Adaptive mems inertial device support mounting structure

Abstract

This invention provides an adaptive MEMS inertial device support and mounting structure, belonging to the technical field of inertial technology. The adaptive MEMS inertial device support and mounting structure includes a mounting base, a support component, a support frame, and an inertial meter. The bottom end of the support component is fixedly connected to the mounting base, and the support component has a deformable portion, which is made of shape memory alloy. The support frame is located at the top of the support component and is in contact with the support component. The inertial meter is mounted on the top of the support frame. The deformable portion in the adaptive MEMS inertial device support and mounting structure provided by this invention uses shape memory alloy. When the ambient temperature changes, the deformable portion can actively generate a deformation amount matching the temperature, accurately compensating for the dimensional differences caused by the different thermal expansion coefficients of the mounting base, support frame, and inertial meter, thereby offsetting the internal stress caused by thermal expansion and contraction and preventing stress transmission to the inertial meter.

Description

Technical Field

[0001] This invention belongs to the technical field of inertial technology, specifically relating to an adaptive MEMS inertial device support and mounting structure. Background Technology

[0002] The MEMS inertial meter head is the core sensing body of a MEMS inertial sensor. It is a micro-mechanical sensing chip that undertakes inertial signal sensing after the peripheral signal processing circuit is removed and the bracket is installed. It is the core functional unit for inertial devices to realize acceleration and angular velocity detection.

[0003] Traditional inertial meter installation typically involves soldering the meter to a circuit board, which is then glued to the mechanical mechanism. During use, changes in ambient temperature can cause internal stress in the inertial meter due to the different thermal expansion and contraction coefficients of the circuit board and mechanical mechanism. This stress can compromise the structure's stability and reduce detection accuracy. Summary of the Invention

[0004] This invention provides an adaptive MEMS inertial device support and mounting structure, which aims to solve the technical problem that existing inertial meter mounting methods are prone to internal stress when the ambient temperature changes, thereby compromising structural stability and reducing detection accuracy.

[0005] To achieve the above objectives, the technical solution adopted by the present invention is: to provide an adaptive MEMS inertial device support and mounting structure, comprising: Mounting base; A support assembly, the bottom end of which is fixedly connected to the mounting base, the support assembly having a deformable part, the deformable part being a shape memory alloy; A support frame is located at the top of the support component and is in contact with the support component; An inertia meter is installed on top of the support frame.

[0006] In one possible implementation, the support assembly includes multiple support modules, each support module including two support units with a deformation interval between the two support units, each support unit having a support portion and a bending portion alternately arranged in the vertical direction, the top and bottom ends of the support unit being the support portions, the top support portion contacting the support frame, the bottom support portion being fixedly connected to the mounting base, at least the bending portion being a shape memory alloy, and all the bending portions constituting the deformation portion; In the initial state, the two support units are not in contact; in the deformed state, some of the support parts are in contact.

[0007] In one possible implementation, the bent portion is integrally formed with the support portion, and the bent portions of the two support units are opposite to each other.

[0008] In one possible implementation, the bent portions of two support units are joined together to form a feature structure, the cross-sectional shape of which is polygonal, circular, or elliptical.

[0009] In one possible implementation, the support module is provided with a fixing seat at both the top and bottom. The fixing seat has a mounting groove with an opening facing the support module, and a fixing block that cooperates with the mounting groove. The fixing block cooperates with the side wall of the mounting groove to clamp the support part.

[0010] In one possible implementation, the fixing base is further provided with a plug rod, which passes through the fixing base, the support portion and the fixing block respectively.

[0011] In one possible implementation, the fixing seat at the top of the support module contacts the support frame, and the fixing seat at the bottom of the support module is embedded in the mounting base.

[0012] In one possible implementation, a telescopic assembly is further included connecting the mounting base and the support frame, the telescopic assembly comprising: The limiting component is fixedly connected at its bottom end to the mounting base; The telescopic component is slidably connected to the limiting component in the vertical direction, and the top end of the telescopic component is fixedly connected to the supporting frame. Wherein, the maximum length of the telescopic component is less than the maximum length of the support component, and the minimum length of the telescopic component is greater than the minimum length of the support component.

[0013] In one possible implementation, the support components are evenly distributed along the outer contour of the support frame, and the telescopic component is located at the center below the support frame.

[0014] In one possible implementation, the mounting base is provided with a receiving groove with an opening facing the support frame, the receiving groove is provided with a limiting step, and the support frame is located in the receiving groove with its bottom in contact with the limiting step; The support component is located within the receiving groove.

[0015] In this embodiment, compared to existing technologies, the deformation section utilizes a shape memory alloy. When the ambient temperature changes, the deformation section actively generates a deformation amount matching the temperature, precisely compensating for the dimensional differences caused by the different thermal expansion coefficients of the mounting base, support frame, and inertial meter head. This counteracts the internal stress caused by thermal expansion and contraction, preventing stress transmission to the inertial meter head. The support assembly bears the vertical support force, maintaining the overall structural rigidity and load-bearing capacity while achieving flexible buffering and adaptive adjustment through the deformation section. This ensures a low-stress, stable connection between the mounting base and support frame, which is beneficial for guaranteeing the measurement accuracy of the inertial meter head. No additional drive is required during the deformation process, maintaining the geometric stability of the structure in a wide temperature range and ensuring the MEMS inertial meter head operates in an ideal state.

[0016] The support frame, acting as the intermediate load-bearing structure and buffer platform, evenly distributes the weight of the inertial meter onto the support components, preventing localized stress concentration caused by direct contact between the support components and the inertial meter, and protecting the micromechanical structure of the inertial meter from deformation. The support frame provides a larger mounting surface for the inertial meter, making it easier to ensure the accuracy of the inertial meter's installation posture compared to direct mounting with the support components, thus improving assembly consistency and the accuracy of the testing benchmark. Attached Figure Description

[0017] Figure 1 A top view schematic diagram of the adaptive MEMS inertial device support and mounting structure provided in an embodiment of the present invention; Figure 2 For along Figure 1 Schematic diagram of the cross-sectional structure along line AA; Figure 3 For along Figure 1 Schematic diagram of the cross-sectional structure of the middle BB line; Figure 4 for Figure 3 Enlarged structural diagram of section C; Figure 5 A three-dimensional structural diagram of the adaptive MEMS inertial device support and mounting structure provided in an embodiment of the present invention (hiding the support frame and inertial meter head).

[0018] Explanation of reference numerals in the attached figures: 10-Mounting base; 11-Receiving groove; 12-Limiting step; 21-Support module; 22-Support unit; 221-Support section; 222-Bending section; 24-Fixing seat; 25-Fixing block; 26-Insertion rod; 30 - Supporting frame; 40-Inertia meter head; 50 - Telescopic component; 51 - Limiting component; 52 - Telescopic component. Detailed Implementation

[0019] To make the technical problems to be solved, the technical solutions, and the beneficial effects of the present invention clearer, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present invention and are not intended to limit the present invention.

[0020] Please refer to the following: Figures 1 to 5 The adaptive MEMS inertial device support and mounting structure provided by the present invention will now be described.

[0021] The adaptive MEMS inertial device support and mounting structure includes a mounting base 10, a support component, a support frame 30, and an inertial meter head 40.

[0022] Mounting base 10 is a mechanical housing, which is the installation scenario for inertial meter head 40.

[0023] The bottom end of the support component is fixedly connected to the mounting base 10. The support component has a deformable portion, which is made of shape memory alloy. The deformable portion made of shape memory alloy material on the support component can be formed entirely by the support component or only partially by the support component.

[0024] Optionally, the shape memory alloy is a nickel-titanium based shape memory alloy (NiTi, Nitinol).

[0025] The support frame 30 is located at the top of the support assembly and is in contact with the support assembly. The support frame 30 may be made of ceramic, such as the PCB substrate commonly used in inertial devices.

[0026] The inertia meter 40 is mounted on top of the support frame 30.

[0027] During actual assembly, the mounting base 10 and the support components can be connected by laser welding, cold riveting, or adhesive bonding. The support frame 30 and the inertia meter head 40 can be connected by SMT reflow soldering or gold wire bonding.

[0028] It should be noted that the inertial meter 40 used in the installation structure of this embodiment is a miniature mechanical structure. Therefore, the height of the support component will not be too high, and it will not affect the bonding between the inertial meter 40 and the circuit on the base after installation to achieve electrical conduction.

[0029] The adaptive MEMS inertial device support and mounting structure provided in this embodiment, compared with the prior art, uses a shape memory alloy for the deformable part. When the ambient temperature changes, the deformable part can actively generate a deformation amount that matches the temperature, accurately compensating for the stress generated by the mounting base 10, support frame 30, and inertial meter 40. All stresses are transferred to the support component for release, avoiding dimensional differences caused by different coefficients of thermal expansion of materials, thereby offsetting the internal stress caused by thermal expansion and contraction. The support frame 30 bears the vertical support force. While maintaining the overall rigidity and load-bearing capacity of the structure, the deformable part achieves flexible buffering and adaptive adjustment, keeping the mounting base 10, support frame 30, and inertial meter 40 in a low-stress, stable connection state, which is beneficial to ensuring the measurement accuracy of the inertial meter 40. No additional drive is required during the deformation process of the deformable part, maintaining the geometric stability of the structure in a wide temperature environment, ensuring that the MEMS inertial meter 40 is in an ideal state during operation.

[0030] The support frame 30, acting as an intermediate load-bearing structure and buffer platform, evenly distributes the weight of the inertial meter 40 onto the support components, ensuring the stable installation of the inertial meter 40. The support frame 30 provides a larger mounting surface for the inertial meter 40, making it easier to ensure the accuracy of the inertial meter 40's installation posture compared to direct installation on the support components, thus improving assembly consistency and the accuracy of the testing benchmark.

[0031] In some embodiments, a specific implementation of the above-mentioned support component may adopt the following approach: Figures 2 to 5 The structure shown is as follows. The support assembly includes multiple support modules 21, each support module 21 includes two support units 22, and there is a deformation interval between the two support units 22. Each support unit 22 has support portions 221 and bending portions 222 arranged alternately in the vertical direction. The top and bottom ends of the support unit 22 are both support portions 221. The top support portion 221 is in contact with the support frame 30, and the bottom support portion 221 is fixedly connected to the mounting base 10. At least the bending portions 222 are made of shape memory alloy, and all the bending portions 222 constitute a deformation portion. In the initial state, the two support units 22 are not in contact; in the deformed state, some of the support parts 221 are in contact.

[0032] The support assembly consists of multiple support modules 21, each of which includes two support units 22, forming a symmetrical support structure. This ensures more even stress distribution during load-bearing and avoids the problems of off-center loading and tilting caused by single-point support. The two support units 22 are arranged side by side, providing sufficient support rigidity while ensuring that the overall structure has stronger vibration and impact resistance, thus meeting the high stability and environmental adaptability requirements of MEMS inertial devices.

[0033] The support unit 22 includes alternately arranged support portions 221 and bending portions 222. The support portions 221 are responsible for overall rigid load bearing, while the bending portions 222 are responsible for temperature deformation. The functional areas are clearly defined, balancing rigidity and flexibility. The bending portions 222, as the main deformation element, can undergo directional and controllable elastic deformation with temperature changes, compensating for dimensional differences caused by thermal expansion and contraction, and directionally releasing internal stress. The top and bottom ends of the support unit 22 are both support portions 221, ensuring reliable connection with the support frame 30, improving connection strength, and preventing detachment.

[0034] This embodiment describes at least the bending portion 222 as a shape memory alloy, which includes two cases: only the bending portion 222 is a shape memory alloy, and both the bending portion 222 and the support portion 221 are shape memory alloys.

[0035] In this embodiment, the multiple support modules 21 are completely identical, and the two support units 22 in each support module 21 are completely symmetrical. This ensures that when the temperature changes, the deformation amount and deformation trend of each support module 21 are the same, thereby realizing the horizontal lifting and lowering of the inertial meter head 40 and avoiding its skewness from affecting the measurement accuracy.

[0036] It is easy to imagine that, in order to ensure the installation stability and measurement accuracy of the inertial meter 40, multiple support modules 21 are evenly distributed at the bottom of the support frame 30.

[0037] In some embodiments, a specific implementation of the support unit 22 described above may adopt the following approach: Figures 2 to 5 The structure shown is such that the bent portion 222 and the support portion 221 are integrally formed, and the bent portions 222 of the two support units 22 are opposite to each other.

[0038] The support unit 22 is integrally formed, and the extension direction of the support part 221 is parallel to the vertical direction. The bent part 222 on each support unit 22 protrudes in a direction away from the other support unit 22. The two bent parts 222 that bend in opposite directions can be combined to form a support structure with symmetrical support force and deformation force. Compared with the support unit 22 that extends straight from top to bottom, it can improve the support stability before deformation and maintain the detection accuracy of the inertial meter 40.

[0039] The bent portions 222 of the two support units 22 are positioned opposite to each other, allowing for pre-reserved space for temperature deformation of each bent portion 222. Simultaneously, there is a deformation interval between the two support units 22. When the bent portion 222 deforms, the support portion 221 may become skewed; deformation may also occur if the support portion 221 is made of shape memory alloy. Through the deformation interval and the opposite orientation of the two bent portions 222, the shape memory alloy can fully exert its adaptive stress compensation function.

[0040] Meanwhile, the two bends 222 bend away from each other, increasing the overall width of the support module 21, resulting in higher support stability. This reduces the number of support modules 21 at the bottom of the support frame 30, lowering costs while ensuring the load-bearing capacity of the inertia meter 40.

[0041] The bending part 222 and the support part 221 are integrally formed, eliminating the weak points in the connection caused by splicing, welding, gluing and other separate connections, avoiding the breakage and loosening of the connection parts during deformation, ensuring the structural integrity of the support unit 22 after long-term load bearing and repeated deformation, and adapting to the high reliability requirements of inertial devices.

[0042] The one-piece molded support unit 22 requires no additional assembly, which reduces processing errors and assembly deviations, ensures the dimensional consistency of the support unit 22, and reduces the interference of assembly stress on the accuracy of the inertial meter 40.

[0043] The one-piece molding process has two types: (1) Both the support part 221 and the bending part 222 are made of shape memory alloy. A shape memory alloy blank is selected and hot-bent under the constraint of a mold. The support part 221 is kept in a straight line and the bending part 222 is bent at the designed angle in one step. After forming, shape memory solution is applied so that the bending part 222 obtains the shape memory effect and the support part 221 maintains high rigidity and dimensional stability. Finally, it is cooled and solidified.

[0044] (2) Only the bent part 222 is a shape memory alloy. The shape memory alloy material is placed into the mold cavity and positioned. Molten metal is poured into the position between every two adjacent shape memory alloys. After cooling, an integral structure is formed and then polished and finished.

[0045] In some embodiments, a specific implementation of the above-described bending portion 222 may employ, as follows: Figure 4 The structure shown. The bent portions 222 of the two support units 22 (two bent portions 222 at the same height) are joined together to form a feature structure. The cross-sectional shape of the feature structure is polygonal, circular or elliptical.

[0046] That is, each bend 222 is half of the above shape. Since there is a gap between the two support units 22, when actually observed, there will be a certain gap between the shapes formed by the two bends 222. However, when the two bends 222 are in contact, the above polygon, circle or ellipse can be formed.

[0047] The two bends 222 form identical shapes and bend in opposite directions. When the formed shape is circular or elliptical, without sharp corners, deformation is smoother and stress is lower, making it suitable for high-precision applications. When the formed shape is polygonal (triangle, rectangle, trapezoid, etc.), with sharp corners, it has higher load-bearing stiffness and positioning accuracy, making it suitable for applications with higher load-bearing capacity.

[0048] In this embodiment, the two bent portions 222 have a geometrically symmetrical shape with a regular cross section. When the ambient temperature changes, the bent portions 222 on the two support units 22 can change synchronously, avoiding disorderly deformation of the support module 21, accurately compensating for the dimensional difference caused by the difference in thermal expansion coefficients of the mounting base 10, support frame 30 and inertial meter 40, effectively releasing internal stress, and ensuring that the inertial meter 40 is in an ideal working state.

[0049] It is easy to imagine that the polygonal, circular, elliptical, and other shapes described in this embodiment are all shapes formed before the bending portion 222 is deformed, and the shape after deformation is not specifically limited.

[0050] In some embodiments, a specific installation method for the support module 21 described above can be as follows: Figures 2 to 5 The structure shown is as follows. The support module 21 is provided with a fixing seat 24 at both the top and bottom. The fixing seat 24 has a mounting groove with an opening facing the support assembly, and a fixing block 25 that cooperates with the mounting groove. The fixing block 25 cooperates with the side wall of the mounting groove to clamp the support part 221.

[0051] During installation of the support module 21, the support portions 221 at the top of the two support units 22 are inserted into the mounting grooves of the fixing seats 24 at the bottom of the support frame 30. The positions of these two support portions 221 are adjusted to be on opposite sides within the mounting grooves. Then, the fixing blocks 25 are inserted, snapping into the mounting grooves and clamping the support portions 221 in cooperation with the side walls of the mounting grooves. The installation process for the support portions 221 at the bottom of the two support units 22 is similar, inserting them into the mounting grooves of the fixing seats 24 at the top of the mounting base 10.

[0052] In this embodiment, when installing the fixing block 25, the support part 221 can provide a guide surface for the installation process of the fixing block 25, making it easier for the fixing block 25 to slide into the installation groove and reducing the assembly difficulty; at the same time, after the fixing block 25 is installed, one fixing block 25 can simultaneously clamp and fix two support parts 221, which is simple in structure and reliable in connection.

[0053] The aforementioned support unit 22 can be a plate-shaped structure or a strip-shaped structure. When the support unit 22 is a plate-shaped structure, the distribution direction of the two support units 22 is perpendicular to the plate surface of the support unit 22. The cross-section of the fixing seat 24 is quadrilateral, and the corresponding mounting groove is also quadrilateral. The opposite side walls of the mounting groove are the same as the width of the support unit 22 (parallel to the plate surface of the support unit 22), ensuring the maximum contact surface with the support part 221. At the same time, the corners of the inner wall of the mounting groove can limit the support part 221, restricting its displacement and preventing misalignment.

[0054] When the support unit 22 is a strip structure, its cross-section can be circular or quadrilateral. After the support part 221 is installed into the mounting groove, the contact area with the mounting groove is smaller. At this time, a limiting groove can be opened on the outer peripheral surface of the fixing block 25 or the side wall of the mounting groove. The shape of the limiting groove is the same as the cross-section of the strip support unit 22. After the support unit 22 is installed, it is located in the limiting groove, which can limit its displacement and prevent misalignment.

[0055] In some embodiments, an improved implementation of the aforementioned fixing base 24 may employ, as follows: Figures 2 to 5 The structure is shown. The fixing base 24 is also provided with a plug rod 26, which passes through the fixing base 24, the support part 221 and the fixing block 25 respectively.

[0056] It should be noted that both the fixing seat 24 at the bottom of the support frame 30 and the fixing seat 24 at the top of the mounting base 10 are equipped with insertion rods 26. Each fixing seat 24, the fixing block 25 inside the fixing seat 24, and the support part 221 installed on the fixing seat 24 are provided with through holes corresponding to the insertion rods 26. When the fixing block 25 and the support part 221 are installed into the fixing seat 24, their through holes correspond and communicate with each other. Inserting the insertion rods 26 through each through hole in sequence further connects the fixing seat 24, the fixing block 25, and the support part 221.

[0057] When the support part 221 is made of shape memory alloy, it may deform when the ambient temperature changes, making it easy to detach from the mounting groove. When the support part 221 is made of ordinary metal, the bending part 222 may deform due to changes in ambient temperature, potentially pulling the support part 221 out of the mounting groove. Considering the above situations, the insertion rod 26 is provided to create a limit, ensuring that the support part 221 cannot move up and down and detach. Even if the support part 221 deforms due to temperature, causing a decrease in the clamping force of the fixing block 25 on the support part 221, the insertion rod 26 can still forcibly lock the position, ensuring the stability of the connection to the support part 221.

[0058] Since the fixed base 24, the fixed block 25 and the support part 221 are all provided with through holes corresponding to the insertion rod 26, when the support part 221 is installed into the mounting groove, the support part 221 can be positioned and installed by corresponding the positions of each through hole, ensuring that the two support parts 221 are set opposite to each other in the mounting groove to form a symmetrical structure, improving the installation stability of the inertial meter 40 and ensuring the detection accuracy of the inertial meter 40.

[0059] Optionally, the insertion rod 26 can be a pin structure, which is small in size and does not occupy extra space, making it suitable for the miniaturization and integration requirements of inertial devices. There is no adhesive between the insertion rod 26 and the fixing base 24 and the fixing block 25, so it is not easy to loosen or crack when the ambient temperature changes, thus ensuring the reliability of the connection between the support part 221 and the fixing base 24.

[0060] In some embodiments, a specific installation method for the aforementioned fixing base 24 can be as follows: Figures 2 to 4 The structure shown is as follows: The fixing seat 24 at the top of the support module 21 contacts the support frame 30; the fixing seat 24 at the bottom of the support module 21 is embedded in the mounting base 10.

[0061] As described above, in embodiments where the fixing base 24 also needs to be fitted with the insertion rod 26, the fixing base 24 is partially embedded in the mounting base 10, thereby ensuring that it has a portion protruding from the mounting base 10 for installing the insertion rod 26.

[0062] By embedding the fixing base 24 into the mounting base 10, the contact area between the fixing base 24 and the mounting base 10 is increased, and the connection effect is more stable when connected by adhesive or other means.

[0063] The mounting base 24 is embedded in the mounting base 10, utilizing the space in the vertical direction of the mounting base 10 without increasing the height of the support components, thus meeting the requirements of miniaturization and high integration of inertial devices.

[0064] In this embodiment, the fixing base 24 is enclosed and limited by the mounting base 10, making it less prone to deformation and preventing displacement between it and the mounting base 10, which would affect the support stability of the support component. It can effectively resist strong vibration and high impact usage scenarios.

[0065] In some embodiments, an improved implementation of the above-described adaptive MEMS inertial device support and mounting structure can be as follows: Figures 2 to 3 The structure shown also includes a telescopic assembly 50 connecting the mounting base 10 and the support frame 30, the telescopic assembly 50 including a limiting member 51 and a telescopic member 52.

[0066] The bottom end of the limiting component 51 is fixedly connected to the mounting base 10.

[0067] The telescopic component 52 is slidably connected to the limiting component 51 in the vertical direction, and the top end of the telescopic component 52 is fixedly connected to the support frame 30.

[0068] The maximum length of the telescopic component 50 is less than the maximum length of the support component, and the minimum length of the telescopic component 50 is greater than the minimum length of the support component.

[0069] The limiting member 51 can be a guide sleeve fixed to the top of the mounting base 10, with a smooth guide hole inside; the telescopic member 52 can be a guide shaft fixed to the bottom of the support frame 30, with the lower end of the shaft extending into the guide sleeve to form an upper and lower sliding pair. Alternatively, the limiting member 51 can be a guide column fixed to the top of the mounting base 10, with a smooth guide surface on the outer wall; the telescopic member 52 can be a sliding sleeve fixed to the bottom of the support frame 30, with the sleeve fitted over the outside of the column to form an upper and lower sliding pair.

[0070] When the support component deforms, the support frame 30 moves horizontally up and down (the value is very small). In order to limit the deformation of the support component to be too large or too small, a telescopic component 50 is set. When the deformation of the support component is too large, the telescopic component 50 will be pulled to its maximum stroke, thereby limiting the support component from rising further; when the deformation of the support component is too small, the telescopic component 50 will be pressed to its minimum length, thereby limiting the support frame 30 from falling further.

[0071] In this embodiment, the maximum length of the telescopic component 50 is less than the maximum length of the support component. When the structure is under tension, the telescopic component 50 reaches its upper limit first, forcibly restricting the support frame 30 from moving upward, so that the shape memory alloy part will not be excessively stretched and deformed. Similarly, the support frame 30 can also be restricted from moving downward, so that the shape memory alloy part will not be excessively compressed, thus preventing the shape memory alloy from exceeding the deformation range, preventing failure and permanent plastic deformation, and ensuring that the deformation process of the shape memory alloy under temperature is controllable and recoverable.

[0072] The telescopic component 52 can only slide in the vertical direction, providing vertical guidance for the support frame 30, suppressing the horizontal movement and torsion of the support frame 30, ensuring the stability of the inertial meter 40's attitude and preventing reference deviation, thus improving measurement accuracy. The telescopic component 50 only functions when the support frame 30 is near its limit position during lifting and lowering. Within the normal temperature deformation range, it will expand and contract with the lifting and lowering process of the support frame 30 without affecting the deformation process of the support component, ensuring the release of internal stress.

[0073] In some embodiments, a specific distribution of the support component and the telescopic component 50 may be as follows: Figure 5 The structure is shown. The support components are evenly distributed along the outer contour of the support frame 30, and the telescopic component 50 is located at the center below the support frame 30.

[0074] The support components are evenly arranged along the outer contour of the support frame 30, and the vertical load is equally distributed to each support module 21; the weight of the inertial meter 40 and the external load will not be biased to one side, avoiding local overload and inconsistent support deformation, ensuring that the support frame 30 always maintains a horizontal and stable state, and the installation reference surface accuracy is constant.

[0075] When the temperature changes, all the support components deform synchronously, and the dimensional difference caused by thermal expansion and contraction is compensated uniformly as a whole. There will be no situation of excessive or insufficient local compensation, which ensures the horizontal lifting of the support frame 30 and will not cause the support frame 30 to tilt. At the same time, the internal stress is released uniformly, protecting the sensitive structure inside the inertial meter head 40 from being disturbed.

[0076] In this embodiment, the telescopic component 50 is located at the center, and its guide axis coincides with the center of gravity axis of the support frame 30. This prevents eccentric torque from being generated when the support frame 30 moves up and down, thus avoiding torsion and swaying. The central guidance improves the overall structural stability and enhances its resistance to torsion.

[0077] The telescopic component 50 occupies the central position and does not interfere with the support component; the support component is arranged along the outer contour of the support frame 30, leaving sufficient space in the middle to place the telescopic component 50, resulting in a compact structure and high space utilization.

[0078] In some embodiments, an improved implementation of the mounting base 10 may employ, as follows: Figures 2 to 5 The structure shown is as follows. The mounting base 10 is provided with a receiving groove 11 with an opening facing the support frame 30. A limiting step 12 is provided in the receiving groove 11. The support frame 30 is located in the receiving groove 11 and its bottom contacts the limiting step 12. The support assembly is located in the receiving groove 11.

[0079] The receiving groove 11 is adapted to the shape of the support frame 30 and can limit the movement of the support frame 30 on its outer periphery. During assembly, it can ensure that the support frame 30 falls quickly into the designated area, reducing assembly difficulty and improving assembly efficiency. The limiting step 12 can limit the depth of the support frame 30 in the receiving groove 11, thereby ensuring that there is a sufficient gap between the bottom surface of the support frame 30 and the receiving groove 11 to accommodate the support components.

[0080] It should be noted that, since the support frame 30 is placed on the limiting step 12, when the above-mentioned telescopic component 50 is provided, the telescopic component 50 limits the upper limit position of the support frame 30, and the limiting step 12 limits the lower limit position of the support frame 30.

[0081] It is easy to see that the telescopic component 50 and the limiting step 12 can be set individually or simultaneously. When set simultaneously, the limiting step 12 and the telescopic component 50 have overlapping functions, but the limiting effect is better. When set individually, setting the telescopic component 50 alone can limit the vertical movement, while setting the limiting step 12 alone can limit its downward movement and also facilitate installation.

[0082] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. An adaptive MEMS inertial device support and mounting structure, characterized in that, include: Mounting base; A support assembly, the bottom end of which is fixedly connected to the mounting base, the support assembly having a deformable part, the deformable part being a shape memory alloy; A support frame is located at the top of the support component and is in contact with the support component; An inertia meter is installed on top of the support frame.

2. The adaptive MEMS inertial device support and mounting structure as described in claim 1, characterized in that, The support assembly includes multiple support modules, each support module includes two support units, and there is a deformation interval between the two support units. Each support unit has a support portion and a bending portion that are alternately arranged in the vertical direction. The top and bottom ends of the support unit are both support portions. The support portion at the top end is in contact with the support frame, and the support portion at the bottom end is fixedly connected to the mounting base. At least the bending portion is a shape memory alloy, and all the bending portions constitute the deformation portion. Initially, the two support units are not in contact; In the deformed state, part of the support portion comes into contact.

3. The adaptive MEMS inertial device support and mounting structure as described in claim 2, characterized in that, The bending portion and the supporting portion are integrally formed, and the bending portions of the two supporting units are opposite to each other.

4. The adaptive MEMS inertial device support and mounting structure as described in claim 3, characterized in that, The bent portions of the two support units are joined together to form a feature structure, the cross-sectional shape of which is polygonal, circular or elliptical.

5. The adaptive MEMS inertial device support and mounting structure as described in claim 2, characterized in that, The support module is provided with a fixing seat at both the top and bottom. The fixing seat has a mounting groove with an opening facing the support module, and a fixing block that cooperates with the mounting groove. The fixing block cooperates with the side wall of the mounting groove to clamp the support part.

6. The adaptive MEMS inertial device support and mounting structure as described in claim 5, characterized in that, The fixing base is also provided with a plug rod, which passes through the fixing base, the support part and the fixing block respectively.

7. The adaptive MEMS inertial device support and mounting structure as described in claim 5, characterized in that, The fixing seat at the top of the support module contacts the support frame, and the fixing seat at the bottom of the support module is embedded in the mounting base.

8. The adaptive MEMS inertial device support and mounting structure as described in claim 1, characterized in that, It also includes a telescopic assembly connecting the mounting base and the support frame, the telescopic assembly comprising: The limiting component is fixedly connected at its bottom end to the mounting base; The telescopic component is slidably connected to the limiting component in the vertical direction, and the top end of the telescopic component is fixedly connected to the supporting frame. Wherein, the maximum length of the telescopic component is less than the maximum length of the support component, and the minimum length of the telescopic component is greater than the minimum length of the support component.

9. The adaptive MEMS inertial device support and mounting structure as described in claim 8, characterized in that, The support components are evenly distributed along the outer contour of the support frame, and the telescopic component is located at the center position below the support frame.

10. The adaptive MEMS inertial device support and mounting structure as described in claim 1, characterized in that, The mounting base is provided with a receiving groove with an opening facing the support frame. A limiting step is provided in the receiving groove. The support frame is located in the receiving groove and its bottom contacts the limiting step. The support component is located within the receiving groove.

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