Multi-axis alignment platform

Abstract

The application discloses a multi-axis alignment platform, comprising: a bottom module, an upper bottom plate, an upper panel, and at least two groups of inclination angle adjustment modules; the upper bottom plate is arranged above the bottom module, the inclination angle adjustment modules are arranged on the upper bottom plate, and the upper panel is arranged on the top of the inclination angle adjustment modules; the bottom module is used for driving the upper bottom plate to move along the X-axis, Y-axis or R-axis direction, so as to drive the upper panel to move along the X-axis, Y-axis or R-axis direction; the two groups of inclination angle adjustment modules are oppositely arranged on the upper bottom plate and are used for cooperatively adjusting the inclination angle of the upper panel around the X-axis or Y-axis. Compared with the prior art, the application can effectively improve the precision of the alignment platform.

Description

Technical Field

[0001] This invention relates to the field of precision equipment manufacturing technology, and in particular to a multi-axis alignment platform. Background Technology

[0002] Alignment platforms are mainly used in industries that require high speed and high precision, such as wafer cutting and packaging testing in the semiconductor industry, exposure machines, screen printing machines, laminating machines, pressing machines, PCB board cutting in the PCB manufacturing industry, mobile phone manufacturing, LCD / LED panel manufacturing, and solar panel silver wire printing in the solar energy industry, etc.

[0003] However, the current alignment platform can only achieve alignment in the X, Y and R axes, but cannot adjust the tilt angle, which cannot meet the requirements of high precision. Summary of the Invention

[0004] This invention provides a multi-axis alignment platform, which aims to improve the precision of the alignment platform.

[0005] This invention provides a multi-axis alignment platform, comprising: a bottom module, an upper base plate, an upper panel, and at least two sets of tilt adjustment modules; The upper base plate is disposed above the bottom module, the tilt adjustment module is disposed on the upper base plate, and the upper panel is disposed on the top of the tilt adjustment module; The bottom module is used to drive the upper base plate to move along the X-axis, Y-axis or R-axis direction, so as to drive the upper panel to move along the X-axis, Y-axis or R-axis direction; The two sets of tilt adjustment modules are arranged opposite to each other on the upper base plate, and are used to coordinately adjust the tilt angle of the upper panel around the X-axis or Y-axis.

[0006] A further technical solution of the present invention is that the tilt adjustment module includes: a motor, a first slide rail, a first slider, a second slide rail, a second slider, a universal joint, a first bearing, and a bearing pair; Both the first slider and the second slider have a wedge-shaped inclined surface structure. The inclined surface of the first slider is fitted to the inclined surface of the second slider. The first slider is connected to the output shaft of the motor. The first slide rail is horizontally disposed on the upper base plate, the first slider is slidably connected to the first slide rail, the second slide rail is disposed on the inclined surface of the first slider, the second slider is slidably disposed on the second slide rail, the universal joint is disposed on the top of the second slider, the first bearing is disposed on the top of the universal joint, and the first bearing is connected to the upper panel through the bearing pair.

[0007] A further technical solution of the present invention is that the tilt adjustment module further includes a base, a third slide rail and a third slider. The base is fixedly disposed on the upper base plate, the third slide rail is vertically disposed on the side of the second slider, the third slider is vertically disposed on the base, and the third slider is slidably connected to the third slide rail.

[0008] A further technical solution of the present invention is that the motor is a servo motor, and the output shaft of the motor is connected to the first slider through a ball screw mechanism to convert the rotational motion into the linear motion of the first slider.

[0009] A further technical solution of the present invention is that the tilt adjustment module comprises three groups.

[0010] A further technical solution of the present invention is that the bottom module includes: the bottom module includes a lower base plate, at least one X-axis drive module, at least one Y-axis drive module and at least one free module disposed on the base plate; The X-axis drive module, Y-axis drive module, and free module are all equipped with second bearings, and the upper base plate is mounted on the second bearings.

[0011] A further technical solution of the present invention is that the X-axis drive module includes an X-axis drive motor and an X-axis motion module movably disposed on the lower base plate, wherein the X-axis drive motor is used to drive the X-axis motion module to move in the X-axis direction.

[0012] A further technical solution of the present invention is that the Y-axis motion module includes a Y-axis drive motor and a Y-axis motion module movably disposed on the lower base plate, wherein the Y-axis drive motor is used to drive the Y-axis motion module to move in the Y-axis direction.

[0013] A further technical solution of the present invention is that the free module includes a fourth slider, a lower module, and an upper module, wherein the fourth slider is disposed on the lower base plate, a fourth slide rail is disposed on the fourth slider along the Y direction, the lower module is slidably disposed on the fourth slide rail, a slide groove is disposed on the top of the lower module along the X direction, the upper module is slidably disposed in the slide groove, and a second bearing is disposed on the top of the upper module and connected to the upper base plate.

[0014] A further technical solution of the present invention is that a grating seat is provided on the lower base plate near the X-axis drive module and the Y-axis drive module, and a grating reading head is provided on the grating seat.

[0015] The beneficial effects of the multi-axis alignment platform of this invention are: The present invention, through the above technical solution, includes: a bottom module, an upper base plate, an upper panel, and at least two sets of tilt adjustment modules; the upper base plate is disposed above the bottom module, the tilt adjustment modules are disposed on the upper base plate, and the upper panel is disposed on top of the tilt adjustment modules; the bottom module is used to drive the upper base plate to move along the X-axis, Y-axis, or R-axis direction, thereby driving the upper panel to move along the X-axis, Y-axis, or R-axis direction; the two sets of tilt adjustment modules are disposed opposite to each other on the upper base plate, and are used to adjust the tilt angle of the upper panel, which can improve the precision of the alignment platform. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the overall structure of a preferred embodiment of the multi-axis alignment platform of the present invention; Figure 2 This is a schematic diagram of a preferred embodiment of the multi-axis alignment platform of the present invention without a top panel; Figure 3 This is a schematic diagram of the overall structure of the tilt adjustment module; Figure 4 This is an exploded view of the tilt adjustment module; Figure 5 This is a schematic diagram of the overall structure of the bottom module; Figure 6 This is a schematic diagram of the exploded structure of the bottom module.

[0017] Explanation of reference numerals in the attached figures: Bottom Module 10: Lower base plate 101; X-axis drive module 102; Y-axis drive module 103; X-axis drive motor 104; X-axis motion module 105; Y-axis drive motor 106; Y-axis motion module 107; Second bearing 108; Free module 109; Fourth slider 110; Lower module 111; Upper module 112; Grating holder 113; Grating reading head 114; Top plate 20; Top panel 30; Tilt adjustment module 40: motor 401; first slide rail 402; first slider 403; second slide rail 404; second slider 405; universal joint 406; first bearing 407; bearing pair 408; base 409; third slide rail 410; third slider 411; bearing sleeve 412. Detailed Implementation

[0018] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to the accompanying drawings and embodiments.

[0019] This invention proposes a multi-axis alignment platform, such as Figures 1 to 6As shown, a preferred embodiment of the multi-axis alignment platform of the present invention includes a bottom module 10, an upper base plate 20, an upper panel 30, and at least two sets of tilt adjustment modules 40.

[0020] The upper base plate 20 is disposed above the bottom module 10, the tilt adjustment module 40 is disposed on the upper base plate 20, and the upper panel 30 is disposed on the top of the tilt adjustment module 40.

[0021] The bottom module 10 is used to drive the upper base plate 20 to move along the X-axis, Y-axis or R-axis direction, so as to drive the upper panel 30 to move along the X-axis, Y-axis or R-axis direction.

[0022] The two sets of tilt adjustment modules 40 are disposed opposite to each other on the upper base plate 20, and are used to coordinately adjust the tilt angle of the upper panel 30 around the X-axis or Y-axis.

[0023] During operation, the X-axis, Y-axis and R-axis positions of the upper panel 30 can be adjusted by the bottom module 10, and the tilt angle adjustment module 40 can be used to adjust the tilt angle of the upper panel 30, thereby improving the alignment accuracy.

[0024] This embodiment constructs a multi-degree-of-freedom alignment architecture of "XYR translation + dual-axis tilt". The bottom module 10 is used to achieve coarse plane adjustment, and the tilt adjustment module 40 is used to achieve fine attitude adjustment, which significantly improves the spatial alignment dimension and overall precision of the alignment platform.

[0025] Furthermore, such as Figure 3 and Figure 4 As shown, in this embodiment, the tilt adjustment module 40 includes: a motor 401, a first slide rail 402, a first slider 403, a second slide rail 404, a second slider 405, a universal joint 406, a first bearing 407, and a bearing pair 408.

[0026] Both the first slider 403 and the second slider 405 are wedge-shaped inclined surface structures. The inclined surface of the first slider 403 is fitted to the inclined surface of the second slider 405. The first slider 403 is connected to the output shaft of the motor 401.

[0027] The first slide rail 402 is horizontally disposed on the upper base plate 20. The first slider 403 is slidably connected to the first slide rail 402. The second slide rail 404 is disposed on the inclined surface of the first slider 403. The second slider 405 is slidably disposed on the second slide rail 404. The universal joint 406 is disposed on the top of the second slider 405. The first bearing 407 is disposed on the top of the universal joint 406. The first bearing 407 is connected to the upper panel 30 through the bearing pair 408. A bearing sleeve 412 is disposed outside the first bearing 407.

[0028] In this embodiment, when the motor 401 drives the first slider 403 of one of the two tilt adjustment modules 40 to move and slide, the second slider 405 moves up or down along the inclined surface of the first slider 403. At this time, if the first slider 403 of the other tilt adjustment module 40 remains stationary, the upper panel 30 will adjust its tilt angle with the movement of the first slider 403 to achieve precise alignment.

[0029] This embodiment uses a wedge-shaped slider in conjunction with the universal joint 406 to convert the rotational torque of the motor 401 into the lifting stroke of the upper panel 30. The structure is simple and compact, with good transmission rigidity. Furthermore, the universal joint 406 can adapt to the tilt angle changes of the upper panel 30, avoiding motion interference.

[0030] In this embodiment, the motor 401 is a servo motor. The output shaft of the motor 401 is connected to the first slider 403 via a ball screw mechanism to convert rotational motion into linear motion of the first slider 403. This embodiment uses a servo motor in conjunction with a ball screw to achieve micron-level or even nanometer-level feed resolution, meeting the stringent requirements of high-precision alignment scenarios and minute angle adjustments.

[0031] Furthermore, in this embodiment, the tilt adjustment module 40 further includes a base 409, a third slide rail 410, and a third slider 411. The base 409 is fixedly disposed on the upper base plate 20, the third slide rail 410 is vertically disposed on the side of the second slider 405, and the third slider 411 is vertically disposed on the base 409. The third slider 411 is slidably connected to the third slide rail 410.

[0032] In this embodiment, the second slider 405 can move up and down relative to the base 409 via the third slider 411. Thus, when the motor 401 drives the first slider 403 of one of the two sets of tilt adjustment modules 40 to move, the second slider 405 can move up or down along the inclined surface of the first slider 403, thereby limiting the second slider 405 in the horizontal direction. This, in conjunction with the first slider 403, enables the tilt adjustment and precise alignment of the upper panel 30.

[0033] As one implementation scheme, in this embodiment, the number of tilt adjustment modules 40 is three sets.

[0034] Furthermore, such as Figure 5 and Figure 6As shown, in this embodiment, the bottom module 10 includes: a bottom plate 101, at least one X-axis drive module 102, at least one Y-axis drive module 103 and at least one free module 109 disposed on the bottom plate.

[0035] The X-axis drive module 102, Y-axis drive module 103 and free module 109 are each provided with a second bearing 108, and the upper base plate 20 is disposed on the second bearing 108.

[0036] In this embodiment, the X-axis drive module 102 includes an X-axis drive motor 401104 and an X-axis motion module 105 movably disposed on the lower base plate 101. The X-axis drive motor 401104 is used to drive the X-axis motion module 105 to move in the X-axis direction.

[0037] The Y-axis motion module 107 includes a Y-axis drive motor 401106 and a Y-axis motion module 107 movably mounted on the lower base plate 101. The Y-axis drive motor 401106 is used to drive the Y-axis motion module 107 to move in the Y-axis direction.

[0038] The free module 109 includes a fourth slider 110, a lower module 111, and an upper module 112. The fourth slider 110 is mounted on the lower base plate 101, and a fourth slide rail is provided along the Y direction on the fourth slider 110. The lower module 111 is slidably mounted on the fourth slide rail, and a groove is provided on the top of the lower module 111 along the X direction. The upper module 112 is slidably mounted within the groove. A second bearing 108 is located on the top of the upper module 112 and is connected to the upper base plate 20. This embodiment utilizes the free module 109 to ensure the translational characteristics of the upper base plate 20 during movement, avoiding jamming caused by multiple drives.

[0039] In this embodiment, grating mounts 113 are provided on the lower base plate 101 near the X-axis drive module 102 and the Y-axis drive module 103. A grating reading head 114 is provided on the grating mount 113 for real-time feedback of the displacement of the upper base plate 20. This embodiment eliminates the backlash and cumulative error of traditional semi-closed-loop control through the grating reading head 114, significantly improving the absolute positioning accuracy of the system.

[0040] It should be noted that, as one implementation scheme, in this embodiment, the multi-axis alignment platform also includes a control system connected to each motor 401.

[0041] The beneficial effects of the multi-axis alignment platform of this invention are: The present invention, through the above technical solution, includes: a bottom module, an upper base plate, an upper panel, and at least two sets of tilt adjustment modules; the upper base plate is disposed above the bottom module, the tilt adjustment modules are disposed on the upper base plate, and the upper panel is disposed on top of the tilt adjustment modules; the bottom module is used to drive the upper base plate to move along the X-axis, Y-axis, or R-axis direction, thereby driving the upper panel to move along the X-axis, Y-axis, or R-axis direction; the two sets of tilt adjustment modules are disposed opposite to each other on the upper base plate, and are used to adjust the tilt angle of the upper panel, which can improve the precision of the alignment platform.

[0042] The above description, in conjunction with specific preferred embodiments, provides a further detailed explanation of the present invention. It should not be construed that the specific implementation of the present invention is limited to these descriptions. For those skilled in the art, various simple deductions or substitutions can be made without departing from the concept of the present invention, and all such modifications and substitutions should be considered within the scope of protection of the present invention.

Claims

1. A multi-axis alignment platform, characterized in that, include: Bottom module, top base plate, top panel, and at least two tilt adjustment modules; The upper base plate is disposed above the bottom module, the tilt adjustment module is disposed on the upper base plate, and the upper panel is disposed on the top of the tilt adjustment module; The bottom module is used to drive the upper base plate to move along the X-axis, Y-axis or R-axis direction, so as to drive the upper panel to move along the X-axis, Y-axis or R-axis direction; The two sets of tilt adjustment modules are arranged opposite to each other on the upper base plate, and are used to coordinately adjust the tilt angle of the upper panel around the X-axis or Y-axis.

2. The multi-axis alignment platform according to claim 1, characterized in that, The tilt adjustment module includes: a motor, a first slide rail, a first slider, a second slide rail, a second slider, a universal joint, a first bearing, and a bearing pair; Both the first slider and the second slider have a wedge-shaped inclined surface structure. The inclined surface of the first slider is fitted to the inclined surface of the second slider. The first slider is connected to the output shaft of the motor. The first slide rail is horizontally disposed on the upper base plate, the first slider is slidably connected to the first slide rail, the second slide rail is disposed on the inclined surface of the first slider, the second slider is slidably disposed on the second slide rail, the universal joint is disposed on the top of the second slider, the first bearing is disposed on the top of the universal joint, and the first bearing is connected to the upper panel through the bearing pair.

3. The multi-axis alignment platform according to claim 2, characterized in that, The tilt adjustment module also includes a base, a third slide rail, and a third slider. The base is fixedly mounted on the upper base plate, the third slide rail is vertically mounted on the side of the second slider, and the third slider is vertically mounted on the base. The third slider is slidably connected to the third slide rail.

4. The multi-axis alignment platform according to claim 2, characterized in that, The motor is a servo motor, and the output shaft of the motor is connected to the first slider through a ball screw mechanism to convert the rotational motion into the linear motion of the first slider.

5. The multi-axis alignment platform according to claim 1, characterized in that, The tilt adjustment module consists of three sets.

6. The multi-axis alignment platform according to claim 1, characterized in that, The bottom module includes: a bottom plate, at least one X-axis drive module, at least one Y-axis drive module, and at least one free module disposed on the bottom plate; The X-axis drive module, Y-axis drive module, and free module are all equipped with second bearings, and the upper base plate is mounted on the second bearings.

7. The multi-axis alignment platform according to claim 6, characterized in that, The X-axis drive module includes an X-axis drive motor and an X-axis motion module movably mounted on the lower base plate. The X-axis drive motor is used to drive the X-axis motion module to move in the X-axis direction.

8. The multi-axis alignment platform according to claim 6, characterized in that, The Y-axis motion module includes a Y-axis drive motor and a Y-axis motion module movably mounted on the lower base plate. The Y-axis drive motor is used to drive the Y-axis motion module to move in the Y-axis direction.

9. The multi-axis alignment platform according to claim 6, characterized in that, The free module includes a fourth slider, a lower module, and an upper module. The fourth slider is disposed on the lower base plate, and a fourth slide rail is disposed on the fourth slider along the Y direction. The lower module is slidably disposed on the fourth slide rail. A slide groove is disposed on the top of the lower module along the X direction. The upper module is slidably disposed in the slide groove. A second bearing is disposed on the top of the upper module and is connected to the upper base plate.

10. The multi-axis alignment platform according to claim 6, characterized in that, A grating mount is provided on the lower base plate near the X-axis drive module and the Y-axis drive module, and a grating reading head is provided on the grating mount.

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