Mobile carrier and polishing apparatus for large-size display panel

Abstract

The present application relates to the technical fields of semiconductor display panel processing, and particularly relates to a mobile carrier for large-size display panel and a grinding equipment, which mainly solves the technical problems of high manufacturing cost and difficult to guarantee flatness of the mobile carrier of the existing grinding equipment. The mobile carrier comprises a mobile base, a rotating power element, a bottom frame, a plurality of strip-shaped carriers and a plurality of top supporting power elements. The rotating power element is installed on the mobile base and the rotating axis extends along the Z direction. The bottom frame is fixed to the output part of the rotating power element. The strip-shaped carrier is fixed to the bottom frame and is internally provided with a suction passage. One end of the suction passage extends to the top surface of the strip-shaped carrier to form a suction port, and the other end is communicated with a negative pressure source. All the suction ports are in the same horizontal plane. The top supporting power element supports the bottom frame from below to compensate the gravity deformation of the bottom frame and the load thereon. The mobile carrier uses the strip-shaped carrier to replace the whole plate to reduce the cost and guarantee the flatness. The top supporting power element compensates the gravity deformation to meet the grinding requirements.

Description

Technical Field

[0001] This invention relates to the field of semiconductor display panel processing technology, and in particular to a moving stage and grinding equipment for large-size display panels. Background Technology

[0002] With the continuous iteration of semiconductor display technology, the thickness of display panels has been reduced from 0.5mm to 0.2mm, and the panel size has increased to 65 inches and above, which puts forward higher requirements for grinding precision.

[0003] In existing grinding equipment, the moving platform used to support display panels generally adopts a plate-like structure. The plate-like structure is suitable for adsorbing and fixing small and medium-sized display panels, but it has the following drawbacks when used for large-sized display panels: First, the plate area increases in tandem with the panel size, resulting in a significant increase in manufacturing costs; second, it is difficult to guarantee the flatness of a large-area plate, and the display panel placed on it cannot obtain reliable planar accuracy support, thus affecting the grinding accuracy.

[0004] Therefore, there is an urgent need to develop a mobile platform that can be adapted to large-size display panels, while controlling costs and ensuring load-bearing accuracy to meet the requirements of grinding processing. Summary of the Invention

[0005] To overcome the technical shortcomings of existing grinding equipment, such as high manufacturing costs and difficulty in ensuring flatness of the mobile stage, this invention proposes a mobile stage and grinding equipment for large-size display panels.

[0006] The present invention provides a moving platform for large-size display panels, comprising: Mobile base; A rotating power component is mounted on the movable base, the rotation axis of the rotating power component extends along the Z direction and the output part is arranged upward; The base frame is fixed to the output part of the rotating power component and is arranged horizontally. Multiple strip-shaped carrier plates are provided and are parallel to each other. Each strip-shaped carrier plate is fixed on the bottom frame and has an adsorption channel inside. One end of the adsorption channel extends to the top surface of the strip-shaped carrier plate to form an adsorption port. The other end of the adsorption channel is used to connect to a negative pressure source. The adsorption ports of all adsorption channels are on the same horizontal plane. The top support power component is provided in multiple parts and is installed on the movable base. The output end of each top support power component is arranged upward. The top support power component is used to support the bottom frame with a preset pressure to compensate for the weight of the bottom frame and the load above it.

[0007] Furthermore, the rotating power component is a rotary motor.

[0008] Furthermore, the bottom frame includes a mounting frame plate and a plurality of ribs detachably fixed below the mounting frame plate. The output part of the rotational power component is detachably fixedly connected to the mounting frame plate, and the output end of the top support power component is used to support the ribs.

[0009] Furthermore, the strip-shaped carrier plate can be detachably fixed to the mounting frame plate.

[0010] Furthermore, the strip carrier plate includes a fixing strip, a connecting frame plate, and an adsorption strip. The surface of the fixing strip is horizontally arranged and detachably fixed to the mounting frame plate. The surface of the connecting frame plate is vertically arranged and detachably fixed to the fixing strip. The surface of the adsorption strip is horizontally arranged and detachably fixed to the connecting frame plate. The adsorption channel is located inside the adsorption strip.

[0011] Furthermore, the top support power component is a cylinder, and the cylinder integrates a pressure regulating valve, which is used to control the output pressure of the corresponding cylinder.

[0012] The grinding apparatus provided by the present invention includes: frame; X-axis drive unit, which is mounted on the frame; The aforementioned mobile platform for large-size display panels has its mobile base fixed to the output of the X-axis drive unit; A vision mechanism, which is mounted on the frame and located on the Y-direction side of the X-direction drive pair, is used to perform visual alignment of the display panel carried on the strip carrier plate; A grinding mechanism, mounted on the frame and located downstream of the vision mechanism along the X direction, is used to grind the display panel supported on the strip carrier plate.

[0013] Furthermore, the vision mechanism includes a first CCD camera and a second CCD camera, both mounted on the frame. The first CCD camera and the second CCD camera are spaced apart along the X direction, with the first CCD camera located upstream of the second CCD camera. The first CCD camera is driven to translate along the Y and Z directions, and the second CCD camera is driven to translate along the X, Y, and Z directions. The first CCD camera and the second CCD camera cooperate to perform visual alignment of the display panel carried on the strip carrier plate.

[0014] Furthermore, the grinding mechanism includes a coarse grinding component, a first fine grinding component, and a second fine grinding component, which are arranged sequentially from upstream to downstream.

[0015] Furthermore, the coarse grinding assembly, the first fine grinding assembly, and the second fine grinding assembly are all integrated with an air-tight structure, which is used to prevent impurities from splashing out during grinding.

[0016] The technical solution provided by this invention has the following advantages compared with the prior art.

[0017] The movable stage for large-size display panels provided by this invention uses multiple parallel strip-shaped carrier plates to replace the solid panel structure to support the display panel. This reduces the manufacturing cost of the stage and avoids the problem of difficulty in ensuring the flatness of large-area solid panels. Furthermore, the suction ports of each strip-shaped carrier plate are on the same horizontal plane, ensuring the flatness accuracy of the display panel after being supported, thus meeting the requirements of grinding. At the same time, multiple supporting dynamic components support the bottom frame from below with preset pressure, compensating for the deformation caused by the weight of the bottom frame and the load above it. This ensures the flatness accuracy of the bottom frame under load and avoids local deformation of the display panel caused by the deformation of the bottom frame, which would affect the grinding accuracy.

[0018] The grinding equipment provided by this invention uses the aforementioned mobile platform to support a large-size display panel. The panel is driven sequentially through the vision mechanism and the grinding mechanism via the X-axis drive sub-drive. After the vision mechanism completes the panel alignment, the grinding mechanism performs the grinding process. This achieves the synergy of precise positioning and high-precision grinding in the grinding process of large-size display panels, ensuring overall processing efficiency and accuracy. Attached Figure Description

[0019] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments consistent with the invention and, together with the description, serve to explain the principles of the invention.

[0020] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, for those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0021] Figure 1 This is a schematic diagram of the structure of the mobile platform in an embodiment of the present invention; Figure 2 This is a three-dimensional half-sectional view of the movable platform in an embodiment of the present invention; Figure 3 This is a schematic diagram of the grinding equipment in an embodiment of the present invention; Figure 4 This is a schematic diagram showing the structure of the first CCD camera and related components in an embodiment of the present invention; Figure 5 This is a schematic diagram showing the structure of the second CCD camera and related components in an embodiment of the present invention; Figure 6This is a schematic diagram of the grinding mechanism in an embodiment of the present invention.

[0022] In the picture: 1. Movable base; 2. Rotation power component; 3. Base frame; 31. Mounting frame plate; 32. Rib plate; 4. Strip carrier plate; 41. Fixing strip plate; 42. Connecting frame plate; 43. Adsorption strip plate; 5. Top support power component; 100. Frame; 200. X-axis drive pair; 300. Vision mechanism; 310. First CCD camera; 311. First profile frame; 312. First Y-axis linear pair; 313. First Z-axis linear pair; 314. First camera body; 320. Second CCD camera; 321. Second profile frame; 322. Second Y-axis linear pair; 323. X-axis linear pair; 324. Second Z-axis linear pair; 325. Second camera body; 400. Grinding mechanism; 410. Coarse grinding assembly; 420. First fine grinding assembly; 430. Second fine grinding assembly; 440. Airtight structure. Detailed Implementation

[0023] To better understand the above-mentioned objectives, features, and advantages of the present invention, the solutions of the present invention will be further described below. It should be noted that, unless otherwise specified, the embodiments of the present invention and the features thereof can be combined with each other.

[0024] Many specific details are set forth in the following description in order to provide a full understanding of the invention, but the invention may also be practiced in other ways different from those described herein; obviously, the embodiments in the specification are only some embodiments of the invention, and not all embodiments.

[0025] The following is combined with Figures 1 to 2 Specific embodiments of the present invention will be described in detail below. Example 1

[0026] Reference Figures 1 to 2 This embodiment provides a mobile platform for large-size display panels, including a mobile base 1, a rotating power component 2, a bottom frame 3, a strip-shaped carrier plate 4, and a top support power component 5.

[0027] The movable base 1 is used to connect to the X-direction drive pair 200 of the grinding equipment so that the entire movable platform can be moved along the X-direction to complete the material conveying.

[0028] Specifically, the structure of the movable base 1 is not limited. For example, the movable base 1 in this embodiment is a plate-shaped structure.

[0029] The rotating power component 2 is mounted on the movable base 1, with its rotation axis extending along the Z-direction and its output section facing upwards. The rotating power component 2 is used to drive the bottom frame 3, the strip carrier plate 4, and the display panel supported on the strip carrier plate 4 to rotate around the Z-direction axis, thereby achieving circumferential angle adjustment of the display panel during visual alignment.

[0030] Specifically, in this embodiment, the rotating power component 2 is a rotary motor. The rotary motor, in conjunction with a built-in encoder, enables precise angle control, reliable fine-tuning of the angle during grinding alignment, and can be directly connected to the electrical control system of the grinding equipment. In other embodiments, the rotating power component 2 may also employ commonly used structures that output rotary displacement, such as rotary cylinders or hydraulic motors.

[0031] The base frame 3 is fixed to the output part of the rotating power component 2 and is arranged horizontally. The base frame 3 is used to connect the rotating power component 2 and the strip carrier plate 4, and has the characteristics of being lightweight.

[0032] Specifically, the structure of the base frame 3 is not limited. For example, in this embodiment, the base frame 3 includes a mounting frame plate 31 and multiple ribs 32 detachably fixed below the mounting frame plate 31. The output part of the rotating power component 2 is detachably fixedly connected to the mounting frame plate 31. The mounting frame plate 31 is lightweight, and the multiple ribs 32 can improve the structural strength of the mounting frame plate 31, thereby reducing its deformation due to gravity when the area of ​​the mounting frame plate 31 is large. The detachability of the mounting frame plate 31 and the ribs 32, as well as the detachability of the rotating power component 2 and the mounting frame plate 31, can improve processing flexibility and installation efficiency.

[0033] Among them, there are multiple strip-shaped carrier plates 4 that are parallel to each other. Each strip-shaped carrier plate 4 is fixed on the bottom frame 3 and has an adsorption channel inside. One end of the adsorption channel extends to the top surface of the strip-shaped carrier plate 4 to form an adsorption port. The other end of the adsorption channel is used to connect to a negative pressure source. The adsorption ports of all adsorption channels are on the same horizontal plane.

[0034] It should be noted that this invention uses multiple strip-shaped carrier plates 4 instead of existing tabletops. In applications involving large-size display panels, the flatness of the strip-shaped carrier plates 4 is easier to ensure, and the coplanar accuracy of multiple strip-shaped carrier plates 4 is also easy to guarantee through installation, thereby meeting the flatness requirements of the bearing surface and ensuring grinding accuracy. Furthermore, since the grinding position of the display panel is located at the edge, the flatness requirement at the edge is higher than that at the center. When using multiple strip-shaped carrier plates 4, only the accuracy of the strip-shaped carrier plates 4 located at the edge needs to be checked; the middle strip-shaped carrier plates 4 only need to meet general accuracy requirements, which can reduce installation difficulty and cost, and improve installation efficiency.

[0035] Specifically, in this embodiment, the strip carrier plate 4 is detachably fixed to the mounting frame plate 31. The detachable design improves processing flexibility and installation efficiency, and also helps ensure the coplanarity of multiple strip carrier plates 4. In other embodiments, the strip carrier plate 4 can also be fixed to the mounting frame plate 31 by welding or other means.

[0036] Specifically, the strip carrier plate 4 includes a fixing strip plate 41, a connecting frame plate 42, and an adsorption strip plate 43. The fixing strip plate 41 is horizontally arranged and detachably fixed to the mounting frame plate 31. The connecting frame plate 42 is vertically arranged and detachably fixed to the fixing strip plate 41. The adsorption strip plate 43 is horizontally arranged and detachably fixed to the connecting frame plate 42. The adsorption channel is located inside the adsorption strip plate 43. The strip carrier plate 4 adopts a split structure design: on the one hand, it allows each component to only require processing corresponding to its function (for example, the fixing strip plate 41 only needs to be processed to connect with the mounting frame plate 31 and the connecting frame plate 42, and the adsorption strip plate 43 only needs to be processed to connect with the adsorption channel and the connecting frame plate 42), effectively reducing the processing difficulty; on the other hand, it also facilitates the individual replacement of components such as the adsorption strip plate 43. The connecting frame plate 42 is used to elevate the adsorption strip plate 43 to avoid interference between the display panel and the mounting frame plate 31. In other embodiments, the strip carrier plate 4 can also adopt an integrated structure design.

[0037] Among them, there are multiple top support power components 5, all of which are installed on the mobile base 1. The output end of each top support power component 5 is arranged facing upward. The top support power component 5 is used to support the bottom frame 3 with a preset pressure to compensate for the weight of the bottom frame 3 and the load above it.

[0038] It should be noted that, due to the large area of ​​the bottom frame 3, and the fact that only a local area (the middle part in this embodiment) of the bottom frame 3 is supported on the output part of the rotating power component 2, the part far from this local area forms a cantilever structure, especially the edge part, which is prone to deformation under gravity. Although the structural design of the mounting frame plate 31 + rib plate 32 can reduce the deformation of the bottom frame 3, slight deformation will still occur. When applied to display panel processing applications with high precision requirements, this slight deformation will also have a significant impact, which has become a technical problem that urgently needs to be solved in the field of large-size display panel processing. The present invention avoids the aforementioned slight deformation by designing the top support power component 5 and having the top support power component 5 support the bottom frame 3 with a preset pressure to compensate for the gravity of the bottom frame 3 and the load above it.

[0039] It is easy to understand that the base frame 3 is fixed to the output of the rotating power component 2, and there is no lifting or lowering margin. The top support power component 5 can compensate for the weight of the base frame 3 without causing the base frame 3 to deform in the opposite direction through preset pressure control. This preset pressure can be designed based on the weight of the base frame 3, the deformation parameters of the base frame 3, and the position of the top support power component 5. This is something that those skilled in the art can easily design, and will not be elaborated here. The so-called "compensation" can be to compensate for the entire weight of the base frame 3 and the load above it, or it can be to compensate for part of the weight, as long as it can prevent the deformation of the base frame 3 or ensure that the flatness of the base frame 3 meets the requirements. The load above the base frame 3 includes the strip carrier plate 4 and the display panel.

[0040] Specifically, the type of the supporting power component 5 is not limited, but it must be able to output precise pressure. For example, in this embodiment, the supporting power component 5 is a cylinder, which integrates a pressure regulating valve to control the output pressure of the corresponding cylinder.

[0041] It should be noted that, based on the aforementioned mounting frame plate 31 + rib plate 32 bottom frame 3 structure, the output end of the top support power component 5 is used to support the rib plate 32.

[0042] Specifically, the number and distribution of the top support power components 5 are not limited, and can be determined according to the structural adaptability of the base frame 3. For example, in this embodiment, there are six top support power components 5, which are respectively installed at the four corners of the movable base 1 and the middle of the two sides in the X direction.

[0043] The working principle of the moving platform for large-size display panels in this embodiment is as follows.

[0044] During operation, the incoming material display panel is placed on the strip carrier plate 4. The negative pressure source generates negative pressure in the adsorption channel, which adsorbs and fixes the display panel to the top surface of the strip carrier plate 4. After visual alignment is completed, the bottom frame 3 is rotated by the rotation power component 2, which drives the display panel to achieve circumferential angle fine adjustment. Then, the top support power component 5 is activated, which supports the bottom frame 3 from below with a preset pressure to compensate for the deformation of the bottom frame 3 and the load above it caused by gravity, ensuring that the flatness accuracy of the load-bearing surface meets the grinding requirements. Finally, the grinding operation is carried out. Example 2

[0045] Reference Figures 3 to 6 This embodiment provides a grinding device, including a frame 100, an X-axis drive pair 200, a moving stage for large-size display panels as described in Embodiment 1, a vision mechanism 300, and a grinding mechanism 400.

[0046] The rack 100 is used to provide hardware support for other components.

[0047] The X-axis drive unit 200 is mounted on the frame 100.

[0048] Specifically, in this embodiment, the X-axis drive pair 200 is a linear motor. Linear motors offer high positioning accuracy and their stroke can be easily extended through stator splicing, making them more suitable for applications involving large-size display panels. In other embodiments, the X-axis drive pair 200 can also employ common structures capable of outputting linear displacement, such as a combination of a lead screw and nut pair and a servo motor.

[0049] The movable base 1 of the movable stage is fixed to the output of the X-axis drive pair 200. When the X-axis drive pair 200 is activated, it drives the movable stage to move, thereby realizing the X-axis feeding and X-axis conveying of the display panel during grinding.

[0050] The vision mechanism 300 is mounted on the frame 100 and located on the Y-direction side of the X-direction drive pair 200. The vision mechanism 300 is used to perform visual alignment of the display panel carried on the strip carrier plate 4.

[0051] Specifically, the vision mechanism 300 in this embodiment includes a first CCD camera 310 and a second CCD camera 320, both mounted on the frame 100. The first CCD camera 310 and the second CCD camera 320 are spaced apart along the X direction, with the first CCD camera 310 located upstream of the second CCD camera 320. The first CCD camera 310 is driven to translate along the Y and Z directions, and the second CCD camera 320 is driven to translate along the X, Y, and Z directions. The first CCD camera 310 and the second CCD camera 320 cooperate to perform visual alignment of the display panel carried on the strip carrier plate 4. Using a first CCD camera 310 and a second CCD camera 320 together to position the display panel has two advantages: First, the two CCD cameras working together for alignment can better adapt to the large size of the display panel and achieve higher alignment accuracy; second, the X-axis movement of the second CCD camera 320 combined with the X-axis movement of the moving platform can adapt to display panels of different sizes, and setting only one CCD camera that can move in the X-axis can also simplify the structure.

[0052] It is easy to understand that the so-called "upstream" is based on the direction of incoming materials, that is, the position that the display panel passes through first is upstream, and the position that it passes through later is downstream.

[0053] Specifically, the structures on which the first CCD camera 310 and the second CCD camera 320 are attached are not limited. For example, in this embodiment, the first CCD camera 310 includes a first profile frame 311 mounted on the frame 100, a first Y-axis linear joint 312 mounted on the first profile frame 311, a first Z-axis linear joint 313 mounted on the output portion of the first Y-axis linear joint 312, and a first camera body 314 mounted on the output portion of the first Z-axis linear joint 313. The second CCD camera 320 includes a second profile frame 321 mounted on the frame 100, a second Y-axis linear joint 322 mounted on the second profile frame 321, an X-axis linear joint 323 mounted on the output portion of the second Y-axis linear joint 322, a second Z-axis linear joint 324 mounted on the X-axis linear joint 323, and a second camera body 325 mounted on the output portion of the second Z-axis linear joint 324.

[0054] The grinding mechanism 400 is mounted on the frame 100 and located downstream of the vision mechanism 300 along the X direction. The grinding mechanism 400 is used to grind the display panel carried on the strip carrier plate 4.

[0055] Specifically, the grinding mechanism 400 in this embodiment includes a coarse grinding component 410, a first fine grinding component 420, and a second fine grinding component 430, which are arranged sequentially from upstream to downstream. Through the integrated design of the three grinding components, both coarse and fine grinding processes can be achieved within this grinding equipment without the need for separate equipment, thus improving grinding efficiency and reducing equipment costs.

[0056] More specifically, in this embodiment, the coarse grinding assembly 410, the first fine grinding assembly 420, and the second fine grinding assembly 430 all integrate an airtight structure 440, which is used to prevent impurities from splashing out during grinding. The airtight structure 440 can adopt a mature structure in the art, such as the airtight edge grinding device disclosed in patent publication number CN118720916A. The airtight structure 440 can effectively prevent debris from spreading to adjacent structures, thereby eliminating the need for protective treatment of adjacent structures, and thus avoiding increased design, processing, and maintenance difficulties as well as increased equipment costs.

[0057] The working principle of the grinding equipment in this embodiment is as follows.

[0058] During operation, the display panel is placed on the strip plate 4 of the moving platform and fixed by negative pressure adsorption. The X-axis drive pair 200 drives the moving platform to move along the X-axis, so that the display panel passes through the vision mechanism 300 and the grinding mechanism 400 in sequence. When the display panel passes through the vision mechanism 300, the first CCD camera 310 and the second CCD camera 320 respectively capture images from both ends of the panel, calculate the rotational deviation of the panel, and make circumferential angle fine adjustments to the display panel through the rotational power component 2 to complete the precise alignment. After the alignment is completed, the top support power component 5 is activated to support the bottom frame 3 with a preset pressure. Then the display panel continues to move along the X-axis into the grinding mechanism 400, and is ground in sequence through the coarse grinding component 410, the first fine grinding component 420 and the second fine grinding component 430 to achieve the grinding operation from coarse to fine.

[0059] The above are merely specific embodiments of the present invention, enabling those skilled in the art to understand or implement the present invention. Although detailed descriptions have been provided with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments, and they should all be covered within the protection scope of the claims.

Claims

1. A mobile platform for large-size display panels, characterized in that, include: Mobile base (1); A rotating power component (2) is mounted on the movable base (1), the rotation axis of the rotating power component (2) extends along the Z direction and the output part is arranged upward; The bottom frame (3) is fixed to the output part of the rotating power component (2) and is arranged horizontally; A strip carrier plate (4) is provided in multiple parallel sections. Each strip carrier plate (4) is fixed on the bottom frame (3) and has an adsorption channel inside. One end of the adsorption channel extends to the top surface of the strip carrier plate (4) to form an adsorption port. The other end of the adsorption channel is used to connect to a negative pressure source. The adsorption ports of all adsorption channels are on the same horizontal plane. The top support power component (5) is provided in multiple and is installed on the mobile base (1). The output end of each top support power component (5) is arranged facing upward. The top support power component (5) is used to support the bottom frame (3) with a preset pressure to compensate for the weight of the bottom frame (3) and the load above it.

2. The movable platform for large-size display panels according to claim 1, characterized in that, The rotating power component (2) is a rotary motor.

3. The movable platform for large-size display panels according to claim 1, characterized in that, The bottom frame (3) includes a mounting frame plate (31) and a plurality of ribs (32) that are detachably fixed below the mounting frame plate (31). The output part of the rotating power component (2) is detachably fixed to the mounting frame plate (31), and the output end of the top support power component (5) is used to support the ribs (32).

4. The movable platform for large-size display panels according to claim 3, characterized in that, The strip carrier plate (4) is detachably fixed to the mounting frame plate (31).

5. The movable platform for large-size display panels according to claim 4, characterized in that, The strip carrier plate (4) includes a fixing strip plate (41), a connecting frame plate (42), and an adsorption strip plate (43). The surface of the fixing strip plate (41) is horizontally arranged and detachably fixed to the mounting frame plate (31). The surface of the connecting frame plate (42) is vertically arranged and detachably fixed to the fixing strip plate (41). The surface of the adsorption strip plate (43) is horizontally arranged and detachably fixed to the connecting frame plate (42). The adsorption channel is located inside the adsorption strip plate (43).

6. The movable platform for large-size display panels according to claim 1, characterized in that, The top support power component (5) is a cylinder, and the cylinder is integrated with a pressure regulating valve, which is used to control the output pressure of the corresponding cylinder.

7. A grinding apparatus, characterized in that, include: Rack (100); X-axis drive unit (200) is mounted on the frame (100); The movable platform for a large-size display panel according to any one of claims 1 to 6, wherein the movable base (1) is fixed to the output of the X-direction drive pair (200); A vision mechanism (300) is mounted on the frame (100) and located on the Y-direction side of the X-direction drive pair (200). The vision mechanism (300) is used to perform visual alignment of the display panel carried on the strip carrier plate (4). A grinding mechanism (400) is mounted on the frame (100) and located downstream of the vision mechanism (300) along the X direction. The grinding mechanism (400) is used to grind the display panel carried on the strip carrier plate (4).

8. The grinding equipment according to claim 7, characterized in that, The vision mechanism (300) includes a first CCD camera (310) and a second CCD camera (320) both mounted on the frame (100). The first CCD camera (310) and the second CCD camera (320) are spaced apart along the X direction, and the first CCD camera (310) is located upstream of the second CCD camera (320). The first CCD camera (310) is driven to translate along the Y and Z directions, and the second CCD camera (320) is driven to translate along the X, Y and Z directions. The first CCD camera (310) and the second CCD camera (320) cooperate to perform visual alignment of the display panel carried on the strip carrier plate (4).

9. The grinding equipment according to claim 7, characterized in that, The grinding mechanism (400) includes a coarse grinding component (410), a first fine grinding component (420), and a second fine grinding component (430), which are arranged sequentially from upstream to downstream.

10. The grinding equipment according to claim 9, characterized in that, The coarse grinding assembly (410), the first fine grinding assembly (420), and the second fine grinding assembly (430) are all integrated with an air-tight structure (440), which is used to prevent impurities from splashing out during grinding.

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