An adaptive differential pressure balancing system and balancing method

Abstract

The application discloses a self-adaptive differential pressure balancing system, which comprises a soft material coupling module, vacuum suction modules, first and second negative pressure sensors, a signal processing module, a conductive lever conversion and transmission module and an electromagnetic valve module. The vacuum suction modules are communicated with the coupling module, and the first and second negative pressure sensors collect negative pressure values of working ends and source ends. The signal processing module calculates a pressure difference between the two ends, generates a control signal based on the pressure difference to maintain the pressure difference around a target value, generates an emergency stop signal when the pressure difference exceeds a threshold value, and the conductive lever conversion and transmission module comprises a piezoelectric ceramic, a segmented insulated conductive lever and a midpoint voltage reduction converter. When the piezoelectric ceramic is controlled to displace, the piezoelectric ceramic touches the conductive lever, so that a driving voltage is reduced and then transmitted to the electromagnetic valve module in a mechanical touching mode. The electromagnetic valve module adjusts suction speed according to voltage on-off to balance the pressure difference. The emergency brake switch is disconnected from a mechanical arm and a suction device according to an emergency signal. The application takes a double-end pressure difference as a control basis, overcomes pipeline air resistance error, realizes high-low pressure isolation through mechanical touching, improves stability and avoids sample deformation through the soft coupling module.

Description

Technical Field

[0001] This invention relates to the field of differential pressure balance technology, and in particular to an adaptive differential pressure balance system and balancing method. Background Technology

[0002] Traditional suction devices are operated manually or directly pressed onto the device by mechanical stress. The positive pressure generated by mechanical stress causes the sample contact surface to wrinkle, which in turn increases the negative pressure within the suction device. This increased negative pressure compromises sample integrity. Therefore, it is difficult to accurately and stably balance the negative pressure at the suction device. The signal processing module pre-sets a safe negative pressure threshold range of 300~400 Mbar at the suction device, and the negative pressure of the suction device needs to be balanced within this safe threshold range.

[0003] Negative pressure balancing is a crucial aspect of the safe operation of suction devices. Current technologies typically employ a single negative pressure sensor to detect the negative pressure within the system and use a PID algorithm to compare the detected value with a target setpoint to adjust the suction speed of the vacuum pump. However, due to air resistance in the connecting pipes, a dynamic pressure difference often exists between the negative pressure at the vacuum pump end (source end) and the negative pressure at the adsorption device end (working end). A single sensor cannot accurately reflect the true negative pressure state at the working end, resulting in insufficient control precision and a risk of sample damage. Furthermore, in existing technologies, the piezoelectric drive circuit driving the solenoid valve is usually directly electrically connected to the control circuit, making it easy for high-voltage interference to enter the low-voltage control side, affecting system stability. Therefore, current technologies lack a suction control system capable of adaptive balancing based on the dual-end pressure difference while simultaneously achieving electrical isolation between high and low voltage levels. Summary of the Invention

[0004] To address the shortcomings of existing technologies, this invention provides an adaptive differential pressure balancing system and balancing method, aiming to solve one or more problems in the background technology.

[0005] To achieve the above objectives, the present invention adopts the following technical solution: an adaptive differential pressure balancing system, comprising: a coupling module made of a soft material, having an adsorption interface for connecting an adsorption device, a robotic arm interface for connecting a robotic arm, and a first negative pressure acquisition interface, wherein the negative pressure at each interface of the coupling module is equal; a vacuum suction module, including a vacuum pump and a vacuum chamber, wherein the vacuum chamber is connected to the coupling module via a connecting pipe; a first negative pressure sensor connected to the first negative pressure acquisition interface for acquiring the negative pressure value at the working end; a second negative pressure sensor installed on the connecting pipe for acquiring the negative pressure value at the source end and feeding back the negative pressure value at the source end in real time; a signal processing module for receiving the negative pressure value at the working end and the negative pressure value at the source end, calculating the pressure difference between the two, and generating a control signal based on the pressure difference to maintain the pressure difference near a preset target value when the negative pressure value at the working end is within a preset safety threshold range; the signal processing module is also used to generate an emergency stop signal when the negative pressure value at the working end exceeds the preset safety threshold range; and a conductive lever conversion and transmission module, including piezoelectric ceramic... The system comprises a ceramic, a conductive lever, and a voltage-reducing converter. The conductive lever has a first conductive section and a second conductive section that are insulated from each other. The voltage-reducing converter is electrically connected to the midpoint of the conductive lever. The first conductive section connects the piezoelectric ceramic to the input terminal of the voltage-reducing converter, and the second conductive section connects the output terminal of the voltage-reducing converter to the conductive end of the conductive lever. Under normal conditions, the conductive end is separated from the solenoid valve module. When the piezoelectric ceramic is displaced according to the control signal, it touches the conductive lever, causing the driving voltage to be reduced by the first conductive section and the voltage-reducing converter, and then transmitted to the solenoid valve module by mechanical contact via the second conductive section and the conductive end. The solenoid valve module is used to open the valve when it receives the reduced voltage and close the valve when it does not receive it, so as to regulate the gas flow rate entering the vacuum suction module, thereby balancing the pressure difference between the negative pressure value at the working end and the negative pressure value at the source end. An emergency stop switch is electrically connected to the adsorption device and the robotic arm, and is used to disconnect the fixed connection with the robotic arm and the adsorption connection with the adsorption device according to the emergency stop signal.

[0006] Furthermore, the signal processing module generates the control signal based on the pressure difference using a PID algorithm.

[0007] Furthermore, it also includes a control module and a filtering module. The control module is used to convert the control signal into a PWM signal, and the filtering module is used to convert the PWM signal into a smooth DC voltage to drive the piezoelectric ceramic.

[0008] Furthermore, the conductive lever includes a piezoelectric end, a conductive end, and a support rod. The midpoint of the conductive lever is fixed on the support rod, and the piezoelectric end and the conductive end are symmetrically distributed on both sides of the support rod.

[0009] Furthermore, the ratio of the distance from the piezoelectric end to the support rod to the distance from the conductive end to the support rod is 1:1.2 to 1:3.

[0010] Furthermore, the buck converter is a DC-DC buck circuit or an isolated DC-DC module.

[0011] Furthermore, the preset safety threshold range is 300~400Mbar, and the preset target value is 40~60Mbar.

[0012] Furthermore, the coupling module also includes a vacuum chamber interface, through which the connecting pipe is connected to the coupling module.

[0013] Furthermore, the emergency brake switch is electrically connected to the signal processing module via a communication module.

[0014] An adaptive differential pressure balancing method includes the following steps: Collect the negative pressure value at the working end and the negative pressure value at the source end, and feed back the negative pressure value at the source end in real time; Calculate the pressure difference between the working end negative pressure value and the source end negative pressure value; When the negative pressure value at the working end is within a preset safety threshold range, a control signal is generated based on the pressure difference to maintain the pressure difference near a preset target value. According to the control signal, the piezoelectric ceramic is driven to generate displacement and touch the conductive lever, so that the driving voltage is transmitted to the step-down converter through the first conductive section which is insulated from each other. After being stepped down, the voltage is output to the solenoid valve module through the second conductive section and the conductive end in a mechanical contact manner. The solenoid valve module opens or closes the valve based on whether it receives the reduced voltage, thereby adjusting the gas flow rate entering the vacuum suction module to balance the pressure difference; When the negative pressure value at the working end exceeds the preset safety threshold range, an emergency stop signal is generated, disconnecting the fixed connection with the robotic arm and the adsorption connection with the adsorption device.

[0015] The adaptive differential pressure balancing system and method described in this invention have the following advantages: By setting a first negative pressure sensor and a second negative pressure sensor to collect the negative pressure values ​​at the working end and the source end respectively, and using the pressure difference between the two as the control basis, the differential pressure error caused by the air resistance of the connecting pipe is overcome, and adaptive differential pressure balancing is achieved; In view of the problems in the prior art where the piezoelectric drive circuit and the control circuit are directly electrically connected and high-voltage interference is easily introduced into the low-voltage side, this invention achieves physical isolation of the high and low voltage circuits under normal conditions and mechanical contact conduction only during adjustment through a conductive lever conversion transmission module, effectively suppressing high-voltage interference and improving system stability; In addition, the coupling module is made of soft material to ensure uniform negative pressure at each interface and avoid sample deformation and damage due to uneven local pressure. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the adaptive differential pressure balancing system according to a preferred embodiment of the present invention; Explanation of reference numerals in the attached drawings: 1. Negative pressure acquisition and processing module; 101. First connecting pipe; 102. Negative pressure acquisition end; 103. Negative pressure transmission end; 2. Communication module; 3. Signal processing module; 4. Control module; 5. Coupling module; 51. Vacuum chamber interface; 52. Adsorption interface; 53. Robotic arm interface; 54. Negative pressure acquisition interface; 6. Filtering module; 7. Conductive lever conversion and transmission module; 71. Piezoelectric ceramic; 72. Piezoelectric ceramic base; 73. Conductive lever; 73. Conductive lever piezoelectric end; 731. Conductive lever transmission end; 732. Conductive lever support rod; 74. Voltage converter; 75. Solenoid valve module; 8. Solenoid valve driver; 81. Solenoid valve; 82. Vacuum suction module; 9. Vacuum pump; 91. Vacuum chamber; 92. Vacuum chamber negative pressure sensor; 93. Vacuum chamber negative pressure sensor connection end; 931. Vacuum chamber negative pressure sensor transmission end; 932. Second connecting pipe; 94. Emergency brake switch; 10. Adsorption device; 12. Robotic arm. Detailed Implementation

[0017] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. The components of the embodiments of the present invention described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0018] Therefore, the following detailed description of the embodiments of the invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the invention without inventive effort are within the scope of protection of the invention.

[0019] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0020] The basic embodiment of the present invention provides an adaptive differential pressure balancing system, the core architecture of which includes: a soft coupling module, a vacuum suction module, a dual negative pressure acquisition unit, a signal processing module, a conductive lever conversion and transmission module, a solenoid valve module, and an emergency braking switch.

[0021] The core inventive concept of this invention lies in: using dual negative pressure sensors to collect the negative pressure difference between the working end and the source end in real time, generating a control signal based on this pressure difference to drive the piezoelectric ceramic to produce mechanical displacement, using conductive levers to achieve physical isolation and voltage conversion of high and low voltage circuits, and driving the solenoid valve to adjust the suction speed through mechanical contact, thereby achieving adaptive pressure difference balance.

[0022] The PID algorithm, control module, filtering module, specific structure of the conductive lever, lever ratio parameter, threshold parameter, etc., described below are all preferred embodiments of the present invention, and not limitations on the scope of protection of the present invention. Those skilled in the art can achieve the same technical effect using other equivalent control algorithms, signal conversion circuits, or mechanical structures without departing from the core concept of the present invention.

[0023] like Figure 1 As shown, the adaptive differential pressure balancing system provided in this embodiment includes: The coupling module 5, made of a flexible material, has a vacuum chamber interface 51, an adsorption interface 52 for connecting to the adsorption device 11, a robotic arm interface 53 for connecting to the robotic arm 12, and a first negative pressure acquisition interface 54. The properties of the flexible material ensure that the internal gas path of the coupling module 5 is connected, and the negative pressure at each interface tends to be equal, avoiding sample deformation due to uneven local pressure.

[0024] The vacuum suction module 9 includes a vacuum pump 91, a vacuum chamber 92, and a second connecting pipe 94. The vacuum chamber 92 is connected to the vacuum chamber interface 51 of the coupling module 5 through the second connecting pipe 94.

[0025] A first negative pressure sensor, connected to the first negative pressure acquisition interface 54, is used to acquire the negative pressure value at the working end. In this embodiment, the first negative pressure sensor is implemented using an integrated negative pressure acquisition and processing module 1, which includes a first connecting pipe 101, a negative pressure acquisition end 102, and a negative pressure transmission end 103. The first connecting pipe 101 is connected to the first negative pressure acquisition interface 54, the negative pressure acquisition end 102 acquires the negative pressure within the coupling module 5 through the first connecting pipe 101, and the negative pressure transmission end 103 outputs the acquired negative pressure signal.

[0026] It should be understood that the "first negative pressure sensor" described in this invention is not limited to the integrated module described in this embodiment. Any sensor or sensor assembly capable of acquiring and transmitting negative pressure signals falls within the protection scope of this invention.

[0027] A second negative pressure sensor, installed on the second connecting pipe 94, is used to collect the negative pressure value at the source end and provide real-time feedback of the negative pressure value. In this embodiment, the second negative pressure sensor is a vacuum chamber negative pressure sensor 93, which includes a vacuum chamber negative pressure sensor connection terminal 931 and a vacuum chamber negative pressure sensor conduction terminal 932. The vacuum chamber negative pressure sensor connection terminal 931 is connected to the second connecting pipe 94, and the vacuum chamber negative pressure sensor conduction terminal 932 outputs the collected negative pressure signal at the source end.

[0028] The signal processing module 3 is electrically connected to the first negative pressure sensor and the second negative pressure sensor, respectively, and is used to receive the negative pressure value at the working end and the negative pressure value at the source end, calculate the pressure difference between them, and generate a control signal based on the pressure difference to maintain the pressure difference near a preset target value when the negative pressure value at the working end is within a preset safety threshold range; the signal processing module 3 is also used to generate an emergency stop signal when the negative pressure value at the working end exceeds the preset safety threshold range.

[0029] Preferably, the signal processing module 3 generates the control signal based on a PID algorithm, and its calculation formula is as follows: P(t) = Kp[e(t) + 1 / T] i ∫e(t)dt+T d (de(t) / dt)] Where P(t) is the output PID control signal; e(t) is the pressure difference between the working end negative pressure value and the source end negative pressure value; Kp is the proportional coefficient; T i T is the integration time constant; d is the differential time constant; t is the time elapsed from the start of adjustment to the output P(t).

[0030] It should be understood that the PID algorithm is only one preferred control method of this invention. The "control signal" mentioned in this invention can be generated using any suitable control algorithm, including but not limited to fuzzy control algorithm, neural network control algorithm, sliding mode control algorithm, etc., as long as it can adjust the on / off state of the solenoid valve based on the differential pressure signal to achieve differential pressure balance.

[0031] Preferably, the system further includes a control module 4 and a filtering module 6. The control module 4 is electrically connected to the signal processing module 3 and is used to convert the control signal into a PWM signal with a corresponding pulse width; the filtering module 6 is electrically connected to the control module 4 and is used to convert the PWM signal into a smooth DC voltage to drive the piezoelectric ceramic 71.

[0032] It should be understood that the control module 4 and the filtering module 6 are only preferred signal conversion methods of the present invention. In other embodiments, the signal processing module 3 can also directly output a DC voltage signal capable of driving the piezoelectric ceramic 71, without the need for additional control and filtering modules.

[0033] The conductive lever conversion and transmission module 7 includes a piezoelectric ceramic 71, a conductive lever 73, and a step-down converter 75. The conductive lever 73 has a first conductive segment and a second conductive segment that are insulated from each other. The step-down converter 75 is electrically connected to the midpoint of the conductive lever 73. The first conductive segment extends from the piezoelectric end 731 of the conductive lever 73 to the input end of the step-down converter 75, and the second conductive segment extends from the output end of the step-down converter 75 to the conductive end 732 of the conductive lever 73. Under normal conditions, the conductive end 732 is separated from the solenoid valve module 8, and the high and low voltage circuits are completely physically isolated. When the piezoelectric ceramic 71 generates a vertical displacement according to the control signal, it touches the piezoelectric end 731 of the conductive lever 73, causing the driving voltage to be transmitted through the first conductive segment to the step-down converter 75. After step-down conversion, the voltage is then mechanically transmitted from the second conductive segment to the solenoid valve module 8 via the conductive end 732.

[0034] Preferably, the conductive lever 73 further includes a conductive lever support rod 74, the midpoint of the conductive lever 73 is fixed on the conductive lever support rod 74, and the piezoelectric end 731 and the conductive end 732 are symmetrically distributed on both sides of the conductive lever support rod 74.

[0035] More preferably, the ratio of the distance from the piezoelectric end 731 to the conductive lever support rod 74 to the distance from the conductive end 732 to the conductive lever support rod 74 is 1:1.2 to 1:3, so that the minute vertical displacement of the piezoelectric ceramic 71 is amplified by the conductive lever 73 and then acts on the solenoid valve module 8, thereby improving the triggering reliability.

[0036] Preferably, the piezoelectric ceramic 71 is a high-voltage stacked piezoelectric ceramic, fixed on the piezoelectric ceramic base 72, and can withstand a high driving voltage and generate sufficient vertical displacement.

[0037] Preferably, the step-down converter 75 is a DC-DC step-down circuit or an isolated DC-DC module, used to convert the high DC voltage conducted by the piezoelectric ceramic 71 into a low DC voltage suitable for driving the solenoid valve. Using an isolated DC-DC module can further enhance the electrical isolation between the high and low voltage circuits.

[0038] Preferably, conductive contacts are provided on the upper surface of the piezoelectric ceramic 71 and the lower surface of the piezoelectric end 731 of the conductive lever 73; conductive contacts are also provided between the conductive end 732 of the conductive lever 73 and the solenoid valve module 8. The conductive contacts are gold-plated contacts or elastic conductive springs, which can ensure the stability and reliability of the electrical connection during mechanical contact.

[0039] The solenoid valve module 8 is used to open the valve when a reduced voltage is received and close the valve when no voltage is received, thereby regulating the gas flow rate entering the vacuum pump 91 and adjusting the suction speed of the vacuum pump 91 to balance the pressure difference between the working end negative pressure value and the source end negative pressure value. In this embodiment, the solenoid valve module 8 includes a solenoid valve driver 81 and a solenoid valve 82. The solenoid valve driver 81 drives the solenoid valve 82 to open the valve when a low DC voltage is received.

[0040] Emergency brake switch 10 is electrically connected to the signal processing module 3, and also electrically connected to the adsorption device 11 and the robotic arm 12. It is used to disconnect the fixed connection between the adaptive differential pressure balance system and the robotic arm 12 and the adsorption connection with the adsorption device 11 according to the emergency stop signal, so that the system can be quickly separated from the robotic arm and the sample to avoid sample damage.

[0041] Preferably, the emergency brake switch 10, the first negative pressure sensor, and the second negative pressure sensor are all electrically connected to the signal processing module 3 via the communication module 2. The communication module 2 is used to realize data transmission, data reception, and protocol conversion between the modules.

[0042] Preferably, the preset safety threshold range is an absolute negative pressure of 300~400Mbar at the working end, and the preset target value is a pressure difference of 40~60Mbar between the working end and the source end.

[0043] In this system, the negative pressure safety threshold (300~400 Mbar) refers to the absolute safe range of negative pressure at the working end (coupled module). When the negative pressure at the working end exceeds this range, an emergency stop is triggered. Within the safe range, the system uses the pressure difference between the working end and the source end (vacuum chamber) as the PID control input to maintain this pressure difference near a preset target value, thereby achieving adaptive pressure difference balance.

[0044] System working principle When the system starts working, vacuum pump 91 starts and evacuates coupling module 5 through second connecting pipe 94, causing adsorption device 11 to adsorb sample. First negative pressure sensor collects the negative pressure value at the working end of coupling module 5 in real time, and second negative pressure sensor collects the negative pressure value at the source end of second connecting pipe 94 in real time, and feeds the two negative pressure values ​​back to signal processing module 3.

[0045] The signal processing module 3 calculates the pressure difference between the negative pressure value at the working end and the negative pressure value at the source end. If the negative pressure value at the working end exceeds the safe threshold range of 300~400Mbar, the signal processing module 3 immediately generates an emergency stop signal, disconnecting the fixed connection between the system and the robotic arm 12 and the adsorption connection with the adsorption device 11 through the emergency brake switch 10.

[0046] If the negative pressure at the working end is within the safe threshold range, the signal processing module 3 generates a control signal based on the pressure difference, which is converted into a PWM signal by the control module 4, and then converted into a smooth DC high voltage by the filtering module 6 to drive the piezoelectric ceramic 71. The piezoelectric ceramic 71 generates a vertical displacement, touching the piezoelectric end 731 of the conductive lever 73, transmitting the DC high voltage to the buck converter 75 through the first conductive section. The buck converter 75 converts the DC high voltage to a DC low voltage, which is then transmitted to the conducting end 732 through the second conductive section. At the same time, the conductive lever 73 rotates around the support rod 74, causing the conducting end 732 to touch the solenoid valve driver 81 downwards, transmitting the DC low voltage to the solenoid valve driver 81.

[0047] The solenoid valve driver 81 drives the solenoid valve 82 to open or close the valve, thereby adjusting the gas flow rate into the vacuum pump 91 and thus adjusting the suction speed of the vacuum pump 91. This keeps the pressure difference between the working end negative pressure value and the source end negative pressure value near the target value of 40~60Mbar, achieving adaptive pressure difference balance.

[0048] The present invention also provides an adaptive differential pressure balancing method, applied to the adaptive differential pressure balancing system described in any of the above embodiments, comprising the following steps: S1. The adaptive differential pressure balance system is coupled to the adsorption device 11 and the robotic arm 12 through the coupling module 5. S2. The negative pressure acquisition and processing module 1 acquires the negative pressure in the coupling module 5 and transmits the acquired negative pressure to the communication module 2; S3. The signal processing module receives the working end negative voltage value and the source end negative voltage value transmitted in step S3, and executes the following control logic: When the negative pressure value at the working end exceeds the preset safety threshold range, an emergency stop signal is generated and transmitted to the communication module 2; When the negative pressure value at the working end is within the preset safety threshold range, PID calculation is performed based on the real-time pressure difference between the negative pressure value at the working end and the negative pressure value at the source end, and a PID control signal is generated and transmitted to the control module 4. S4. The signal processing module receives the negative pressure transmitted in step S3 and the negative pressure conducted in step S5. Based on the negative pressure collected in step S1, the negative pressure safety threshold, and the pressure difference between the negative pressure conducted in step S5, it performs PID calculation to generate a PID control signal and transmits it to the control module 4. Based on the calculation result, it generates an emergency stop signal and transmits it to the communication module 2. S5. The control module receives the PID control signal transmitted in step S4, converts it into a corresponding pulse width PWM signal, and transmits it to the filtering module 6. The filtering module 6 converts the corresponding pulse width PWM signal into a smooth DC high voltage and transmits it to the piezoelectric ceramic 71. The piezoelectric ceramic 71 generates a vertical displacement according to the DC high voltage, causing the piezoelectric ceramic 71 to touch the piezoelectric end 731 of the conductive lever. The DC high voltage transmitted by the filtering module 6 is then transmitted to the piezoelectric end 731 of the conductive lever and then to the buck converter 75. The buck converter 75 converts the DC high voltage into a DC low voltage and transmits it to the conductive end 73 of the conductive lever. 2; The vertical displacement causes the horizontal position of the piezoelectric end 731 of the conductive lever to be higher than that of the conductive end 732 of the conductive lever. The conductive end 732 of the conductive lever touches the solenoid valve driver 81, and conducts the DC low voltage converted by the step-down converter 75 to the solenoid valve driver 81. The solenoid valve driver 81 drives the solenoid valve 82 to open or close the valve, and adjusts the gas flow rate entering the vacuum suction module 9. The vacuum chamber negative pressure sensor 93 detects the negative pressure of the vacuum chamber 92 and feeds it back to the signal processing module 3 to balance the pressure difference between the working end negative pressure value and the source end negative pressure value, so as to maintain it near the preset target pressure difference value and realize adaptive pressure difference balance. S6. The emergency brake switch 10 stops the fixation of the adaptive differential pressure balance system and the robotic arm 12, and the adsorption of the adsorption device 11, according to the emergency stop signal in step S3.

[0049] In one embodiment of the present invention, step S3 includes the following steps: S31. The communication module 2 transmits the negative pressure received in step S2 and the negative pressure conducted in step S5 to the signal processing module 3. S32. The communication module 2 transmits the emergency stop signal generated by the signal processing module 3 in step S4 to the emergency brake switch 10.

[0050] In one embodiment of the present invention, step S4 includes the following steps: S41. When the pressure difference between the negative pressure collected by the negative pressure acquisition and processing module 1 and the negative pressure transmitted by the vacuum chamber negative pressure sensor 93 is within the negative pressure safety threshold range, the signal processing module 3 generates a PID control signal based on the pressure difference and transmits it to the control module 4 to generate a corresponding pulse width PWM signal, which is then transmitted to the filtering module 6 and converted into a smooth DC high voltage, which is transmitted to the piezoelectric ceramic 71 of the conductive lever conversion and transmission module 7. Specifically, the signal processing module 3 calculates the PID control signal at the current moment based on the PID algorithm. P(t) = Kp[e(t) + 1 / T] i ∫e(t)dt+T d (de(t) / dt)] In the above formula, P(t) is the output PID control signal; e(t) is the difference between the real-time working terminal negative pressure value and the real-time source terminal negative pressure value and the preset target pressure difference value; Kp is the P term of the PID control parameter; Ti is the integral time constant; Td is the derivative time constant; t is the time elapsed from the start of adjustment to the output P(t).

[0051] The above formula represents the correspondence between the real-time pressure difference between the working end negative pressure value and the source end negative pressure value in this embodiment of the invention and the output PID control signal. A PID control signal is generated by calculating the deviation between the real-time pressure difference and the preset target pressure difference value, and transmitted to the control module 4 to generate a corresponding pulse width PWM signal. This signal is then converted into a smooth DC high voltage by the filtering module 6 and transmitted to the conductive lever conversion and transmission module 7 to achieve adaptive pressure difference balance.

[0052] In one embodiment of the present invention, step S41 includes the following steps: S411. The negative pressure collected by the negative pressure acquisition and processing module 1 is less than the negative pressure conducted by the vacuum chamber negative pressure sensor 93, resulting in a pressure difference. Based on this pressure difference, the signal processing module 3 generates a PID control signal and transmits it to the control module 4. The control module 4 converts the received PID control signal into an increased pulse width PWM signal, which is then transmitted to the filtering module 6 and further converted into a smooth DC high voltage, which is transmitted to the piezoelectric ceramic 71 of the conductive lever conversion and transmission module 7. The vertical displacement generated by the piezoelectric ceramic 71 causes it to touch the piezoelectric end 731 of the conductive lever, thus conducting the DC high voltage to the buck converter 75 and converting it into... A low DC voltage is transmitted to the conductive lever transmission end 732; simultaneously, the vertical displacement causes the horizontal position of the piezoelectric end 731 of the conductive lever to be higher than that of the conductive lever transmission end 732. The conductive lever transmission end 732 touches the solenoid valve driver 81, which transmits the low DC voltage converted by the step-down converter 75 to the solenoid valve driver 81, thereby driving the valve of the solenoid valve 82 to open, increasing the gas flow rate into the vacuum suction module 9. The vacuum suction module 9 increases the suction speed according to the increased gas flow rate, increasing the negative pressure in the vacuum chamber 92 until the negative pressure in the vacuum chamber 92 is equal to the negative pressure collected by the negative pressure acquisition and processing module 1. S412. The negative pressure collected by the negative pressure acquisition and processing module 1 is greater than the negative pressure conducted by the vacuum chamber negative pressure sensor 93, generating a pressure difference. Based on this pressure difference, the signal processing module 3 generates a PID control signal and transmits it to the control module 4. The control module 4 converts the received PID control signal into a reduced pulse width PWM signal and transmits it to the filtering module 6, which then converts it into a smooth DC high voltage and transmits it to the piezoelectric ceramic 71 of the conductive lever conversion and transmission module 7. The vertical displacement generated by the piezoelectric ceramic 71 causes it to touch the piezoelectric end 731 of the conductive lever, conducting the DC high voltage to the buck converter 75 and converting it into... A low DC voltage is transmitted to the conductive lever transmission end 732; simultaneously, the vertical displacement causes the horizontal position of the piezoelectric end 731 of the conductive lever to be higher than that of the conductive lever transmission end 732. The conductive lever transmission end 732 touches the solenoid valve driver 81, which transmits the low DC voltage converted by the step-down converter 75 to the solenoid valve driver 81, thereby driving the valve of the solenoid valve 82 to close, reducing the gas flow rate entering the vacuum suction module 9. The vacuum suction module 9 reduces the suction speed according to the reduced gas flow rate, reducing the negative pressure in the vacuum chamber 92 to the point that the negative pressure in the vacuum chamber 92 is equal to the negative pressure collected by the negative pressure acquisition and processing module 1.

[0053] S42. When the negative pressure value at the working end exceeds the negative pressure safety threshold range, the signal processing module 3 generates and outputs an emergency stop signal to the communication module 2.

[0054] This invention provides an adaptive differential pressure balancing system and method. A first negative pressure sensor collects the negative pressure value at the working end, and a second negative pressure sensor collects the negative pressure value at the source end. A signal processing module calculates the pressure difference between the two. When the negative pressure value at the working end is within a preset safety threshold range, a control signal is generated based on the pressure difference. This signal is converted into a PWM signal by the control module and then into a DC high voltage by the filtering module. This drives the piezoelectric ceramic in the conductive lever conversion transmission module to generate mechanical displacement. Under normal conditions, the conductive end of the conductive lever is kept separate from the solenoid valve module, and the high and low voltage circuits are physically isolated. Displacement only occurs when the piezoelectric ceramic is generated. During displacement, the reduced DC low voltage is transmitted to the solenoid valve module via mechanical contact, driving the solenoid valve to open or close and adjust the suction speed of the vacuum suction module. This balances the pressure difference between the working end and the source end, achieving adaptive pressure difference balance and improving the accuracy of pressure difference balance and the system's anti-interference capability. By using a flexible material for the coupling module, the negative pressure at each interface is made the same, preventing sample deformation due to uneven local pressure. Combined with the fixed connection with the robotic arm and adsorption device, the sample maintains its integrity without damaging its structure, improving the safety of the suction process.

[0055] The above description is merely a preferred embodiment of the present invention and is not intended to limit the invention. Various modifications and variations can be made to the present invention by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. An adaptive differential pressure balancing system, characterized in that, include: The coupling module, made of a soft material, has an adsorption interface for connecting to an adsorption device, a robotic arm interface for connecting to a robotic arm, and a first negative pressure acquisition interface, wherein the negative pressure at each interface of the coupling module is equal. The vacuum suction module includes a vacuum pump and a vacuum chamber, wherein the vacuum chamber is connected to the coupling module via a connecting pipe; The first negative pressure sensor is connected to the first negative pressure acquisition interface and is used to acquire the negative pressure value at the working end; The second negative pressure sensor is installed on the connecting pipe and is used to collect the negative pressure value at the source end and feed back the negative pressure value at the source end in real time. The signal processing module is used to receive the negative pressure value at the working end and the negative pressure value at the source end, calculate the pressure difference between them, and generate a control signal based on the pressure difference to maintain the pressure difference near a preset target value when the negative pressure value at the working end is within a preset safety threshold range; the signal processing module is also used to generate an emergency stop signal when the negative pressure value at the working end exceeds the preset safety threshold range. A conductive lever conversion and transmission module includes a piezoelectric ceramic, a conductive lever, and a voltage-reducing converter. The conductive lever has a first conductive segment and a second conductive segment that are insulated from each other. The voltage-reducing converter is electrically connected to the midpoint of the conductive lever. The first conductive segment connects the piezoelectric ceramic to the input terminal of the voltage-reducing converter, and the second conductive segment connects the output terminal of the voltage-reducing converter to the conductive lever's conducting end. Under normal conditions, the conducting end is separated from the solenoid valve module. When the piezoelectric ceramic generates displacement according to the control signal, it touches the conductive lever, causing the driving voltage to be reduced by the first conductive segment and the voltage-reducing converter, and then transmitted to the solenoid valve module via the second conductive segment and the conducting end through mechanical contact. The solenoid valve module is used to open the valve when a reduced voltage is received and close the valve when no voltage is received, so as to regulate the gas flow rate entering the vacuum suction module, thereby balancing the pressure difference between the working end negative pressure value and the source end negative pressure value; An emergency stop switch, electrically connected to the adsorption device and the robotic arm, is used to disconnect the fixed connection with the robotic arm and the adsorption connection with the adsorption device according to the emergency stop signal.

2. The adaptive differential pressure balancing system according to claim 1, characterized in that, The signal processing module generates the control signal based on the pressure difference using a PID algorithm.

3. The adaptive differential pressure balancing system according to claim 1, characterized in that, It also includes a control module and a filtering module. The control module is used to convert the control signal into a PWM signal, and the filtering module is used to convert the PWM signal into a smooth DC voltage to drive the piezoelectric ceramic.

4. The adaptive differential pressure balancing system according to claim 1, characterized in that, The conductive lever includes a piezoelectric end, a conductive end, and a support rod. The midpoint of the conductive lever is fixed on the support rod, and the piezoelectric end and the conductive end are symmetrically distributed on both sides of the support rod.

5. The adaptive differential pressure balancing system according to claim 4, characterized in that, The ratio of the distance from the piezoelectric end to the support rod to the distance from the conductive end to the support rod is 1:1.2 to 1:

3.

6. The adaptive differential pressure balancing system according to claim 1, characterized in that, The step-down converter is a DC-DC step-down circuit or an isolated DC-DC module.

7. The adaptive differential pressure balancing system according to claim 1, characterized in that, The preset safety threshold range is 300~400Mbar, and the preset target value is 40~60Mbar.

8. The adaptive differential pressure balancing system according to claim 1, characterized in that, The coupling module also includes a vacuum chamber interface, and the connecting pipe is connected to the coupling module through the vacuum chamber interface.

9. The adaptive differential pressure balancing system according to claim 1, characterized in that, The emergency brake switch is electrically connected to the signal processing module via a communication module.

10. An adaptive differential pressure balancing method, applied to the adaptive differential pressure balancing system according to any one of claims 1 to 9, characterized in that, Includes the following steps: Collect the negative pressure value at the working end and the negative pressure value at the source end, and feed back the negative pressure value at the source end in real time; Calculate the pressure difference between the working end negative pressure value and the source end negative pressure value; When the negative pressure value at the working end is within a preset safety threshold range, a control signal is generated based on the pressure difference to maintain the pressure difference near a preset target value. According to the control signal, the piezoelectric ceramic is driven to generate displacement and touch the conductive lever, so that the driving voltage is transmitted to the step-down converter through the first conductive section which is insulated from each other. After being stepped down, the voltage is output to the solenoid valve module through the second conductive section and the conductive end in a mechanical contact manner. The solenoid valve module opens or closes the valve based on whether it receives the reduced voltage, thereby adjusting the gas flow rate entering the vacuum suction module to balance the pressure difference; When the negative pressure value at the working end exceeds the preset safety threshold range, an emergency stop signal is generated, disconnecting the fixed connection with the robotic arm and the adsorption connection with the adsorption device.

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