A method, apparatus, equipment, medium, and product for scheduling robotic arms.

Abstract

This invention discloses a robotic arm scheduling method, apparatus, device, medium, and product. The robotic arm scheduling method includes: for each process step in the process sequence corresponding to a wafer transfer task, obtaining robotic arm priority configuration information for that process step; reading the identifier of a first-priority robotic arm from the priority configuration information and obtaining its working state; when the first-priority robotic arm is in an idle state, controlling it to execute the transfer action corresponding to the process step; when the first-priority robotic arm is not in an idle state, obtaining the working states of candidate robotic arms associated with the process step, and selecting a target robotic arm from among the candidate robotic arms to execute the transfer action corresponding to the process step based on the working states of the candidate robotic arms. The technical solution of this invention enables flexible robotic arm scheduling, avoiding waiting.

Description

Technical Field

[0001] This invention relates to the field of semiconductor technology, and in particular to a robotic arm scheduling method, apparatus, equipment, medium, and product. Background Technology

[0002] In the semiconductor manufacturing process, wafers need to be transferred efficiently between different process modules. As a core handling device, the scheduling efficiency of robotic arms directly affects the overall equipment utilization and production efficiency.

[0003] A typical wafer transport system usually consists of multiple robotic arms, such as a front-end module arm and a transport module arm, which are responsible for transporting wafers between wafer cassettes and loading ports, and between loading ports and process modules, respectively. Existing solutions often use fixed assignments or simple idle checks for robotic arm scheduling, which can easily lead to waiting due to rigid scheduling rules, resulting in insufficient equipment utilization to meet demand. Summary of the Invention

[0004] This invention provides a robotic arm scheduling method, apparatus, equipment, medium, and product to solve the problem of insufficient equipment utilization caused by waiting due to rigid robotic arm scheduling rules.

[0005] According to one aspect of the present invention, a robotic arm scheduling method is provided, comprising: For each process step in the process sequence corresponding to the wafer transfer task, obtain the robotic arm priority configuration information for that process step; Read the identifier of the first priority robotic arm in the robotic arm priority configuration information, and obtain the working status of the first priority robotic arm; When the first priority robotic arm is in an idle state, control the first priority robotic arm to perform the transmission action corresponding to the process step. When the working state of the first priority robotic arm is not idle, the working state of the candidate robotic arms associated with the process step is obtained, and according to the working state of the candidate robotic arms, the target robotic arm is selected from the candidate robotic arms to perform the transfer action corresponding to the process step.

[0006] According to another aspect of the present invention, a robotic arm scheduling device is provided, comprising: The configuration information acquisition module is used to acquire the robotic arm priority configuration information for each process step in the process program corresponding to the wafer transfer task. The working status acquisition module is used to read the identifier of the first priority robot arm in the robot arm priority configuration information and acquire the working status of the first priority robot arm. The first action execution module is used to control the first priority robotic arm to perform the transmission action corresponding to the process step when the working state of the first priority robotic arm is idle. The second action execution module is used to obtain the working status of candidate robotic arms associated with the process step when the working state of the first priority robotic arm is not idle, and select a target robotic arm from the candidate robotic arms to perform the transmission action corresponding to the process step based on the working status of the candidate robotic arms.

[0007] According to another aspect of the present invention, an electronic device is provided, the electronic device comprising: At least one processor; and A memory communicatively connected to the at least one processor; wherein, The memory stores a computer program that can be executed by the at least one processor, which enables the at least one processor to perform the robotic arm scheduling method according to any embodiment of the present invention.

[0008] According to another aspect of the present invention, a computer-readable storage medium is provided, the computer-readable storage medium storing computer instructions for causing a processor to execute and implement the robotic arm scheduling method according to any embodiment of the present invention.

[0009] According to another aspect of the present invention, a computer program product is provided, including a computer program that, when executed by a processor, implements the robotic arm scheduling method of any embodiment of the present disclosure.

[0010] The technical solution of this invention, for each process step in the process sequence corresponding to the wafer transfer task, obtains the robot priority configuration information of the process step, then reads the identifier of the first priority robot arm in the robot priority configuration information, and obtains the working state of the first priority robot arm. When the working state of the first priority robot arm is idle, it controls the first priority robot arm to execute the transfer action corresponding to the process step. When the working state of the first priority robot arm is not idle, it obtains the working state of the candidate robot arms associated with the process step, and selects the target robot arm from the candidate robot arms to execute the transfer action corresponding to the process step according to the working state of the candidate robot arms. By configuring a corresponding first priority robot arm for each process step, the first priority robot arm is used first to execute the transfer action. And when the first priority robot arm is not idle, other robot arms are selected from the associated candidate robot arms to execute the transfer action. On the one hand, the robot arm with the highest matching degree with the current process step can be used first to execute the step, meeting the special needs of different process steps. On the other hand, when the first priority robot arm is not idle, other robot arms are selected to execute the step, avoiding waiting and improving the utilization rate of the robot arms.

[0011] It should be understood that the description in this section is not intended to identify key or essential features of the embodiments of the present invention, nor is it intended to limit the scope of the invention. Other features of the invention will become readily apparent from the following description. Attached Figure Description

[0012] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0013] Figure 1 This is a flowchart of a robotic arm scheduling method provided in Embodiment 1 of the present invention; Figure 2a This is a flowchart of a robotic arm scheduling method provided in Embodiment 2 of the present invention; Figure 2b This is a flowchart of the robotic arm scheduling method provided in Embodiment 2 of the present invention; Figure 3 This is a flowchart of a robotic arm scheduling method provided in Embodiment 3 of the present invention; Figure 4 This is a schematic diagram of the structure of a robotic arm scheduling device according to Embodiment 4 of the present invention; Figure 5This is a schematic diagram of the structure of an electronic device that implements the robotic arm scheduling method of this invention. Detailed Implementation

[0014] To enable those skilled in the art to better understand the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of the present invention.

[0015] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this invention are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of the invention described herein can be implemented in orders other than those illustrated or described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover a non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0016] Example 1 Figure 1 This invention provides a flowchart of a robotic arm scheduling method according to Embodiment 1. This embodiment is applicable to situations where a robotic arm selection mechanism based on step-level presets and state determination is used to execute wafer transfer tasks. This method can be executed by a robotic arm scheduling device, which can be implemented in hardware and / or software. This robotic arm scheduling device can be configured in various general-purpose computing devices; for example, a general-purpose computing device can be used as a scheduling and control device for the robotic arm. Figure 1 As shown, the method includes: S110. For each process step in the process sequence corresponding to the wafer transfer task, obtain the robotic arm priority configuration information for the process step.

[0017] A wafer transfer task is a task unit in semiconductor manufacturing that moves a wafer from one process location to another. A complete wafer transfer task can be broken down into multiple sequentially executed process steps. Therefore, to complete a wafer transfer task, a set of multiple process steps with a sequential order can be pre-programmed to form a process sequence. For example, a process sequence may include multiple process steps such as picking up a wafer from the wafer cassette and transferring it to the aligner, transferring it from the aligner to the process module, and picking up a wafer from the process module and placing it back into the wafer cassette.

[0018] Robotic arm priority configuration information is pre-defined configuration data for robotic arm scheduling for each process step. The robotic arm priority configuration information includes at least the identifier of the first-priority robotic arm configured for the corresponding process step; the first-priority robotic arm is the preferred robotic arm when executing the corresponding process step. The robotic arm priority configuration information can be pre-determined based on the robotic arm's execution path for the current process step, historical operating data, and historical maintenance data, and stored in a configuration database.

[0019] In this embodiment of the invention, during the execution of the wafer transfer task, each process step in the process sequence is read sequentially. For each process step in the process sequence, the robot priority configuration information associated with the process step is first obtained. Specifically, based on the identifier of the process step, the robot priority configuration information corresponding to the identifier can be read from the configuration database to provide priority data for robot scheduling during the execution of the process step.

[0020] S120: Read the identifier of the first priority robot arm in the robot arm priority configuration information and obtain the working status of the first priority robot arm. If the working status of the first priority robot arm is idle, execute S130. If the working status of the first priority robot arm is not idle, execute S140.

[0021] The working state is used to indicate the robot arm's ability to perform tasks at the current moment. The working state can include idle state and non-idle state. The non-idle state can include the robot arm performing a task, being in an alarm state, being in a maintenance state, or being temporarily unable to perform a new task for other reasons.

[0022] In this embodiment of the invention, the robot arm priority configuration information is read to summarize the identifier of the first priority robot arm. Then, based on the identifier of the first priority robot arm, a status query command is sent to the robot arm corresponding to the identifier through a real-time communication interface, or the working status of the first priority robot arm is read from shared memory. The working status includes idle status and non-idle status. The non-idle status may include the robot arm performing a task, being in an alarm state, being in a maintenance state, or being temporarily unable to perform a new task for other reasons.

[0023] S130, Control the first priority robotic arm to execute the transmission action corresponding to the process step.

[0024] The transfer action is a series of specific actions that the robotic arm needs to perform to complete the current process step. For example, the end effector of the robotic arm moves to the wafer pick-up position, picks up the wafer, moves to the wafer placement position, releases the wafer, and returns to the reference docking position.

[0025] In this embodiment of the invention, when the working state of the first priority robotic arm is idle, the motion parameters corresponding to the current process step are obtained, and the motion parameters are encapsulated into an execution instruction and sent to the first priority robotic arm to control the first priority robotic arm to execute the transmission action corresponding to the current process step.

[0026] S140. Obtain the working status of the candidate robotic arms associated with the process step, and select the target robotic arm from the candidate robotic arms to perform the transfer action corresponding to the process step based on the working status of the candidate robotic arms.

[0027] Candidate robotic arms are a collection of robotic arms that have the physical ability to perform the current process step. The collection of candidate robotic arms can be pre-configured in the attribute information of the process step.

[0028] In this embodiment of the invention, based on preset attribute information of the current process step, the identifiers of other candidate robotic arms (excluding the first-priority robotic arm) are obtained, and the working status of the candidate robotic arms is queried in parallel or sequentially. If at least one candidate robotic arm is in an idle state, a random candidate robotic arm in the idle state is selected as the target robotic arm to perform the transmission action corresponding to the process step. Alternatively, the target robotic arm can be determined from the candidate robotic arms in the idle state according to a preset secondary priority selection rule.

[0029] The technical solution of this invention, for each process step in the process sequence corresponding to the wafer transfer task, obtains the robot priority configuration information of the process step, then reads the identifier of the first priority robot arm in the robot priority configuration information, and obtains the working state of the first priority robot arm. When the working state of the first priority robot arm is idle, it controls the first priority robot arm to execute the transfer action corresponding to the process step. When the working state of the first priority robot arm is not idle, it obtains the working state of the candidate robot arms associated with the process step, and selects the target robot arm from the candidate robot arms to execute the transfer action corresponding to the process step according to the working state of the candidate robot arms. By configuring a corresponding first priority robot arm for each process step, the first priority robot arm is used first to execute the transfer action. And when the first priority robot arm is not idle, other robot arms are selected from the associated candidate robot arms to execute the transfer action. On the one hand, the robot arm with the highest matching degree with the current process step can be used first to execute the step, which can meet the special or preferred requirements of different process steps. On the other hand, when the first priority robot arm is not idle, other robot arms are selected to execute the step, avoiding waiting and improving the utilization rate of the robot arms.

[0030] Example 2 Figure 2aThis is a flowchart of a robotic arm scheduling method provided in Embodiment 2 of the present invention. This embodiment further refines the above embodiment, providing specific steps for obtaining the working status of candidate robotic arms associated with process steps, selecting a target robotic arm from among the candidate robotic arms to perform the transfer action corresponding to the process step based on the working status of the candidate robotic arms, and specific steps before obtaining the robotic arm priority configuration information for each process step in the process sequence corresponding to the wafer transfer task. For example... Figure 2a As shown, the method includes: S210. Sequentially obtain one process step from the process sequence corresponding to the wafer transfer task as the current process step, and obtain at least two candidate robotic arms associated with the current process step.

[0031] In this embodiment of the invention, a process step from the sequence of processes corresponding to the wafer transfer task is sequentially obtained as the current process step. Then, at least two candidate robotic arms associated with the current process step can be obtained from its attribute information. Furthermore, candidate robotic arms capable of covering both the transfer start position and the transfer target position of the current process step can be determined.

[0032] S220. For each candidate robotic arm, determine the compatibility between the candidate robotic arm and the current process step based on at least one of the following: the step execution path of the candidate robotic arm, historical operation data, and historical maintenance data.

[0033] Fit is a quantitative metric used to measure the degree of fit between a candidate robotic arm and the current process step. A higher fit indicates that the candidate robotic arm is superior in that process step. The fit between each candidate robotic arm and the current process step is associated with at least one of the following: the step execution path of the candidate robotic arm when performing the current process step, the candidate robotic arm's historical operating data, and historical maintenance data.

[0034] The step execution path is the physical trajectory that the candidate robot arm needs to move to execute the current process step. The shorter the step execution path, the higher the adaptability of the candidate robot arm to the current process step. Historical operation data is the operation record of the candidate robot arm in a historical time period, including total working time and total idle time. The total time is obtained by calculating the sum of the total working time and the total idle time. The percentage of the total working time in the total time is used as the robot arm idle rate as a characterization index. The higher the idle rate, the lighter the load of the candidate robot arm and the higher the adaptability. Historical maintenance data includes the historical maintenance records of the candidate robot arm. The higher the maintenance frequency, the worse the reliability or health status of the candidate robot arm and the lower the adaptability.

[0035] In this embodiment of the invention, the fit between a candidate robotic arm and the current process step can be determined based on at least one of the candidate robotic arm's execution path, historical operating data, and historical maintenance data. Specifically, the theoretical travel distance of the end effector can be determined based on the execution path of the candidate robotic arm when executing the current process step, and mapped to a path fit score according to a preset mapping function, such as a linear inverse proportional function or a piecewise function, wherein the path fit score and the theoretical travel distance are negatively correlated; the idle rate of the candidate robotic arm within a set historical period is calculated based on the candidate robotic arm's historical operating data, and mapped to a performance fit score according to a set function, wherein the performance fit score and the idle rate are positively correlated; the maintenance frequency of the candidate robotic arm within the same historical period is determined based on the candidate robotic arm's historical maintenance data, and mapped to a maintenance fit score according to a preset mapping function, wherein the maintenance fit score and the maintenance frequency are negatively correlated.

[0036] Ultimately, based on actual production needs, a comprehensive score can be determined using at least one of the aforementioned path adaptation score, performance adaptation score, and maintenance adaptation score. This comprehensive score serves as the adaptation degree between the candidate robotic arm and the current process step. By transforming the step execution path, historical operation data, and historical maintenance data into quantitative indicators of the robotic arm's adaptation to the current process step, subjective experience is transformed into objective quantification. Furthermore, by flexibly selecting evaluation dimensions, the adaptation requirements of different production scenarios can be adapted, improving the accuracy and precision of robotic arm scheduling decisions.

[0037] In addition, the candidate robotic arm's execution path, historical operation data, and historical maintenance data can be directly displayed through the interface, and the process engineer can submit the degree of compatibility with the current process steps based on the displayed information.

[0038] Optionally, before obtaining the robotic arm priority configuration information for each process step in the process sequence corresponding to the wafer transfer task, the method further includes: Based on the current process step's transmission start position and transmission target position, determine the step execution path for each candidate robotic arm, and calculate the theoretical distance the end effector of the candidate robotic arm moves from the reference docking position in the step execution path to the transmission start position, and from the transmission start position to the transmission target position. Based on the theoretical distance, determine the path adaptation score. Historical operation data of each candidate robotic arm is obtained, and the ratio of the total idle time to the total running time of each candidate robotic arm within a set historical time period is calculated as the robotic arm idle rate. Based on the robotic arm idle rate, the performance adaptation score is determined. Based on the historical maintenance data of each candidate robotic arm, the maintenance frequency of each candidate robotic arm within a set historical time period is calculated, and the maintenance adaptation score is determined based on the maintenance frequency. For each candidate robotic arm, the suitability of the candidate robotic arm to the current process step is determined based on at least one of the candidate robotic arm's step execution path, historical operation data, and historical maintenance data, including: The fit of each candidate robotic arm with the current process step is determined based on at least one of the path fit score, performance fit score, and maintenance fit score.

[0039] In this optional embodiment, the specific steps before obtaining the robotic arm priority configuration information for each process step in the process sequence corresponding to the wafer transfer task are defined as follows: First, based on the transfer start position and transfer target position of the current process step, the step execution path of each candidate robotic arm is determined. The step execution path is the path from the reference docking position in the step execution path to the transfer start position, and from the transfer start position to the transfer target position. Then, the theoretical movement distance of the candidate robotic arm's end effector from the reference docking position in the step execution path to the transfer start position, and from the transfer start position to the transfer target position is calculated, and a path adaptation score is determined based on the theoretical movement distance. Specifically, a preset piecewise function can be used to map the theoretical movement record to a distance interval defined by the piecewise function, and then the score corresponding to this distance interval is determined as the path adaptation score.

[0040] Historical operational data for each candidate robotic arm is acquired, and the ratio of the total idle time to the total runtime (the sum of the total working time and the total idle time within the set historical time period) of each candidate robotic arm is calculated as the robotic arm idle rate. Based on the robotic arm idle rate, a performance adaptation score is calculated using a defined mapping function, for example, a linear function of the idle rate as the independent variable.

[0041] Obtain historical maintenance data for each candidate robotic arm, calculate the maintenance frequency for each candidate robotic arm within a set historical time period, and calculate the maintenance adaptation score based on the maintenance frequency using a set mapping function.

[0042] Adaptively, a specific method is provided for determining the suitability of each candidate robotic arm with the current process step based on at least one of the candidate robotic arm's execution path, historical operation data, and historical maintenance data. This method calculates the suitability based on at least one of path suitability score, performance suitability score, and maintenance suitability score. For example, when considering only one of these factors, only the suitability score corresponding to that factor is determined as the suitability. When considering two or more factors, the suitability scores of the considered factors are weighted and summed to determine the suitability of each candidate robotic arm with the current process step. Through suitability calculation, the robotic arm with the highest suitability for each process step can be objectively and flexibly selected as the first priority robotic arm, providing a high-quality decision-making basis for subsequent priority-guided scheduling.

[0043] Optionally, for each candidate robotic arm, the suitability of the candidate robotic arm to the current process step is determined based on at least one of the candidate robotic arm's step execution path, historical operation data, and historical maintenance data, including: Based on the current process step's transmission start position and transmission target position, determine the step execution path for each candidate robot arm, and calculate the theoretical distance the end effector of the candidate robot arm moves from the reference docking position in the step execution path to the transmission start position, and from the transmission start position to the transmission target position. Based on the theoretical distance, determine the path adaptation score. Obtain historical operation data for each candidate robotic arm, calculate the ratio of the total idle time to the total running time of each candidate robotic arm within a set historical time period as the robotic arm idle rate, and determine the performance adaptation score based on the robotic arm idle rate. Based on the historical maintenance data of each candidate robotic arm, the maintenance frequency of each candidate robotic arm within a set historical time period is calculated, and the maintenance adaptation score is determined based on the maintenance frequency. Based on the path adaptation score, performance adaptation score, and maintenance adaptation score, the degree of adaptation of each candidate robotic arm to the current process step is determined.

[0044] In this optional embodiment, a specific method is provided for determining the fit between a candidate robotic arm and the current process step based on at least one of the candidate robotic arm's step execution path, historical operation data, and historical maintenance data: First, based on the transmission start position and transmission target position of the current process step, the step execution path of each candidate robotic arm is determined. The step execution path is the path along which the end effector of the candidate robotic arm moves from a reference docking position in the step execution path to the transmission start position, and from the transmission start position to the transmission target position. Then, the theoretical movement distance of the end effector of the candidate robotic arm from the reference docking position in the step execution path to the transmission start position, and from the transmission start position to the transmission target position is calculated, and a path fit score is determined based on the theoretical movement distance. Specifically, a preset piecewise function can be used to map the theoretical movement records to a distance interval defined by the piecewise function, and then the score corresponding to this distance interval is determined as the path fit score.

[0045] Historical operational data for each candidate robotic arm is acquired, and the ratio of the total idle time to the total runtime (the sum of the total working time and the total idle time within the set historical time period) of each candidate robotic arm is calculated as the robotic arm idle rate. Based on the robotic arm idle rate, a performance adaptation score is calculated using a defined mapping function, for example, a linear function of the idle rate as the independent variable.

[0046] Obtain historical maintenance data for each candidate robotic arm, calculate the maintenance frequency for each candidate robotic arm within a set historical time period, and calculate the maintenance adaptation score based on the maintenance frequency using a set mapping function.

[0047] Finally, the path adaptation score, performance adaptation score, and maintenance adaptation score are weighted and summed to determine the adaptation degree of each candidate robot arm to the current process step. Through adaptation degree calculation, the robot arm with the highest adaptation degree can be objectively and flexibly selected as the first priority robot arm for each process step, providing a high-quality decision-making basis for subsequent priority-guided scheduling.

[0048] S230. Based on the adaptability, determine the first priority robot arm associated with the current process step from the candidate robot arms, and store the identifier of the first priority robot arm in the robot arm priority configuration information associated with the current process step.

[0049] In this embodiment of the invention, the candidate robotic arm list is traversed to determine the target robotic arm with the highest compatibility with the current process step. This target robotic arm is then designated as the first priority robotic arm associated with the current process step, and its identifier is stored in the robotic arm priority configuration information associated with the current process step. Furthermore, if multiple candidate robotic arms have the same highest compatibility, a target robotic arm can be selected according to preset rules; for example, the robotic arm with the smaller identifier number can be selected as the target robotic arm.

[0050] S240. For each process step in the process sequence corresponding to the wafer transfer task, obtain the robotic arm priority configuration information for the process step.

[0051] S250: Read the identifier of the first priority robot arm in the robot arm priority configuration information and obtain the working status of the first priority robot arm. If the working status of the first priority robot arm is idle, execute S260. If the working status of the first priority robot arm is not idle, execute S270.

[0052] S260, Control the first priority robotic arm to execute the transmission action corresponding to the process step.

[0053] S270. Obtain the working status of candidate robotic arms associated with the process step. If the working status of at least one candidate robotic arm is idle, extract the priority of the candidate robotic arm in the idle state from the robotic arm priority configuration information.

[0054] The robot arm priority configuration information for each process step may also include the identifiers of other candidate robot arms besides the first priority robot arm identifier, as well as the priority of each candidate robot arm.

[0055] In this embodiment of the invention, if at least one candidate robot arm among the candidate robot arms associated with the process step is in an idle state, the priority of the idle candidate robot arm can be extracted from the robot arm priority configuration information to facilitate the subsequent determination of the target candidate robot arm for performing the transmission operation.

[0056] S280. Based on priority, select the target robotic arm from the candidate robotic arms in the idle state to perform the transfer action corresponding to the process step.

[0057] In this embodiment of the invention, the robotic arm scheduling process is as follows: Figure 2bAs shown, when the first-priority robotic arm is not idle, the working states of candidate robotic arms associated with the process step are acquired. If at least one candidate robotic arm is idle, the target robotic arm is selected from the idle candidate robotic arms to execute the transfer action corresponding to the process step. Specifically, the target robotic arm can be determined from the idle candidate robotic arms according to a pre-set priority, and the transfer action corresponding to the process step can be executed. For example, the highest-priority candidate robotic arm can be selected from the idle candidate robotic arms to execute the transfer action. When the first-priority robotic arm is not idle, other candidate robotic arms that can execute the current process step are acquired, which can reduce the waiting caused by rigid scheduling rules and avoid process blockage caused by waiting.

[0058] Optionally, if all candidate robotic arms are in a non-idle state, return to the operation of obtaining the working state of the first priority robotic arm until the transfer action corresponding to the process step is completed.

[0059] In this embodiment of the invention, when all candidate robotic arms are in a non-idle state, the system enters a waiting queue or triggers a busy alarm, and then returns to retrieve the working status of the first priority robotic arm until the transmission action corresponding to the process step is completed, before proceeding to the next process step. When a candidate robotic arm is not idle, it automatically waits for resource release and continues execution through cyclic monitoring, without manual intervention. Furthermore, the system prioritizes monitoring the working status of the first priority robotic arm in each cycle, and immediately uses it once it returns to an idle state, ensuring optimal scheduling of the priority robotic arms.

[0060] The technical solution of this invention involves sequentially obtaining a process step from the process sequence corresponding to the wafer transfer task as the current process step, and obtaining at least two candidate robotic arms associated with the current process step. For each candidate robotic arm, the adaptability between the candidate robotic arm and the current process step is determined based on at least one of the candidate robotic arm's step execution path, historical operation data, and historical maintenance data. Based on the adaptability, a first priority robotic arm associated with the current process step is determined from the candidate robotic arms, and the identifier of the first priority robotic arm is stored in the robotic arm priority configuration information associated with the current process step. By converting the step execution path, historical operation data, and historical maintenance data into quantitative indicators of the adaptability between the robotic arm and the current process step, subjective experience is transformed into objective quantification. Furthermore, by flexibly selecting evaluation dimensions, it can adapt to the adaptation needs of different production scenarios, thereby improving the accuracy and refinement of robotic arm scheduling decisions.

[0061] Example 3 Figure 3This is a flowchart of a robotic arm scheduling method provided in Embodiment 3 of the present invention. This embodiment further refines the above embodiments, providing specific steps for obtaining the working state of a first-priority robotic arm, and specific steps after selecting a target robotic arm from among the candidate robotic arms to execute the transmission action corresponding to the process step. For example... Figure 3 As shown, the method includes: S310. For each process step in the process sequence corresponding to the wafer transfer task, obtain the robotic arm priority configuration information for the process step.

[0062] S320. Read the identifier of the first priority robot arm in the robot arm priority configuration information and obtain the current status of the first priority robot arm. If the current status of the first priority robot arm is at least one of working status, alarm status or maintenance status, start the timer.

[0063] In this embodiment of the invention, after obtaining the robot arm priority configuration information for the current process step, the identifier of the first priority robot arm is first read. Then, based on the identifier, a status query command is sent to the robot arm corresponding to the identifier via a real-time communication interface, or the periodically updated status data of the status monitoring model is directly obtained from shared memory. If the current status of the first priority robot arm is at least one of the following: working status, alarm status, or maintenance status, a timer is started, and a brief continuous monitoring phase begins.

[0064] S330. If the first priority robot arm does not return to the idle state within the preset time, determine that the working state of the first priority robot arm is non-idle. If the working state of the first priority robot arm is idle, execute S340. If the working state of the first priority robot arm is non-idle, execute S350.

[0065] In this embodiment of the invention, the working status of the first priority robotic arm is periodically acquired within a preset time period. If the idle state is not restored within the preset time period, the working status of the first priority robotic arm is determined to be non-idle. By introducing a waiting mechanism, unnecessary robotic arm downgrade scheduling can be reduced.

[0066] S340. When the working state of the first priority robotic arm is idle, control the first priority robotic arm to execute the transmission action corresponding to the process step.

[0067] S350: When the working state of the first priority robot arm is not idle, obtain the working state of the candidate robot arms associated with the process step, and select the target robot arm from the candidate robot arms to perform the transfer action corresponding to the process step according to the working state of the candidate robot arms.

[0068] Optionally, embodiments of the present invention further include: If a minor, recoverable alarm is detected in the first priority robotic arm of the target process step, the process step that uses the robotic arm corresponding to the first priority robotic arm as the process step to be adjusted is determined in the process steps after the target process step in the process sequence, based on the identifier of the first priority robotic arm. During the execution of this wafer transfer task, the identifier of the first priority robotic arm in the priority configuration information of the robotic arm corresponding to the process step to be adjusted is updated.

[0069] In this optional embodiment, if a recoverable minor alarm occurs on the first-priority robotic arm of a certain process step during task execution, that process step is identified as the target process step. Based on the identifier of the first-priority robotic arm corresponding to the target process step, the process steps following the target process step in the process queue that use that identifier as the first-priority robotic arm are searched, and these are identified as the process steps to be adjusted. Further, during the execution of this wafer transfer task, the identifier of the first-priority robotic arm in the priority configuration information of the robotic arm corresponding to the process step to be adjusted is updated. For example, the original identifier of the first-priority robotic arm in the priority configuration information of the robotic arm corresponding to the process step to be adjusted is replaced with the identifier of another candidate robotic arm associated with the current process step to be adjusted. By temporarily downgrading the robotic arm that has experienced a minor alarm during a round of task execution, task failure due to faults is avoided.

[0070] S360, Get the execution time of the wafer transfer task.

[0071] In this embodiment of the invention, when performing a wafer transfer task, the execution time of the wafer transfer task is also recorded to measure whether the first priority robotic arm corresponding to each process step of the current wafer transfer task can perform the task efficiently.

[0072] S370. If the execution time exceeds the set time threshold, update the robot arm priority configuration information based on the utilization rate and number of conflicts of each robot arm during the wafer transfer task execution.

[0073] In this embodiment of the invention, if the execution time exceeds a set time threshold, it indicates that the first-priority robotic arm corresponding to each process step of the current wafer transfer task cannot meet the requirements for efficient task execution. Specifically, to ensure the stability of the robotic arm priority configuration information, a configuration update process can be triggered when the execution time of a certain wafer transfer task exceeds the set time for consecutive rounds. At this point, task execution logs can be further obtained during each round of wafer transfer task execution, extracting the actual robotic arm executing each process step and its execution time. Based on the total working time and task execution time of each robotic arm, the utilization rate of each robotic arm in each round of task load is calculated, and the average value is calculated. If the utilization rate of the first robotic arm is higher than a first set threshold, the robotic arm priority configuration information associated with the process step where the first robotic arm is designated as the first priority robotic arm can be adjusted. Alternatively, if the utilization rate of the first robotic arm is higher than the first set threshold, and the utilization rate of another robotic arm is lower than the set threshold, the identifier of the first priority robotic arm in the robotic arm priority configuration information across multiple process steps can be adjusted from the identifier of the first robotic arm to the identifier of the second robotic arm.

[0074] Simultaneously, the number of conflicts for the first-priority robotic arm corresponding to each process step is obtained during the execution of multiple wafer transfer tasks. If the number of conflicts for the first-priority robotic arm of a certain process step exceeds a set conflict threshold, the first-priority robotic arm corresponding to the target process step is updated. By updating the priority information, the overall utilization rate of robotic arms can be improved, scheduling conflicts can be reduced, and waiting time can be decreased.

[0075] Optionally, the robot arm priority configuration information is updated based on the utilization rate and number of conflicts of each robot arm during the wafer transfer task execution, including at least one of the following: If the utilization rate and number of conflicts of each robotic arm are obtained during the execution of the wafer transfer task, and the utilization rate of the first robotic arm is lower than the first set threshold while the utilization rate of the second robotic arm is higher than the second set threshold, the identifier of the first priority robotic arm in the robotic arm priority configuration information of at least one process step in the process sequence is adjusted from the identifier of the first robotic arm to the identifier of the second robotic arm. If the number of conflicts of the first priority robot arm in the target process step exceeds the set conflict threshold, update the identifier of the first priority robot arm in the robot arm priority configuration information corresponding to the target process step.

[0076] In this optional embodiment, a specific method is provided for updating the robot arm priority configuration information based on the utilization rate and conflict count of each robot arm during the wafer transfer task execution: If the utilization rate of a first robot arm is lower than a first preset threshold and the utilization rate of a second robot arm is higher than a second preset threshold, the identifier of the first priority robot arm in the robot arm priority configuration information of at least one process step in the process sequence is adjusted from the identifier of the first robot arm to the identifier of the second robot arm. The utilization rate of each robot arm can be calculated based on the task execution logs of multiple rounds of wafer transfer tasks, which can avoid an unbalanced load situation where one robot arm continuously maintains a high utilization rate while another robot arm continuously maintains a low utilization rate.

[0077] If the number of conflicts for the first-priority robotic arm in the target process step exceeds a set conflict threshold, the identifier of the first-priority robotic arm in the priority configuration information of the robotic arm corresponding to the target process step is updated. Specifically, the first-priority robotic arm in the target process step can be adjusted to one of the other candidate robotic arms associated with the target process step to avoid low task execution efficiency due to conflicts. The technical solution of this embodiment of the invention, when determining the working state of the robotic arm, introduces a waiting mechanism. If the robotic arm does not return to an idle state for a set period of time, it is determined to be in a non-idle state, reducing unnecessary robotic arm downgrade scheduling and improving the stability of priority configuration information. If the execution time exceeds a set time threshold, the robotic arm priority configuration information is updated based on the utilization rate and number of conflicts of each robotic arm during the wafer transfer task execution. By updating the priority information, the overall utilization rate of the robotic arm can be improved, scheduling conflicts can be reduced, and waiting time can be lowered.

[0078] Example 4 Figure 4 This is a schematic diagram of a robotic arm scheduling device provided in Embodiment 4 of the present invention. Figure 4 As shown, the device includes: The configuration information acquisition module 410 is used to acquire the robotic arm priority configuration information for each process step in the process program corresponding to the wafer transfer task. The working status acquisition module 420 is used to read the identifier of the first priority robot arm in the robot arm priority configuration information and acquire the working status of the first priority robot arm. The first action execution module 430 is used to control the first priority robotic arm to perform the transmission action corresponding to the process step when the working state of the first priority robotic arm is idle. The second action execution module 440 is used to obtain the working status of candidate robotic arms associated with the process step when the working state of the first priority robotic arm is not idle, and select a target robotic arm from the candidate robotic arms to perform the transmission action corresponding to the process step according to the working status of the candidate robotic arms.

[0079] The technical solution of this invention, for each process step in the process sequence corresponding to the wafer transfer task, obtains the robot priority configuration information of the process step, then reads the identifier of the first priority robot arm in the robot priority configuration information, and obtains the working state of the first priority robot arm. When the working state of the first priority robot arm is idle, it controls the first priority robot arm to execute the transfer action corresponding to the process step. When the working state of the first priority robot arm is not idle, it obtains the working state of the candidate robot arms associated with the process step, and selects the target robot arm from the candidate robot arms to execute the transfer action corresponding to the process step according to the working state of the candidate robot arms. By configuring a corresponding first priority robot arm for each process step, the first priority robot arm is used first to execute the transfer action. And when the first priority robot arm is not idle, other robot arms are selected from the associated candidate robot arms to execute the transfer action. On the one hand, the robot arm with the highest matching degree with the current process step can be used first to execute the step, meeting the special needs of different process steps. On the other hand, when the first priority robot arm is not idle, other robot arms are selected to execute the step, avoiding waiting and improving the utilization rate of the robot arms.

[0080] Optionally, the second action execution module 440 is specifically used for: Obtain the working status of the candidate robotic arms associated with the process step; if at least one of the candidate robotic arms is in an idle state, extract the priority of the candidate robotic arm in the idle state from the robotic arm priority configuration information. Based on the priority, a target robotic arm is selected from the candidate robotic arms in the idle state to perform the transfer action corresponding to the process step.

[0081] Optionally, the robotic arm scheduling device also includes: The candidate robotic arm acquisition module is used to sequentially acquire one process step in the process sequence corresponding to the wafer transfer task as the current process step before acquiring the robotic arm priority configuration information for each process step in the process sequence corresponding to the wafer transfer task, and acquire at least two candidate robotic arms associated with the current process step. The adaptability calculation module is used to determine the adaptability of each candidate robot arm to the current process step based on at least one of the candidate robot arm's step execution path, historical operation data, and historical maintenance data. The configuration information generation module is used to determine the first priority robot arm associated with the current process step from the candidate robot arms according to the adaptability, and store the identifier of the first priority robot arm in the robot arm priority configuration information associated with the current process step.

[0082] Optionally, the robotic arm scheduling device also includes: The path adaptation score determination module is used to determine the step execution path of each candidate robot arm based on the transmission start position and transmission target position of the current process step before obtaining the robot arm priority configuration information of each process step in the corresponding process sequence for the wafer transfer task. It also calculates the theoretical distance that the end effector of the candidate robot arm moves from the reference docking position in the step execution path to the transmission start position, and from the transmission start position to the transmission target position, and determines the path adaptation score based on the theoretical distance. The performance adaptation score determination module is used to acquire historical operating data of each candidate robotic arm, calculate the ratio of the total idle time to the total running time of each candidate robotic arm within a set historical time period as the robotic arm idle rate, and determine the performance adaptation score based on the robotic arm idle rate. The maintenance adaptation score determination module is used to calculate the maintenance frequency of each candidate robot arm within a set historical time period based on the historical maintenance data of each candidate robot arm, and determine the maintenance adaptation score based on the maintenance frequency. The adaptability calculation module is specifically used for: The fit of each candidate robotic arm with the current process step is determined based on at least one of the path fit score, performance fit score, and maintenance fit score.

[0083] Optional, the working status acquisition module 420 is specifically used for: Obtain the current state of the first priority robotic arm; if the current state of the first priority robotic arm is at least one of working state, alarm state, or maintenance state, start a timer. If the first priority robotic arm does not return to an idle state within a preset time period, the working state of the first priority robotic arm is determined to be a non-idle state.

[0084] Optionally, the robotic arm scheduling device also includes: The execution time acquisition module is used to acquire the execution time of the wafer transfer task after selecting the target robot arm from the candidate robot arms to perform the transfer action corresponding to the process step. The first configuration information update module is used to update the priority configuration information of the robotic arms based on the utilization rate and number of conflicts of each robotic arm during the execution of the wafer transfer task when the execution time exceeds a set time threshold.

[0085] Optionally, the first configuration information update module is used to perform at least one of the following: If the utilization rate and number of conflicts of each robotic arm are obtained during the execution of the wafer transfer task, and the utilization rate of the first robotic arm is lower than the first set threshold while the utilization rate of the second robotic arm is higher than the second set threshold, the identifier of the first priority robotic arm in the robotic arm priority configuration information of at least one process step in the process sequence is adjusted from the identifier of the first robotic arm to the identifier of the second robotic arm. If the number of conflicts of the first priority robot arm in the target process step exceeds the set conflict threshold, update the identifier of the first priority robot arm in the robot arm priority configuration information corresponding to the target process step.

[0086] The robotic arm scheduling device provided in this embodiment of the invention can execute the robotic arm scheduling method provided in any embodiment of the invention, and has the corresponding functional modules and beneficial effects of the execution method.

[0087] In the technical solution of this invention, the information collected is information and data authorized by the user or fully authorized by all parties. The collection, storage, use, processing, transmission, provision, disclosure and application of related data all comply with the relevant laws, regulations and standards of relevant countries and regions, take necessary confidentiality measures, do not violate public order and good morals, and provide corresponding operation entry points for users to choose to authorize or refuse.

[0088] Example 5 According to embodiments of the present invention, the present invention also provides an electronic device, a readable storage medium, and a computer program product.

[0089] Figure 5A schematic diagram of an electronic device 10 that can be used to implement embodiments of the present invention is shown. The electronic device is intended to represent various forms of digital computers, such as laptop computers, desktop computers, workstations, personal digital assistants, application processors, blade application processors, mainframe computers, and other suitable computers. The electronic device can also represent various forms of mobile devices, such as personal digital processors, cellular phones, smartphones, wearable devices (such as helmets, glasses, watches, etc.), and other similar computing devices. The components shown herein, their connections and relationships, and their functions are merely illustrative and are not intended to limit the implementation of the invention described and / or claimed herein.

[0090] like Figure 5 As shown, the electronic device 10 includes at least one processor 11 and a memory, such as a read-only memory (ROM) 12 or a random access memory (RAM) 13, communicatively connected to the at least one processor 11. The memory stores computer programs executable by the at least one processor. The processor 11 can perform various appropriate actions and processes based on the computer program stored in the ROM 12 or loaded from storage unit 18 into the RAM 13. The RAM 13 can also store various programs and data required for the operation of the electronic device 10. The processor 11, ROM 12, and RAM 13 are interconnected via a bus 14. An input / output (I / O) interface 15 is also connected to the bus 14.

[0091] Multiple components in electronic device 10 are connected to I / O interface 15, including: input unit 16, such as keyboard, mouse, etc.; output unit 17, such as various types of displays, speakers, etc.; storage unit 18, such as disk, optical disk, etc.; and communication unit 19, such as network card, modem, wireless transceiver, etc. Communication unit 19 allows electronic device 10 to exchange information / data with other devices through computer networks such as the Internet and / or various telecommunications networks.

[0092] Processor 11 can be a variety of general-purpose and / or special-purpose processing components with processing and computing capabilities. Some examples of processor 11 include, but are not limited to, a central processing unit (CPU), a graphics processing unit (GPU), various special-purpose artificial intelligence (AI) computing chips, various processors running machine learning model algorithms, a digital signal processor (DSP), and any suitable processor, controller, microcontroller, etc. Processor 11 performs the various methods and processes described above, such as robotic arm scheduling methods.

[0093] In some embodiments, the robotic arm scheduling method may be implemented as a computer program tangibly contained in a computer-readable storage medium, such as storage unit 18. In some embodiments, part or all of the computer program may be loaded and / or installed on electronic device 10 via ROM 12 and / or communication unit 19. When the computer program is loaded into RAM 13 and executed by processor 11, one or more steps of the robotic arm scheduling method described above may be performed. Alternatively, in other embodiments, processor 11 may be configured to perform the robotic arm scheduling method by any other suitable means (e.g., by means of firmware).

[0094] Various implementations of the systems and techniques described above herein can be implemented in digital electronic circuit systems, integrated circuit systems, field-programmable gate arrays (FPGAs), application-specific integrated circuits (ASICs), application-specific standard products (ASSPs), systems-on-a-chip (SoCs), complex programmable logic devices (CPLDs), computer hardware, firmware, software, and / or combinations thereof. These various implementations may include: implementations in one or more computer programs that can be executed and / or interpreted on a programmable system including at least one programmable processor, which may be a dedicated or general-purpose programmable processor, capable of receiving data and instructions from a storage system, at least one input device, and at least one output device, and transmitting data and instructions to the storage system, the at least one input device, and the at least one output device.

[0095] Computer programs used to implement the methods of the present invention can be written in any combination of one or more programming languages. These computer programs can be provided to a processor of a general-purpose computer, a special-purpose computer, or other programmable data processing device, such that when executed by the processor, the computer programs cause the functions / operations specified in the flowcharts and / or block diagrams to be performed. The computer programs can be executed entirely on a machine, partially on a machine, as a standalone software package partially on a machine and partially on a remote machine, or entirely on a remote machine or application.

[0096] In the context of this invention, a computer-readable storage medium can be a tangible medium that may contain or store a computer program for use by or in conjunction with an instruction execution system, apparatus, or device. A computer-readable storage medium may include, but is not limited to, electronic, magnetic, optical, electromagnetic, infrared, or semiconductor systems, apparatus, or devices, or any suitable combination thereof. Alternatively, a computer-readable storage medium may be a machine-readable signal medium. More specific examples of machine-readable storage media include electrical connections based on one or more wires, portable computer disks, hard disks, random access memory (RAM), read-only memory (ROM), erasable programmable read-only memory (EPROM or flash memory), optical fibers, portable compact disk read-only memory (CD-ROM), optical storage devices, magnetic storage devices, or any suitable combination thereof.

[0097] To provide interaction with a user, the systems and techniques described herein can be implemented on an electronic device having: a display device (e.g., a CRT (cathode ray tube) or LCD (liquid crystal display) monitor) for displaying information to the user; and a keyboard and pointing device (e.g., a mouse or trackball) through which the user provides input to the electronic device. Other types of devices can also be used to provide interaction with the user; for example, feedback provided to the user can be any form of sensory feedback (e.g., visual feedback, auditory feedback, or tactile feedback); and input from the user can be received in any form (including sound input, voice input, or tactile input).

[0098] The systems and technologies described herein can be implemented in computing systems that include backend components (e.g., as data application processors), or computing systems that include middleware components (e.g., application application processors), or computing systems that include frontend components (e.g., user computers with graphical user interfaces or web browsers through which users can interact with implementations of the systems and technologies described herein), or any combination of such backend, middleware, or frontend components. The components of the system can be interconnected via digital data communication of any form or medium (e.g., communication networks). Examples of communication networks include local area networks (LANs), wide area networks (WANs), blockchain networks, and the Internet.

[0099] A computing system can include clients and applications. Clients and applications are generally geographically separated and typically interact via a communication network. The client-application relationship is established by computer programs running on the respective computers and having a client-application relationship with each other. An application can be a cloud application, also known as a cloud computing application or cloud server, which is a hosting product within the cloud computing application ecosystem. It addresses the shortcomings of traditional physical servers and VPS applications, such as high management difficulty and weak business scalability.

[0100] It should be understood that the various forms of processes shown above can be used, with steps reordered, added, or deleted. For example, the steps described in this invention can be executed in parallel, sequentially, or in different orders, as long as the desired result of the technical solution of this invention can be achieved, and this is not limited herein.

[0101] The specific embodiments described above do not constitute a limitation on the scope of protection of this invention. Those skilled in the art should understand that various modifications, combinations, sub-combinations, and substitutions can be made according to design requirements and other factors. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this invention should be included within the scope of protection of this invention.

Claims

1. A robotic arm scheduling method, characterized in that, include: For each process step in the process sequence corresponding to the wafer transfer task, obtain the robotic arm priority configuration information for that process step; Read the identifier of the first priority robotic arm in the robotic arm priority configuration information, and obtain the working status of the first priority robotic arm; When the first priority robotic arm is in an idle state, control the first priority robotic arm to perform the transmission action corresponding to the process step. When the working state of the first priority robotic arm is not idle, the working state of the candidate robotic arms associated with the process step is obtained, and according to the working state of the candidate robotic arms, the target robotic arm is selected from the candidate robotic arms to perform the transfer action corresponding to the process step.

2. The method according to claim 1, characterized in that, Acquire the working status of candidate robotic arms associated with the process step, and select a target robotic arm from the candidate robotic arms to perform the transfer action corresponding to the process step based on the working status of the candidate robotic arms, including: Obtain the working status of the candidate robotic arms associated with the process step; if at least one of the candidate robotic arms is in an idle state, extract the priority of the candidate robotic arm in the idle state from the robotic arm priority configuration information. Based on the priority, a target robotic arm is selected from the candidate robotic arms in the idle state to perform the transfer action corresponding to the process step.

3. The method according to claim 1, characterized in that, Before obtaining the robotic arm priority configuration information for each process step in the process sequence corresponding to the wafer transfer task, the method further includes: Sequentially obtain one process step from the process sequence corresponding to the wafer transfer task as the current process step, and obtain at least two candidate robotic arms associated with the current process step; For each candidate robotic arm, the suitability of the candidate robotic arm to the current process step is determined based on at least one of the candidate robotic arm's step execution path, historical operation data, and historical maintenance data. Based on the adaptability, a first priority robotic arm associated with the current process step is determined from the candidate robotic arms, and the identifier of the first priority robotic arm is stored in the priority configuration information of the robotic arm associated with the current process step.

4. The method according to claim 3, characterized in that, Before obtaining the robotic arm priority configuration information for each process step in the process sequence corresponding to the wafer transfer task, the method further includes: Based on the current process step's transmission start position and transmission target position, determine the step execution path for each candidate robotic arm, and calculate the theoretical distance the end effector of the candidate robotic arm moves from the reference docking position in the step execution path to the transmission start position, and from the transmission start position to the transmission target position. Based on the theoretical distance, determine the path adaptation score. Historical operation data of each candidate robotic arm is obtained, and the ratio of the total idle time to the total running time of each candidate robotic arm within a set historical time period is calculated as the robotic arm idle rate. Based on the robotic arm idle rate, the performance adaptation score is determined. Based on the historical maintenance data of each candidate robotic arm, the maintenance frequency of each candidate robotic arm within a set historical time period is calculated, and the maintenance adaptation score is determined based on the maintenance frequency. For each candidate robotic arm, the suitability of the candidate robotic arm to the current process step is determined based on at least one of the candidate robotic arm's step execution path, historical operation data, and historical maintenance data, including: The fit of each candidate robotic arm with the current process step is determined based on at least one of the path fit score, performance fit score, and maintenance fit score.

5. The method according to claim 1, characterized in that, Obtaining the working state of the first priority robotic arm includes: Obtain the current state of the first priority robotic arm; if the current state of the first priority robotic arm is at least one of working state, alarm state, or maintenance state, start a timer. If the first priority robotic arm does not return to an idle state within a preset time period, the working state of the first priority robotic arm is determined to be a non-idle state.

6. The method according to claim 1, characterized in that, After selecting the target robotic arm from the candidate robotic arms to perform the transfer action corresponding to the process step, the process further includes: Obtain the execution time of the wafer transfer task; If the execution time exceeds a set time threshold, the priority configuration information of the robotic arms is updated based on the utilization rate and number of conflicts of each robotic arm during the execution of the wafer transfer task.

7. The method according to claim 6, characterized in that, The robot arm priority configuration information is updated based on the utilization rate and number of conflicts of each robot arm during the execution of the wafer transfer task, including at least one of the following: If the utilization rate and number of conflicts of each robotic arm are obtained during the execution of the wafer transfer task, and the utilization rate of the first robotic arm is lower than the first set threshold while the utilization rate of the second robotic arm is higher than the second set threshold, the identifier of the first priority robotic arm in the robotic arm priority configuration information of at least one process step in the process sequence is adjusted from the identifier of the first robotic arm to the identifier of the second robotic arm. If the number of conflicts of the first priority robot arm in the target process step exceeds the set conflict threshold, update the identifier of the first priority robot arm in the robot arm priority configuration information corresponding to the target process step.

8. A robotic arm scheduling device, characterized in that, include: The configuration information acquisition module is used to acquire the robotic arm priority configuration information for each process step in the process program corresponding to the wafer transfer task. The working status acquisition module is used to read the identifier of the first priority robot arm in the robot arm priority configuration information and acquire the working status of the first priority robot arm. The first action execution module is used to control the first priority robotic arm to perform the transmission action corresponding to the process step when the working state of the first priority robotic arm is idle. The second action execution module is used to obtain the working status of candidate robotic arms associated with the process step when the working state of the first priority robotic arm is not idle, and select a target robotic arm from the candidate robotic arms to perform the transmission action corresponding to the process step based on the working status of the candidate robotic arms.

9. An electronic device, characterized in that, The electronic device includes: At least one processor; and A memory communicatively connected to the at least one processor; wherein, The memory stores a computer program that can be executed by the at least one processor, the computer program being executed by the at least one processor to enable the at least one processor to perform the robotic arm scheduling method according to any one of claims 1-7.

10. A computer-readable storage medium, characterized in that, The computer-readable storage medium stores computer instructions that cause a processor to execute the robotic arm scheduling method according to any one of claims 1-7.

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