Micro-hemispherical resonator gyroscope and assembling method thereof

Abstract

The application discloses a micro hemispherical resonator gyro and an assembling method thereof. The gyro comprises a micro hemispherical resonator, an electrode base and a plurality of electrode needles. A containing groove is arranged in the center of the upper surface of the electrode base. The micro hemispherical resonator is coaxially fixed in the containing groove, and the lip edge of the micro hemispherical resonator has a first gap with the bottom surface of the containing groove. The electrode base is a regular prism structure. The plurality of electrode needles correspond to a plurality of split side surfaces of the electrode base one by one. The split side surfaces are provided with mounting holes matched with the corresponding electrode needles. The mounting holes extend to the containing groove along the radial direction of the containing groove and are communicated with the containing groove. The center axes of the plurality of mounting holes are on the same cross section of the electrode base. The electrode needle shaft holes are fixed in the corresponding mounting holes. The geometric center of the end surface of the electrode needle towards the micro hemispherical resonator has a second gap with the outer side surface of the micro hemispherical resonator. The plurality of second gaps are equal. The application can improve the gyro precision and is suitable for batch engineering production.

Description

Technical Field

[0001] This invention relates to the field of inertial navigation technology, specifically to a micro-hemispherical resonant gyroscope and its assembly method. Background Technology

[0002] In the research and development of high-precision gyroscopes, microspherical gyroscopes have become a research hotspot due to their low cost, compact size, and excellent precision performance. The core of the precision of microspherical gyroscopes lies in the microspherical oscillator and the electrodes containing excitation and detection functions. Currently, there are various design schemes for excitation and detection electrodes, mainly including planar structures, cylindrical structures, and spherical structures.

[0003] Planar electrode structures are typically arranged on the substrate at the bottom of the resonator, opposite the edge of the bottom of the resonator or the support rod. However, because the effective coupling area is limited to a very small area at the bottom edge of the resonator, the electromechanical conversion efficiency is low, which in turn affects the signal-to-noise ratio and the sensitivity of the gyroscope, significantly reducing the zero-bias stability of the gyroscope. This is currently the biggest problem with the application of planar electrodes in micro-hemispherical gyroscopes. Although Chinese invention patent CN201911107509.5 uses a sawtooth oscillator to increase the effective coupling area, the oscillator is made of fragile quartz. The dozens of sawtooth teeth of each oscillator need to be processed to be completely consistent, which easily leads to problems such as edge chipping and breakage during the process, resulting in a very low yield. In addition, it also greatly restricts the improvement of the overall Q value of the oscillator.

[0004] Publicly available literature reports that multiple cylindrical electrodes surround the equatorial plane of a resonator, resembling a vertical, curved wall. Currently, there are two processing techniques. The more common method involves individually adjusting each conductive cylindrical electrode in the XY direction and then fixing it. This method suffers from cumbersome adjustments and requires highly precise equipment, leading to a sharp increase in production costs. The other method involves first etching or using other methods to create a structure with multiple cylindrical electrodes on a single piece of quartz, and then applying coatings and circuit patterns on top of this. However, because laser or photolithography presents significant challenges in etching electrodes for such columnar three-dimensional structures, there are few successful applications of this technique.

[0005] Spherical electrodes are an ideal structure, with a shape perfectly parallel to the hemispherical resonator (equal gap sealing). However, their fabrication is extremely difficult, which is their most fatal drawback. At the micrometer scale, manufacturing an inner / outer spherical electrode that perfectly matches the resonator curvature and has uniform gaps (typically required at the micrometer or even sub-micrometer level) places extremely high demands on MEMS fabrication processes (such as grayscale lithography and 3D electroforming). Due to the complexity of manufacturing 3D structures, the fabrication consistency of spherical electrodes is poor, and they often involve complex wafer bonding or vacuum packaging techniques, resulting in extremely high mass production costs and long development cycles. Currently, they have only been successfully applied to gyroscope structures with hemispherical resonator diameters of 20mm or more. The diameter of the hemispherical resonator in micro-hemispherical resonator gyroscopes is generally 10mm or smaller, making the high-precision fabrication and assembly of the matching spherical electrodes even more challenging.

[0006] In summary, exploring a new design scheme for excitation and detection electrodes to improve gyroscope accuracy and make it suitable for mass production is an urgent problem to be solved in the application of micro-hemispherical gyroscopes. Summary of the Invention

[0007] To address the problems in the background art, this invention proposes a micro-hemispherical resonant gyroscope and its assembly method, which improves the accuracy of the gyroscope and is suitable for mass production.

[0008] The present invention adopts the following technical solution: A micro-hemispherical resonant gyroscope includes a micro-hemispherical resonator, an electrode base, and multiple excitation and detection electrode pins. A receiving groove is formed at the center of the upper surface of the electrode base. The micro-hemispherical resonator is coaxially fixed within the receiving groove, and the lip of the micro-hemispherical resonator has a first gap with the bottom surface of the receiving groove. The electrode base has a regular prism structure, with multiple sub-sides formed on its outer surface. The multiple excitation and detection electrode pins correspond one-to-one with the multiple sub-sides of the electrode base. Mounting holes are formed on the sub-sides to mate with the corresponding excitation and detection electrode pins. The mounting holes extend radially along the receiving groove to communicate with it, and the central axes of the multiple mounting holes are on the same cross-section of the electrode base. The shaft holes of the excitation and detection electrode pins are fixed in the corresponding mounting holes. The geometric center of the end face of the excitation and detection electrode pin facing the micro-hemispherical resonator has a second gap with the outer surface of the micro-hemispherical resonator, and the multiple second gaps are equal.

[0009] As a further improvement to the above technical solution: The excitation detection electrode needle has a T-shaped structure, which includes a needle body and a needle cap fixed to one end of the needle body. The needle cap is positioned facing the micro-hemispherical resonator.

[0010] It also includes a high-voltage electrode needle, and the edge of the electrode base where two adjacent side surfaces intersect extends toward the two adjacent side surfaces to form a mounting surface. After the high-voltage electrode needle passes through the mounting surface, it abuts against the outer side of the micro-hemispherical resonator in the receiving groove.

[0011] The central anchor of the micro-hemispherical resonator is fixed to the center of the bottom of the receiving groove by a conductive material.

[0012] Multiple process holes are provided on the sidewall of the receiving groove. The process holes are arranged at intervals along the circumference of the receiving groove. The process holes are used to allow the gap control wire to pass through during the assembly of the micro-hemispherical resonator and the electrode base. The gap control wire abuts between the lip of the micro-hemispherical resonator and the bottom wall of the receiving groove, so that the lip of the micro-hemispherical resonator and the bottom wall of the receiving groove have a first gap.

[0013] An assembly method for the aforementioned micro-hemispherical resonant gyroscope includes the following steps: S1: Insert the excitation detection electrode needles into the corresponding mounting holes of the electrode base, and adjust and lock the positions of the multiple excitation detection electrode needles so that after the micro-hemispherical resonator is coaxially fixed in the receiving groove, the end faces of the multiple excitation detection electrode needles facing the outer side of the micro-hemispherical resonator are equal to the second gap of the outer side of the micro-hemispherical resonator. S2: Fix the excitation detection electrode needle after pose locking into the corresponding mounting hole; S3: Position the micro-hemispherical resonator coaxially within the receiving groove of the electrode base, and lock the pose of the micro-hemispherical resonator so that the lip of the micro-hemispherical resonator has a first gap with the bottom surface of the receiving groove. S4: Fix the micro-hemispherical resonator, after its pose is locked, into the receiving groove of the electrode base.

[0014] As a further improvement to the above technical solution: In step S1, the poses of multiple excitation detection electrode needles are adjusted and locked, specifically including: Design and manufacture a first fixture, which includes a fixture body and multiple positioning pins. One end of the fixture body in the axial direction can extend into a receiving groove. The multiple positioning pins are fixed on the fixture body and are arranged at intervals along the circumference of the fixture body. When one end of the fixture body in the axial direction extends into the receiving groove, the multiple positioning pins are tangentially abutted against the side wall of the receiving groove. The distance between the outer surface of the fixture body and the side wall of the receiving groove is equal to the distance between the geometric center of the inner end face of the excitation and detection electrode needle and the side wall of the receiving groove, so that the side wall of one end of the fixture body in the axial direction forms an installation positioning surface for multiple excitation and detection electrode needles. Position the lower part of the first fixture in the receiving groove of the electrode base, and adjust the position of multiple excitation and detection electrode needles so that all multiple excitation and detection electrode needles abut against the mounting and positioning surface of the fixture body, thereby completing the position locking of multiple excitation and detection electrode needles.

[0015] After adjusting and locking the poses of multiple excitation detection electrode needles, the method also includes: Design and manufacture a second fixture, which includes a positioning ring and multiple elastic positioning parts. The multiple elastic positioning parts are arranged circumferentially at intervals on the inner sidewall of the positioning ring and correspond one-to-one with multiple excitation and detection electrode needles. The second fixture can be fitted over the electrode base so that the excitation and detection electrode needles passing through the electrode base abut against the corresponding elastic positioning part and the positioning surface of the first fixture.

[0016] The inner wall of the positioning ring is a regular prism side formed by multiple rectangular surfaces. Each rectangular surface corresponds to a multiple elastic positioning part, and the elastic positioning part is fixed at the center of the corresponding rectangular surface.

[0017] The elastic positioning part is a V-shaped spring with the opening facing downward. One segment of the V-shaped spring is fixed to the corresponding rectangular surface of the positioning ring by fasteners, and the other segment of the V-shaped spring is used to abut against the corresponding excitation detection electrode needle.

[0018] The pose of the micro-hemispherical resonator is locked, so that the lip of the micro-hemispherical resonator has a first gap with the bottom surface of the receiving slot, specifically including: Multiple gap control wires are arranged circumferentially at intervals on the bottom surface of the receiving slot. The diameter of the gap control wires is equal to the distance from the lip of the micro-hemispherical resonator to the bottom surface of the receiving slot. The micro-hemispherical resonator is then coaxially positioned in the receiving slot of the electrode base, with its lip abutting against the multiple gap control wires.

[0019] The fixture body includes a first positioning part and a second positioning part. The second positioning part is formed by extending radially outward from one end of the outer side of the first positioning part. The first positioning part can extend into the receiving groove, and its sidewall forms a mounting positioning surface for multiple excitation detection electrode needles. The two end faces of the second positioning part along the axial direction of the fixture body form abutment surfaces that fit against the top surface of the electrode base. Multiple positioning pins pass through the two end faces of the second positioning part along the axial direction of the fixture body. The first fixture also includes a center pin, which cooperates with the inner cavity of the center anchor rod of the hemispherical resonator. The first positioning part has a center through hole that cooperates with the center pin, and the center pin passes through the center through hole. The micro-hemispherical resonator is coaxially positioned within the receiving groove of the electrode base, specifically including: With the second positioning part of the fixture body facing downwards, and its lower end locked in the inner cavity of the central anchor rod of the micro-hemispherical resonator, its axial position is adjusted so that the fixture body is placed on the electrode base. The lip of the micro-hemispherical resonator can abut against multiple gap control wires. The fixture body is placed on the electrode base, and multiple positioning pins extend into the receiving groove and abut against the side wall of the receiving groove, so that the micro-hemispherical resonator is coaxially positioned in the receiving groove of the electrode base.

[0020] Compared with the prior art, the advantages of the present invention are as follows: The micro-hemispherical resonant gyroscope of this invention innovatively designs a regular prism structure with a receiving groove as the electrode base, placing the micro-hemispherical resonator within the receiving groove. Mounting holes extending in the R-axis direction and communicating with the receiving groove are formed on multiple side surfaces of the electrode base to fix multiple conductive excitation and detection electrode pins. Because the excitation and detection electrode pins inserted into the mounting holes are limited in multiple directions (XYZ directions), they can only move in the R-axis direction facing the oscillator surface. Therefore, with the aid of tooling, the R-axis position adjustment of all electrodes can be achieved at once, so that the multiple excitation and detection electrode pins and the micro-hemispherical resonator located in the receiving groove form an equal-gap capacitor for measuring the angular rate of the carrier. This solves the drawback of current conductive cylindrical electrodes requiring individual adjustment in the XY direction, making the adjustment of the cylindrical electrodes very simple, significantly reducing the difficulty of adjusting and fixing individual electrodes, greatly simplifying the product manufacturing process, and significantly reducing mass production costs.

[0021] Furthermore, the multiple facets of this regular prism structure correspond one-to-one with multiple excitation and detection electrode pins for machining mounting holes. Compared to machining mounting holes on the cylindrical facets, drilling on the regular polygonal reference plane allows for more precise drilling and makes it easier to ensure the concentricity and uniformity of the hole shaft and auxiliary tooling. This ensures the subsequent installation accuracy of each excitation and detection electrode pin, thereby improving product precision and reducing the likelihood of machining anomalies such as edge chipping, significantly increasing yield. Compared to the conventional cylindrical electrode formation scheme using etching and coating, this invention directly transmits the capacitance signal to the electrode base through the excitation and detection electrode pins with guiding properties, and then directly connects to the packaged circuitry via gold wire bonding or other methods. This eliminates the need for complex circuit patterns, thereby significantly reducing production costs and product yield.

[0022] Furthermore, the excitation method of forming a capacitor between the excitation detection electrode needle and the sidewall of the micro-hemispherical resonator in this invention significantly increases the control and excitation efficiency due to the large increase in capacitor area. This reduces the stringent requirements on the performance of the micro-hemispherical oscillator itself, eliminating the need for precise frequency tuning of the micro-hemispherical resonator separately, thus simplifying the mass production and engineering of micro-hemispherical gyroscopes. Attached Figure Description

[0023] To facilitate understanding of the invention, it will be described in more detail with reference to the specific embodiments shown in the accompanying drawings. These drawings depict only typical embodiments of the invention and should not be considered as limiting the scope of protection of the invention.

[0024] Figure 1 This is a three-dimensional structural diagram of the micro-hemispherical resonant gyroscope according to an embodiment of the present invention.

[0025] Figure 2 This is a schematic diagram of the exploded structure of a micro-hemispherical resonant gyroscope according to an embodiment of the present invention.

[0026] Figure 3 This is a top view of the micro-hemispherical resonant gyroscope according to an embodiment of the present invention.

[0027] Figure 4 for Figure 3 A schematic diagram of the AA cross-sectional structure.

[0028] Figure 5 This is a three-dimensional structural diagram of the electrode base in an embodiment of the present invention.

[0029] Figure 6 This is a three-dimensional structural diagram of the first fixture in an embodiment of the present invention.

[0030] Figure 7 This is a three-dimensional structural diagram of the first fixture in an embodiment of the present invention for assembling and positioning the electrode base and the electrode needle.

[0031] Figure 8 This is a top view schematic diagram of the first fixture in an embodiment of the present invention for assembling and positioning the electrode base and the electrode needle.

[0032] Figure 9 for Figure 8 BB cross-section.

[0033] Figure 10 This is a three-dimensional structural diagram of the second fixture in an embodiment of the present invention.

[0034] Figure 11 This is a three-dimensional structural diagram of the first and second fixtures in the embodiments of the present invention for assembling and positioning the electrode base and the electrode needle.

[0035] Figure 12 This is a top view schematic diagram of the first and second fixtures in the embodiments of the present invention for assembling and positioning the electrode base and the electrode needle.

[0036] Figure 13 for Figure 12 CC cross-section view.

[0037] Figure 14 This is a three-dimensional structural diagram of the first fixture in this embodiment of the invention for assembling and positioning the micro-hemispherical resonant gyroscope.

[0038] Figure 15 This is a top view schematic diagram of the first fixture in an embodiment of the present invention for assembling and positioning a micro-hemispherical resonant gyroscope.

[0039] Figure 16 for Figure 15 DD cross-sectional view.

[0040] Figure label: 1. Micro-hemispherical resonator; 11. Central anchor; 12. First gap; 13. Second gap; 2. Electrode base; 21. Receiving groove; 22. Split side; 23. Mounting hole; 24. Mounting surface; 25. Process hole; 3. Excitation detection electrode needle; 31. Needle body; 32. Needle cap; 4. High voltage electrode needle; 5. Gap control wire; 6. First fixture; 61. Fixture body; 611. First positioning part; 612. Second positioning part; 62. Positioning pin; 63. Central pin; 7. Second fixture; 71. Positioning ring; 72. Positioning part. Detailed Implementation

[0041] The embodiments of the present invention are described below with reference to the accompanying drawings to enable those skilled in the art to better understand and implement the present invention. However, the listed embodiments are not intended to limit the present invention. In the absence of conflict, the following embodiments and the technical features in the embodiments can be combined with each other, wherein the same components are indicated by the same reference numerals.

[0042] like Figures 1-5 As shown, this embodiment provides a micro-hemispherical resonant gyroscope, including a micro-hemispherical resonator 1, an electrode base 2, and multiple excitation and detection electrode needles 3. A receiving groove 21 is formed at the center of the upper surface of the electrode base 2. The micro-hemispherical resonator 1 is coaxially fixed within the receiving groove 21, and the lip of the micro-hemispherical resonator 1 has a first gap 12 with the bottom surface of the receiving groove 21. The electrode base 2 has a regular prism structure, and its outer surface forms multiple sub-sides 22. The multiple excitation and detection electrode needles 3 correspond one-to-one with the multiple sub-sides 22 of the electrode base 2. Correspondingly, mounting holes 23 are provided on the side 22 to cooperate with the corresponding excitation detection electrode needles 3. The mounting holes 23 extend radially along the receiving groove 21 to communicate with the receiving groove 21, and the central axes of multiple mounting holes 23 are on the same cross section of the electrode base 2. The shaft holes of the excitation detection electrode needles 3 are fixed in the corresponding mounting holes 23. The geometric center of the end face of the excitation detection electrode needles 3 facing the micro-hemispherical resonator 1 has a second gap 13 with the outer surface of the micro-hemispherical resonator 1, and the multiple second gaps 13 are equal.

[0043] This embodiment of the micro-hemispherical resonant gyroscope innovatively designs a regular prism structure with a receiving groove as the electrode base, placing the micro-hemispherical resonator inside the receiving groove. Mounting holes extending in the R-axis direction and communicating with the receiving groove are opened on multiple side surfaces of the electrode base to fix multiple conductive excitation and detection electrode pins. Because the excitation and detection electrode pins inserted into the mounting holes are limited in multiple directions (XYZ), they can only move in the R-axis direction facing the oscillator surface. Therefore, with the aid of tooling, the R-axis position adjustment of all electrodes can be achieved at once, so that the multiple excitation and detection electrode pins and the micro-hemispherical resonator located in the receiving groove form an equal-gap capacitance for measuring the angular rate of the carrier. This solves the drawback of currently requiring individual adjustment of each conductive cylindrical electrode in the XY direction, making the adjustment of the cylindrical electrode very simple, significantly reducing the difficulty of adjusting and fixing individual electrodes, greatly simplifying the product manufacturing process, and significantly reducing mass production costs.

[0044] Furthermore, the multiple facets of this regular prism structure correspond one-to-one with multiple excitation and detection electrode pins for machining mounting holes. Compared to machining mounting holes on the cylindrical facets, drilling on the regular polygonal reference plane allows for more precise drilling and makes it easier to ensure the concentricity and uniformity of the hole shaft and auxiliary tooling. This ensures the subsequent installation accuracy of each excitation and detection electrode pin, thereby improving product precision and reducing the likelihood of machining anomalies such as edge chipping, significantly increasing yield. Compared to the conventional cylindrical electrode formation scheme using etching and coating, this invention directly transmits the capacitance signal to the electrode base through the excitation and detection electrode pins with guiding properties, and then directly connects to the packaged circuitry via gold wire bonding or other methods. This eliminates the need for complex circuit patterns, thereby significantly reducing production costs and product yield.

[0045] Furthermore, the excitation method of forming a capacitor between the excitation and detection electrode needle and the sidewall of the micro-hemispherical resonator, as described in this invention, significantly increases the control and excitation efficiency due to the substantial increase in capacitor area. This reduces the stringent requirements on the performance of the micro-hemispherical oscillator itself, eliminating the need for precise frequency tuning of the micro-hemispherical resonator for control. This simplifies the mass production and engineering of micro-hemispherical gyroscopes. In this embodiment, the excitation detection electrode needle 3 has a T-shaped structure, which includes a needle body 31 and a needle cap 32 fixed to one end of the needle body 31. The needle cap 32 is positioned facing the micro-hemispherical resonator 1.

[0046] The solution of fixing T-shaped electrode pins to the side of the electrode base solves the problems of small capacitor contact area and large overall product size caused by using conventional cylindrical or vertical arc surface electrodes.

[0047] In this embodiment, a high-voltage electrode needle 4 is also included. The edges of two adjacent side surfaces 22 of the electrode base 2 intersect and extend toward the two adjacent side surfaces 22 to form a mounting surface 24. After the high-voltage electrode needle 4 passes through the mounting surface 24, it abuts against the outer side surface of the micro-hemispherical resonator 1 in the receiving groove 21.

[0048] In this embodiment, the central anchor rod 11 of the micro-hemispherical resonator 1 is fixed to the center position of the bottom of the hole in the receiving groove 21 by a conductive material.

[0049] The electrode base 2 is made of quartz glass with a very low coefficient of thermal expansion. It integrates the excitation and detection electrodes as well as the mounting plane (bottom of the receiving slot) of the hemispherical resonator. It is machined on a single machining datum to better ensure the overall machining accuracy and thus optimize the accuracy of the hemispherical resonator gyroscope.

[0050] In this embodiment, a plurality of process holes 25 are provided on the sidewall of the receiving groove 21. The plurality of process holes 25 are arranged at intervals along the circumference of the receiving groove 21. The process holes 25 are used to allow the gap control wire 5 to pass through when the micro-hemispherical resonator 1 and the electrode base 2 are assembled. The gap control wire 5 abuts between the lip of the micro-hemispherical resonator 1 and the bottom wall of the receiving groove 21, so that the lip of the micro-hemispherical resonator 1 and the bottom wall of the receiving groove 21 have a first gap 12.

[0051] The assembly method of the micro-hemispherical resonant gyroscope in this embodiment includes the following steps: S1: The excitation detection electrode needle 3 is inserted into the corresponding mounting hole 23 of the electrode base 2, and the position of the multiple excitation detection electrode needles 3 is adjusted and locked so that after the micro-hemispherical resonator 1 is coaxially fixed in the receiving groove 21, the end face of the multiple excitation detection electrode needles 3 facing the outer side of the micro-hemispherical resonator 1 is equal to the second gap 13 of the outer side of the micro-hemispherical resonator 1. S2: Fix the excitation detection electrode needle 3 after the pose is locked into the corresponding mounting hole 23; S3: Position the micro-hemispherical resonator 1 coaxially within the receiving groove 21 of the electrode base 2, and lock the position of the micro-hemispherical resonator 1 so that the lip of the micro-hemispherical resonator 1 has a first gap 12 with the bottom surface of the hole in the receiving groove 21. S4: Fix the micro-hemispherical resonator 1, after its position is locked, into the receiving groove 21 of the electrode base 2.

[0052] In this embodiment, step S1 involves adjusting and locking the poses of the multiple excitation detection electrode needles 3, specifically including: like Figures 6-9As shown, a first fixture 6 is designed and manufactured. The first fixture 6 includes a fixture body 61 and a plurality of positioning pins 62. One end of the fixture body 61 in the axial direction can extend into the receiving groove 21. The plurality of positioning pins 62 are fixed on the fixture body 61 and are arranged at intervals along the circumference of the fixture body 61. When one end of the fixture body 61 in the axial direction extends into the receiving groove 21, the plurality of positioning pins 62 are tangentially abutted against the side wall of the receiving groove 21. The distance between the outer side surface of the fixture body 61 and the side wall of the receiving groove is equal to the distance between the geometric center of the inner end face of the excitation detection electrode needle 3 and the side wall of the receiving groove, so that the side wall of one end of the fixture body 61 in the axial direction forms the mounting and positioning surface of the plurality of excitation detection electrode needles 3. The lower part of the first fixture 6 is positioned in the receiving groove 21 of the electrode base 2, and the position of the multiple excitation and detection electrode needles 3 is adjusted so that the multiple excitation and detection electrode needles 3 all abut against the mounting and positioning surface of the fixture body 61, thereby completing the position locking of the multiple excitation and detection electrode needles 3.

[0053] By designing a first fixture with multiple positioning pins, the fixture body and the multiple positioning pins are concentrically distributed. The fixture body adopts a cylindrical design, and the size of the cylinder is designed and processed according to the actual gap control required (i.e., the actual position of the inner end face of the electrode needle). The positions of the multiple positioning pins are designed according to the receiving groove of the electrode base. The first fixture is placed after the receiving groove, and the multiple positioning pins abut against the side wall of the receiving groove in a tangential manner, thereby realizing the coaxial arrangement of the fixture body and the receiving groove. As long as the T-head end of the T-type needle is fully pressed against the fixture body, the center position and equal gap of all T-type needles can be defined in one step, thereby improving the position adjustment efficiency and reducing adjustment errors and difficulty.

[0054] In this embodiment, after adjusting and locking the pose of the multiple excitation detection electrode needles 3, the method further includes: like Figures 10-13 As shown, a second fixture 7 is designed and manufactured. The second fixture 7 includes a positioning ring 71 and a plurality of elastic positioning parts 72. The plurality of elastic positioning parts 72 are arranged circumferentially at intervals on the inner sidewall of the positioning ring 71 and correspond one-to-one with a plurality of excitation detection electrode needles 3. The second fixture 7 can be sleeved on the electrode base 2 so that the excitation detection electrode needles 3 passing through the electrode base 2 abut against the corresponding elastic positioning part 72 and the positioning surface of the first fixture 6.

[0055] In this embodiment, the inner wall of the positioning ring 71 is a regular prism side surface formed by multiple rectangular surfaces. Each rectangular surface corresponds to a multiple elastic positioning part 72, and the elastic positioning part 72 is fixed at the center position of the corresponding rectangular surface.

[0056] In this embodiment, the elastic positioning part 72 is a V-shaped spring with the opening facing downward. One segment of the V-shaped spring is fixed to the corresponding rectangular surface of the positioning ring 71 by a fastener, and the other segment of the V-shaped spring is used to abut against the corresponding excitation detection electrode needle 3.

[0057] In this embodiment, the pose of the micro-hemispherical resonator 1 is locked, so that the lip of the micro-hemispherical resonator 1 and the bottom surface of the receiving groove 21 have a first gap 12, specifically including: Multiple gap control wires 5 are arranged circumferentially at intervals on the bottom surface of the receiving groove 21. The diameter of the gap control wires 5 is equal to the distance from the lip of the micro-hemispherical resonator 1 to the bottom surface of the receiving groove 21. The micro-hemispherical resonator 1 is then coaxially positioned in the receiving groove 21 of the electrode base 2, with its lip abutting against the multiple gap control wires 5.

[0058] In this embodiment, as Figures 14-16 As shown, the fixture body 61 includes a first positioning part 611 and a second positioning part 612. The second positioning part 612 is formed by extending radially outward from one end of the outer side of the first positioning part 611. The first positioning part 611 can extend into the receiving groove 21, and its sidewall forms a mounting and positioning surface for multiple excitation detection electrode needles 3. The two end faces of the second positioning part 612 along the axial direction of the fixture body 61 form abutment surfaces that fit against the top surface of the electrode base 2. Multiple positioning pins 62 pass through the two end faces of the second positioning part 612 along the axial direction of the fixture body 61. The first fixture 6 also includes a central pin 63, which cooperates with the inner cavity of the central anchor rod 11 of the hemispherical resonator. The first positioning part 611 has a central through hole that cooperates with the central pin 63, and the central pin 63 passes through the central through hole. The micro-hemispherical resonator 1 is coaxially positioned within the receiving groove 21 of the electrode base 2, specifically including: With the second positioning part 612 of the fixture body 61 facing downwards, and its lower end of the center pin 63 locked in the inner cavity of the center anchor rod 11 of the micro-hemispherical resonator 1, its axial position is adjusted so that the fixture body 61 is placed on the electrode base 2, and the lip of the micro-hemispherical resonator 1 can abut against multiple gap control wires 5. The fixture body 61 is placed on the electrode base 2, and multiple positioning pins 62 extend into the receiving groove 21 and abut against the side wall of the receiving groove 21, so that the micro-hemispherical resonator 1 is coaxially positioned in the receiving groove 21 of the electrode base 2.

[0059] The micro-hemispherical resonant gyroscope and its assembly method of the present invention have the following advantages: 1. The electrode base 2 integrates the excitation and detection electrodes as well as the mounting plane (bottom surface of the receiving slot) of the hemispherical resonator. It is machined on a single machining datum, which can better ensure the overall machining accuracy and thus optimize the accuracy of the hemispherical resonator gyroscope.

[0060] 2. Mounting holes are made on the outer side of the electrode base 2 to limit the XYZ direction movement of the subsequently installed electrodes. Only the R-axis, which is directly opposite the oscillator surface, remains for adjustment. This solves the problem that each cylindrical electrode needs to be individually adjusted in the XY direction, making the adjustment of the cylindrical electrode very simple.

[0061] 3. The electrode base 2 is made of quartz glass with a very low coefficient of thermal expansion. Its outer surface is first processed into multiple equal-divided 8, 16, or 32-sided polygons or other electrodes according to the needs of micro-hemispherical electrode control (i.e., forming regular prisms). Mounting holes are then machined on the divided sides. Compared to machining multiple mounting holes on a circular arc surface, drilling can be performed more precisely on this type of polygonal reference plane. It is also easier to ensure the concentricity and uniformity of the circle formed by connecting the geometric centers of multiple mounting holes with the receiving groove on the electrode base. This ensures the subsequent installation accuracy of each excitation and detection electrode, thereby improving product accuracy and reducing the likelihood of processing abnormalities such as edge chipping, resulting in a higher yield.

[0062] 4. When adjusting the second gap between the T-shaped surface of the T-shaped electrode needle and the side of the micro-hemispherical resonator in the R-axis direction of the electrode base, since the T-shaped needle has been limited in multiple directions, only the T-shaped needle positioning fixture and the T-shaped needle clamping fixture are needed to realize the R-axis position adjustment of all electrodes at one time, thereby greatly reducing the difficulty of adjusting and fixing a single electrode, greatly simplifying the production process of the product, and significantly reducing the cost of mass production.

[0063] 5. The solution of fixing T-shaped electrode pins to the side of the electrode base solves the problems of small capacitor contact area and large overall product size caused by using conventional cylindrical or vertical arc surface electrodes.

[0064] 6. Conventional etching and coating to form cylindrical electrodes requires coating and etching complex electrode patterns on the front of the electrode, and then connecting the cylindrical electrode to the conductive adhesive to form an excitation and detection electrode. However, by using T-shaped electrode pins to extend the circuit directly to the outside of the base frame, and then connecting it directly to the packaged tube circuit through gold wire bonding or other methods, the complex circuit pattern can be eliminated, thereby significantly reducing production costs and product yield.

[0065] 7. The electrode base is provided with a separate process hole. When installing the micro hemispherical resonator, this process hole can be used to install and remove the filamentary spacer, and the installation height of the resonator can be flexibly adjusted.

[0066] 8. By adopting the above excitation type of T-shaped pin and micro-hemispherical resonator, the control and excitation efficiency are greatly enhanced due to the significant increase in capacitance area. This reduces the stringent requirements on the performance of the micro-hemispherical resonator itself, eliminating the need for precise frequency tuning of the micro-hemispherical resonator. This simplifies the mass production and engineering of micro-hemispherical gyroscopes.

[0067] 9. By designing a first fixture with multiple positioning pins, the fixture body and the multiple positioning pins are concentrically distributed. The fixture body adopts a cylindrical design, and the size of the cylinder is designed and processed according to the actual gap control required (i.e., the actual position of the inner end face of the T-shaped pin). The positions of the multiple positioning pins are designed according to the receiving groove of the electrode base. The first fixture is placed after the receiving groove, and the multiple positioning pins abut against the side wall of the receiving groove in a tangential manner, thereby realizing the coaxial arrangement of the fixture body and the receiving groove. As long as the T-head end of the T-shaped pin is fully pressed against the fixture body, the center position and equal gap of all T-shaped pins can be defined in one step, thereby improving the position adjustment efficiency and reducing adjustment errors and difficulty.

[0068] 10. The second fixture is designed as a positioning ring with multiple elastic positioning parts on the inner wall. The positioning ring can be sleeved on the outside of the electrode base. Specifically, 16 V-shaped spring pieces are used as a clamping mechanism (i.e., elastic positioning parts). They are fixed to multiple rectangular grooves on the inner wall of the positioning ring by rivets or other fasteners. The electrode base positioned by the first fixture is placed into the positioning ring. The outer end face of the T-shaped positioning pin abuts against the corresponding V-shaped spring piece. That is, the T-shaped positioning pin is pressed between the fixture body and the corresponding V-shaped spring piece. In this way, the tail ends of all the semi-finished T-shaped pins can be pressed at one time, thereby realizing the gap control and fixation of all T-shaped pins.

[0069] 11. The first fixture adopts forward and reverse control. The first positioning part + positioning pin is used as a T-type needle gap control fixture, and the second positioning part + positioning pin + center pin is used as a hemispherical resonator positioning fixture. The forward and reverse design can better simplify and reduce the number of fixtures. The two positioning functions share multiple positioning pins to achieve coaxial positioning of the fixture and electrode base during the two positioning processes. This makes the center position of the I-type needle and the center position of the oscillator more consistent, which can greatly reduce the error between fixtures caused by the use of different fixtures for adjustment, thereby greatly increasing the consistency and accuracy of the product.

[0070] The embodiments described above are merely preferred embodiments of the present invention. The terms "in one embodiment," "in another embodiment," "in yet another embodiment," or "in still another embodiment" used in this specification all refer to one or more of the same or different embodiments according to this disclosure. Ordinary variations and substitutions made by those skilled in the art within the scope of the present invention should be included within the protection scope of the present invention.

Claims

1. A micro-hemispherical resonant gyroscope, characterized in that, The device includes a micro-hemispherical resonator (1), an electrode base (2), and multiple excitation and detection electrode needles (3). A receiving groove (21) is formed at the center of the upper surface of the electrode base (2). The micro-hemispherical resonator (1) is coaxially fixed within the receiving groove (21), and the lip of the micro-hemispherical resonator (1) has a first gap (12) with the bottom surface of the receiving groove (21). The electrode base (2) is a regular prism structure, with multiple sub-sides (22) formed on its outer surface. The multiple excitation and detection electrode needles (3) correspond one-to-one with the multiple sub-sides (22) of the electrode base (2). The electrode base (2) has mounting holes (23) that mate with the corresponding excitation detection electrode needles (3). The mounting holes (23) extend radially along the receiving groove (21) to communicate with the receiving groove (21). The central axes of multiple mounting holes (23) are on the same cross section of the electrode base (2). The shaft holes of the excitation detection electrode needles (3) are fixed in the corresponding mounting holes (23). The geometric center of the end face of the excitation detection electrode needles (3) facing the micro-hemispherical resonator (1) has a second gap (13) with the outer surface of the micro-hemispherical resonator (1). The multiple second gaps (13) are equal.

2. The micro-hemispherical resonant gyroscope according to claim 1, characterized in that, The excitation detection electrode needle (3) has a T-shaped structure, which includes a needle body (31) and a needle cap (32) fixed to one end of the needle body (31). The needle cap (32) is positioned facing the micro-hemispherical resonator (1).

3. The micro-hemispherical resonant gyroscope according to claim 1, characterized in that, It also includes a high-voltage electrode needle (4), and an electrode base (2) in which the edges of two adjacent side surfaces (22) intersect and extend toward the two adjacent side surfaces (22) to form a mounting surface (24). The high-voltage electrode needle (4) passes through the mounting surface (24) and abuts against the outer side of the micro-hemispherical resonator (1) in the receiving groove (21).

4. The micro-hemispherical resonant gyroscope according to any one of claims 1-3, characterized in that, The central anchor (11) of the micro-hemispherical resonator (1) is fixed at the center of the hole bottom of the receiving groove (21) by a conductive material.

5. The micro-hemispherical resonant gyroscope according to claim 4, characterized in that, Multiple process holes (25) are provided on the sidewall of the receiving groove (21). The multiple process holes (25) are arranged at intervals along the circumference of the receiving groove (21). The process holes (25) are used to allow the gap control wire (5) to pass through when the micro-hemispherical resonator (1) and the electrode base (2) are assembled. The gap control wire (5) abuts between the lip of the micro-hemispherical resonator (1) and the bottom wall of the receiving groove (21) so that the lip of the micro-hemispherical resonator (1) and the bottom wall of the receiving groove (21) have a first gap (12).

6. A method for assembling a micro-hemispherical resonant gyroscope as described in any one of claims 1-5, characterized in that, Includes the following steps: S1: Insert the excitation detection electrode needle (3) into the corresponding mounting hole (23) of the electrode base (2), and adjust and lock the pose of the multiple excitation detection electrode needles (3) so that after the micro-hemispherical resonator (1) is coaxially fixed in the receiving groove (21), the end face of the multiple excitation detection electrode needles (3) facing the outer side of the micro-hemispherical resonator (1) is equal to the second gap (13) of the outer side of the micro-hemispherical resonator (1); S2: Fix the excitation detection electrode needle (3) after the pose is locked into the corresponding mounting hole (23); S3: Position the micro-hemispherical resonator (1) coaxially in the receiving groove (21) of the electrode base (2), and lock the pose of the micro-hemispherical resonator (1) so that the lip of the micro-hemispherical resonator (1) has a first gap (12) with the bottom surface of the hole of the receiving groove (21). S4: Fix the micro-hemispherical resonator (1) after the pose is locked into the receiving groove (21) of the electrode base (2).

7. The assembly method of the micro-hemispherical resonant gyroscope according to claim 6, characterized in that, In step S1, the poses of the multiple excitation detection electrode needles (3) are adjusted and locked, specifically including: Design and manufacture a first fixture (6). The first fixture (6) includes a fixture body (61) and multiple positioning pins (62). One end of the fixture body (61) in the axial direction can extend into the receiving groove (21). Multiple positioning pins (62) are fixed on the fixture body (61) and are arranged at intervals along the circumference of the fixture body (61). When one end of the fixture body (61) in the axial direction extends into the receiving groove (21), multiple positioning pins (62) are tangentially abutted against the side wall of the receiving groove (21). The distance between the outer side of the fixture body (61) and the side wall of the receiving groove is equal to the distance between the geometric center of the inner end face of the excitation detection electrode needle (3) and the side wall of the receiving groove, so that the side wall of one end of the fixture body (61) in the axial direction forms the mounting and positioning surface of multiple excitation detection electrode needles (3). Position the lower part of the first fixture (6) in the receiving groove (21) of the electrode base (2), and adjust the position of the multiple excitation detection electrode needles (3) so that the multiple excitation detection electrode needles (3) all abut against the mounting and positioning surface of the fixture body (61), thereby completing the position locking of the multiple excitation detection electrode needles (3).

8. The assembly method of the micro-hemispherical resonant gyroscope according to claim 7, characterized in that, After adjusting and locking the poses of multiple excitation detection electrode needles (3), the method also includes: Design and manufacture a second fixture (7). The second fixture (7) includes a positioning ring (71) and multiple elastic positioning parts (72). The multiple elastic positioning parts (72) are arranged circumferentially on the inner sidewall of the positioning ring (71) and correspond one-to-one with multiple excitation detection electrode needles (3). The second fixture (7) can be fitted onto the electrode base (2) so that the excitation detection electrode needles (3) passing through the electrode base (2) abut against the positioning surface of the corresponding elastic positioning part (72) and the first fixture (6).

9. The assembly method of the micro-hemispherical resonant gyroscope according to claim 7, characterized in that, The pose of the micro-hemispherical resonator (1) is locked so that the lip of the micro-hemispherical resonator (1) has a first gap (12) with the bottom surface of the receiving groove (21), specifically including: Multiple gap control wires (5) are arranged circumferentially at intervals on the bottom surface of the receiving groove (21). The diameter of the gap control wires (5) is equal to the distance from the lip of the micro-hemispherical resonator (1) to the bottom surface of the receiving groove (21). The micro-hemispherical resonator (1) is then coaxially positioned in the receiving groove (21) of the electrode base (2), and its lip abuts against the multiple gap control wires (5).

10. The assembly method of the micro-hemispherical resonant gyroscope according to claim 7, characterized in that, The fixture body (61) includes a first positioning part (611) and a second positioning part (612). The second positioning part (612) is formed by extending radially outward from one end of the outer side of the first positioning part (611). The first positioning part (611) can be inserted into the receiving groove (21). Its sidewall forms a mounting positioning surface for multiple excitation detection electrode needles (3). The two end faces of the second positioning part (612) along the axial direction of the fixture body (61) form a contact surface that fits against the top surface of the electrode base (2). Multiple positioning pins (62) penetrate the two end faces of the second positioning part (612) along the axial direction of the fixture body (61). The first fixture (6) also includes a center pin (63). The center pin (63) cooperates with the inner cavity of the center anchor rod (11) of the hemispherical resonator. The first positioning part (611) has a central through hole that cooperates with the center pin (63). The center pin (63) passes through the central through hole. The micro-hemispherical resonator (1) is coaxially positioned within the receiving groove (21) of the electrode base (2), specifically including: With the second positioning part (612) of the fixture body (61) facing downwards, and the lower end of its center pin (63) locked in the inner cavity of the center anchor rod (11) of the micro-hemispherical resonator (1), and its axial position adjusted so that when the fixture body (61) is placed on the electrode base (2), the lip of the micro-hemispherical resonator (1) can abut against multiple gap control wires (5). When the fixture body (61) is placed on the electrode base (2), multiple positioning pins (62) extend into the receiving groove (21) and abut against the side wall of the receiving groove (21) so that the micro-hemispherical resonator (1) is coaxially positioned in the receiving groove (21) of the electrode base (2).

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