Valves, mass flow controllers, and semiconductor process equipment

Abstract

The application provides a valve, a mass flow controller and a semiconductor process equipment. The valve comprises a valve body, an elastic diaphragm and a driving assembly. The elastic diaphragm is arranged at a distance from a valve port on the valve body when in an initial state, and an edge portion of the elastic diaphragm is fixed to the valve body. The driving assembly comprises a piezoelectric ceramic and a first transmission member. The first transmission member has a first side and a second side facing away from each other. The first side is in contact with the elastic diaphragm, and a normal projection of the first side on a plane parallel to the valve port covers a normal projection of a central portion of the elastic diaphragm inside the edge portion on the plane. The second side faces the piezoelectric ceramic. The piezoelectric ceramic is used to generate deformation when energized, so as to drive the first transmission member to drive the elastic diaphragm to approach and contact the valve port. The application utilizes the deformation of the piezoelectric ceramic itself to drive the elastic diaphragm, thereby improving the control accuracy of the flow.

Description

Technical Field

[0001] The embodiments disclosed herein relate to, but are not limited to, the field of semiconductor development, and specifically to a valve, a mass flow controller, and semiconductor process equipment. Background Technology

[0002] Mass flow controllers are primarily used for the precise measurement and control of fluid mass flow rate. They have important applications in research and production across various fields, including semiconductor microelectronics, special materials development, chemical industry, petroleum industry, pharmaceuticals, environmental protection, and vacuum systems. Internally, a mass flow controller typically includes a solenoid valve structure. This solenoid valve generates magnetic force when energized, which drives a valve core to block the valve orifice, thereby controlling the flow rate and its on / off state within the mass flow controller.

[0003] However, during long-term stable operation, the coil of the solenoid valve inevitably heats up, which increases the resistance of the coil. Since the controller voltage is constant, the current decreases, and the electromagnetic force generated by the coil decreases, affecting the opening degree of the solenoid valve. The unstable opening degree of the solenoid valve affects the control accuracy. Summary of the Invention

[0004] This invention aims to solve at least one of the technical problems existing in the prior art, and proposes a valve, a mass flow controller, and a semiconductor process equipment. It utilizes the piezoelectric effect of piezoelectric ceramics to replace conventional electromagnetic drive, is not subject to electromagnetic interference, and can achieve precise control of the deformation of piezoelectric ceramics by controlling the voltage applied to the piezoelectric ceramics, thereby improving the control accuracy of flow.

[0005] To achieve the objectives of this invention, a valve is provided, comprising: a valve body, an elastic diaphragm, and a drive assembly; wherein, in its initial state, the elastic diaphragm is spaced apart from a valve port on the valve body, and the edge portion of the elastic diaphragm is fixed to the valve body; the drive assembly includes a piezoelectric ceramic and a first transmission member, the first transmission member having a first side and a second side facing away from each other, the first side contacting the elastic diaphragm, and the orthographic projection of the first side on a plane parallel to the valve port covers the orthographic projection of the center portion of the elastic diaphragm located inside the edge portion on the plane; the second side facing the piezoelectric ceramic; the piezoelectric ceramic is used to generate deformation when energized, so as to drive the first transmission member to move the elastic diaphragm closer to and contact the valve port.

[0006] In some embodiments, the elastic diaphragm includes a plurality of stacked spring sheets; the edge of the spring sheet closest to the valve port among the plurality of spring sheets has a notch formed.

[0007] In some embodiments, the central portion of the elastic diaphragm protrudes toward the side closer to the first side relative to the edge portion.

[0008] In some embodiments, the drive assembly further includes a second transmission member; a second side is provided with a mating groove with an opening facing the piezoelectric ceramic; the second transmission member is rotatably disposed in the mating groove and in contact with the piezoelectric ceramic.

[0009] In some embodiments, the valve body has a first groove, and the valve port is located in the first groove; the bottom surface of the first groove is provided with an annular limiting protrusion, which surrounds the valve port and is used to support the edge portion of the elastic diaphragm; the valve also includes an annular pressing seal, which is disposed in the first groove and surrounds the first transmission member, and is stacked on the edge portion of the elastic diaphragm to fix the edge portion of the elastic diaphragm together with the annular limiting protrusion.

[0010] In some embodiments, the inner diameter of the annular limiting protrusion gradually increases from the bottom surface of the first groove along its axial direction, and the outer diameter of the annular limiting protrusion gradually decreases from the bottom surface of the first groove along its axial direction.

[0011] In some embodiments, the bottom surface of the first groove is provided with an annular sealing groove, the annular sealing groove is disposed around the valve port, and the valve further includes an annular sealing member disposed in the annular sealing groove, the annular sealing member being able to make sealing contact with the elastic diaphragm when the elastic diaphragm contacts the valve port.

[0012] In some embodiments, the valve further includes a transition assembly, which is ring-shaped and has a first external thread on its outer periphery; the valve body has a second groove, and a first groove is provided on the bottom surface of the second groove, and a first internal thread is provided on the inner periphery of the second groove; the transition assembly and the valve body are fixedly connected by the first internal thread engaging with the first external thread; the drive assembly includes a housing for accommodating piezoelectric ceramics, the outer periphery of the housing is provided with a second external thread, the inner periphery of the transition assembly has a second internal thread, and the transition assembly and the housing are fixedly connected by the second internal thread engaging with the second external thread; a first transmission member passes sequentially through the internal space of the housing and the second groove, and is movable in the direction of entering and exiting the second groove.

[0013] In some embodiments, the adapter assembly includes a first ring and a second ring arranged coaxially, the first ring being located on the side of the second ring closer to the elastic diaphragm, the first ring being stacked on the compression seal; the first ring being at least partially disposed in the second groove, and the outer periphery of the first ring being provided with a first external thread; a first transmission member passing through the first ring and contacting the elastic diaphragm to drive the elastic diaphragm closer to and contacting the valve port.

[0014] In some embodiments, the second ring body is located outside the second groove and is stacked on the plane where the groove of the second groove of the valve body is located; the inner diameter of the second ring body is larger than the inner diameter of the first ring body, and the inner circumference of the second ring body is provided with a second internal thread, and the housing is supported by the end face of the first ring body away from the elastic diaphragm.

[0015] In some embodiments, the surface of the first ring body facing the pressing seal is provided with an annular sealing protrusion, which can deform when the first ring body is pressed against the pressing seal.

[0016] In some embodiments, the pressure seal portion protrudes from the bottom surface of the first groove.

[0017] In some embodiments, the elastic diaphragm is made of metal and the annular seal is made of plastic.

[0018] The present invention also provides a mass flow controller, including the valve described above, the valve being used to control the flow rate and on / off state of the mass flow controller.

[0019] The present invention also provides a semiconductor process apparatus, including the above-described mass flow controller.

[0020] The present invention has the following beneficial effects:

[0021] The valve provided in this invention includes a piezoelectric ceramic. Utilizing the characteristic that the piezoelectric ceramic can deform and expand under voltage, the expanded piezoelectric ceramic drives a first transmission component to move closer to the valve port. This deformation causes the central portion of the elastic diaphragm to deform and block the valve port, preventing fluid from entering the valve body and thus closing the valve. The valve provided by this invention uses the piezoelectric effect instead of conventional electromagnetic actuation. By utilizing the deformation of the piezoelectric ceramic itself to drive the elastic diaphragm, it not only reduces holding current and saves energy, but also, because the deformation of the piezoelectric ceramic is related to the voltage applied to it and is unaffected by electromagnetic interference, precise control of the deformation of the piezoelectric ceramic can be achieved by controlling the voltage applied to it, thereby improving the accuracy of flow control.

[0022] Other objects and features of the present invention will become clear from reading the specification, claims and drawings of this application. Attached Figure Description

[0023] The above and / or additional aspects and advantages of the present invention will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, in which:

[0024] Figure 1 This is a structural schematic diagram of the valve according to an embodiment of the present invention.

[0025] Figure 2 This is an axial view of the adapter component according to an embodiment of the present invention.

[0026] Figure 3 This is a cross-sectional view of the valve body according to an embodiment of the present invention.

[0027] Figure 4 This is an axial view of the valve body according to an embodiment of the present invention.

[0028] Figure 5 This is a structural schematic diagram of the valve body according to an embodiment of the present invention.

[0029] Figure 6 This is a top view of the compression seal according to an embodiment of the present invention.

[0030] Figure 7 This is an axial view of the compression seal according to an embodiment of the present invention.

[0031] Figure 8 This is a front view of the compression seal according to an embodiment of the present invention.

[0032] Figure 9 This is a structural schematic diagram of the adapter component according to an embodiment of the present invention.

[0033] Figure 10 yes Figure 9 A magnified view of a portion of the image.

[0034] Figure 11 This is a partially enlarged view of the valve according to an embodiment of the present invention.

[0035] Figure 12 This is an axial view of the annular seal according to an embodiment of the present invention.

[0036] Figure 13 This is a front view of the annular seal according to an embodiment of the present invention.

[0037] Figure 14 This is a structural schematic diagram of the first transmission component according to an embodiment of the present invention.

[0038] Figure 15 This is a front view of the first transmission component according to an embodiment of the present invention.

[0039] Figure 16 This is a cross-sectional view of the first transmission component according to an embodiment of the present invention.

[0040] Figure 17 This is a top view of the first spring sheet according to an embodiment of the present invention.

[0041] Figure 18 This is a front view of the first spring sheet according to an embodiment of the present invention.

[0042] Figure 19 This is a top view of the second spring sheet according to an embodiment of the present invention.

[0043] Figure 20 yes Figure 19 A magnified view of a portion of the image.

[0044] Figure 21 This is a front view of the driving component according to an embodiment of the present invention.

[0045] Figure 22 This is a structural schematic diagram of the locking nut of the driving component according to an embodiment of the present invention.

[0046] Figure 23 This is a top view of the locking nut according to an embodiment of the present invention.

[0047] Explanation of key component symbols:

[0048] 10. Valves;

[0049] 100, Valve body; 100a, First internal thread; 110, First groove; 120, Second groove; 130, Valve port; 140, Annular sealing groove; 150, Fluid inlet passage; 160, Fluid outlet passage;

[0050] 210. Elastic diaphragm; 211. First spring sheet; 212. Second spring sheet; 212a. Notch;

[0051] 300. Adapter assembly; 310. First ring body; 311. Sealing protrusion; 320. Second ring body; 330. Compression seal;

[0052] 400, Drive assembly; 400a, Second external thread; 410, Housing; 421, Piezoelectric ceramic; 422, First transmission component; 4221, Mating groove; 423, Second transmission component; 500, Annular limiting protrusion; 600, Locking nut; 700, Annular seal. Detailed Implementation

[0053] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention.

[0054] Mass flow controllers in related technologies typically include a solenoid valve structure. This structure generates magnetic force when energized, which drives a valve core to block the valve orifice, thus controlling the flow rate and its on / off state. However, during prolonged operation, the internal coil of the solenoid valve inevitably heats up, increasing its resistance. Since the voltage remains constant, the current decreases, further reducing the electromagnetic force generated by the coil. This instability in the solenoid valve's opening degree affects the accuracy of flow control.

[0055] To solve this problem, such as Figure 1 As shown, the present invention provides a valve 10, which includes a valve body 100. Regarding the inflow and outflow of fluid in the valve 10, as... Figure 3As shown, in an optional embodiment of the present invention, the valve body 100 is provided with an inlet fluid channel 150, an outlet fluid channel 160, and a valve port 130. The inlet fluid channel 150 is connected to the valve port 130 to allow fluid to enter the valve body 100, and the outlet fluid channel 160 is used to allow fluid to leave the valve body 100. The flow direction of the fluid can also be seen from... Figure 11 .

[0056] The valve 10 of the present invention further includes an elastic diaphragm 210 and a drive assembly 400. In its initial state, the elastic diaphragm 210 is spaced apart from the valve port 130 on the valve body 100, and the edge portion of the elastic diaphragm 210 is fixed to the valve body 100, so that the edge portion of the elastic diaphragm 210 does not move relative to the valve body 100. The drive assembly 400 includes a piezoelectric ceramic 421 and a first transmission member 422. The first transmission member 422 has a first side and a second side facing away from each other. The first side contacts the elastic diaphragm 210, and the second side faces the piezoelectric ceramic 421. The piezoelectric ceramic 421 is used to deform when energized to drive the first transmission member 422 to bring the elastic diaphragm 210 closer to and ultimately into contact with the valve port 130. Furthermore, the orthographic projection of the first side of the first transmission member 422 onto a plane parallel to the valve port 130 covers the orthographic projection of the central portion of the elastic diaphragm 210 located inside the edge portion onto that plane.

[0057] The valve 10 provided in this embodiment of the invention includes a piezoelectric ceramic 421. Utilizing the characteristic that the piezoelectric ceramic 421 can deform and expand under voltage, the expanded piezoelectric ceramic 421 drives the first transmission member 422 to move closer to the valve port. This deformation causes the central portion of the elastic diaphragm 210 to block the valve port 130, preventing fluid from entering the valve body 100 through the valve port 130, thereby closing the valve 10. Optionally, to improve the automation level of the valve 10, the valve 10 may also include a controller connected to the piezoelectric ceramic 421. The controller can control the deformation of the piezoelectric ceramic 421 by controlling the voltage applied to it, thereby controlling the flow rate of fluid flowing into the valve port 130. Therefore, the valve 10 provided by the present invention uses the piezoelectric effect instead of conventional electromagnetic drive. By utilizing the deformation of the piezoelectric ceramic 421 itself to drive the elastic diaphragm 210, it can not only reduce the holding current and save energy, but also improve the flow control accuracy by controlling the voltage applied to the piezoelectric ceramic 421, since the deformation of the piezoelectric ceramic 421 is related to the voltage applied to it and is not subject to electromagnetic interference.

[0058] In this embodiment of the invention, the first transmission member 422 serves as the transmission member between the piezoelectric ceramic 421 and the elastic diaphragm 210. This allows the force generated by the deformation of the piezoelectric ceramic 421 to be stably transmitted to the elastic diaphragm 210, improving the stability of flow regulation in the valve 10. The orthographic projection of the first side of the first transmission member 422 onto a plane parallel to the valve port 130 covers the orthographic projection of the central portion of the elastic diaphragm 210 located inside the edge portion onto that plane. This allows the central portion of the elastic diaphragm 210 to move as a whole in a direction approaching the valve port 130, preventing different degrees of deformation of the elastic diaphragm 210 under the same voltage, thereby further improving the accuracy of flow control in the valve 10.

[0059] In particular, the central portion of the elastic diaphragm 210 protrudes toward the side closer to the first side relative to the edge portion, so that it can deform away from the first side (near the valve port 130) during the movement of the first transmission member 422.

[0060] In addition, the first transmission component 422 acts as a moving part during the closing process of the valve 10, driving the deformation of the elastic diaphragm 210 (central part). In order to improve its surface wear resistance, surface nitriding treatment can be used to extend its service life and reduce the number of maintenance times.

[0061] To ensure the accuracy of the deformation of the elastic diaphragm 210, the elastic diaphragm 210 may include multiple elastic pieces stacked together, with the stacking direction of the multiple elastic pieces parallel to the axis of the valve port 130. The edge of the elastic piece closest to the valve port 130 among the multiple elastic pieces has a notch 212a formed.

[0062] The structure of multiple spring pieces is described below with reference to a specific embodiment. Specifically, the elastic diaphragm 210 may include two spring pieces: a first spring piece 211 and a second spring piece 212. Compared to the first spring piece 211, the second spring piece 212 is located closer to the valve port 130, directly controlling the opening or closing of the valve port 130. To improve the performance of the second spring piece 212, especially to reduce its internal stress and enable it to deform more precisely during operation, a notch 212a is provided on the edge of the second spring piece 212. (See [reference]). Figure 19 and Figure 20 This reduces the concentrated stress points on the elastic diaphragm 210 under stress, thereby making the deformation of the entire elastic diaphragm 210 more controllable and easier to meet the precise adjustment requirements during operation. See also Figure 17 and Figure 18 The first spring piece 211 may not have a structure similar to the notch 212a. Of course, it is understood that the elastic diaphragm 210 may also include three, four or other numbers of spring pieces, which will not be listed here.

[0063] It should be noted that the size of the notch 212a is a key factor. Typically, the width of the notch 212a can be set to 0.5 mm. This size, verified through experiments and practical applications, effectively reduces the internal stress generated in the elastic diaphragm 210 during operation. Reduced internal stress helps prevent premature fatigue or damage to the elastic diaphragm 210 under long-term repeated stress, thereby improving the reliability and service life of the entire valve 10. Furthermore, the notch 212a allows for smoother deformation of the elastic diaphragm 210, thus stably achieving the opening and closing of the valve port 130.

[0064] In this alternative embodiment, the elastic diaphragm 210 can be made of metal and take the form of a conventional stamped diaphragm. This means that the elastic diaphragm 210 can be manufactured using a traditional stamping process, formed by precision stamping on elastic stainless steel material. This manufacturing process has high production efficiency while ensuring consistency among multiple diaphragms in batch production. Elastic stainless steel material has excellent mechanical properties, especially under high stress and high frequency operating conditions, providing sufficient strength and durability. In addition, the corrosion resistance of stainless steel material also helps to improve the long-term stability of each diaphragm under various complex working conditions.

[0065] This embodiment further enhances the elasticity and deformation control capability of the elastic diaphragm 210 by employing a double-layer spring sheet configuration. The combined action of multiple spring sheets (first spring sheet 211 and second spring sheet 212) results in more uniform force transmission and distribution, avoiding stress concentration issues common with single spring sheets under stress. Furthermore, the notch 212a in the second spring sheet 212 further optimizes the mechanical properties of the elastic diaphragm 210, reduces internal stress, extends the service life of the elastic diaphragm 210, and improves the operational reliability of the valve 10.

[0066] In other embodiments, the drive assembly 400 further includes a second transmission member 423. That is, the drive assembly 400 includes a housing 410, a piezoelectric ceramic 421, a first transmission member 422, and a second transmission member 423. When assembling the drive assembly 400, the first transmission member 422, the second transmission member 423, the piezoelectric ceramic 421, and the housing 410 are sequentially mounted on the valve body 100, which reduces the assembly complexity of the drive assembly 400.

[0067] The second side of the first transmission component 422 is provided with a mating groove 4221 with an opening facing the piezoelectric ceramic 421. (See also...) Figures 14 to 16The second transmission member 423 is rotatably disposed within the mating groove 4221 and contacts the piezoelectric ceramic 421. In an optional embodiment, the second transmission member 423 is spherical, so that the force generated by the deformation of the piezoelectric ceramic 421 can be evenly transmitted to the elastic diaphragm 210, avoiding force concentration at a single point and reducing wear or deformation of the elastic diaphragm 210. Furthermore, the fit between the sphere and the groove makes the force transmission direction more accurate, ensuring the precision of force transmission.

[0068] It should be noted that under voltage, the piezoelectric ceramic 421 deforms. The force generated by this deformation is transmitted sequentially to the elastic diaphragm 210 through the second transmission member 423 and the first transmission member 422. The spherical second transmission member 423 concentrates pressure at its contact point, ensuring the uniformity and precision of the force. Specifically, the piezoelectric ceramic 421 deforms when driven by voltage. Through the first transmission member 422 and the second transmission member 423, the force generated by this deformation can be uniformly transmitted to the elastic diaphragm 210, thereby achieving precise transmission of mechanical force. The conical groove on the first transmission member 422 is used to fix the spherical second transmission member 423, ensuring that the spherical second transmission member 423 only rotates, thus guaranteeing the direction and precision of force transmission.

[0069] like Figures 3 to 5 As shown, the valve body 100 has a first groove 110, the opening of which faces the drive assembly. A valve port 130 is located in the first groove 110, allowing fluid to flow into the first groove 110 through the valve port 130. An annular limiting protrusion 500 is provided on the bottom surface of the first groove 110, surrounding the valve port 130. The top surface of the annular limiting protrusion 500 supports the edge portion of the elastic diaphragm 210. To fix the edge portion of the elastic diaphragm 210 to the valve body 100, the valve 10 also includes an annular compression seal 330, such as... Figures 6 to 8 As shown, at least a portion of the compression seal 330 is disposed in the first groove 110, surrounds the first transmission member 422, and overlaps the edge portion of the elastic diaphragm 210. See also Figure 11 The edge portion of the elastic diaphragm 210 is fixed together with the annular limiting protrusion 500. Thus, the edge portion of the elastic diaphragm 210 is sandwiched between the annular limiting protrusion 500 and the compression sealing member 330, achieving both the fixation of the edge portion of the elastic diaphragm 210 and the sealing of the first groove 110. Furthermore, since the compression sealing member 330 is arranged around and tightly against the first transmission member 422, its inner wall also provides a certain guiding effect for the movement of the first transmission member 422.

[0070] Specifically, the clamping seal 330 can be a conventionally machined part. The clamping seal 330 can be annealed to reduce the surface hardness of the part, making it easier for the clamping seal 330 to seal the first groove 110.

[0071] As the fluid flows through the valve port 130 into the first groove 110, the inner circumferential surface of the annular limiting protrusion 500 is in direct contact with the fluid. To facilitate cleaning of scale left by the fluid, the inner diameter of the annular limiting protrusion 500 gradually increases from the bottom surface of the first groove 110 along its axial direction. Simultaneously, to improve the installation reliability of the elastic diaphragm 210, the outer diameter of the annular limiting protrusion 500 gradually decreases from the bottom surface of the first groove 110 along its axial direction, allowing the outermost edge of the elastic diaphragm 210 to be better clamped between the annular limiting protrusion 500 and the compression seal 330.

[0072] Optionally, the valve port 130 protrudes from the first groove 110. In an optional embodiment of the present invention, the bottom surface of the first groove 110 is lower than the end face where the valve port 130 is located, and it is configured as a V-shaped groove structure surrounding the valve port 130, so that the fluid can be discharged more quickly after flowing out of the valve port 130, while effectively reducing the stagnation of fluid in the first groove 110 and reducing the "dead zone" formed by liquid accumulation. By setting the inlet of the fluid outlet channel 160 at the lowest point of the V-shaped groove, the fluid can quickly gather and be discharged, further accelerating the flow rate of the fluid.

[0073] Compared to making the bottom surface of the first groove 110 a flat structure, the V-shaped groove is more conducive to the rapid discharge of liquid. This is because the V-shaped groove can naturally guide the fluid to flow along the bottom wall of the first groove 110, reducing the accumulation and stagnation of liquid in the first groove 110, thus making the fluid flow smoother. This makes the valve 10 not only suitable for gaseous media, but also broadens the application field of the valve 10, especially showing better discharge efficiency when handling liquid media.

[0074] In an optional embodiment of the present invention, an annular sealing groove 140 is provided on the bottom surface of the first groove 110, and the annular sealing groove 140 surrounds the valve port 130. For example... Figure 11 As shown, valve 10 also includes an annular seal 700 disposed in an annular sealing groove 140, the annular seal 700 being able to make sealing contact with the elastic diaphragm 210 when the elastic diaphragm 210 contacts the valve port 130.

[0075] Understandably, an annular sealing groove 140, recessed downwards from its end face, is provided around the valve port 130 to accommodate the annular seal 700, which functions to cooperate with the elastic diaphragm 210 for sealing. When the drive assembly 400 drives the elastic diaphragm 210 to close the valve port 130 on the valve body 100, the annular seal 700 contacts the elastic diaphragm 210 to achieve precise control and sealing of the fluid flow.

[0076] The elastic material of the annular seal 700 allows its sealing surface to fit tightly against the elastic diaphragm 210, ensuring a reliable seal when the valve port 130 is closed. This enhances the sealing performance of the valve port 130 and ensures a good sealing effect when closed, preventing fluid leakage through the valve port 130. To further improve the sealing performance of the annular seal 700 to the valve port 130, the top surface of the annular seal 700 facing the elastic diaphragm 210 is configured to gradually slope downwards towards the bottom surface of the first groove 110 in a radial direction. (See [reference]). Figure 12 and Figure 13 .

[0077] Optionally, the annular seal 700 is fixed within the annular sealing groove 140 by a tight fit and a flaring process. Specifically, the flaring process causes the inner wall of the annular sealing groove 140 to expand outward, firmly locking the annular seal 700 in place, thereby stabilizing the position of the annular seal 700 and preventing it from falling off or moving during use.

[0078] Specifically, the material of the annular seal 700 can be plastic or other flexible materials to meet the sealing requirements under different working conditions. Especially in applications requiring high corrosion resistance, injection-molded corrosion-resistant materials, such as fluorinated ethylene propylene (FEP), can be selected. FEP material possesses excellent corrosion resistance and low manufacturing costs, making it suitable for mass production. During long-term use, this material effectively resists the erosion of various chemical media, extending the service life of the seal and further reducing maintenance and replacement costs.

[0079] The valve body 100 of this embodiment of the invention also has a second groove 120, and a first groove 110 is provided on the bottom surface of the second groove 120, with the opening of the first groove 110 located on the bottom surface of the second groove 120. The drive assembly 400 includes a housing 410 for accommodating the piezoelectric ceramic 421. During movement, the first transmission member 422 passes sequentially through the internal space of the housing 410 and the second groove 120, and can move in the direction of entering and exiting the second groove 120 under the drive of the piezoelectric ceramic 421, thereby triggering the elastic diaphragm 210 to deform or recover its deformation, thereby driving the elastic diaphragm 210 to move towards the valve port 130 or away from the valve port 130. At the same time, the valve 10 also includes a transition assembly 300. The transition assembly 300 is ring-shaped and has a first external thread on its outer periphery. The inner periphery of the second groove 120 has a first internal thread 100a, and the transition assembly 300 and the valve body 100 are fixedly connected by the first internal thread 100a engaging with the first external thread.

[0080] The outer periphery of the housing 410 is provided with a second external thread 400a, and the inner periphery of the adapter 300 is provided with a second internal thread. The adapter 300 and the housing 410 are fixedly connected by the engagement of the second internal thread and the second external thread 400a.

[0081] In an optional embodiment, one end of the piezoelectric ceramic 421 can be connected to the housing 410 via a locking nut 600. The structure of the locking nut 600 can be found in [reference needed]. Figure 22 and Figure 23 The locking nut 600 is configured as a cylindrical object with square grooves, similar to a nut or socket. The outer surface of the locking nut 600 has four (or other numbers) evenly distributed square grooves, designed to facilitate gripping and rotating of the object by tools (such as wrenches). During the deformation and expansion of the piezoelectric ceramic 421, one end is fixed to the housing 410 of the drive assembly 400 by the locking nut 600 and cannot move. See [reference needed]. Figure 21 The other end is the free end, which can push the first transmission component 422 to move closer to the valve port 130.

[0082] This invention replaces traditional welding with a threaded connection. The threaded connection enables effective connection and sealing between the adapter component and the valve body, as well as between the adapter component and the housing, avoiding many defects associated with welding. First, threaded connections eliminate the need for vacuum leak testing, simplifying the production process and reducing unnecessary steps, thereby improving production efficiency and time costs. Second, threaded connections possess excellent mechanical strength, ensuring a tight fit between components and avoiding the unreliability issues of welded connections. This invention not only improves the reliability of valve 10 but also helps extend its service life, reduces maintenance frequency, and further saves time and costs.

[0083] Specifically, such as Figure 2 As shown, the adapter assembly 300 includes a first ring 310 and a second ring 320 coaxially arranged. The first ring 310 is located on the side of the second ring 320 closer to the elastic diaphragm 210, and the first ring 310 is stacked on top of the compression seal 330. Specifically, the compression seal 330 has a sealing surface that contacts the elastic diaphragm 210 and a contact surface that contacts the first ring 310. The sealing surface and the contact surface are opposite to each other, and there is no requirement for the sealing surface and the contact surface to be in opposite directions. Under the action of the first ring 310, the sealing surface presses the edge portion of the elastic diaphragm 210 into the first groove 110, thereby improving the installation reliability of the elastic diaphragm 210.

[0084] The first ring body 310 is at least partially disposed in the second groove 120, and the outer periphery of the first ring body 310 is provided with a first external thread. The first ring body 310 and the valve body 100 are fixedly connected by the first internal thread 100a engaging with the first external thread. The first transmission member 422 passes through the first ring body 310 and contacts the elastic diaphragm 210, so as to drive the elastic diaphragm 210 to approach and contact the valve port 130, so that the central part of the elastic diaphragm 210 can move as a whole in the direction of approaching the valve port 130, and finally close the valve port 130.

[0085] The second ring 320 is located outside the second groove 120 and is stacked on the plane where the groove of the second groove 120 of the valve body 100 is located. The inner diameter of the second ring 320 is larger than the inner diameter of the first ring 310, and the inner circumference of the second ring 320 is provided with a second internal thread. That is, the housing 410 and the second ring 320 are fixedly connected by the second internal thread and the second external thread 400a. The housing 410 is supported by the end face of the first ring 310 that is away from the elastic diaphragm 210.

[0086] like Figures 9 to 10 As shown, the surface of the first ring body 310 facing the pressing seal 330 is provided with an annular sealing protrusion 311. The sealing protrusion 311 can deform when the first ring body 310 is pressed against the pressing seal 330, so as to further improve the sealing effect of the pressing seal 330.

[0087] It should be noted that the sealing protrusion 311 is used in conjunction with the pressing seal 330. When the drive assembly 400 is tightened to the valve body 100 through the adapter assembly 300, the sealing protrusion 311 will deform and thus press the pressing seal 330, thereby achieving the sealing effect.

[0088] Optionally, the top surface of the annular limiting protrusion 500 is lower than the bottom surface of the first groove 110, and the pressing seal 330 part protrudes from the bottom surface of the first groove 110.

[0089] Specifically, valve 10 may include valve body 100, elastic diaphragm 210, drive assembly 400, and adapter assembly 300, all of which adopt the above-described embodiments. When assembling valve 10 of this embodiment, firstly, an annular seal 700 is installed in an annular sealing groove 140, with the inclined side of the annular seal 700 exposed in the annular sealing groove 140; subsequently, the elastic diaphragm 210 and the compression seal 330 are successively disposed in the first groove 110, wherein the edge portion of the elastic diaphragm 210 first rests on the annular limiting protrusion 500 located on the bottom surface of the first groove 110, and the protruding side of the central portion of the elastic diaphragm 210 is close to the compression seal 330, which is then disposed in the first groove and is press-fitted with the first groove 110. In this way, the edge portion of the elastic diaphragm 210 is clamped and fixed by the compression seal 330 and the annular limiting protrusion 500; then, the first ring 310 of the adapter assembly 300 is screwed into the second groove 120 until the second ring 320 overlaps the plane of the groove opening of the second groove 120 of the valve body 100 (at this time, the first ring 310 overlaps the compression seal 330); finally, the first transmission member 422 is installed on the first ring 310, the second transmission member 423 is disposed on the first transmission member 422, and the housing 410, which has the piezoelectric ceramic 421 installed inside, is threadedly connected to the second ring 320. From the above assembly process, it can also be seen that the valve 10 in this embodiment is simple to assemble, easy to install and disassemble, and facilitates the replacement of parts.

[0090] The present invention also provides a mass flow controller, which includes a valve 10 for controlling the flow rate and on / off state of the mass flow controller.

[0091] Specifically, the valve 10, used to control the flow rate and on / off state of the mass flow controller, can be implemented as follows: When the piezoelectric ceramic 421 is not energized, the initial shape of the elastic diaphragm 210 maintains the valve port 130 in a normally open state, allowing fluid to freely pass through the valve port 130 into the valve body 100. When energized, the piezoelectric ceramic 421 begins to lengthen, thereby squeezing the second transmission member 423 and driving the lower first transmission member 422 to move, which in turn pushes the central portion of the elastic diaphragm 210 towards the valve port 130, thereby changing the distance between the elastic diaphragm 210 and the valve port 130. When the elastic diaphragm 210 completely closes the valve port 130, fluid cannot flow from the valve port 130 into the valve body 100, thus realizing the closing function of the valve 10. It is understood that the valve 10 of the present invention is a normally open valve 10. The valve 10 has stable performance and compact structure, and its manufacturing process is not complicated. It can control the flow rate of various fluids and can block them in time. It can be widely used in various gas measurement and control industries, such as chemical industry, petroleum industry, pharmaceutical, environmental protection and vacuum, photovoltaic, semiconductor integrated circuit equipment, etc.

[0092] The present invention also provides a semiconductor process apparatus, which includes the mass flow controller described in the above embodiments.

[0093] The semiconductor process equipment provided in this embodiment of the invention, by employing the mass flow controller described above, can not only save energy consumption but also improve the control accuracy of flow rate.

[0094] In the description of this invention, it should be understood that the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Therefore, features defined as "first" and "second" may explicitly or implicitly include one or more of the stated features. In the description of this invention, "a plurality of" means two or more, unless otherwise explicitly specified.

[0095] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection, an electrical connection, or a connection that allows for communication; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0096] In the description of this invention, unless otherwise expressly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature being directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature being directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0097] The following disclosure provides many different embodiments or examples for implementing various structures of the invention. To simplify the disclosure, specific examples of components and arrangements are described below. These are merely examples and are not intended to limit the invention. Furthermore, reference numerals and / or letters may be repeated in different examples; such repetition is for simplification and clarity and does not in itself indicate a relationship between the various embodiments and / or arrangements discussed. In addition, examples of various specific processes and materials are provided in this invention, but those skilled in the art will recognize the application of other processes and / or the use of other materials.

[0098] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with an embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0099] It is understood that the above embodiments are merely exemplary implementations used to illustrate the principles of the present invention, and the present invention is not limited thereto. For those skilled in the art, various modifications and improvements can be made without departing from the spirit and essence of the present invention, and these modifications and improvements are also considered to be within the scope of protection of the present invention.

Claims

1. A valve characterized by, include: Valve body, elastic diaphragm, and drive assembly; In the initial state, the elastic diaphragm is spaced apart from the valve port on the valve body, and the edge portion of the elastic diaphragm is fixed to the valve body; The drive assembly includes a piezoelectric ceramic and a first transmission member. The first transmission member has a first side and a second side facing away from each other. The first side contacts the elastic diaphragm, and the orthographic projection of the first side on a plane parallel to the valve port covers the orthographic projection of the central portion of the elastic diaphragm located inside the edge portion on the plane. The second side faces the piezoelectric ceramic. The piezoelectric ceramic is used to deform when energized, so as to drive the first transmission member to move the elastic diaphragm closer to and contact the valve port.

2. The valve according to claim 1, characterized in that, The elastic diaphragm includes multiple elastic sheets stacked together. The edge of the spring closest to the valve port among the plurality of springs has a notch.

3. The valve according to claim 1, characterized in that, The central portion of the elastic diaphragm protrudes toward the side closer to the first side relative to the edge portion.

4. The valve according to claim 1, characterized in that, The drive assembly also includes a second transmission component; The second side is provided with a mating groove with an opening facing the piezoelectric ceramic; the second transmission member is rotatably disposed in the mating groove and in contact with the piezoelectric ceramic.

5. The valve according to claim 1, characterized in that, The valve body has a first groove, and the valve port is located in the first groove; The bottom surface of the first groove is provided with an annular limiting protrusion, which surrounds the valve port and is used to support the edge portion of the elastic diaphragm. The valve further includes an annular compression seal disposed in the first groove and surrounding the first transmission member, and stacked on the edge portion of the elastic diaphragm to fix the edge portion of the elastic diaphragm together with the annular limiting protrusion.

6. The valve according to claim 5, characterized in that, The inner diameter of the annular limiting protrusion gradually increases from the bottom surface of the first groove along its axial direction, and the outer diameter of the annular limiting protrusion gradually decreases from the bottom surface of the first groove along its axial direction.

7. The valve according to claim 5, characterized in that, The bottom surface of the first groove is provided with an annular sealing groove, which surrounds the valve port. The valve also includes an annular sealing element disposed in the annular sealing groove, which can make sealing contact with the elastic diaphragm when the elastic diaphragm contacts the valve port.

8. The valve according to claim 5, characterized in that, The valve further includes a transition assembly, which is ring-shaped and has a first external thread on its outer periphery; the valve body has a second groove, and the first groove is provided on the bottom surface of the second groove, and the inner periphery of the second groove has a first internal thread; the transition assembly and the valve body are fixedly connected by the first internal thread engaging with the first external thread. The drive assembly includes a housing for accommodating the piezoelectric ceramic, the outer periphery of the housing is provided with a second external thread, the inner periphery of the adapter assembly is provided with a second internal thread, and the adapter assembly and the housing are fixedly connected by the engagement of the second internal thread and the second external thread. The first transmission member passes sequentially through the internal space of the housing and the second groove, and is capable of moving in and out of the second groove.

9. The valve according to claim 8, characterized in that, The adapter assembly includes a first ring and a second ring arranged coaxially, the first ring being located on the side of the second ring closer to the elastic diaphragm, and the first ring being stacked on the compression seal. The first ring body is at least partially disposed in the second groove, and the outer periphery of the first ring body is provided with the first external thread; the first transmission member passes through the first ring body and contacts the elastic diaphragm to drive the elastic diaphragm to approach and contact the valve port.

10. The valve according to claim 9, characterized in that, The second ring is located outside the second groove and is stacked on the plane where the groove of the second groove of the valve body is located; The inner diameter of the second ring is larger than that of the first ring, and the inner circumference of the second ring is provided with the second internal thread. The housing is supported by the end face of the first ring that is away from the elastic diaphragm.

11. The valve according to claim 9, characterized in that, The surface of the first ring facing the pressing seal is provided with an annular sealing protrusion, which can deform when the first ring is pressed against the pressing seal.

12. The valve according to claim 8, characterized in that, The compression sealing element protrudes from the bottom surface of the first groove.

13. The valve according to claim 7, characterized in that, The elastic diaphragm is made of metal, and the annular seal is made of plastic.

14. A mass flow controller, characterized in that, The valve includes any one of claims 1 to 13, the valve being used to control the flow rate and on / off state of the mass flow controller.

15. A semiconductor process apparatus, characterized in that, Includes the mass flow controller as described in claim 14.

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