The environmental safety monitoring subsystem, the equipment remote operation and maintenance subsystem, and the process pipeline temperature control subsystem synchronously collect on-site operating condition data according to hierarchical and graded collection priorities. After filtering and noise reduction, the data is uploaded to the edge fusion and aggregation gateway. The hierarchical and graded collection priorities are: safety data collection period ≤ 100ms, equipment data collection period ≤ 500ms, and pipeline temperature control data collection period ≤ 1000ms. Step 2: The edge fusion and aggregation gateway performs unified parsing, time-series synchronization and fusion regularization on multi-source heterogeneous data, removes outliers, forms an integrated operation and maintenance dataset, and generates operation condition evaluation results in combination with the preset operation condition model; Step 3: The edge fusion and aggregation gateway, combined with its built-in linkage strategy, completes intelligent judgment of on-site working conditions: When the pipe wall temperature is within the set range, it maintains the current state; when the pipe wall temperature is below the set lower limit, it starts the resistance wire heater; when the pipe wall temperature reaches the set value, it stops the resistance wire heater; when the pipe wall temperature is below the set lower limit and the heater cannot reach the set value after continuous operation for more than the set threshold, it determines a heater fault and sends an early warning; when the vibration amplitude, current value, or equipment temperature exceeds the set threshold, it triggers an audible and visual alarm, locks fault data, and sends a maintenance work order; when the gas concentration, smoke concentration, or flame signal exceeds the alarm threshold, it triggers the highest priority linkage action. Step 4: The edge fusion and aggregation gateway completes the docking and adaptation with the base integration system through the standardized docking and interaction unit, establishes master-slave interactive control logic, issues collaborative control commands, links the process valve group to complete the collaborative adjustment of operating conditions, receives the status feedback from the execution end and completes parameter correction, forming a two-way closed loop. Step 5: The edge convergence gateway will synchronously upload the converged operation data and event information to the cloud-based intelligent operation and maintenance management platform; when the network is interrupted, the system will automatically switch to local independent operation mode, and automatically synchronize local data to the cloud after the network is restored.

8. The intelligent operation and maintenance control method for semiconductor plants according to claim 7, characterized in that, The highest priority linkage action includes: synchronously pushing early warning signals, restricting or cutting off the operation of related equipment in the risk area, cutting off the process medium supply in the risk area, issuing instructions to the hardware safety relay of the process pipeline temperature control subsystem to physically cut off the power supply of the heating execution unit, and issuing locking adjustment instructions to the base integrated system to control the valve group on / off and medium delivery parameters until the risk is eliminated; wherein, the heating power-off instruction is executed through the hardware safety relay and does not depend on software.

9. The intelligent operation and maintenance control method for semiconductor plants according to claim 7, characterized in that, In step three, the local decision response time of the edge fusion aggregation gateway is ≤500ms, and the response time from when the gas concentration, smoke concentration or flame signal exceeds the alarm threshold to when the heating power-off command is executed is ≤500ms.

10. The intelligent operation and maintenance control method for semiconductor plants according to claim 7, characterized in that, In step four, the bidirectional closed-loop control circuit includes four stages: command issuance, action execution, status feedback, and parameter correction, until the execution effect meets the preset working condition requirements.

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